CN105606459A - In-situ torque testing device for micro-nano scale materials and observing device - Google Patents
In-situ torque testing device for micro-nano scale materials and observing device Download PDFInfo
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- CN105606459A CN105606459A CN201610079194.8A CN201610079194A CN105606459A CN 105606459 A CN105606459 A CN 105606459A CN 201610079194 A CN201610079194 A CN 201610079194A CN 105606459 A CN105606459 A CN 105606459A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/22—Investigating strength properties of solid materials by application of mechanical stress by applying steady torsional forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0021—Torsional
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
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Abstract
The invention provides an in-situ torque testing device for micro-nano scale materials and an observing device. The in-situ torque testing device for micro-nano scale materials comprises a clamping unit, a loading unit and a signal detecting unit, wherein the clamping unit is used for clamping and fixing a tested sample (14) and comprises two chucks; the loading unit is used for driving the tested sample (14) to reverse, comprises a micro motor (1) for outputting torque and is connected with one end of the clamping unit; the signal detecting unit is used for detecting the magnitude of the torque applied to the tested sample (14) and is connected with the other end of the clamping unit. The in-situ torque testing device for micro-nano scale materials is small in size and simple in structure. The in-situ torque testing device for micro-nano scale materials also can be used together with a microscopic imaging instrument (such as a scanning electron microscope (SEM), an optical microscope (OM), and the like), so as to form the microstructure observing device.
Description
Technical field
The present invention relates to torsion test apparatus field, specifically a kind of original position torsion-testing apparatus for micro/nano-scale material, or a kind of this microscopic appearance finder for the original position torsion-testing apparatus of micro/nano-scale material that contains.
Background technology
Along with the development of nanometer technology, micro Nano material is widely used in Aero-Space, auto industry, semiconductor, biomedicine, MEMS, macromolecule, solar energy/fuel cell chemical industry, oil, rock, microelectronics, microsensor, semi-conducting material, control automatically, Aero-Space, auto industry and machine tool. There is very large difference in the Micro Mechanical Properties of material and macroscopical classical mechanics performance. In many performance parameters of the micro nanometer mechanics test of material, the torsion Mechanics Performance Testing of material is one of very important tested object.
Original position micro nanometer mechanics Performance Testing Technology is the cutting edge technology growing up in recent years, is subject to showing great attention to of national governments and research institution. Than macroscopical measuring technology, in-situ testing technique can carry out original position loading to test specimen under the observation of electron microscope, and the microdeformation to material and damage process are carried out the many advantages such as home position observation simultaneously. But the in-situ testing technique of present stage and instrument, focus mostly in the stretching and flexural deformation of material, pay close attention to less to the torsion test of material. Main cause is to reverse the miniaturization of test platform to equipment, precision, material assembling etc. harsh requirement, and the Electro Magnetic Compatibility and the vacuum compatibility that in experimentation, need to ensure testing arrangement and working cavity, these reasons have limited the fast development of micro-nano torsion mechanics measuring technology.
Summary of the invention
In order to overcome the problem that there is no the micro-nano torsion testing equipment of original position of the prior art, the invention provides a kind of original position torsion-testing apparatus and finder for micro/nano-scale material, this is used for the original position torsion-testing apparatus small volume of micro/nano-scale material, simple in structure, can test the sample of sizes, adaptability is stronger, and space structure compactness, be convenient to observe. This original position torsion-testing apparatus that is used for micro/nano-scale material can also support the use and form microscopic appearance finder with microscopic imaging instrument (as SEM SEM, light microscope OM etc.), thereby carry out for the trans-scale in-situ of three-dimensional macro test specimen and reverse test, the present invention also can be to material the microdeformation under torsional interaction and damage process carry out home position observation, and disclose to a certain extent material and mechanical behavior and the failure mechanism of goods under micro-nano-scale thereof.
