CN109357938A - A kind of material mesoscopic scale simple tension measuring system and method - Google Patents
A kind of material mesoscopic scale simple tension measuring system and method Download PDFInfo
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- CN109357938A CN109357938A CN201811332122.5A CN201811332122A CN109357938A CN 109357938 A CN109357938 A CN 109357938A CN 201811332122 A CN201811332122 A CN 201811332122A CN 109357938 A CN109357938 A CN 109357938A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
- G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0016—Tensile or compressive
- G01N2203/0017—Tensile
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
- G01N2203/0051—Piezoelectric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
- G01N2203/0647—Image analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0682—Spatial dimension, e.g. length, area, angle
Abstract
The invention belongs to material mechanical performance fields of measurement, and in particular to a kind of material mesoscopic scale simple tension measuring system and method.The system is used for a few micrometers of measurements to the micro-test sample mechanical property between hundreds of microns, and system includes sample fixed cell, sample centering unit, accurate loading unit, load signal sensing unit, digital picture correlation strain measurement unit and station.The side of station is arranged in the digital picture correlation strain measurement unit, Image Acquisition, including D translation platform, high power telecentricity measurement camera lens, CCD industrial camera, high speed image acquisition board and real-time digital image relevant calculation module are carried out for the front to sample.The system realizes the accurate centering of sample by electric precise translation stage and high resolution light microscope；The real-time strain for passing through digital image correlation technique non-cpntact measurement sample gauge length section simultaneously, draws load-deformation curve, has the advantages that small in size, compact-sized, measuring accuracy is high etc..
Description
Technical field
The invention belongs to material mechanical performance fields of measurement, and in particular to a kind of material mesoscopic scale simple tension measurement system
System and method.
Background technique
In recent years, the material mechanics experiment of meso-scale (sample size is between hundred nanometers to hundred microns) becomes increasingly
It is important.On the one hand, these researchs facilitate the correlation that people establish material local mechanical property and microstructure, disclose control
The physical mechanism of prepared material different scale mechanical behavior, so that designing and developing for new material be accelerated to optimize with performance.On the other hand,
Mini-medical equipment, Micro-electro mechanical system, micro sensing device etc. all refer to the use of fine structure material component；It grinds
Studying carefully material in the mechanical property of these scales is development and the premise for using micro element safely.Meanwhile meso-scale test is also
The multiple dimensioned mechanical modeling of material provides experimental data, and continuously improving and optimizing for accelerator theory model improves precision of prediction.
The research of material behavior at present more concentrates on conventional macroscopic and Micromechanics test.Conventional macroscopic mechanics is surveyed
Examination is limited by fixture and force snesor, and sample size is usually at several millimeters or more.Micromechanics test is mostly using based on gallium ion
The compression of focused ion beam (Focused Ion Beam, the FIB) preparation in source stretches sample.By the technology processing efficiency and add
The limitation of work cost, test scale is usually less than 10 μm, and 10 μm or more are studied phase up to the meso-scale between traditional millimeter
To limited.It is tens of such as xenon plasma high speed FIB and femtosecond laser parallel micromachining with the appearance of the micro-processing technology of higher efficiency
It will no longer be problem to the micro-test sample preparation between hundreds of microns, this necessarily promotes the mechanical behavior in the wider range scale of material
Research.
Two critical issues must be solved by carrying out material mesoscopic scale mechanical test.It is the installation and centering of micro-test sample first
Problem.It is tested different from conventional macromechanics, meso-scale test is only usually tens of or hundreds of microns using gauge length width
Microspecimen.One end of micro-test sample be generally attached to matrix to facilitate operation.How convenient installation micro-test sample and sample is guaranteed
Product axis and load driver device, force snesor etc. are sufficiently aligned, and are to carry out meso-scale to survey to reduce error caused by misalignment
Try the problem faced.The followed by precise measurement problem of micro-test sample gauge length strain.Macro-test by adhering resistance strain sheets or
Person measures sample deformations amount using commercialized clipping strain extensometer.It is limited by the size of micro-test sample, these conventional methods
Obviously infeasible in meso-scale test.Researcher generally first measures load driver device or tensioning chuck (or compression pressure
Head) displacement, then by the displacement of the analysis corrections of machine stiffness, to estimate strain that sample actually occurs.But this analysis
Method obviously increases the difficulty and uncontrollability of measurement, and there are still significant errors for result.There has been no maturations for existing market
Material mesoscopic scale mechanical property measuring system successfully solve above-mentioned two problems.
