CN103471905A - Uniaxial two-way micro mechanical measurement device and method for scanning micro environment - Google Patents
Uniaxial two-way micro mechanical measurement device and method for scanning micro environment Download PDFInfo
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Abstract
The invention belongs to the fields of micro-nano mechanics and precision machinery, and in particular relates to a uniaxial two-way micro mechanical measurement device and method for a scanning micro environment. According to the device, symmetrical coordinate type three-dimensional coarse-tuning translation stages, symmetrical fine-tuning three-dimensional moving precision platforms and a sample platform are installed on a main support unit. Through the control operation of a control system and a manipulation unit, the device can be used for detecting micro-nano characteristic scale materials and a structural mechanical property, and can realize one-way centering stretch, compressing, bending and vibration measurement and micro-nano scale sample surface deformation and micro-structural evolution detection. The device can be repeatedly used and can combine a digital image/speckle correlation technique, an image processing technique or a micro-labeling technique to detect the in-situ deformation and mechanical property of samples in a high-spatial-discrimination scanning microscopic environment.
Description
Technical field
The invention belongs to micro nanometer mechanics and precision optical machinery field, particularly a kind of micro mechanics of the single-axis bidirectional for scanning microscopy environment measurement mechanism and measuring method.
Background technology
The ingredient that micro nanometer mechanics experiment is important as micro-nano scientific domain, the mechanical property of micro/nano-scale material, structure and device detect and checking in play important and irreplaceable effect.Its initial requirement source is in the Research Requirements to the small dimensional material mechanical property, derive from prediction and analysis to MEMS and other microscale device performance and reliability, derive from the checking of meticulous, the multiple dimensioned model to describing the labyrinth material behavior.Especially due to the change that reduces to cause the performances such as new mechanics, physics, processing of material and feature size, can be at micron to nanometer, under even less yardstick, directly carry out detection and the sign of mechanical property, and then obtain the variation when material or structure its mechanical property after its external dimensions and internal microstructure feature sharply reduce.Since the eighties in last century, mechanics is at thin sight, the microcosmic of material and structure and receive aspect the theory of seeing yardstick performance and behavior and calculating and obtained important progress, but aspect experiment, although through researcher's effort of two more than ten years, with theoretical analysis, with numerical evaluation, compare, the progress of micro-nano-scale Experiments of Machanics is wanted the many of difficulty, because the experiment under this yardstick is complete at needs, detect principle and method clearly in, also need to be by basic experimental technique and checkout equipment, and this is to have challenging problem under small scale.Therefore, at the experiment detection field, be in today, the experiment of the characteristic dimension of detected object below sub-micron remains extremely difficult.
Obviously, be no matter size, on function, still clamp, load and control aspect, to small research object like this, the checkout equipment of macroscopic view can not adapt to this new demand.The yardstick that research object has is little, performance is complicated, with detection system and environmental energy, the strong characteristics such as coupling interaction occur, and makes micro-nano Experimental Mechanics face numerous challenges.
Demand in the face of fundamental research and high-tech application, the general formula small-scale experiment machine relatively lagged behind aspect function and performance two has been studied by producer according to numerous users' demand on the one hand, for example: be applicable to the Britain Gatan mechanics module of optical microscope system and SEM environmental chamber, the American MTS NanoBionix experimental machine etc. that is applicable to U.S. Tytron250 micro-power the static and dynamic experiment machine of fiber and small scale sample and is mainly used in the biological medicine material.Although these experimental machine are compared with macroscopical experimental machine in the past, at aspects such as load, displacement range and resolution, all to microscale, draw close, but mainly still apply traditional material testing machine principle, the test specimen yardstick substantially centimetre to the millimeter magnitude, load and displacement are much larger than the desired scope of micro Nano material, and instrument is expensive.On the other hand, difficulty in view of commercial experimental machine, researcher both domestic and external is according to the demand of oneself, carry out voluntarily again the more advanced micro Nano material mechanical property experiment device of some functions and performance and (why be called device, because these measuring systems are not also complete material experiment-machines, major part is the system of temporarily building, and only may complete the unit that Some Mechanical Properties is measured).Material mechanical performance pick-up unit or system that this class is early developed by the researcher period, price is comparatively cheap, the mechanical property that is applicable to some special material or structure detects, but most of device only can be worked under the optical microphotograph platform, the mechanics that can not meet material and structure under micro-nano-scale is learned Performance Detection, more can not realize under the micro-nano-scale testing conditions, to requirements such as the clamping of microstructure and manipulations.
