CN113691098A - Coplanar motion device driven by single-side linear motor for packaging optoelectronic device - Google Patents
Coplanar motion device driven by single-side linear motor for packaging optoelectronic device Download PDFInfo
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- CN113691098A CN113691098A CN202110907974.8A CN202110907974A CN113691098A CN 113691098 A CN113691098 A CN 113691098A CN 202110907974 A CN202110907974 A CN 202110907974A CN 113691098 A CN113691098 A CN 113691098A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
Abstract
The invention discloses a coplanar motion device driven by a unilateral linear motor for packaging optoelectronic devices, which is characterized in that a first motion module and a second motion module in two vertical directions are designed on the same base, and each motion module forms a whole from top to bottom and is independent of the other motion module, so that the motion of a movable platform in different directions is not interfered with each other, the movable platform is ensured to have higher precision, higher load is realized, the integral structure of the device is simple and compact, and the device is convenient to process and assemble.
Description
Technical Field
The invention relates to the technical field of optoelectronic device processing devices, in particular to a coplanar motion device driven by a single-side linear motor for packaging optoelectronic devices.
Background
The integrated photoelectronic device is a core device for the rapid development of optical fiber communication, and the photoelectronic packaging is a process of optically aligning and coupling the photoelectronic device and input and output array optical fibers by using a precise motion platform. With the rapid development of the optoelectronic industry, the precision and efficiency of the packaging requirements are higher and higher. Therefore, high requirements are placed on the precision and speed of movement and acceleration of the packaging device. At present, a linear motor or a stepping motor with a general driving structure is mainly adopted by a motion X/Y platform on the market, meanwhile, a motion component in one direction can become a load in the other direction, and the connection mode is mechanism coupling.
The traditional X/Y motion platform mainly has the following disadvantages:
firstly, the rated load of the motion platform is small, and the driving force of the platform is insufficient;
the arrangement form of the motion platform is a superposition type, namely the load of the bottom surface motion mechanism is not only a workpiece, but also comprises a driving mechanism in the other direction and a clamping mechanism of the workpiece;
the traditional mechanism coupling mode has large mass and volume of moving parts, and is not suitable for narrow space;
and fourthly, the traditional motion platform has more structural parts, so that the assembly difficulty is high, the accumulative error is easy to generate, and the corresponding processing and manufacturing cost is high.
Disclosure of Invention
Based on the technical problems of the prior art, the invention provides a coplanar motion device driven by a single-side linear motor for packaging optoelectronic devices, which can complete mechanical displacement motion with high speed, high acceleration and high precision, has a simple structure, can structurally enable a rack for mounting the linear motor to adopt an integrated design, is convenient to process, can reduce assembly errors caused by excessive parts, has small volume and light weight, and can be suitable for narrow spaces.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the utility model provides a unilateral linear electric motor driven coplane telecontrol equipment for optoelectronic device encapsulation, from the bottom up includes base, drive module in proper order and moves the platform, drive module includes first drive module and second drive module, and first drive module and second drive module are type T shape structure setting, first drive module drive move the platform along the motion of first direction, the drive of second drive module move the platform along with the motion of first direction vertically second direction.
In some embodiments, the drive module comprises a drive device, a guide rail, a base plate, and a linear bearing; the driving device comprises a first driving device and a second driving device, the guide rail comprises a first guide rail and a second guide rail, the base plate comprises a first base plate and a second base plate, and the linear bearing comprises a first linear bearing and a second linear bearing; the first driving device and the second driving device are arranged on the base in a T-like shape, the two first guide rails are arranged on two sides of the first driving device in parallel, and the two second guide rails are arranged on two sides of the second driving device in parallel; the lower surface of the first substrate is respectively connected with the first guide rail and the first driving device, and the first substrate can reciprocate along the length direction of the first guide rail under the driving of the first driving device; the lower surface of the second substrate is connected with the second guide rail and a second driving device, and the second substrate can reciprocate along the length direction of the second guide rail under the driving of the second driving device; the first linear bearing is arranged on the upper surface of the first substrate and is vertical to the first guide rail, and the second linear bearing is arranged on the upper surface of the second substrate and is vertical to the second guide rail; the first linear bearing and the second linear bearing are both connected with the movable platform; the movable platform can reciprocate along a first direction or a second direction under the driving of the driving device, and the first direction and the second direction are mutually vertical.
Based on the technical scheme, the motion mechanism of the device is as follows:
when the movable platform needs to move along a first direction, the first driving module drives the movable platform to move; when the movable platform needs to move along the second direction, the second driving module drives the movable platform to move.
