CN110211627A - High-precision large-stroke table space translation precisely locating platform effective greatly - Google Patents
High-precision large-stroke table space translation precisely locating platform effective greatly Download PDFInfo
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- CN110211627A CN110211627A CN201910397913.4A CN201910397913A CN110211627A CN 110211627 A CN110211627 A CN 110211627A CN 201910397913 A CN201910397913 A CN 201910397913A CN 110211627 A CN110211627 A CN 110211627A
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- 230000010354 integration Effects 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 4
- 235000007164 Oryza sativa Nutrition 0.000 claims description 3
- 241000276425 Xiphophorus maculatus Species 0.000 claims description 3
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- 235000009566 rice Nutrition 0.000 claims description 3
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- 230000033001 locomotion Effects 0.000 abstract description 14
- 230000008878 coupling Effects 0.000 abstract description 8
- 238000010168 coupling process Methods 0.000 abstract description 8
- 238000005859 coupling reaction Methods 0.000 abstract description 8
- 230000003071 parasitic effect Effects 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 description 4
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- 238000006073 displacement reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
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- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
It is translatable precisely locating platform the present invention provides a kind of high-precision large-stroke effective table space greatly, can solve that existing space translation precisely locating platform movement travel is small, effective table top is small, processability of product structure is poor and the coupling error of platform and the larger problem for causing platform positioning accuracy not high of parasitic corner.It includes pedestal, moving platform, rigid frame, the first flexible branch, the second flexible branch and electromagnetic driver；The square surrounding for being distributed in moving platform of four first flexibility branches is simultaneously located in rigid frame, and the first flexible branch, moving platform and rigid frame are arranged in X/Y plane；It is in horizontally disposed third flexible thin that first flexible branch, which includes two plate faces in the first longitudinally disposed flexible thin, four plate faces in longitudinally disposed and second flexible thin vertical with the first flexible thin, two plate faces,；Second flexible branch is arranged between moving platform and pedestal, including double four rod-type flexible modules, link block and four four rod-type flexible modules.
Description
Technical field
The present invention relates to compliant mechanism field, the table space translation effective greatly of specially a kind of high-precision large-stroke is accurate fixed
Bit platform.
Background technique
With the development of micro & nano technology, micro/nano level precisely locating platform plays more and more important work in all trades and professions
With.The development in the fields such as Precision Machining and accurate measurement, microelectronic engineering, bioengineering, nanometer science and technology is all be unable to do without
The support of micro & nano technology.In order to meet the requirement of micro & nano technology, transmission of the compliant mechanism as precisely locating platform is generallyd use
Mechanism passes through kinematic pair different from conventional rigid mechanism like that and connects realization movement and function with connecting rod, and compliant mechanism is to utilize material
The flexible deformation of material carrys out the novel mechanism of passing movement, due to the flexible structure that the kinematic pair in mechanism is integration, so not
The shortcomings that influencing device longevity and precision there are rigging error, friction, abrasion, gap etc..Space translation precisely locating platform quilt
It is widely used in the systems such as 3-D scanning, micro-nano operation, the advanced sensing of atomic force microscope, as compliant mechanism configuration is set
Theoretical gradual perfection is counted, novel space translation precisely locating platform continues to bring out, and has big stroke, high-precision, knot at present
The new configuration design for the advantages that structure is compact and mobile decoupling is the main direction of studying in the field.
Existing space translation precisely locating platform is mostly that three branch of concentration flexibility formula based on cut type flexible hinge is fixed
Bit platform, major defect are that movement travel is small, effective table top is small, processability of product structure is poor and the coupling error of platform and parasitic
Corner is larger to cause platform positioning accuracy not high.
Summary of the invention
It is mostly three branch of concentration flexibility formula based on cut type flexible hinge for existing space translation precisely locating platform
Locating platform, that there are movement travels is small, effective table top is small, processability of product structure is poor and the coupling error of platform and parasitic corner compared with
The technical problem for causing platform positioning accuracy not high greatly, it is flat that the present invention provides a kind of high-precision large-stroke table spaces effective greatly
Dynamic precisely locating platform, platform movement travel is larger, and effective table top is larger, has good processability of product structure, eliminates micro-
The movement of locating platform couples, and reduces parasitic corner, improves the positioning accuracy of platform.