Summary of the invention
The objective of the invention is the high spatial micro-imaging environment based on scanning electron microscope (SEM) or optical microscope (OM), a kind of micro mechanics of the single-axis bidirectional for scanning microscopy environment measurement mechanism is provided, can be for studying the mechanical properties of test specimen under the conditions such as uniaxial tension, compression, bending such as micro-nano characteristic dimension film, silk, line.
The technical solution used in the present invention is:
The integrated support cellular installation is on SEM sample stage pedestal, and its upper surface center arranges circular hole, and stretchable SEM sample stage is installed in hole, and the symmetria bilateralis position arranges respectively three-dimensional coordinate translation stage and integrated support unit connection substrate;
Each three-dimensional coordinate translation stage and integrated support unit connection substrate are installed respectively the three-dimensional coarse adjustment translation stage of the co-ordinate-type be comprised of directions X translation piezoelectricity guide rail, Y-direction translation piezoelectricity guide rail, Z direction translation piezoelectricity guide rail; Upper end and the coarse adjustment platform linking arm of Z direction translation piezoelectricity guide rail are affixed, and coarse adjustment platform linking arm is connected by the three-dimensional mobile platform of piezoelectricity sleeve pipe and fine tuning piezoelectric ceramics; The front end of the three-dimensional mobile platform of fine tuning piezoelectric ceramics is connected with sensor with fine tuning translation stage joint sleeve by sensor, and front end and the sample platform of sensor are affixed.
Between described integrated support unit and SEM sample stage pedestal, by 3 inside screws, two register pins, be fixedly connected with.
Described directions X translation piezoelectricity guide rail, Y-direction translation piezoelectricity guide rail, Z direction translation piezoelectricity guide rail are comprised of an one dimension piezoelectric motor and a guide rail respectively.
Described sample platform is the symmetrical loading end of plane, V-type loading end or sonde-type loading end, and corresponding configuration is fixed structure.
Based on described device, the present invention also provides a kind of measuring method, carries out as follows:
(a) adjust sample platform centering, straight according to the sample characteristics size Selection at optics or SEM imaging circumstances, locking after axis is consistent; Adjust sample platform and reach suitable initial loading spacing; Complete sample holder and installation in optical microscope or SEM cavity, guarantee long axis and the SEM sample stage stretching dead in line of sample during installation;
(b) adjust detection platform position, enlargement factor, imaging and the image capturing system of scanning microscopic system and make it be in detected state, then drive unit carries out the micro-stretching experiment of single-axis bidirectional to test specimen, and records the sequence deformation pattern of sample surveyed area by the SEM scan image simultaneously;
(c) Digital Image Processing, micro-labeled analysis are carried out respectively in the sequence deformation pattern of gained, surveyed area surface micro-structure deformation evolution situation in the single-axis bidirectional drawing process while obtaining the sample stretching; Meanwhile in conjunction with Micro-force sensor, obtain corresponding load information, can obtain power-displacement or the stress-strain curve of test samples, and other mechanical property parameter, and analyzed in conjunction with the micromechanism of relevant expanded material, the knowledge and theory of micromorphology aspect.
In described step (a), sample is large scale sample and when sample is installed under the optical microphotograph environment, uses glue that the sample two ends are bonded on symmetrical sample platform and solidify, and then whole measurement mechanism is put into to the SEM environmental chamber completes subsequent operation and measurement.
