CN108693034B - Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film - Google Patents
Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film Download PDFInfo
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- CN108693034B CN108693034B CN201810406313.5A CN201810406313A CN108693034B CN 108693034 B CN108693034 B CN 108693034B CN 201810406313 A CN201810406313 A CN 201810406313A CN 108693034 B CN108693034 B CN 108693034B
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- 238000012360 testing method Methods 0.000 title claims abstract description 46
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 title claims abstract description 20
- 239000010408 film Substances 0.000 claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- 239000010409 thin film Substances 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims description 8
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 30
- 238000000034 method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 10
- 230000008859 change Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000004154 testing of material Methods 0.000 abstract description 2
- 238000011160 research Methods 0.000 description 4
- 230000006399 behavior Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000002929 anti-fatigue Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000009864 tensile test Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012999 compression bending Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
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- 230000032798 delamination Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 239000002114 nanocomposite Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0075—Strain-stress relations or elastic constants
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
Abstract
The invention relates to a material testing technology, in particular to an auxiliary device for mechanical property in-situ testing of a concentrated load of a flexible substrate film. The method loads concentrated load on the film test piece to cause the deformation of the substrate to be spherical, the curvature change and other complex deformations, and lays a foundation for analyzing parameters of film-substrate bonding performance, failure residual stress, residual strain and the like of the film material. The invention can reproduce the working condition that the thin film material is impacted by hard points, measure the deformation chemistry, the deformation mechanism and the mechanical property in the whole process in situ, and is a powerful test tool for researching the elastic modulus, the internal stress and the film-substrate binding energy of the novel thin film material under the working condition.
Description
Technical Field
The invention relates to the technical field of material testing, in particular to an auxiliary device for mechanical property in-situ testing of concentrated loads of a flexible substrate film, which is matched with equipment such as a scanning electron microscope, an atomic force microscope, an optical microscope and the like.
Background
At present, nano composite materials and film materials have the advantages of good mechanical properties, wear resistance, high temperature resistance and the like, and are widely applied to various fields, such as surface coatings, optical films, Low-E films, magnetic storage media, Micro Electro Mechanical Systems (MEMS) and the like. If the thin film device delaminates, cracks, bulges, etc. during use, indicating structural failure and loss of functionality of the device, this is to be avoided in practical applications. Therefore, the research on the mechanical property of the film and the test on the anti-fatigue capability are very important. However, because the difference between the mechanical properties of the micro-nano scale material and the macro material is large, the traditional macro tensile testing machine for analyzing the mechanical parameters of the material, such as yield strength, breaking strength, elastic modulus and the like, can not meet the research requirements of the micro-nano scale material, especially the film material. Moreover, the microstructure of the film material cannot be observed in real time by using the traditional tensile test, and only the section of the material can be observed and researched by using the microscopic technology. The research on the change of the microscopic morphology and the damage condition of the film material under the external force loading state has important significance for understanding the mechanical behaviors of the material, such as fracture, delamination and the like. Therefore, it is very urgent and important to realize in-situ monitoring of the thin film material under a load condition.
At present, many domestic and foreign researches are focused on the development of in-situ film stretching/compressing devices. Such as: CN102346117 discloses a little radian level precision normal position torsion material mechanical properties testing arrangement under scanning electron microscope, the motor drives the driving dental forceps through the worm gear drive and rotates a little, and driven dental forceps is equipped with torque sensor test torsion deformation and arouses stress strain data. CN102359912 discloses an in-situ tensile/compressive material mechanics test platform under a scanning electron microscope based on quasi-static loading, and the two motors are used for driving to realize microscopic observation of the tensile and compressive loaded material. In the prior art, the appearance evolution of the film in a stretching state and the generation and propagation of microcracks are researched, so that the mechanical parameters of the film, such as yield strength, breaking strength and the like, are calculated, and the anti-fatigue capability and the service life of the film are estimated. In the aspect of compressive load, the problem of wrinkle or buckling formation of an elastic film under uniaxial load on a flexible substrate is mainly researched, and mechanical parameters such as elastic modulus, internal stress and binding energy of the film are calculated through the problem. For example, the device for testing mechanical properties of a material in a pull-down compression-bending composite load mode of a microscope disclosed in CN102384875 drives an elbow to feed laterally, so that a test piece is bent and deformed.
CN102331376 discloses a cross-scale micro-nano-scale in-situ three-point bending mechanical property tester, which transmits motor power to a screw rod through two-stage worm and gear transmission to drive a slide block and a hammer head to move linearly.
