CN112099173B - Micro-motion optical platform - Google Patents
Micro-motion optical platform Download PDFInfo
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- CN112099173B CN112099173B CN202011008479.5A CN202011008479A CN112099173B CN 112099173 B CN112099173 B CN 112099173B CN 202011008479 A CN202011008479 A CN 202011008479A CN 112099173 B CN112099173 B CN 112099173B
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
Abstract
The invention belongs to the technical field of micro-motion optical platforms, and discloses a micro-motion optical platform.A claw end part and a base of a three-claw flexible hinge are respectively fixed on a first substrate and a second substrate; the third substrate includes: the optical element mounting device comprises an outer frame plate, an optical element mounting plate and an external flexible rod assembly; the optical element mounting plate is embedded in the outer frame plate, and the edge of the optical element mounting plate is connected with the outer frame plate through a plurality of external flexible rod components; the second linear driver is fixed on the second substrate, and the telescopic end part of the second linear driver is connected with the optical element mounting plate; the two ends of the translational flexible hinge are respectively connected with the second substrate and the outer frame plate, the third linear driver and the fourth linear driver are respectively fixed on the outer frame plate, and the telescopic end parts of the third linear driver and the fourth linear driver are respectively abutted against the external flexible rod assembly. The invention can avoid the problems of flowing and volatilizing of lubricating medium, dust pollution and damage to high-cleanliness optical environment and precise optical devices.
Description
Technical Field
The invention relates to the technical field of micro-motion optical platforms, in particular to a micro-motion optical platform.
Background
In the fundamental experiments in the field of photoelectron industry and laser physical research, the micro-motion optical platform for adjusting the spatial position of a precise optical component needs to be provided with RXAnd RYTwo-dimensional rotational degree of freedom and DX、DyAnd DZFine tuning function of translational freedom of three dimensions. However, the existing micro-motion optical platform basically constructs a transmission chain with five degrees of freedom through a rigid mechanism, and the external volume and weight of the platform are large due to the integration of a plurality of groups of rigid guide and driving mechanisms; meanwhile, a platform transmission chain adopting a rigid mechanism needs to be lubricated and has component abrasion, and the flowing and volatilization of a lubricating medium and abrasion dust of the platform transmission chain easily pollute and destroy a high-cleanliness optical environment and a precise optical device.
Disclosure of Invention
The invention provides a micro-motion optical platform, which solves the technical problems of flowing and volatilization of a lubricating medium of the micro-motion optical platform, dust pollution caused by abrasion and damage to a high-cleanliness optical environment and a precise optical device in the prior art.
To solve the above technical problem, the present invention provides a micro-motion optical platform, comprising: the flexible hinge comprises a first substrate, a second substrate, a third substrate, a three-jaw flexible hinge, a first linear driver, a two-degree-of-freedom flexible hinge, a second linear driver, a translational flexible hinge, a third linear driver and a fourth linear driver;
the first substrate, the second substrate, and the third substrate are arranged in parallel in a thickness direction;
the claw end part and the base of the three-claw flexible hinge are respectively fixed on the first substrate and the second substrate, the first linear driver is fixed on the first substrate, and the telescopic end part of the first linear driver is fixed on the second substrate through the two-degree-of-freedom flexible hinge;
the third substrate includes: the optical element mounting device comprises an outer frame plate, an optical element mounting plate and an external flexible rod assembly;
the optical element mounting plate is embedded in the outer frame plate, and the edge of the optical element mounting plate is connected with the outer frame plate through a plurality of external flexible rod assemblies;
the second linear driver is fixed on the second substrate, and the telescopic end part of the second linear driver is connected with the optical element mounting plate;
two ends of the translational flexible hinge are respectively connected with the second substrate and the outer frame plate, the third linear driver and the fourth linear driver are respectively fixed on the outer frame plate, and the telescopic end part of the third linear driver and the telescopic end part of the fourth linear driver are respectively abutted against the external flexible rod assembly;
and the action directions of the third linear driver and the fourth linear driver are mutually vertical.
Further, the number of the first linear actuators and the number of the two-degree-of-freedom flexible hinges are both two, and the two first linear actuators are symmetrically arranged about the central axis of the optical element mounting plate.
Further, the telescopic end of the second linear actuator is fixed at the geometric center of the second base plate.
Furthermore, the number of the translational flexible hinges is four, and the four translational flexible hinges are uniformly distributed on the outer frame plate.
Further, the number of the third linear drivers and the number of the fourth linear drivers are both two;
the telescopic strokes of the two third linear drivers are positioned on the same straight line, and the two third linear drivers are symmetrically arranged on two sides of the optical element mounting plate;
the telescopic strokes of the two third linear drivers are positioned on the same straight line, and the two third linear drivers are symmetrically arranged on two sides of the optical element mounting plate.
