CN108470705A - Plane motion platform applied to optoelectronic packaging - Google Patents
Plane motion platform applied to optoelectronic packaging Download PDFInfo
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- CN108470705A CN108470705A CN201810205696.XA CN201810205696A CN108470705A CN 108470705 A CN108470705 A CN 108470705A CN 201810205696 A CN201810205696 A CN 201810205696A CN 108470705 A CN108470705 A CN 108470705A
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- decoupling device
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- objective table
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Abstract
The present invention provides a kind of plane motion platform applied to optoelectronic packaging, including：Objective table, the first decoupling device, first driving means, the second decoupling device and the second driving device；The top of first decoupling device and the top of the second decoupling device are connect with the bottom of objective table, and the bottom of the first decoupling device and the top of first driving means connect, and the bottom of the second decoupling device is connect with the top of the second driving device.The present invention drives the first decoupling device so that the first decoupling device band dynamic object stage is moved along first direction by first driving means, second driving device drives the second decoupling device so that the second decoupling device band dynamic object stage moves in a second direction, it is not necessary that the moving link in a direction is equipped on the moving link of other direction, to avoid increasing the load of other direction line correspondence motor so that movement velocity, acceleration and the start and stop precision of other direction line correspondence motor are unaffected.
Description
Technical field
The present invention relates to optoelectronic packaging techniques fields, more particularly, to a kind of plane applied to optoelectronic packaging
Motion platform.
Background technology
Opto-electronic device is the core devices in fiber optic communication, needed when specifically used respectively with input array optical fiber and defeated
Go out array fibre connection.Opto-electronic device is respectively optoelectronic packaging with the connection of input array optical fiber and output array optical fiber.
Optoelectronic packaging is using the load clamping mechanism on motion platform by opto-electronic device and input array optical fiber or output array
Optical fiber carries out the process of optical alignment coupling.Wherein, the movement velocity of motion platform, acceleration and start and stop precision determine photoelectricity
The efficiency and precision of son encapsulation.
In the prior art frequently with conventional motion platform be objective table be equipped on the moving link in the direction X (or Y),
It is moved in the direction moving link upper edge X (or Y) in the direction X (or Y) under the action of the line correspondence motor of the direction X (or Y)；X (or Y)
The moving link in direction is equipped on the moving link in the direction Y (or X), under the action of Y (or X) direction line correspondence motor
The direction moving link upper edge Y (or X) in the direction Y (or X) moves, to be moved along the direction Y (or X) with dynamic object stage.
Above-mentioned conventional motion platform since the moving link in the direction X (or Y) is equipped on the moving link in the direction Y (or X),
The load of the direction Y (or X) line correspondence motor is aggravated so that the movement velocity of the direction Y (or X) line correspondence motor accelerates
Degree and start and stop precision are affected, and then reduce the efficiency and precision of optoelectronic packaging.
Invention content
The present invention provides a kind of plane motion platform applied to optoelectronic packaging, to overcome in the prior art, tradition fortune
Moving platform has aggravated the direction pair Y (or X) since the moving link in the direction X (or Y) is equipped on the moving link in the direction Y (or X)
Answer the load of linear motor so that movement velocity, acceleration and the start and stop precision of the direction Y (or X) line correspondence motor are by shadow
The problem of ringing, and then reducing the efficiency and precision of optoelectronic packaging.
According to an aspect of the present invention, a kind of plane motion platform applied to optoelectronic packaging is provided, including：Loading
Platform, the first decoupling device, first driving means, the second decoupling device and the second driving device；The top of first decoupling device
Portion is connect with the bottom of the objective table, and the bottom of first decoupling device is connect with the top of the first driving means；
The top of second decoupling device is connect with the bottom of the objective table, the bottom of second decoupling device and described second
The top of driving device connects；The first driving means are for driving first decoupling device so that the first decoupling dress
It sets and the objective table is driven to be moved along first direction；Second driving device is for driving second decoupling device so that institute
Stating the second decoupling device drives the objective table to move in a second direction；First decoupling device is additionally operable in second solution
Coupling device avoids the first driving means from hindering the stage movement when objective table being driven to move in a second direction；Institute
State the second decoupling device be additionally operable to avoid when first decoupling device drives the objective table to move along first direction it is described
Second driving device hinders the stage movement.
