CN107863130A - A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform - Google Patents
A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform Download PDFInfo
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- CN107863130A CN107863130A CN201710850236.8A CN201710850236A CN107863130A CN 107863130 A CN107863130 A CN 107863130A CN 201710850236 A CN201710850236 A CN 201710850236A CN 107863130 A CN107863130 A CN 107863130A
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Abstract
A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform, including fixed platform, moving platform, transverse motion mechanism and longitudinal motion mechanism, the motion in each direction are made up of respective displacement output unit, displacement transfer unit and auxiliary unit respectively；The output end of displacement output unit connects with the rigid link of displacement transfer unit；Displacement transfer unit and auxiliary unit are made up of respective rigid link and two groups of flexible thins respectively, first group of flexible thin connection rigid link and fixed platform, second group of flexible thin connection rigid link and moving platform；Lateral displacement transfer unit and first group of flexible thin of auxiliary unit are longitudinally disposed, and second group of flexible thin of lateral displacement transfer unit and auxiliary unit is transversely set.The present invention has that compact-sized, work top is big, displacement range is big, non-displacement couples, piezo actuator will not fall off in assembling process, sensor is easy of integration in the platform the advantages of.
Description
Technical field
The invention belongs to micro-/ nano field of locating technology, the micro-displacement mechanism being related in micro-/ nano alignment system, especially
It is related to a kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform.
Background technology
Flexible structure piezoelectric micromotion platform is to transmit the micro- of displacement and power by that can produce the flexible structure of elastic deformation
Displacement mechanism.Because it does not have hinge and bearing, so need not assemble, in the absence of drive gap, friction and wear is not produced；
Due to being driven using piezo actuator, therefore its displacement resolution can reach nanoscale, and the response time can reach Millisecond, and rigidity
Greatly, small volume, bearing capacity are strong.Therefore, it is widely used in Precision Machining and test, fiber alignment, micro- component assembly, thin
Born of the same parents' microoperation etc. is needed in the technical field that micro-/ nano positions.Such as, in accurate and Ultra-precision Turning, the micro- of cutter can be achieved
Feeding or the compensation of mismachining tolerance；In accurate measurement, the fine adjustment of sensor can be achieved；In scanning probe microscopy, together
Micro scanning probe is combined, and the measurement to microstructure appearance can be achieved；In fiber alignment, a diameter of several microns to ten are can be achieved
The fine registration of several microns of two optical fiber；In MEMS (MEMS) assemblings, it is combined with micro-clamp, can be by micro- axle, micro-
Gear is assembled into microcomponent；In bioengineering, it is combined with microshock probe, can be injected to cell or phase is extracted from cell
Answer composition.
Translation two-freedom flexible structure piezoelectric micromotion platform has two kinds of structure types of series and parallel.Tandem is
Other direction can be produced by, which being produced again in the moving platform (outer platform) for producing a direction motion (such as x to motion), moves (such as y
To motion) moving platform (inner platform), this platform structure is compact, inside and outside moving platform in motion without coupling (when platform along certain
Direction will not produce parasitic displacement when moving in other direction), but work top is small, and install and be used to drive inner platform with pretension
Piezo actuator it is difficult；Parallel is the motion for being realized using same moving platform all directions, whole flexible structure fine motion
Platform x to structure and size with its y to structure and size it is identical, required identified parameters are few, installation and pretension
Piezo actuator is convenient, and its combination property is better than tandem, but existing parallel structure is not complicated, compact, and work top is small, deposits
At displacement coupling (can be in other direction generation parasitic displacement when platform moves along certain direction).
CN201210477575.3 discloses a kind of Two-degree of freedom translational parallel high-bandwidth micro-motion platform, including micromotion platform
Main body, piezoelectric ceramic actuator and clamp of sensor in micromotion platform main body are non-on clamp of sensor
Contact capacitance sensor, micromotion platform main body include workbench, fixed frame and are symmetrically distributed in workbench surrounding
Two-stage drive side chain on orthogonal x, y direction and its corresponding two-stage auxiliary side chain, drive side chain and its corresponding auxiliary
Side chain is helped to be distributed in opposite directions；Two-stage drive side chain is that one-level drives side chain and secondary drive side chain, and two-stage auxiliary side chain is that one-level is auxiliary
Side chain and two level is helped to aid in side chain, wherein：One-level drives side chain and the both ends of one-level auxiliary side chain to be connected with fixed frame, two level
Driving side chain and two level auxiliary side chain include the flexible hinge that two ends add chamfering, flexible hinge one end and one-level driving side chain
The rectangular module for driving side chain intermediate projections by one-level connects, and the other end is connected with workbench；One-level drives side chain by pressing
Actuator is promoted and is deformed on x (or y) direction so that on the one-level auxiliary side chain, y (or x) direction on x (or y) direction
Secondary drive side chain and y (or x) direction on two level auxiliary side chain produce compatible deformation.
