CN207066866U - The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge - Google Patents

The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge Download PDF

Info

Publication number
CN207066866U
CN207066866U CN201721064835.9U CN201721064835U CN207066866U CN 207066866 U CN207066866 U CN 207066866U CN 201721064835 U CN201721064835 U CN 201721064835U CN 207066866 U CN207066866 U CN 207066866U
Authority
CN
China
Prior art keywords
flexible hinge
pawl toe
micro
bare terminal
terminal end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201721064835.9U
Other languages
Chinese (zh)
Inventor
马志超
马筱溪
赵宏伟
任露泉
张志辉
杜希杰
徐博达
蒋东颖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jilin University
Original Assignee
Jilin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jilin University filed Critical Jilin University
Priority to CN201721064835.9U priority Critical patent/CN207066866U/en
Application granted granted Critical
Publication of CN207066866U publication Critical patent/CN207066866U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

It the utility model is related to a kind of bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw based on flexible hinge, precision actuation and material Micro Mechanical Properties in-situ test field.The multi-load piezoelectric actuator of three built-in encapsulation type piezoelectric stacks is in envelope annular distributing installation form in 120 °, pass through lower floor's flexible hinge movement minor face intramedullary expansion and the motion transmission using internal layer fulcrum as the revolute pair centre of motion, pawl toe bare terminal end uses Biologic nonsmoothed mechanism and soil animal pawl toe configuration, increase clamping friction power, can solve microsize component and clamp this problem, in addition, micro-grabbe can also be with combined type support unit, high temperature loading unit combines, construct the controllable single shaft of high-temperature service condition bottom offset, the twin shaft field of force, realize microsize component single shaft, twin shaft Mechanics Performance Testing function.The utility model is compact-sized, has wide range of applications, and can be used in combination with ESEM, and effective tool is provided for the Measurement of Material Mechanical Performance of the micro-dimension such as carbon fiber, sign.