Summary of the invention
Technical problem solved by the invention is to provide a kind of material mesoscopic scale simple tension measuring system.
The technical solution for realizing the aim of the invention is as follows:
A kind of material mesoscopic scale simple tension measuring system, the system is for a few micrometers to Jie between hundreds of microns
The measurement of scale mechanical property is seen, system includes sample fixed cell, sample centering unit, accurate loading unit, load signal
Sensing unit, digital picture correlation strain measurement unit and station；
The side of station is arranged in the digital picture correlation strain measurement unit, carries out for the front to sample
Image Acquisition, including Manual three-dimensional translation stage, high power telecentricity measurement camera lens, CCD industrial camera I, high speed image acquisition board and
Real-time digital image relevant calculation module；By three axis of Manual three-dimensional translation stage it is mobile realize telecentricity measure camera lens focusing and
Visual field selection；The real-time digital image relevant calculation module grabs sample surfaces image simultaneously by CCD industrial camera I in real time
The Displacement for selecting characteristic point in image in advance and strain in real time are calculated using digital picture related algorithm.
The sample centering unit includes centering operating mechanism and centering observation element, and the setting of centering operating mechanism is being grasped
Make the lower part of platform, including X-axis motorized precision translation stage and X-axis stepper motor, Y-axis motorized precision translation stage and y-axis stepper motor, the centering
Observation element includes microlens in the high power pair for be arranged in operation console side, CCD industrial camera II and corresponding Image Acquisition
Card, for observing micro-test sample side, and be arranged in the high power telecentricity measurement camera lens of the station other side, CCD industrial camera I and
Corresponding high speed image acquisition board, for observing sample front.
The sample fixed cell includes sample stage and micro- pull head, and the sample stage includes that center portion is machined with the rectangular of slit
Grip block, removable sample carrier and fastening screw.When test, the sample for being machined with micro-test sample is first fixed on sample carrier with glue
One end, then sample carrier is inserted into the central slit of rectangular grip block, telecentricity measurement camera lens real-time high power image in adjust
Whole sample orientation guarantees the parallel stress axis of micro-test sample, finally locks sample carrier with fastening screw.
Micro- pull head is high rigidity rectangle sheet metal, and one end is hollow by the micro-processing technology side of being machined with c-type
Structure, the opening width of square c-type hollow structure are used for slightly larger than micro-test sample gauge length width is stretched by dog bone micro-stretching sample packet
Containing wherein.
The accurate loading unit is the piezoelectric ceramics linear actuator for being built-in with linear encoder, piezoelectric ceramics straight line
Actuator is perpendicularly fixed on X-axis motorized precision translation stage by fastener, draws sample by control piezoelectric ceramics linear actuator
Platform moves downward the simple tension test for realizing Bit andits control.
The load signal sensing unit includes accurate miniature force snesor and corresponding signal acquisition module, for surveying
The real-time stress of amount and record micro-test sample, the fixing end of force snesor are directly fixed on crossbeam by screw thread, and measurement end then connects
Micro- pull head supporting rod.
System further includes pedestal；Station passes through the side of being set on the base four columns II；Station top is arranged two
The line of column III and two root posts III and the angled setting of X-axis, to guarantee that centering microlens are parallel to X-axis；Crossbeam
It is covered on two root posts III, and is screwed by circular hole, the height and position of crossbeam can be adjusted freely up and down.
The high power centering microlens and CCD industrial camera II are fixed therein one by centering camera lens fastening block and stand
On column III, for observing sample side.
The high power telecentricity measurement camera lens is parallel to Y-axis, is fixed on Manual three-dimensional translation stage by fixed block, then by solid
Determine block and three root post I are fixed on pedestal.
The real-time digital image relevant calculation module includes Survey Software.
The displacement accuracy of the X-axis motorized precision translation stage and Y-axis motorized precision translation stage is better than 1 μm；The piezoelectric ceramics is straight
Line actuator maximum push-pull effort is 10N, and closed loop displacement accuracy is 20nm or more；The optical amplifier times of the telecentricity measurement camera lens
Rate is 20 times or more, and corresponding acquisition image single pixel physical size is 275nm；The frame per second of the CCD industrial camera I is
167 frames/second.
