CN108297073B - Six-degree-of-freedom series-parallel hybrid drive motion platform applied to photoelectron packaging - Google Patents
Six-degree-of-freedom series-parallel hybrid drive motion platform applied to photoelectron packaging Download PDFInfo
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- CN108297073B CN108297073B CN201810200420.2A CN201810200420A CN108297073B CN 108297073 B CN108297073 B CN 108297073B CN 201810200420 A CN201810200420 A CN 201810200420A CN 108297073 B CN108297073 B CN 108297073B
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- B25J9/00—Programme-controlled manipulators
- B25J9/003—Programme-controlled manipulators having parallel kinematics
- B25J9/0072—Programme-controlled manipulators having parallel kinematics of the hybrid type, i.e. having different kinematics chains
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Abstract
The invention provides a six-degree-of-freedom series-parallel hybrid drive motion platform, which comprises: the system comprises a three-degree-of-freedom flexible parallel sub-motion platform, a single-degree-of-freedom rotator motion platform and a two-degree-of-freedom series sub-motion platform; the single-degree-of-freedom rotator motion platform is arranged right above the two-degree-of-freedom series rotator motion platform and is fixedly connected with the two-degree-of-freedom series rotator motion platform; the three-degree-of-freedom flexible parallel rotor motion platform is arranged right above the single-degree-of-freedom rotor motion platform and is fixedly connected with the single-degree-of-freedom rotor motion platform. According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the motion platform is simple and compact in structure and reasonable in layout, and can realize a large-stroke motion range and high-precision positioning.
Description
Technical Field
The invention relates to the technical field of photoelectron packaging, in particular to a six-degree-of-freedom series-parallel hybrid driving motion platform applied to photoelectron packaging.
Background
The integrated optoelectronic device is a core device supporting the rapid development of new century optical fiber communication. The optoelectronic package is a process of aligning and coupling the input and output array optical fibers and the optical chip through a six-degree-of-freedom motion platform under the guidance of visual equipment. The motion platform is a platform for positioning a chip and an optical fiber in an optoelectronic packaging system, and plays an extremely important role in optoelectronic packaging. In the optoelectronic packaging process, in order to realize maximum power coupling of an optical channel and thus perform high-efficiency transmission of an optical signal, a motion platform needs to realize a six-degree-of-freedom large-stroke motion range and submicron-level positioning accuracy.
In the prior art, a six-degree-of-freedom motion platform for optoelectronic packaging mainly comprises a serial platform and a parallel platform. But the serial six-degree-of-freedom motion platform has relatively large structural size, low rigidity, large inertia and large error accumulation; the parallel configuration has limitations in terms of working space and precision. In general, the existing six-degree-of-freedom motion platform for optoelectronic packaging is difficult to meet the increasingly high requirements in the optoelectronic packaging process in the aspects of freedom, stroke, precision and the like.
Disclosure of Invention
The invention aims to provide a six-degree-of-freedom series-parallel hybrid drive motion platform, which solves the technical problems of large size, low motion precision and small motion stroke of the six-degree-of-freedom motion platform in the prior art.
In order to solve the technical problem, the invention provides a six-degree-of-freedom series-parallel hybrid drive motion platform, which comprises:
the system comprises a three-degree-of-freedom flexible parallel sub-motion platform, a single-degree-of-freedom rotator motion platform and a two-degree-of-freedom series sub-motion platform;
the single-degree-of-freedom rotator motion platform is arranged right above the two-degree-of-freedom series rotator motion platform and is fixedly connected with the two-degree-of-freedom series rotator motion platform;
the three-degree-of-freedom flexible parallel rotor motion platform is arranged right above the single-degree-of-freedom rotor motion platform and is fixedly connected with the single-degree-of-freedom rotor motion platform.
Furthermore, the three-degree-of-freedom flexible parallel sub-motion platform comprises a movable platform and three groups of same driving mechanisms;
each group of driving mechanisms is respectively and fixedly connected to the single-degree-of-freedom rotor motion platform, and a connecting line between the centers of each group of driving mechanisms is in a regular triangle shape;
each group of driving mechanisms comprises a rigid-flexible movement branched chain and a driving part, the rigid-flexible movement branched chain comprises a flexible spherical pair, a rigid connecting rod and a flexible revolute pair, the first end of the flexible spherical pair is fixedly connected with the movable platform, the second end of the flexible spherical pair is fixedly connected with the first end of the rigid connecting rod, the first end of the flexible revolute pair is fixedly connected with the driving part, and the second end of the flexible revolute pair is fixedly connected with the second end of the rigid connecting rod;
the movable platform rotates around a horizontal plane and/or moves along a vertical direction.