Description

The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge
Technical field
It the utility model is related to precision actuation and material Micro Mechanical Properties in-situ test field, more particularly to micro-electro-mechanical systems The instrument class in domain is commanded, the bionical micro-dimension clamping device of espespecially a kind of Piezoelectric Driving three-jaw based on flexible hinge, is used for Clamping and test for the following microsize materials of characteristic size diameter 0.1mm.The utility model can by with ESEM Deng Image-forming instrument compatibility use, to test specimen uniaxial tensile stress, twin shaft tension mechanical state under carry out inspection in situ Survey, effective means is provided to the deformation damage mechanism and property evolution rule for disclosing the micro-dimension materials such as carbon fiber, is material Characterize and deeply understand that material mechanical performance provides test equipment.
Background technology
It is with the development of science and technology, all urgent in fields such as Ultra-precision Turning, microelectronic engineering, bioengineering, nanometer technologies Need submicron order even nano level accurate operation technology.In miniature assembly system, micro clamping device system is to ensure entirely The key component of micro mechanical system reliability and function, it is often closely connected one with systems technologies such as micro assemby, microoperations Rise.Micro clamping device is multi-party in micromechanical parts processing, micromechanics assembling and bioengineering etc. as a kind of typical microactrator Face is all widely used.
One complete micro clamping device should include driving and transmission two large divisions, is often driven using piezoelectric stack Dynamic, its stroke is relevant with the voltage applied, is influenceed by factors such as environment temperature, humidity, electromagnetic field, air-flows smaller.And Transmission link uses flexible hinge, and it is a kind of new transmission developed in recent years, supporting mechanism, and it utilizes weak ring The elastic deformation of section completes similar hinge function, have small volume, without friction, movement clearance is small and resolution ratio is high etc. has Point.But from the point of view of present circumstances, in place of the micro clamping device also Shortcomings combined using flexible hinge with piezoelectric stack:State first Research of the interior scholar to micro clamping device focuses primarily upon the structure design and theoretical modeling for realizing holding function.Remaining sea proposes suitable For inertial confinement fusion(ICF)The multi-purpose micro clamping device of target clamping;Hao Yongping proposes that one kind is used for MEMS(Micro- Electro-Mechanical System)The micro clamping device structure of assembling;Wang Daihua proposes a kind of micro-clamp of Piezoelectric Driving And its open loop placement property.But the clamper designed by them is only capable of realizing micro- holding function, how do not account for by chucking power Sensing is integrated in structure, it is impossible to detects the chucking power of clamper in the operating condition.And micro clamping device is in micro- clamping process, no Only need to complete to the clipping operation of microsize object, also to avoid causing small items in micro- clamping process damage or Come off.And existing micro clamping device only belongs to opened loop control, it is not carried out to the examinations in clamping, so as to enter to chucking power Row prediction and control.Secondly, the present micro clamping device using flexible hinge is mostly planar flexible linkage, and is only had There is clamping action, it is difficult to clamping the Micro Mechanical Properties rests to material being combined.
To sum up, exploitation can integrate micro-dimension specimen holder and is combined with material Micro Mechanical Properties rests, and can be to clamping Power carries out the micro clamping device of closed-loop control, is very necessary.
The content of the invention
The purpose of this utility model is to provide a kind of Piezoelectric Driving three-jaw based on flexible hinge bionical micro-dimension clamping Mechanism, solve the following micro-dimension test specimen of grade existing for prior art and be not easy to clamp, it is difficult to mechanical property is carried out to it and ground The problems such as studying carefully.The utility model is examined by piezoelectric type parallel connection loading unit, flexible hinge gear unit, bionical bare terminal end, chucking power Survey unit, high temperature loading unit and combined type support unit composition.Using piezoelectric drive element measuring accuracy height, compact, The advantages such as compact-sized, response quickly and output displacement are easily controllable, and bionical bare terminal end, chucking power detection unit are combined, this Utility model can also realize the prediction and control to chucking power in addition to the clamping to different size test specimens can be achieved.At the same time, High temperature loading unit, combined type support unit can be applied in combination with Piezoelectric Driving three-jaw micro-dimension clamping device, form height and warmly take Simple stress test platform under the conditions of labour.With twin shaft base combination, biaxial plane stress state under the conditions of high-temperature service may make up Test platform.In addition, the utility model overall dimensions are only 30 mm × 26 mm × 16mm, can place and ESEM chamber It is interior, it is used cooperatively with sign instruments such as ESEMs, really realizes in-situ test, to disclose the change of the micro-dimension materials such as carbon fiber Shape damage mechanisms and property evolution rule provide effective means.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge, including piezoelectric type loading unit, flexibility Hinge gear unit, bionical grip unit, chucking power detection unit, high temperature loading unit, detachable support unit, wherein, it is soft Flexible hinge revolute pair mobile terminal 3, flexible hinge spherical pair mobile terminal 4, flexible hinge pedestal 5 in property hinge gear unit and Pawl toe bare terminal end actually integrally, the groove consistent with multi-load packaged type 1 width of piezoelectric stack is provided with flexible hinge pedestal 5, The installation by adhering of multi-load packaged type piezoelectric stack 1 passes through the pretension of piezoelectric stack pretension block 2 in the groove;Flexible hinge Chain pedestal 5 is rigidly connected by M3 bolts 6, M3 nuts 10 and Combined type base 7, and twin shaft pedestal 8 passes through M2 bolts 9 and combined type Pedestal 7 is rigidly connected;Halogen heating lamp 14 in high temperature loading unit is connected through a screw thread mode and connected with the rigidity of Combined type base 7 Connect;