More specifically, the device motion mechanism of the present application is as follows:
when the movable platform needs to move along a first direction, a first driving device is started, the first driving device drives the first substrate to move along the first direction, and the first substrate moves to drive the movable platform to move along the first direction; similarly, when the movable platform needs to move along the second direction, a second driving device is started, the second driving device drives the second substrate to move along the second direction, and the second substrate moves to drive the movable platform to move along the second direction.
In some embodiments, the base includes a bottom plate, and a first fixing plate and a second fixing plate perpendicular to the bottom plate, two of the first fixing plates are disposed in parallel at an interval to form a first groove, two of the second fixing plates are disposed in parallel at an interval to form a second groove, the first driving device is fixed in the first groove, the second driving device is fixed in the second groove, two of the first guide rails are respectively disposed on upper surfaces of the two of the first fixing plates, and two of the second guide rails are respectively disposed on upper surfaces of the second fixing plates.
In some embodiments, the first driving device includes a first stator and a first mover, the second driving device includes a second stator and a second mover, the first stator and the second stator are respectively fixed in the first groove and the second groove, and the first mover and the second mover are respectively connected to the first substrate and the second substrate.
In some embodiments, the first stator and the second stator are both permanent magnets in a U-shaped configuration.
In some embodiments, the first rail comprises a first slide rail and a first slider, the first slider being slidably coupled to the first slide rail; the two first sliding rails are respectively arranged on the upper surface of the first fixing plate, and the first sliding block is connected with the first substrate.
In some embodiments, the second rail comprises a second slide rail and a second slider, the second slider being slidably coupled to the second slide rail; the two second slide rails are respectively arranged on the upper surface of the second fixing plate, and the second slide block is connected with the second substrate.
In some embodiments, the apparatus further comprises a grating reading head comprising a first grating reading head and a second grating reading head, and a scale comprising a first scale and a second scale; the first grating ruler reading head and the first ruler are respectively arranged on one side of the first substrate and are parallel to the first linear bearing, and the second grating ruler reading head and the second ruler are respectively arranged on one side of the second substrate and are parallel to the second linear bearing.
In some embodiments, the first substrate comprises a first plate and a first support plate perpendicular to the first plate, the first linear bearing is fixed on the upper surface of the first plate, the first support plate is arranged on one side of the first plate and is parallel to the first linear bearing, and the first grating reading head and the first scale are respectively arranged on the first support plate; the second substrate comprises a second flat plate and a second supporting plate perpendicular to the second substrate, the second linear bearing is fixed on the upper surface of the second flat plate, the second supporting plate is arranged on one side of the second flat plate and is parallel to the second linear bearing, and the second grating scale reading head and the second scale are respectively arranged on the second supporting plate.
Compared with the prior art, the invention has the following beneficial effects:
the device adopts an integrated design, and the movable platform, the base plate, the driving device and the base adopt a structural design of up-and-down arrangement, so that the two driving devices in different directions are positioned in the same plane, the structure is simple and compact, and the processing and the production are convenient. And a first movement module which is formed by the first driving device, the first guide rail, the first base plate and the second bearing and is in the first direction and a second movement module which is formed by the second driving device, the second guide rail, the second base plate and the first bearing and is in the second direction are not interfered with each other. The device has the advantages that the movement in two directions on the same plane is not interfered, the load bearing capacity is high, the device is integrated by single-side driving, the number of parts is small, the assembly error caused by excessive parts can be reduced, the size is small, the weight is light, and the device is suitable for narrow spaces.
Further, the specific structural design of base and the mounting means of drive arrangement on the base (the base includes bottom plate and perpendicular to the first fixed plate and the second fixed plate of bottom plate, two the parallel interval of first fixed plate sets up and forms first recess, two the parallel interval of second fixed plate sets up and forms the second recess, first drive arrangement is fixed in the first recess, second drive arrangement is fixed in the second recess, two first guide rail sets up the upper surface at two first fixed plates respectively, two the second guide rail sets up respectively the upper surface of second fixed plate can make whole device more firm, makes the motion of movable platform steady, and then makes the whole operation of device more steady.
In addition, compared with a multi-degree-of-freedom motion platform with a traditional structure, the tail end of the platform of the device can ensure higher design precision, and various driving components can be selected as power sources of the motion platform. Compared with the traditional structure device, the invention can realize higher load under the condition of unchanged motor thrust, realize the mutual noninterference of the movement in two directions and simultaneously realize higher positioning precision.
The device of the invention has the advantages of acceleration of 1-10g, load of 10kg, positioning precision of submicron level and maximum stroke of 20 multiplied by 20 mm.