However, the existing in-situ tester has problems: (1) the simulation working condition is not comprehensive, complex deformation and the like caused by composite loads such as bending, stretching and warping and the like caused by concentrated force loads cannot be simulated, and the thin film material is often subjected to impact load in the actual use process; but also can not measure the impact of concentrated load on the film material, the film-substrate binding capacity, the failure mode and the like; (2) the in-situ test auxiliary device and the atomic force microscope have mutually independent data, so that the whole dynamic process of deformation and even failure of the thin film material under load is difficult to reproduce, and the real in-situ observation is not realized; (3) the mechanism is complicated, so that the observation angle of the microscope is not good, for example, the deformation process of the test pieces CN102384875 and CN102331376 is inconvenient to observe, and the test piece CN102331376 is pressed on the two supporting heads (movable ends) by the hammer head, so that the detection of the film material sample cannot be applied.
Disclosure of Invention
In view of the above problems, the invention aims to provide an in-situ testing auxiliary device for mechanical properties of a concentrated load of a flexible substrate film, which can measure a test piece with complex deformation in situ.
In order to achieve the purpose, the invention adopts the scheme that: the utility model provides a mechanical properties normal position test auxiliary device of flexible base film concentrated load which the difference lies in: the device comprises a clamping mechanism, a film jacking mechanism, a loading mechanism and a precision detection unit; the clamping mechanism consists of a frame, a pressing sheet connected to the frame and a fastening bolt, wherein the frame is of a hollow structure, the thin film test piece is arranged on the frame, and the fastening bolt is screwed down to tightly press the thin film test piece between the pressing sheet and the frame; the membrane pushing mechanism consists of a pushing ball, a connecting rod, a ball head push rod and a pin shaft, wherein a rod body of the connecting rod is hinged on the frame, the head end of the connecting rod is connected with the pushing ball, the pushing ball is positioned in the hollow central position of the frame, the head end of the connecting rod is connected with the pushing ball, the tail end of the connecting rod is connected with the ball head push rod, and the ball head push rod is matched with the loading; the loading mechanism comprises a connecting frame, a precise direct-current servo motor, a coupler, a driving wheel, a supporting plate and a bearing, wherein the supporting plate is connected to the side wall of a frame of the clamping mechanism; the precise detection unit comprises a photoelectric encoder, a grating ruler, a collection card and a PC (personal computer), wherein the photoelectric encoder is coaxially connected with a precise direct current servo motor of the loading mechanism, a grating ruler reading head is arranged on the frame, a grating ruler main ruler is arranged on a connecting rod body, the photoelectric encoder and the grating ruler collect data through the collection card and transmit the data to the PC for processing, and the PC is communicated with the microscope host.
Preferably, the tail end of the connecting rod is provided with a ball head, and the ball head is embedded into a groove of the driving wheel.
Preferably, the contact surface of the pressing sheet and the film test piece is rolled with patterns.
Preferably, the connecting rod is arranged in a zigzag shape.
Preferably, the frame and the connecting frame are provided with threaded holes which can be mounted into a cavity of an electron microscope.
Preferably, the precision servo direct current motor is equipped with a speed reducer.
The jacking ball loads concentrated load on the film test piece under the driving of the motor to cause the deformation of the substrate to be spherical, the curvature change and other complex deformations, and lays a foundation for analyzing parameters of film-substrate bonding performance, failure residual stress, residual strain and the like of the film material. Meanwhile, the atomic force microscope directly observes the microstructure change of the sample in the gradual loading process, the resolution reaches the nanometer level, and the macroscopic mechanical property of the sample is obtained, so that the relationship between the macroscopic mechanical behavior and the microscopic mechanism of the material can be quantitatively researched. The invention can reproduce the working condition that the thin film material is impacted by hard points, measure the deformation chemistry, the deformation mechanism and the mechanical property in the whole process in situ, and is a powerful test tool for researching the elastic modulus, the internal stress and the film-substrate binding energy of the novel thin film material under the working condition.
Drawings
FIG. 1 is a three-dimensional schematic diagram of a clamped film test piece according to an embodiment of the invention;
FIG. 2 is a schematic top three-dimensional view of a test piece without a clamping film according to an embodiment of the present invention;
FIG. 3 is a bottom three-dimensional view of a test piece without a clamping film according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a precision detecting unit according to an embodiment of the present invention.