In described step (a), when sample is micro-nano sample, sample platform adjusted centering and straight device are put into to the SEM environmental chamber, by the SEM imaging, and utilize the micro-nano sample that assisted control equipment will detect to be attached on sample platform, and it is fixing to weld (EBID) by electron beam deposition.
The present invention compared with prior art, has the following advantages:
(1) usually because high power microscan zone is very limited, its small visual field yardstick makes surveyed area run off visual field very soon and can't realize the continuous detecting in whole loading procedure.The present invention has and guarantees that two objective table axis are consistent and three-dimensional coordinate formula machinery in same level is adjusted structure, double-movement platform single-axis bidirectional drive system realizes that bi-directional symmetrical loads by design, the small field of view characteristics that are suitable for the high spatial resolution microscopic system, guarantee interested film scanning zone in whole drawing process all the time in the microscopic system visual field, thereby can complete the continuous detecting of test samples surface micro-structure Character evolution in micro-surveyed area.
(2) by applying piezoelectric motor and two kinds of drive units of piezoelectric ceramic tube, can realize that in thick, thin two, pattern loads, the mechanical meaurement of this material from hundreds of microns to tens nanometer or structure for the detected object characteristic dimension provides and has loaded and location guarantees.
(3) in order to realize effective and the accurate mechanical meaurement of micro-nano-scale sample, clamping and manipulation, designed the objective table of two types, a kind of is platform-type, another kind is probe-type, can be applicable to respectively measurement, clamping, loading and the manipulation of the micro-nano-scale samples such as film, silk, line, pipe and post.Simultaneously, for the installation that adapts to the small scale sample and the adjustment of device, what this apparatus system had also comprised auxiliary micro-test sample clamping and actuation unit, sample objective table adjusts benchmark jig etc. to neutralization, and the installation, the objective table that have effectively solved micro-test sample are regulated and the sample axis calibration problem consistent with the objective table axis in surface level.
(4) with the existing integrated micro-tensile loading device of chip type film test piece, clamp structure be applied under the scanning electron beam microscope system, compare, this pick-up unit can repeatedly be used, can be applicable to the microscale material of heterogeneity, size and the detection of structure, greatly enlarge the range of application of device.Can realize the distortion of microscale specimen surface microstructure and the detection of developing under the high spatial resolution microscopy environment in conjunction with correlation techniques such as Digital Image Processing, equally also can be adapted to the continuous detecting of large deformation, complex topography feature etc.
The accompanying drawing explanation
Fig. 1 is co-ordinate-type single-axis bidirectional stretching device one-piece construction schematic diagram;
Number in the figure:
1-X direction translation piezoelectricity guide rail; 2-Y direction translation piezoelectricity guide rail; 3-Z direction translation piezoelectricity guide rail; 4-coarse adjustment platform linking arm; 5-piezoelectricity sleeve pipe; The three-dimensional mobile platform of 6-fine tuning piezoelectric ceramics; 7-sensor and fine tuning translation stage joint sleeve; The 8-sensor; The 9-sample platform; The 10-sample; 11-three-dimensional coordinate translation stage and integrated support unit connection substrate; The 12-M4-20 hexagon socket head cap screw; 13-integrated support unit; 14-SEM sample stage pedestal; The 15-SEM sample stage; The 16-register pin.
Embodiment
The invention provides a kind of micro mechanics of the single-axis bidirectional for scanning microscopy environment measurement mechanism and measuring method, the single-axis bidirectional of below take under the SEM microscopic system stretches and detects is example, by reference to the accompanying drawings principle of the present invention, concrete structure, stretching detection method is described further.