The technical solution adopted for the present invention to solve the technical problems is:
For an original position torsion-testing apparatus for micro/nano-scale material, the described original position torsion-testing apparatus for micro/nano-scale material comprises:
Grip unit, for gripping test sample, this grip unit comprises two chucks;
Loading unit, for driving test sample to reverse, this loading unit comprises micromachine that can output torque, this loading unit is connected with one end of this grip unit;
Detecting signal unit, the torque being subject to for detection of test sample, this detecting signal unit is connected with the other end of this grip unit.
A kind of microscopic appearance finder, contain the above-mentioned original position torsion-testing apparatus for micro/nano-scale material, this microscopic appearance finder is light microscope or SEM, the position of the object lens of this microscopic appearance finder and this are used between described two chucks of original position torsion-testing apparatus of micro/nano-scale material corresponding, and this microscopic appearance finder can be observed the test sample between described two chucks.
The invention has the beneficial effects as follows:
1, gripper shoe can be on pedestal horizontal slip locking, thereby diameter is that the initial length of the sample of micro-nano size can be set voluntarily.
2,, in test process, the centering of test sample is very crucial to torsion-testing. The present invention proposes to adopt precision stepper motor to drive ball-screw, and then drives connecting rod to complete the centering to test sample. Meanwhile, after test sample centering completes, for convenience of the torsion of sample, the ball screw drive systems workspace of slipping away.
3, in test process, test sample always in device centre position near, also be in the scope of being convenient to observe in microscope, this has been avoided the defect that in existing testing arrangement, sample is fixed on one end and then occurs test pattern skew, makes test process be convenient to carry out.
4, whole testing arrangement is simple in structure, and small volume is convenient to work in the small space of the Image-forming instruments such as SEM SEM, has good structure compatible, vacuum compatibility and Electro Magnetic Compatibility.
5, can under the observation of all kinds of Image-forming instruments, carry out for the trans-scale in-situ of three-D micro-nano rice sample and reverse test, by the present invention also can be to material the microdeformation under torsional interaction and damage process carry out home position observation, and disclose to a certain extent material and mechanical behavior and the failure mechanism of goods under micro-nano-scale thereof.
Brief description of the drawings
The Figure of description that forms the application's a part is used to provide a further understanding of the present invention, and schematic description and description of the present invention is used for explaining the present invention, does not form inappropriate limitation of the present invention.
Fig. 1 is this front view for the original position torsion-testing apparatus of micro/nano-scale material.
Fig. 2 is the result schematic diagram of chuck.
Fig. 3 is the nut of ball-screw and the coupling part schematic diagram of connecting rod.
Reference numeral in figure: 1, micromachine; 2, shaft coupling; 3, decelerator; 4, left rail; 5, connecting rod; 6, right guide rail; 7, torque sensor; 8, gripper shoe; 9, ball-screw; 10, precision stepper motor; 11, pedestal; 12, screw; 13, pressing plate; 14, test sample; 15, supporting plate; 16, bolt.
Detailed description of the invention
It should be noted that, in the situation that not conflicting, the feature in embodiment and embodiment in the application can combine mutually. Describe below with reference to the accompanying drawings and in conjunction with the embodiments the present invention in detail.
For an original position torsion-testing apparatus for micro/nano-scale material, comprising:
Grip unit, for gripping the test sample 14 of thread or wire, this grip unit comprises two chucks;
Loading unit, for driving test sample 14 to reverse, this loading unit comprises micromachine 1 that can output torque, this loading unit is connected with one end of this grip unit;
Detecting signal unit, the torque being subject to for detection of test sample 14, this detecting signal unit is connected with the other end of this grip unit, as shown in Figure 1.
Owing to having adopted micromachine 1 in this loading unit, so this original position torsion-testing apparatus that is used for micro/nano-scale material is suitable for the use of the original position torsion-testing of micro/nano-scale material. In the present embodiment, this loading unit, grip unit and signal detection list along continuous straight runs set gradually from left to right, described two chucks are symmetrical set, this chuck comprises pressing plate 13 and the supporting plate 15 that stacked on top of one another arranges, pressing plate 13 is connected by screw 12 with supporting plate 15, this chuck can be clamped and fastened on the end of test sample 14 between pressing plate 13 and supporting plate 15, as depicted in figs. 1 and 2 by screw 12. Preferably, the upper surface of supporting plate 15 is provided with the v-depression for fixing test sample 14, pressing plate 13 and the equal along continuous straight runs setting of supporting plate 15, and the upper surface of the supporting plate 15 in these two chucks is positioned at same level, the size and shape of described two chucks is identical, described two chucks mirror image each other. In the time of this chuck clamping test sample 14, a part for the end of test sample 14 is arranged in this v-depression, as shown in Figure 2.
