CN107328649A - The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge - Google Patents
The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge Download PDFInfo
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- CN107328649A CN107328649A CN201710733966.XA CN201710733966A CN107328649A CN 107328649 A CN107328649 A CN 107328649A CN 201710733966 A CN201710733966 A CN 201710733966A CN 107328649 A CN107328649 A CN 107328649A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/04—Chucks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/18—Performing tests at high or low temperatures
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D15/00—Control of mechanical force or stress; Control of mechanical pressure
- G05D15/01—Control of mechanical force or stress; Control of mechanical pressure characterised by the use of electric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0016—Tensile or compressive
- G01N2203/0017—Tensile
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0075—Strain-stress relations or elastic constants
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/025—Geometry of the test
- G01N2203/0252—Monoaxial, i.e. the forces being applied along a single axis of the specimen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/025—Geometry of the test
- G01N2203/0254—Biaxial, the forces being applied along two normal axes of the specimen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/04—Chucks, fixtures, jaws, holders or anvils
- G01N2203/0482—Chucks, fixtures, jaws, holders or anvils comprising sensing means
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Abstract
The present invention relates to a kind of bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw based on flexible hinge, precision actuation and material Micro Mechanical Properties in-situ test field.The multi-load piezoelectric actuator of three built-in encapsulation type piezoelectric stacks is in the annular distributing installation form of envelope in 120 °, minor face intramedullary expansion is moved by lower floor's flexible hinge and transmitted using internal layer fulcrum as the motion in the revolute pair centre of motion, pawl toe bare terminal end uses Biologic nonsmoothed mechanism and soil animal pawl toe configuration, increase clamping friction power, microsize component can be solved and clamp this problem, in addition, micro-grabbe can also be with combined type support unit, high temperature loading unit is combined, construct the controllable single shaft of high-temperature service condition bottom offset, the twin shaft field of force, realize microsize component single shaft, twin shaft Mechanics Performance Testing function.Compact conformation of the present invention, is had wide range of applications, and can be used in combination with ESEM, and effective tool is provided for the Measurement of Material Mechanical Performance of the micro-dimension such as carbon fiber, sign.
Description
Technical field
The present invention relates to precision actuation and material Micro Mechanical Properties in-situ test field, more particularly to micro-electro-mechanical systems are commanded
The instrument class in domain, the bionical micro-dimension clamping device of espespecially a kind of Piezoelectric Driving three-jaw based on flexible hinge, for for
The clamping and test of the following microsize materials of characteristic size diameter 0.1mm.The present invention can by with the imager such as ESEM
The compatibility of device is used, and in situ detection is carried out under uniaxial tensile stress, the mechanical state of twin shaft tension to test specimen, to disclosing
The deformation damage mechanism and property evolution rule of the micro-dimension material such as carbon fiber provide effective means, are material characterization and deep
Understand that material mechanical performance provides test equipment.
Background technology
With the development of science and technology, all urgent in fields such as Ultra-precision Turning, microelectronic engineering, bioengineering, nanometer technologies
Need submicron order even nano level accurate operation technology.In miniature assembly system, micro clamping device system is to ensure whole
The key component of micro mechanical system reliability and function, it is often closely connected one with the systems technology such as micro assemby, microoperation
Rise.Micro clamping device is multi-party in micromechanical parts processing, micromechanics assembling and bioengineering etc. as a kind of typical microactrator
Face is all widely used.
One complete micro clamping device should include driving and transmission two large divisions, often be driven using piezoelectric stack
Dynamic, its stroke is relevant with the voltage applied, is influenceed smaller by factors such as environment temperature, humidity, electromagnetic field, air-flows.And
Transmission link uses flexible hinge, and it is a kind of new transmission developed in recent years, supporting mechanism, and it utilizes weak ring
The elastic deformation of section completes similar hinge function, has with small volume, without friction, movement clearance be small and resolution ratio is high etc.
Point.But from the point of view of present circumstances, in place of the micro clamping device also Shortcomings combined using flexible hinge with piezoelectric stack：State first
Research of the interior scholar to micro clamping device focuses primarily upon the structure design and theoretical modeling for realizing holding function.Remaining sea proposes suitable
For inertial confinement fusion（ICF）The multi-purpose micro clamping device of target clamping；Hao Yongping proposes a kind of for MEMS（Micro-
Electro-Mechanical System）The micro clamping device structure of assembling；Wang Daihua proposes a kind of micro-clamp of Piezoelectric Driving
And its open loop placement property.But the clamper designed by them is only capable of realizing micro- holding function, how do not account for by chucking power
Sensing is integrated in structure, it is impossible to detect the chucking power of clamper in the operating condition.And micro clamping device is in micro- clamping process, no
Only need to complete to the clipping operation of microsize object, also to avoid causing small items in micro- clamping process damage or
Come off.And existing micro clamping device only belongs to opened loop control, it is not carried out to the examinations in clamping, so as to enter to chucking power
Row prediction and control.Secondly, the micro clamping device of present use flexible hinge is mostly planar flexible linkage, and is only had
There is clamping action, it is difficult to clamping the Micro Mechanical Properties rests to material being combined.
