CN104464838A - One-dimensional precision positioning platform with Z axis enlarged in negative direction - Google Patents
One-dimensional precision positioning platform with Z axis enlarged in negative direction Download PDFInfo
- Publication number
- CN104464838A CN104464838A CN201410784590.1A CN201410784590A CN104464838A CN 104464838 A CN104464838 A CN 104464838A CN 201410784590 A CN201410784590 A CN 201410784590A CN 104464838 A CN104464838 A CN 104464838A
- Authority
- CN
- China
- Prior art keywords
- axis negative
- negative sense
- enlarger
- piezoelectric ceramics
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The invention discloses a one-dimensional precision positioning platform with a Z axis enlarged in the negative direction. The one-dimensional precision positioning platform comprises a Z axis negative direction enlarging mechanism, a base used for protecting the Z axis negative direction enlarging mechanism and a moving platform located on the Z axis negative direction enlarging mechanism. The Z axis negative direction enlarging mechanism comprises multiple flexible arms, parallel plates fixed to the two sides of each flexible arm, output pieces connecting the flexible arms and the moving platform, piezoelectric ceramic installation pieces and a chassis fixedly connected to the base. The parallel plates are flexibly connected with the flexible arms through flexible hinges. Piezoelectric ceramic is arranged in a space formed between the parallel plates, located below the Z axis negative direction enlarging mechanism and located above the chassis. The piezoelectric ceramic is fixed by the piezoelectric ceramic installation pieces located on the parallel plates located on the two sides. Compared with a traditional enlarged positioning platform, the one-dimensional precision positioning platform has the advantages of being large in stroke range, high in precision, simple in structure, small in size, high in rigidity, sensitivity and resolution ratio, being in nanoscale, suitable for being used as a micro-positioning platform and the like.
Description
Technical field
The invention belongs to micro-move device application, be particularly related to and utilize novel amplification principle to realize at Z axis the micro-move device platform that negative sense amplifies one-dimensional precise location.
Background technology
In recent years, along with microelectric technique, aerospace, developing rapidly of the subjects such as bioengineering, formally enters " sub-micron-nanometer " epoch.At electronics, optics, in numerous technical field such as machine-building, in the urgent need to high precision, high resolving power, the micro-positioning of high reliability, for realizing high-precision research, microposition technology will play an increasingly important role in numerous high-tech areas such as MEMS (micro electro mechanical system), nano-fabrication technique, microelectronics and Nano Scale Electronics Technology, nano biological engineerings.In order to on-line operation or coordinate other instrument and equipments to complete high-precision research and use.
Along with the development of science and technology, to microposition define also from before mm level sub-um-nm level till now evolve, later developing direction will be sub-nm level (<10-9m).To high-accuracy systematic research, walk the prostatitis in the world with the U.S., Germany and Japan, such as based in piezoelectric ceramics nanometer positioning, the resolution of 1nm, the positioning precision of about 10nm, the shape journey of more than 10mm can be reached.Current China is in the research also backwardness relatively of microposition technical field, therefore, carrying out the correlative study of mini positioning platform, for the gap reduced with going together, promoting that the defence and military of China and the fast development of national economy have important and far-reaching meaning both at home and abroad.
One-dimensional precise locating platform, major function realizes by operation exemplar or the one-dimensional precise motion and the location that are observed exemplar, and the one dimension operation etc. of microprobe.Its fine motion principle of work is the inverse piezoelectric effect utilizing piezoelectric ceramics, drives resilient hinge mechanism to realize micrometric displacement transmission, to reach the requirement of a precision positioning.It is relative to the one dimension dimension precision positioning technology of other type of drive, as motor driving, voice coil motor driving, memorial alloy driving and magnetic hysteresis telescopic drive mode etc., that its ultimate principle realizes is convenient, it is simple to control, and have that resolution is high, the high and repetitive positioning accuracy advantages of higher of transmission gapless, easily microminiaturization, kinematic accuracy.Micro-displacement driver is the key component of mini positioning platform, and the characteristic of driver and precision are to the performance important of locating platform system.Micro-displacement driver is the key component of mini positioning platform, and the characteristic of driver and precision are to the performance important of locating platform system.
