KR101705154B1 - Flexure hinge-based fine stage for vertical planar 3-DOF motion with high load capacity - Google Patents

Flexure hinge-based fine stage for vertical planar 3-DOF motion with high load capacity Download PDF

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Publication number
KR101705154B1
KR101705154B1 KR1020150153748A KR20150153748A KR101705154B1 KR 101705154 B1 KR101705154 B1 KR 101705154B1 KR 1020150153748 A KR1020150153748 A KR 1020150153748A KR 20150153748 A KR20150153748 A KR 20150153748A KR 101705154 B1 KR101705154 B1 KR 101705154B1
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South Korea
Prior art keywords
platform
load
elastic hinge
link
moving
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KR1020150153748A
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Korean (ko)
Inventor
최기봉
이재종
김기홍
임형준
권순근
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한국기계연구원
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

It is an object of the present invention to provide a method of moving a stage platform arranged in a vertical plane form using a resilient hinge mechanism and a driver of a translational-translational-rotation (PPR) structure, with a compensating counterbalance on the platform And a load acting on the elastic hinge can be reduced. The present invention provides an elastic hinge-based vertical plane fine driving stage for a heavy load.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a flexible hinge-based fine stage for vertical load,

The present invention relates to an elastic hinge-based vertical plane fine driving stage for a heavy load, and more particularly, to a vertical plane fine driving stage for a heavy load, To a high-load, elastic-hinge-based vertical plane microdriving stage.

BACKGROUND ART [0002] In recent years, a stage device for moving an object three-dimensionally has been widely used in various fields. Especially in high-tech industrial fields such as a semiconductor field and a bio field, it is necessary to use a microdrive stage having high precision. It is a matter of course that such a fine driving stage requires precision, miniaturization, light weight, and the like.

As described above, in the fine driving stage in which precision is required, a driving device using a piezoelectric element is generally used as the driving device. A piezoelectric element is a device that has a piezoelectric effect that generates a voltage when a mechanical pressure is applied and a mechanical deformation when a voltage is applied thereto. The piezoelectric element has fast response and high resolution and is widely used as a precision driver.

On the other hand, the flexure hinge means that the elastic modulus in one direction is formed to be relatively larger than the elastic modulus in the other direction by using the structural shape, and as a result, the movement with the greater elastic modulus is limited, And a structure capable of moving only with a small coefficient. Such an elastic hinge-based mechanism is capable of moving to a high precision so as to have a resolution of nanometer scale, and is widely used as a component of a fine driving stage in addition to the above-described piezoelectric element.

Various techniques for a fine driving stage using a piezoelectric element and an elastic hinge mechanism are disclosed. Korean Patent Laid-Open Publication No. 2013-004613 ("Flexible Hinge-Based Piezoelectric Driving Stage of Multi-Layered Structure ", 2013.01.14, hereinafter referred to as Prior Art 1), Korean Patent Publication No. 2011-0087418 .03, hereinafter referred to as Prior Art 2), various configurations of a nano-scale precision stage using a piezoelectric element and an elastic hinge-based mechanism are shown. Such an elastic hinge-based mechanism has a great advantage in that it can guide very precise movement in a small area as well described in the prior art document 1 and the like. However, as mentioned in the preceding document 2, there is a problem that the driving range is limited due to a short travel distance, and a structure improvement such as an additional amplification mechanism is being studied in order to compensate the driving range.

Another problem of the elastic hinge-based mechanism is that, when a large load is applied, an excessive stress acts on the elastic hinge, resulting in damage or incorrect operation of the device. In particular, in the case of the vertical stage, since the stage load is concentrated on the elastic hinge portion by gravity, design deformation that increases the thickness of the hinge is inevitably required to prevent breakage. However, when the thickness of the hinge is increased, the magnitude of force to be applied for deformation of the hinge portion increases. That is, as the thickness of the hinge increases, the deformation becomes difficult and the small displacement is caused. As a result, There is a growing problem.