To sum up, exploitation can integrated micro-dimension specimen holder be combined with material Micro Mechanical Properties rests, and can to clamping
Power carries out the micro clamping device of closed-loop control, is very necessary.
The content of the invention
It is an object of the invention to provide a kind of bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw based on flexible hinge,
The following micro-dimension test specimen of grade for solving prior art presence is difficult clamping, it is difficult to carries out mechanical property research etc. to it and asks
Topic.The present invention is by piezoelectric type loading unit in parallel, flexible hinge gear unit, bionical bare terminal end, chucking power detection unit, high temperature
Loading unit and combined type support unit composition.Utilize piezoelectric drive element measuring accuracy height, compact, compact conformation, sound
Should the advantage such as quick and output displacement is easily controllable, and combine bionical bare terminal end, chucking power detection unit, the present invention is except achievable
Outside to the clamping of different size test specimens, the prediction and control to chucking power can be also realized.At the same time, high temperature loading unit, group
Box-like support unit can be applied in combination with Piezoelectric Driving three-jaw micro-dimension clamping device, form simple stress under the conditions of high-temperature service
Test platform.With twin shaft base combination, biaxial plane stress state test platform under the conditions of high-temperature service may make up.In addition, this
Invention overall dimensions are only 30 mm × 26 mm × 16mm, can place with ESEM intracavitary, characterized with ESEM etc.
Instrument is used cooperatively, and really realizes in-situ test, is drilled for the deformation damage mechanism and performance of the micro-dimension materials such as announcement carbon fiber
Law provides effective means.
The above-mentioned purpose of the present invention is achieved through the following technical solutions：
The bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge, including piezoelectric type loading unit, flexible hinge
Gear unit, bionical grip unit, chucking power detection unit, high temperature loading unit, detachable support unit, wherein, flexible hinge
Flexible hinge revolute pair mobile terminal 3, flexible hinge spherical pair mobile terminal 4, flexible hinge pedestal 5 and pawl toe in Chain conveyer unit
Bare terminal end actually integrally, is provided with the groove consistent with multi-load packaged type 1 width of piezoelectric stack, overloading in flexible hinge pedestal 5
The installation by adhering of lotus packaged type piezoelectric stack 1 passes through the pretension of piezoelectric stack pretension block 2 in the groove；Flexible hinge base
Seat 5 is rigidly connected by M3 bolts 6, M3 nuts 10 and Combined type base 7, and twin shaft pedestal 8 passes through M2 bolts 9 and Combined type base
7 are rigidly connected；Halogen heating lamp 14 in high temperature loading unit is connected through a screw thread mode and is rigidly connected with Combined type base 7；
The piezoelectric type loading unit include three multi-load piezoelectric actuators, three flexible hinge spherical pair mobile terminals 4, three
Flexible hinge revolute pair mobile terminal 3, each multi-load piezoelectric actuator is by piezoelectric stack pretension block 2, multi-load packaged type piezoelectricity
Stack 1 composition；Three multi-load piezoelectric actuators are installed on the card of flexible hinge pedestal 5 in envelop-type annular spread in 120 °
In groove；When not applying voltage to multi-load packaged type piezoelectric stack 1, it is acted on by the adjustable piezoelectric stack pretension block 2 of thickness, place
In compressive state；When applying voltage, its axial elongation, and the multi-load packaged type piezoelectric stack 1 of rectangular shape has output
Displacement self-checking function；
The flexible hinge gear unit is：The output displacement of multi-load packaged type piezoelectric stack 1 passes through lower floor's flexible hinge 17
The face intramedullary expansion of revolute pair mobile terminal and curved for the depression bar of fulcrum with the flexible hinge spherical pair mobile terminal 4 of internal layer flexible hinge 16
Song is transferred to pawl toe bare terminal end；Three flexible hinge revolute pair mobile terminals 2, three flexible hinge spherical pair mobile terminals 4 and three
Pawl toe bare terminal end is in 120 ° of circular symmetric distributions, it is ensured that clamping axis is overlapped with material axis；
The bionical grip unit is three pawl toe bare terminal ends, and each pawl toe bare terminal end is moved by non-smooth surface of organism 11 and soil
The pawl toe configuration 12 of thing is constituted, the output displacement of multi-load packaged type piezoelectric stack 1 by flexible hinge revolute pair mobile terminal 3 and