In the present embodiment, the described original position torsion-testing apparatus for micro/nano-scale material also comprises center fine-adjusting unit, this center fine-adjusting unit comprises connecting rod 5, ball-screw 9 and precision stepper motor 10, connecting rod 5 is positioned at the below of this grip unit, the two ends of connecting rod 5 are fixedly connected with the supporting plate 15 of described two chucks respectively, precision stepper motor 10 is connected with connecting rod 5 by ball-screw 9, precision stepper motor 10 can move up and down the supporting plate 15 of connecting rod 5 and two chucks by ball-screw 9, thereby adjust the vertical position of the test sample 14 between these two chucks, as shown in figures 1 and 3.
In the present embodiment, connecting rod 5 is concave character type, connecting rod 5 comprises left branching rod and right pole, between this left branching rod and right pole, can separate, a supporting plate 15 in one end of this left branching rod and two supporting plates 15 is connected and fixed, another supporting plate 15 in one end of this right pole and two supporting plates 15 is connected and fixed, and the nut of ball-screw 9 is between this left branching rod and right pole, and the other end of this left branching rod and the other end of this right pole all removably connect with the nut of ball-screw 9. Concrete, left branching rod and right pole are L shaped, and left branching rod and right pole mirror image each other before torsion-testing, thereby are connected and fixed and are combined into connecting rod 5 by the nut of ball-screw 9 between left branching rod and right pole. As shown in Figure 1, the nut of ball-screw 9 is connected and fixed by bolt 16 and connecting rod 5, and in the time unloading bolt 16, the nut of ball-screw 9 separates with connecting rod 5, between the left branching rod of connecting rod 5 and right pole, also separates. The screw rod of ball-screw 9 is coaxially fixedly connected with precision stepper motor 10, the screw rod of ball-screw 9 vertically arranges, this v-depression of the axis of ball-screw 9 and supporting plate 15 upper surfaces is positioned at same perpendicular, in the time of this chuck clamping test sample 14, test sample 14 is the level of state and arranges along left and right, and the axis of the screw rod of ball-screw 9 is crossing with test sample 14 and vertical.
In the present embodiment, this original position torsion-testing apparatus that is used for micro/nano-scale material also comprises support 11, support 11 is positioned at this bottom for the original position torsion-testing apparatus of micro/nano-scale material, this loading unit and detecting signal unit are all fixed on support 11, the bottom of motor 10 is plugged in the chute on support 11, this chute is along fore-and-aft direction setting, and motor 10 and ball-screw 9 can slide along fore-and-aft direction. In the present invention, described fore-and-aft direction is the paper direction perpendicular to Fig. 1, and left and right directions is the left and right directions in Fig. 1, and above-below direction is the above-below direction in Fig. 1.
In the present embodiment, this loading unit also comprises the shaft coupling 2 that along continuous straight runs sets gradually from left to right, decelerator 3 and left rail 4, the output shaft of motor 1 is connected with decelerator 3 by shaft coupling 2, the left end of left rail 4 is fixedly connected with the output shaft of decelerator 3, the axis of the output shaft of decelerator 3 is along left and right directions setting, decelerator 3 can drive left rail 4 to rotate, the dead in line of the output shaft of the pivot center of left rail 4 and decelerator 3, the pivot center of left rail 4 is parallel to the line of these two chucks, the right-hand member of left rail 4 is provided with the first directive slide track, this first directive slide track is vertical with the pivot center of left rail 4, the pivot center of this first directive slide track and left rail 4 is positioned at same plane, the left end of the supporting plate 15 of this chuck in left side mates grafting with this first directive slide track, the supporting plate 15 in left side can slide along this first directive slide track, as shown in Figure 1. the supporting plate 15 in left side can be locked by screw and left rail 4.