However, in the case of the conventional stage, there is a limitation in improving the accuracy due to the friction and clearance by the contact type guide. As described above, in the case of the stage including the elastic hinge-based mechanism, It is preferred because of its high accuracy. Accordingly, in the elastic hinge-based mechanism applied to the fine driving stage, as described above, there is a growing demand for a structure that can withstand higher loads than ever.

1. Korean Patent Laid-Open Publication No. 2013-004613 ("Flexible Hinge-Based Piezoelectric Driving Stage of Multilayer Structure ", 2013.01.14) 2. Korean Patent Publication No. 2011-0087418 ("Stage using flexible hinge mechanism ", 2011.08.03)

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a stage platform arranged in a vertical plane, In which the load acting on the elastic hinge can be reduced by providing a counterbalance for compensating for the platform on the platform.

According to an aspect of the present invention, there is provided an elastic hinge-based vertical plane microdrive stage for heavy load including a translating-translating elastic hinge mechanism for connecting a fixed end and a movable end, and a driving unit for applying motion At least three drivers (100) formed to be movable in three directions; A platform 500 which is supported by the actuators 100 and is movable in three directions and is formed in a vertical plane shape; At least one reverse balancing load 550 having a total weight equal to the weight of the platform 500 and connected to the platform 500 to balance the platform 500 about any fixed point; And a moving end of the actuator 100 is connected to the platform 500 so that a motion applied by the driving unit is transmitted to the platform 500 through the translational- So that the load imposed on the translational elastic hinge or the rotational elastic hinge in the driver 100 can be reduced by the counter balance load 550.

In this case, when one of the counterbalanced balances 550 is provided and the gravity direction is referred to as a lower side, the counterbalancing load 550 and the platform (500) are connected to each other.

Or the reverse balancing load 550. The first link 551 has one end hinged to the platform 500 when the gravity direction is the lower side and the first link 551 has one end hinged to the platform 500, A second link 552 that is hinged to the other end and is fixedly coupled to the counter balance load 550 at one end, and a second link 552 that is hinged to an arbitrary fixed point formed at the upper or lower side, The counterbalance load 550 and the platform 500 are connected to each other by a connecting portion 555 including a third link 553 hinged to the platform 552, And may be arranged symmetrically with respect to the center line 550.

Or the reverse balancing load 550. The first link 551 has one end hinged to the platform 500 when the gravity direction is the lower side and the first link 551 has one end hinged to the platform 500, A second link 552 that is hinged to the other end and is fixedly coupled to the counter balance load 550 at one end, and a second link 552 that is hinged to an arbitrary fixed point formed at the upper or lower side, The counterbalance load 550 and the platform 500 are connected to each other by a connecting portion 555 including a third link 553 hinged to the platform 552, And may be disposed vertically and horizontally symmetrically with respect to the center line 550.

In this case, the hinge connection included in the connection portion 555 may be a rotary elastic hinge.

The driving unit 100 includes a support 110 fixedly supported at an arbitrary fixed point, a first direction movement part 121 connected to the support part 110 by a translational elastic hinge so as to be movable only in a first direction, ), A second direction moving part (122) connected by a translational elastic hinge so as to be movable only in a second direction which is a direction perpendicular to the first direction with respect to the first direction moving part (121), a second direction moving part And a rotary movement part (123) provided on the movement part (122) and connected by a rotary elastic hinge so as to be rotatable about an axial direction perpendicular to a plane formed by the first direction and the second direction A driving unit 130 connected to the moving unit 120 for applying at least one selected movement from the moving unit 120 to the first direction translational motion, the second direction translational motion, ).

In this case, the actuator 100 is formed in a plane parallel to the plane formed by the first direction and the second direction, and has a rectangular shape with a rectangular cavity formed therein, A one-way moving part 121 is formed on a plane formed by the supporting part 110 and has a rectangular shape with a rectangular cavity formed therein, and is disposed in a cavity formed inside the supporting part 110, And the second direction moving part 122 is formed on a plane formed by the supporting part 110 and the first direction moving part 121 and is formed in a circular shape The first direction is disposed in a cavity formed in the inside of the first portion 121 and the first direction is transversely resiliently hinged to the first portion 121, The second direction moving part 122, And may be configured to be rotationally resiliently hinged to the second directional movement portion 122. In this case,

Also, the driving unit 130 may be at least one selected from a piezo actuator, a voice coil motor, and a linear motor.

