CN105606459B - Torsion-testing apparatus in situ and observation device for micro/nano-scale material - Google Patents
Torsion-testing apparatus in situ and observation device for micro/nano-scale material Download PDFInfo
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- CN105606459B CN105606459B CN201610079194.8A CN201610079194A CN105606459B CN 105606459 B CN105606459 B CN 105606459B CN 201610079194 A CN201610079194 A CN 201610079194A CN 105606459 B CN105606459 B CN 105606459B
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- 238000012360 testing method Methods 0.000 title claims abstract description 99
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 44
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 36
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims 1
- 238000003384 imaging method Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/22—Investigating strength properties of solid materials by application of mechanical stress by applying steady torsional forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0021—Torsional
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
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Abstract
The present invention provides a kind of torsion-testing apparatus in situ for micro/nano-scale material and observation device, the torsion-testing apparatus in situ for micro/nano-scale material includes：Clamping unit, for gripping test sample (14), which includes two collets；Loading unit, for driving test sample (14) to reverse, which includes the micromotor (1) for capableing of output torque, which connect with one end of the clamping unit；Detecting signal unit, the torque being subject to for detecting test sample (14), the detecting signal unit are connect with the other end of the clamping unit.This is used for the torsion-testing apparatus small volume in situ of micro/nano-scale material, simple in structure.The torsion-testing apparatus in situ for being used for micro/nano-scale material can also match to form microscopic appearance observation device with microscopic imaging instrument (such as scanning electron microscope SEM, light microscope OM).
Description
Technical field
The present invention relates to torsion test apparatus field, specifically a kind of torque measuring trial assembly in situ for micro/nano-scale material
It sets or a kind of microscopic appearance of torsion-testing apparatus in situ containing this for micro/nano-scale material observes device.
Background technology
With the development of nanotechnology, micro Nano material be widely used in aerospace, auto industry, semiconductor,
Biomedicine, MEMS, macromolecule, solar energy/fuel cell chemical industry, oil, rock, microelectronics, microsensor, semiconductor material
Expect, automatically control, in aerospace, auto industry and machine tool.The classical mechanics of the micro mechanical property of material and macroscopic view
There are prodigious differences for performance.The torsion Mechanics Performance Testing of material in many performance parameters of the micro nanometer mechanics test of material
It is very important one of test object.
Micro nanometer mechanics Performance Testing Technology in situ has been developed in recent years cutting edge technology, by national governments and grinds
Study carefully the highest attention of mechanism.Compared to the measuring technology of macroscopic view, in-situ testing technique can be right under the observation of electron microscope
Test specimen carries out load in situ, can carry out many advantages such as home position observation to the microdeformation and damage process of material simultaneously.So
And in-situ testing technique at this stage and instrument, it focuses mostly in the stretching and flexural deformation of material, the torsion of material is tested
It pays close attention to less.Main reason is that torsion test platform has harsh requirement to the miniaturization of equipment, precision, material assembly etc.,
And need to ensure the Electro Magnetic Compatibility and vacuum compatibility of test device and working cavity during the experiment, these reasons limit
The fast development of micro-nano torsion mechanics measuring technology is made.
Invention content
In the prior art without micro-nano torsion test equipment in situ in order to overcome the problems, such as, the present invention provides one kind
For the torsion-testing apparatus in situ and observation device of micro/nano-scale material, this is used for the torsion-testing in situ of micro/nano-scale material
Device volume is smaller, simple in structure, can test the sample of sizes, and adaptability is stronger, and space structure is tight
It gathers, convenient for observation.The torsion-testing apparatus in situ for being used for micro/nano-scale material can also be with microscopic imaging instrument (as scanned electricity
Sub- microscope SEM, light microscope OM etc.) it matches to form microscopic appearance observation device, it is directed to three-dimensional macro to carry out
Test specimen trans-scale in-situ torsion test, the present invention also can to material torque effect under microdeformation and damage process into
Row home position observation, and the mechanical behavior and failure mechanism of material and its product under micro-nano-scale are disclosed to a certain extent.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of torsion-testing apparatus in situ for micro/nano-scale material, the torque in situ for micro/nano-scale material
Test device includes：
Clamping unit, for gripping test sample, which includes two collets；
Loading unit, for driving test sample to reverse, which includes the micromotor for capableing of output torque, should
Loading unit is connect with one end of the clamping unit；
Detecting signal unit, the torque being subject to for detecting test sample, the detecting signal unit and the clamping list
The other end connection of member.