Wherein, first decoupling device includes：Primary optic axis, first straight line bearing and first straight line bearing block；It is described
First straight line bearing block is fixedly connected with the bottom of the objective table；The first straight line bearing is set to the first straight line axis
In bearing；The primary optic axis pass through the first straight line bearing and the first straight line bearing block and with the first straight line axis
Hold mutual cooperation；The top of the first driving means is fixed at the primary optic axis both ends；Second decoupling device includes：
Second optical axis, second straight line bearing and second straight line bearing block；The bottom of the second straight line bearing block and the objective table is solid
Fixed connection；The second straight line bearing is set in the second straight line bearing block；Second optical axis is straight across described second
Spool holds with the second straight line bearing block and cooperates with the second straight line bearing；Second optical axis both ends are fixed on
The top of second driving device.
Wherein, the first driving means include：First straight line motor, first straight line motor upper mounting plate and first straight line electricity
Machine base；The first straight line motor upper mounting plate is slidably connected with the first straight line motor base；The first straight line motor
The top of upper mounting plate is connect with the bottom of first decoupling device；The mover of the first straight line motor is fixed on described first
The upper surface of linear motor pedestal, the stator of the first straight line motor are set to the following table of the first straight line motor upper mounting plate
Face；Second driving device includes：Second straight line motor, second straight line motor upper mounting plate and second straight line motor base；Institute
Second straight line motor upper mounting plate is stated to be slidably connected with the second straight line motor base；The top of the second straight line motor upper mounting plate
Portion is connect with the bottom of second decoupling device；The mover of the second straight line motor is fixed on the second straight line motor bottom
The upper surface of seat, the stator of the second straight line motor are set to the lower surface of the second straight line motor upper mounting plate.
Wherein, for each motor in the first straight line motor and the second straight line motor, the stator of each motor
Including upper plate and lower plate；The upper plate and lower plate are arranged in parallel；The both ends of the upper plate and lower plate in the longitudinal direction are solid respectively
Due on two pinboards；The pinboard is connect with each motor upper mounting plate；For the first straight line motor and described
Each motor in two linear motors, the mover of each motor are plate, between the upper plate and lower plate and respectively with it is described
Upper plate is parallel with lower plate.
Wherein, the first straight line motor upper mounting plate is slided with the first straight line motor base by linear roller bearing
Connection；The second straight line motor upper mounting plate is slidably connected with the second straight line motor base by linear roller bearing.
Wherein, the motion platform further includes synkinesia frame, and the synkinesia frame is same for carrying the objective table
When can avoid the objective table relatively the synkinesia frame movement when suffered resistance.
Wherein, the synkinesia frame includes:Ball plummer, several balls and ball limiting plate；The ball carrying
Platform is for carrying several balls；The ball limiting plate is fixed on the ball plummer, for making each ball protect
Hold original place rotation.
Wherein, the synkinesia frame further includes ball protection board；The ball protection board is fixed on the ball carrying
On platform, for avoiding any ball from leaving the ball plummer.
Wherein, the motion platform further includes movement measuring device, for measuring the objective table in a first direction or
The distance of two directions movement.
Wherein, the movement measuring device includes two linear grid rulers；One linear grid ruler is set to described
In first driving means, a linear grid ruler is set in second driving device.
Plane motion platform proposed by the present invention applied to optoelectronic packaging, the top by the first decoupling device and load
The bottom of object platform connects, and the bottom of the first decoupling device and the top of first driving means connect, the top of the second decoupling device
It is connect with the bottom of objective table, the bottom of the second decoupling device is connect with the top of the second driving device, and first driving means are driven
So that the first decoupling device band dynamic object stage is moved along first direction, the second driving device driving second solves dynamic first decoupling device
Coupling device is so that the second decoupling device band dynamic object stage moves in a second direction, it is not necessary that the moving link in a direction to be equipped on
On the moving link of other direction, to avoid increasing the load of other direction line correspondence motor so that other direction corresponds to
Movement velocity, acceleration and the start and stop precision of linear motor are unaffected.In addition, by the bottom of the first decoupling device with
First driving means connect, and the bottom of the second decoupling device is connect with the second driving device so that the first decoupling device band dynamic load
Object platform avoids the second driving device and hinders stage movement, the second decoupling device band dynamic object stage edge when being moved along first direction
Second direction avoids first driving means and hinders stage movement when moving, to ensure that two driving devices are independent of each other.