Micro displacement workbench is made up of micro-displacement driver and guide rail two parts.Five classes can be divided into: flexible support, piezoelectricity or electrostriction microbit device drive according to guide rail form and type of drive; Rolling guide, piezoelectric ceramics or electrostriction micromotion device drive: rail plate, and mechanical type drives; Parallel flexible guide rail, mechanical type or electromagnetism, piezoelectricity, electrostriction micromotion device driver drives; Air-float guide rail, servomotor or linear electric motors drive.The micro-displacement work table of common Piezoelectric Ceramic makes support rails with flexible hinge, makes driving element with piezoelectric ceramic actuator.
Flexible hinge comprises just round, perpendicular type, ellipse, hyperbolic-type.Just round: accuracy is lower, stress is concentrated little, and dirigibility is best, easy to process; Perpendicular type: there is maximum concentrated stress, dirigibility is better, and intensity is not enough; Ellipse: stress is concentrated minimum, accuracy is lower; Hyperbolic-type: precision is higher, stress is concentrated lower, processing difficulties.Compliant mechanism comprises displacement Z axis negative sense enlarger, displacement guiding mechanism, flexible hinge.The advantage of compliant mechanism: 1, mechanical friction, gapless 2, avoid wearing and tearing, improve life-span 3, high-precision motion 4, avoid lubrication, avoid pollute; Shortcoming: 1, range of movement limited 2, be difficult to realize Long Distances 3, rigidity is low.(if the patent No. is the patent of CN201420081663.6).
Precisely locating platform displacement Z axis negative sense enlarger comprises leverage, quadrangular mechanism, eight-linkage mechanism, Scott mechanism, bridge type mechanism.Leverage: advantage: rigidity is large, structure simply, easily manufactures, shortcoming: displacement equations multiple is little, there is displacement coupling; Quadrangular mechanism: advantage: structural symmetry, eliminate displacement coupling, shortcoming: displacement equations multiple is little; Eight-linkage mechanism: advantage: compact conformation, eliminate displacement coupling, shortcoming: complex structure, not easily to manufacture; Scott mechanism: advantage: simple and compact for structure, displacement equations multiple is large, shortcoming: amplification ratio is non-linear; Bridge type mechanism: advantage: structure is simple, displacement equations multiple is large, shortcoming: rigidity is too low.
Above-mentioned one-dimensional precise locating platform realizes in structure and displacement equations mode different at one dimension, all error can be caused because of the reason of class of establishment in the precision positioning of one dimension Long Distances in the process realizing the precision positioning of one dimension Long Distances, finally affect kinematic accuracy, and bring cumulative errors and the technical barrier such as angular error, coupling displacement for one dimension Long Distances precisely locating platform.(if the patent No. is the patent of CN201310603633.7, CN201310068434.0).
Therefore, be necessary to find one can effectively improve range of movement enlargement factor, precisely locating platform volume can be reduced simultaneously, and avoid the precisely locating platform of angular error.
Summary of the invention
In view of this, the invention provides a kind of Z axis negative sense of novel Z axis negative sense enlarger that utilizes and amplify one-dimensional precise locating platform, this kind of novel Z axis negative sense enlarger easily ensures its machining precision in process, the symmetry of workpiece is improved a lot, doing so avoids the coupling displacement of novel Z axis negative sense enlarger.