In the present embodiment, this detecting signal unit comprises the torque sensor 7 of the right guide rail 6 that along continuous straight runs sets gradually from left to right and the torque being subject to for detection of test sample 14, the right-hand member of right guide rail 6 is connected with the left end of torque sensor 7, right guide rail 6 can rotate, the pivot center of right guide rail 6 overlaps with the pivot center of left rail 4, the pivot center of right guide rail 6 is parallel to the line of these two chucks, the left end of right guide rail 6 is provided with the second directive slide track, this second directive slide track is vertical with the pivot center of right guide rail 6, the pivot center of this second directive slide track and right guide rail 6 is positioned at same plane, the right-hand member of the supporting plate 15 of this chuck on right side mates grafting with this second directive slide track, the supporting plate 15 on right side can slide along this second directive slide track. this detecting signal unit also comprises gripper shoe 8, gripper shoe 8 is perpendicular to support 11, and the right-hand member of torque sensor 7 is fixedly connected with gripper shoe 8, and the lower end of gripper shoe 8 is plugged in the upper surface of support 11, gripper shoe 8 can be slided along the pivot center direction of right guide rail 6, as shown in Figure 1. the supporting plate 15 on right side can be locked by screw and right guide rail 6.
This original position torsion-testing apparatus that is used for micro/nano-scale material also comprises control module, and the moving component that this control module plays a part to control each component units is according to setting regular movement. This volume of building block that is used for the original position torsion-testing apparatus of micro/nano-scale material is all less of to be adapted to the sample of nanoscale, and concrete size those skilled in the art can specifically select according to actual needs.
The course of work of the described original position torsion-testing apparatus for micro/nano-scale material is, before this device work, first twists screw 12 pressing plate 13 is compressed to test sample 14, and this test sample 14 is thread or wire, and test sample 14 is the sample of micro/nano-scale material. After the two ends clamping and positioning of test sample 14 and two chucks, start precision stepper motor 10 and drive ball-screw 9 to move. Now, nut on ball-screw drives connecting rod 5 to move up and down, connecting rod and supporting plate 15 weld together, and the supporting plate 15 on the left side can slide on left rail 4, the supporting plate 15 on the right can slide on right guide rail 6, and ball-screw 9 drives connecting rod 5 to move up and down can to make the dead in line of the center line of test sample 14 and the output shaft of shaft coupling 2. When (checkout gear) detects that the center line of test sample 14 and the center line of shaft coupling 2 (axis of the output shaft of shaft coupling 2) are when contour, supporting plate 15 is pinned on left rail 4, unclamp bolt 16 simultaneously, ball-screw 9, separates between the left branching rod of connecting rod 5 and right pole along the track sliding on pedestal 11 from connecting rod 5 together with precision stepper motor 10. Then start micromachine 1, micromachine connects with decelerator 3 by shaft coupling 2, and the output shaft of decelerator 3 connects with left rail 4; Right guide rail 6 is connected with torque sensor 7, and the other end of torque sensor 7 is fixed in gripper shoe 8. Like this, after micromachine 1 starts, test sample 14 will produce twisting action, and the large young pathbreaker of this effect measures by torque sensor 7. Because gripper shoe 8 can also can be locked on pedestal 11 in horizontal slip, thereby can carry out original position torsion-testing to the sample of different length.
Introduce a kind of microscopic appearance finder below, this microscopic appearance finder contains the above-mentioned original position torsion-testing apparatus for micro/nano-scale material, this microscopic appearance finder is light microscope or SEM, the position of the object lens of this microscopic appearance finder and this are used between described two chucks of original position torsion-testing apparatus of micro/nano-scale material corresponding, and this microscopic appearance finder can be observed the test sample 14 between described two chucks.