A method of material mesoscopic scale simple tension mechanical property, specific steps are measured using above-mentioned measuring system
It is as follows:
Step 1: the prefabricated random speckle of sample surfaces；
Step 2: installation sample；
Step 3: the real-time sample direct picture that telecentricity measures camera lens being grabbed by Survey Software, as start reference figure
Picture；
Step 4: 5 to 7 characteristic points being chosen in the parallel gauge length section upper and lower end of sample by Survey Software respectively, are calculated
The average distance of upper and lower end characteristic point starts extension test as initial gage segment length；
Step 5: in test process, Survey Software automatically grabs the realtime graphic of telecentricity measurement camera lens, and utilizes digitized map
As related algorithm calculates Displacement of the selected characteristic point relative to initial reference image, analysis gauge length section is stretched in real time
Long amount draws load-deformation curve in conjunction with the acquisition of real-time stress.
The step 2 includes the following steps:
Step 2-1: adjusting piezoelectric ceramics linear actuator, sample stage made to drop to home, will have micro-test sample
The central slit of the sample carrier insertion rectangular grip block of sample stage；
Step 2-2: adjusting Y-axis motorized precision translation stage, so that micro-test sample and micro- pull head is staggered certain distance in Y direction, then
Piezoelectric ceramics linear actuator is adjusted, micro-test sample is risen in the visual field of telecentricity measurement camera lens；
Step 2-3: adjusting sample orientation in the real-time high power image of telecentricity measurement camera lens, guarantees the parallel stress of micro-test sample
Then axis locks sample carrier with fastening screw；
Step 2-4: adjusting X-axis motorized precision translation stage and piezoelectric ceramics linear actuator, in the square C for making micro-test sample and micro- pull head
Hollow structure is perfectly aligned, while guaranteeing micro-test sample in X-direction precise alignment；
Step 2-5: adjusting Y-axis motorized precision translation stage, observes the realtime graphic of centering camera lens, sample is moved into along the y axis
The square c-type hollow structure of micro- pull head, while guaranteeing micro-test sample in Y direction precise alignment.
Compared with prior art, the present invention its remarkable advantage is as follows:
1, the system has the advantages that small in size, compact-sized, measuring accuracy is high etc., can carry out size at a few micrometers to number
The simple tension of micro-test sample between hundred microns is tested, and is determined the elasticity modulus of material, yield strength, tensile strength, is stretched modeling
Property etc. mechanical properties, avoid submicron-scale test dendrite.
2, the present invention integrates contactless digital picture correlation strain measurement technique, precise measurement meso-scale sample mark
The error that the prior art is generated using the strain of machine offset estimation is eliminated in real-time strain away from section.
3, in conjunction with electric precise translation stage and the real time microscopic head of omnidirectional distribution, the present invention realizes micro-test sample simultaneously
The precise alignment of a front surface and a side surface reduces off-axis caused measurement error, while improving the convenience of micro-test sample installation.
4, flexible and convenient to use, sample stage and micro- pull head can be replaced according to different test samples and test condition.
5, it is not necessarily to vacuum environment, can be independently operated, and also be represented in combination with X-ray diffraction, synchrotron radiation, neutron diffraction etc.
Sign technology carries out in-situ test.
Present invention is further described in detail with reference to the accompanying drawing.
Detailed description of the invention
Fig. 1 is overall appearance structural representation of the present invention.
Fig. 2 is piezoelectric ceramics actuator fastener schematic diagram of the present invention.
Fig. 3 is sample stage schematic diagram of the present invention.
Fig. 4 is the micro- pull head schematic diagram of the present invention.
Fig. 5 is the realtime graphic of high power telecentricity measurement camera lens of the present invention.
Fig. 6 is the realtime graphic of high power centering camera lens of the present invention.
Fig. 7 is the stresses typical strain curve of present invention measurement gained deformation fine copper.