A kind of microscopic appearance observes device, contains the above-mentioned torsion-testing apparatus in situ for micro/nano-scale material, this
Microscopic appearance observe device be light microscope or scanning electron microscope, the microscopic appearance observe device object lens position with
This is used for corresponding, microscopic appearance observation dress between described two collets of the torsion-testing apparatus in situ of micro/nano-scale material
Set the test sample that can be observed between described two collets.
The beneficial effects of the invention are as follows：
1, support plate horizontal on pedestal can be slided and can lock, thus the initial length of the sample of a diameter of micro-nano size
Degree can be with sets itself.
2, during the test, the centering of test sample is very crucial to torsion-testing.The present invention is proposed using essence
Close stepper motor drives ball-screw, and then connecting rod is driven to complete the centering to test sample.Meanwhile test sample centering is complete
Cheng Hou, for convenience of the torsion of sample, ball screw drive systems slip away workspace.
3, during the test, test sample is constantly near the centre position of device, is also in microscope and is convenient for
In the range of observation, it is fixed on one end this avoids sample in existing test device and then the defect of test image offset occurs,
Test process is set to be convenient for.
4, entire test device is simple in structure, small volume, convenient in the narrow of the Image-forming instruments such as scanning electron microscope SEM
It works in small space, there is good structural compatibility, vacuum compatibility and Electro Magnetic Compatibility.
5, the trans-scale in-situ torsion test for three-dimensional micro-nano sample can be carried out under the observation of all kinds of Image-forming instruments,
Can also home position observation be carried out to microdeformation of the material under torque effect and damage process, and to a certain extent through the invention
Disclose the mechanical behavior and failure mechanism of material and its product under micro-nano-scale.
Description of the drawings
The accompanying drawings which form a part of this application are used to provide further understanding of the present invention, and of the invention shows
Meaning property embodiment and its explanation are not constituted improper limitations of the present invention for explaining the present invention.
The front view that Fig. 1 is this for the torsion-testing apparatus in situ of micro/nano-scale material.
Fig. 2 is the result schematic diagram of collet.
Fig. 3 is the nut of ball-screw and the coupling part schematic diagram of connecting rod.
Reference numeral in figure：1, micromotor；2, shaft coupling；3, retarder；4, left rail；5, connecting rod；6, right guide rail；
7, torque sensor；8, support plate；9, ball-screw；10, precision stepper motor；11, pedestal；12, screw；13, pressing plate；14、
Test sample；15, supporting plate；16, bolt.
Specific implementation mode
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
A kind of torsion-testing apparatus in situ for micro/nano-scale material, including：
Clamping unit, for gripping Filamentous or linear test sample 14, which includes two collets；
Loading unit, for driving test sample 14 to reverse, which includes the micromotor for capableing of output torque
1, which connect with one end of the clamping unit；
Detecting signal unit, the torque being subject to for detecting test sample 14, the detecting signal unit and the clamping
The other end of unit connects, as shown in Figure 1.
Due to using micromotor 1 in the loading unit, so this is used for the torsion-testing in situ of micro/nano-scale material
The torsion-testing in situ that device is suitable for micro/nano-scale material is used.In the present embodiment, the loading unit, clamping unit and letter
Number detection is single sets gradually from left to right in the horizontal direction, and described two collets are symmetrical set, which includes levels
The pressing plate 13 and supporting plate 15, pressing plate 13 and supporting plate 15 of folded setting are connected by screw 12, which can will be surveyed by screw 12
The have a try end of sample 14 is clamped and fastened between pressing plate 13 and supporting plate 15, as depicted in figs. 1 and 2.It is preferred that the upper surface of supporting plate 15
Equipped with the v-depression for fixing test sample 14, pressing plate 13 and supporting plate 15 are horizontally disposed, in two collets
The upper surface of supporting plate 15 is located at same level, and the size and shape of described two collets is identical, described two collets mirror image each other.