The above, be only specific embodiments of the invention, can not limit the scope that invention is implemented with it, thus the displacement of its equivalent assemblies, or equivalent variations and the modification done according to scope of patent protection of the present invention, all should still belong to the category that this patent is contained. Between technical scheme and technical scheme, all can use by independent assortment in addition, between the technical characterictic and technical characterictic in the present invention, between technical characterictic and technical scheme.
Claims (10)
1. for an original position torsion-testing apparatus for micro/nano-scale material, it is characterized in that, described for micro-nano chiThe original position torsion-testing apparatus of degree material comprises:
Grip unit, for gripping test sample (14), this grip unit comprises two chucks;
Loading unit, for driving test sample (14) to reverse, this loading unit comprise can output torque miniatureMotor (1), this loading unit is connected with one end of this grip unit;
Detecting signal unit, the torque being subject to for detection of test sample (14), this detecting signal unit and thisThe other end of grip unit connects.
2. the original position torsion-testing apparatus for micro/nano-scale material according to claim 1, is characterized in that,This loading unit, grip unit and detecting signal unit along continuous straight runs set gradually from left to right, described two chucksBe symmetrical set, this chuck comprise stacked on top of one another arrange pressing plate (13) and supporting plate (15), pressing plate (13) andSupporting plate (15) connects by screw (12), and this chuck can be clamped and fastened on pressure by the end of test sample (14)Between plate (13) and supporting plate (15).
3. the original position torsion-testing apparatus for micro/nano-scale material according to claim 2, is characterized in that,The upper surface of supporting plate (15) is provided with the v-depression for fixing test sample (14), pressing plate (13) and supporting plate (15)All along continuous straight runs settings, the upper surface of the supporting plate (15) in these two chucks is positioned at same level, described two foldersThe size and shape of head is identical, described two chucks mirror image each other.
4. the original position torsion-testing apparatus for micro/nano-scale material according to claim 3, is characterized in that,The described original position torsion-testing apparatus for micro/nano-scale material also comprises center fine-adjusting unit, this center fine-adjusting unit bagDraw together connecting rod (5), ball-screw (9) and precision stepper motor (10), connecting rod (5) is positioned at this grip unitBelow, the two ends of connecting rod (5) are fixedly connected with the supporting plate (15) of described two chucks respectively, accurate steppingMotor (10) is connected with connecting rod (5) by ball-screw (9), and precision stepper motor (10) can be by rollingBallscrew (9) moves up and down the supporting plate (15) of connecting rod (5) and two chucks.
5. the original position torsion-testing apparatus for micro/nano-scale material according to claim 4, is characterized in that,Connecting rod (5) is concave character type, and connecting rod (5) comprises left branching rod and right pole, energy between this left branching rod and right poleEnough separation, one end of this left branching rod and a supporting plate (15) are connected and fixed, one end of this right pole and another supporting plate(15) be connected and fixed, the nut of ball-screw (9) between this left branching rod and right pole, this left branching rod anotherThe other end of one end and this right pole all removably connects with the nut of ball-screw (9), the spiral shell of ball-screw (9)Bar is coaxially fixedly connected with precision stepper motor (10), and the screw rod of ball-screw (9) vertically arranges, and rollsThis v-depression of the axis of ballscrew (9) and supporting plate (15) upper surface is positioned at same perpendicular.
6. the original position torsion-testing apparatus for micro/nano-scale material according to claim 4, is characterized in that,This original position torsion-testing apparatus that is used for micro/nano-scale material also comprises support (11), and support (11) is positioned at this and is used forThe bottom of the original position torsion-testing apparatus of micro/nano-scale material, this loading unit and detecting signal unit are all fixed on support(11) upper, the bottom of motor (10) is plugged in the chute on support (11), and this chute is along fore-and-aft direction setting,Motor (10) and ball-screw (9) can slide along fore-and-aft direction.