Furthermore, the flexible spherical pair comprises a first connecting seat, a spherical pair body and a second connecting seat;
the first connecting seat is arranged at the first end of the flexible spherical pair;
the second connecting seat is arranged at the second end of the flexible spherical pair;
the spherical pair body is cylindrical, and the diameter of the spherical pair body is kept unchanged from the first connecting seat to the second connecting seat, gradually reduced, gradually increased and kept unchanged.
Further, the flexible revolute pair comprises a third connecting seat, a revolute pair body and a fourth connecting seat;
the third connecting seat is arranged at the first end of the flexible revolute pair;
the fourth connecting seat is arranged at the second end of the flexible revolute pair;
the revolute pair body is plate-shaped; from the third connecting seat to the fourth connecting seat, the thickness of the revolute pair body is kept unchanged, gradually reduced, gradually increased and unchanged, and the width of the revolute pair body is gradually increased and gradually reduced.
Further, the driving component comprises a sliding assembly and a fixed bracket, the sliding assembly comprises a first sliding piece and a second sliding piece, the first sliding piece and the second sliding piece are connected in a sliding mode, and the first sliding piece slides in the vertical direction;
the second sliding piece is fixedly connected with the fixed bracket;
the first end of the flexible revolute pair is fixedly connected with the first sliding piece;
the fixed support is fixedly connected to the fixed platform.
Further, the driving part further comprises a piezoelectric ceramic motor, and the piezoelectric ceramic motor is fixedly connected with the fixed support and used for driving the first sliding part.
Further, the driving part further comprises a grating ruler, and the grating ruler is fixedly connected with the fixed support and used for detecting and feeding back the stroke of the first sliding part.
Further, the driving part comprises an elastic piece, and the elastic piece is arranged between the fixed bracket and the first sliding piece.
Further, the single-degree-of-freedom rotator motion platform comprises a rotating platform and a torque motor;
the rotating platform is fixedly connected with a rotor of the torque motor;
the stator of the torque motor is arranged right above the two-degree-of-freedom series sub-motion platform and is fixedly connected with the two-degree-of-freedom series sub-motion platform;
the three-degree-of-freedom flexible parallel sub-motion platform is arranged right above the rotating platform and is fixedly connected with the rotating platform.
The six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention organically integrates the parallel sub motion platform, the rotator motion platform and the series sub motion platform, thereby improving the advantages and avoiding the disadvantages. Not only easily realize big stroke motion range, but also can realize precision positioning, and whole size is less simultaneously.
Drawings
FIG. 1 is a schematic structural diagram of a six-DOF series-parallel hybrid drive motion platform according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a three-degree-of-freedom flexible parallel sub-motion platform according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a movable platform according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a rigid-flexible kinematic chain in accordance with an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a flexible spherical pair according to an embodiment of the present invention;
FIG. 6 is a top view of a flexible spherical pair in accordance with an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a flexible revolute pair according to an embodiment of the present invention;
FIG. 8 is a front view of a flexible revolute pair according to an embodiment of the invention;
FIG. 9 is a top view of a flexible revolute pair according to an embodiment of the invention;
FIG. 10 is a schematic structural diagram of a driving unit according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of a single-DOF rotator motion platform according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of a two-DOF tandem sub-motion platform according to an embodiment of the present invention;
fig. 13 is a schematic structural diagram of a load supporting mechanism of a two-degree-of-freedom tandem sub-motion platform according to an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic structural diagram of a six-degree-of-freedom series-parallel hybrid drive motion platform according to an embodiment of the present invention, and as shown in fig. 1, an embodiment of the present invention provides a six-degree-of-freedom series-parallel hybrid drive motion platform, including:
the system comprises a three-degree-of-freedom flexible parallel sub-motion platform, a single-degree-of-freedom rotator motion platform and a two-degree-of-freedom series sub-motion platform;
the single-degree-of-freedom rotator motion platform is arranged right above the two-degree-of-freedom series rotator motion platform and is fixedly connected with the two-degree-of-freedom series rotator motion platform;
the three-degree-of-freedom flexible parallel rotor motion platform is arranged right above the single-degree-of-freedom rotor motion platform and is fixedly connected with the single-degree-of-freedom rotor motion platform.