In the grips test sample 14, a part for the end of test sample 14 is located in the v-depression, as shown in Figure 2.
In the present embodiment, the torsion-testing apparatus in situ for micro/nano-scale material further includes that center fine tuning is single
Member, the center fine-adjusting unit include connecting rod 5, ball-screw 9 and precision stepper motor 10, and connecting rod 5 is located at the clamping unit
Lower section, the both ends of connecting rod 5 are fixedly connected with the supporting plate of described two collets 15 respectively, and precision stepper motor 10 passes through ball
Leading screw 9 is connect with connecting rod 5, and precision stepper motor 10 can make the supporting plate 15 of connecting rod 5 and two collets by ball-screw 9
It moves up and down, so as to adjust the vertical position of the test sample 14 between two collets, as shown in figures 1 and 3.
In the present embodiment, connecting rod 5 is in concave character type, and connecting rod 5 includes left branching rod and right strut, the left branching rod and right branch
It can be detached between bar, one end of the left branching rod is connected and fixed with a supporting plate 15 in two supporting plates 15, and the one of the right strut
End is connected and fixed with another supporting plate 15 in two supporting plates 15, the nut of ball-screw 9 be located at the left branching rod and right strut it
Between, the nut of the other end of the other end of the left branching rod and the right strut with ball-screw 9 is detachably connected.Specifically, left
Strut and right strut are L-shaped, left branching rod and right strut mirror image each other, before torsion-testing, between left branching rod and right strut
It is connected and fixed to be combined into connecting rod 5 by the nut of ball-screw 9.As shown in Figure 1, the nut of ball-screw 9 passes through spiral shell
Bolt 16 is connected and fixed with connecting rod 5, and when unloading bolt 16, the nut of ball-screw 9 is detached with connecting rod 5, a left side for connecting rod 5
It is also detached between strut and right strut.The screw rod of ball-screw 9 is fixedly and coaxially connected with precision stepper motor 10, ball-screw 9
Screw rod be vertically arranged, the v-depression of 15 upper surface of axis and supporting plate of ball-screw 9 is located at same perpendicular
Interior, in the grips test sample 14, test sample 14 is horizontal and along left and right settings, the screw rod of ball-screw 9
Axis intersect with test sample 14 and vertical.
In the present embodiment, which further includes engine base 11, engine base 11
Positioned at the lower part of the torsion-testing apparatus in situ for micro/nano-scale material, the loading unit and detecting signal unit are fixed
In on engine base 11, the lower part of motor 10 is plugged in the sliding slot on engine base 11, which is arranged along the longitudinal direction, motor 10 and rolling
Ballscrew 9 can slide along the longitudinal direction.In the present invention, the front-rear direction is perpendicular to the paper direction of Fig. 1, right and left
To for the left and right directions in Fig. 1, upper and lower directions is the upper and lower directions in Fig. 1.
In the present embodiment, which further includes the shaft coupling 2 set gradually from left to right in the horizontal direction, slows down
The output shaft of device 3 and left rail 4, motor 1 is connect by shaft coupling 2 with retarder 3, and the left end of left rail 4 is defeated with retarder 3
Shaft is fixedly connected, and the axis of the output shaft of retarder 3 is arranged in left-right direction, and retarder 3 can drive left rail 4 to rotate,
The pivot center of left rail 4 is overlapped with the axis of the output shaft of retarder 3, and the pivot center of left rail 4 is parallel to this two folders
The right end of the line of head, left rail 4 is equipped with the first directive slide track, and the pivot center of first directive slide track and left rail 4 hangs down
Directly, in the pivot center of first directive slide track and left rail 4 is generally aligned in the same plane, the left end of the supporting plate 15 of the collet in left side
Grafting is matched with first directive slide track, the supporting plate 15 in left side can be slided along first directive slide track, as shown in Figure 1.Left side
Supporting plate 15 can be locked by screw and left rail 4.