Also, the stage may be configured to be driven such that the moving range is in the range of several / 10 to several mm.

The stage may also be configured to be driven such that the load range is in the range of several to several hundred kilograms.

According to the present invention, in a fine moving stage moved by an elastic hinge-based actuator including an elastic hinge mechanism, a load acting on the elastic hinge is increased by providing a counterbalance for compensating the stage platform There is an effect that it can be reduced. More specifically, in the present invention, since the platform of the stage is balanced with the counterbalance load for compensation, the relative load of the platform is ideally zero, and in fact, do. That is, the magnitude of the load on the elastic hinge connecting the platform and the actuator is ideally zero, in fact very small.

According to the present invention, since a very small load is applied to the elastic hinge connecting the platform and the actuator, there is no problem even if the weight of the platform is much larger than the conventional one. In other words, the present invention solves the problem that the usable weight is limited due to the restriction due to the structural rigidity of the elastic hinge itself in the micro-driving stage, and it is a remarkable technique that can drive a high- It is effective. More specifically, according to the present invention, since the total load limit of the object and the platform is about ten kilograms due to the breakage problem of the elastic hinge, the fine hinge drive using the elastic hinge- There is a big effect.

1 shows a basic structure of an elastic hinge.
Figure 2 is an illustration of a translational-translational-rotation (PPR) elastic hinge mechanism.
Figure 3 is an embodiment of a driver used in the stage of the present invention.
FIG. 4 is a first embodiment of a counterbalance load installation method for compensating for the stage platform of the present invention.
5 is a second embodiment of a counterbalance load installation method for compensation provided in the stage platform of the present invention.
FIG. 6 is a third embodiment of a counter balance load setting method for compensation provided in the stage platform of the present invention.
7 is an embodiment of a stage of the present invention.

Hereinafter, an elastic hinge-based vertical plane fine driving stage according to the present invention having the above-described structure will be described in detail with reference to the accompanying drawings.

First, the elastic hinge will be briefly described with reference to FIG. The elastic hinge is also referred to as a flexure. The elastic hinge is a flexible material having a shape such that the elastic modulus in one direction is relatively larger than the elastic modulus in the other direction in an object made of a material such as a metal material, . When an external force is applied to such a structure, little movement occurs on the side having a large elastic modulus, and only a movement toward a side having a small elastic modulus occurs. As a result, movement in any one direction You will be able to guide.

The simplest method of making the shape of the structure capable of performing such an elastic hinge is to make the thickness of one side of the structure thinner than the other directions. Of course, the force exerted on such an elastic hinge should be limited to such a range that the elastic deformation occurs at the portion where the thickness is thinly formed. If plastic deformation occurs due to too large a force applied to a thin-walled portion, the elastic hinge will be damaged, and it will not be able to play the role of limitation and guidance as described above.

An example of the simplest elastic hinge is shown in Fig. 1 (A). As shown in Fig. 1 (A), a body S extending long in the lateral direction (with reference to the drawing) has a portion S having a very thin thickness in the vertical direction at a position deviated to the left. In this case, the left end is a fixed end, and the right end is a moving end. Therefore, when a force is applied to the structure of FIG. 1 (A), deformation occurs only at the portion where the thickness is extremely thin, that is, the S portion. Therefore, as shown by a dotted line in FIG. 1 (A) Thereby rotating and moving. At this time, if the force applied to the body is within the elastic deformation range of the material of the body, the movable end is elastically deformed to rotate around the S portion, and when the applied force is lost, the movable end returns to the original position .