Furthermore, the number of the external flexible connecting rod assemblies is four, and the external flexible connecting rod assemblies are respectively in one-to-one correspondence with the two third linear drivers and the two fourth linear drivers.
Further, the externally positioned flexible rod assembly includes: a primary flexible rod assembly and a secondary flexible rod assembly;
the edge of the optical element mounting plate is respectively connected with the edge of the inner frame of the outer frame plate through the primary flexible rod component and the secondary flexible rod component;
the primary flexible rod component is also connected with the secondary flexible rod component.
Further, the primary flexible rod assembly comprises: the first support rod, the primary flexible rod and the second support rod;
the secondary flexible rod assembly comprises: a third supporting rod, a secondary flexible rod and a fourth supporting rod;
the two ends of the first supporting rod are respectively connected with the inner frame edge of the outer frame plate and the first-stage flexible rod, the two ends of the second supporting rod are respectively connected with the first-stage flexible rod and the second-stage flexible rod, the two ends of the third supporting rod are respectively connected with the inner frame edge of the outer frame plate and the second-stage flexible rod, and the two ends of the fourth supporting rod are respectively connected with the second-stage flexible rod and the edge of the optical element mounting plate.
Further, the translational flexible hinge comprises: the telescopic rod assembly comprises a shell, a telescopic body and a built-in flexible rod assembly;
the shell is fixed on the second substrate, the telescopic body is embedded in the shell, and the end face of the telescopic body is fixed on the third substrate;
the built-in flexible rod component is respectively connected with the shell and the telescopic body.
Further, the built-in flexible rod assembly includes: the swing steel piece, the first built-in connecting rod and the second built-in connecting rod are arranged in the swing steel piece;
two ends of the first built-in connecting rod are respectively connected with the swing rigid piece and the telescopic body;
and two ends of the second built-in connecting rod are respectively connected with the swinging rigid piece and the shell.
One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:
according to the micro-motion optical platform provided by the embodiment of the application, a micro-motion optical platform with complete functions based on a flexible mechanism is constructed by a first substrate, a second substrate, a third substrate, a three-jaw flexible hinge, a first linear driver, a two-degree-of-freedom flexible hinge, a second linear driver, a translational flexible hinge, a third linear driver and a fourth linear driver; it is worth explaining that the three-jaw flexible hinge, the two-degree-of-freedom flexible hinge and the translational flexible hinge can assist in forming smooth and flexible coordinated actions, and meanwhile, the use amount of a lubricating medium can be greatly reduced, so that the flowing and volatilization of the lubricating medium are greatly reduced to influence the cleanliness of an optical device; meanwhile, the flexible part also avoids dust caused by action abrasion of the rigid structural part from influencing the cleanness of the optical device; meanwhile, the overall structural volume and weight are greatly reduced.
Drawings
FIG. 1 is a schematic structural diagram of a micro-motion optical stage according to an embodiment of the present invention;
FIG. 2 is a front elevation view of a micro-motion optical stage according to an embodiment of the present invention;
FIG. 3 is a left side view of FIG. 2;
FIG. 4 is a top view of FIG. 2;
fig. 5 is a schematic structural diagram of a translational flexible hinge according to an embodiment of the present invention.
Detailed Description
The embodiment of the application provides a micro-motion optical platform, and solves the technical problems that in the prior art, the lubricating medium of the micro-motion optical platform flows and volatilizes, dust and dust are abraded to pollute and destroy a high-cleanliness optical environment and a precise optical device.
In order to better understand the technical solutions, the technical solutions will be described in detail below with reference to the drawings and the specific embodiments of the specification, and it should be understood that the embodiments and specific features of the embodiments of the present invention are detailed descriptions of the technical solutions of the present application, and are not limitations of the technical solutions of the present application, and the technical features of the embodiments and examples of the present application may be combined with each other without conflict.
Referring to fig. 1 and 3, a micro-motion optical platform, comprising: the device comprises a first substrate 1, a second substrate 5, a third substrate 8, a three-jaw flexible hinge 2, a first linear actuator 3, a two-degree-of-freedom flexible hinge 4, a second linear actuator 6, a translation flexible hinge 7, a third linear actuator 9 and a fourth linear actuator 10.
This will be explained in detail below.
The first substrate 1, the second substrate 5 and the third substrate 8 are arranged in parallel in the thickness direction to form a three-layer layout structure, which is used as a mounting platform and an action bracket of other structural members.