Flexible hinge spherical pair mobile terminal 4 is transferred to pawl toe bare terminal end, pawl toe bare terminal end is produced clamping of the deformation realization to test specimen；Pawl
The non-smooth surface of organism 11 and pawl toe configuration 12 that toe bare terminal end has make the increase that rubbed between pawl toe bare terminal end and gripped object, from
And realize to microsize, be difficult to the clampings of clamping test pieces；
The chucking power detection unit is：Resistance strain gage 15 is directly attached at the pawl toe configuration 12 of pawl toe bare terminal end, works as pawl
When toe configuration 12 contacts realization clamping with being clamped micro- test specimen 13, deformation is maximum at the tip of pawl toe configuration 12, and referred to herein as power is passed
Feel the position of unit, the size of chucking power is directly reacted in the strain of resistance strain gage 15；Pressure is determined by the method for demarcation respectively
The relation of electric drive input voltage, chucking power and force sensor units strain, can draw between driving voltage and chucking power
Relation, is easy to predict and control chucking power.
The detachable support unit is made up of Combined type base 7, twin shaft pedestal 8 and bolt 9, when Combined type base 7 is single
When being solely rigidly connected with flexible hinge pedestal 5 by bolt 6, nut 10, the single shaft mechanical test function to material is realized；Twin shaft
Pedestal 8 is connected by bolt 9 with Combined type base 7, is connected by 6 bolts, nut 10 with flexible hinge pedestal 5, is realized twin shaft
Mechanical test function；
The high temperature loading unit includes Combined type base 7 and halogen heating lamp 14, and the center of Combined type base 7 has annular recessed
Slot structure, halogen heating lamp 14 is directly embedded into the center of Combined type base 7, and light source focus is the clamped center of micro- test specimen 13
Place.
Described multi-load packaged type piezoelectric stack 1 in envelop-type annular spread in 120 °, under voltage signal effect its
The face intramedullary expansion and the flexible hinge with internal layer flexible hinge 16 that are displaced through the revolute pair mobile terminal of lower floor's flexible hinge 17 of output
Chain spherical pair mobile terminal 4 is transferred to pawl toe bare terminal end for the depression bar bending of fulcrum, finally realizes pawl toe bare terminal end to axis direction
Rotation and the rollback motion close to flexible hinge pedestal 5；Based on the driving voltage of different amplitudes, three multi-load packaged type pressures
Electricity stacks 1 combining form for realizing various axial elongation motion, corresponding to the various forms of displacements of pawl toe bare terminal end；And then,
Realize the clamping by micrometer test specimen for different-diameter.
Described pawl toe bare terminal end has non-smooth surface of organism 11, and pawl toe bare terminal end surface distributed spherical crown shape convex closure increases
Big clamping resistance and the service life for significantly improving bare terminal end, make small-size test piece clamping closer.Transported at the top of pawl toe bare terminal end
With the pawl toe configuration 12 of soil animal, when the output campaign of multi-load packaged type piezoelectric stack 1 is transferred to pawl toe bare terminal end, its
The increase clamping stability of pawl toe configuration 12 at top；And three pawl toe bare terminal ends are in 120 ° of space symmetr distributions, when to multi-load
When packaged type piezoelectric stack 1 inputs identical voltage signal, its motion mode is consistent, it is ensured that the center of test specimen and device are several during clamping
What center superposition, it is ensured that centering.
Described chucking power detection unit, resistance strain gage 15 is attached directly to the point of pawl toe configuration 12 of bionical bare terminal end
Deformation maximum is held, relation between driving voltage and chucking power is determined by demarcating, prediction and control to chucking power is realized；Micro-
In clamping process, the clipping operation to microsize object is not only completed, it is thus also avoided that to small items in micro- clamping process
Cause to damage or come off.
Described Combined type base 7 is rigidly connected by M3 bolts 6, M3 nuts 10 and flexible hinge pedestal 5, realizes single shaft
Mechanical test；When the output displacement of multi-load packaged type piezoelectric stack 1 is transferred to pawl toe bare terminal end, its motion mode is removed in
Outside the clamping of heart axle, also with the rollback motion close to flexible hinge pedestal 5, clamping and axial tension corresponding to test specimen；Group
Box-like pedestal 7 can also be rigidly connected with twin shaft pedestal 8 by M2 bolts 9, realize twin shaft mechanical test.
