CN109256175A - High-precision large-stroke space translation mini positioning platform - Google Patents
High-precision large-stroke space translation mini positioning platform Download PDFInfo
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- CN109256175A CN109256175A CN201811323431.6A CN201811323431A CN109256175A CN 109256175 A CN109256175 A CN 109256175A CN 201811323431 A CN201811323431 A CN 201811323431A CN 109256175 A CN109256175 A CN 109256175A
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- G—PHYSICS
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- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Abstract
It is translatable mini positioning platform the present invention provides a kind of high-precision large-stroke space, can solve existing the concentrations flexibility locating platform that declines and be easy to appear stress and concentrate, and be difficult to ensure under the premise of high-precision the problem of realizing millimetre-sized big stroke.It includes pedestal, moving platform and three flexible branches, three orthogonal thereto arrangements of flexible branch, the both ends of flexible branch are respectively and fixedly connected on pedestal and moving platform, the voice coil motor driver for being respectively used to drive flexible branch is also equipped on pedestal, flexible branch includes driving pair, first passive secondary and the second passive pair；Driving pair, first are passively secondary and the second passive pair is made of symmetrically arranged composite-type flexible prismatic pair, and composite-type flexible prismatic pair includes two groups of flexible strips and same two flexible strips organized are parallel to each other, pass through rigid connector between flexible strip and connect.
Description
Technical field
The present invention relates to compliant mechanism field, specially a kind of high-precision large-stroke space translation mini positioning platform.
Background technique
Compliant mechanism is using the flexible deformation of material come the novel mechanism of passing movement, since the kinematic pair in mechanism is
Integrated flexible structure, so the shortcomings that influencing device longevity and precision there is no rigging error, friction, abrasion, gap etc..With
The fields such as microelectronics, the micro manufacturing of photoelectron element, MEMS, bioengineering to the further of positioning accuracy request
It improves, compliant mechanism is widely used in micro- positioning field and has immeasurable prospect, wherein space translation is micro-
Locating platform is widely used in the systems such as the 3-D scanning of atomic force microscope, micro-nano operation, advanced sensing.Currently, tool
The new configuration design of big stroke, high-precision and mobile decoupling is the research hotspot of space translation mini positioning platform.
Space translation mini positioning platform, which can be divided into, concentrates that flexibility declines locating platform and distribution flexibility declines locating platform,
It is middle concentrate flexibility decline locating platform research it is more, and for distribution flexibility decline locating platform research it is less.Such as patent
Number for ZL200620162291.5 patent of invention disclosed in three-translation orthogonal decoupling parallel micromotion platform and Patent No.
A kind of mobile complete submissive parallel micromotion platform of space three-dimensional, belongs to concentration disclosed in the patent of invention of ZL201510228721.2
Flexibility declines locating platform, and branch used in the platform is mostly the flexible hinge structure with notch, is not only easy in incision
There is stress to concentrate, and can not achieve full decoupled between each freedom of motion, therefore is difficult to ensure under the premise of high-precision
Realize millimetre-sized big stroke.
Summary of the invention
For existing concentration flexibility decline branch used in locating platform mostly be the flexible hinge structure with notch, not only
It is easy stress concentration occur in incision, and can not achieve between each freedom of motion full decoupled, it is difficult to guarantee high-precision
The technical issues of millimetre-sized big stroke is realized under the premise of degree, the present invention provides a kind of translation of high-precision large-stroke space is micro-
Locating platform belongs to distribution flexibility and declines locating platform, problem of stress concentration is not present, and be able to achieve it is full decoupled, it is fixed
Position is with high accuracy while being also able to achieve millimetre-sized big stroke.
Its technical solution is such that a kind of high-precision large-stroke space translation mini positioning platform comprising pedestal is moved and put down
Platform and three flexible branches, three orthogonal thereto arrangements of the flexible branch, the both ends of the flexibility branch are respectively and fixedly connected to described
On pedestal and the moving platform, it is characterised in that: be also equipped with the sound for being respectively used to drive the flexible branch on the pedestal
Motor driver is enclosed, the flexibility branch includes that driving pair, the first passive pair and second are passive secondary；The driving pair, the first quilt
Dynamic secondary and the second passive pair is made of symmetrically arranged composite-type flexible prismatic pair, and the composite-type flexible prismatic pair includes two
Two flexible strips of group flexible strip and same group are parallel to each other, and one end of first group of two flexible strips passes through
Rigid connector one connects, and one end of second group of two flexible strips is connected by rigid connector two, described in two groups
The other end of flexible strip is arranged in the same direction and is connected by rigid connector three；The rigid connector one of the driving pair is solid
It connects on the pedestal, the rigid connector two of the driving pair and the voice coil motor driver are connected to described
On the first passive secondary rigid connector one, the described first passive secondary rigid connector two is connected to described second
On the passive secondary rigid connector one, the described second passive secondary rigid connector two and the moving platform are affixed；
The driving pair, the first passive pair are orthogonal with the deformation direction of the flexible strip in the described second passive pair.