In the present embodiment, which includes 6 He of right guide rail set gradually from left to right in the horizontal direction
Torque sensor 7 for detecting the torque that test sample 14 is subject to, a left side for the right end and torque sensor 7 of right guide rail 6
End connection, right guide rail 6 can rotate, and the pivot center of right guide rail 6 is overlapped with the pivot center of left rail 4, the rotation of right guide rail 6
Axis is parallel to the line of two collets, and the left end of right guide rail 6 is equipped with the second directive slide track, which leads with the right side
The pivot center of rail 6 is vertical, and the pivot center of second directive slide track and right guide rail 6 is generally aligned in the same plane interior, the folder on right side
The right end of the supporting plate 15 of head matches grafting with second directive slide track, and the supporting plate 15 on right side can be slided along second directive slide track
It is dynamic.The detecting signal unit further includes support plate 8, and support plate 8 is perpendicular to engine base 11, right end and the support plate 8 of torque sensor 7
It is fixedly connected, the lower end of support plate 8 is plugged in the upper surface of engine base 11, and support plate 8 can be along the pivot center direction of right guide rail 6
Sliding, as shown in Figure 1.The supporting plate 15 on right side can be locked by screw and right guide rail 6.
The torsion-testing apparatus in situ for being used for micro/nano-scale material further includes control unit, which plays control
The effect that the moving component of each component units is moved according to setting rule.This is used for the torsion-testing in situ of micro/nano-scale material
The volume of the building block of device is smaller to be adapted to the sample of nanoscale, and specific size those skilled in the art can
To be specifically chosen according to actual needs.
The course of work of the torsion-testing apparatus in situ for micro/nano-scale material is, before device work, first
It twists screw 12 and pressing plate 13 is compressed into test sample 14, which is Filamentous or linear, and test sample 14 is micro/nano-scale
The sample of material.The both ends clamping and positioning of test sample 14 starts precision stepper motor 10 and drives ball wire with after two collets
Thick stick 9 moves.At this point, the nut on ball-screw drives connecting rod 5 to move up and down, connecting rod is welded to together with supporting plate 15
, and the supporting plate 15 on the left side can slide on left rail 4, the supporting plate 15 on the right can slide on right guide rail 6, and ball-screw 9 drives
Dynamic connecting rod 5, which moves up and down, can be such that the center line of test sample 14 is overlapped with the axis of the output shaft of shaft coupling 2.When (detection
Device) when detecting the center line of test sample 14 and the contour center line (axis of the output shaft of shaft coupling 2) of shaft coupling 2,
Supporting plate 15 is lockked on left rail 4, while unclamping bolt 16, ball-screw 9 is together with precision stepper motor 10 along pedestal 11
Track slip away connecting rod 5, detached between the left branching rod of connecting rod 5 and right strut.Then start micromotor 1, micromotor
Coupled with retarder 3 by shaft coupling 2, the output shaft of retarder 3 couples with left rail 4；Right guide rail 6 connects with torque sensor 7
It connects, the other end of torque sensor 7 is fixed in support plate 8.In this way, after micromotor 1 starts, test sample 14 will generate torsion
Use is transferred to, the size of this effect will be measured by torque sensor 7.Since support plate 8 can be horizontal on the base 11
It slides and can lock, thus torsion-testing in situ can be carried out to the sample of different length.
It is described below a kind of microscopic appearance observation device, microscopic appearance observation device, which contains, above-mentioned is used for micro/nano-scale
The torsion-testing apparatus in situ of material, it is light microscope or scanning electron microscope which, which observes device, this is microcosmic
The position of the object lens of morphology observation device with this be used for micro/nano-scale material torsion-testing apparatus in situ described two collets
Between it is corresponding, the microscopic appearance observation device can observe the test sample 14 between described two collets.
The above, only specific embodiments of the present invention, the range that cannot be implemented with its restriction invention, so it is equivalent
The displacement of component, or according to equivalent variations made by scope of patent protection of the present invention and modification, should all still fall within what this patent was covered
Scope.In addition, between technical characteristic and technical characteristic in the present invention, between technical characteristic and technical solution, technical solution with
Use can be freely combined between technical solution.