Described high temperature loading unit is integrated in Combined type base 7, and halogen heating lamp 14 is directly embedded into combined type base
In the annular groove of 7 centers of seat, light source focus is right against the clamped center of micro- test specimen 13, under the conditions of constructing high-temperature service
Mechanical property test platform.
The beneficial effects of the present invention are：Delicate structure, whole device size is only 30 mm × 26 mm × 16mm,
Driven by piezoelectric stack, the flexible hinge accurately transmission i.e. achievable clamping to the micro- test specimens of below characteristic size diameter 0.1mm.
While the stability that can increase clamping with bionical bare terminal end is completed to the clipping operation of microsize object, it is to avoid micro-
Small items are caused to damage or come off in clamping process.And can integrated high temperature loading unit, combined type support unit, by with
The compatibility of the Image-forming instrument equipment such as SEM is used, can be to material under high-temperature service environment and plane stress state
Micromechanics mechanism is studied, for the mechanical property for understanding, disclosing material and the service reliability for lifting engineering structure and surely
Qualitative offer clamp method.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this hair
Bright illustrative example and its illustrate to be used to explain the present invention, do not constitute inappropriate limitation of the present invention.
Fig. 1 is overall appearance structural representation of the invention；
Fig. 2 is uniaxial tension form schematic diagram of the invention；
Fig. 3 is clamping device overall schematic of the invention；
Fig. 4 is flexible hinge overall schematic of the invention；
Fig. 5 is bionical bare terminal end schematic diagram of the invention；
Fig. 6 is load mode schematic diagram of the invention；
Fig. 7 is flexible hinge transmission principle figure of the invention.
In figure：1st, multi-load packaged type piezoelectric stack 2, piezoelectric stack pretension block 3, flexible hinge revolute pair mobile terminal
4th, flexible hinge spherical pair mobile terminal 5, flexible hinge pedestal 6, M3 bolts 7, Combined type base 8, twin shaft pedestal 9, M2 spiral shells
Bolt 10, M3 nuts 11, non-smooth surface of organism 12, pawl toe configuration 13, be clamped micro- test specimen 14, halogen heating lamp 15,
Resistance strain gage；16th, internal layer flexible hinge；17th, lower floor's flexible hinge.
Embodiment
The detailed content and its embodiment of the present invention is further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 to Fig. 7, the bionical micro-dimension clamping machine of the Piezoelectric Driving three-jaw of the invention based on flexible hinge
Structure, including the loading of piezoelectric type loading unit, flexible hinge gear unit, bionical grip unit, chucking power detection unit, high temperature are single
Regular groove is processed on first, detachable support unit, flexible hinge pedestal 5, with the size of multi-load packaged type piezoelectric stack 1
Match somebody with somebody, be embedded in multi-load packaged type piezoelectric stack 1 in the groove of flexible hinge pedestal 5, and entered by the adjustable pretension block 2 of thickness
Row pretension, it is ensured that multi-load packaged type piezoelectric stack 1 bears compressive load.By piezoelectricity fold stack driver output voltage to multi-load
Packaged type piezoelectric stack 1 so that multi-load packaged type piezoelectric stack 1 has displacement output.Flexible hinge pedestal 5 keeps fixing, many
The output displacement of load packaged type piezoelectric stack 1 passes through the revolute pair mobile terminal 3 of lower floor's flexible hinge 17 that is in direct contact with it
Face intramedullary expansion is transferred to pawl toe supporting rod.Three pawl toe supporting rods are spatially in 120 ° of circular symmetric distributions and two-by-two by interior
Layer flexible hinge 16 cylindrical bar is connected, and two groups of taper flexible hinge spherical pair mobile terminals 4 are machined with each cylindrical bar.
When motion is transferred to pawl toe supporting rod, using the spherical pair mobile terminal center of internal layer flexible hinge 16 as motion fulcrum, make in moment of flexure
With lower so that the cylinder rod bending of internal layer flexible hinge 16 so that pawl toe bare terminal end is close to test specimen, by being processed on pawl toe bare terminal end
The non-smooth surface of organism 11 gone out is clamped by micrometer test specimen 13 with 12 pairs of pawl toe configuration and has the rollback of close flexible hinge pedestal 5
Effect.The bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw based on flexible hinge of clamping and the motion that retracts can be achieved, can lead to
Cross M3 bolts 6 with Combined type base 7 to be connected, composition can put down the mechanical test for being carried out uniaxial tensile test by micrometer test specimen 13
Platform.If think test plane stress, the uniaxial tensile test platform of composition can be combined by M2 bolts 9 with twin shaft pedestal 8, structure
Into four bare terminal ends in plane two-by-two in the twin shaft mechanical property test platform of 90 ° of angles.