Figure 1 (B) shows a simple example of a 4-link mechanism for translational motion. The four-bar linkage is the most basic form of instrumentation in the field of kinematics. In the case of a three-bar link, the shape of a triangle that can be composed of three links is fixed as one triangle because it is a single one, whereas in the case of a four-bar link, , And if each link is connected to a rotating joint, it becomes a mechanism capable of implementing various movements. Also, the four-bar linkage is the simplest type of linkage mechanism that can be moved in this way, so it is easy to analyze the movement and is the most basic mechanism in the field of kinematics. In the four-bar linkage mechanism, it is possible to realize numerous movements depending on how to determine the four link lengths, the fixed link and the moving point, and of course, to realize a simple movement such as rotational movement or translational movement It is easy to do. Fig. 1 (B) shows a simple example of implementing up-and-down translational movement (with reference to Fig. 1 (B)) using such a four-bar linkage.

Fig. 1 (C) shows an example in which an elastic hinge is applied to a four-bar linkage implementing this translational motion. The left side view of FIG. 1 (C) shows a case where the rotating joint part of the four-bar link mechanism as shown in FIG. 1 (B) is formed as shown in part S of FIG. 1 (A) It is the same mechanism as the mechanism of (B). The right side view of Fig. 1 (C) shows two links connecting the fixed end link and the movable end link (up and down moving link) of Fig. 1 (B) and the rotating joints located at both ends of the link And is replaced with elongated elastic hinges in the form of a thin plate. As a result, it is possible to realize the same upward and downward translational motion as the mechanisms shown in the left drawing of Figs. 1 (B) and 1 (C).

1 (D) is a top view of C-flex, which is a rotary elastic hinge product currently commercialized and widely used. The C-flex is formed in a cylindrical pipe shape extending vertically in its entirety, and is formed in a shape in which the middle of the pipe is cut off, and includes a thin plate crossing the upper body and a thin plate crossing the lower body with respect to the cut- (And therefore, the thin plate as seen in FIG. 1 (D) appears to be arranged in a cross shape on the upper surface). One of the upper body and the lower body is a fixed end and the other is a moving end. When a force is applied to the rotary elastic hinge, the movable end moves only in the direction of rotating about the axis of the cylindrical pipe. That is, by using the elastic hinge of the type shown in Fig. 1 (D), the movement of the movable end can be restricted only in the rotating direction.

Hereinafter, a structural example of the elastic hinge mechanism used in the stage of the present invention and an embodiment of the actuator will be described with reference to FIGS. 2 and 3. FIG. First, a stage to be driven in the present invention is formed in a planar shape in which a stage platform on which an object is placed stands in a vertical plane, that is, a plane perpendicular to the ground plane. In the vertical plane in which the platform is included, The axis translation direction, and the? Axis rotation direction.

Figure 2 shows an example of a translational-translational-rotation (PPR) elastic hinge mechanism. The elastic hinge mechanism shown in Fig. 2 includes a first part, which is spaced apart from the fixed end in the x-axis direction, a second part that is spaced apart from the first part in the y- A second part, and a third part, which rotates with respect to the second part, are sequentially connected to each other, the end of the first part forms a fixed end, the end of the third part moves Thereby forming an end. More specifically, it is as follows.

The first part is spaced apart in the x-axis direction with respect to the fixed end, and the fixed end and the first part are connected by a long elastic hinge pair that implements translational motion as shown in the right-hand side of Fig. 1 (C). Thus, the first part is translationally limited and guided only in the y-axis direction with respect to the fixed end.

The second part is spaced apart in the y-axis direction with respect to the first part, and the first part and the second part are also connected by a long elastic hinge pair that implements translational motion as shown in the right-hand side of Fig. 1 (C) . Thus, the second part is translated and guided only in the x-axis direction with respect to the first part.

The third part extends in the x-axis direction, the left end forms a fixed end (relative to the second part), and the right end forms a moving end. Also, the left end of the third part is connected to the second part, and is connected by a rotational elastic hinge as shown in FIG. 1 (B). Therefore, the right end (moving end) of the third part is limited and guided only in the? -Axis direction around the left end (fixed end) connected to the second part.

