CN108572106B - In-situ composite loading and measuring device for micro-nano sample - Google Patents
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
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Abstract
The invention provides an in-situ composite loading and measuring device for a micro-nano sample, which comprises a left loading adjusting component and a right loading adjusting component which are sequentially arranged along the positive direction of an X coordinate axis in a space rectangular coordinate system taking X, Y, Z as a coordinate axis, wherein the left loading adjusting component comprises a left rotary piezoelectric ceramic motor (3), a left vertical linear piezoelectric ceramic motor (4) and a left horizontal linear piezoelectric ceramic motor (5) which are sequentially connected along the positive direction of the X coordinate axis, and the right loading adjusting component comprises a right connecting block (12) and a right propelling linear piezoelectric ceramic motor (13) which are sequentially connected along the direction of a Z coordinate axis. The in-situ composite loading and measuring device for the micro-nano sample is small in size, compact in structure and high in measuring precision, and can be used for carrying out cross-scale in-situ tensile bending torsion tests on test pieces with characteristic sizes of more than nano-scale of various materials.
Description
Technical Field
The invention relates to an in-situ composite loading and measuring device for a micro-nano sample.
Background
With the development of nanotechnology, micro-nano materials are widely used in aerospace, automotive industry, semiconductors, biomedicine, MEMS, polymer, solar/fuel cell chemical, petroleum, rock, microelectronics, micro-sensors, semiconductor materials, automotive, aerospace, automotive industry, and mechanical tools. The microscopic mechanical properties of the material are greatly different from the macroscopic classical mechanical properties. The tension, bending and torsion mechanical property tests of the material in a plurality of performance parameters of the micro-nano mechanical test of the material are one of very important test objects.
The in-situ micro-nano mechanical property testing technology is a leading-edge technology developed in recent years and is highly concerned by governments and research institutions of various countries. Compared with a macroscopic test technology, the in-situ test technology can carry out in-situ loading on the test piece under the observation of an electron microscope, and can simultaneously carry out in-situ observation on the microscopic deformation and damage processes of the material. However, the in-situ testing technology and the in-situ testing instrument at the present stage can only realize the testing of a single function, and meanwhile, the in-situ testing technology and the in-situ testing instrument mostly focus on the stretching and bending deformation of the material, and pay less attention to the torsion testing of the material and the microscopic deformation and damage of the material under the condition of composite loading. The main reasons are that the design of the multifunctional integrated mechanical testing platform is relatively complex, the mechanism with multiple degrees of freedom has extremely high requirements on platform control, meanwhile, the in-situ torsion testing platform has harsh requirements on equipment miniaturization, precision, material assembly and the like, and the electromagnetic compatibility and vacuum compatibility of a testing device and a working cavity need to be ensured in the experimental process, so that the development of the multifunctional in-situ mechanical testing platform with micro-nano scale is limited.
Disclosure of Invention
In order to solve the problems of large volume and complex structure of the conventional micro-nano scale multifunctional in-situ mechanical test platform, the invention provides an in-situ composite loading and measuring device for a micro-nano sample, which has the advantages of small volume, compact structure, high test precision, wide application range, capability of matching with various vacuum cavities of a mainstream electron microscope, capability of carrying out cross-scale in-situ tensile bending torsion test on test pieces with the characteristic size of more than nano level of various materials, capability of carrying out composite loading test, and capability of revealing the mechanical behavior and damage mechanism of the materials under the micro-nano scale by dynamically observing the microscopic deformation of the materials and products thereof under the load.
The technical scheme adopted by the invention for solving the technical problems is as follows: an in-situ composite loading and measuring device for micro-nano samples comprises a left loading adjusting component and a right loading adjusting component which are sequentially arranged along the positive direction of an X coordinate axis in a space rectangular coordinate system taking X, Y, Z as the coordinate axis, wherein the left loading adjusting component comprises a left rotary piezoelectric ceramic motor, a left vertical linear piezoelectric ceramic motor and a left horizontal linear piezoelectric ceramic motor which are sequentially connected along the positive direction of the X coordinate axis, the left rotary piezoelectric ceramic motor can drive the left vertical linear piezoelectric ceramic motor and the left horizontal linear piezoelectric ceramic motor to rotate by taking the X coordinate axis as the axis, the left vertical linear piezoelectric ceramic motor can drive the left horizontal linear piezoelectric ceramic motor to move along the direction of the Z coordinate axis, the right loading adjusting component comprises a right connecting block and a right propelling linear piezoelectric ceramic motor which are sequentially connected along the direction of the Z coordinate axis, the right propelling linear piezoelectric ceramic motor can drive the right connecting block to move along the direction of the X coordinate axis.