The shortcomings that this micromotion platform, is：1st, the direction of motion of the piezo actuator along moving platform is placed, and is taken up space big,
Platform structure is not compact, work top is small.2nd, the structure being amplified to piezo actuator output displacement, work are not provided with platform
The output displacement for making platform is small.3rd, it is not provided with avoiding it by pre-loading screw moment of torsion when carrying out pretension to piezo actuator in platform
The structure of effect, therefore piezo actuator can be acted on during pretension by the moment of torsion of pre-loading screw, so that piezo actuator
Destructible.4th, the structure positioned to piezo actuator both ends is not provided with platform, causes piezo actuator in assembling process
In easily come off.5th, sensor is fixed on fixed frame by clamp of sensor, causes platform structure huge, and sensor is surveyed
Head is not easy to adjust with the primary clearance between tested surface.
The content of the invention
It is an object of the invention to provide it is a kind of it is compact-sized, work top is big, displacement range is big, without parasitic displacement, press
Electric actuator will not fall off in assembling process, the sensor translation two-freedom parallel flexible structure piezoelectricity easy of integration in platform
Micromotion platform.
A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform, including fixed platform, moving platform, transverse movement machine
Structure and longitudinal motion mechanism, for moving platform inside fixed platform, the upper surface of moving platform protrudes from the upper surface of fixed platform, fixed platform
Upper surface protrude from the upper surface of each motion, the lower surface of fixed platform protrudes from the lower surface of moving platform and each motion
The lower surface of mechanism；The motion in each direction is single by respective displacement output unit, displacement transfer unit and auxiliary respectively
Member composition, displacement output unit by piezo actuator as power source, the displacement transfer unit in each direction and auxiliary unit with
The center line of moving platform is symmetrical, and displacement transfer unit is between displacement output unit and moving platform；
It is characterized in that：The output end of displacement output unit connects with the rigid link of displacement transfer unit；Displacement transmission
Unit and auxiliary unit are made up of respective rigid link and two groups of flexible thins respectively, and first group of flexible thin connection rigidity connects
Bar and fixed platform, second group of flexible thin connection rigid link and moving platform；The of lateral displacement transfer unit and auxiliary unit
One group of flexible thin is longitudinally disposed, and second group of flexible thin of lateral displacement transfer unit and auxiliary unit is transversely set；
Length travel transfer unit and first group of flexible thin of auxiliary unit are transversely set, and length travel transfer unit and auxiliary are single
Second group of flexible thin of member is longitudinally disposed.
Using laterally as x to longitudinal direction is as y to then transverse motion mechanism is x to displacement output unit, x to displacement transmission
To auxiliary unit, longitudinal motion mechanism is y to displacement output unit, y to displacement transfer unit, y to auxiliary unit by unit, x；With
The center of moving platform is the origin of coordinates, and x is to the center of displacement output unit and x to the center of displacement transfer unit rigid link, x
To the straight line that the center of auxiliary unit rigid link is linked to be as x-axis, y is to the center of displacement output unit and y to displacement transmission
To the straight line that the center of auxiliary unit rigid link is linked to be as y-axis, x-axis is moving platform in y by the center of unit rigid link, y
The center line in direction, y-axis are center line of the moving platform in x directions.
So that only x acts to displacement output unit as an example：When y is failure to actuate to displacement output unit, x is to displacement output unit
X is promoted to be translated to the rigid link of displacement transfer unit, moving platform translation, second group of flexible thin keeps transverse translation, simultaneously
First group of flexible thin produces flexural deformation to coordinate the displacement of rigid link, and x is same to displacement transfer unit and x to auxiliary unit
To motion.At the same time, y produces flexural deformation to assist to displacement transfer unit and y to the second of auxiliary unit group of flexible thin
Transfer the displacement of platform, y to displacement transfer unit and y to the rigid link of auxiliary unit, first group of flexible thin transfixion,
Y is oriented to displacement transfer unit and y to auxiliary unit to the motion of moving platform in the x-direction, makes moving platform only defeated in the x-direction
Go out displacement, without producing coupling displacement in y directions.
When y acts to displacement output unit simultaneously, x promotes rigidity of the x to displacement transfer unit to displacement output unit
Connecting rod is along x to translation, while y promotes y to be moved flat to the rigid link of displacement transfer unit along y to translation to displacement output unit
Platform export x to y to resultant displacement.Now, x is to displacement transfer unit and x to the first of auxiliary unit group of flexible thin, y
To displacement transfer unit and y to the second of auxiliary unit group of flexible thin simultaneously along x to flexural deformation is produced, to coordinate x to position
The displacement of transfer unit rigid link and moving platform in the x-direction is moved, y is to displacement transfer unit and y to auxiliary unit to moving platform
Motion in the x-direction is oriented to, and can eliminate the coupling displacement of moving platform in the y-direction；Y is to displacement transfer unit and y to auxiliary
First group of flexible thin of unit, x are to displacement transfer unit and x to the second of auxiliary unit group of flexible thin simultaneously along y to production
Raw flexural deformation, to coordinate the displacements of y to displacement transfer unit rigid link and moving platform in the y-direction, x is to displacement transfer unit
The motion of moving platform in the y-direction is oriented to auxiliary unit with x, the coupling displacement of moving platform in the x-direction can be eliminated.