Specifically, the six-degree-of-freedom series-parallel hybrid drive motion platform provided by the embodiment of the present invention includes:
the three-degree-of-freedom flexible parallel sub-motion platform 1, the single-degree-of-freedom rotator motion platform 2 and the two-degree-of-freedom series sub-motion platform 3 are fixedly connected in series from top to bottom through the three-degree-of-freedom flexible parallel sub-motion platform 1, the single-degree-of-freedom rotator motion platform 2 and the two-degree-of-freedom series sub-motion platform 3.
The single-freedom-degree rotator motion platform 2 is arranged right above the two-freedom-degree series rotator motion platform 3 and is fixedly connected with the two-freedom-degree series rotator motion platform 3.
The three-degree-of-freedom flexible parallel rotor motion platform 1 is arranged right above the single-degree-of-freedom rotor motion platform 2 and is fixedly connected with the single-degree-of-freedom rotor motion platform 2.
The three-degree-of-freedom flexible parallel sub-motion platform 1 is a two-rotation one-movement (2R1T) three-degree-of-freedom flexible parallel motion platform, and can rotate around a horizontal plane and/or move along a vertical direction. The horizontal plane is an XY plane in the space coordinate, and the vertical direction is a Z-axis direction in the space coordinate.
The single-degree-of-freedom rotator motion platform rotates around the axis in the vertical direction.
The two-freedom-degree series sub-motion platform moves in the horizontal plane.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiment, further, the three-degree-of-freedom flexible parallel sub-motion platform includes a moving platform and three groups of same driving mechanisms;
each group of driving mechanisms is respectively and fixedly connected to the single-degree-of-freedom rotor motion platform, and a connecting line between the centers of each group of driving mechanisms is in a regular triangle shape;
each group of driving mechanisms comprises a rigid-flexible movement branched chain and a driving part, the rigid-flexible movement branched chain comprises a flexible spherical pair, a rigid connecting rod and a flexible revolute pair, the first end of the flexible spherical pair is fixedly connected with the movable platform, the second end of the flexible spherical pair is fixedly connected with the first end of the rigid connecting rod, the first end of the flexible revolute pair is fixedly connected with the driving part, and the second end of the flexible revolute pair is fixedly connected with the second end of the rigid connecting rod;
the movable platform rotates around a horizontal plane and/or moves along a vertical direction.
Specifically, fig. 2 is a schematic structural diagram of a three-degree-of-freedom flexible parallel sub-motion platform according to an embodiment of the present invention, and as shown in fig. 2, the three-degree-of-freedom flexible parallel sub-motion platform includes a moving platform 1-1 and three groups of same driving mechanisms, and is arranged from top to bottom.
Each group of driving mechanisms comprises a rigid-flexible movement branched chain 1-2 and a driving part 1-3, the rigid-flexible movement branched chain 1-2 comprises a flexible spherical pair, a rigid connecting rod and a flexible revolute pair, a first end of the flexible spherical pair is fixedly connected with the movable platform, for example, through a screw, a second end of the flexible spherical pair is fixedly connected with a first end of the rigid connecting rod, for example, through a screw, a first end of the flexible revolute pair is fixedly connected with the driving part, for example, through a screw, and a second end of the flexible revolute pair is fixedly connected with a second end of the rigid connecting rod, for example, through a screw.
Each group of driving mechanisms is respectively and fixedly connected to the single-degree-of-freedom rotor motion platform 2, for example, the driving mechanisms are connected through screws, connecting lines among centers of each group of driving mechanisms are in a regular triangle shape, namely three groups of same rigid and flexible motion branched chains 1-2 are distributed at 120 degrees and are adjacent to each other, the structure is stressed uniformly, the mechanical property is good, the space distribution is reasonable, the occurrence of a singular structure is avoided, the assembly is facilitated, and the assembly error is reduced. Meanwhile, the optoelectronic packaging structure has better isotropy, can better meet the requirements in various aspects in the optoelectronic packaging process, and has lower manufacturing and maintenance cost.