Its technical solution is such that a kind of high-precision large-stroke table space translation precisely locating platform effective greatly,
Be characterized in that: it includes pedestal, moving platform, rigid frame, four the first flexible branches and one second flexible branch；Four institutes
It states the square surrounding for being distributed in the moving platform of the first flexibility branch and is located in the rigid frame, described first is flexible
Branch, the moving platform and the rigid frame are collectively arranged in X/Y plane；Described first flexible branch includes two plate faces
In the first longitudinally disposed flexible thin, four plate faces in the second longitudinally disposed and vertical with first flexible thin flexibility
Thin plate and two plate faces are in horizontally disposed third flexible thin；One end of two first flexible thins is connected by rigidity
Fitting one connects, and the other end is connected by rigid connector two；Four second flexible thins are symmetricly set in pairs
The left and right sides of first flexible thin, and one end and the rigid connector one are affixed, the other end and the rigid frame
Frame is affixed, and the rigid frame and the pedestal are affixed；It is flexible that two third flexible thins are symmetricly set on described first
The two sides up and down of thin plate, and one end and the rigid connector two are affixed, the other end and the moving platform are affixed；The rigidity
X is also respectively fixed in frame to electromagnetic driver and Y-direction electromagnetic driver, the X is to electromagnetic driver and Y-direction electromagnetic drive
The driving end of device is connect with two adjacent rigid connectors one respectively；Described second flexible branch setting is described dynamic flat
Between platform and the pedestal, the described second flexible branch includes that double four rod-type flexible modules, link block and four four rod-type are soft
Property module, four four rod-type flexible modules are in surrounding of the distributed rectangular in the link block, the four rod-type flexible die
Four the first flexible links in block are in horizontally disposed and in distributed rectangulars, and one end of four first flexible links passes through rigidity
Connector three and the pedestal are affixed, and the other end is affixed by rigid connector four and the link block；Double four rod-type
Flexible module includes eight in the second longitudinally disposed flexible link, and the lower end of eight the second flexible links is respectively and fixedly connected to square
Four inflection points of the rigid connector five of frame structure and four midpoints, positioned at four described second of the corner position
The upper end of flexible link passes through rigid connector six respectively and the moving platform is affixed, positioned at four described of the midpoint
The upper end of two flexible links is affixed by rigid connector seven and the link block；The drive of Z-direction electromagnetism is further fixed on the pedestal
Dynamic device, the driving end of the Z-direction electromagnetic driver and the bottom surface of the link block are affixed.
It is further characterized by:
The pedestal includes in horizontally disposed bottom plate and four in longitudinally disposed pillar, and four pillars are in rectangle point
Cloth, the lower end of the pillar are fixed on the bottom plate, and the edge of the rigid frame is fixed on four pillars.
The pillar is made into integration with the bottom plate, is provided with threaded hole on the top surface of the pillar, on the rigid frame
The corresponding threaded hole is provided with through-hole, screw one pass through be screwed in the threaded hole after the through-hole by the rigid frame with
The pillar is affixed.
The rigid connector one is U-shaped connector and its opening is towards the moving platform, and the rigid connector two is
Plate-like connecting member and the inside that the U-shaped connector is set, the both ends of the U-shaped connector be respectively equipped with extend internally it is convex
Edge, two first flexible thins are parallel to the support arm of the U-shaped connector and one end is solid with two flanges respectively
Connect, the other end is affixed with the plate-like connecting member, between the plate-like connecting member and the inner sidewall of the U-shaped connector there are
For the gap of first flexible thin deformation；Second flexible thin at left and right sides of first flexible thin
One end is fixed on the support arm of the U-shaped connector；The X distinguishes to the driving end of electromagnetic driver and Y-direction electromagnetic driver
It is connect with the rear end face of two adjacent U-shaped connectors.
The rigid frame is made into integration with the described first flexible branch, first flexible thin, the rigid connection
Part one, the rigid connector two and second flexible thin are made into integration.
The moving platform is rectangular plate-like structure, and the opening of the U-shaped connector is corresponded on the four edges of the moving platform
It is respectively equipped with convex block, the convex block protrudes into the opening of the U-shaped connector and there are gap, institutes between the U-shaped connector
State between the supporting arm front end of U-shaped connector and the moving platform that also there are gaps；The width of the third flexible thin is less than two
The distance between a described first flexible thin, the length direction both ends of the third flexible thin are respectively equipped with boss, are located at
The boss of front is fixed on the convex block, and the boss positioned at rear portion is fixed on the plate-like connecting member.