Further, second group of flexible thin at least has a pair along the symmetrical thin plate of moving platform, first group of flexible thin tool
There is at least one pair of along the symmetrical thin plate of rigid link.
Further, moving platform is provided with the groove for accommodating second group of flexible thin, and second group of flexible thin is located in groove.
Further, the mounting hole of installation displacement transducer is set on fixed platform, and the rigid link of auxiliary unit, which is provided with, leads to
Hole, through hole align with mounting hole.Displacement transducer is inserted in mounting hole and through hole, is had on fixed platform and holding screw, clamp screw
Displacement transducer is fixed in mounting hole by nail.
Further, the motion in each direction is directed at an adjustment unit, and adjustment unit is located at moving platform and auxiliary is single
Between member, moving platform is provided with the tapped through hole for screwing adjustment unit；Adjustment unit is by Stiff Block and two flexible folding beam groups
Composition, each flexible folding beam group forms by a pair along the symmetrically arranged flexible folding beam of Stiff Block, flexible folding beam one end with
Stiff Block is connected, and the other end is connected with moving platform, and flexible folding beam is serpentine-like, and the end face of Stiff Block alignment sensor gauge head is survey
Amount face.When adjusting the primary clearance between transducer probe assembly and tested surface, adjusting screw is screwed in into tapped through hole, makes itself and regulation
The Stiff Block of unit is in contact, and then promotes Stiff Block, and elastic deformation occurs for flexible folding beam group, makes the tested surface on Stiff Block
One lateral movement of the rigid link into auxiliary unit, so as to realize primary clearance between displacement transducer gauge head and tested surface
Accurate adjustment.
Further, displacement output unit is made up of piezo actuator and displacement equations unit, and displacement equations unit includes one
To support arm, the first amplification bar assembly and the second amplification bar assembly；Piezo actuator is set between support arm, piezo actuator
Both ends are symmetrical with the center line of piezo actuator with a support arm contact, the first amplification bar assembly and the second amplification bar assembly respectively
Set, the first amplification bar assembly and the second amplification bar assembly are respectively comprising the first side lever, intermediate bar, the second side lever, the first side lever
Between the flexible thin between flexible thin, the first side lever and intermediate bar, the second side lever and intermediate bar between support arm
Flexible thin between flexible thin, the second side lever and support arm, flexible thin and the first side between the first side lever and support arm
Flexible thin dislocation between bar and intermediate bar, flexible thin and the second side lever between the second side lever and intermediate bar and support arm it
Between flexible thin dislocation, the flexible thin at intermediate bar both ends flushes；The intermediate bar of first amplification bar assembly is connected with fixed platform,
The intermediate bar of second amplification bar assembly is connected with the rigid link of displacement transmission mechanism, the first side lever, intermediate bar and the second side lever
For rigid element, flexible thin is elastomeric element.Flexible thin and the first side lever and centre between first side lever and support arm
Flexible thin dislocation between bar, the flexibility between flexible thin and the second side lever and support arm between the second side lever and intermediate bar
Thin plate misplaces, and refers to two flexible thins not point-blank.The thin plate dislocation at side lever both ends so that thin plate and side lever
Two lines of two tie points are in oblique line, the line segment of thin plate and two tie points of side lever are considered as into connecting rod, then the first side lever is formed
Connecting rod, the connecting rod that intermediate bar and the second side lever are formed is in arch-shaped, the position that connecting rod exports as lever amplification piezo actuator
Move.In addition, the output displacement of displacement equations unit is orthogonal with the deformation direction of piezo actuator, the whole of piezoelectric micromotion platform is reduced
Body size.Further, because the support arm of displacement equations unit both sides is only along piezo actuator axis direction output displacement, therefore piezoelectricity
Actuator is only acted in pretension and work by along the pressure of its axis direction, without being made by moment of torsion, moment of flexure, shearing
With.
Piezo actuator extend when, second amplification bar assembly intermediate bar pull displacement transmission mechanism rigid link to by
The direction translation of nearly piezo actuator, the flexible thin and the second side lever and its flexible thin at both ends at the first side lever and its both ends
Displacement amplifying mechanism is formed, the displacement to piezo actuator output is amplified, and flexible thin flexural deformation is to adapt to the first side
The displacement of bar, intermediate bar and the second side lever.
Further, support arm be provided with positioning side block and positioning bottom gear, positioning side block and positioning bottom keep off with support arm pair
In, positioning side block will position bottom confining in it, and positioning side block protrudes from the medial surface of support arm with bottom gear is positioned, and positions side block
Internal region allows the end of piezo actuator to insert, and positioning bottom gear props up the end of piezo actuator.Position side block and determine
The position bottom accurate position for limiting piezo actuator of gear, positioning bottom block resistance stops piezo actuator and departs from support arm, so that piezoelectricity is held
Row device will not fall off in assembling process.