The movable platform rotates around a horizontal plane and/or moves along a vertical direction under the driving of the driving mechanism.
Fig. 3 is a schematic structural diagram of a movable platform according to an embodiment of the present invention, and as shown in fig. 3, the movable platform 1-1 may be configured as a regular hexagon, and has a symmetrical structure and is uniformly stressed. The edge of the movable platform 1-1 is directly connected with the first end of the flexible spherical pair through a screw, so that the assembly is convenient, the assembly error caused by the adoption of the adapter is avoided, the precision loss is reduced, in addition, the middle part of the movable platform 1-1 is hollowed out, and the whole weight of the platform is reduced on the basis of ensuring the whole rigidity.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the flexible spherical pair includes a first connecting seat, a spherical pair body and a second connecting seat;
the first connecting seat is arranged at the first end of the flexible spherical pair;
the second connecting seat is arranged at the second end of the flexible spherical pair;
the spherical pair body is cylindrical, and the diameter of the spherical pair body is kept unchanged from the first connecting seat to the second connecting seat, gradually reduced, gradually increased and kept unchanged.
Specifically, fig. 4 is a schematic structural diagram of a rigid-flexible moving branched chain according to an embodiment of the present invention, and as shown in fig. 4, the rigid-flexible moving branched chain 1-2 includes a flexible spherical pair 1-2-1, a rigid connecting rod 1-2-2, and a flexible revolute pair 1-2-3, a first end of the flexible spherical pair is fixedly connected to the moving platform, a second end of the flexible spherical pair is fixedly connected to a first end of the rigid connecting rod, a first end of the flexible revolute pair is fixedly connected to the driving component, and a second end of the flexible revolute pair is fixedly connected to a second end of the rigid connecting rod.
Fig. 5 is a schematic structural diagram of a flexible spherical pair according to an embodiment of the present invention, and fig. 6 is a top view of the flexible spherical pair according to the embodiment of the present invention, as shown in fig. 5 and fig. 6, the flexible spherical pair 1-2-1 includes a first connecting seat 1-2-1-1, a spherical pair body 1-2-1-2, and a second connecting seat 1-2-1-3, the first connecting seat 1-2-1-1 is disposed at a first end of the flexible spherical pair 1-2-1, and the second connecting seat 1-2-1-3 is disposed at a second end of the flexible spherical pair 1-2-1.
Preferably, the material of the flexible spherical pair 1-2-1 has good mechanical properties, such as beryllium bronze or high manganese steel.
The middle part of the rigid connecting rod 1-2-2 is cylindrical, the first end of the rigid connecting rod 1-2-2 is square, and the second end of the rigid connecting rod 1-2-2 is square. Preferably, the material of the rigid connecting rod 1-2-2 is a light metal, an alloy or a composite material, such as aluminum, carbon fiber and the like.
The second connecting seat 1-2-1-3 is provided with a shaft hole matched with the square shape of the first end of the rigid connecting rod 1-2-2, and the second connecting seat 1-2-1-3 is fixedly connected with the first end of the rigid connecting rod 1-2-2 through a screw. Therefore, the assembly is convenient and more firm, the connection rigidity is improved, and the error is reduced.
The flexible spherical pair 1-2-1 is used as a passive joint and can realize X, Y, Z three rotational degrees of freedom.
The spherical pair body 1-2-1-2 is cylindrical, and the diameter of the spherical pair body 1-2-1-2 is kept unchanged, gradually reduced, gradually increased and then kept unchanged from the first connecting seat 1-2-1-1 to the second connecting seat 1-2-1-3.
The flexible spherical pair 1-2-1 is integrally designed into a variable-diameter round-corner straight beam type with a large length-diameter ratio, the round-corner straight beam type spherical pair has better structural characteristics and mechanical properties, compared with a traditional flexible hinge, the common round-corner straight beam type flexible spherical pair is elongated, the elongated part mainly comprises equal-diameter areas at two ends and a middle arc area, so that on the premise of realizing a large corner of the hinge, the rotation center is kept in the middle arc area as much as possible, the rotation precision of the flexible hinge with the large length-diameter ratio is improved, and the problems that the rotation center existing in the form of integral equal diameter is too large in deviation, the rotation precision is low, and the whole is difficult to process in the form of arc variable diameter and the like are solved.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, a joint of the spherical pair body and the first connecting seat is a fillet, and a joint of the spherical pair body and the second connecting seat is a fillet.