The claw end part and the base of the three-claw flexible hinge 2 are respectively fixed on the first substrate 1 and the second substrate 5, the first linear driver 3 is fixed on the first substrate 1, and the telescopic end part of the first linear driver 3 is fixed on the second substrate 5 through the two-degree-of-freedom flexible hinge 4; generally, the first substrate 1 is formed with a through hole through which the operation portion of the first linear actuator 3 extends and contracts.
Referring to fig. 4, in the present embodiment, the number of the first linear actuators 3 and the number of the two-degree-of-freedom flexible hinges 4 are two, and the two first linear actuators 3 are symmetrically arranged about the central axis of the third base plate 8.
Referring to fig. 2, the third substrate 8 includes: an outer frame plate 82, an optical element mounting plate 83, and an external flexible rod assembly 81; the optical element mounting plate 83 is embedded in the outer frame plate 82, and the edge of the optical element mounting plate 83 is connected with the outer frame plate 82 through a plurality of external flexible rod assemblies 81; that is, the optical element mounting board 83 is attached inside the outer frame plate 82 by a flexible structure.
The second linear actuator 6 is fixed on the second substrate 5, and the telescopic end of the second linear actuator 6 is connected with the optical element mounting plate 83; in this embodiment, the second substrate 5 is also provided with a through hole and located at the geometric center, and the actuating portion of the second linear actuator 6 passes through the through hole to actuate.
Two ends of the translational flexible hinge 7 are respectively connected with the second substrate 5 and the outer frame plate 82, the third linear driver 9 and the fourth linear driver 10 are respectively fixed on the outer frame plate 82, and the telescopic end of the third linear driver 9 and the telescopic end of the fourth linear driver 10 are respectively abutted against the external flexible rod assembly 81; wherein the action directions of the third linear actuator 9 and the fourth linear actuator 10 are perpendicular to each other.
In this embodiment, the number of the translational flexible hinges 7 is four, and the four translational flexible hinges 7 are uniformly distributed on the outer frame plate 82 and may be disposed in four corner regions of the outer frame plate 82.
With reference to fig. 5, the translational flexible hinge 7 comprises: an outer shell 71, a telescopic body 72 and an internally disposed flexible rod assembly 73; the housing 71 is fixed on the second substrate 5, the telescopic body 72 is embedded in the housing 71, and an end face of the telescopic body 72 is fixed on the third substrate 5; the built-in flexible rod assembly 73 is connected to the housing 71 and the telescopic body 72, respectively.
Specifically, the built-in flexible rod assembly 73 includes: a swinging rigid member 731, a first built-in link 732, and a second built-in link 733; both ends of the first built-in connecting rod 732 are respectively connected with the swinging rigid part 731 and the telescopic body 72; two ends of the second built-in connecting rod 733 are respectively connected with the swinging rigid part 731 and the shell 71.
Further, the number of the third linear actuators 9 and the number of the fourth linear actuators 10 are both two; the telescopic strokes of the two third linear drivers 9 are positioned on the same straight line, and the two third linear drivers 9 are symmetrically arranged on two sides of the optical element mounting plate 83; the telescopic strokes of the two fourth linear actuators 10 are located on the same straight line, and the two fourth linear actuators 10 are symmetrically arranged on two sides of the optical element mounting plate 83.
Correspondingly, the number of the external flexible connecting rod assemblies 81 is four, and the external flexible connecting rod assemblies are respectively in one-to-one correspondence with the two third linear drivers 9 and the two fourth linear drivers 10.
Referring to fig. 2, in the present embodiment, the external flexible rod assembly 81 includes: a primary flexible rod assembly 811 and a secondary flexible rod assembly 812; the edge of the optical element mounting plate 83 is connected to the inner frame edge of the outer frame plate 82 through the primary flexible rod assembly 811 and the secondary flexible rod assembly 812 respectively; the primary flexible rod assembly 811 is also connected to a secondary flexible rod assembly 812.
Specifically, the primary flexible rod assembly 811 includes: a first support bar 8111, a primary flexible bar 8112, and a second support bar 8113; the secondary flexible rod assembly 812 includes: a third support bar 8121, a secondary flexible bar 8122, and a fourth support bar 8123; the two ends of the first supporting rod 8111 are respectively connected with the inner frame edge of the outer frame plate 82 and the first-stage flexible rod 8112, the two ends of the second supporting rod 8113 are respectively connected with the first-stage flexible rod 8112 and the second-stage flexible rod 8122, the two ends of the third supporting rod 8121 are respectively connected with the inner frame edge of the outer frame plate 82 and the second-stage flexible rod 8122, and the two ends of the fourth supporting rod 8123 are respectively connected with the second-stage flexible rod 8122 and the edge of the optical element mounting plate 83.