As shown in Figure 1, integrated support unit 13 is rectangle flat aluminium alloy plate (175mm * 95mm * 7mm), surface is sprayed with the argentine paint, and integrated support unit 13 is arranged on SEM sample stage pedestal 14, by 16,3 M4-20 hexagon socket head cap screws of two register pins 12, connects between the two.The upper surface center of integrated support unit 13 arranges the circular hole that diameter is 48mm, and SEM sample stage 15 can be used as the objective table of stretching device through integrated support unit 13 center holes.The symmetria bilateralis position of integrated support unit 13 arranges respectively three-dimensional coordinate translation stage and integrated support unit connection substrate 11; Each three-dimensional coordinate translation stage and integrated support unit connection substrate 11 are installed respectively the three-dimensional coarse adjustment translation stage of the co-ordinate-type be comprised of directions X translation piezoelectricity guide rail 1, Y-direction translation piezoelectricity guide rail 2, Z direction translation piezoelectricity guide rail 3.Upper end and the coarse adjustment platform linking arm 4 of Z direction translation piezoelectricity guide rail 3 are affixed, can realize that large stroke loads; Coarse adjustment platform linking arm 4 is connected by the three-dimensional mobile platform 6 of piezoelectricity sleeve pipe 5 and fine tuning piezoelectric ceramics, realizes three-dimensional accurate displacement; The front end of the three-dimensional mobile platform 6 of fine tuning piezoelectric ceramics is connected with sensor 8 with fine tuning translation stage joint sleeve 7 by sensor, and the front end of sensor 8 and sample platform 9 are affixed.
Directions X translation piezoelectricity guide rail 1, Y-direction translation piezoelectricity guide rail 2, Z direction translation piezoelectricity guide rail 3 are comprised of an one dimension piezoelectric motor and a guide rail respectively.Each piezoelectric motor is connected with drive system with signal wire by power supply respectively, the platform that makes guide rail drive under the effect of drive system moves (single step or continuous) along X, Y, Z direction co-ordinate-type respectively, its stroke in X, Y, Z direction is respectively 12mm, and 200nm is differentiated in displacement.
The three-dimensional mobile platform 6 of fine tuning piezoelectric ceramics is connected with drive system by power supply, signal wire respectively, can be respectively in X, Y and the meticulous movement of Z direction under the driving of drive system, and its stroke is 6 μ m, 1nm is differentiated in displacement.
In order to realize the connection of dissimilar sensor, sensor 8 adopts screw thread to be connected with fixed pin with sample platform 9.Sample platform 9 has two types, one is the symmetrical loading end of plane or V-type loading end, and for measurements such as the drawing of film and silk class sample, pressures, another kind of is sonde-type loading end, to be tungsten filament or glass probe formula, for measurements such as the bending of film or silk class, micro-nano rice noodles, post etc., vibrations.Sample platform 9 can configure and be fixed accordingly structure.Sample 10 and sample platform 9 be according to sample yardstick and material, optionally sticks with glue, any modes such as electron beam irradiation welding and V-type bayonet socket are connected.When the displacement loading does not need sensor 8, sensor can directly be connected with register pin by sleeve pipe with sample platform 9 with fine tuning translation stage joint sleeve 7.
Two M4 screws also are set on integrated support unit 13, for connecting other manipulation or utility appliance.
In the whole process of device, adopted higher machining accuracy requirement, the left and right three-dimensional mobile platform of symmetrical structure, then left and right sample platform feeding cuts apart formation in same block materials Integratively processing, thus the symmetry of the machining precision of assurance device and structure.
The principle of work of this device is as follows: at first the device of adjusting is put into to (supporting Electronic Speculum: the Quanta450FEG of FEI Co.), the integrated support unit 13 of device is connected with SEM sample platform base 14 with 3 M4-20 hexagon socket head cap screws 12 by register pin 16 on the sample platform of SEM cavity.In order to ensure the device steady operation, be fastenedly connected screw.Then the power supply of device being handled to control module with signal wire outward by supporting ring flange and cavity is connected with drive system.About the communication of SEM cavity and structure and the requirement controlled with ring flange, the requirement of foundation Electronic Speculum used is made or is bought and gets final product.After all electric signal connect, Electronic Speculum chamber door can be closed, carry out platform and device operation after vacuumizing.Before mechanics detects, at first will install by the SEM three-dimensional platform and adjust to field of view center, and, by selecting the suitably enlargement factor of size, observe sample platform 9 and sample 10.About the adjustment of sample platform in pick-up unit and the installation of sample, can divide two kinds of situations, test specimen for characteristic dimension more than tens microns can be adjusted by the chucking device of optical microscope, sample platform 9 outside the SEM cavity, then by gluing or V-type draw-in groove, test specimen is installed, the sample that can't differentiate for optical microscope, at first under optical microscope, by sample, adjust jig and adjust the centering of both sides sample platform 9 and straight, then it is arranged in the SEM cavity as described above, after vacuumizing, adjust the straight and centering of sample platform 9 by the SEM re-imaging, and thick by device, thin mobile platform is adjusted, after completing, the sample platform of both sides symmetry 9 is adjusted to suitable distance, then by assisted control equipment, as micro-nano mechanical arm will detect the micro-nano rice noodles, micro-nano mitron or post are attached on sample platform 9, and fix by electron beam welding, complete the installation of micro-nano sample.