A kind of Z axis negative sense amplifies one-dimensional precise locating platform, it is characterized in that: comprise Z axis negative sense enlarger, for the protection of the pedestal of Z axis negative sense enlarger, be positioned at the motion platform above Z axis negative sense enlarger, described Z axis negative sense enlarger comprises some flexible arms, be fixed on the parallel-plate of flexible arm both sides, connect the output of flexible arm and motion platform, piezoelectric ceramics fabricated section and the chassis be connected and fixed with pedestal, described parallel-plate is flexibly connected by flexible hinge and flexible arm, between described parallel-plate, below described Z axis negative sense enlarger, piezoelectric ceramics is provided with in space above described chassis, described piezoelectric ceramics is fixed by the piezoelectric ceramics fabricated section be arranged on the parallel-plate of both sides.
Preferably, described piezoelectric ceramics fabricated section comprises pre-load nut and steel ball, flexibly connects with piezoelectric ceramics.
Preferably, described pre-load nut adopts fine thread.
Preferably, the enlargement factor of described Z axis negative sense enlarger is 4 times.
Preferably, the protective sleeve chassis below described piezoelectric ceramics being provided with and holding shielding line is positioned at.
Preferably, described Z axis negative sense enlarger is connected with pedestal screw.
Preferably, described motion platform upper surface is provided with the connecting thread for mounted movable part.
Preferably, described motion platform periphery is provided with upper cover plate, and described upper cover plate is set up on described pedestal.
Compared with prior art, the present invention has the following advantages:
(1) pedestal is adopted to protect Z axis negative sense enlarger in the present invention; make Z axis negative sense enlarger not by external interference, to ensure that precise positioning work table normally works, have larger space in a lateral direction simultaneously; structure is compacter, can realize wider motion.
(2) adopt piezoelectric ceramic actuator in the present invention, volume is little, displacement resolution is high, fast response time, High power output, conversion efficiency are high, static state is not generated heat, effectively improve the stability of locating platform running.
(3) in the present invention, improvement to a great extent be there has also been for the pre-tightening apparatus of piezoelectric ceramic actuator, compared with pre-tightening apparatus in the past, the pre-load nut of pre-tightening apparatus of the present invention adopts fine thread, adopt fine thread locking vibration-isolating effect good, can precise fine-adjustment pretightning force, the kinematic error avoiding the gap of piezoelectric ceramics in installation process to cause and the damage of piezoelectric ceramics.
(4) amplify in one-dimensional precise locating platform at a kind of Z axis negative sense of the present invention; the motion of Z axis negative sense is by Piezoelectric Ceramic; by novel Z axis negative sense enlarger; piezo ceramic motion scope is amplified; wherein parallel-plate flexible hinge structure plays guiding and auxiliary effect of replying, and under the protection of flexible hinge, platform keeps the consistance of direction of motion; and any motion avoided perpendicular to direction of motion, and the destruction of external force.
(5) it is large that the Z axis negative sense enlarger designed by the present invention has stroke range, precision is high, structure is simple, volume is little, rigidity is large, highly sensitive, resolution is high, nanoscale, be suitable for making the advantages such as micromotion platform, in MEMS (micro electro mechanical system), pH effect, Ultra-precision Turning, STM (Scanning TunnelingMicroscope, scanning tunnel microscope) and AFM (Atomic Force Microscope, atomic force microscope) scanning platform, micro-nano operates, the field such as micro robot and biological microoperation is gathered around because of its compact conformation and easy location with a wide range of precise and is had wide practical use.
Accompanying drawing explanation
In order to the technical scheme in the embodiment of the present invention is more clearly described, introduce to the accompanying drawing used required in embodiment simply below, apparently, the accompanying drawing that the following describes is only some embodiments recorded in the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is that a kind of Z axis negative sense of the present invention amplifies one-dimensional precise location platform arrangement schematic diagram;
Fig. 2 is that a kind of Z axis negative sense of the present invention amplifies one-dimensional precise locating platform vertical view;
Fig. 3 is the structural representation that a kind of Z axis negative sense of the present invention amplifies Z axis negative sense enlarger in one-dimensional precise locating platform.