7. the original position torsion-testing apparatus for micro/nano-scale material according to claim 2, is characterized in that,This loading unit also comprises that shaft coupling (2), decelerator (3) and a left side that along continuous straight runs sets gradually from left to right leadRail (4), the output shaft of motor (1) is connected with decelerator (3) by shaft coupling (2), a left side for left rail (4)End is fixedly connected with the output shaft of decelerator (3), and the axis of the output shaft of decelerator (3) is along left and right directions setting,Decelerator (3) can drive left rail (4) to rotate, the pivot center of left rail (4) and decelerator (3) defeatedThe dead in line of shaft, the right-hand member of left rail (4) is provided with the first directive slide track, this first directive slide track and left rail(4) pivot center is vertical, and the pivot center of this first directive slide track and left rail (4) is positioned at same plane,The left end of the supporting plate (15) of this chuck in left side is connected with this first directive slide track coupling, supporting plate (15) energy in left sideEnough in this first directive slide track slip.
8. the original position torsion-testing apparatus for micro/nano-scale material according to claim 7, is characterized in that,This detecting signal unit comprises the right guide rail (6) that along continuous straight runs sets gradually from left to right and tries for detection of testThe torque sensor (7) of the torque that sample (14) is subject to, the right-hand member of right guide rail (6) and torque sensor (7)Left end connect, right guide rail (6) can rotate, the rotation of the pivot center of right guide rail (6) and left rail (4)Dead in line, the left end of right guide rail (6) is provided with the second directive slide track, this second directive slide track and right guide rail (6)Pivot center is vertical, and the pivot center of this second directive slide track and right guide rail (6) is positioned at same plane, right sideThe right-hand member of the supporting plate (15) of this chuck is connected with this second directive slide track coupling, and the supporting plate (15) on right side can be along thisThe second directive slide track slides.
9. the original position torsion-testing apparatus for micro/nano-scale material according to claim 8, is characterized in that,This detecting signal unit also comprises gripper shoe (8), and this original position torsion-testing apparatus that is used for micro/nano-scale material also comprisesSupport (11), support (11) is positioned at this bottom for the original position torsion-testing apparatus of micro/nano-scale material, supportsPlate (8) is perpendicular to support (11), and the right-hand member of torque sensor (7) is fixedly connected with gripper shoe (8), gripper shoe(8) lower end is plugged in the upper surface of support (11), and gripper shoe (8) can be along the turning cylinder of right guide rail (6)Line direction is slided.
10. a microscopic appearance finder, is characterized in that, this microscopic appearance finder contain claim 1～The original position torsion-testing apparatus for micro/nano-scale material in 9 described in any one, this microscopic appearance finder isLight microscope or SEM, the position of the object lens of this microscopic appearance finder and this are used for micro/nano-scaleCorresponding between described two chucks of the original position torsion-testing apparatus of material, this microscopic appearance finder can be observedTest sample (14) between described two chucks.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610079194.8A CN105606459B (en) | 2016-02-04 | 2016-02-04 | Torsion-testing apparatus in situ and observation device for micro/nano-scale material |
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| CN201610079194.8A CN105606459B (en) | 2016-02-04 | 2016-02-04 | Torsion-testing apparatus in situ and observation device for micro/nano-scale material |
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| CN106568658A (en) * | 2016-11-01 | 2017-04-19 | 西安交通大学 | Device and method for measuring different torsion and stretching properties of material in micro-nano level |
| CN106680117A (en) * | 2016-06-02 | 2017-05-17 | 山东大学（威海） | Novel sheet metal torsion testing machine |
| CN110095210A (en) * | 2019-05-27 | 2019-08-06 | 西安交通大学 | A kind of silicon substrate quartz MEMS resonant formula torque sensor for micro/nano-scale material |
| CN112083195A (en) * | 2019-06-13 | 2020-12-15 | 卡尔蔡司显微镜有限责任公司 | Method for operating a particle beam device and particle beam device for carrying out the method |
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| CN110095210A (en) * | 2019-05-27 | 2019-08-06 | 西安交通大学 | A kind of silicon substrate quartz MEMS resonant formula torque sensor for micro/nano-scale material |
| CN112083195A (en) * | 2019-06-13 | 2020-12-15 | 卡尔蔡司显微镜有限责任公司 | Method for operating a particle beam device and particle beam device for carrying out the method |
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| Publication number | Publication date |
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| CN105606459B (en) | 2018-07-13 |
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