The invention has the beneficial effects that:
1. the right connecting block can horizontally slide on the base and can be locked, so that the initial length of the sample with the diameter of micro-nano size can be set by self.
2. In the test process, the centering of the sample is very critical to the torque test, and the invention provides that the centering of the sample is completed by adopting a precise piezoelectric ceramic motor.
3. In the testing process, the sample is always positioned near the middle position of the device and is also positioned in the range which is convenient for observation of the microscope, so that the defect that the sample is fixed at one end and then the test image is deviated in the existing testing device is avoided, and the testing process is convenient to carry out.
4. The whole testing device is simple in structure, small in size, convenient to work in narrow space of imaging instruments such as a Scanning Electron Microscope (SEM) and the like, and good in structural compatibility, vacuum compatibility and electromagnetic compatibility.
5. The cross-scale in-situ tensile bending torsion test for the three-dimensional micro-nano sample can be performed under the observation of various imaging instruments, the in-situ observation can be performed on the microscopic deformation and damage process of the material under the action of the tensile bending torsion, and the mechanical behavior and the damage mechanism of the material and the product thereof under the micro-nano scale can be disclosed to a certain extent.
6. The composite loading test can be carried out on the micro-nano scale material, the real-time in-situ observation of the micro deformation and damage process can be carried out, and the mechanical behavior and the damage mechanism of the material and the product thereof under the composite loading under the micro-nano scale can be revealed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic structural diagram of an in-situ composite loading and measuring device for a micro-nano sample.
1. A fixed base; 2. a left operating arm connecting block; 3. a left rotary piezoelectric ceramic motor; 4. a left vertical linear piezoelectric ceramic motor; 5. a left horizontal linear piezoelectric ceramic motor; 6. a left sample holding platform; 7. a sensor module; 8. a micro-nano scale material sample; 9. a right sample holding platform; 10. a right horizontal linear piezoelectric ceramic motor; 11. the right vertical linear piezoelectric ceramic motor; 12. a right connecting block; 13. the right part pushes a linear piezoelectric ceramic motor; 14. right part operating arm connecting block.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
The utility model provides an in situ composite loading and measuring device for receiving sample a little, in the space rectangular coordinate system that uses X, Y, Z as the coordinate axis, this in situ composite loading and measuring device for receiving sample a little includes left load adjusting part and right load adjusting part that the positive direction along the X coordinate axis set gradually, left side load adjusting part contains the rotatory piezoceramics motor 3 of left part, the perpendicular straight line piezoceramics motor 4 of left part and the horizontal straight line piezoceramics motor 5 of left part that the positive direction along the X coordinate axis connected gradually, and left part rotatory piezoceramics motor 3 can drive the perpendicular straight line piezoceramics motor 4 of left part and the horizontal straight line piezoceramics motor 5 of left part and use the X coordinate axis as the rotation of axle, and left part perpendicular straight line piezoceramics motor 4 can drive the horizontal straight line piezoceramics motor 5 of left part and remove along the direction of Z coordinate axis, right side load adjusting part contains the propulsion straight line piezoceramics motor 12 of right part and the direction along the direction of The electric ceramic motor 13 and the right propelling linear piezoelectric ceramic motor 13 can drive the right connecting block 12 to move along the direction of the X coordinate axis, as shown in figure 1.
In this embodiment, left portion horizontal straight line piezoceramics motor 5 lug connection has left portion sample fixed platform 6 or left portion horizontal straight line piezoceramics motor 5 is connected with left portion sample fixed platform 6 through the connecting seat, and left portion sample fixed platform 6 is located between left portion horizontal straight line piezoceramics motor 5 and this right loading adjusting part, and left portion horizontal straight line piezoceramics motor 5 can drive left portion sample fixed platform 6 and remove along the direction of Y coordinate axle.
In this embodiment, left part sample fixed platform 6 is type of calligraphy, and left part sample fixed platform 6's top is the orientation the convex bulge of right side loading adjusting part, left part sample fixed platform 6's bottom and left part horizontal straight line piezoceramics motor 5 are connected fixedly through the connecting seat, and left part sample fixed platform 6 is sheet structure, and left part sample fixed platform 6 is parallel with the X coordinate axis, as shown in fig. 1. The top end of the left sample fixing platform 6 is externally connected with a sensor module 7, and the sensor module 7 can be used for installing and fixing a micro-nano scale material sample 8.