Further, platform has upper outer cover plate, inward upper cover plate and lower cover.Upper outer cover plate seals fixed platform, displacement transmission
Unit and the rigid link of auxiliary unit and first group of flexible thin, and fixed by screw and fixed platform；Inward upper cover plate seals
Second group of flexible thin, adjustment unit of moving platform, displacement transfer unit and auxiliary unit, and consolidated by screw and moving platform
Fixed, inward upper cover plate and moving platform are provided with multiple screws for being used to install carrying object；Lower cover seals the bottom of platform, and leads to
Screw is crossed to fix with fixed platform.
It is an advantage of the invention that：
1) piezo actuator is placed perpendicular to the direction of motion of moving platform, is taken up space small；Meanwhile the displacement of a direction
Displacement can both be delivered to moving platform by transfer unit, again can along with the auxiliary unit in this direction to moving platform in another direction
Motion is oriented to, i.e., the displacement transfer unit and auxiliary unit in one direction are the guiding mechanism of other direction again simultaneously；Also
Have, in displacement transfer unit, auxiliary unit and adjustment unit insertion fixed platform and moving platform, these all cause platform overall structure
Simple and compact, the table top of moving platform are big.
2) input displacement of piezo actuator can be amplified 3~5 times by displacement equations unit, so that the carry-out bit of moving platform
Move scope and become big.
3) because moving platform is single along the displacement transfer unit and auxiliary during the output micro-displacement of certain direction by another direction
The guide effect of member, so the micro-displacement of moving platform in the direction is strict straight line micro-displacement, without being produced in other directions
Raw coupling displacement, so that the kinematic accuracy of moving platform greatly improves, and displacement transducer (such as capacitive displacement transducer)
Measurement result can directly reflect the accurate micro-displacement of moving platform.
4) piezo actuator is accurately positioned in displacement equations unit by positioning side block and positioning bottom gear, so that pressure
Electric actuator will not fall off in assembling process.
5) piezo actuator is only made in pretension and the course of work by along two support arm pressure of its displacement outbound course
With without being acted on by the pulling force of two support arms, shearing, moment of flexure, moment of torsion, so as to improve the use of piezo actuator well
Life-span.
6) it is that (such as capacitive displacement passes displacement transducer because platform overall structure simple and compact, each several part are rationally distributed
Sensor) it is integrated provide enough structure spaces so that the integrated change of displacement transducer (such as capacitive displacement transducer)
It must be very easy to.
7) because employ can between fine adjustment transducer probe assembly and tested surface primary clearance adjustment unit so that
The regulation of primary clearance becomes very convenient.
Brief description of the drawings
Fig. 1 is the tomograph of the present invention, wherein (a) does not include upper outer cover plate, inward upper cover plate, lower cover, (b) is bag
Top view when outer cover plate, inward upper cover plate, lower cover is included, (c) is facing upward when including outer cover plate, inward upper cover plate, lower cover
View.
Fig. 2 is the platform body structure figure of the present invention.
Fig. 3 is the displacement equations cellular construction figure of the present invention, wherein (a) is the top view of displacement equations unit, (b) is
(a) for A-A to sectional view, (c) is the B-B direction sectional view of (a).
Fig. 4 is the displacement transfer unit structure chart of the present invention.
Fig. 5 is the auxiliary unit structure chart of the present invention.
Fig. 6 is the adjustment unit structure chart of the present invention.
The piezo actuator that Fig. 7 is the present invention assembles schematic diagram.
Fig. 8 is the upper outer cover plate tomograph of the present invention.
Fig. 9 is the inward upper cover plate tomograph of the present invention.
Figure 10 is the lower cover tomograph of the present invention.
Embodiment
The present invention can both make moving platform only along x or y to output straight line micro-displacement, can make it simultaneously straight along x and y to output again
Line micro-displacement, embodiment are as follows.
A kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform, as shown in figure 1, being performed including stage body, piezoelectricity
Device, adjusting screw, upper outer cover plate, inward upper cover plate, lower cover, holding screw.
Stage body it is (as shown in Figure 2) include fixed platform 1, moving platform 2, x to displacement equations unit 3, x to displacement transfer unit 4,
X to auxiliary unit 5, x to adjustment unit 6, y to displacement equations unit 7, y to displacement transfer unit 8, y to auxiliary unit 9, y to
Adjustment unit 10, is integrated；The upper surface of fixed platform 1 is less than the upper surface of moving platform 2, and is higher than x to displacement equations
Unit 3, x pass to adjustment unit 6, y to position auxiliary body 5, x to displacement transfer unit 4, x to displacement equations unit 7, y to displacement
Unit 8, y are passed to position auxiliary body 9, y to the upper surface of this eight mechanisms of adjustment unit 10；The lower surface of fixed platform 1 is higher than dynamic
The lower surface of platform 2 and x are to displacement equations unit 3, x to displacement transfer unit 4, x to position auxiliary body 5, x to adjustment unit
6th, y is to displacement equations unit 7, y to displacement transfer unit 8, y to position auxiliary body 9, y to this eight mechanisms of adjustment unit 10
Lower surface.The upper surface of moving platform protrudes from the upper surface of fixed platform, so as to be more than the work of moving platform in moving platform loaded area
During part, workpiece does not rub with fixed platform.The upper surface of fixed platform protrudes from the upper surface of each motion, so that upper outer
Cover plate will not rub with each motion.The lower surface of fixed platform protrudes from the lower surface of moving platform and each motion
Lower surface so that lower cover will not rub with each motion.