The piezoelectric type loading unit includes three multi-load piezoelectric actuators, three revolute pair mobile terminals 3, three spheres
Secondary mobile terminal 4, wherein flexible hinge revolute pair mobile terminal 3, flexible hinge pedestal 5, flexible hinge spherical pair mobile terminal 4, pawl toe
Bare terminal end is actually integral.Flexible hinge pedestal 5 is the regular groove structure of processing in flexible hinge rigid element, multi-load encapsulation
Formula piezoelectric stack 1 is arranged in the groove in flexible hinge pedestal 5 by embedded mode.Multi-load packaged type piezoelectric stack 1
Pretension is carried out by the adjustable pretension block 2 of thickness, it is ensured that multi-load packaged type piezoelectric stack 1 bears compressive load.Flexible hinge
Flexible portion is flexible hinge revolute pair mobile terminal 3 and flexible hinge spherical pair mobile terminal 4 by focused ion in rotating unit
Beam is cut, it is ensured that flexible portion can realize required deformation, and constant proportion rate is carried out to the output displacement of multi-load packaged type piezoelectric stack 1
Linear Amplifer, to realize clamping movement of the pawl toe bare terminal end to test specimen.Flexible hinge pedestal 5 is connected through a screw thread by bolt 6
Mode is rigidly connected with Combined type base 7.Twin shaft pedestal 8 mode can be connected through a screw thread with M2 bolts 9 and Combined type base 7 is firm
Property connection.
Described bionical grip unit includes three bionical gripper jaws, wherein each bionical blessing pawl is by Biologic nonsmoothed table
Face 11 and pawl toe configuration 12 are constituted.Non-smooth surface of organism 11 has convex hull-shaped Non-smooth surface form, and convex closure diameter is from bare terminal end
Gradually increase to flexible hinge base end diameter, added compared with without specially treated clamping end surfaces between bare terminal end and test specimen
Contact area, makes clamping more firm.Pawl toe configuration 12 is developed by typical soil animal pawl toe configuration, it is ensured that bare terminal end
Clamping to test specimen is closer, reliable.Three bionical gripper jaws use 120 ° of interior envelop-type annular spread, with from centering
Property, it is ensured that the clamped test specimen axis axis overall with clamping device coincides.
Described chucking power detection unit includes pawl toe configuration 12, is clamped micro- test specimen 13 and resistance strain gage 15, resistance
Foil gauge 15 can be attached to directly at the pawl toe configuration 12 of bionical bare terminal end, when pawl toe configuration 12 is contacted with being clamped micro- test specimen 13
When realizing clamping, the place's deformation of the tip of pawl toe configuration 12 is maximum, referred to herein as the position of power sensing unit, and resistance strain gage 15 is answered
Straighten the reversed size for answering chucking power.Determine that piezoelectric actuator input voltage, chucking power and power are passed respectively by the method for demarcation
The relation of sensor cell strain, can draw the relation between driving voltage and chucking power, be easy to predict and control chucking power.Micro-
In clamping process, the clipping operation to microsize object is not only completed, it is thus also avoided that to small items in micro- clamping process
Cause to damage or come off.
Described combined type support unit is by M3 bolts 6, M2 bolts 9, M3 nuts 10, Combined type base 7, twin shaft pedestal 8
Composition.There are two Parallel Symmetric end faces in Combined type base 7, end face center is threaded hole, the processing of the center of flexible hinge pedestal 5
There is through hole, Combined type base 7 can be connected with flexible hinge pedestal 5 by M3 bolts 6.When multi-load packaged type piezoelectric stack 1 is defeated
Go out after displacement, transmitted by the displacement of flexible hinge revolute pair mobile terminal 3 and flexible hinge spherical pair mobile terminal 4, bionical clamping
Pawl also has the motion that retracts in addition to stepping up to test specimen, and Combined type base 7 is now to one support of flexible hinge gear unit
Thrust, makes the effect for being clamped micro- under tension of test specimen 13, that is, uniaxial tensile test can be done to microsize test specimen by constituting
Mechanics experiment platform.In addition, using identical principle, whole mechanism can be also connected with twin shaft pedestal 8 by M2 bolts 9,
Composition can carry out the experiment porch of twin shaft mechanical test research material plane stress state.