The boss positioned at front is fixed on the convex block by two screws two, and the boss positioned at rear portion is logical
Two screws three are crossed to be fixed on the plate-like connecting member.
The rigid connector three is box-shaped structure, is also connected integrally formed with the rigidity on the bottom plate of the pedestal
The one-to-one supporting block of fitting three, four rigid connectors three are fixed in four supporting blocks by screw four respectively
On.
The link block includes square module and cross module, and the cross module is fixed in the square module
Top surface on；Four four rod-type flexible modules are in surrounding of the distributed rectangular in the square module, the rigid connector
Four are square platy structure and are fixed on the side of the square module by screw；The cross module protrudes into described double
The inside of four rod-type flexible modules, the rigid connector seven are cross plate structure and its center and the cross module
End face center by screw it is affixed；The rigid connector six is box-shaped structure and is in rice word with the rigid connector seven
Type arrangement, there are gap between the rigid connector six and the rigid connector seven, the rigid connector six passes through spiral shell
Nail is fixed on the bottom surface of the moving platform, and the top surface of the rigid connector six is higher than the top surface of the rigid connector seven.
Four first flexible links, the rigid connector three and the rigid connector four are made into integration；Eight institutes
The second flexible link, the rigid connector five, the rigid connector six and the rigid connector seven is stated to be made into integration.
The beneficial effects of the present invention are:
For translation precisely locating platform in space of the invention altogether there are five flexible branch, the first flexible branch, which is formed, is based on flexible thin
Distribution flexibility formula structure, the second flexible branch forms the distribution flexibility formula structure based on flexible link, enables the deformation of material
Power is stronger, and the movement travel of platform is larger；Four first flexible, and branch is square is distributed in X/Y plane, the second flexible branch
Be arranged in Z-direction, X/Y plane four first flexible branches can eliminate platform along X(Y) direction movement when in Y(X) direction
Coupling displacement and platform be displaced and reduce the parasitic corner of platform in the coupling of X, Y-direction when moving along Z-direction, second is flexible
Branch can be eliminated and is displaced when platform is moved along X, Y-direction in the coupling of Z-direction；Simultaneously as the third on the first flexible branch
Flexible thin is symmetricly set on the two sides up and down of the first flexible thin, so that the axial direction that the first flexible branch is greatly shortened is long
Degree, not only ensure that the compact-sized of platform, but also effective footprint of moving platform is capable of increasing under same platform area,
To make space of the invention be translatable, precisely locating platform movement travel is larger, and effective table top is larger, has good structure work
Skill, the feasibility and economy of processing and manufacturing are higher, and eliminate the movement coupling of mini positioning platform, reduce parasitic turn
Angle improves the positioning accuracy of platform.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the overall structure diagram of pedestal；
Fig. 3 is the connection relationship diagram of rigid frame, the first flexible branch and moving platform；
Fig. 4 is the view in the direction A along Fig. 1 of rigid frame, the first flexible branch and moving platform；
Fig. 5 is the explosive view of the second flexible branch.
Appended drawing reference:
1- pedestal；11- bottom plate；12- pillar；13- threaded hole one；14- supporting block；15- screw four；
2- moving platform；21- convex block；22- threaded hole two；
3- rigid frame；31- through-hole；32- screw one；
The flexible branch of 4- first；The first flexible thin of 41-；The second flexible thin of 42-；43- third flexible thin；431- boss；
432- screw two；433- screw three；44- rigid connector one；441- flange；45- rigid connector two；
The flexible branch of 5- second；The bis- four rod-type flexible modules of 51-；The second flexible link of 511-；512- rigid connector five；513- is rigid
Property connector six；514- rigid connector seven；521- square module；522- cross module；Tetra- rod-type flexible module of 53-；
The first flexible link of 531-；532- rigid connector three；533- rigid connector four；
6- X is to electromagnetic driver；
7-Y is to electromagnetic driver；
8- Z-direction electromagnetic driver.