Completion system starts drive unit, sensor, SEM image capturing system after installing, adjusting, and can realize that the mechanical property of micro-nano sample under micro-condition detects.
The micro-stretching measuring method of micro-nano-scale sample single-axis bidirectional under scanning microscopy environment:
When the micro-nano-scale sample measurement device under scanning microscopy environment has been applied to the micro-stretching measurement of single-axis bidirectional, at first place it on the article carrying platform of microscopic system (optics or SEM), utilize microscopic system to the surface structure of test samples and deformation pattern is observed and acquisition and recording.Its concrete measuring method is carried out as follows:
1) as mentioned before, according to the sample characteristics size Selection, at optics or SEM imaging circumstances, adjust sample platform centering, straight, locking after axis is consistent; Adjust sample platform and reach suitable initial loading spacing; Clamping and installation test specimen complete sample and install in optical microscope or SEM cavity.Guarantee long axis and the objective table stretching dead in line of sample during installation.When sample is installed under large scale sample and optical microphotograph environment, can uses glue the sample two ends to be bonded on the symmetrical sample platform of device and solidify, and then device is put into to the SEM environmental chamber complete subsequent operation and measurement; When micro-nano sample, the device of adjusted centering and straight sample platform is put into to the SEM environmental chamber, by utilizing the SEM imaging, and utilize assisted control equipment will detect micro-nano sample to be attached on sample platform, and fix by electron beam welding.
2) adjust detection platform position, enlargement factor, imaging and the image capturing system of scanning microscopic system and make it be in detected state, then drive unit carries out the micro-stretching experiment of single-axis bidirectional to micro-nano test specimen, and records the sequence deformation pattern of sample surveyed area by the SEM scan image simultaneously;
3) Digital Image Processing, micro-labeled analysis are carried out respectively in the sequence deformation pattern of gained, surveyed area surface micro-structure deformation evolution situation in the single-axis bidirectional drawing process while obtaining the sample stretching; Meanwhile in conjunction with Micro-force sensor, obtain corresponding load information, can obtain power-displacement or the stress-strain curve of test samples, and other mechanical property parameter, as Young modulus, yield stress, break limit, and analyzed in conjunction with the micromechanism of relevant oriented film material, the knowledge and theory of micromorphology aspect, find out experience result or the rule of its Microstructure Evolution with mechanical property.
4) the corresponding surface of image and the inferior surface second electron emission intensity of scanning microscopic system, it has disclosed the information such as test samples microstructure, micromorphology, and shows in the mode of gray level image; When specimen surface distortion or motion hour, these images that mean with gray scale can Complete Characterization material film micro area the motion and deformation of surface micro-structure feature, so the problem that the feature distortion of specimen surface microstructure, the problem of evolution are carried out the respective image processing with regard to the gray level image converted to obtaining, and these problems can be correlated with by image digitization (DIC) or micro-gauge point tracking technique obtains.
Other metering system, as the measurement of compression, bending, vibration etc., similar and above-mentioned measuring method, only difference to some extent on sample platform type and drive pattern.