Wherein:
1, pedestal; 2, Z axis negative sense enlarger;
21, output; 22, flexible arm; 23, piezoelectric ceramics fabricated section; 24, chassis; 25, parallel-plate;
3, motion platform; 31, connecting thread;
4, upper cover plate; 5, flexible hinge; 6, piezoelectric ceramics;
71 ~ 72, pre-load nut; 8, steel ball; 9, protective sleeve.
Embodiment
The output performance of one-dimensional precise locating platform is amplified in order to improve Z axis negative sense, the invention discloses a kind of Z axis negative sense and amplify one-dimensional precise locating platform, the precision positioning of Z axis negative sense one dimension is adopted in a plane, and adopt Z axis negative sense enlarger, effectively must improve range of movement enlargement factor, reduce precisely locating platform volume, make it compacter, and the angular error avoiding other Z axis negative sense enlargers to bring.
Below by embodiment, and by reference to the accompanying drawings, technical scheme of the present invention is described in further detail.
A kind of Z axis negative sense amplifies one-dimensional precise locating platform, comprise Z axis negative sense enlarger 2, for the protection of Z axis negative sense enlarger 2 pedestal 1, be positioned at motion platform 3 above Z axis negative sense enlarger 1, and be arranged on the upper cover plate 4 of motion platform 3 periphery.Wherein, Z axis negative sense enlarger 2 amplifies pedestal 1 in one-dimensional precise locating platform by threaded hole and Z axis negative sense and is connected; It is formed by Linear cut and preferably have eight hinge points that Z axis negative sense amplifies Z axis negative sense enlarger 2 in one-dimensional precise locating platform, and Z axis negative sense amplifies motion platform 3 place in one-dimensional precise locating platform the connecting thread 31 for mounted movable part.
As shown in FIG. 1 to 3, above-mentioned Z axis negative sense enlarger 2 chassis 24 that comprises some flexible arms 22, be fixed on the parallel-plate 25 of flexible arm 22 both sides, connect the output 21 of flexible arm 22 and motion platform 3, piezoelectric ceramics fabricated section 23 and be connected and fixed with pedestal 1.Wherein, described parallel-plate 25 realizes flexibly connecting by flexible hinge 5 and flexible arm 22, be provided with piezoelectric ceramics 6 in space between described parallel-plate 25, below described Z axis negative sense enlarger 2, above described chassis 24, described piezoelectric ceramics 6 is fixed by the piezoelectric ceramics fabricated section 23 be arranged on the parallel-plate 25 of both sides.The motion of Z axis negative sense is driven by piezoelectric ceramics 6, by Z axis negative sense enlarger 2, is amplified by piezoelectric ceramics 6 range of movement.Wherein, parallel-plate 25 and the syndeton of flexible hinge 5 play and lead and auxiliary effect of replying, and under the protection of flexible hinge 5, platform keeps the consistance of direction of motion, and avoids any motion perpendicular to direction of motion, and the destruction of external force.
Preferably, as shown in Figure 3, Z axis negative sense of the present invention amplifies piezoelectric ceramics 6 in one-dimensional precise locating platform and is adjusted pretightning force be installed among the Z axis negative sense enlarger 4 of Z axis negative sense amplification one-dimensional precise locating platform by pre-load nut 71 ~ 72, steel ball 8 in Z axis negative sense amplification one-dimensional precise locating platform, and piezoelectric ceramics 6 is accurately located in Z axis negative sense enlarger 2.Compared with pre-tightening apparatus in the past, pre-load nut 71 ~ 72 in the present invention adopts fine thread, adopt fine thread locking vibration-isolating effect good, can precise fine-adjustment pretightning force, the kinematic error avoiding the gap of piezoelectric ceramics 6 in installation process to cause and the damage of piezoelectric ceramics 6 self.