There are counter sink 1-1-1,1-1-2,1-1-3,1-1-4, normal thread through hole 1-2-1,1-2-2,1-2- on fixed platform 1
3rd, 1-2-4, horizontal through hole 1-3-1,1-3-2, perpendicular screwed hole 1-4-1,1-4-2,1-4-3,1-4-4.Counter sink 1-1-1,1-
1-2,1-1-3,1-1-4 are combined with sunk screw to fix stage body；Normal thread through hole 1-2-1,1-2-2,1-2-3,1-2-4
It is combined with holding screw, upper outer cover plate and lower cover is individually fixed in the upper and lower surface of fixed platform 2；Horizontal through hole 1-3-
1st, 1-3-2 places the survey for measuring x, y of moving platform 2 to the sensor (such as capacitive displacement transducer) of output displacement respectively
Head；Perpendicular screwed hole 1-4-1,1-4-2 is combined with holding screw, will measure the x of moving platform 2 to the sensor of output displacement
(such as capacitive displacement transducer) gauge head is fixed on fixed platform 1, and perpendicular screwed hole 1-4-3,1-4-4 mutually tie with holding screw
Close, the y for measuring moving platform 2 is fixed on fixed platform 1 to sensor (such as capacitive displacement transducer) gauge head of output displacement.
There are perpendicular screwed hole 2-1-1~2-1-32, horizontal through hole 2-2-1,2-2-2, horizontal screw thread through hole 2- on moving platform 2
3-1、2-3-2.Perpendicular screwed hole 2-1-1,2-1-2,2-1-3,2-1-4 are combined with holding screw A, and inward upper cover plate is fixed on
The upper surface of moving platform 2, perpendicular screwed hole 2-1-5~2-1-32 are combined with holding screw, by different size of carrying object
It is fixed on moving platform 2；Horizontal through hole 2-2-1 be used for by x to piezo actuator be assembled to x into displacement equations unit when, wear
If make x to displacement equations unit along x to piezo actuator driving direction produce elongation strain actuation screw 20 (as shown in fig. 7,
In figure so that y assembles to piezo actuator as an example), horizontal through hole 2-2-2 is put for y to be assembled into y to piezo actuator to displacement
When in big unit, the actuation screw for making y produce elongation strain along y to piezo actuator driving direction to displacement equations unit is worn
20 (as shown in Figure 7)；Horizontal screw thread through hole 2-3-1 is used to adjusting screw coordinate with x, realizes with x engaging to adjusting screw
Transmission.
X is used for being amplified the output displacement of x to piezo actuator 11 to displacement equations unit 3 is (as shown in Figure 3), it
Including rigid support arm 3-1-1,3-1-2, rigid first side lever 3-2-1,3-2-3, rigid second side lever 3-2-2,3-
2-4, rigid intermediate bar 3-4-1,3-4-2, flexible thin 3-3-3,3-3-7 between the first side lever and support arm, the first side
Flexible thin 3-3-1,3-3-5 between bar and intermediate bar, flexible thin 3-3-2,3-3- between the second side lever and intermediate bar
6, flexible thin 3-3-4,3-3-8 between the second side lever and support arm；There is positioning side block 3-1- on rigid support arm 3-1-1
There are positioning side block 3-1-2-1,3-1-2-2, positioning on 1-1,3-1-1-2, positioning bottom gear 3-1-1-3, rigid support arm 3-1-2
Bottom keeps off 3-1-2-3；Positioning side block 3-1-1-1,3-1-1-2,3-1-2-1,3-1-2-2 are used for accurately defining x to piezo actuator
11 along Fig. 3 arrow 1. direction position, make axis weights of the x to the axis of piezo actuator 11 with x to displacement equations unit 3
Close, so that moving platform 2 is only along x to generation micro-displacement, while avoid x from being come off to piezo actuator 11 in assembling process；It is fixed
Position bottom gear 3-1-1-3,3-1-2-3 are used for accurately defining x to the position in the arrow 2. direction along Fig. 3 of piezo actuator 12, make x to
Piezo actuator 12 will not fall off in assembling process；Connecting rod 3-2-1 and 3-2-2, flexible thin 3-3-1 and 3-3-2,3-3-3
There is identical longitudinal direction respectively with 3-3-4, connecting rod 3-2-3 and 3-2-4, flexible thin 3-3-5 and 3-3-6,3-3-7 and 3-3-8
Center line (just because of connecting rod 3-2-1 and 3-2-2 longitudinal centre line, flexible thin 3-3-1 and 3-3-2 longitudinal centre line,
Flexible thin 3-3-3 and 3-3-4 longitudinal centre line it is misaligned and connecting rod 3-2-3 and 3-2-4 longitudinal centre line, soft
Property thin plate 3-3-5 and 3-3-6 longitudinal centre line, flexible thin 3-3-7 and 3-3-8 longitudinal centre line it is misaligned so that x
There is function of displacement amplification to displacement equations unit 3), flexible thin 3-3-1 and 3-3-2 longitudinal centre line and 3-3-3 with
3-3-4 longitudinal centre line is identical with 3-2-2 longitudinal center's linear distance to connecting rod 3-2-1, flexible thin 3-3-5 and 3-3-6
Longitudinal centre line and 3-3-7 and 3-3-8 longitudinal centre line and longitudinal center's line-spacing to connecting rod 3-2-3 and 3-2-4
From identical；X is to displacement equations unit 3 respectively by intermediate bar 3-4-1,3-4-2 and fixed platform 1, x to the phase of displacement transfer unit 4
Connection.