As the first to third parts are connected to each other by the PPR elastic hinge, the moving end of the elastic hinge mechanism composed of the first to third parts is moved in the x-axis direction translation, the y- Direction rotational motion can be realized. In this case, since the x-axis direction, the y-axis direction, and the? -Axis direction are not absolute directions, in order to more generalize the above-described translational-translational-rotational motion, a first direction translational motion (a direction perpendicular to the first direction) (In the axial direction perpendicular to the plane formed by the first direction and the second direction) center-to-center rotational motion in the second direction.

FIG. 3 is an embodiment of a driving device used in the stage of the present invention. The supporting part 110 includes a support 110 forming a fixed end, a first direction translation / second direction translation / And a driving unit 130 connected to the moving unit 120 and generating a motion by applying a force to the moving unit 120.

The supporting portion 110 is fixedly supported at an arbitrary fixed point, and the fixed end of the elastic hinge mechanism of FIG. 2 can be regarded as the supporting portion 110.

The moving part 120 includes a first direction moving part 121 connected to the supporting part 110 by a translational elastic hinge so as to be movable only in a first direction, A second direction moving portion 122 which is connected by a translational elastic hinge so as to be movable only in a second direction which is a direction perpendicular to the first direction and a second direction moving portion 122 which is provided on the second direction moving portion 122, And a rotary movement part 123 connected by a rotary elastic hinge so as to be rotatable about an axial direction perpendicular to the plane formed by the second direction. In the case of the elastic hinge mechanism of FIG. 2, the first part is regarded as the first moving part 121, the second part is regarded as the second moving part 122, and the third part is regarded as the rotating moving part 123 .

The driving unit 130 is connected to the moving unit 120 to apply at least one motion selected from among the first direction translational motion, the second direction translational motion, and the axial center rotational motion of the moving unit 120. For example, a piezoelectric actuator including a piezoelectric element and a voice coil motor or a linear motor capable of realizing a precise movement may be employed as the driving unit 130. For example, Any actuator may be employed as long as it is an actuator capable of performing precise motion as necessary.

The structure of the actuator 100 shown in FIG. 3 is designed such that the support portion 110 and the moving portion 120 are more stable than the simple structure shown in FIG. This will be described in more detail as follows.

3, the supporting part 110 is formed on a plane parallel to the plane formed by the first direction and the second direction, and has a rectangular shape with a rectangular cavity formed therein. Is disposed in the rectangular cavity of the support portion 110. [

2, the moving part 120 includes a first moving part 121, a second moving part 122, and a rotating moving part 123, and the respective parts will be described below in order. Respectively. The first directional moving part 121 is formed on a plane formed by the supporting part 110 and has a rectangular shape with a rectangular cavity formed therein. The rectangular moving part 121 is disposed in a cavity formed inside the supporting part 110 And is elastically hinged to the support portion 110 by a translational elastic force. The second direction moving part 122 is formed on a plane formed by the supporting part 110 and the first direction moving part 121 and has a rectangular shape with a circular cavity at the center, The first direction is disposed in the cavity formed in the inner portion 121, and the first direction is translationally resiliently hinged to the outer portion 121. Finally, the rotary movement part 123 is disposed in the cavity formed inside the second direction movement part 122, and is rotationally resiliently hinged to the second direction movement part 122. 3, the rotation unit 123 extends in the y-axis direction. However, when the rotation unit 123 is extended in the x-axis direction or in the x-axis direction according to the direction of the motion range to be implemented, and extending in the diagonal direction between the y-axis and the like.

The fine driving stage of the present invention is driven by a driver 100 as described with reference to Fig. At this time, as described above, the elastic hinge can restrain and guide the movement only in a desired direction, and unlike the conventional contact type guide structure, there is no friction or clearance, so that the accuracy can be further improved. However, as can be seen from the example of FIG. 1, the elastic hinge necessarily has a portion where the thickness is relatively very thin. If too much force is applied to the elastic hinge, plastic deformation occurs outside the elastic deformation range, There is a danger of being able to. For this reason, in the case of the conventional fine driving stage including the elastic hinge, there is a considerable limitation on the operable load range. Specifically, in the case of the conventional fine driving stage, there is a limit that can bear only about 10 kg of load.