Specific embodiment
See Fig. 1 to Fig. 5, a kind of high-precision large-stroke of the invention table space effective greatly is translatable precisely locating platform,
Including pedestal 1, moving platform 2, rigid frame 3, four first flexible branches 4 and one second flexible branch 5；Pedestal 1 is including being in
Horizontally disposed bottom plate 11 and four are in longitudinally disposed pillar 12, and four pillars 12 are in distributed rectangular, and the lower end of pillar 12 is solid
It connects on bottom plate 11 and is integrally formed with bottom plate 11；The four first square surroundings for being distributed in moving platform 2 of flexible branch 4 are simultaneously
In rigid frame 3, the first flexible branch 4, moving platform 2 and rigid frame 3 are collectively arranged in X/Y plane；First flexible branch
Chain 4 include two plate faces in longitudinally disposed 41, four plate faces of the first flexible thin in it is longitudinally disposed and with the first flexible thin
41 the second vertical flexible thins 42 and two plate faces are in horizontally disposed third flexible thin 43；Two the first flexible thins
41 one end is connected by rigid connector 1, and the other end is connected by rigid connector 2 45, the first flexible thin 41, rigid
Property connector 1 and the flexible branch 4 of the composition of rigid connector 2 45 first it is first passive secondary；Four the second flexible thins 42
It is symmetricly set on the left and right sides of the first flexible thin 41 in pairs, and one end and rigid connector 1 are affixed, it is another
Hold affixed with rigid frame 3, the edge of rigid frame 3 is fixed on four pillars 12, and four the second flexible thins 42 form the
The driving pair of one flexible branch 4；Two third flexible thins 43 are symmetricly set on the two sides up and down of the first flexible thin 41, and its
One end and rigid connector 2 45 are affixed, and the other end and moving platform 2 are affixed, two flexible branch of the composition of third flexible thin 43 first
The second of chain 4 is passive secondary；X is also respectively fixed in rigid frame 3 to electromagnetic driver 6 and Y-direction electromagnetic driver 7, X is to electromagnetism
The driving end of driver 6 and Y-direction electromagnetic driver 7 is connect with two adjacent rigid connectors 1 respectively, is used for first
Flexible branch 4 inputs X-direction displacement and Y-direction displacement；Second flexible branch 5 is arranged between moving platform 2 and pedestal 1, and second
Flexible branch 5 includes double four rod-type flexible modules 51, link block and four four rod-type flexible modules 53, and four four rod-type are flexible
Module 53 is in surrounding of the distributed rectangular in link block, and four the first flexible links 531 in four rod-type flexible modules 53 are in water
Flat to be arranged and be in distributed rectangular, one end of four the first flexible links 531 is affixed by rigid connector 3 532 and pedestal 1, another
End is affixed by rigid connector 4 533 and link block, and four four rod-type flexible modules 53 constitute the master of the second flexible branch 5
Dynamic pair；It is in the second longitudinally disposed flexible link 511 that double four rod-type flexible modules 51, which include eight, eight the second flexible links 511
Lower end be respectively and fixedly connected to the rigid connector 5 512 of square frame structure four inflection points and four midpoints, be located at
The upper end of four the second flexible links 511 of corner position passes through rigid connector 6 513 respectively and moving platform 2 is affixed, is located at
The upper end of four the second flexible links 511 of point position is affixed by rigid connector 7 514 and link block, and double four rod-type are flexible
Module 51 constitutes the passive pair of the second flexible branch 5；Z-direction electromagnetic driver 8, Z-direction electromagnetic driver 8 are further fixed on pedestal 1
Driving end and link block bottom surface it is affixed.(X is to electromagnetic driver 6, Y-direction electromagnetic driver 7, Z-direction for three electromagnetic drivers
Electromagnetic driver 8) control mechanism three directions in space respectively translational motion, mutually indepedent, without motion between each movement
Coupling.
See Fig. 1 to Fig. 3, threaded hole 1 is provided on the top surface of pillar 12, threaded hole 1 is corresponded on rigid frame 3 and is provided with
Through-hole 31, screw 1 are screwed in threaded hole 1 that rigid frame 3 and pillar 12 is affixed after through-hole 31.So set
Meter, convenient for assembling.