Description of symbols:
1- column I, 2- column II, 3- pedestal, 4-Y shaft step motor, 5-Y axis translation stage, 6- piezoelectric ceramic actuator are tight
Firmware, 7-X axis translation stage, 8-X shaft step motor, 9- station, 10- piezoelectric ceramics linear actuator, 11- sample stage, 12- are vertical
The micro- pull head of column III, 13-, the micro- pull head supporting rod of 14-, 15- accurate miniature pull pressure sensor, 16- crossbeam, 17-CCD industry phase
Machine I, 18- high power telecentricity measures camera lens, 19- fixed block I, 20- Manual three-dimensional translation stage, 21- fixed block II, 22- centering camera lens
Fastening block, 23-CCD industrial camera II, 24- high power centering microlens, the rectangular grip block of 25-, 26- fastening screw, 27- are removable
Dynamic sample carrier, 28- sample, the side's 29- c-type hollow structure.
Specific embodiment
The specific structure and embodiment that the present invention will be described in detail with reference to the accompanying drawings and examples:
A kind of material mesoscopic scale simple tension measuring system, the system is for a few micrometers to Jie between hundreds of microns
The measurement of scale mechanical property is seen, system includes sample fixed cell, sample centering unit, accurate loading unit, load signal
Sensing unit, digital picture correlation strain measurement unit and station；
The digital picture correlation strain measurement unit is arranged in the side of station (9), for the front to sample
Carry out Image Acquisition, including Manual three-dimensional translation stage (20), high power telecentricity measurement camera lens (18), CCD industrial camera I (17), height
Fast image pick-up card and real-time digital image relevant calculation module；It is realized by the way that three axis of Manual three-dimensional translation stage (20) are mobile
Telecentricity measures the focusing and visual field selection of camera lens (18)；The real-time digital image relevant calculation module passes through CCD industry phase
Machine I (17) is grabbed sample surfaces image in real time and calculated using digital picture related algorithm selectes characteristic point in advance in image
Displacement and in real time strain.
The sample centering unit includes centering operating mechanism and centering observation element, and the setting of centering operating mechanism is being grasped
Make the lower part of platform (9), including X-axis motorized precision translation stage (7) and X-axis stepper motor (8), Y-axis motorized precision translation stage (5) and Y-axis stepping
Motor (4), the centering observation element include microlens in the high power pair for be arranged in operation console side (24), CCD industry phase
Machine II (23) and corresponding image pick-up card, for observing micro-test sample side, and be arranged in the station other side high power it is remote
The heart measures camera lens (18), CCD industrial camera I (17) and corresponding high speed image acquisition board, for observing sample front.
The sample fixed cell includes sample stage and micro- pull head (13), and the sample stage includes that center portion is machined with slit
Rectangular grip block (25), removable sample carrier (27) and fastening screw (26).When test, micro-test sample first will be machined with glue
Sample (28) is fixed on one end of sample carrier (27), then sample carrier (27) is inserted into the central slit of rectangular grip block (25),
Sample orientation is adjusted in the real-time high power image of telecentricity measurement camera lens (18), guarantees the parallel stress axis of micro-test sample, finally with tight
Gu screw (26) locks sample carrier (27).
Micro- pull head is high rigidity rectangle sheet metal, and one end is hollow by the micro-processing technology side of being machined with c-type
Structure (29), the opening width of square c-type hollow structure (29) are used for slightly larger than micro-test sample gauge length width is stretched by the micro- drawing of dog bone
Stretching sample includes wherein.
The accurate loading unit is the piezoelectric ceramics linear actuator (10) for being built-in with linear encoder, piezoelectric ceramics
Linear actuator (10) is perpendicularly fixed on X-axis motorized precision translation stage (7) by fastener (6), by controlling piezoelectric ceramics straight line
Actuator leads (10) and draws sample stage, moves downward the simple tension test for realizing Bit andits control.
The load signal sensing unit includes accurate miniature force snesor (15) and corresponding signal acquisition module, is used
In the real-time stress for measuring and recording micro-test sample, the fixing end of force snesor (15) is directly fixed on crossbeam (16) by screw thread,
Measurement end then connects micro- pull head supporting rod (14).
System further includes pedestal (3)；Station (9) is arranged above pedestal (3) by four columns II (2)；Station
(9) top setting two root posts III (12), and the line of two root posts III (12) and the angled setting of X-axis, with guarantee pair
Middle microlens (24) are parallel to X-axis；Crossbeam (16) is covered on two root posts III (12) by circular hole, and is screwed, horizontal
The height and position of beam (16) can be adjusted freely up and down.