In order to solve this problem, the present invention proposes a structure in which a load imbalance is provided by providing an equilibrium load on the stage platform, thereby substantially reducing the stress applied to the elastic hinge of the actuator. That is, by using an inverse balancing load having the same total load as the platform, the influence of the gravity actually acting on the platform, that is, the load is ideally zero, in fact very small. When the actuators including the elastic hinge mechanism are connected to the platform provided with the counter balance load as described above (in the past, stress corresponding to the platform load has been applied to the elastic hinge portion), according to the present invention, Ideally zero, in fact only a very small magnitude of the load.

Figs. 4 to 6 are various embodiments of a scheme for installing an anti-balancing load that compensates the load of the platform in this way. Since the platform 500 is assumed to be a vertical plane, the gravity direction is commonly referred to as the lower side in the following embodiments.

FIG. 4 shows a first embodiment of a counterbalancing load installation method for compensation provided in the stage platform of the present invention. In the embodiment of FIG. 4, the counter balance load 550 is provided. At this time, the counter balance load 550 and the platform 500 are connected to each other by a pulley structure fixedly supported at an arbitrary fixing point formed on the upper side. In the first embodiment, the load of the counter balance load 550 is equal to the load W of the platform 500 as shown in FIG. Ideally, the platform 500 and the counterbalance load 550 are connected to both ends of the connecting rope that span the pulley and are pulled with the same tension, so that a load of 2W is applied to the upper fixed point supporting the pulley The connecting rope that straddles the pulley will not move.

Of course, in reality, the loads of different objects can not be formed exactly the same, so a minute weight difference will occur. However, even if there is such a slight difference in weight, the platform 500 and the counter balance load 550 can be balanced without stopping and being in a stopped state due to frictional resistance generated in the rotating shaft of the pulley.

In this state, when the actuator is connected to the platform 500 and driven, the load applied to the elastic hinge mechanism included in the actuator is ideally zero. Actually, the load on the platform 500 and the balance load 550 It becomes a minute size as much as one weight difference. Accordingly, even if the platform 500 is much heavier than the conventional one, it is possible to realize fine and precise movement without fear of damaging the elastic hinge mechanism.

5 and 6 below also follow the same principle in that the platform load is made zero by balancing using the counterbalanced load.

FIG. 5 shows a second embodiment of a counterbalancing load installation method for compensating for the stage platform of the present invention. In the embodiment of FIG. 5, two counter balance loads 550 are provided. Each of the counter balance loads 550 and the platform 500 are connected by a connection 555. The connecting portion 555 includes a first link 551 having one end hinged to the platform 500 and a second link 551 having one end hinged to the other end of the first link 551 and the other end hinged to the reverse balance load 550 A third link 553 hinged to one of the fixing points formed on the upper side or the lower side and hinged to the other end of the second link 552, . The two connecting portions 555 are arranged symmetrically with respect to the platform 550 so that a load W / 2 of 1/2 of the load W of the platform 500 It is possible to realize the balanced state as described above with the two counter balance loads 550. [

FIG. 6 is a third embodiment of a method for installing a counterbalance load for compensation provided in the stage platform of the present invention. In the embodiment of FIG. 6, four counter balance loads 550 are provided. In this case, each of the counterbalancing load 550 and the platform 500 is connected by a connecting portion 555, and the configuration of the connecting portion 555 is the same as that of the embodiment of FIG. In this case, since the number of the connection portions 555 is four, the connection portions 555 are disposed symmetrically about the platform 550 in the up, down, left, and right directions. Accordingly, in the third embodiment, the above-described balanced state can be realized with four inverse balancing loads 550 having a load (W / 4) of 1/4 of the load W of the platform 500.

In the second embodiment of FIG. 5 and the third embodiment of FIG. 6, the hinge coupling included in the connection portion 555 may be formed of a rotary elastic hinge. By doing so, the movement of the connecting portion 555 is restricted and guided, and it is possible to more easily control the movement from the standpoint of the designer.