The high temperature loading unit includes Combined type base 7 and halogen heating lamp 14, and the center of Combined type base 7 has ring
Connected in star structure, halogen heating lamp 14 can be directly embedded into the center of Combined type base 7, and light source focus is clamped micro- test specimen 13
Center, constitutes the mechanical property test platform under the conditions of high-temperature service.
Referring to Fig. 1 to Fig. 7, the present invention relates to the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw based on flexible hinge,
The overall dimensions of test device are about 30 mm × 26 mm × 16mm, the multi-load pressure of three built-in encapsulation type piezoelectric stacks
Electric drive moves minor face intramedullary expansion and with internal layer branch in the annular distributing installation form of envelope in 120 ° by lower floor's flexible hinge
Point transmits for the motion in the revolute pair centre of motion, and its axial elongation motion under different time-sequential voltages corresponds to clamped test specimen
Different clamping diameters.Bionical bare terminal end uses Biologic nonsmoothed mechanism and soil animal pawl toe configuration, increases clamping friction power,
Microsize component can be solved and clamp this problem.Chucking power detection unit can detect chucking power of the bare terminal end to test specimen, it is to avoid
Damage test specimen.In addition, micro-grabbe can also be combined with combined type support unit, high temperature loading unit, high-temperature service is constructed
The controllable single shaft of condition bottom offset, the twin shaft field of force, realize microsize component single shaft, twin shaft Mechanics Performance Testing function.This hair
Bright compact conformation, has wide range of applications, and can be used in combination with ESEM, is that the mechanical property of the micro-dimension material such as carbon fiber is surveyed
Examination, sign provide effective tool.The component and concrete model being related in the present invention be：Multi-load packaged type piezoelectric stack 1
Model PSt 150/2 × 3/5, ceramic dimension is 2 × 3 × 5mm, and rigidity is 45 N/ μm, and resonant frequency is 150kHz,
Maximum thrust is 300N, and nominal displacement is 5 μm.Pretension block 7 uses linear cutter mode, and its thickness is adjustable, is 1mm-
1.2mm, can be achieved the pretension of multi-load packaged type piezoelectric stack 9, maximum pretightning force can be to 100 N.Flexible hinge revolute pair is moved
Actually integrally, its locating surface and contact surface do polishing and put down for moved end 4, flexible hinge spherical pair mobile terminal 5, flexible hinge pedestal 5
Smoothization processing.Wherein, the conical surface processing of flexible hinge spherical pair mobile terminal 5 is divided into two processes, respectively accurate digital control
Boring processing and fast tool servo processing.Combined type base 7 and twin shaft pedestal 8 use linear cutter mode, its locating surface
Polishing planarization process is done with contact surface.Non-smooth surface of organism 11 has 50 μm -1 μm of size, the convex closure knot of change in size
Structure, using cold-air dynamic spraying method, using compressed gas as gas is accelerated, drives 65Mn powder particles with room temperature, supersonic speed
Bionical clamping end surfaces are hit, metallic particles is occurred strong plastic deformation and is deposited to form coating.Pawl toe configuration 12 is because of it
Cutting-edge structure is small, therefore the processing mode for using focused ion beam to cut.The model G3 of halogen heating lamp 14, maximum heating temperature
Up to 1200 DEG C.Resistance strain gage model Japan republicanism KHCD type high temperature strain foils, can stablize work under 850 DEG C of hot environments
Make.
In specific test process, if only realizing to micro-dimension specimen holder, by three multi-load packaged type piezoelectric stacks 1
In the neck of embedded flexible hinge pedestal 5, pretension block 2 is positioned between the two, realized to the pre- of multi-load piezoelectric stack 1
Tightly.Flexible hinge pedestal 5 is installed in fixed platform by M3 bolts 6 and M3 nuts 10 again.To multi-load packaged type piezoelectricity
1 input 100V voltages are stacked, what it was produced is displaced through the face intramedullary expansion of flexible hinge revolute pair mobile terminal 3 and with flexible hinge
The rotation for fulcrum of spherical pair mobile terminal 4 so that bionical bare terminal end realizes the clamping to being clamped micro- test specimen 13.Pawl toe configuration
The resistance strain gage 15 adhered at 12 realizes real-time monitoring to chucking power, it is to avoid small items are made in micro- clamping process
Into damaging or come off.