See Fig. 1 and Fig. 3, rigid connector 1 is U-shaped connector and its opening towards moving platform 2, rigid connector two
45 be plate-like connecting member and the inside that U-shaped connector is arranged in, and the both ends of U-shaped connector are respectively equipped with the flange to extend internally
441, two the first flexible thins 41 are parallel to the support arm of U-shaped connector and one end is affixed with two flanges 441 respectively, another
End is affixed with plate-like connecting member, and there are become for the first flexible thin 41 between plate-like connecting member and the inner sidewall of U-shaped connector
The gap of shape；The branch of U-shaped connector is fixed in positioned at one end of the second flexible thin 42 of 41 left and right sides of the first flexible thin
On arm；X is to the driving end of electromagnetic driver 6 and Y-direction electromagnetic driver 7 rear end face with two adjacent U-shaped connectors respectively
Connection.It is designed in this way, it is compact-sized, and manufacture easy to process.
See that Fig. 1 and Fig. 3, moving platform 2 are rectangular plate-like structure, the opening of U-shaped connector is corresponded on the four edges of moving platform 2
It is respectively equipped with convex block 21, convex block 21 protrudes into the opening of U-shaped connector and between U-shaped connector there are gap, U-shaped connector
Also there are gaps between supporting arm front end and moving platform 2；Less than two the first flexible thins 41 of the width of third flexible thin 43 it
Between distance, the length direction both ends of third flexible thin 43 are respectively equipped with boss 431, opened on boss 431 there are two counter sink,
Threaded hole 2 22 corresponding with counter sink, the boss positioned at front are drilled in the upper and lower surface of convex block 21 and plate-like connecting member respectively
431 are fixed on convex block 21 by two screws 2 432, and the boss 431 positioned at rear portion is fixed in plate by two screws 3 433
On shape connector.It is designed in this way, it is compact-sized convenient for the assembling of third flexible thin.
See that Fig. 1, Fig. 2 and Fig. 5, rigid connector 3 532 are box-shaped structure, is also integrally formed on the bottom plate 11 of pedestal 1
Have with the one-to-one supporting block 14 of rigid connector 3 532, four rigid connectors 3 532 respectively by screw 4 15 it is affixed
In four supporting blocks 14.It is designed in this way, supporting block can prop up the second flexible branch, reserve sky for the deformation of the first flexible link
Between, while installation space also is left for Z-direction electromagnetic driver, it is compact-sized reasonable.
See Fig. 5, link block includes square module 521 and cross module 522, and cross module 522 is fixed in rectangular
On the top surface of module 521；Four four rod-type flexible modules 53 are in surrounding of the distributed rectangular in square module 521, rigid connector
4 533 are square platy structure and are fixed on four sides of square module 521 by screw；Cross module 522 protrudes into
The inside of double four rod-type flexible modules 51, rigid connector 7 514 are cross plate structure and its center and cross module
522 end face center is affixed by screw；Rigid connector 6 513 is box-shaped structure and is in rice with rigid connector 7 514
Font arrangement, there are gap between rigid connector 6 513 and rigid connector 7 514, rigid connector 6 513 passes through screw
It is fixed on the bottom surface of moving platform 2, the top surface of rigid connector 6 513 is higher than the top surface of rigid connector 7 514.So set
Meter, it is compact-sized reasonable convenient for the assembling of the second flexible branch.
Rigid frame 3 is made into integration with the first flexible branch 4, and the first flexible thin 41, rigid connector 1, rigidity connect
Fitting 2 45 and the second flexible thin 42 are made into integration；Four the first flexible links 531, rigid connector 3 532 and rigidity connect
Fitting 4 533 is made into integration；Eight the second flexible links 511, rigid connector 5 512, rigid connector 6 513 and rigid connection
Part 7 514 is made into integration.It is designed in this way, rigging error is not present, the precision and service life of mechanism can be improved.