X is used for the output displacement of x to displacement equations unit 3 passing to dynamic put down to displacement transfer unit 4 is (as shown in Figure 4)
Platform 2, making moving platform 2, it includes rigid link 4-1, first group of flexible thin 4-2-1,4-2-2, second along x to micromotion is produced
Group 4-2-3,4-2-4；X is connected to displacement transfer unit 4 by first group of flexible thin 4-2-1,4-2-2 with fixed platform 1, x
It is connected to displacement transfer unit 4 by second group of flexible thin 4-2-3,4-2-4 with moving platform 2.
X is used for being combined to displacement transfer unit 4 with x to auxiliary unit 5 is (as shown in Figure 5), to moving platform 2 along y to
Output displacement is oriented to, and makes moving platform 2 in y under the driving of piezo actuator 12, only along y to output displacement, without at it
His direction produces coupling displacement, and it includes rigid link 5-1, first group of flexible thin 5-2-1,5-2-2, second group of 5-2-3,5-
2-4, through hole 5-3, through hole 5-3 are used for sensor (such as capacitive displacement sensing through measurement moving platform 2 along x to output displacement
Device) gauge head；X is connected to auxiliary unit 5 by first group of flexible thin 5-2-1,5-2-2 with fixed platform 1, and x is single to auxiliary
Member 5 is connected by second group of flexible thin 5-2-3,5-2-4 with moving platform 2.
X can be in x in the presence of adjusting screw 13 to adjustment unit 6 (as shown in Figure 6), and fine adjustment is used for measuring dynamic flat
Sensor (such as capacitive displacement transducer) primary clearance gauge head and tested surface between of the platform 2 along x to output displacement, it includes
Stiff Block 6-1, flexible folding beam 6-2-1,6-2-2,6-2-3,6-2-4；Flexible folding beam 6-2-1 upper right quarter, a 6-2-2 left side
Top, 6-2-3 right lower quadrant, 6-2-4 lower left quarter are connected with moving platform 2, flexible folding beam 6-2-1 lower left quarter, 6-2-2
Right lower quadrant, 6-2-3 upper left quarter, 6-2-4 upper right quarter be connected with x to the Stiff Block 6-1 of adjustment unit 6, Stiff Block 6-1
The end face relative with sensor is measuring surface.X is adjusted to the gauge head of displacement transducer (such as capacitive displacement transducer) with being tested
During primary clearance between face (shown in such as Fig. 1 (a)), the x on moving platform 2 screws in x to tune to horizontal screw thread through hole 2-3-1
Screw 13 is saved, it is in contact with x to the Stiff Block 6-1 of adjustment unit 6, and then promotes Stiff Block 6-1, flexible folding beam 6-2-
1st, elastic deformation occurs for 6-2-2,6-2-3,6-2-4, connects the tested rigidity towards x into auxiliary unit 5 on Stiff Block 6-1
Bar 5-1 (x can pass through therefrom to a displacement transducer) lateral movement, so as to realize x to displacement transducer gauge head and x to tested
The accurate adjustment of primary clearance between face.