The piezoelectric type loading unit include three multi-load piezoelectric actuators, three flexible hinge spherical pair mobile terminals 4, Three flexible hinge revolute pair mobile terminals 3, each multi-load piezoelectric actuator is by piezoelectric stack pretension block 2, multi-load packaged type Piezoelectric stack 1 forms;Three multi-load piezoelectric actuators are installed on flexible hinge pedestal 5 in envelop-type annular spread in 120 ° Neck in;When not applying voltage to multi-load packaged type piezoelectric stack 1, it is made by the adjustable piezoelectric stack pretension block 2 of thickness With in compressive state;When applying voltage, its axial elongation, and the multi-load packaged type piezoelectric stack 1 of rectangular shape has Output displacement self-checking function;
The flexible hinge gear unit is:The output displacement of multi-load packaged type piezoelectric stack 1 passes through lower floor's flexible hinge The face intramedullary expansion of the revolute pair mobile terminal of chain 17 and the pressure with the flexible hinge spherical pair mobile terminal 4 of internal layer flexible hinge 16 for fulcrum Rod bending is transferred to pawl toe bare terminal end;Three flexible hinge spherical pair mobile terminals 4 of flexible hinge revolute pair mobile terminal 2, three and Three pawl toe bare terminal ends are distributed in 120 ° of circular symmetrics, it is ensured that clamping axis overlaps with material axis;
The bionical grip unit is three pawl toe bare terminal ends, and each pawl toe bare terminal end is by non-smooth surface of organism 11 and soil The pawl toe configuration 12 of earth animal is formed, and the output displacement of multi-load packaged type piezoelectric stack 1 is moved by flexible hinge revolute pair End 3 and flexible hinge spherical pair mobile terminal 4 are transferred to pawl toe bare terminal end, pawl toe bare terminal end is produced folder of the deformation realization to test specimen Hold;The non-smooth surface of organism 11 and pawl toe configuration 12 that pawl toe bare terminal end has, which make to rub between pawl toe bare terminal end and gripped object, to be increased Greatly, so as to realizing to microsize, be difficult to the clamping of clamping test pieces;
The chucking power detection unit is:Resistance strain gage 15 is directly attached at the pawl toe configuration 12 of pawl toe bare terminal end, When pawl toe configuration 12 contacts realization clamping with being clamped micro- test specimen 13, deformation is maximum at the tip of pawl toe configuration 12, referred to herein as The size of chucking power is directly reacted in the position of power sensing unit, the strain of resistance strain gage 15;Distinguished by the method for demarcation true The relation of level pressure electric drive input voltage, chucking power and force sensor units strain, can draw driving voltage and chucking power it Between relation, be easy to predict and control chucking power.
The detachable support unit is made up of Combined type base 7, twin shaft pedestal 8 and bolt 9, when Combined type base 7 is single When being solely rigidly connected with flexible hinge pedestal 5 by bolt 6, nut 10, the single shaft mechanical test function to material is realized;Twin shaft Pedestal 8 is connected by bolt 9 with Combined type base 7, is connected by 6 bolts, nut 10 with flexible hinge pedestal 5, is realized twin shaft Mechanical test function;
The high temperature loading unit includes Combined type base 7 and halogen heating lamp 14, and Combined type base 7 has ring at center Connected in star structure, halogen heating lamp 14 are directly embedded into the center of Combined type base 7, and light source focus is to be clamped in micro- test specimen 13 At the heart.
Described multi-load packaged type piezoelectric stack 1 in envelop-type annular spread in 120 °, under voltage signal effect its Output is displaced through the face intramedullary expansion of the revolute pair mobile terminal of lower floor's flexible hinge 17 and the flexible hinge with internal layer flexible hinge 16 Chain spherical pair mobile terminal 4 is transferred to pawl toe bare terminal end for the depression bar bending of fulcrum, finally realizes pawl toe bare terminal end to axis direction Rotation and the rollback motion close to flexible hinge pedestal 5;Based on the driving voltage of different amplitudes, three multi-load packaged type pressures Electricity stacks 1 combining form for realizing various axial elongation motion, corresponding to the various forms of displacements of pawl toe bare terminal end;And then Realize the clamping by micrometer test specimen for different-diameter.
Described pawl toe bare terminal end has non-smooth surface of organism 11, pawl toe bare terminal end surface distributed spherical crown shape convex closure, increases Big clamping resistance simultaneously significantly improves the service life of bare terminal end, makes small-size test piece clamping closer.Transported at the top of pawl toe bare terminal end With the pawl toe configuration 12 of soil animal, when the output campaign of multi-load packaged type piezoelectric stack 1 is transferred to pawl toe bare terminal end, its The pawl toe configuration 12 at top increases clamping stability;And three pawl toe bare terminal ends are distributed in 120 ° of space symmetrs, when to multi-load When packaged type piezoelectric stack 1 inputs identical voltage signal, its motion mode is consistent, it is ensured that the center of test specimen and device are several during clamping What center superposition, ensure centering.