Claims (4)
1. a kind of torsion-testing apparatus in situ for micro/nano-scale material, which is characterized in that described to be used for micro/nano-scale material
Torsion-testing apparatus in situ include：
Clamping unit, for gripping Filamentous or linear test sample (14), which includes two collets；
Loading unit, for driving test sample (14) to reverse, which includes the micromotor for capableing of output torque
(1), which connect with one end of the clamping unit；
Detecting signal unit, the torque being subject to for detecting test sample (14), the detecting signal unit and the clamping list
The other end connection of member；
The loading unit, clamping unit and detecting signal unit are set gradually from left to right in the horizontal direction, described two collets
It is symmetrical set, which includes the pressing plate (13) and supporting plate (15) of setting stacked on top of one another, and pressing plate (13) and supporting plate (15) are logical
Cross screw (12) connection, the collet end of test sample (14) can be clamped and fastened on pressing plate (13) and supporting plate (15) it
Between；
The upper surface of supporting plate (15) is equipped with the v-depression for fixing test sample (14), pressing plate (13) and supporting plate (15) equal edge
Horizontally arranged, the upper surface of the supporting plate (15) in two collets is located at same level, the size of described two collets
It is identical with shape, described two collets mirror image each other；
The torsion-testing apparatus in situ for micro/nano-scale material further includes center fine-adjusting unit, the center fine-adjusting unit packet
Connecting rod (5), ball-screw (9) and precision stepper motor (10) are included, connecting rod (5) is located at the lower section of the clamping unit, connection
The both ends of bar (5) are fixedly connected with the supporting plate of described two collets (15) respectively, and precision stepper motor (10) passes through ball-screw
(9) it is connect with connecting rod (5), precision stepper motor (10) can make connecting rod (5) and two collets by ball-screw (9)
Supporting plate (15) moves up and down；
Connecting rod (5) is in concave character type, and connecting rod (5) includes left branching rod and right strut, can be divided between the left branching rod and right strut
From one end of the left branching rod is connected and fixed with a supporting plate (15), and one end of the right strut connect solid with another supporting plate (15)
Fixed, the nut of ball-screw (9) is located between the left branching rod and right strut, and the other end of the left branching rod is another with the right strut
The nut with ball-screw (9) is held to be detachably connected, the screw rod and precision stepper motor (10) of ball-screw (9) are coaxial fixed
Connection, the screw rod of ball-screw (9) are vertically arranged, the V-arrangement of the axis and supporting plate (15) upper surface of ball-screw (9)
Groove is located in same perpendicular；
The loading unit further includes the shaft coupling (2), retarder (3) and left rail set gradually from left to right in the horizontal direction
(4), the output shaft of motor (1) is connect by shaft coupling (2) with retarder (3), left end and the retarder (3) of left rail (4)
Output shaft is fixedly connected, and the axis of the output shaft of retarder (3) is arranged in left-right direction, and retarder (3) can drive left rail
(4) it rotates, the pivot center of left rail (4) is overlapped with the axis of the output shaft of retarder (3), and the right end of left rail (4) is equipped with
First directive slide track, first directive slide track is vertical with the pivot center of left rail (4), first directive slide track and left rail
(4) in pivot center is generally aligned in the same plane, the left end of the supporting plate (15) of the collet in left side is matched with first directive slide track
Connection, the supporting plate (15) in left side can be slided along first directive slide track；
The detecting signal unit includes the right guide rail (6) set gradually from left to right in the horizontal direction and for detecting test sample
(14) right end of the torque sensor (7) for the torque being subject to, right guide rail (6) is connect with the left end of torque sensor (7), right
Guide rail (6) can rotate, and the pivot center of right guide rail (6) is overlapped with the pivot center of left rail (4), the left end of right guide rail (6)
Equipped with the second directive slide track, second directive slide track is vertical with the pivot center of right guide rail (6), which leads with the right side
In the pivot center of rail (6) is generally aligned in the same plane, right end and second directive slide track of the supporting plate (15) of the collet on right side
With connection, the supporting plate (15) on right side can be slided along second directive slide track；
At grips test sample (14), test sample (14) is horizontal and is arranged in left-right direction, ball wire
The axis of the screw rod of thick stick (9) intersects and vertical with test sample (14)；Ball-screw (9) drive connection bar (5) moves up and down energy
The center line of test sample (14) is enough set to be overlapped with the axis of the output shaft of shaft coupling (2).