Y is used for being amplified the output displacement of y to piezo actuator 12 to displacement equations unit 7 is (as shown in Figure 3), it
Including rigid support arm 7-1-1,7-1-2, rigid first side lever 7-2-1,7-2-3, rigid second side lever 7-2-2,7-
2-4, rigid intermediate bar 7-4-1,7-4-2, flexible thin 7-3-3,7-3-7 between the first side lever and support arm, the first side
Flexible thin 7-3-1,7-3-5 between bar and intermediate bar, flexible thin 7-3-2,7-3- between the second side lever and intermediate bar
6, flexible thin 7-3-4,7-3-8 between the second side lever and support arm；Have on rigid support arm 7-1-1, support arm 7-1-1
There is positioning side block 7-1-2-1,7-1-2- on positioning side block 7-1-1-1,7-1-1-2, positioning bottom gear 7-1-1-3, support arm 7-1-2
2nd, bottom gear 7-1-2-3 is positioned；Positioning side block 7-1-1-1,7-1-1-2,7-1-2-1,7-1-2-2 are used for accurately defining y to piezoelectricity
The position in the arrow 1. direction along Fig. 3 of actuator 12, make y to the axis of piezo actuator 12 with y into displacement equations unit 7
Axis overlap so that moving platform 2 only along y to produce micro-displacement, while avoid y to piezo actuator 12 in assembling process take off
Fall；Positioning bottom gear 7-1-1-3,7-1-2-3 are used for accurately defining y to the position in the arrow 2. direction along Fig. 3 of piezo actuator 12,
Y is set to be will not fall off to piezo actuator 12 in assembling process；Connecting rod 7-2-1 and 7-2-2, flexible thin 7-3-1 and 7-3-2,
7-3-3 and 7-3-4, connecting rod 7-2-3 and 7-2-4, flexible thin 7-3-5 and 7-3-6,7-3-7 and 7-3-8 have identical respectively
Longitudinal centre line (just because of connecting rod 7-2-1 and 7-2-2 longitudinal centre line, flexible thin 7-3-1 and 7-3-2 longitudinal direction in
Heart line, flexible thin 7-3-3 and 7-3-4 longitudinal centre line misaligned, and connecting rod 7-2-3 and 7-2-4 longitudinal center
Line, flexible thin 7-3-5 and 7-3-6 longitudinal centre line, flexible thin 7-3-7 and 7-3-8 longitudinal centre line it is misaligned,
So that y has function of displacement amplification to displacement equations unit 7), flexible thin 7-3-1 and 7-3-2 longitudinal centre line and 7-
3-3 is identical with 7-2-2 longitudinal center's linear distance to connecting rod 7-2-1 with 7-3-4 longitudinal centre line, flexible thin 7-3-5 with
7-3-6 longitudinal centre line and 7-3-7 and 7-3-8 longitudinal centre line and the longitudinal center to connecting rod 7-2-3 and 7-2-4
Linear distance is identical；Y is to displacement equations unit 7 respectively by intermediate bar 7-4-1,7-4-2 and fixed platform 1, y to displacement transfer unit
8 are connected.
Y is used for the output displacement of y to displacement equations unit 7 passing to dynamic put down to displacement transfer unit 8 is (as shown in Figure 4)
Platform 2, making moving platform 2, it includes rigid link 8-1, first group of flexible thin 8-2-1,8-2-2, second along y to micromotion is produced
Group 8-2-3,8-2-4；Y is connected to displacement transfer unit 8 by first group of flexible thin 8-2-1,8-2-2 with fixed platform 1, y
It is connected to displacement transfer unit 8 by second group of flexible thin 8-2-3,8-2-4 with moving platform 2.
Y is used for being combined to displacement transfer unit 8 with y to auxiliary unit 9 is (as shown in Figure 5), to moving platform 2 along x to
Output displacement is oriented to, and makes moving platform 2 in x under the driving of piezo actuator 11, only along x to output displacement, without at it
His direction produces coupling displacement, and it includes rigid link 9-1, first group of flexible thin 9-2-1,9-2-2, second group of 9-2-3,9-
2-4, through hole 9-3, through hole 9-3 are used for sensor (such as capacitive displacement sensing through measurement moving platform 2 along y to output displacement
Device) gauge head；Y is connected to auxiliary unit 9 by first group of flexible thin 9-2-1,9-2-2 with fixed platform 1, and y is single to auxiliary
Member 9 is connected by second group of flexible thin 9-2-3,9-2-4 with moving platform 2.
Y can be in y in the presence of adjusting screw 14 to adjustment unit 10 (as shown in Figure 6), and fine adjustment is used for measuring dynamic
Sensor (such as capacitive displacement transducer) primary clearance gauge head and tested surface between of the platform 2 along y to output displacement, it is wrapped
Include Stiff Block 10-1, flexible folding beam 10-2-1,10-2-2,10-2-3,10-2-4；Flexible folding beam 10-2-1 upper right quarter,
10-2-2 upper left quarter, 10-2-3 right lower quadrant, 10-2-4 lower left quarter are connected with moving platform 2, flexible folding beam 10-2-1
Lower left quarter, 10-2-2 right lower quadrant, 10-2-3 upper left quarter, 10-2-4 upper right quarter and Stiff Block from y to adjustment unit 10
10-1 is connected；When adjusting y to primary clearance of the displacement transducer (such as capacitive displacement transducer) between gauge head and tested surface
(such as Fig. 1 (a) shown in), the y on moving platform 2 screw in y into horizontal screw thread through hole 2-3-2 to adjusting screw 14, make its with y to
The Stiff Block 10-1 of adjustment unit 10 is in contact, and then promotes Stiff Block 10-1, flexible folding beam 10-2-1,10-2-2,10-2-
3rd, elastic deformation occurs for 10-2-4, make tested on Stiff Block 10-1 towards rigid link 9-1 from y to auxiliary unit 9 (y to
Displacement transducer can pass through therefrom) a lateral movement, so as to realize y to displacement transducer gauge head and y between tested surface just
Beginning gap accurate adjustment.