Drawings
FIG. 1 is a general structure of the apparatus of the present application;
FIG. 2 is an exploded view of the device of the present application;
FIG. 3 is a schematic view of a connection structure of the base and the driving device;
fig. 4 is a schematic structural diagram of the first substrate and the second substrate.
Wherein, 1-a base, 10-a platform, 11-a bottom plate, 12-a first fixing plate, 13-a second fixing plate, 14-a first groove, 15-a second groove, 21-a first driving device, 211-a first stator, 212-a first rotor, 22-a second driving device, 221-a second stator, 222-a second rotor, 31-a first guide rail, 311-a first slide rail, 312-a first slide block, 32-a second guide rail, 321-a second slide rail, 322-a second slide block, 41-a first base plate, 411-a first flat plate, 412-a first support plate, 42-a second base plate, 421-a second flat plate, 422-a second support plate, 51-a first linear bearing, 52-a second linear bearing, 6-a movable platform, 71-first raster scale head, 72-second raster scale head, 81-first scale, 82-second scale.
Detailed Description
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, but rather should be construed as broadly as the present invention is capable of modification in various respects, all without departing from the spirit and scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
As shown in fig. 1 to 3, a coplanar motion device driven by a single-sided linear motor for packaging an optoelectronic device sequentially comprises a base 1, a driving device, a guide rail, a substrate, a linear bearing and a movable platform 6 from bottom to top; the driving device comprises a first driving device 21 and a second driving device 22, the guide rails comprise a first guide rail 31 and a second guide rail 32, the base plates comprise a first base plate 41 and a second base plate 42, and the linear bearings comprise a first linear bearing 51 and a second linear bearing 52; the first driving device 21 and the second driving device 22 are arranged on the base 1 in a T-like structure, as shown in fig. 3, the second driving device 22 is arranged near one end of the first driving device 21, and the two driving devices are perpendicular to each other; two first guide rails 31 are arranged in parallel on both sides of the first driving device 21, and two second guide rails 32 are arranged in parallel on both sides of the second driving device 22; the lower surface of the first substrate 41 is connected with the first guide rail 31 and the first driving device 21 respectively, and the first substrate 41 can reciprocate along the length direction of the first guide rail 31 under the driving of the first driving device 21; the lower surface of the second base plate 42 is connected with the second guide rail 32 and the second driving device 22, and the second base plate 42 can reciprocate along the length direction of the second guide rail 32 under the driving of the second driving device 22; a first linear bearing 51 is arranged on the upper surface of the first substrate 41 and is perpendicular to the first guide rail 31, and a second linear bearing 52 is arranged on the upper surface of the second substrate 42 and is perpendicular to the second guide rail 32; the first linear bearing 51 and the second linear bearing 52 are both connected with the movable platform 6; the movable platform 6 can reciprocate along a first direction or a second direction under the driving of the driving device, and the first direction and the second direction are mutually vertical.
The following describes the movement mechanism of the device of the present invention with the X-axis direction as the first direction and the Y-axis direction as the second direction:
when the movable platform needs to move along the X-axis direction, starting the first driving device 21, driving the first substrate 41 to move along the X-axis direction by the first driving device 21, and driving the movable platform 6 to move along the X-axis direction by the first substrate 41; similarly, when the movable platform 6 needs to move along the Y-axis direction, the second driving device 22 is started, the second driving device 22 drives the second substrate 42 to move along the Y-axis direction, and the second substrate 42 drives the movable platform 6 to move along the Y-axis direction.
Specifically, as shown in fig. 2 and 3, the base 1 includes a base plate 11, and a first fixing plate 12 and a second fixing plate 13 perpendicular to the base plate 11, two first fixing plates 12 are disposed in parallel at an interval to form a first groove 14, two second fixing plates 13 are disposed in parallel at an interval to form a second groove 15, a first driving device 21 is fixed in the first groove 14, a second driving device 22 is fixed in the second groove 15, two first guide rails 31 are respectively disposed on upper surfaces of the two first fixing plates 12, and two second guide rails 32 are respectively disposed on upper surfaces of the two second fixing plates 13.