The high power centering microlens (24) are fixed therein a root post III by centering camera lens fastening block (22)
(12) on, for observing sample side.
High power telecentricity measurement camera lens (18) is parallel to Y-axis, is fixed on Manual three-dimensional translation stage by fixed block (19)
(20), then by fixed block (21) and three root post I (1) it is fixed on pedestal (3).
The real-time digital image relevant calculation module includes Survey Software.
A method of material mesoscopic scale simple tension mechanical property, specific steps are measured using above-mentioned measuring system
It is as follows:
Step 1: the prefabricated random speckle of sample surfaces；
Step 2: installation sample；
Step 3: the real-time sample direct picture of telecentricity measurement camera lens (18) is grabbed by Survey Software, as start reference
Image；
Step 4: 5 to 7 characteristic points being chosen in the parallel gauge length section upper and lower end of sample by Survey Software respectively, are calculated
The average distance of upper and lower end characteristic point starts extension test as initial gage segment length；
Step 5: in test process, Survey Software automatically grabs the realtime graphic of telecentricity measurement camera lens (18), and utilizes number
Word image correlation algorithm calculates Displacement of the selected characteristic point relative to initial reference image, and analysis gauge length section is real
When elongation draw load-deformation curve in conjunction with the acquisition of real-time stress.
The step 2 includes the following steps:
Step 2-1: it adjusts piezoelectric ceramics linear actuator (10), so that sample stage is dropped to home, micro- examination will be had
The central slit of sample carrier (27) the insertion rectangular grip block of sample stage (25) of sample；
Step 2-2: being adjusted Y-axis motorized precision translation stage (5), and micro-test sample and micro- pull head (13) is made to be staggered a spacing in Y direction
From then adjusting piezoelectric ceramics linear actuator (10) rises to micro-test sample in the visual field of telecentricity measurement camera lens (18)；
Step 2-3: adjusting sample orientation in the real-time high power image of telecentricity measurement camera lens (18), guarantees that micro-test sample is parallel
Then stress axis locks sample carrier with fastening screw (26)；
Step 2-4: X-axis motorized precision translation stage (7) and piezoelectric ceramics linear actuator (10) are adjusted, micro-test sample and micro- pull head are made
(13) square C hollow structure (29) is perfectly aligned, while guaranteeing micro-test sample in X-direction precise alignment；
Step 2-5: being adjusted Y-axis motorized precision translation stage (5), the realtime graphic of centering camera lens (24) is observed, by sample along Y-axis side
To the square c-type hollow structure (29) of the micro- pull head (13) of immigration, while guaranteeing micro-test sample in Y direction precise alignment.
Illustrate use process of the invention by taking deformation fine copper sample meso-scale extension test as an example below:
(1) it prepares extension test micro-test sample: cutting out 500 μm of thickness or so of copper sheet first with Wire EDM, and
With sand paper by its wear down to 50 μm or so；Then it is tried using the micro-stretching that femtosecond laser parallel micromachining system is cut into dog bone shape
Sample, 250 μm of gauge length segment length, 100 μm of width, the quadrant that transition is 50 μm of radius；Finally by slight electrification
The cutter trade and superficial lesions layer of surface scratch and femtosecond laser are removed in optical polishing.
(2) spray random speckle: micro-stretching sample is fixed on sample carrier (25) with 502 glue, and will with vaporizer
Black ink is atomized and is sputtered onto sample surfaces.Through control sample at a distance from nozzle and sputtering time, it can get uniformly point
Scattered random dot pattern.
(3) sample is installed: first adjusting driving piezoelectric ceramics actuator (10) drops to rectangular grip block (25) sufficiently low
Home, will with micro-test sample sample carrier (27) insertion the rectangular grip block of sample stage (25) central slit, adjust Y-axis
Motorized precision translation stage (5), the certain distance so that sample and micro- pull head are staggered in the Y direction, then adjusts piezoelectric ceramics actuator
(10), sample (28) is risen in the visual field of telecentricity measurement camera lens (18).In the real-time high power figure of telecentricity measurement camera lens (18)
Sample orientation is adjusted as in, guarantees the parallel stress axis of micro-test sample, locks sample carrier with fastening screw (26).It is electronic flat to adjust X-axis
Then moving stage (7) drives piezoelectric ceramics actuator (10) to adjust sample so that sample is aligned in the X-axis direction with micro- pull head
To the position being aligned with micro- pull head side C hollow structure (29), Y-axis motorized precision translation stage (5) are adjusted again, are observed centering camera lens (24)
Realtime graphic, sample is moved into the stress shaft position of micro- pull head side C hollow structure (29) along the y axis, as illustrated in Figures 5 and 6.