Further it is proposed that the plane motion platform by volume applied to optoelectronic packaging it is small, can overcome conventional motion platform because fortune
Volume is larger caused by dynamic component coupled modes, the problem of not being suitable for narrow space.
Description of the drawings
Fig. 1 is the plane motion platform explosive view applied to optoelectronic packaging according to the embodiment of the present invention；
Fig. 2 is the plane motion platform structure schematic diagram applied to optoelectronic packaging according to the embodiment of the present invention；
Fig. 3 is the front view according to the first decoupling device of the embodiment of the present invention；
Fig. 4 is the side view according to the first decoupling device of the embodiment of the present invention；
Fig. 5 is the front view according to the first driving means of the embodiment of the present invention；
Fig. 6 is the side view according to the first driving means of the embodiment of the present invention；
Fig. 7 is the synkinesia frame explosive view according to the embodiment of the present invention；
Fig. 8 is the schematic diagram that objective table is carried according to the synkinesia frame of the embodiment of the present invention.
Specific implementation mode
With reference to the accompanying drawings and examples, the specific implementation mode of the present invention is described in further detail.Implement below
Example is not limited to the scope of the present invention for illustrating the present invention.
According to an aspect of the present invention, a kind of plane motion platform applied to optoelectronic packaging is provided.According to Fig. 1
The plane motion platform explosive view applied to optoelectronic packaging of the embodiment of the present invention, Fig. 2 are answering according to the embodiment of the present invention
Plane motion platform schematic diagram for optoelectronic packaging.The motion platform includes：Objective table 10, the first decoupling device 20,
One driving device 30, the second decoupling device 40 and the second driving device 50；The top of first decoupling device 20 and the load
The bottom of object platform 10 connects, and the bottom of first decoupling device 20 is connect with the top of the first driving means 30；It is described
The top of second decoupling device 40 is connect with the bottom of the objective table 10, the bottom of second decoupling device 40 and described the
The top of two driving devices 50 connects；The first driving means 30 are for driving first decoupling device 20 so that described the
One decoupling device 20 drives the objective table 10 to be moved along first direction；Second driving device 50 is for driving described second
Decoupling device 40 is so that second decoupling device 40 drives the objective table 10 to move in a second direction；The first decoupling dress
20 are set to be additionally operable to avoid described first to drive when second decoupling device 40 drives the objective table 10 to move in a second direction
Dynamic device 30 hinders the objective table 10 to move；Second decoupling device 40 is additionally operable to drive in first decoupling device 20
The objective table 10 avoids second driving device 50 that the objective table 10 is hindered to move when being moved along first direction.
In the present embodiment, objective table 10 is for placing the target object for waiting for being aligned with other objects, and e.g., target object can
With opto-electronic device, other objects can be input array optical fiber.Specific modes of emplacement can be that will be used to fix target object
Clamping mechanism be fixed on objective table 10, recycle clamping mechanism to fix target object.
It when first driving means 30 work, is moved along first direction, and the first decoupling device 20 is driven to be transported along first direction
It is dynamic.First decoupling device 20 is moved with dynamic object stage 10 along first direction.At this point, 40 top of the second decoupling device is with objective table
10 move along first direction, and 40 lower stationary of the second decoupling device is motionless, to avoid the second driving device 50 from hindering objective table
10 movements, and then the second driving device 50 is avoided to the movement velocity of first driving means 30, acceleration and start and stop precision
It influences.Similarly, when the second driving device 50 works, the second decoupling device 40 can avoid first driving means 30 and be filled to the second driving
Set the influence of 50 movement velocity, acceleration and start and stop precision.