The notation in the figure is:
1-clamping mechanism, 11-frame, 12-tabletting.
2-membrane pushing mechanism, 21-pushing ball, 22-connecting rod, 23-ball head push rod and 24-pin shaft.
3-loading mechanism, 31-connecting frame, 32-precision DC servo motor, 33-coupler, 34-driving wheel, 35-supporting plate and 36-bearing.
4-precision detection unit, 41-photoelectric encoder, 42-acquisition card, 43-grating ruler, 44-microscope host, 45-PC, 46-driver
5-thin film test piece.
Detailed Description
For a better understanding of the present invention, the technical solutions of the present invention will be further explained below with reference to the accompanying drawings and detailed description, referring to fig. 1 to 4.
The mechanical property in-situ test auxiliary device for the concentrated load of the flexible substrate film, which is implemented by the invention, mainly comprises four components, namely a clamping mechanism 1, a film jacking mechanism 2, a loading mechanism 3 and a precision detection unit 4. The clamping mechanism 1 comprises a frame 11 and a pressing sheet 12, the frame 11 is of a hollow structure, the thin film test piece 5 is arranged on the frame 11, the pressing sheet 12 and the frame 11 are correspondingly provided with threaded holes, and the thin film test piece 5 is tightly pressed between the pressing sheet 12 and the frame 11 by tightening a fastening bolt. The clamping mechanism 1 is mainly used for reliably clamping the flexible substrate film material 5, and keeping the peripheral side edges of the test piece static in the test process, so that the pressing piece 12 is a circular ring-shaped sheet which is firm in clamping, and patterns are rolled on the surface of the pressing piece 12 which is in contact with the film test piece 5. And for the cooperation observation, the frame diagonal angle is equipped with the screw hole of mountable to the electron microscope cavity.
In order to load concentrated load on the film test piece, the film pushing mechanism 2 is arranged and comprises a pushing ball 21, a connecting rod 22, a ball head push rod 23 and a pin shaft 24, the pushing ball 21 is in point contact with the film test piece 5, the bottom of the pushing ball 21 is connected to the head end of the connecting rod 22, the middle rod body position of the connecting rod 22 is hinged to the frame 11 through the pin shaft 24, the head end of the connecting rod 22 is connected with the pushing ball 21, the tail end of the connecting rod 22 is connected with the ball head push rod 23, and the ball head push rod. In order to save height space, the connecting rod 22 is arranged in a zigzag shape. The top ball 21 is positioned at the hollow center of the frame 11, and the loading process is uniformly stressed.
Loading mechanism 3 is including link 31, accurate direct current servo motor 32, shaft coupling 33, drive wheel 34, layer board 35, bearing 36, layer board 35 mainly supports whole loading mechanism, layer board 35 side turn-ups, through bolted connection 11 lateral walls of frame, be equipped with drive wheel 34 through bearing 36 on the layer board 35, be equipped with the spiral groove on the 34 circumference lateral walls of drive wheel, the end of 2 bulb push rods 23 of apical membrane mechanism is equipped with the bulb, cooperate with it in the recess of bulb embedding drive wheel 34, 36 assembly are passed through on layer board 35 in drive wheel 34 bottom, the bulb can roll in the recess and reduce the jamming. The height difference of the spiral groove is the rising height of the top ball 21 at the head end of the connecting rod 22. The driving wheel 34 is driven by a precise direct current servo motor 32, the precise direct current servo motor 32 is fixedly arranged on the connecting frame 31, in order to realize the micro-deformation of the loading of the test piece, the precise direct current servo motor 32 is provided with a speed reducer, and the output shaft of the precise direct current servo motor 32 is axially connected with the driving wheel 34 through a coupler 33.