In this embodiment, the right connecting block 12 is connected to the right horizontal linear piezoelectric ceramic motor 10 or the right vertical linear piezoelectric ceramic motor 11. Preferably, the right connecting block 12 is directly connected to the right vertical linear piezoelectric ceramic motor 11, for example, the right vertical linear piezoelectric ceramic motor 11 is fixed to a side surface of the right connecting block 12 facing the left loading adjustment assembly.
In this embodiment, the right vertical linear piezoelectric ceramic motor 11 is connected to the right horizontal linear piezoelectric ceramic motor 10, the right vertical linear piezoelectric ceramic motor 11, and the right connecting block 12 are sequentially arranged along the positive direction of the X coordinate axis, and the right vertical linear piezoelectric ceramic motor 11 can drive the right horizontal linear piezoelectric ceramic motor 10 to move along the direction of the Z coordinate axis.
In this embodiment, the right horizontal linear piezoelectric ceramic motor 10 is connected with the right sample fixing platform 9, the right sample fixing platform 9 is located between the right horizontal linear piezoelectric ceramic motor 10 and the left loading adjusting component, and the right horizontal linear piezoelectric ceramic motor 10 can drive the right sample fixing platform 9 to move along the direction of the Y coordinate axis. Right part sample fixed platform 9 is type of protruding, and the top of right part sample fixed platform 9 is the orientation the convex bulge of left side loading adjusting part, the bottom and the horizontal straight line piezoceramics motor 10 in right part sample fixed platform 9 are connected fixedly, and right part sample fixed platform 9 is sheet structure, and right part sample fixed platform 9 is parallel with the X coordinate axis.
In this embodiment, the right sample fixing platform 9 and the left sample fixing platform 6 are mirror images, and the right propulsion linear piezoelectric ceramic motor 13 can drive the right sample fixing platform 9, the right horizontal linear piezoelectric ceramic motor 10, the right vertical linear piezoelectric ceramic motor 11 and the right connecting block 12 to move along the direction of the X coordinate axis.
In this embodiment, the in-situ composite loading and measuring device for the micro-nano sample further includes a fixed base 1, the left rotary piezoelectric ceramic motor 3 is fixedly connected with the fixed base 1 through the left operating arm connecting block 2, and the right push linear piezoelectric ceramic motor 13 is fixedly connected with the fixed base 1 through the right operating arm connecting block 14, as shown in fig. 1. In addition, the in-situ composite loading and measuring device for the micro-nano sample further comprises a signal detection and control unit, the signal detection and control unit is connected with the sensor module 7 and each piezoelectric ceramic motor, and the signal detection and control unit can control each moving part to move according to a set rule, so that the working operation of the in-situ composite loading and measuring device for the micro-nano sample is controlled. The sensor module 7 is used for measuring force and torque applied to the micro-nano sample, the sensor module 7 is a product sold in the market at present, and the sensor module 7 is an existing sensor manufactured based on mems or piezoelectric technology and the like.
The working process of the in-situ composite loading and measuring device for the micro-nano sample is as follows:
before the device works, a micro-nano scale material sample 8 is fixed on a sensor module 7, as shown in fig. 1, and then the whole body (the micro-nano scale material sample 8 and the sensor module 7) is fixed on a left sample fixing platform 6. And moving the micro-nano scale material sample 8 to the rotation center of the left rotary piezoelectric ceramic motor 3 by adjusting the left vertical linear piezoelectric ceramic motor 4 and the left horizontal linear piezoelectric ceramic motor 5. And then adjusting the distance between the fixed ends of the micro-nano scale material sample 8 by adjusting a right propelling linear piezoelectric ceramic motor 13, and fixing the sample by a right sample fixing platform 9 after the adjustment is finished. The in-situ torsion test of the micro-nano scale material can be carried out by operating the action of the left rotary piezoelectric ceramic motor 3, the in-situ bending test of the micro-nano scale material can be carried out by operating the action of the right horizontal linear piezoelectric ceramic motor 10 or the right vertical linear piezoelectric ceramic motor 11, the in-situ tensile test of the micro-nano scale material can be carried out by operating the action of the right push linear piezoelectric ceramic motor 13, and the test of the material under composite loading can be carried out by simultaneously operating the motors.
Because the right propelling linear piezoelectric ceramic motor 13 can horizontally slide on the base and can be locked, the in-situ tensile bending torque test can be carried out on samples with different lengths.
The device for in-situ composite loading and measuring the micro-nano sample can be wholly or partially placed in imaging instruments such as a Scanning Electron Microscope (SEM) and the like to carry out in-situ micro-nano material stretching, bending and torque testing and observe the experimental process. The in-situ composite loading and measuring device for the micro-nano sample is an in-situ test device for the tension, bending and torsion composite loading of the micro-nano sample of an electron microscope.