FIG. 7 illustrates an embodiment of the stage of the present invention, employing a driver according to the actuator embodiment of FIG. 3 and a platform balance structure according to the third embodiment of the counterbalanced load installation method of FIG. It is needless to say that the present invention is not limited to this, and it is needless to say that the stage may be constituted by employing the above-described other embodiments, or a driver or a platform balance structure which is designed to be modified within a scope not departing from the technical idea of the present invention.

The micro-driving stage of the present invention includes at least three actuators (100) including elastic hinges and capable of moving in three directions, and movable in three directions supported by the actuators (100) (500) having a total weight equal to the weight of the platform (500) and being connected to the platform (500) to balance the platform (500) about any fixed point At least one reverse balancing load (550). As described above, in the fine driving stage of the present invention, the load imposed on the elastic hinge connecting the actuator 100 and the platform 500 by the counterbalancing load 550 is ideally zero, Is formed so as to reduce the load so as to be a very small size.

In FIG. 7, four actuators 100 are shown. Actually, three-axis motions of x-axis translation, y-axis translation, and θ-axis rotation are implemented. Only three drivers may be provided. However, in the example of FIG. 7, there are four symmetrical inverse balances for compensating the platform load, and four actuators are provided so as to form a balanced balance. In this case, the three-way motion described above can be implemented by only three drivers, and the other one can be driven as a dummy driver, and if necessary, further assisted.

On the other hand, in general, the fine driving stage is driven so that the moving range is in the range of several / 10 to several mm. In the fine driving stage of the present invention, the moving range of the platform 500 is also set as described above. On the other hand, in the conventional micro-driving stage, the load range of the platform 500 can only be up to about 10 kg due to the risk of damaging the elastic hinge as described above, while the micro-driving stage of the present invention has the above- Which can withstand much higher loads than conventional microdriving stages. Of course, it is easier to move the platform under deterioration by using the microdriving stage of the present invention. That is, the micro-driving stage of the present invention may be such that the drivable load range is in the range of several to several hundred kg.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

100: driver 110: support
120: moving part 121:
122: second direction moving part 123: rotational direction moving part
130:
500: platform 550: reverse balancing load
551: first link 552: second link
553: third link 555:

Claims (10)