2. the torsion-testing apparatus in situ according to claim 1 for micro/nano-scale material, which is characterized in that this is used for
The torsion-testing apparatus in situ of micro/nano-scale material further includes engine base (11), and engine base (11) is located at this for micro/nano-scale material
The lower part of torsion-testing apparatus in situ, the loading unit and detecting signal unit are both secured on engine base (11), motor (10)
Lower part is plugged in the sliding slot on engine base (11), which is arranged along the longitudinal direction, and motor (10) and ball-screw (9) being capable of edges
Front-rear direction slides.
3. the torsion-testing apparatus in situ according to claim 1 for micro/nano-scale material, which is characterized in that the signal
Detection unit further includes support plate (8), which further includes engine base (11), machine
Seat (11) is located at the lower part of the torsion-testing apparatus in situ for being used for micro/nano-scale material, support plate (8) perpendicular to engine base (11),
The right end of torque sensor (7) is fixedly connected with support plate (8), and the lower end of support plate (8) is plugged in the upper surface of engine base (11),
Support plate (8) can be slided along the pivot center direction of right guide rail (6).
4. a kind of microscopic appearance observes device, which is characterized in that microscopic appearance observation device, which contains in claims 1 to 3, appoints
The torsion-testing apparatus in situ for micro/nano-scale material described in meaning one, it is light microscope which, which observes device,
Or scanning electron microscope, the position of the object lens of microscopic appearance observation device are used for the torque in situ of micro/nano-scale material with this
Corresponding between described two collets of test device, microscopic appearance observation device can be observed between described two collets
Test sample (14).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610079194.8A CN105606459B (en) | 2016-02-04 | 2016-02-04 | Torsion-testing apparatus in situ and observation device for micro/nano-scale material |
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| CN201610079194.8A CN105606459B (en) | 2016-02-04 | 2016-02-04 | Torsion-testing apparatus in situ and observation device for micro/nano-scale material |
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| CN106680117B (en) * | 2016-06-02 | 2019-07-09 | 山东大学（威海） | Plate torsion testing machine |
| CN106568658B (en) * | 2016-11-01 | 2018-11-23 | 西安交通大学 | Material torsion stretches the test device and method of different performance under a kind of micro/nano-scale |
| CN110095210B (en) * | 2019-05-27 | 2020-11-17 | 西安交通大学 | Silicon-based quartz MEMS resonant torque sensor for micro-nano scale material |
| DE102019208661A1 (en) * | 2019-06-13 | 2020-12-17 | Carl Zeiss Microscopy Gmbh | Method for operating a particle beam device and particle beam device for carrying out the method |
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| CN2798068Y (en) * | 2004-12-28 | 2006-07-19 | 比亚迪股份有限公司 | Torque measurer |
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| CN103217342A (en) * | 2013-04-18 | 2013-07-24 | 吉林大学 | Micro-torsion testing platform |
| CN103344523A (en) * | 2013-07-01 | 2013-10-09 | 湖南工业大学 | Liquid density real-time measurement method |
| CN203688127U (en) * | 2013-11-15 | 2014-07-02 | 长安大学 | Spring torque tester |
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2016
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2798068Y (en) * | 2004-12-28 | 2006-07-19 | 比亚迪股份有限公司 | Torque measurer |
| CN102331376A (en) * | 2011-06-24 | 2012-01-25 | 赵宏伟 | Cross-scale micro-nano in-situ three-point bending mechanical performance testing platform |
| CN103217342A (en) * | 2013-04-18 | 2013-07-24 | 吉林大学 | Micro-torsion testing platform |
| CN103344523A (en) * | 2013-07-01 | 2013-10-09 | 湖南工业大学 | Liquid density real-time measurement method |
| CN203688127U (en) * | 2013-11-15 | 2014-07-02 | 长安大学 | Spring torque tester |
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