The above description is only exemplary of the invention and should not be taken as limiting the scope of the invention, so that the invention is intended to cover all modifications and equivalents of the embodiments described herein. In addition, the technical features, the technical schemes and the technical schemes can be freely combined and used.
Claims (7)
1. An in-situ composite loading and measuring device for micro-nano samples is characterized in that in a space rectangular coordinate system taking X, Y, Z as a coordinate axis, the in-situ composite loading and measuring device for micro-nano samples comprises a left loading adjusting component and a right loading adjusting component which are sequentially arranged along the positive direction of an X coordinate axis, the left loading adjusting component comprises a left rotary piezoelectric ceramic motor (3), a left vertical linear piezoelectric ceramic motor (4) and a left horizontal linear piezoelectric ceramic motor (5) which are sequentially connected along the positive direction of the X coordinate axis, the left rotary piezoelectric ceramic motor (3) can drive the left vertical linear piezoelectric ceramic motor (4) and the left horizontal linear piezoelectric ceramic motor (5) to rotate by taking the X coordinate axis as an axis, the left vertical linear piezoelectric ceramic motor (4) can drive the left horizontal linear piezoelectric ceramic motor (5) to move along the direction of the Z coordinate axis, the right loading adjusting assembly comprises a right connecting block (12) and a right propelling linear piezoelectric ceramic motor (13) which are sequentially connected along the direction of a Z coordinate axis, and the right propelling linear piezoelectric ceramic motor (13) can drive the right connecting block (12) to move along the direction of an X coordinate axis;
the right connecting block (12) is connected with a right vertical linear piezoelectric ceramic motor (11); the right vertical linear piezoelectric ceramic motor (11) is connected with a right horizontal linear piezoelectric ceramic motor (10), the right vertical linear piezoelectric ceramic motor (11) and the right connecting block (12) are sequentially arranged along the positive direction of an X coordinate axis, and the right vertical linear piezoelectric ceramic motor (11) can drive the right horizontal linear piezoelectric ceramic motor (10) to move along the direction of a Z coordinate axis.
2. The in-situ composite loading and measuring device for the micro-nano sample according to claim 1, wherein the left horizontal linear piezoelectric ceramic motor (5) is connected with a left sample fixing platform (6), the left sample fixing platform (6) is located between the left horizontal linear piezoelectric ceramic motor (5) and the right loading adjusting assembly, and the left horizontal linear piezoelectric ceramic motor (5) can drive the left sample fixing platform (6) to move along the direction of the Y coordinate axis.
3. The in-situ composite loading and measuring device for the micro-nano sample according to claim 2, wherein a left sample fixing platform (6) is in a convex shape, the top of the left sample fixing platform (6) is a convex part facing the right loading adjusting component, the bottom of the left sample fixing platform (6) is fixedly connected with a left horizontal linear piezoelectric ceramic motor (5), the left sample fixing platform (6) is in a sheet structure, and the left sample fixing platform (6) is parallel to an X coordinate axis.
4. The in-situ composite loading and measuring device for micro-nano samples according to claim 3, characterized in that a sensor module (7) is connected to the outside of the top end of the left sample fixing platform (6).
5. The in-situ composite loading and measuring device for the micro-nano sample according to claim 1, wherein a right horizontal linear piezoelectric ceramic motor (10) is connected with a right sample fixing platform (9), the right sample fixing platform (9) is located between the right horizontal linear piezoelectric ceramic motor (10) and the left loading adjusting assembly, and the right horizontal linear piezoelectric ceramic motor (10) can drive the right sample fixing platform (9) to move along the direction of the Y coordinate axis.
6. The in-situ composite loading and measuring device for the micro-nano sample according to claim 5, wherein a right sample fixing platform (9) is in a convex shape, the top of the right sample fixing platform (9) is a convex part facing the left loading adjusting assembly, the bottom of the right sample fixing platform (9) is fixedly connected with a right horizontal linear piezoelectric ceramic motor (10), the right sample fixing platform (9) is in a sheet structure, and the right sample fixing platform (9) is parallel to an X coordinate axis.
7. The in-situ composite loading and measuring device for the micro-nano sample according to claim 1, further comprising a fixed base (1), wherein the left rotary piezoelectric ceramic motor (3) is fixedly connected with the fixed base (1) through a left operating arm connecting block (2), and the right push linear piezoelectric ceramic motor (13) is fixedly connected with the fixed base (1) through a right operating arm connecting block (14).
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