As shown in FIG. 1 to 3; be positioned at the protective sleeve 9 chassis 24 below described piezoelectric ceramics 6 being provided with and holding shielding line; the shielding line be connected with above-mentioned piezoelectric ceramics 6 is passed by this protective sleeve 9; in this Z axis negative sense one-dimensional precise locating platform, the deformation of piezoelectric ceramics 6 is amplified by Z axis negative sense enlarger 2, passes to motion platform 3 export displacement enlargement by flexible hinge 5.
As shown in Figure 3, in the preferred embodiment for the present invention, Z axis negative sense amplifies Z axis negative sense enlarger 2 in one-dimensional precise locating platform, amplifies pedestal 1 in one-dimensional precise locating platform be connected by chassis 24 and the Z axis negative sense of Z axis negative sense enlarger 2.By the flexible arm 22 of Z axis negative sense enlarger 2, the displacement equations of piezoelectric ceramics 6 is outputted to the output 21 of Z axis negative sense enlarger 2, output 21 is connected with motion platform 3, and displacement equations is exported motion platform 3.And the piezoelectric ceramics fabricated section 23 that this Z axis negative sense amplifies in one-dimensional precise locating platform in Z axis negative sense enlarger 2 comprises pre-load nut 71 ~ 72 and steel ball 8, piezoelectric ceramics fabricated section 23 provides enough pretightning forces by this pre-load nut 71 ~ 72 and steel ball 8 for piezoelectric ceramics 6, avoids the kinematic error that the gap of piezoelectric ceramics 6 in installation process is caused.
Preferably, the enlargement factor that this Z axis negative sense amplifies novel Z axis negative sense enlarger 2 in one-dimensional precise locating platform is about 4 times, substantially increases the displacement equations multiple of original lever Z axis negative sense enlarger.
Why adopt the flexible design that flexible arm 22, flexible hinge 5 are such in the present invention in Z axis negative sense enlarger, be produce because compliant mechanism has certain elastic reaction on the one hand, the output displacement of Z axis negative sense enlarger 2 is reduced accordingly; On the other hand flexible hinge 5 is the displacements because the elastic deformation of material produces, so some energy is by material absorption itself in deformation process, piezoelectric ceramics 6 can be made to be subject to larger load, and the drive displacement making it provide also has reduction simultaneously.When physical dimension is limited, when piezoelectric ceramics is determined, this structure can obtain larger displacement and export ratio.
In the preferred embodiment for the present invention, Z axis negative sense amplifies pedestal 1 in one-dimensional precise locating platform, flexible hinge 2, Z axis negative sense enlarger 4 preferably light density-metal material (as aluminium alloy, titanium alloy etc.), pre-load nut 71 ~ 72 is heavy density-metal material (as stainless steel, copper etc.) preferably, and piezoelectric ceramics 6 is generally the compositions such as the similar hard piezoceramic material of PZT5.
As the preferred embodiment of the present invention, in order to the rationality of structure, the consideration of the composite factor such as feasibility, cost of processing, the pedestal 1 in the present invention and Z axis negative sense enlarger 2 separate, and are namely processed by the different processing technology of material of the same race.Such compact conformation, and when physical dimension is limited and piezoelectric ceramics is determined, this structure can obtain larger displacement and export ratio.When using this precise positioning work table, when adding a voltage drive to piezoelectric ceramics 6 can there is deformation in piezoelectric ceramics 6, withstand steel ball 8 drives Z axis negative sense enlarger 2 to axially-movable simultaneously, and Z axis negative sense enlarger 2 drives the system motion being arranged on its motion platform 3 top.
Compared with prior art, the present invention has the following advantages:
(1) pedestal is adopted to protect Z axis negative sense enlarger in the present invention; make Z axis negative sense enlarger not by external interference, to ensure that precise positioning work table normally works, have larger space in a lateral direction simultaneously; structure is compacter, can realize wider motion.