If wanting to realize the Mechanics Performance Testing under the conditions of clamped micro- high-temperature service of test specimen 13, need mounted folder
Hold mechanism entirely through M3 bolts 6 and M3 nuts 10 with Combined type base 7 to be connected, two clamping devices are symmetrically installed face-to-face, right
The input voltage of multi-load piezoelectricity fold stack driver 1, synchronously realizes the motion that retracts in clamping process, so as to being clamped micro- test specimen
13 realize single shaft Mechanics Performance Testing.Halogen heating lamp 14 is embedded in the annular groove of the center of Combined type base 7, to halogen
Heating lamp 14 applies 220V voltages, it is ensured that it realizes stable temperature field.
If wanting to realize, to being clamped biaxial plane Mechanics Performance Testing under the conditions of micro- high-temperature service of test specimen 13, needing first will be by
Clamp micro- test specimen 13 to be positioned in mounted single shaft mechanical test platform, mounted clamping device is entirely through threaded connection
It is connected with twin shaft pedestal 8, then twin shaft pedestal 8 is passed through into the combined type in M2 bolts 9 and mounted single shaft mechanical test platform
Pedestal 7 is connected, and ensures that clamped two ends and the clamping device installed on twin shaft pedestal 8 be not overall in twin shaft test specimen when installing
Coaxially.The twin shaft Mechanics Performance Testing under the conditions of high-temperature service can be achieved after installing.
The preferred embodiment of the present invention is the foregoing is only, is not intended to limit the invention, for the technology of this area
For personnel, the present invention can have various modifications and variations.All any modification, equivalent substitution and improvements made for the present invention etc.,
It should be included in the scope of the protection.
Claims (6)
1. a kind of bionical micro-dimension clamping device of Piezoelectric Driving three-jaw based on flexible hinge, it is characterised in that：Including piezoelectric type
Loading unit, flexible hinge gear unit, bionical grip unit, chucking power detection unit, high temperature loading unit, detachable support
Unit, wherein, the flexible hinge revolute pair mobile terminal in flexible hinge gear unit（3）, flexible hinge spherical pair mobile terminal
（4）, flexible hinge pedestal（5）And pawl toe bare terminal end is actually integral, flexible hinge pedestal（5）In be provided with and multi-load packaged type pressure
Electricity is stacked（1）The consistent groove of width, multi-load packaged type piezoelectric stack（1）Installation by adhering passes through in the groove
Piezoelectric stack pretension block（2）Pretension；Flexible hinge pedestal（5）Pass through M3 bolts（6）, M3 nuts（10）With Combined type base（7）
It is rigidly connected, twin shaft pedestal（8）Pass through M2 bolts（9）With Combined type base（7）It is rigidly connected；Halogen in high temperature loading unit
Heating lamp（14）It is connected through a screw thread mode and Combined type base（7）It is rigidly connected；
The piezoelectric type loading unit includes three multi-load piezoelectric actuators, three flexible hinge spherical pair mobile terminals（4）, three
Individual flexible hinge revolute pair mobile terminal（3）, each multi-load piezoelectric actuator is by piezoelectric stack pretension block（2）, multi-load encapsulation
Formula piezoelectric stack（1）Composition；Three multi-load piezoelectric actuators are installed on flexible hinge base in envelop-type annular spread in 120 °
Seat（5）Neck in；Not to multi-load packaged type piezoelectric stack（1）When applying voltage, it is pre- by the adjustable piezoelectric stack of thickness
Tight block（2）Effect, in compressive state；When applying voltage, its axial elongation, and the multi-load packaged type piezoelectricity of rectangular shape
Stack（1）With output displacement self-checking function；
The flexible hinge gear unit is：Multi-load packaged type piezoelectric stack（1）Output displacement pass through lower floor's flexible hinge
（17）The face intramedullary expansion of revolute pair mobile terminal and with internal layer flexible hinge（16）Flexible hinge spherical pair mobile terminal（4）For fulcrum
Depression bar bending be transferred to pawl toe bare terminal end；Three flexible hinge revolute pair mobile terminals（2）, three flexible hinge spherical pair movements
End（4）And three pawl toe bare terminal ends are in 120 ° of circular symmetric distributions, it is ensured that clamping axis is overlapped with material axis；
The bionical grip unit is three pawl toe bare terminal ends, and each pawl toe bare terminal end is by non-smooth surface of organism（11）And soil
The pawl toe configuration of animal（12）Composition, multi-load packaged type piezoelectric stack（1）Output displacement moved by flexible hinge revolute pair
Moved end（3）And flexible hinge spherical pair mobile terminal（4）Pawl toe bare terminal end is transferred to, pawl toe bare terminal end is produced deformation and realizes to examination