Plane motion platform proposed by the present invention applied to optoelectronic packaging, the top by the first decoupling device and load
The bottom of object platform connects, and the bottom of the first decoupling device and the top of first driving means connect, the top of the second decoupling device
It is connect with the bottom of objective table, the bottom of the second decoupling device is connect with the top of the second driving device, and first driving means are driven
So that the first decoupling device band dynamic object stage is moved along first direction, the second driving device driving second solves dynamic first decoupling device
Coupling device is so that the second decoupling device band dynamic object stage moves in a second direction, it is not necessary that the moving link in a direction to be equipped on
On the moving link of other direction, to avoid increasing the load of other direction line correspondence motor so that other direction corresponds to
Movement velocity, acceleration and the start and stop precision of linear motor are unaffected.In addition, by the bottom of the first decoupling device with
First driving means connect, and the bottom of the second decoupling device is connect with the second driving device so that the first decoupling device band dynamic load
Object platform avoids the second driving device and hinders stage movement, the second decoupling device band dynamic object stage edge when being moved along first direction
Second direction avoids first driving means and hinders stage movement when moving, to ensure that two driving devices are independent of each other.
Further it is proposed that the plane motion platform by volume applied to optoelectronic packaging it is small, can overcome conventional motion platform because fortune
Volume is larger caused by dynamic component coupled modes, the problem of not being suitable for narrow space.
As shown in Figure 1, as a kind of alternative embodiment, first decoupling device 20 includes：Primary optic axis 21, first is straight
Spool holds 22 and first straight line bearing block 23；The first straight line bearing block 23 is fixedly connected with the bottom of the objective table 10；
The first straight line bearing 22 is set in the first straight line bearing block 23；The primary optic axis 21 passes through the first straight line
Bearing 22 and the first straight line bearing block 23 simultaneously cooperate with the first straight line bearing 22；21 both ends of the primary optic axis
It is fixed on the top of the first driving means 30；Second decoupling device 40 includes：Second optical axis 41, second straight line bearing
42 and second straight line bearing block 43；The second straight line bearing block 43 is fixedly connected with the bottom of the objective table 10；Described
Two linear bearings 42 are set in the second straight line bearing block 43；Second optical axis 41 passes through the second straight line bearing 42
It cooperates with the second straight line bearing block 43 and with the second straight line bearing 42；Second optical axis, 41 both ends are fixed on
The top of second driving device 50.
Fig. 3 is the front view of the first decoupling device.Fig. 4 is the side view of the first decoupling device.First decoupling device 20 with
The identical only installation position of second decoupling device, 40 structure is different.In the present embodiment, optical axis is long column shape.First decoupling device 20
When work, the primary optic axis 21 at the top of first driving means 30 is fixed at both ends, in the first driving moved along first direction
It is moved along first direction under the drive of device 30.Primary optic axis 21 drives first straight line bearing block 23 to be moved along first direction.The
One linear bearing seat 23 is moved with dynamic object stage 10 along first direction.At this point, objective table 10 drives 43 edge of second straight line bearing block
First direction moves, and second straight line bearing 42 is moved with opposite second optical axis 41 of second straight line bearing block 43 along first direction,
But the second optical axis 41 is stationary, and the second driving device 50 is also stationary.Therefore, the second driving device 50 will not hinder loading
Platform 10 moves.When second decoupling device 40 works, detailed process is similar when working to the second decoupling device 40, no longer multiple herein
It states.
As shown in Figure 1, as a kind of alternative embodiment, the first driving means 30 include：First straight line motor 31,
One linear motor upper mounting plate 32 and first straight line motor base 33；The first straight line motor upper mounting plate 32 and the first straight line
Motor base 33 is slidably connected；The top of the first straight line motor upper mounting plate 32 connects with the bottom of first decoupling device 20
It connects；The mover of the first straight line motor 31 is fixed on the upper surface of the first straight line motor base 33, the first straight line
The stator of motor 31 is set to the lower surface of the first straight line motor upper mounting plate 32；Second driving device 50 includes：The
Two linear motors 51, second straight line motor upper mounting plate 52 and second straight line motor base 53；The second straight line motor upper mounting plate
52 are slidably connected with the second straight line motor base 53；The top of the second straight line motor upper mounting plate 52 is solved with described second
The bottom of coupling device 40 connects；The mover of the second straight line motor 51 is fixed on the upper table of the second straight line motor base 53
Face, the stator of the second straight line motor 51 are set to the lower surface of the second straight line motor upper mounting plate 52.