It is further characterized by:
The driving pair, the first passive secondary and described second passive pair are integrated machine-shaping.
The rigid connector one is U-shaped connector, and the rigid connector two is slab connector, the rigid connection
Part three is thin plate connector, and the both ends of the U-shaped connector are respectively equipped with the flange to extend internally, and two of first group are described soft
One end of property reed is connect with two flanges respectively, and flexible strip described in second group is inserted in parallel into described in two of first group
Between flexible strip and it is connected close to one end of the flange by the slab connector, and the slab connector stretches out institute
U-shaped connector is stated, the other end of flexible strip described in two groups is connected by the thin plate connector, the thin plate connector and institute
State between the inside bottom surface of U-shaped connector that there are gaps.
The driving pair includes four composite-type flexible prismatic pairs, described first passive secondary and the described second passive pair
It include two composite-type flexible prismatic pairs；Two composite-type flexible prismatic pairs in described second passive pair are opposite
Setting, and the rigid connector one and rigid connector 211 correspondence in two composite-type flexible prismatic pairs
Connection；Two composite-type flexible prismatic pairs in described first passive pair are symmetricly set on the described second passive secondary left and right
Two sides medium position；Four composite-type flexible prismatic pairs in the driving pair are separately positioned in the described first passive pair
Two composite-type flexible prismatic pairs two sides up and down, and four composite-type flexible prismatic pairs are in distributed rectangular.
The voice coil motor driver is mounted on the pedestal by mounting bracket, the mounting bracket and the voice coil
Motor driver is respectively positioned on the outside of the pedestal, and the mounting bracket is fixed on the pedestal, the voice coil motor driving
The fixing end of device is fixed in the mounting bracket, and the driving end of the voice coil motor driver connects after passing perpendicularly through the pedestal
It is connected to drive link, the both ends of the drive link are respectively and fixedly connected to the described first passive secondary left and right ends.
Three flexible branches spatially rotate 90 ° each other.
The beneficial effects of the present invention are:
Space of the invention is translatable mini positioning platform, flexible branch by driving pair, first it is passive secondary and second it is passive it is secondary successively
In series, driving pair, the first passive pair and the second passive pair are made of symmetrically arranged composite-type flexible prismatic pair respectively again,
Composite-type flexible prismatic pair includes two groups of flexible strips and, two of same group flexible springs parallel to each other with two flexible strips of group
Piece is connected by rigid connector, and the flexible strip of difference group is connected by rigid connector realizes differential concatenation, and actively
Pair, the first passive pair are orthogonal with the deformation direction of flexible strip in the second passive pair, constitute and are distributed the translation of flexibility formula space
The deformation of mini positioning platform, material can be evenly distributed on entire reed, because without stress concentration phenomenon, by using this
The composite-type flexible prismatic pair of kind structure constitutes flexible branch, can effectively eliminate parasitic error when kinematic pair deformation, and move
It is formed greatly, so that platform movement realization is full decoupled, ensure that and be also able to achieve millimetre-sized big stroke while positioning accuracy is high.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the connection relationship diagram of voice coil motor driver, mounting bracket, drive link and flexible branch；
Fig. 3 is the structural schematic diagram of flexible branch；
Fig. 4 is the structural schematic diagram of composite-type flexible prismatic pair.
Appended drawing reference: 1- pedestal；2- moving platform；3- flexibility branch；4- voice coil motor driver；5- flexible strip；6- is rigid
Property connector one；7- rigid connector two；8- rigid connector three；9- mounting bracket；10- drive link；30- composite-type flexible
Prismatic pair；31- driving pair；32- first is passive secondary；33- second is passive secondary；61- flange.