The clamping of part；The non-smooth surface of organism that pawl toe bare terminal end has（11）And pawl toe configuration（12）Make pawl toe bare terminal end with being clamped
Rub increase between thing, so as to realize to microsize, be difficult to the clamping of clamping test pieces；
The chucking power detection unit is：Resistance strain gage（15）Directly attach to the pawl toe configuration of pawl toe bare terminal end（12）Place,
When pawl toe configuration（12）With being clamped micro- test specimen（13）When clamping is realized in contact, pawl toe configuration（12）Deformation is maximum at tip, this
Place is the position of power sensing unit, resistance strain gage（15）Strain directly reaction chucking power size；
The detachable support unit is by Combined type base（7）, twin shaft pedestal（8）And bolt（9）Composition, works as Combined type base
（7）Individually with flexible hinge pedestal（5）Pass through bolt（6）, nut（10）When being rigidly connected, realize and the single shaft mechanics of material is surveyed
Try function；Twin shaft pedestal（8）Pass through bolt（9）With Combined type base（7）It is connected, passes through（6）Bolt, nut（10）With flexible hinge
Chain pedestal（5）It is connected, realizes twin shaft mechanical test function；
The high temperature loading unit includes Combined type base（7）And halogen heating lamp（14）, Combined type base（7）Center has
Circular groove structure, halogen heating lamp（14）It is directly embedded into Combined type base（7）Center, light source focus is clamped micro- examination
Part（13）Center.
2. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature
It is：Described multi-load packaged type piezoelectric stack（1）In envelop-type annular spread in 120 °, its is defeated under voltage signal effect
What is gone out is displaced through lower floor's flexible hinge（17）The face intramedullary expansion of revolute pair mobile terminal and with internal layer flexible hinge（16）Flexibility
Hinge spherical pair mobile terminal（4）Pawl toe bare terminal end is transferred to for the depression bar bending of fulcrum, finally realizes pawl toe bare terminal end to axis
The rotation in direction and close flexible hinge pedestal（5）Rollback motion；Based on the driving voltage of different amplitudes, three multi-load envelopes
Dress formula piezoelectric stack（1）The combining form of various axial elongation motion is realized, corresponding to the various forms of positions of pawl toe bare terminal end
Move；And then, realize the clamping by micrometer test specimen for different-diameter.
3. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature
It is：Described pawl toe bare terminal end has non-smooth surface of organism（11）, pawl toe bare terminal end surface distributed spherical crown shape convex closure, pawl toe
With the pawl toe configuration of soil animal at the top of bare terminal end（12）, when multi-load packaged type piezoelectric stack（1）Output campaign transmission
During to pawl toe bare terminal end, the pawl toe configuration at the top of it（12）Increase clamping stability；And three pawl toe bare terminal ends are in 120 ° of spaces
It is symmetrical, when to multi-load packaged type piezoelectric stack（1）When inputting identical voltage signal, its motion mode is consistent, it is ensured that folder
The center of test specimen is overlapped with device geometric center when holding, it is ensured that centering.
4. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature
It is：Described chucking power detection unit, by resistance strain gage（15）It is attached directly to the pawl toe configuration of bionical bare terminal end（12）
Sophisticated deformation maximum, relation between driving voltage and chucking power is determined by demarcating, and realizes prediction and control to chucking power；
In micro- clamping process, the clipping operation to microsize object is not only completed, it is thus also avoided that to minim in micro- clamping process
Body is caused to damage or come off.
5. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature
It is：Described Combined type base（7）Pass through M3 bolts（6）, M3 nuts（10）With flexible hinge pedestal（5）It is rigidly connected, it is real
Existing single shaft mechanical test；Multi-load packaged type piezoelectric stack（1）Output displacement when being transferred to pawl toe bare terminal end, its motion mode
In addition to the clamping close to central shaft, also with close to flexible hinge pedestal（5）Rollback motion, clamping and axle corresponding to test specimen
To stretching；Combined type base（7）Can also be with twin shaft pedestal（8）Pass through M2 bolts（9）It is rigidly connected, realizes that twin shaft mechanics is surveyed
Examination.
6. the bionical micro-dimension clamping device of the Piezoelectric Driving three-jaw according to claim 1 based on flexible hinge, its feature
It is：Described high temperature loading unit is integrated in Combined type base（7）In, halogen heating lamp（14）It is directly embedded into combined type base
Seat（7）In the annular groove of center, light source focus is right against clamped micro- test specimen（13）Center, constructs high-temperature service bar
Mechanical property test platform under part.
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