(4) start to test: slowly adjusting piezoelectric ceramics actuator (10), keep sample and micro- pull head side C hollow structure following
Along just contacting, the parallel gauge length section upper and lower ends of micro-test sample pick up characteristic point in telecentricity measurement camera lens (18) realtime graphic, if
Test rate of displacement is set, micro-stretching test is started.The signal of software automatic collection sensor (15), crawl telecentricity measure camera lens
(18) realtime graphic, and the displacement and strain of selected characteristic point are calculated, load-deformation curve is drawn, as shown in Figure 7.
Claims (10)
1. a kind of material mesoscopic scale simple tension measuring system, which is characterized in that the system is for a few micrometers to hundreds of micro-
The measurement of meso-scale mechanical property between rice, system include sample fixed cell, sample centering unit, accurate load list
Member, load signal sensing unit, digital picture correlation strain measurement unit and station；
The digital picture correlation strain measurement unit setting is carried out in the side of station (9) for the front to sample
Image Acquisition, including Manual three-dimensional translation stage (20), high power telecentricity measurement camera lens (18), CCD industrial camera I (17), high speed figure
As capture card and real-time digital image relevant calculation module；Telecentricity is realized by the way that three axis of Manual three-dimensional translation stage (20) are mobile
Measure the focusing and visual field selection of camera lens (18)；The real-time digital image relevant calculation module passes through CCD industrial camera I
(17) sample surfaces image is grabbed in real time and the Asia for selecting characteristic point in image in advance is calculated using digital picture related algorithm
Pixel displacement and in real time strain.
2. material mesoscopic scale simple tension measuring system according to claim 1, which is characterized in that the sample pair
Middle unit includes centering operating mechanism and centering observation element, and centering operating mechanism is arranged in the lower part of station (9), including X
Axis motorized precision translation stage (7) and X-axis stepper motor (8), Y-axis motorized precision translation stage (5) and y-axis stepper motor (4), the centering observation
Mechanism includes microlens in the high power pair for be arranged in operation console side (24), CCD industrial camera II (23) and corresponding image
For observing micro-test sample side, and the measurement of high power telecentricity camera lens (18), CCD work of the station other side are arranged in capture card
Industry camera I (17) and corresponding high speed image acquisition board, for observing sample front.
3. material mesoscopic scale simple tension measuring system according to claim 2, which is characterized in that the sample is fixed
Unit includes sample stage and micro- pull head (13), and the sample stage includes the rectangular grip block (25), removable that center portion is machined with slit
Dynamic sample carrier (27) and fastening screw (26).When test, the sample (28) for being machined with micro-test sample is first fixed on sample with glue
The one end of (27) is held in the palm, then sample carrier (27) are inserted into the central slit of rectangular grip block (25), measures camera lens (18) in telecentricity
Real-time high power image in adjust sample orientation, guarantee the parallel stress axis of micro-test sample, finally lock sample with fastening screw (26)
It holds in the palm (27).
4. material mesoscopic scale simple tension measuring system according to claim 3, which is characterized in that micro- pull head
For high rigidity rectangle sheet metal, one end passes through the micro-processing technology side of being machined with c-type hollow structure (29), the square hollow knot of c-type
The opening width of structure (29) is slightly larger than micro-test sample gauge length width is stretched, for including wherein by dog bone micro-stretching sample.
5. material mesoscopic scale simple tension measuring system according to claim 4, which is characterized in that the precision adds
Carrier unit is the piezoelectric ceramics linear actuator (10) for being built-in with linear encoder, and piezoelectric ceramics linear actuator (10) passes through tight
Firmware (6) is perpendicularly fixed on X-axis motorized precision translation stage (7), is led (10) by control piezoelectric ceramics linear actuator and is drawn sample stage,
Move downward the simple tension test for realizing Bit andits control.