(2) adopt piezoelectric ceramic actuator in the present invention, volume is little, displacement resolution is high, fast response time, High power output, conversion efficiency are high, static state is not generated heat, effectively improve the stability of locating platform running.
(3) in the present invention, improvement to a great extent be there has also been for the pre-tightening apparatus of piezoelectric ceramic actuator, compared with pre-tightening apparatus in the past, the pre-load nut of pre-tightening apparatus of the present invention adopts fine thread, adopt fine thread locking vibration-isolating effect good, can precise fine-adjustment pretightning force, the kinematic error avoiding the gap of piezoelectric ceramics in installation process to cause and the damage of piezoelectric ceramics.
(4) amplify in one-dimensional precise locating platform at a kind of Z axis negative sense of the present invention; the motion of Z axis negative sense is by Piezoelectric Ceramic; by novel Z axis negative sense enlarger; piezo ceramic motion scope is amplified; wherein parallel-plate flexible hinge structure plays guiding and auxiliary effect of replying, and under the protection of flexible hinge, platform keeps the consistance of direction of motion; and any motion avoided perpendicular to direction of motion, and the destruction of external force.
(5) it is large that the Z axis negative sense enlarger designed by the present invention has stroke range, precision is high, structure is simple, volume is little, rigidity is large, highly sensitive, resolution is high, nanoscale, be suitable for making the advantages such as micromotion platform, in MEMS (micro electro mechanical system), pH effect, Ultra-precision Turning, STM (Scanning TunnelingMicroscope, scanning tunnel microscope) and AFM (Atomic Force Microscope, atomic force microscope) scanning platform, micro-nano operates, the field such as micro robot and biological microoperation is gathered around because of its compact conformation and easy location with a wide range of precise and is had wide practical use.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and when not deviating from spirit of the present invention or essential characteristic, the present invention can be realized in other specific forms.Therefore, no matter from which point, all should embodiment be regarded as exemplary, and be nonrestrictive, scope of the present invention is limited by claims instead of above-mentioned explanation, and all changes be therefore intended in the implication of the equivalency by dropping on claim and scope are included in the present invention.Any Reference numeral in claim should be considered as the claim involved by limiting.
In addition, be to be understood that, although this instructions is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should by instructions integrally, and the technical scheme in each embodiment also through appropriately combined, can form other embodiments that it will be appreciated by those skilled in the art that.
Claims (8)
1. a Z axis negative sense amplifies one-dimensional precise locating platform, it is characterized in that: comprise Z axis negative sense enlarger, for the protection of the pedestal of Z axis negative sense enlarger, be positioned at the motion platform above Z axis negative sense enlarger, described Z axis negative sense enlarger comprises some flexible arms, be fixed on the parallel-plate of flexible arm both sides, connect the output of flexible arm and motion platform, piezoelectric ceramics fabricated section and the chassis be connected and fixed with pedestal, described parallel-plate is flexibly connected by flexible hinge and flexible arm, between described parallel-plate, below described Z axis negative sense enlarger, piezoelectric ceramics is provided with in space above described chassis, described piezoelectric ceramics is fixed by the piezoelectric ceramics fabricated section be arranged on the parallel-plate of both sides.
2. Z axis negative sense according to claim 1 amplifies one-dimensional precise locating platform, it is characterized in that: described piezoelectric ceramics fabricated section comprises pre-load nut and steel ball, flexibly connects with piezoelectric ceramics.
3. Z axis negative sense according to claim 2 amplifies one-dimensional precise locating platform, it is characterized in that: described pre-load nut adopts fine thread.
4. Z axis negative sense according to claim 1 amplifies one-dimensional precise locating platform, it is characterized in that: the enlargement factor of described Z axis negative sense enlarger is 4 times.
5. Z axis negative sense according to claim 1 amplifies one-dimensional precise locating platform, it is characterized in that: be positioned at the protective sleeve chassis below described piezoelectric ceramics being provided with and holding shielding line.