At least three actuators formed to be movable in three directions, including a translating-translating-rotating elastic hinge mechanism for connecting between the fixed end and the movable end, and a driving unit for applying the motion;
A platform supported by the actuators and movable in three directions, the platform being formed in a vertical plane shape;
At least one reverse balancing load having a total weight equal to the weight of the platform and connected to the platform to balance the platform about any fixed point;
, ≪ / RTI >
And a moving end of the driving unit is connected to the platform so that a motion applied by the driving unit is transmitted to and applied to the platform through the translational-translational-elastic hinge mechanism,
And a load applied to the translational elastic hinge or the rotational elastic hinge in the driver is reduced by the counter balance load.
2. The method of claim 1,
1,
When the direction of gravity is referred to as the lower side,
By the pulley structure fixedly supported at an arbitrary fixed point formed on the upper side,
Wherein the balance load and the platform are connected to each other. ≪ Desc / Clms Page number 20 >
2. The method of claim 1,
2,
When the direction of gravity is referred to as the lower side,
A first link hinged to the platform at one end, a second link hinged at one end to the other end of the first link and the other end fixedly coupled to the counterbalance load, And a third link hinged to the point and hinged to the other end of the second link,
The counterbalance load and the platform are connected to each other,
Wherein the connecting portion is arranged symmetrically with respect to the platform.
2. The method of claim 1,
Four,
When the direction of gravity is referred to as the lower side,
A first link hinged to the platform at one end, a second link hinged at one end to the other end of the first link and the other end fixedly coupled to the counterbalance load, And a third link hinged to the point and hinged to the other end of the second link,
The counterbalance load and the platform are connected to each other,
Wherein the connecting portion is disposed vertically and horizontally symmetrically with respect to the platform.
5. The method according to any one of claims 3 and 4,
Wherein the hinge connection included in the connection portion comprises a rotary elastic hinge.
2. The apparatus of claim 1, wherein the driver
A support portion fixedly supported at an arbitrary fixed point,
A first direction moving portion connected to the support portion by a translational elastic hinge so as to be movable only in a first direction, and a second direction movable in only a second direction which is a direction perpendicular to the first direction with respect to the first direction moving portion A second direction moving part connected by a translational elastic hinge, a second direction moving part provided on the moving part, and being rotatable about an axial direction perpendicular to a plane formed by the first direction and the second direction, A moving part including a rotational moving part connected to the moving part,
And a driving unit connected to the moving unit to apply at least one motion selected from among the first direction translational motion, the second direction translational motion,
And a vertical plane micro-driving stage for a high-load elastic hinge-based vertical plane.
7. The apparatus of claim 6, wherein the driver
Wherein the support portion is formed on a plane parallel to the plane formed by the first direction and the second direction and is formed in a rectangular shape having a rectangular cavity therein,
Wherein the first direction moving part is formed on a plane formed by the supporting part and has a quadrangular shape with a quadrangular cavity formed therein, is disposed in a cavity formed inside the supporting part, and is elastically hinged to the supporting part by a translational elastic hinge ,
Wherein the second direction moving part is formed on a plane formed by the supporting part and the first direction moving part and is formed in a rectangular shape having a circular cavity at the center thereof, And the first direction is translationally and elastically hingedly coupled with the east portion,
Wherein the rotary movement portion is disposed in a cavity formed in the second direction moving portion inside the moving portion, and the second direction is rotationally resiliently hinged to the moving portion.
7. The apparatus of claim 6, wherein the driving unit
A piezoelectric actuator, a piezoelectric actuator, a voice coil motor, and a linear motor.
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KR1020150153748A 2015-11-03 2015-11-03 Flexure hinge-based fine stage for vertical planar 3-DOF motion with high load capacity KR101705154B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108297073A (en) * 2018-03-12 2018-07-20 中南大学 Six degree of freedom connection in series-parallel combination drive motion platform applied to optoelectronic packaging
CN114992453A (en) * 2022-06-07 2022-09-02 重庆大学 Controllable plane high-precision flexible displacement platform with high load and large stroke

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006322714A (en) * 2005-05-17 2006-11-30 Shimadzu Corp Motion stage
JP2009052985A (en) * 2007-08-24 2009-03-12 Akita Prefecture Positioning mechanism
KR20110087418A (en) 2010-01-26 2011-08-03 나노스코프시스템즈 (주) A stage using flexure hinge module
KR20130004613A (en) 2011-06-30 2013-01-14 한국기계연구원 Piezo-driven stage based on flexure hinges with multi-layer structure
JP6016980B2 (en) * 2015-05-18 2016-10-26 株式会社ユニバーサルエンターテインメント Game machine

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006322714A (en) * 2005-05-17 2006-11-30 Shimadzu Corp Motion stage
JP2009052985A (en) * 2007-08-24 2009-03-12 Akita Prefecture Positioning mechanism
KR20110087418A (en) 2010-01-26 2011-08-03 나노스코프시스템즈 (주) A stage using flexure hinge module
KR20130004613A (en) 2011-06-30 2013-01-14 한국기계연구원 Piezo-driven stage based on flexure hinges with multi-layer structure
JP6016980B2 (en) * 2015-05-18 2016-10-26 株式会社ユニバーサルエンターテインメント Game machine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108297073A (en) * 2018-03-12 2018-07-20 中南大学 Six degree of freedom connection in series-parallel combination drive motion platform applied to optoelectronic packaging
CN108297073B (en) * 2018-03-12 2020-06-09 中南大学 Six-degree-of-freedom series-parallel hybrid drive motion platform applied to photoelectron packaging
CN114992453A (en) * 2022-06-07 2022-09-02 重庆大学 Controllable plane high-precision flexible displacement platform with high load and large stroke
CN114992453B (en) * 2022-06-07 2024-02-27 重庆大学 Controllable plane high-precision flexible displacement platform with high load and large stroke

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