Specific embodiment
See Fig. 1 to Fig. 4, translation mini positioning platform in a kind of high-precision large-stroke space of the invention comprising pedestal 1 moves
Platform 2 and three flexible branches 3, are shown in that Fig. 1, pedestal 1 are made of three orthogonal planes, and moving platform 2 is made of three orthogonal connecting rods,
Such structure is convenient for assembling；Three orthogonal thereto arrangements of flexible branch 3, the both ends of flexible branch 3 are respectively and fixedly connected to pedestal 1 and move flat
On platform 2, the voice coil motor driver 4 for being respectively used to drive flexible branch 3 is also equipped on pedestal 1；Flexible branch 3 includes actively
The passive pair 32 of pair 31, first and the second passive pair 33；The passive pair 32 of driving pair 31, first and the second passive pair 33 are by symmetrically setting
The composite-type flexible prismatic pair 30 set forms, and composite-type flexible prismatic pair 30 includes two groups of flexible strips 5 and same two organized are soft
Property reed 5 it is parallel to each other, one end of first group of two flexible strips 5 is connected by rigid connector 1, two of second group
One end of flexible strip 5 is connected by rigid connector 27, and the other end of two groups of flexible strips 5 is arranged in the same direction and passes through rigidity
Connector 38 connects；The rigid connector 1 of driving pair 31 is fixed on pedestal 1 by screw, the rigid connection of driving pair 31
Part 27 and voice coil motor driver 4 are connected on the rigid connector 1 of the first passive pair 32, the first passive pair 32
Rigid connector 27 is connected on the rigid connector 1 of the second passive pair 33, the rigid connector 27 of the second passive pair 33
It is affixed by screw and moving platform 2, the deformation of driving pair 31, first passive pair 32 and the flexible strip 5 in the second passive pair 33
Direction is orthogonal.Platform of the invention, the passive pair 32 of driving pair 31, first and the second passive pair 33 are integrated machine-shaping, tie
Structure is compact, reduces rigging error.
See that Fig. 4, rigid connector 1 are U-shaped connector, rigid connector 27 is slab connector, rigid connector three
8 be thin plate connector, and the both ends of U-shaped connector are respectively equipped with the flange 61 to extend internally, first group of two flexible strips 5
One end is connect with two flanges 61 respectively, and second group of flexible strip 5 is inserted in parallel between first group of two flexible strips 5 and it
Connected close to one end of flange 61 by slab connector, slab connector stretching U-shaped connector, two groups of flexible strips 5 it is another
One end is connected by thin plate connector, and there are gaps between thin plate connector and the inside bottom surface of U-shaped connector.It is designed in this way,
The structure of composite-type flexible prismatic pair is simple, easy to process.
See Fig. 3, driving pair 31 includes four composite-type flexible prismatic pairs 30, and the first passive pair 32 and the second passive pair 33 are
Including two composite-type flexible prismatic pairs 30；Two composite-type flexible prismatic pairs 30 in second passive pair 33 are oppositely arranged, and
Rigid connector 1 and rigid connector 27 in two composite-type flexible prismatic pairs 30 connect one to one, thus the second quilt
Two composite-type flexible prismatic pairs 30 in dynamic pair 33 are connected as one；Two composite-type flexibles in first passive pair 32 are mobile
Pair 30 is symmetricly set on the left and right sides medium position of the second passive pair 33, and the slab connector of the first passive pair 32 stretches out U-shaped
It is connect after connector with the U-shaped connector side wall of the second passive pair 33；Four composite-type flexible prismatic pairs 30 in driving pair 31
The two sides up and down of two composite-type flexible prismatic pairs 30 in the first passive pair 32 are separately positioned on, and four composite-type flexibles move
Dynamic pair 30 is in distributed rectangular, and the slab connector of driving pair 31 stretches out the U-shaped connector after U-shaped connector with the first passive pair 32
Side wall connection.It is designed in this way, in the change for guaranteeing the flexible strip 5 in the passive pair 32 of driving pair 31, first and the second passive pair 33
Shape direction makes flexible branched structure more compact and reasonable while orthogonal, parasitism when can effectively eliminate kinematic pair deformation misses
Difference, and move and formed greatly, so that platform movement realization is full decoupled, it ensure that and be also able to achieve grade while positioning accuracy is high
Big stroke.
See Fig. 1 and Fig. 2, voice coil motor driver 4 is mounted on pedestal 1 by mounting bracket 9, mounting bracket 9 and voice coil
Motor driver 4 is respectively positioned on the outside of pedestal 1, and mounting bracket 9 is fixed on pedestal 1 by screw, voice coil motor driver 4
Fixing end is fixed in mounting bracket 9, and the driving end of voice coil motor driver 4 is connected with drive link after passing perpendicularly through pedestal 1
10, drive link 10 is in U-shape rod-like structure, and drive link 10 is sleeved on the outside of the first passive pair 32, and the two of drive link 10
End is fixed on the bottom surface of U-shaped connector of the first passive pair 32 respectively by screw.