The precise detection unit 4 comprises a photoelectric encoder 41, a collection card 42, a grating ruler 43, a PC 45 and a driver 46, wherein the photoelectric encoder 41 is coaxially connected with the precise DC servo motor 32 of the loading mechanism, a reading head of the grating ruler 43 is arranged on the frame 11, and a main ruler of the grating ruler 43 is arranged on the rod body of the connecting rod 22. The PC 45 drives the precise direct current servo motor 32 through a driver 46, the photoelectric encoder 41 can provide feedback signals of speed and rotating speed aiming at pulse or direction control of the precise direct current servo motor 32, precise closed-loop control is achieved, the grating ruler 43 detects the lifting height difference of the connecting rod 22, and the lifting height difference is converted into the lifting height difference of the jacking ball 21 due to the rigidity of the grating ruler. The photoelectric encoder 41 and the grating ruler 43 collect data through the acquisition card 42 and transmit the data to the PC 44 for analysis and calculation, and the PC 44 communicates with the microscope host 44, so that the synchronization of the in-situ test auxiliary device and the atomic force microscope data is realized, the whole dynamic process of the thin film material 5, which is deformed by load and even fails, is recorded, and the in-situ observation in the real sense is realized. Therefore, the relationship between macroscopic mechanical behavior and microscopic mechanism of the material can be quantitatively researched. The invention can reproduce the working condition that the thin film material is impacted by hard points, measure the deformation chemistry, the deformation mechanism and the mechanical property in the whole process in situ, and is a powerful test tool for researching the elastic modulus, the internal stress and the binding energy of the novel thin film material under the working condition.
Claims (5)
1. An auxiliary device for mechanical property in-situ test of concentrated load of a flexible substrate film is characterized by comprising a clamping mechanism (1), a film jacking mechanism (2), a loading mechanism (3) and a precision detection unit (4);
the clamping mechanism (1) consists of a frame (11), a pressing sheet (12) connected to the frame (11) and a fastening bolt, the frame (11) is of a hollow structure, the thin film test piece (5) is arranged on the frame (11), and the fastening bolt is screwed down to press the thin film test piece (5) between the pressing sheet (12) and the frame (11);
the film pushing mechanism (2) consists of a pushing ball (21), a connecting rod (22), a ball head push rod (23) and a pin shaft (24), the rod body of the connecting rod (22) is hinged to the frame (11), the head end of the connecting rod (22) is connected with the pushing ball (21), the pushing ball (21) is located in the hollow center of the frame (11), the head end of the connecting rod (22) is connected with the pushing ball (21), the tail end of the connecting rod (22) is connected with the ball head push rod (23), and the ball head push rod (23) is matched with the loading mechanism (3);
the loading mechanism (3) comprises a connecting frame (31), a precise direct current servo motor (32), a coupler (33), a driving wheel (34), a supporting plate (35) and a bearing (36), the supporting plate (35) is connected to the side wall of the frame (11) of the clamping mechanism (1), the precise direct current servo motor (32) is fixedly installed on the connecting frame (31), the precise direct current servo motor (32) is provided with a speed reducer, an output shaft of the precise direct current servo motor is axially connected with the driving wheel (34) through the coupler (33), the circumferential side wall of the driving wheel (34) is provided with a spiral groove, the tail end of a ball head push rod (23) of the film jacking mechanism (2) is matched with the groove of the driving wheel (34), and the bottom of the driving wheel (34) is assembled on the supporting plate (;
the precise detection unit (4) comprises a photoelectric encoder (41), a grating ruler (43), an acquisition card (42) and a PC (45), wherein the photoelectric encoder (41) is coaxially connected with a precise direct current servo motor (32) of the loading mechanism (3), a reading head of the grating ruler (43) is installed on the frame (11), a main ruler of the grating ruler (43) is installed on a rod body of the connecting rod (22), the photoelectric encoder (41) and the grating ruler (43) acquire data through the acquisition card (42) and transmit the data to the PC (45) for processing, and the PC (45) is communicated with a microscope host (44).
2. The auxiliary device for the mechanical property in-situ test of the concentrated load of the flexible substrate film as claimed in claim 1, wherein a ball head is arranged at the tail end of a ball head push rod (23) of the top film mechanism 2, and the ball head is embedded in a groove of a driving wheel (34).
3. The mechanical property in-situ test auxiliary device for the concentrated load of the flexible substrate film as claimed in claim 1, wherein the contact surface of the pressing sheet (12) and the film test piece (5) is rolled with patterns.
4. The mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film as claimed in claim 1, wherein the connecting rod (22) is arranged in a zigzag shape.
5. The mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film as claimed in claim 1, wherein the frame (11) and the connection frame (31) are provided with threaded holes which can be installed into the cavity of an electron microscope.
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| CN201810406313.5A CN108693034B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film |
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| CN201810406313.5A CN108693034B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film |
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| CN108693034A CN108693034A (en) | 2018-10-23 |
| CN108693034B true CN108693034B (en) | 2021-06-04 |
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| CN110749516B (en) * | 2019-10-09 | 2021-08-20 | 清华大学 | Soft film fatigue tester device |
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