Fig. 5 is the front view of first driving means.Fig. 6 is the side view of first driving means.First driving means 30 with
The identical only installation position of second driving device, 50 structure is different.In the present embodiment, first straight line motor and second straight line motor
Using super large, iron-core less motor coil, this aspect can ensure that zero tooth socket so that the heat of generation substantially reduces, on the other hand
Ultra-smooth speed control can be achieved, the two so that motion platform proposed by the present invention has higher efficiency and precision.First
When driving device 30 works, the stator of first straight line motor 31 is moved along first direction with respect to mover, drives first straight line motor
Upper mounting plate 32 is slided along first direction with respect to first straight line motor base 33.The specific implementation of sliding can be：First is straight
Line motor upper mounting plate 32 and first straight line motor base 33 are slidably engaged by linear roller bearing.On first straight line motor
Platform 32 drives the first decoupling device 20 to be moved along first direction.First decoupling device 20 is transported with dynamic object stage 10 along first direction
It is dynamic.When second driving device 50 works, detailed process is similar when working to first driving means 30, no longer repeats herein.
As shown in Figure 1, as a kind of alternative embodiment, in the first straight line motor and the second straight line motor
The stator of each motor, each motor includes upper plate 61 and lower plate 62；The upper plate 61 and lower plate 62 are arranged in parallel；The upper plate
61 and the both ends of lower plate 62 in the longitudinal direction be individually fixed on two pinboards 70；The pinboard 70 and the straight-line electric
Machine upper mounting plate connects；For each motor in the first straight line motor and the second straight line motor, the mover of each motor
63 be plate, between the upper plate 61 and lower plate 62 and parallel with the upper plate 61 and lower plate 62 respectively.
In the present embodiment, the both ends of upper plate 61 and lower plate 62 in the longitudinal direction are individually fixed on two pinboards 70
So that upper plate 61 is parallel with lower plate 62.Pinboard 70 is connect with linear motor upper mounting plate so that when upper plate 61 and lower plate 62 move
Linear motor upper mounting plate can be driven to move.
In the present embodiment, mover 63 is between upper plate 61 and lower plate 62 and parallel with upper plate 61 and lower plate 62 respectively,
So that after mover 63 is powered, the upper plate 61 and lower plate 62 of mover 63 are moved by the power along 63 length direction of mover and not by mover
63 hinder.
As a kind of alternative embodiment, the first straight line motor upper mounting plate passes through straight with the first straight line motor base
Line roller bearing is slidably connected；The second straight line motor upper mounting plate passes through linear roller axis with the second straight line motor base
It holds and is slidably connected.
In conventional motion platform, for linear motor as driving part, motion parts are mover.Mover is to be similar to cantilever beam
Structure setting is trembled in what on motion, be will produce during exercise, influences kinematic accuracy.In the present embodiment, linear motor
As driving part, motion parts are stator.Since first straight line motor upper mounting plate and first straight line motor base pass through straight line
Roller bearing is slidably connected so that and first straight line motor upper mounting plate is steady with respect to the mobile comparison of first straight line motor base, because
And trembling for the stator being arranged on first straight line motor upper mounting plate can be eliminated, and then eliminate the shadow to stage movement speed
It rings.
As a kind of alternative embodiment, the motion platform further includes synkinesia frame；The synkinesia frame is for holding
It carries the objective table 10 while can avoid resistance suffered when the relatively described synkinesia frame of the objective table 10 moves.
In the present embodiment, 20 He of the first decoupling device can be reduced for carrying objective table 10 by the way that synkinesia frame is arranged
Second decoupling device 40 carries stress when objective table 10.It is filled since objective table 10 can be decoupled in the first decoupling device 20 or second
Set and moved under 40 drive, when being moved in order to avoid objective table 10 between synkinesia frame friction effects objective table 10 fortune
It is dynamic, thus when objective table 10 need to be made with respect to synkinesia frame movement it is suffered resistance it is sufficiently small, so as to avoid objective table 10 because
The problem of resistance causes speed impacted and then the efficiency of optoelectronic packaging is caused to reduce.