The operation will be described in detail below.
To realize the optical element mounting plate 83 at RXAnd RYAnd (3) operation of directional micro-motion rotary motion.
The expansion and contraction of the output ends of the two groups of first linear drivers 3 on the first substrate 1 are controlled; the specific operation is that two groups of first linear drivers 3 are simultaneously stretched, the first linear drivers 3 are stretched to enable the two-degree-of-freedom flexible hinge 4 to generate flexible deformation, the second substrate 5 and other components are driven to rotate along the X axis, and meanwhile, the three-jaw flexible hinge 2 is enabled to generate deformation and motion constraint on the rotation of the second substrate 5 along the X axis; similarly, when one of the first linear actuators 3 extends and the other of the first linear actuators 3 retracts or locks, the two-degree-of-freedom flexible hinge 4 is flexibly deformed to drive the second substrate 5 and other components to rotate along the Y-axis, and the three-jaw flexible hinge 2 is deformed and restricts the movement of the second substrate 5 to rotate along the Y-axis.
The operation of the optical element mounting plate 83 for the fine translational movement in the DZ direction is realized.
The expansion and contraction of the output ends of the two groups of second linear drivers 6 on the second substrate 5 are controlled; specifically, the second linear driver 6 is driven to extend and retract, the second linear driver 6 pushes the third substrate 8 to move, and simultaneously drives the telescopic body 72 in the translational flexible hinge 7 fixedly connected with the third substrate 8 to perform axial translational movement, the translational movement of the telescopic body 72 causes the first built-in connecting rod 732 in the built-in flexible rod assembly 73 to deform, and then the acting force is transmitted to the second built-in connecting rod 733 through the swinging rigid piece 731, so that the second built-in connecting rod 733 is flexibly deformed at the same time, and the reaction force of the deformation generated by the first built-in connecting rod 732 and the second built-in connecting rod 733 generates closed-loop type motion constraint on the movement of the telescopic body 72 and the third substrate 8.
Implementation of the optical element mounting plate 83 at DXAnd the operation of micromotion translational motion in the Dy direction.
Controlling the expansion and contraction of the output ends of the third linear driver 9 and the fourth linear driver 10; specifically, when the optical element mounting plate 83 needs to perform Dy translation, the output ends of the two symmetrically arranged third drivers 9 synchronously perform motions in opposite directions, that is, one of the three drivers extends and retracts, the stroke of the other one of the three drivers retracts to be consistent, the output end of the extended third driver 9 pushes the primary flexible rod 8112 in the external flexible rod assembly 81, the primary flexible rod generates 8112 flexible deformation, and transmits an acting force to the secondary flexible rod 8122 through the first supporting rod 8111 and the second supporting rod 8113, and the secondary flexible rod 8122 also generates flexible deformation and transmits the acting force to the optical element mounting plate 83 through the third supporting rod 8121 and the fourth supporting rod 8123; at the same time, the same retraction stroke of the output end of the other third linear actuator 9 reserves a deformation space for the flexible deformation process and guides the deformation direction.
Similarly, when the Dx translation of the optical element mounting plate 83 is required, the output ends of the two fourth drivers 10 arranged symmetrically are synchronously moved in opposite directions, namely, the strokes of one telescopic actuator and the other two retractable actuators are kept consistent, the output end of the extended third actuator 9 pushes the primary flexible rod 8112 in the external flexible rod assembly 81, the primary flexible rod 8112 is flexibly deformed, and the acting force is transmitted to the secondary flexible rod 8122 through the first supporting rod 8111 and the second supporting rod 8113, the secondary flexible rod 8122 also generates flexible deformation, and transmits the force to the optical element mounting plate 83 through the third support bar 8121 and the fourth support bar 8123, at the same time, the output end of the other fourth linear actuator 10 retracts by the same stroke, so as to reserve a deformation space for the flexible deformation process and guide the deformation direction.
One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:
according to the micro-motion optical platform provided by the embodiment of the application, a micro-motion optical platform with complete functions based on a flexible mechanism is constructed by a first substrate, a second substrate, a third substrate, a three-jaw flexible hinge, a first linear driver, a two-degree-of-freedom flexible hinge, a second linear driver, a translational flexible hinge, a third linear driver and a fourth linear driver; it is worth explaining that the three-jaw flexible hinge, the two-degree-of-freedom flexible hinge and the translational flexible hinge can assist in forming smooth and flexible coordinated actions, and meanwhile, the use amount of a lubricating medium can be greatly reduced, so that the flowing and volatilization of the lubricating medium are greatly reduced to influence the cleanliness of an optical device; meanwhile, the flexible part also avoids dust caused by action abrasion of the rigid structural part from influencing the cleanness of the optical device; meanwhile, the overall structural volume and weight are greatly reduced.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to examples, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the claims of the present invention.