Described chucking power detection unit, resistance strain gage 15 is attached directly to the point of pawl toe configuration 12 of bionical bare terminal end Deformation maximum is held, relation between driving voltage and chucking power is determined by demarcating, realizes the prediction and control to chucking power;Micro- In clamping process, the clipping operation to microsize object is not only completed, it is thus also avoided that to small items in micro- clamping process Cause to damage or come off.
Described Combined type base 7 is rigidly connected by M3 bolts 6, M3 nuts 10 and flexible hinge pedestal 5, realizes single shaft Mechanical test;When the output displacement of multi-load packaged type piezoelectric stack 1 is transferred to pawl toe bare terminal end, its motion mode is removed in Outside the clamping of mandrel, also there is the rollback motion close to flexible hinge pedestal 5, clamping and axial tension corresponding to test specimen;Group Box-like pedestal 7 can also be rigidly connected with twin shaft pedestal 8 by M2 bolts 9, realize twin shaft mechanical test.
Described high temperature loading unit is integrated in Combined type base 7, and halogen heating lamp 14 is directly embedded into combined type base In annular groove at 7 centers of seat, light source focus is right against at the clamped center of micro- test specimen 13, under the conditions of constructing high-temperature service Mechanical property test platform.
The beneficial effects of the utility model are:Delicate structure, whole device size be only the mm of 30 mm × 26 × 16mm, driven by piezoelectric stack, accurately transmission can be achieved to below characteristic size diameter 0.1mm micro- test specimens flexible hinge Clamping.While can increasing the stability of clamping with bionical bare terminal end and complete to the clipping operation of microsize object, avoid In micro- clamping process small items are caused to damage or come off.And high temperature loading unit, combined type support unit can be integrated, , can be under high-temperature service environment and plane stress state by being used with the compatible of Image-forming instrument equipment such as SEM The Micromechanics mechanism of material is studied, reliable to understand, disclosing the military service of the mechanical property of material and lifting engineering structure Property and stability provide clamp method.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding to of the present utility model, forms the part of the application, Illustrative example of the present utility model and its illustrate be used for explain the utility model, do not form to improper limit of the present utility model It is fixed.
Fig. 1 is overall appearance structural representation of the present utility model;
Fig. 2 is uniaxial tension form schematic diagram of the present utility model;
Fig. 3 is clamping device overall schematic of the present utility model;
Fig. 4 is flexible hinge overall schematic of the present utility model;
Fig. 5 is bionical bare terminal end schematic diagram of the present utility model;
Fig. 6 is load mode schematic diagram of the present utility model;
Fig. 7 is flexible hinge transmission principle figure of the present utility model.
In figure:1st, multi-load packaged type piezoelectric stack 2, piezoelectric stack pretension block 3, flexible hinge revolute pair mobile terminal 4th, flexible hinge spherical pair mobile terminal 5, flexible hinge pedestal 6, M3 bolts 7, Combined type base 8, twin shaft pedestal 9, M2 spiral shells Bolt 10, M3 nuts 11, non-smooth surface of organism 12, pawl toe configuration 13, be clamped micro- test specimen 14, halogen heating lamp 15, Resistance strain gage;16th, internal layer flexible hinge;17th, lower floor's flexible hinge.
Embodiment
Detailed content and its embodiment of the present utility model are further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 to Fig. 7, the bionical micro-dimension of the Piezoelectric Driving three-jaw of the present utility model based on flexible hinge clamps Mechanism, including the loading of piezoelectric type loading unit, flexible hinge gear unit, bionical grip unit, chucking power detection unit, high temperature Unit, detachable support unit, regular groove are processed on flexible hinge pedestal 5, with the size of multi-load packaged type piezoelectric stack 1 Matching, multi-load packaged type piezoelectric stack 1 is interior in the groove of flexible hinge pedestal 5, and passes through the adjustable pretension block 2 of thickness Carry out pretension, it is ensured that multi-load packaged type piezoelectric stack 1 bears compressive load.By piezoelectricity fold stack driver output voltage to overloading Lotus packaged type piezoelectric stack 1 so that multi-load packaged type piezoelectric stack 1 has displacement output.Flexible hinge pedestal 5 keeps fixing, The output displacement of multi-load packaged type piezoelectric stack 1 passes through the revolute pair mobile terminal 3 of lower floor's flexible hinge 17 that is in direct contact with it Face intramedullary expansion be transferred to pawl toe supporting rod.Three pawl toe supporting rods are spatially distributed in 120 ° of circular symmetrics and passed through two-by-two The cylindrical bar of internal layer flexible hinge 16 is connected, and two groups of taper flexible hinge spherical pair mobile terminals are machined with each cylindrical bar 4.When motion is transferred to pawl toe supporting rod, using the spherical pair mobile terminal center of internal layer flexible hinge 16 as motion fulcrum, in moment of flexure Effect is lower to cause the cylinder rod bending of internal layer flexible hinge 16 so that pawl toe bare terminal end is close to test specimen, by adding on pawl toe bare terminal end The non-smooth surface of organism 11 that work goes out is with pawl toe configuration 12 to being clamped by micrometer test specimen 13 and having returning for close flexible hinge pedestal 5 The effect of moving back.The bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw based on flexible hinge of clamping and the motion that retracts can be achieved, can It is connected by M3 bolts 6 with Combined type base 7, composition can be put down to the mechanical test that uniaxial tensile test is carried out by micrometer test specimen 13 Platform.If want to test plane stress, the uniaxial tensile test platform of composition can be combined by M2 bolts 9 with twin shaft pedestal 8, structure Into four bare terminal ends in plane two-by-two in the twin shaft mechanical property test platform of 90 ° of angles.