As shown in fig. 7, as a kind of alternative embodiment, the synkinesia frame includes:Ball plummer 81, several balls
82 and ball limiting plate 83；The ball plummer 81 is fixed on the substrate, for carrying several balls 82；It is described
Ball limiting plate 83 is fixed on the ball plummer 81, for making each ball keep original place rotation.
Fig. 8 is the side view according to the synkinesia frame of the present embodiment.In the present embodiment, ball plummer 81 is mainly used
In holding ball, ball is standard spherical shape, on the one hand carries objective table 10, on the other hand when 10 counter ball of objective table moves
When, original place rotates under the action of ball is under frictional force, to reduce the resistance suffered by objective table 10.Ball limiting plate 83 is setting
There is the thin plate of several holes, each ball is located in a hole of ball limiting plate 83 makes ball be only capable of original place rotation to limit ball
It is irremovable.The nonmetallic materials of self-lubricating property can be used in ball limiting plate 83, to reduce ball in high speed start and stop and roll
Frictional force between pearl limiting plate 83 reduces the possibility of ball moving fever deformation, avoids the movement speed for influencing objective table 10
Degree and startup precision, and then improve optoelectronic packaging precision.Ball limiting plate 83 it is parallel with 81 upper surface of ball plummer and
Away from the diameter less than ball.Preferably, the hole on ball limiting plate 83 is square hole, on ball limiting plate 83 and ball plummer 81
Surface spacing is the radius of ball.For the convenience of processing, baffle is respectively set in 81 both sides of ball plummer, is transported as auxiliary
The side wall of moving frame.
As shown in fig. 7, as a kind of alternative embodiment, the synkinesia frame further includes ball protection board 84；The rolling
Pearl protection board 84 is fixed on the ball plummer 81, for avoiding any ball from leaving the ball plummer 81.
In the present embodiment, ball protection board 84 is the thin plate for being provided with several holes, and each ball is located at ball protection board
Any ball leaves ball plummer 81 when being inverted to avoid motion platform in 84 hole.Ball protection board 84 can be used certainly
The nonmetallic materials of lubrication property reduce rolling to reduce frictional force of the ball in high speed start and stop between ball protection board 84
The possibility of pearl movement fever deformation, avoids the movement velocity for influencing objective table 10 and starts precision, and then improve photoelectron envelope
Fill precision.Ball protection board 84 is parallel with 81 upper surface of ball plummer and spacing is more than the radius of ball.Preferably, ball limits
Hole on the plate 83 of position is circular hole.
As a kind of alternative embodiment, the motion platform further includes movement measuring device, for measuring the objective table
10 in a first direction or second direction movement distance.
Movement measuring device, which is mainly used for obtaining, measures the distance that objective table 10 is moved along first direction or second direction.It should
Range data can be used as the foundation for adjusting linear motor speed, and then control the movement and stopping of objective table 10.Motion measurement fills
It is set to the device that can be used for carrying out displacement detecting, such as inductive displacement transducer, electric vortex type displacement sensor, grating scale.
As a kind of alternative embodiment, the movement measuring device includes two linear grid rulers 90；One described linear
Grating scale 90 is set in the first driving means 30, and a linear grid ruler 90 is set to second driving device
In 50.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, it will be understood by those of ordinary skill in the art that：It still may be used
With technical scheme described in the above embodiments is modified or equivalent replacement of some of the technical features；
And these modifications or replacements, various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of plane motion platform applied to optoelectronic packaging, which is characterized in that including：Objective table, the first decoupling device,
First driving means, the second decoupling device and the second driving device；
The top of first decoupling device is connect with the bottom of the objective table, the bottom of first decoupling device with it is described
The top of first driving means connects；The top of second decoupling device is connect with the bottom of the objective table, and described second
The bottom of decoupling device is connect with the top of second driving device；
The first driving means are for driving first decoupling device so that first decoupling device drives the loading
Platform is moved along first direction；Second driving device is for driving second decoupling device so that second decoupling device
The objective table is driven to move in a second direction；First decoupling device is additionally operable to described in second decoupling device drive
The first driving means are avoided to hinder the stage movement when objective table moves in a second direction；Second decoupling device
It is additionally operable to avoid second driving device from hindering when first decoupling device drives the objective table to move along first direction
Hinder the stage movement.