More specifically, as shown in fig. 2, the first driving device 21 includes a first stator 211 and a first mover 212, the first stator 211 is fixedly disposed in the first groove 14, and the first mover 212 is coupled to the first substrate 41; the second driving device 22 includes a second stator 221 and a second mover 222, the second stator 221 is fixedly disposed in the second groove 15, and the second mover 222 is coupled to the second base plate 42. In this embodiment, the first stator 211 and the second stator 221 are both permanent magnets having a U-shaped structure, and the first rotor 221 and the second rotor 222 are coils. When the first driving device 21 operates, the first mover 212 is energized, and the first mover 212 is acted by lorentz force in a magnetic field and moves back and forth in the first stator 211, so as to drive the first substrate 41 to move back and forth along the length direction of the first guide rail 31; the second drive means 22 operates on the same principle as the first drive means 21. It should be noted that, the driving device in the present application may be an existing linear motor, and the stator and the mover structure of the existing linear motor are also applicable to the device in the present application.
In this embodiment, the first guide rail 31 includes a first slide rail 311 and a first slide block 312, the first slide block 312 is slidably connected to the first slide rail 311, the two first slide rails 311 are respectively disposed on the upper surface of the first fixing plate 12, and the first slide block 312 is connected to the first substrate 41; the second guide rail 32 includes a second slide rail 321 and a second slide block 322, the second slide block 322 is slidably connected to the second slide rail 321, the two second slide rails 321 are respectively disposed on the upper surface of the second fixing plate 13, and the second slide block 322 is connected to the second base plate 42.
In addition, the apparatus in this embodiment further includes a grating scale reading head and a scale for detecting linear displacements of the movable platen 6 in the X-axis direction and the Y-axis direction. The grating scale reading head comprises a first grating scale reading head 71 and a second grating scale reading head 72, the scale comprises a first scale 81 and a second scale 82, and the first grating scale reading head 71 and the first scale 81 are arranged on the first substrate 41 and are parallel to the first linear bearing 51 and used for detecting the linear displacement of the movable platform 6 in the Y-axis direction; the second scale reading head 72 and the second scale 82 are provided on the second substrate 42 in parallel with the second linear bearing 52, and are used for detecting linear displacement of the movable platen 6 in the X-axis direction. Specifically, as shown in fig. 4, the first substrate 41 includes a first plate 411 and a first support plate 412 perpendicular to the first plate 411, the first linear bearing 51 is disposed on the upper surface of the first plate 411, the first mover 212 is connected to the lower surface of the first plate 411, the first support plate 412 is disposed on one side of the first plate 411 and is parallel to the first linear bearing 51, the first grating scale reading head 71 and the first scale 81 are respectively disposed on the first support plate 411, and one side of the first support plate 411 and the first scale displaying data face outward, so as to facilitate reading; the second substrate 42 includes a second plate 421 and a second supporting plate 422 perpendicular to the second plate 421, the second supporting plate 422 is disposed on one side of the second plate 421 and is parallel to the second linear bearing 52, the second linear bearing 52 is disposed on the upper surface of the second plate 421, the second mover 222 is connected to the lower surface of the second plate 421, the second grating scale reading head 72 and the second scale 82 are disposed on the second supporting plate 422 respectively, and one side of the two that displays data faces outward, so as to facilitate reading.
The apparatus of the present invention may be mounted on the platform 10 for use, and may be more stable in operation, or may be readily used in different work environments.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (8)
1. The utility model provides a unilateral linear electric motor driven coplane telecontrol equipment for optoelectronic device encapsulation, its characterized in that, from the bottom up includes base, drive module in proper order and moves the platform, drive module includes first drive module and second drive module, and first drive module and second drive module are type T shape structure setting, first drive module drive move the platform along the first direction motion, the second drive module drive move the platform along with the motion of first direction vertically second direction.
2. The coplanar motion device driven by the unilateral linear motor for packaging the optoelectronic device is characterized in that the driving module comprises a driving device, a guide rail, a substrate and a linear bearing; the driving device comprises a first driving device and a second driving device, the guide rail comprises a first guide rail and a second guide rail, the base plate comprises a first base plate and a second base plate, and the linear bearing comprises a first linear bearing and a second linear bearing; the first driving device and the second driving device are arranged on the base in a T-like shape, the two first guide rails are arranged on two sides of the first driving device in parallel, and the two second guide rails are arranged on two sides of the second driving device in parallel; the lower surface of the first substrate is respectively connected with the first guide rail and the first driving device, and the first substrate can reciprocate along the length direction of the first guide rail under the driving of the first driving device; the lower surface of the second substrate is connected with the second guide rail and a second driving device, and the second substrate can reciprocate along the length direction of the second guide rail under the driving of the second driving device; the first linear bearing is arranged on the upper surface of the first substrate and is vertical to the first guide rail, and the second linear bearing is arranged on the upper surface of the second substrate and is vertical to the second guide rail; the first linear bearing and the second linear bearing are both connected with the movable platform; the movable platform can reciprocate along a first direction or a second direction under the driving of the driving device, and the first direction and the second direction are mutually vertical.