The piezoelectric type loading unit includes three multi-load piezoelectric actuators, three spheres of revolute pair mobile terminal 3, three Secondary mobile terminal 4, wherein flexible hinge revolute pair mobile terminal 3, flexible hinge pedestal 5, flexible hinge spherical pair mobile terminal 4, pawl toe Bare terminal end is actually integral.Flexible hinge pedestal 5 is the regular groove structure of processing in flexible hinge rigid element, and multi-load encapsulates Formula piezoelectric stack 1 is arranged in the groove in flexible hinge pedestal 5 by embedded mode.Multi-load packaged type piezoelectric stack 1 Pretension is carried out by the adjustable pretension block 2 of thickness, it is ensured that multi-load packaged type piezoelectric stack 1 bears compressive load.Flexible hinge Flexible portion is that flexible hinge revolute pair mobile terminal 3 passes through focused ion with flexible hinge spherical pair mobile terminal 4 in rotating unit Beam is cut, it is ensured that flexible portion can realize required deformation, and constant proportion rate is carried out to the output displacement of multi-load packaged type piezoelectric stack 1 Linear Amplifer, to realize clamping movement of the pawl toe bare terminal end to test specimen.Flexible hinge pedestal 5 is connected through a screw thread by bolt 6 Mode is rigidly connected with Combined type base 7.Twin shaft pedestal 8 mode can be connected through a screw thread with M2 bolts 9 and Combined type base 7 is firm Property connection.
Described bionical grip unit includes three bionical gripper jaws, wherein each bionical blessing pawl is by Biologic nonsmoothed table Face 11 and pawl toe configuration 12 form.Non-smooth surface of organism 11 has a convex hull-shaped Non-smooth surface form, and convex closure diameter is from bare terminal end Gradually increase to flexible hinge base end diameter, added compared with clamping end surfaces without specially treated between bare terminal end and test specimen Contact area, make clamping more firm.Pawl toe configuration 12 is developed by typical soil animal pawl toe configuration, it is ensured that bare terminal end Clamping to test specimen is closer, reliable.Three bionical gripper jaws use 120 ° of interior envelop-type annular spread, have from centering Property, it is ensured that the clamped test specimen axis axis overall with clamping device coincides.
Described chucking power detection unit includes pawl toe configuration 12, is clamped micro- test specimen 13 and resistance strain gage 15, resistance Foil gauge 15 can be attached to directly at the pawl toe configuration 12 of bionical bare terminal end, when pawl toe configuration 12 contacts with being clamped micro- test specimen 13 When realizing clamping, deformation is maximum at the tip of pawl toe configuration 12, referred to herein as the position of power sensing unit, and resistance strain gage 15 is answered Straighten the reversed size for answering chucking power.Determine that piezoelectric actuator input voltage, chucking power and power pass respectively by the method for demarcation The relation of sensor cell strain, can draw the relation between driving voltage and chucking power, be easy to predict and control chucking power.Micro- In clamping process, the clipping operation to microsize object is not only completed, it is thus also avoided that to small items in micro- clamping process Cause to damage or come off.
Described combined type support unit is by M3 bolts 6, M2 bolts 9, M3 nuts 10, Combined type base 7, twin shaft pedestal 8 Composition.There are two Parallel Symmetric end faces in Combined type base 7, end face center is threaded hole, the processing of the center of flexible hinge pedestal 5 There is through hole, Combined type base 7 can be connected with flexible hinge pedestal 5 by M3 bolts 6.When multi-load packaged type piezoelectric stack 1 is defeated After going out displacement, pass through the displacement transmission of flexible hinge revolute pair mobile terminal 3 and flexible hinge spherical pair mobile terminal 4, bionical clamping Pawl also has the motion that retracts in addition to stepping up to test specimen, and Combined type base 7 is now to one support of flexible hinge gear unit Thrust, make the effect for being clamped micro- under tension of test specimen 13, that is, uniaxial tensile test can be done to microsize test specimen by constituting Mechanics experiment platform.In addition, can be also connected using identical principle, whole mechanism with twin shaft pedestal 8 by M2 bolts 9, The experiment porch of twin shaft mechanical test research material plane stress state can be carried out by forming.
The high temperature loading unit includes Combined type base 7 and halogen heating lamp 14, and Combined type base 7 has ring at center Connected in star structure, halogen heating lamp 14 can be directly embedded into the center of Combined type base 7, and light source focus is to be clamped micro- test specimen 13 At center, the mechanical property test platform under the conditions of high-temperature service is formed.