Specifically, flexible spherical pair 1-2-1 is integrally designed into a variable-diameter round-corner straight beam type with a large length-diameter ratio, the round-corner straight beam type spherical pair has better structural characteristics and mechanical properties, compared with a traditional flexible hinge, the flexible spherical pair with the common round-corner straight beam type is elongated, the elongated part mainly comprises equal-diameter areas at two ends and a middle arc-shaped area, and is processed into an inner corner at a hinged end, so that the rotating center is kept in the middle arc-shaped area as much as possible on the premise of realizing the large corner of the hinge, the rotating precision of the flexible hinge with the large length-diameter ratio is improved, and the problems that the rotating center in the integral equal-diameter form deviates too much, the rotating precision is low, the whole variable-diameter form is arc-shaped, and the processing is difficult and the like are avoided.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the flexible revolute pair includes a third connecting seat, a revolute pair body and a fourth connecting seat;
the third connecting seat is arranged at the first end of the flexible revolute pair;
the fourth connecting seat is arranged at the second end of the flexible revolute pair;
the revolute pair body is plate-shaped; from the third connecting seat to the fourth connecting seat direction, the thickness of revolute pair body keeps unchanged earlier, reduces gradually again, and the crescent again keeps unchangeable again, and the width is crescent earlier, reduces gradually again.
Specifically, fig. 7 is a schematic structural diagram of a flexible revolute pair according to an embodiment of the present invention, fig. 8 is a front view of the flexible revolute pair according to the embodiment of the present invention, fig. 9 is a top view of the flexible revolute pair according to the embodiment of the present invention, as shown in fig. 7, 8 and 9, the flexible revolute pair 1-2-3 includes a third connecting seat 1-2-3-1, a revolute pair body 1-2-3-2 and a fourth connecting seat 1-2-3-3, the third connecting seat 1-2-3-1 is disposed at a first end of the flexible revolute pair 1-2-3, and the fourth connecting seat 1-2-3-3 is disposed at a second end of the flexible revolute pair 1-2-3.
Preferably, the material of the flexible revolute pair 1-2-3 has good mechanical properties, such as beryllium bronze or high manganese steel.
The fourth connecting seat 1-2-3-3 is provided with a shaft hole matched with the square shape of the second end of the rigid connecting rod 1-2-2, and the fourth connecting seat 1-2-3-3 is fixedly connected with the second end of the rigid connecting rod 1-2-2 through a screw. Therefore, the assembly is convenient and more firm, the connection rigidity is improved, and the error is reduced.
The flexible revolute pair 1-2-3 is also used as a passive joint and only rotates around a single shaft to realize a rotational degree of freedom.
The revolute pair body 1-2-3-2 is plate-shaped; from the third connecting seat 1-2-3-1 to the fourth connecting seat 1-2-3-3, the thickness of the revolute pair body 1-2-3-2 is kept unchanged, then gradually reduced, then gradually increased and then kept unchanged, and the width of the revolute pair body 1-2-3-2 is gradually increased and then gradually reduced.
Namely, the flexible revolute pair 1-2-3 is integrally designed into a variable thickness and variable width fillet straight beam type with a large length-diameter ratio, the variable thickness has the same advantage similar to the variable diameter of the front flexible spherical pair, the two side edges of the lower flexible revolute pair 1-2-3 are distributed in an arc-shaped variable width distribution, and the width of the revolute pair is gradually reduced from the central area of the hinge to the two ends, so that the rotating capability in the functional direction (rotating shaft) is enhanced, the rotating capability in the non-functional direction (the other two non-rotating shafts) is reduced, the rotating precision is improved, the stress concentration condition is improved, and the rigidity performance of the hinge is improved.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, a joint of the revolute pair body and the third connecting seat is an inner fillet, and a joint of the revolute pair body and the fourth connecting seat is an inner fillet.