6. Z axis negative sense according to claim 1 amplifies one-dimensional precise locating platform, it is characterized in that: described Z axis negative sense enlarger is connected with pedestal screw.
7. Z axis negative sense according to claim 1 amplifies one-dimensional precise locating platform, it is characterized in that: described motion platform upper surface is provided with the connecting thread for mounted movable part.
8. Z axis negative sense according to claim 1 amplifies one-dimensional precise locating platform, it is characterized in that: described motion platform periphery is provided with upper cover plate, and described upper cover plate is set up on described pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410784590.1A CN104464838A (en) | 2014-12-16 | 2014-12-16 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410784590.1A CN104464838A (en) | 2014-12-16 | 2014-12-16 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104464838A true CN104464838A (en) | 2015-03-25 |
Family
ID=52910764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410784590.1A Pending CN104464838A (en) | 2014-12-16 | 2014-12-16 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104464838A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106077852A (en) * | 2016-08-04 | 2016-11-09 | 苏州大学 | A kind of electro-chemical machining system |
| CN106960690A (en) * | 2016-08-08 | 2017-07-18 | 哈尔滨工业大学 | The cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom is clamped based on circular arc hinge |
| CN107470657A (en) * | 2017-09-27 | 2017-12-15 | 嘉兴学院 | The power spindle device and error compensating method of regular polygon turning error compensation |
| CN108198588A (en) * | 2017-12-29 | 2018-06-22 | 三英精控（天津）仪器设备有限公司 | A kind of single-degree-of-freedom large-stroke nanometer displacement locating platform based on flexible hinge |
| CN109407305A (en) * | 2018-09-27 | 2019-03-01 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for synchrotron radiation light source and assembling method thereof |
| CN111045203A (en) * | 2020-01-15 | 2020-04-21 | 深圳市生强科技有限公司 | Objective lens combination and full-glass digital acquisition system |
| CN112099173A (en) * | 2020-09-23 | 2020-12-18 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN113459053A (en) * | 2021-06-25 | 2021-10-01 | 西安交通大学 | Motion platform device based on piezoelectric drive |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050018283A1 (en) * | 2003-06-23 | 2005-01-27 | International Business Machines Corporation | Positioning stage |
| WO2006098010A1 (en) * | 2005-03-16 | 2006-09-21 | Hirata Corporation | Precision positioning device |
| CN101286369A (en) * | 2008-06-05 | 2008-10-15 | 上海交通大学 | X-Y-Z three freedom degree tandem type nanometer grade microposition workstation |
| CN103411106A (en) * | 2013-08-23 | 2013-11-27 | 苏州大学 | Nested rhombus-shaped amplification two-dimensional precise locating platform |
| CN203799672U (en) * | 2014-03-28 | 2014-08-27 | 苏州大学 | Precision positioning platform |
-
2014
- 2014-12-16 CN CN201410784590.1A patent/CN104464838A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050018283A1 (en) * | 2003-06-23 | 2005-01-27 | International Business Machines Corporation | Positioning stage |
| WO2006098010A1 (en) * | 2005-03-16 | 2006-09-21 | Hirata Corporation | Precision positioning device |
| CN101286369A (en) * | 2008-06-05 | 2008-10-15 | 上海交通大学 | X-Y-Z three freedom degree tandem type nanometer grade microposition workstation |
| CN103411106A (en) * | 2013-08-23 | 2013-11-27 | 苏州大学 | Nested rhombus-shaped amplification two-dimensional precise locating platform |
| CN203799672U (en) * | 2014-03-28 | 2014-08-27 | 苏州大学 | Precision positioning platform |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106077852B (en) * | 2016-08-04 | 2018-05-15 | 苏州大学 | A kind of electrical-chemistry method system |
| CN106077852A (en) * | 2016-08-04 | 2016-11-09 | 苏州大学 | A kind of electro-chemical machining system |
| CN106960690B (en) * | 2016-08-08 | 2019-02-15 | 哈尔滨工业大学 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