Claims (7)
1. A micro-motion optical stage, comprising: the flexible hinge comprises a first substrate, a second substrate, a third substrate, a three-jaw flexible hinge, a first linear driver, a two-degree-of-freedom flexible hinge, a second linear driver, a translational flexible hinge, a third linear driver and a fourth linear driver;
the first substrate, the second substrate, and the third substrate are arranged in parallel in a thickness direction;
the claw end part and the base of the three-claw flexible hinge are respectively fixed on the first substrate and the second substrate, the first linear driver is fixed on the first substrate, and the telescopic end part of the first linear driver is fixed on the second substrate through the two-degree-of-freedom flexible hinge;
the third substrate includes: the optical element mounting device comprises an outer frame plate, an optical element mounting plate and an external flexible rod assembly;
the optical element mounting plate is embedded in the outer frame plate, and the edge of the optical element mounting plate is connected with the outer frame plate through a plurality of external flexible rod components;
the second linear driver is fixed on the second substrate, and the telescopic end part of the second linear driver is connected with the optical element mounting plate;
two ends of the translational flexible hinge are respectively connected with the second substrate and the outer frame plate, the third linear driver and the fourth linear driver are respectively fixed on the outer frame plate, and the telescopic end part of the third linear driver and the telescopic end part of the fourth linear driver are respectively abutted against the external flexible rod assembly;
the action directions of the third linear driver and the fourth linear driver are mutually vertical;
the number of the first linear drivers and the number of the two-degree-of-freedom flexible hinges are two, and the two first linear drivers are symmetrically arranged about a central axis of the optical element mounting plate;
the telescopic end part of the second linear driver is fixed at the geometric center of the second substrate;
the number of the third linear drivers and the number of the fourth linear drivers are both two;
the telescopic strokes of the two third linear drivers are positioned on the same straight line, and the two third linear drivers are symmetrically arranged on two sides of the optical element mounting plate;
the telescopic strokes of the two fourth linear drivers are positioned on the same straight line, and the two third linear drivers are symmetrically arranged on two sides of the optical element mounting plate.
2. The micro-motion optical platform of claim 1, wherein the number of the translational flexible hinges is four, and the four translational flexible hinges are uniformly distributed on the outer frame plate.
3. The micro-motion optical platform of claim 1, wherein the number of the external flexible link assemblies is four and corresponds to two of the third linear drivers and two of the fourth linear drivers one-to-one.
4. The micro-motion optical platform of claim 1, wherein the external flexible rod assembly comprises: a primary flexible rod assembly and a secondary flexible rod assembly;
the edge of the optical element mounting plate is respectively connected with the edge of the inner frame of the outer frame plate through the primary flexible rod component and the secondary flexible rod component;
the primary flexible rod component is also connected with the secondary flexible rod component.
5. The micro-motion optical platform of claim 4, wherein the primary flexible rod assembly comprises: the first support rod, the primary flexible rod and the second support rod;
the secondary flexible rod assembly comprises: a third support rod, a secondary flexible rod and a fourth support rod;
the two ends of the first supporting rod are respectively connected with the inner frame edge of the outer frame plate and the first-stage flexible rod, the two ends of the second supporting rod are respectively connected with the first-stage flexible rod and the second-stage flexible rod, the two ends of the third supporting rod are respectively connected with the inner frame edge of the outer frame plate and the second-stage flexible rod, and the two ends of the fourth supporting rod are respectively connected with the second-stage flexible rod and the edge of the optical element mounting plate.
6. The micro-motion optical platform of claim 1, wherein the translational flexible hinge comprises: the telescopic rod assembly comprises a shell, a telescopic body and a built-in flexible rod assembly;
the shell is fixed on the second substrate, the telescopic body is embedded in the shell, and the end face of the telescopic body is fixed on the third substrate;
the built-in flexible rod component is respectively connected with the shell and the telescopic body.
7. The micro-motion optical platform of claim 6, wherein the built-in flexible rod assembly comprises: the swing steel piece, the first built-in connecting rod and the second built-in connecting rod are arranged in the swing steel piece;
two ends of the first built-in connecting rod are respectively connected with the swing rigid piece and the telescopic body;
and two ends of the second built-in connecting rod are respectively connected with the swinging rigid piece and the shell.
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