Specifically, the flexible revolute pair 1-2-3 is integrally designed into a variable-thickness and variable-width fillet straight beam type with a large length-diameter ratio, the variable thickness has the same advantage similar to the variable diameter of the front flexible spherical pair, the two side edges of the lower flexible revolute pair 1-2-3 are distributed in an arc-shaped variable-width mode, the width of the revolute pair is gradually reduced from the central area of the hinge to the two ends, and an inner circular angle is formed at the end connected with the hinge, so that the rotating capability of the functional direction (rotating shaft) is enhanced, the rotating capability of the non-functional direction (the other two non-rotating shafts) is reduced, the rotating precision is improved, the stress concentration condition is improved, and the rigidity performance of the hinge is improved.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the driving part includes a sliding assembly and a fixed bracket, the sliding assembly includes a first sliding part and a second sliding part, the first sliding part and the second sliding part are connected in a sliding manner, and the first sliding part slides in a vertical direction;
the second sliding piece is fixedly connected with the fixed bracket;
the first end of the flexible revolute pair is fixedly connected with the first sliding piece;
the fixed support is fixedly connected to the fixed platform.
Specifically, fig. 10 is a schematic structural view of a driving unit according to an embodiment of the present invention, and as shown in fig. 10, the driving unit 1-3 includes a sliding assembly and a fixed bracket 1-3-6, the sliding assembly includes a first sliding member 1-3-2-1 and a second sliding member 1-3-2-2, the first sliding member 1-3-2-1 and the second sliding member 1-3-2-2 are slidably connected, and the first sliding member 1-3-2-1 slides in a vertical direction.
The driving part 1-3 comprises an adapter 1-3-4, and the adapter 1-3-4 is fixedly connected with the first sliding part 1-3-2-1.
The second sliding part 1-3-2-2 is fixedly connected with the fixed support 1-3-6, the driving part 1-3 fixedly connects the first end of the flexible revolute pair 1-2-3 with the first sliding part 1-3-2-1 through the adapter 1-3-4, and is fixedly connected with the single-degree-of-freedom rotator moving platform 2 through the fixed support 1-3-6.
The driving parts 1-3 are vertically arranged, so that the space is reasonably utilized, and the realization of the movement freedom degree in the vertical direction and the movement of two rotational freedom degrees around the axis in the horizontal direction is facilitated. The driving part 1-3 is integrally fixed on the single-degree-of-freedom rotor motion platform 2, the integral dynamic performance is good, meanwhile, the self weight and the effect of the load of the movable platform 1-1 on the mechanism are evenly dispersed to the three rigid and flexible motion branched chains 1-2, and the micro displacement error of the movable platform 1-1 in the gravity direction is small. The sliding assembly is used as a driving joint and forms a linear moving pair with vertical motion.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the driving component further includes a piezoelectric ceramic motor, and the piezoelectric ceramic motor is fixedly connected to the fixing bracket and is used for driving the first sliding member.
Specifically, the driving part 1-3 further comprises a piezoelectric ceramic motor 1-3-1, the first sliding part 1-3-2-1 is driven by the piezoelectric ceramic motor 1-3-1 with high precision and high resolution, and due to the working characteristics of the piezoelectric ceramic motor 1-3-1, the driving part 1-3 has no return clearance due to the pre-tightening force, so that high precision can be kept, and the driving part has the characteristics of small volume, light weight and unlimited stroke and is suitable for the requirements of optoelectronic packaging working occasions.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the driving component further includes a grating ruler, and the grating ruler is fixedly connected with the fixed support and is used for detecting and feeding back the stroke of the first sliding part.
Specifically, the driving part 1-3 further comprises a grating ruler 1-3-3, and the grating ruler 1-3-3 is fixedly connected with the fixed support 1-3-6 and used for detecting and feeding back the stroke of the first sliding part 1-3-2-1. And the precise grating ruler 1-3-3 is used as a feedback device to form closed-loop control with the piezoelectric ceramic motor 1-3-1, so that the precision and the stroke of the driving part are ensured.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the driving part includes an elastic member disposed between the fixed bracket and the first sliding member.