Referring to Fig. 1 to Fig. 7, the bionical micro-dimension clamping machine of Piezoelectric Driving three-jaw based on flexible hinge the utility model is related to Structure, the overall dimensions of test device are about 30 mm × 26 mm × 16mm, the overloading of three built-in encapsulation type piezoelectric stacks Lotus piezoelectric actuator in envelope annular distributing installation form in 120 °, by lower floor's flexible hinge move minor face intramedullary expansion and within Layer fulcrum is the motion transmission in the revolute pair centre of motion, and its motion of axial elongation under different time-sequential voltages corresponds to clamped The different clamping diameters of test specimen.Bionical bare terminal end uses Biologic nonsmoothed mechanism and soil animal pawl toe configuration, and increase clamping rubs Power is wiped, microsize component can be solved and clamp this problem.Chucking power detection unit can detect chucking power of the bare terminal end to test specimen, Avoid damage to test specimen.In addition, micro-grabbe can also be combined with combined type support unit, high temperature loading unit, high temperature is constructed The controllable single shaft of service condition bottom offset, the twin shaft field of force, realize microsize component single shaft, twin shaft Mechanics Performance Testing function. The utility model is compact-sized, has wide range of applications, and can be used in combination with ESEM, is the power of the micro-dimension materials such as carbon fiber Learn performance test, offer effective tool is provided.The component and concrete model being related in the utility model be:Multi-load encapsulates The model PSt 150/2 × 3/5 of formula piezoelectric stack 1, ceramic dimension are 2 × 3 × 5mm, and rigidity is 45 N/ μm, resonant frequency For 150kHz, maximum thrust 300N, nominal displacement is 5 μm.Pretension block 7 uses linear cutter mode, and its thickness is adjustable, For 1mm-1.2mm, the pretension of multi-load packaged type piezoelectric stack 9 can be achieved, maximum pretightning force can be to 100 N.Flexible hinge turns Secondary mobile terminal 4, flexible hinge spherical pair mobile terminal 5, flexible hinge pedestal 5 actually one are moved, its locating surface and contact surface are done Polish planarization process.Wherein, the conical surface processing of flexible hinge spherical pair mobile terminal 5 is divided into two processes, is respectively essence Close numerical control boring processing and fast tool servo processing.Combined type base 7 and twin shaft pedestal 8 use linear cutter mode, its Locating surface and contact surface do polishing planarization process.Non-smooth surface of organism 11 has 50 μm -1 μm of size, change in size Convex closure structure, using cold-air dynamic spraying method, using compressed gas as gas is accelerated, drive 65Mn powder particles with room temperature, The bionical clamping end surfaces of supersonic impacting, make metallic particles that strong plastic deformation occur and deposit to form coating.Pawl toe configuration 12 because its cutting-edge structure is small, therefore uses the processing mode of focused ion beam cutting.The model G3 of halogen heating lamp 14, highest add Hot temperature is up to 1200 DEG C.Resistance strain gage model Japan republicanism KHCD type high temperature strain foils, can be under 850 DEG C of hot environments Steady operation.
In specific test process, if only realizing to micro-dimension specimen holder, by three multi-load packaged type piezoelectric stacks 1 In the neck of embedded flexible hinge pedestal 5, pretension block 2 is positioned between the two, realized to the pre- of multi-load piezoelectric stack 1 Tightly.Flexible hinge pedestal 5 is installed in fixed platform by M3 bolts 6 and M3 nuts 10 again.To multi-load packaged type piezoelectricity 1 input 100V voltages are stacked, the face intramedullary expansion of flexible hinge revolute pair mobile terminal 3 are displaced through caused by it and with flexible hinge The rotation for fulcrum of spherical pair mobile terminal 4 so that bionical bare terminal end realizes the clamping to being clamped micro- test specimen 13.Pawl toe configuration The resistance strain gage 15 adhered at 12 realizes the real-time monitoring to chucking power, avoids and small items are made in micro- clamping process Into damaging or come off.
If wanting to realize the Mechanics Performance Testing under the conditions of clamped micro- high-temperature service of test specimen 13, need mounted folder Hold mechanism entirely through M3 bolts 6 and M3 nuts 10 with Combined type base 7 to be connected, two clamping devices are symmetrically installed face-to-face, right The input voltage of multi-load piezoelectricity fold stack driver 1, the motion that retracts synchronously is realized in clamping process, so as to being clamped micro- test specimen 13 realize single shaft Mechanics Performance Testing.Halogen heating lamp 14 is embedded in the annular groove at the center of Combined type base 7, to halogen Heating lamp 14 applies 220V voltages, it is ensured that it realizes stable temperature field.
If wanting to realize, to being clamped biaxial plane Mechanics Performance Testing under the conditions of micro- high-temperature service of test specimen 13, needing first will be by Clamp micro- test specimen 13 to be positioned in mounted single shaft mechanical test platform, mounted clamping device is entirely through threaded connection It is connected with twin shaft pedestal 8, then twin shaft pedestal 8 is passed through into the combined type in M2 bolts 9 and mounted single shaft mechanical test platform Pedestal 7 is connected, and ensures that clamped both ends and the clamping device installed on twin shaft pedestal 8 be not overall in twin shaft test specimen during installation Coaxially.The twin shaft Mechanics Performance Testing under the conditions of high-temperature service can be achieved after installing.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for ability For the technical staff in domain, the utility model can have various modifications and variations.All any modifications made to the utility model, Equivalent substitution, improvement etc., should be included within the scope of protection of the utility model.