Claims (10)
- The precisely locating platform 1. a kind of high-precision large-stroke table space effective greatly is translatable, it is characterised in that: it includes pedestal, moves Platform, rigid frame, four the first flexible branches and one second flexible branch；Four the described first flexible branches are square It is distributed in the surrounding of the moving platform and is located in the rigid frame, the first flexible branch, the moving platform and described Rigid frame is collectively arranged in X/Y plane；Described first flexible branch includes two plate faces in the first longitudinally disposed flexible thin Plate, four plate faces are in level in the second flexible thin and two plate faces longitudinally disposed and vertical with first flexible thin The third flexible thin of setting；One end of two first flexible thins is connected by rigid connector one, and the other end passes through Rigid connector two connects；Four second flexible thins are symmetricly set on the left and right of first flexible thin in pairs Two sides, and one end and the rigid connector one are affixed, the other end and the rigid frame are affixed, the rigid frame and institute It is affixed to state pedestal；Two third flexible thins are symmetricly set on the two sides up and down of first flexible thin, and one end Affixed with the rigid connector two, the other end and the moving platform are affixed；X is also respectively fixed in the rigid frame to electricity Magnetic driven device and Y-direction electromagnetic driver, the X to the driving end of electromagnetic driver and Y-direction electromagnetic driver respectively with it is adjacent Two rigid connectors one connect；Described second flexible branch is arranged between the moving platform and the pedestal, described Second flexible branch includes double four rod-type flexible modules, link block and four four rod-type flexible modules, four four rod-type Flexible module is in surrounding of the distributed rectangular in the link block, and four the first flexible links in the four rod-type flexible module are equal In being horizontally disposed with and being in distributed rectangular, one end of four first flexible links is solid by rigid connector three and the pedestal It connects, the other end is affixed by rigid connector four and the link block；Double four rod-type flexible modules include eight in vertical To the second flexible link of setting, the lower end of eight the second flexible links is respectively and fixedly connected to the rigid connector of square frame structure Five four inflection points and four midpoints, the upper end positioned at four second flexible links of the corner position pass through respectively Rigid connector six and the moving platform are affixed, pass through positioned at the upper end of four second flexible links of the midpoint rigid Property connector seven and the link block are affixed；Z-direction electromagnetic driver, the Z-direction electromagnetic drive are further fixed on the pedestal The driving end of device and the bottom surface of the link block are affixed.
- The precisely locating platform 2. a kind of high-precision large-stroke according to claim 1 table space effective greatly is translatable, it is special Sign is: the pedestal includes in horizontally disposed bottom plate and four in longitudinally disposed pillar, and four pillars are in rectangle Distribution, the lower end of the pillar are fixed on the bottom plate, and the edge of the rigid frame is fixed on four pillars.
- The precisely locating platform 3. a kind of high-precision large-stroke according to claim 2 table space effective greatly is translatable, it is special Sign is: the pillar is made into integration with the bottom plate, is provided with threaded hole on the top surface of the pillar, right on the rigid frame The threaded hole is answered to be provided with through-hole, screw one is screwed in the threaded hole after passing through the through-hole by the rigid frame and institute It is affixed to state pillar.
- The precisely locating platform 4. a kind of high-precision large-stroke according to claim 1 table space effective greatly is translatable, it is special Sign is: the rigid connector one is U-shaped connector and its opening is towards the moving platform, and the rigid connector two is plate Shape connector and the inside that the U-shaped connector is set, the both ends of the U-shaped connector be respectively equipped with extend internally it is convex Edge, two first flexible thins are parallel to the support arm of the U-shaped connector and one end is solid with two flanges respectively Connect, the other end is affixed with the plate-like connecting member, between the plate-like connecting member and the inner sidewall of the U-shaped connector there are For the gap of first flexible thin deformation；Second flexible thin at left and right sides of first flexible thin One end is fixed on the support arm of the U-shaped connector；The X distinguishes to the driving end of electromagnetic driver and Y-direction electromagnetic driver It is connect with the rear end face of two adjacent U-shaped connectors.
- The precisely locating platform 5. a kind of high-precision large-stroke according to claim 4 table space effective greatly is translatable, it is special Sign is: the rigid frame is made into integration with the described first flexible branch, first flexible thin, the rigid connector One, the rigid connector two and second flexible thin are made into integration.
- The precisely locating platform 6. a kind of high-precision large-stroke according to claim 4 table space effective greatly is translatable, it is special Sign is: the moving platform is rectangular plate-like structure, and the opening point of the U-shaped connector is corresponded on the four edges of the moving platform Not She You convex block, the convex block protrudes into the opening of the U-shaped connector and there are gap, the U between the U-shaped connector Also there are gaps between the supporting arm front end of shape connector and the moving platform；Less than two institutes of the width of the third flexible thin The distance between first flexible thin is stated, the length direction both ends of the third flexible thin are respectively equipped with boss, are located at front The boss be fixed on the convex block, the boss positioned at rear portion is fixed on the plate-like connecting member.
- The precisely locating platform 7. a kind of high-precision large-stroke according to claim 6 table space effective greatly is translatable, it is special Sign is: the boss positioned at front is fixed on the convex block by two screws two, and the boss positioned at rear portion is logical Two screws three are crossed to be fixed on the plate-like connecting member.