3. The single-sided linear motor driven coplanar motion device for packaging optoelectronic devices as claimed in claim 1, wherein the base comprises a bottom plate and a first fixing plate and a second fixing plate perpendicular to the bottom plate, wherein two first fixing plates are disposed in parallel and spaced to form a first groove, two second fixing plates are disposed in parallel and spaced to form a second groove, the first driving device is fixed in the first groove, the second driving device is fixed in the second groove, two first guide rails are respectively disposed on the upper surfaces of the two first fixing plates, and two second guide rails are respectively disposed on the upper surfaces of the two second fixing plates.
4. The single-sided linear motor driven coplanar motion device for packaging optoelectronic devices as claimed in claim 3, wherein the first driving device comprises a first stator and a first mover, the second driving device comprises a second stator and a second mover, the first stator and the second stator are respectively fixed in the first groove and the second groove, and the first mover and the second mover are respectively connected with the first substrate and the second substrate.
5. The single sided linear motor driven coplanar motion device for packaging optoelectronic devices as claimed in claim 3 wherein the first guide rail comprises a first slide rail and a first slider, the first slider and the first slide rail being slidably connected; the two first sliding rails are respectively arranged on the upper surface of the first fixing plate, and the first sliding block is connected with the first substrate.
6. The single sided linear motor driven coplanar motion device for packaging optoelectronic devices as claimed in claim 3 wherein the second guide rail comprises a second slide rail and a second slider, the second slider and the second slide rail being slidably connected; the two second slide rails are respectively arranged on the upper surface of the second fixing plate, and the second slide block is connected with the second substrate.
7. The single sided linear motor driven co-planar motion device for optoelectronic device packaging of claim 1, further comprising a grating reading head comprising a first grating reading head and a second grating reading head and a scale comprising a first scale and a second scale; the first grating ruler reading head and the first ruler are respectively arranged on one side of the first substrate and are parallel to the first linear bearing, and the second grating ruler reading head and the second ruler are respectively arranged on one side of the second substrate and are parallel to the second linear bearing.
8. The single-sided linear motor driven coplanar motion device for packaging optoelectronic devices as set forth in claim 7, wherein the first substrate comprises a first plate and a first support plate perpendicular to the first plate, the first linear bearing is fixed on the upper surface of the first plate, the first support plate is disposed on one side of the first plate and parallel to the first linear bearing, the first grating scale head and the first scale are disposed on the first support plate respectively; the second substrate comprises a second flat plate and a second supporting plate perpendicular to the second flat plate, the second linear bearing is fixed on the upper surface of the second flat plate, the second supporting plate is arranged on one side of the second flat plate and is parallel to the second linear bearing, and the second grating scale reading head and the second scale are respectively arranged on the second supporting plate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110907974.8A CN113691098B (en) | 2021-08-09 | 2021-08-09 | Coplanar motion device driven by single-side linear motor for packaging optoelectronic device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110907974.8A CN113691098B (en) | 2021-08-09 | 2021-08-09 | Coplanar motion device driven by single-side linear motor for packaging optoelectronic device |
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| CN113691098B CN113691098B (en) | 2023-01-24 |
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|---|---|---|---|---|
| CN201364459Y (en) * | 2009-01-20 | 2009-12-16 | 清华大学 | Double wafer stage exchanging device of photo-etching machine |
| JP2010041889A (en) * | 2008-08-07 | 2010-02-18 | Sinfonia Technology Co Ltd | Transfer apparatus |
| CN103137532A (en) * | 2011-11-22 | 2013-06-05 | 财团法人金属工业研究发展中心 | Coplanar three-axis positioning device |
| CN108470705A (en) * | 2018-03-13 | 2018-08-31 | 中南大学 | Plane motion platform applied to optoelectronic packaging |
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2021
- 2021-08-09 CN CN202110907974.8A patent/CN113691098B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010041889A (en) * | 2008-08-07 | 2010-02-18 | Sinfonia Technology Co Ltd | Transfer apparatus |
| CN201364459Y (en) * | 2009-01-20 | 2009-12-16 | 清华大学 | Double wafer stage exchanging device of photo-etching machine |
| CN103137532A (en) * | 2011-11-22 | 2013-06-05 | 财团法人金属工业研究发展中心 | Coplanar three-axis positioning device |
| CN108470705A (en) * | 2018-03-13 | 2018-08-31 | 中南大学 | Plane motion platform applied to optoelectronic packaging |
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