Claims (6)

  1. A kind of 1. bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge, it is characterised in that:Including piezoelectric type Loading unit, flexible hinge gear unit, bionical grip unit, chucking power detection unit, high temperature loading unit, detachable support Unit, wherein, the flexible hinge revolute pair mobile terminal in flexible hinge gear unit(3), flexible hinge spherical pair mobile terminal (4), flexible hinge pedestal(5)And pawl toe bare terminal end is actually integral, flexible hinge pedestal(5)In be provided with and multi-load packaged type pressure Electricity stacks(1)The consistent groove of width, multi-load packaged type piezoelectric stack(1)Installation by adhering passes through in the groove Piezoelectric stack pretension block(2)Pretension;Flexible hinge pedestal(5)Pass through M3 bolts(6), M3 nuts(10)With Combined type base(7) It is rigidly connected, twin shaft pedestal(8)Pass through M2 bolts(9)With Combined type base(7)It is rigidly connected;Halogen in high temperature loading unit Heating lamp(14)It is connected through a screw thread mode and Combined type base(7)It is rigidly connected;
    The piezoelectric type loading unit includes three multi-load piezoelectric actuators, three flexible hinge spherical pair mobile terminals(4), three Individual flexible hinge revolute pair mobile terminal(3), each multi-load piezoelectric actuator is by piezoelectric stack pretension block(2), multi-load encapsulation Formula piezoelectric stack(1)Composition;Three multi-load piezoelectric actuators are installed on flexible hinge base in envelop-type annular spread in 120 ° Seat(5)Neck in;Not to multi-load packaged type piezoelectric stack(1)When applying voltage, it is pre- by the adjustable piezoelectric stack of thickness Tight block(2)Effect, in compressive state;When applying voltage, its axial elongation, and the multi-load packaged type piezoelectricity of rectangular shape Stack(1)With output displacement self-checking function;
    The flexible hinge gear unit is:Multi-load packaged type piezoelectric stack(1)Output displacement pass through lower floor's flexible hinge (17)The face intramedullary expansion of revolute pair mobile terminal and with internal layer flexible hinge(16)Flexible hinge spherical pair mobile terminal(4)For fulcrum Depression bar bending be transferred to pawl toe bare terminal end;Three flexible hinge revolute pair mobile terminals(3), three flexible hinge spherical pair movements End(4)And three pawl toe bare terminal ends are distributed in 120 ° of circular symmetrics, it is ensured that clamping axis overlaps with material axis;
    The bionical grip unit is three pawl toe bare terminal ends, and each pawl toe bare terminal end is by non-smooth surface of organism(11)And soil The pawl toe configuration of animal(12)Composition, multi-load packaged type piezoelectric stack(1)Output displacement moved by flexible hinge revolute pair Moved end(3)And flexible hinge spherical pair mobile terminal(4)Pawl toe bare terminal end is transferred to, pawl toe bare terminal end is produced deformation and realizes to examination The clamping of part;The non-smooth surface of organism that pawl toe bare terminal end has(11)And pawl toe configuration(12)Make pawl toe bare terminal end with being clamped Rub increase between thing, so as to realize to microsize, be difficult to the clamping of clamping test pieces;
    The chucking power detection unit is:Resistance strain gage(15)Directly attach to the pawl toe configuration of pawl toe bare terminal end(12)Place, When pawl toe configuration(12)With being clamped micro- test specimen(13)When clamping is realized in contact, pawl toe configuration(12)Deformation is maximum at tip, this The position of place's as power sensing unit, resistance strain gage(15)Strain directly reaction chucking power size;
    The detachable support unit is by Combined type base(7), twin shaft pedestal(8)And bolt(9)Composition, works as Combined type base (7)Individually with flexible hinge pedestal(5)Pass through bolt(6), nut(10)When being rigidly connected, the single shaft mechanics survey to material is realized Try function;Twin shaft pedestal(8)Pass through bolt(9)With Combined type base(7)It is connected, passes through(6)Bolt, nut(10)With flexible hinge Chain pedestal(5)It is connected, realizes twin shaft mechanical test function;
    The high temperature loading unit includes Combined type base(7)And halogen heating lamp(14), Combined type base(7)Have at center Circular groove structure, halogen heating lamp(14)It is directly embedded into Combined type base(7)Center, light source focus are to be clamped micro- examination Part(13)At center.
  2. 2. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature It is:Described multi-load packaged type piezoelectric stack(1)In envelop-type annular spread in 120 °, its is defeated under voltage signal effect What is gone out is displaced through lower floor's flexible hinge(17)The face intramedullary expansion of revolute pair mobile terminal and with internal layer flexible hinge(16)Flexibility Hinge spherical pair mobile terminal(4)Pawl toe bare terminal end is transferred to for the depression bar bending of fulcrum, finally realizes pawl toe bare terminal end to axis The rotation in direction and close flexible hinge pedestal(5)Rollback motion;Based on the driving voltage of different amplitudes, three multi-load envelopes Dress formula piezoelectric stack(1)The combining form of various axial elongation motion is realized, corresponding to the various forms of positions of pawl toe bare terminal end Move;And then realize the clamping by micrometer test specimen for different-diameter.
  3. 3. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature It is:Described pawl toe bare terminal end has non-smooth surface of organism(11), pawl toe bare terminal end surface distributed spherical crown shape convex closure, pawl toe The pawl toe configuration of soil animal is used at the top of bare terminal end(12), when multi-load packaged type piezoelectric stack(1)Output campaign transmission During to pawl toe bare terminal end, the pawl toe configuration at the top of it(12)Increase clamping stability;And three pawl toe bare terminal ends are in 120 ° of spaces It is symmetrical, when to multi-load packaged type piezoelectric stack(1)When inputting identical voltage signal, its motion mode is consistent, it is ensured that folder The center of test specimen overlaps with device geometric center when holding, and ensures centering.
  4. 4. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature It is:Described chucking power detection unit, by resistance strain gage(15)It is attached directly to the pawl toe configuration of bionical bare terminal end(12) Sophisticated deformation maximum, relation between driving voltage and chucking power is determined by demarcating, realizes the prediction and control to chucking power; In micro- clamping process, the clipping operation to microsize object is not only completed, it is thus also avoided that to minim in micro- clamping process Body is caused to damage or come off.
  5. 5. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature It is:Described Combined type base(7)Pass through M3 bolts(6), M3 nuts(10)With flexible hinge pedestal(5)It is rigidly connected, it is real Existing single shaft mechanical test;Multi-load packaged type piezoelectric stack(1)Output displacement when being transferred to pawl toe bare terminal end, its motion mode In addition to the clamping close to central shaft, also have close to flexible hinge pedestal(5)Rollback motion, clamping and axle corresponding to test specimen To stretching;Combined type base(7)Can also be with twin shaft pedestal(8)Pass through M2 bolts(9)It is rigidly connected, realizes that twin shaft mechanics is surveyed Examination.
  6. 6. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature It is:Described high temperature loading unit is integrated in Combined type base(7)In, halogen heating lamp(14)It is directly embedded into combined type base Seat(7)In annular groove at center, light source focus is right against clamped micro- test specimen(13)At center, high-temperature service bar is constructed Mechanical property test platform under part.
CN201721064835.9U 2017-08-24 2017-08-24 The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge Withdrawn - After Issue CN207066866U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721064835.9U CN207066866U (en) 2017-08-24 2017-08-24 The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721064835.9U CN207066866U (en) 2017-08-24 2017-08-24 The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge

Publications (1)

Publication Number Publication Date
CN207066866U true CN207066866U (en) 2018-03-02

Family

ID=61516491

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721064835.9U Withdrawn - After Issue CN207066866U (en) 2017-08-24 2017-08-24 The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge

Country Status (1)

Country Link
CN (1) CN207066866U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107328649A (en) * 2017-08-24 2017-11-07 吉林大学 The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107328649A (en) * 2017-08-24 2017-11-07 吉林大学 The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge

Similar Documents

Publication Publication Date Title
Kim et al. Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation
Wang et al. Design of a piezoelectric-actuated microgripper with a three-stage flexure-based amplification
Sun et al. A novel piezo-driven linear-rotary inchworm actuator
Wei et al. Design and testing of a new force-sensing cell microinjector based on small-stiffness compliant mechanism
CN104677746B (en) Micro structures fatigue at high temperature performance testing device and method under combined stress
Gao et al. A compact 2-DOF micro/nano manipulator using single miniature piezoelectric tube actuator
US20100186520A1 (en) Microtesting Rig with Variable Compliance Loading Fibers for Measuring Mechanical Properties of Small Specimens
CN104502202A (en) Online material biaxial static-dynamic performance test platform under service temperature
CN107328649A (en) The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge
Zhang et al. A 3-DOF piezoelectric micromanipulator based on symmetric and antisymmetric bending of a cross-shaped beam
Deng et al. Development and experiment evaluation of a compact inchworm piezoelectric actuator using three-jaw type clamping mechanism
Sun et al. Design and analysis of a large-range precision micromanipulator
Qu et al. Microscale compression and shear testing of soft materials using an MEMS microgripper with two-axis actuators and force sensors
Clévy et al. Flexible micro-assembly system equipped with an automated tool changer
Ji et al. Three-dimensional skin-type triboelectric nanogenerator for detection of two-axis robotic-arm collision
CN207066866U (en) The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge
Li et al. A 3-DOF inertial impact locomotion robot constructed on four piezoelectric bimorph actuators
CN204536132U (en) Micro structures fatigue at high temperature performance testing device under compound stress
Chen et al. A novel flexure-based uniaxial force sensor with large range and high resolution
Jing et al. Micro-force sensing mobile microrobots
Xu et al. A three-stage amplification piezoelectric-actuated micro-gripper with adjustable output displacement: design, modeling, and experimental evaluation
Liang et al. Micromanipulator with integrated force sensor based on compliant parallel mechanism
Su et al. Implementation of cross-scale plane micro-scratching process driven by hybrid piezoelectric actuation
Vidyaa et al. Evaluation of macro sized metal based microgrippers for handling microcomponents
Liu et al. A Piezoelectric Micro-Gripper with Large Working Stroke and Integrated Force Sensor for Optical Fiber Manipulation

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20180302

Effective date of abandoning: 20230512

AV01 Patent right actively abandoned

Granted publication date: 20180302

Effective date of abandoning: 20230512

AV01 Patent right actively abandoned
AV01 Patent right actively abandoned