2. motion platform according to claim 1, which is characterized in that first decoupling device includes：Primary optic axis,
One linear bearing and first straight line bearing block；The first straight line bearing block is fixedly connected with the bottom of the objective table；It is described
First straight line bearing is set in the first straight line bearing block；The primary optic axis passes through the first straight line bearing and described
First straight line bearing block simultaneously cooperates with the first straight line bearing；First driving is fixed at the primary optic axis both ends
The top of device；
Second decoupling device includes：Second optical axis, second straight line bearing and second straight line bearing block；The second straight line axis
Bearing is fixedly connected with the bottom of the objective table；The second straight line bearing is set in the second straight line bearing block；Institute
The second optical axis is stated across the second straight line bearing and the second straight line bearing block and with the second straight line bearing phase interworking
It closes；The top of second driving device is fixed at second optical axis both ends.
3. motion platform according to claim 1 or 2, which is characterized in that the first driving means include：First straight line
Motor, first straight line motor upper mounting plate and first straight line motor base；The first straight line motor upper mounting plate is straight with described first
Line motor base is slidably connected；The top of the first straight line motor upper mounting plate is connect with the bottom of first decoupling device；
The mover of the first straight line motor is fixed on the upper surface of the first straight line motor base, the first straight line motor
Stator be set to the lower surface of the first straight line motor upper mounting plate；
Second driving device includes：Second straight line motor, second straight line motor upper mounting plate and second straight line motor base；Institute
Second straight line motor upper mounting plate is stated to be slidably connected with the second straight line motor base；The top of the second straight line motor upper mounting plate
The bottom of second decoupling device described in portion connects；
The mover of the second straight line motor is fixed on the upper surface of the second straight line motor base, the second straight line motor
Stator be set to the lower surface of the second straight line motor upper mounting plate.
4. motion platform according to claim 3, which is characterized in that directly for the first straight line motor and described second
The stator of each motor in line motor, each motor includes upper plate and lower plate；The upper plate and lower plate are arranged in parallel；The upper plate
It is individually fixed on two pinboards with the both ends of lower plate in the longitudinal direction；The pinboard connects with each motor upper mounting plate
It connects；
For each motor in the first straight line motor and the second straight line motor, the mover of each motor is plate, position
It is between the upper plate and lower plate and parallel with the upper plate and lower plate respectively.
5. motion platform according to claim 3, which is characterized in that the first straight line motor upper mounting plate and described first
Linear motor pedestal is slidably connected by linear roller bearing；The second straight line motor upper mounting plate and the second straight line motor
Pedestal is slidably connected by linear roller bearing.
6. motion platform according to claim 1, which is characterized in that the motion platform further includes synkinesia frame；Institute
Synkinesia frame is stated for carrying the objective table while can avoid objective table synkinesia frame movement when institute relatively
The resistance received.
7. motion platform according to claim 6, which is characterized in that the synkinesia frame includes:If ball plummer,
Dry milling pearl and ball limiting plate；
The ball plummer is for carrying several balls；
The ball limiting plate is fixed on the ball plummer, for making each ball keep original place rotation.
8. motion platform according to claim 7, which is characterized in that the synkinesia frame further includes ball protection board；
The ball protection board is fixed on the ball plummer, for avoiding any ball from leaving the ball plummer.
9. motion platform according to claim 1, which is characterized in that the motion platform further includes movement measuring device,
For measure the objective table in a first direction or second direction movement distance.
10. motion platform according to claim 9, which is characterized in that the movement measuring device includes two linear lights
Grid ruler；One linear grid ruler is set in the first driving means, and a linear grid ruler is set to described
In second driving device.
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