- The precisely locating platform 8. a kind of high-precision large-stroke according to claim 2 table space effective greatly is translatable, it is special Sign is: the rigid connector three is box-shaped structure, is also connected integrally formed with the rigidity on the bottom plate of the pedestal The one-to-one supporting block of fitting three, four rigid connectors three are fixed in four supporting blocks by screw four respectively On.
- The precisely locating platform 9. a kind of high-precision large-stroke according to claim 1 table space effective greatly is translatable, it is special Sign is: the link block includes square module and cross module, and the cross module is fixed in the square module Top surface on；Four four rod-type flexible modules are in surrounding of the distributed rectangular in the square module, the rigid connector Four are square platy structure and are fixed on the side of the square module by screw；The cross module protrudes into described double The inside of four rod-type flexible modules, the rigid connector seven are cross plate structure and its center and the cross module End face center by screw it is affixed；The rigid connector six is box-shaped structure and is in rice word with the rigid connector seven Type arrangement, there are gap between the rigid connector six and the rigid connector seven, the rigid connector six passes through spiral shell Nail is fixed on the bottom surface of the moving platform, and the top surface of the rigid connector six is higher than the top surface of the rigid connector seven.
- The precisely locating platform 10. a kind of high-precision large-stroke according to claim 1 table space effective greatly is translatable, it is special Sign is: four first flexible links, the rigid connector three and the rigid connector four are made into integration；Described in eight Second flexible link, the rigid connector five, the rigid connector six and the rigid connector seven are made into integration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910397913.4A CN110211627B (en) | 2019-05-14 | 2019-05-14 | High-precision large-stroke large-effective table top space translational precision positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910397913.4A CN110211627B (en) | 2019-05-14 | 2019-05-14 | High-precision large-stroke large-effective table top space translational precision positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110211627A true CN110211627A (en) | 2019-09-06 |
| CN110211627B CN110211627B (en) | 2023-12-22 |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201498217U (en) * | 2009-09-30 | 2010-06-02 | 江西理工大学 | Spatial three-translation micro-motion ultraprecise positioning platform |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| KR101340033B1 (en) * | 2012-06-28 | 2013-12-10 | 한국과학기술원 | 3 axes out-of-plane motion stage using flexure mechanism |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN105006254A (en) * | 2014-04-23 | 2015-10-28 | 东北大学 | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN107863130A (en) * | 2017-09-20 | 2018-03-30 | 宁波大学 | A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform |
| CN108461109A (en) * | 2018-03-29 | 2018-08-28 | 天津大学 | Three parallel guide type flexibility of one kind decoupling precision positioning structure |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| US20190094714A1 (en) * | 2017-09-26 | 2019-03-28 | Guangdong University Of Technology | Large load-bearing guide mechanism and multi-dof large-stroke high-precision motion platform system |
| CN209993352U (en) * | 2019-05-14 | 2020-01-24 | 江南大学 | High-precision large-stroke large-effective table board space translation precision positioning platform |
-
2019
- 2019-05-14 CN CN201910397913.4A patent/CN110211627B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201498217U (en) * | 2009-09-30 | 2010-06-02 | 江西理工大学 | Spatial three-translation micro-motion ultraprecise positioning platform |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
| KR101340033B1 (en) * | 2012-06-28 | 2013-12-10 | 한국과학기술원 | 3 axes out-of-plane motion stage using flexure mechanism |
| CN105006254A (en) * | 2014-04-23 | 2015-10-28 | 东北大学 | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN105931675A (en) * | 2016-04-13 | 2016-09-07 | 天津大学 | Parallel xyz three-freedom-degree micro-positioning platform |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN107863130A (en) * | 2017-09-20 | 2018-03-30 | 宁波大学 | A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform |
| US20190094714A1 (en) * | 2017-09-26 | 2019-03-28 | Guangdong University Of Technology | Large load-bearing guide mechanism and multi-dof large-stroke high-precision motion platform system |
| CN108461109A (en) * | 2018-03-29 | 2018-08-28 | 天津大学 | Three parallel guide type flexibility of one kind decoupling precision positioning structure |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN209993352U (en) * | 2019-05-14 | 2020-01-24 | 江南大学 | High-precision large-stroke large-effective table board space translation precision positioning platform |
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