See that Fig. 1, three flexible branches 3 spatially rotate 90 ° each other, be designed in this way, realize platform completely respectively to same
Property, no matter how pedestal is put, and can guarantee that moving platform locomitivity on three translation directions is identical.
When work, voice coil motor driver 4 drives corresponding flexible branch 3, makes the moving platform connecting with the flexibility branch 3
2 are translatable along the axial of the voice coil motor driver 4, and full decoupled between three flexible branches 3, are independent of each other.
Claims (6)
- The mini positioning platform 1. a kind of high-precision large-stroke space is translatable comprising the flexible branch of pedestal, moving platform and three, three The both ends of the orthogonal thereto arrangement of the flexibility branch, the flexibility branch are respectively and fixedly connected on the pedestal and the moving platform, It is characterized in that: being also equipped with the voice coil motor driver for being respectively used to drive the flexible branch, the flexibility on the pedestal Branch includes driving pair, first passive secondary and the second passive pair；The driving pair, first passive secondary and the second passive pair are by right Claim the composite-type flexible prismatic pair composition of setting, the composite-type flexible prismatic pair includes two of two groups of flexible strips and same group The flexible strip is parallel to each other, and one end of first group of two flexible strips is connected by rigid connector one, and second One end of two flexible strips of group is connected by rigid connector two, and the other end of flexible strip described in two groups is set in the same direction It sets and passes through rigid connector three and connect；The rigid connector one of the driving pair is fixed on the pedestal, the master It moves the secondary rigid connector two and the voice coil motor driver is connected to the described first passive secondary rigidity On connector one, the described first passive secondary rigid connector two is connected to the described second passive secondary rigid connection On part one, the described second passive secondary rigid connector two and the moving platform are affixed；The driving pair, first quilt It is dynamic secondary orthogonal with the deformation direction of the flexible strip in the described second passive pair.
- The mini positioning platform 2. a kind of high-precision large-stroke space according to claim 1 is translatable, it is characterised in that: the master Dynamic secondary, the described first passive secondary and described second passive pair is integrated machine-shaping.
- The mini positioning platform 3. a kind of high-precision large-stroke space according to claim 1 or 2 is translatable, it is characterised in that: institute Stating rigid connector one is U-shaped connector, and the rigid connector two is slab connector, and the rigid connector three is thin plate Connector, the both ends of the U-shaped connector are respectively equipped with the flange to extend internally, and the one of first group of two flexible strips End connect respectively with two flanges, flexible strip described in second group be inserted in parallel into first group two flexible strips it Between and its pass through the slab connector close to one end of the flange and connect, the slab connector stretches out the U-shaped connection The other end of part, flexible strip described in two groups is connected by the thin plate connector, and the thin plate connector is connect with the U-shaped There are gaps between the inside bottom surface of part.
- The mini positioning platform 4. a kind of high-precision large-stroke space according to claim 3 is translatable, it is characterised in that: the master Dynamic secondary including four composite-type flexible prismatic pairs, the described first passive pair and the described second passive pair include described in two Composite-type flexible prismatic pair；Two composite-type flexible prismatic pairs in described second passive pair are oppositely arranged, and two institutes It states the rigid connector one in composite-type flexible prismatic pair and the rigid connector 211 is correspondingly connected with；Described first Two composite-type flexible prismatic pairs in passive pair are symmetricly set on the described second passive secondary left and right sides medium position； Be separately positioned in the described first passive pair two of four composite-type flexible prismatic pairs in the driving pair are described multiple The two sides up and down of mould assembly compliant translational joint, and four composite-type flexible prismatic pairs are in distributed rectangular.
- The mini positioning platform 5. a kind of high-precision large-stroke space according to claim 4 is translatable, it is characterised in that: the sound Circle motor driver is mounted on the pedestal by mounting bracket, the mounting bracket and the equal position of the voice coil motor driver In the outside of the pedestal, the mounting bracket is fixed on the pedestal, and the fixing end of the voice coil motor driver is affixed In the mounting bracket, the driving end of the voice coil motor driver is connected with drive link after passing perpendicularly through the pedestal, The both ends of the drive link are respectively and fixedly connected to the described first passive secondary left and right ends.
- The mini positioning platform 6. a kind of high-precision large-stroke space according to claim 1 is translatable, it is characterised in that: three institutes It states flexible branch and spatially rotates 90 ° each other.
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| CN109256175B CN109256175B (en) | 2023-04-28 |
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| CN113246102A (en) * | 2021-05-27 | 2021-08-13 | 华南理工大学 | Rigid-flexible coupling device with variable flexibility direction and mechanical arm |
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