Claims (7)
1. for the single-axis bidirectional micro mechanics measurement mechanism of scanning microscopy environment, it is characterized in that:
Integrated support unit (13) is arranged on SEM sample stage pedestal (14), its upper surface center arranges circular hole, stretchable SEM sample stage (15) is installed in hole, and the symmetria bilateralis position arranges respectively three-dimensional coordinate translation stage and integrated support unit connection substrate (11);
Each three-dimensional coordinate translation stage and integrated support unit connection substrate (11) are installed respectively the three-dimensional coarse adjustment translation stage of the co-ordinate-type be comprised of directions X translation piezoelectricity guide rail (1), Y-direction translation piezoelectricity guide rail (2), Z direction translation piezoelectricity guide rail (3); The upper end of Z direction translation piezoelectricity guide rail (3) and coarse adjustment platform linking arm (4) are affixed, and coarse adjustment platform linking arm (4) is connected with the three-dimensional mobile platform of fine tuning piezoelectric ceramics (6) by piezoelectricity sleeve pipe (5); The front end of the three-dimensional mobile platform of fine tuning piezoelectric ceramics (6) is connected with sensor (8) with fine tuning translation stage joint sleeve (7) by sensor, and the front end of sensor (8) and sample platform (9) are affixed.
2. the micro mechanics of the single-axis bidirectional for scanning microscopy environment measurement mechanism according to claim 1 is characterized in that: between described integrated support unit (13) and SEM sample stage pedestal (14), by 3 inside screws, two register pins (16), be fixedly connected with.
3. the micro mechanics of the single-axis bidirectional for scanning microscopy environment measurement mechanism according to claim 1, it is characterized in that: described directions X translation piezoelectricity guide rail (1), Y-direction translation piezoelectricity guide rail (2), Z direction translation piezoelectricity guide rail (3) are comprised of an one dimension piezoelectric motor and a guide rail respectively.
4. the micro mechanics of the single-axis bidirectional for scanning microscopy environment measurement mechanism according to claim 1, it is characterized in that: described sample platform (9) is the symmetrical loading end of plane, V-type loading end or sonde-type loading end, and corresponding configuration is fixed structure.
5. the measuring method based on the described device of claim 1, is characterized in that, the method is carried out as follows:
(a) adjust sample platform (9) centering, straight according to the sample characteristics size Selection at optics or SEM imaging circumstances, locking after axis is consistent; Adjust sample platform (9) and reach suitable initial loading spacing; Complete sample holder and installation in optical microscope or SEM cavity, guarantee long axis and SEM sample stage (15) the stretching dead in line of sample during installation;
(b) adjust detection platform position, enlargement factor, imaging and the image capturing system of scanning microscopic system and make it be in detected state, then drive unit carries out the micro-stretching experiment of single-axis bidirectional to test specimen, and records the sequence deformation pattern of sample surveyed area by the SEM scan image simultaneously;
(c) Digital Image Processing, micro-labeled analysis are carried out respectively in the sequence deformation pattern of gained, surveyed area surface micro-structure deformation evolution situation in the single-axis bidirectional drawing process while obtaining the sample stretching; Meanwhile in conjunction with Micro-force sensor, obtain corresponding load information, can obtain power-displacement or the stress-strain curve of test samples, and other mechanical property parameter, and analyzed in conjunction with the micromechanism of relevant expanded material, the knowledge and theory of micromorphology aspect.
6. measuring method according to claim 5, it is characterized in that, in described step (a), sample is large scale sample and when sample is installed under the optical microphotograph environment, use glue the sample two ends to be bonded in to symmetrical sample platform (9) is upper solidifies, and then whole measurement mechanism is put into to the SEM environmental chamber complete subsequent operation and measurement.
7. measuring method according to claim 5, it is characterized in that, in described step (a), when sample is micro-nano sample, sample platform (9) adjusted centering and straight device are put into to the SEM environmental chamber, by the SEM imaging, and utilize the micro-nano sample that assisted control equipment will detect to be attached to sample platform (9) above, and be welded and fixed by electron beam deposition.
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