6. material mesoscopic scale simple tension measuring system according to claim 5, which is characterized in that the load letter
Number sensing unit includes accurate miniature force snesor (15) and corresponding signal acquisition module, for measuring and recording micro-test sample
The fixing end of real-time stress, force snesor (15) is directly fixed on crossbeam (16) by screw thread, and measurement end then connects micro- pull head folder
Hold bar (14).
7. material mesoscopic scale simple tension measuring system according to claim 6, which is characterized in that system further includes bottom
Seat (3)；Station (9) is arranged above pedestal (3) by four columns II (2)；Two root posts are arranged in station (9) top
III (12), and the line of two root posts III (12) and the angled setting of X-axis, to guarantee that centering microlens (24) are parallel to
X-axis；Crossbeam (16) is covered on two root posts III (12) by circular hole, and is screwed, the height and position of crossbeam (16) can on
It is lower freely to adjust.
The high power centering microlens (24) are fixed therein a root post III (12) by centering camera lens fastening block (22)
On, for observing sample side.
High power telecentricity measurement camera lens (18) is parallel to Y-axis, is fixed on Manual three-dimensional translation stage (20) by fixed block (19),
Pedestal (3) are fixed on by fixed block (21) and three root post I (1) again.
The real-time digital image relevant calculation module includes Survey Software.
8. material mesoscopic scale simple tension measuring system according to claim 7, which is characterized in that the X-axis electricity
The displacement accuracy of dynamic translation stage and Y-axis motorized precision translation stage is better than 1 μm；The piezoelectric ceramics linear actuator maximum push-pull effort is
10N, closed loop displacement accuracy are 20nm or more；The optical magnification of the telecentricity measurement camera lens is 20 times or more, corresponding
Acquisition image single pixel physical size is 275nm；The frame per second of the CCD industrial camera I is 167 frames/second.
9. a kind of measure material mesoscopic scale simple tension mechanical property using the described in any item measuring systems of claim 1-8
Method, which is characterized in that specific step is as follows:
Step 1: the prefabricated random speckle of sample surfaces；
Step 2: installation sample；
Step 3: the real-time sample direct picture of telecentricity measurement camera lens (18) is grabbed by Survey Software, as start reference figure
Picture；
Step 4: 5 to 7 characteristic points being chosen in the parallel gauge length section upper and lower end of sample by Survey Software respectively, are calculated upper and lower
It holds the average distance of characteristic point as initial gage segment length, and starts extension test；
Step 5: in test process, Survey Software automatically grabs the realtime graphic of telecentricity measurement camera lens (18), and utilizes digitized map
As related algorithm calculates Displacement of the selected characteristic point relative to initial reference image, analysis gauge length section is stretched in real time
Long amount draws load-deformation curve in conjunction with the acquisition of real-time stress.
10. according to the method described in claim 9, it is characterized in that, the step 2 includes the following steps:
Step 2-1: adjusting piezoelectric ceramics linear actuator (10), sample stage made to drop to home, will have micro-test sample
Sample carrier (27) is inserted into the central slit of the rectangular grip block of sample stage (25)；
Step 2-2: being adjusted Y-axis motorized precision translation stage (5), so that micro-test sample and micro- pull head (13) is staggered certain distance in Y direction, so
Piezoelectric ceramics linear actuator (10) are adjusted afterwards, micro-test sample are risen in the visual field of telecentricity measurement camera lens (18)；
Step 2-3: adjusting sample orientation in the real-time high power image of telecentricity measurement camera lens (18), guarantees the parallel stress of micro-test sample
Then axis locks sample carrier with fastening screw (26)；
Step 2-4: X-axis motorized precision translation stage (7) and piezoelectric ceramics linear actuator (10) are adjusted, micro-test sample and micro- pull head (13) are made
Square C hollow structure (29) it is perfectly aligned, while guaranteeing micro-test sample in X-direction precise alignment；
Step 2-5: being adjusted Y-axis motorized precision translation stage (5), observes the realtime graphic of centering camera lens (24), sample is moved along the y axis
The square c-type hollow structure (29) of pull head (13) in a subtle way, while guaranteeing micro-test sample in Y direction precise alignment.
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