| CN106960690A (en) * | 2016-08-08 | 2017-07-18 | 哈尔滨工业大学 | The cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom is clamped based on circular arc hinge |
| CN107470657A (en) * | 2017-09-27 | 2017-12-15 | 嘉兴学院 | The power spindle device and error compensating method of regular polygon turning error compensation |
| CN108198588B (en) * | 2017-12-29 | 2021-05-11 | 三英精控（天津）仪器设备有限公司 | Single-degree-of-freedom large-stroke nanometer displacement positioning platform based on flexible hinge |
| CN108198588A (en) * | 2017-12-29 | 2018-06-22 | 三英精控（天津）仪器设备有限公司 | A kind of single-degree-of-freedom large-stroke nanometer displacement locating platform based on flexible hinge |
| CN109407305A (en) * | 2018-09-27 | 2019-03-01 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for synchrotron radiation light source and assembling method thereof |
| CN109407305B (en) * | 2018-09-27 | 2021-06-18 | 中国人民解放军国防科技大学 | Piezoelectric driving deformable mirror for synchrotron radiation light source and assembling method thereof |
| CN111045203A (en) * | 2020-01-15 | 2020-04-21 | 深圳市生强科技有限公司 | Objective lens combination and full-glass digital acquisition system |
| CN112099173A (en) * | 2020-09-23 | 2020-12-18 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN112099173B (en) * | 2020-09-23 | 2022-06-14 | 湖北三江航天红阳机电有限公司 | Micro-motion optical platform |
| CN113459053A (en) * | 2021-06-25 | 2021-10-01 | 西安交通大学 | Motion platform device based on piezoelectric drive |
| CN113459053B (en) * | 2021-06-25 | 2022-08-09 | 西安交通大学 | Motion platform device based on piezoelectric drive |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104464838A (en) | One-dimensional precision positioning platform with Z axis enlarged in negative direction | |
| Li et al. | Design and experimental performances of a piezoelectric linear actuator by means of lateral motion | |
| Liu et al. | Design and control of a long-traveling nano-positioning stage | |
| CN103021472B (en) | Plane parallel type three-freedom-degree precise positioning work table | |
| CN103411106B (en) | A kind of nesting type rhombus amplification two-dimensional precisely locating platform | |
| Tian et al. | A flexure-based five-bar mechanism for micro/nano manipulation | |
| CN103499308B (en) | Independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform | |
| CN103225728A (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN102794664B (en) | Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform | |
| CN105880827B (en) | A kind of micron order Ultra-Violet Laser micro Process platform | |
| CN103226296B (en) | Rough-fine-movement laminated workbench with laser interferometer measurement | |
| CN103780142B (en) | A kind of large load high accuracy looper type piezoelectricity straight line driver based on skewback clamp | |
| CN104440817A (en) | Spatial three-dimensional micro-displacement precise positioning device | |
| CN102291039B (en) | Multi-degree-of-freedom bionic piezoelectric driver | |
| CN204349758U (en) | A kind of grand micro-positioning table | |
| CN204403695U (en) | A kind of Z axis negative sense amplifies micro-move device platform | |
| Aggogeri et al. | Precision Positioning Systems: An overview of the state of art | |
| CN203550916U (en) | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform | |
| CN103264385A (en) | Automatic microoperation device | |
| CN103159166A (en) | Efficient micro-array processing device based on parasitic motion principle | |
| CN103383526B (en) | The dynamic stacking workbench of a kind of thick essence | |
| CN204332383U (en) | High precision Z axis forward amplifies one-dimensional precise locating platform | |
| CN103551864B (en) | A kind of high rigidity high-resolution precise elevating gear | |
| CN104362890A (en) | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement | |
| CN108877871A (en) | A kind of built-in two-freedom precisely locating platform of driver |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150325 |