Specifically, the driving part 1-3 comprises an elastic part 1-3-5, such as a spring, the elastic part 1-3-5 is used as a downward sliding prevention device and is respectively arranged between the adapter 1-3-4 and the fixed support 1-3-6 through hooks at two ends, so that the first sliding part 1-3-2-1 is prevented from sliding downward due to overlarge platform load and self weight, and the motion stability of the driving part 1-3 is ensured.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, the single-degree-of-freedom rotator motion platform comprises a rotation platform and a torque motor;
the rotating platform is fixedly connected with a rotor of the torque motor;
the stator of the torque motor is arranged right above the two-degree-of-freedom series sub-motion platform and is fixedly connected with the two-degree-of-freedom series sub-motion platform;
the three-degree-of-freedom flexible parallel sub-motion platform is arranged right above the rotating platform and is fixedly connected with the rotating platform.
Specifically, fig. 11 is a schematic structural diagram of a single-degree-of-freedom rotator motion platform according to an embodiment of the present invention, and as shown in fig. 11, the single-degree-of-freedom rotator motion platform includes a rotation platform 2-1 and a torque motor 2-2. The rotating platform 2-1 is fixedly connected with a rotor of the torque motor 2-2. The stator of the torque motor 2-2 is arranged right above the two-freedom-degree series sub-motion platform 3 and is fixedly connected with the two-freedom-degree series sub-motion platform 3. The three-degree-of-freedom flexible parallel sub-motion platform 1 is arranged right above the rotating platform 2-1 and is fixedly connected with the rotating platform 2-1.
The rotation freedom degree of the single-freedom-degree rotor motion platform 2 around the vertical direction is realized through the arrangement of the torque motor 2-2.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
On the basis of the above embodiments, further, fig. 12 is a schematic structural diagram of a two-degree-of-freedom tandem sub-motion platform according to an embodiment of the present invention, and as shown in fig. 12, the two-degree-of-freedom tandem sub-motion platform 3 is an X/Y motion platform redundantly driven by a planar linear motor, and is used for implementing the degrees of freedom of movement along two horizontal direction axes. The two-degree-of-freedom tandem sub-motion platform 3 comprises four linear motors 3-1, four groups of planar grating rulers 3-2, a load supporting mechanism 3-3, an adapter plate 3-4, a supporting frame 3-5 and a base 3-6.
The four linear motors 3-1 are symmetrically arranged, namely each motion direction is synchronously and redundantly driven by the two linear motors 3-1, and each linear motor 3-1 can move back and forth and left and right in a magnetic field plane. The planar grating ruler 3-2 is arranged on the upper side of each linear motor 3-1. The linear motor 3-1 is connected with the loading platform of the load supporting part 3-3 through screws.
Fig. 13 is a schematic structural diagram of a load supporting mechanism of a two-degree-of-freedom tandem sub-motion platform according to an embodiment of the present invention, and as shown in fig. 13, the load supporting mechanism 3-3 includes a loading platform 3-3-1, a limiting circular hole plate 3-3-2, a limiting square hole plate 3-3-3, a ball bearing platform 3-3-4, and two side baffles 3-3-5 of the ball bearing platform 3-3-4. The bottom surface of the loading platform 3-3-1 is contacted with the ball bearings to form a moving pair which can freely slide in the same plane. Specifically, the ball bearing table 3-3-4 is connected with the two side baffles 3-3-5 through screws, and the ball bearing table 3-3-4 is fixed on the base 3-6 through screws. The limiting round hole plate 3-3-2 and the limiting square hole plate 3-3-3 are mutually positioned through a column structure on the ball bearing table 3-3-4; the limiting round hole plate 3-3-2, the limiting square hole plate 3-3-3 and the ball bearing table 3-3-4 form a ball retainer, and balls are limited in the concave surface of the ball bearing table.
According to the six-degree-of-freedom series-parallel hybrid driving motion platform provided by the invention, the parallel sub motion platform, the rotator motion platform and the series sub motion platform are arranged in a hybrid manner, so that the six-degree-of-freedom series-parallel hybrid driving motion platform is compact in overall structure, good in rigidity performance, reasonable in space distribution, convenient to assemble, small in overall structure, light in weight, good in dynamic performance, easy to realize a large-stroke motion range, and can realize precise positioning.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (2)
1. A six-degree-of-freedom series-parallel hybrid drive motion platform is characterized by comprising:
the system comprises a three-degree-of-freedom flexible parallel sub-motion platform, a single-degree-of-freedom rotator motion platform and a two-degree-of-freedom series sub-motion platform;
the single-degree-of-freedom rotator motion platform is arranged right above the two-degree-of-freedom series rotator motion platform and is fixedly connected with the two-degree-of-freedom series rotator motion platform;
the three-degree-of-freedom flexible parallel rotor motion platform is arranged right above the single-degree-of-freedom rotor motion platform and is fixedly connected with the single-degree-of-freedom rotor motion platform;
the three-degree-of-freedom flexible parallel sub-motion platform comprises a movable platform and three groups of same driving mechanisms;
each group of driving mechanisms is respectively and fixedly connected to the single-degree-of-freedom rotor motion platform, and a connecting line between the centers of each group of driving mechanisms is in a regular triangle shape;
each group of driving mechanisms comprises a rigid-flexible movement branched chain and a driving part, the rigid-flexible movement branched chain comprises a flexible spherical pair, a rigid connecting rod and a flexible revolute pair, the first end of the flexible spherical pair is fixedly connected with the movable platform, the second end of the flexible spherical pair is fixedly connected with the first end of the rigid connecting rod, the first end of the flexible revolute pair is fixedly connected with the driving part, and the second end of the flexible revolute pair is fixedly connected with the second end of the rigid connecting rod;
the movable platform rotates around a horizontal plane and/or moves along a vertical direction;
the driving part comprises a sliding assembly and a fixed bracket, the sliding assembly comprises a first sliding piece and a second sliding piece, the first sliding piece and the second sliding piece are connected in a sliding mode, and the first sliding piece slides in the vertical direction;
the second sliding piece is fixedly connected with the fixed bracket;
the first end of the flexible revolute pair is fixedly connected with the first sliding piece;
the fixed bracket is fixedly connected to the single-degree-of-freedom rotator motion platform;
the driving part further comprises a piezoelectric ceramic motor, and the piezoelectric ceramic motor is fixedly connected with the fixed support and used for driving the first sliding part;
the driving part further comprises a grating ruler which is fixedly connected with the fixed support and used for detecting and feeding back the stroke of the first sliding part;
the driving part comprises an elastic piece, and the elastic piece is arranged between the fixed bracket and the first sliding piece;
the flexible spherical pair comprises a first connecting seat, a spherical pair body and a second connecting seat;
the first connecting seat is arranged at the first end of the flexible spherical pair;
the second connecting seat is arranged at the second end of the flexible spherical pair;
the spherical pair body is cylindrical, and the diameter of the spherical pair body is kept unchanged from the first connecting seat to the second connecting seat, gradually reduced, gradually increased and then kept unchanged;
the flexible revolute pair comprises a third connecting seat, a revolute pair body and a fourth connecting seat;
the third connecting seat is arranged at the first end of the flexible revolute pair;
the fourth connecting seat is arranged at the second end of the flexible revolute pair;
the revolute pair body is plate-shaped; from the third connecting seat to the fourth connecting seat, the thickness of the revolute pair body is kept unchanged, gradually reduced, gradually increased and unchanged, and the width of the revolute pair body is gradually increased and gradually reduced.
2. The six-degree-of-freedom series-parallel hybrid drive motion platform of claim 1, wherein the single-degree-of-freedom rotator motion platform comprises a rotating platform and a torque motor;
the rotating platform is fixedly connected with a rotor of the torque motor;
the stator of the torque motor is arranged right above the two-degree-of-freedom series sub-motion platform and is fixedly connected with the two-degree-of-freedom series sub-motion platform;
the three-degree-of-freedom flexible parallel sub-motion platform is arranged right above the rotating platform and is fixedly connected with the rotating platform.
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| CN108987316B (en) * | 2018-09-26 | 2024-03-26 | 广东工业大学 | Space leveling equipment and system for flip chip substrate |
| CN110815187B (en) * | 2019-11-19 | 2022-06-24 | 同济大学 | Three-freedom-degree parallel mechanism without accompanying movement |
| CN113129682B (en) * | 2021-04-29 | 2022-11-29 | 西北工业大学 | Motion simulation device for fixed-wing aircraft |
| CN114123851A (en) * | 2021-12-03 | 2022-03-01 | 散裂中子源科学中心 | Six-degree-of-freedom posture adjusting platform |
| CN117609673B (en) * | 2024-01-24 | 2024-04-09 | 中南大学 | Six-degree-of-freedom parallel mechanism forward solution method based on physical information neural network |
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