Piezo actuator is divided into x to piezo actuator 11, y to piezo actuator 12, they in the presence of driving voltage,
Driving x, y carrys out output displacement to displacement equations unit respectively；Both ends of the surface from x to piezo actuator 11 respectively with x to displacement equations
Positioning side block 3-1-1-1,3-1-1-2,3-1-2-1,3-1-2-2 of unit 3 medial surface are in contact, and its bottom surface and x are to displacement
Positioning bottom gear 3-1-1-3,3-1-2-3 of amplifying unit 3 are in contact；Both ends of the surface from y to piezo actuator 12 respectively with y to displacement
Positioning side block 7-1-1-1,7-1-1-2,7-1-2-1,7-1-2-2 of amplifying unit 7 medial surface are in contact, its bottom surface and y to
Positioning bottom gear 7-1-1-3,7-1-2-3 of displacement equations unit 7 are in contact；X, y are being assembled to x, y to position to piezo actuator
When moving in amplifying unit (so that y assembles to piezo actuator as an example, as shown in Figure 7), stage body and locating piece 19 are fixed, make actuating
Screw 20, by promoting the rigid link in displacement transfer unit, makes displacement equations list through the tapped through hole on locating piece 19
Driving direction of the member along piezo actuator produces elongation strain, so as to which piezo actuator is assembled in displacement equations unit, fills
Locating piece 19 and actuation screw 20 are removed after matching somebody with somebody, makes effect of the piezo actuator in displacement amplifying unit elastic-restoring force
Under, the both ends of the surface of piezo actuator are compressed, so as to reach the purpose of pretension piezo actuator.
Upper outer cover plate 15 is (as shown in Figure 8) be used for closing the upper surface of fixed platform 1, upper table from x to displacement equations unit 3
Face, x are single to the rigid link 4-1 of displacement transfer unit 4 and first group of flexible thin 4-2-1,4-2-2 upper surface, x to auxiliary
The rigid link 5-1 of member 5 and first group of flexible thin 5-2-1,5-2-2 upper surface, y to the upper surface of displacement equations unit 7,
Y is to the rigid link 8-1 of displacement transfer unit 8 and first group of flexible thin 8-2-1,8-2-2 upper surface, y to auxiliary unit 9
Rigid link 9-1 and first group of flexible thin 9-2-1,9-2-2 upper surface, to prevent dust from falling into, while make flexible knot
Structure micromotion platform is more attractive in appearance；There are taper counter sink 15-1-1,15-1-2,15-1-3,15-1-4, through hole on upper outer cover plate 15
15-2-1、15-2-2、15-2-3、15-2-4；Taper counter sink 15-1-1,15-1-2,15-1-3,15-1-4 is from fixed platform 1
Upper surface aligns with normal thread through hole 1-2-1,1-2-2,1-2-3,1-2-4 on fixed platform 1 respectively, and same holding screw
18-1,18-2,18-3,18-4 are combined, and upper outer cover plate 15 is fixed on to the upper surface of fixed platform 1；Through hole 15-2-1,15-2-
2nd, 15-2-3,15-2-4 align with perpendicular screwed hole 1-4-1,1-4-2,1-4-3,1-4-4 on fixed platform 1 respectively, and then
By using carrying out the gauge head of tightening x, y to sensor (such as capacitive displacement transducer).
Inward upper cover plate 16 is (as shown in Figure 9) to be used for closing the upper surface of moving platform 2, x to second group of displacement transfer unit 4
Flexible thin 4-2-3,4-2-4 upper surface, x are to second group of flexible thin 5-2-3,5-2-4 of auxiliary unit 5 upper surface, x
To the upper surface of adjustment unit 6, y to second group of flexible thin 8-2-3,8-2-4 of displacement transfer unit 8 upper surface, y to auxiliary
Second group of flexible thin 9-2-3,9-2-4 of unit 9 upper surface, y are helped to the upper surface of adjustment unit 10, to prevent dust from falling
Enter, while make flexible structure micromotion platform more attractive in appearance；There are taper counter sink 16-1-1,16-1-2,16-1- on inward upper cover plate 16
3rd, 16-1-4, through hole 16-2-1~16-2-28；Taper counter sink 16-1-1,16-1-2,16-1-3,16-1-4 are put down with dynamic respectively
Perpendicular screwed hole 2-2-1,2-2-2,2-2-3,2-2-4 on the upper surface of platform 2 align, and with holding screw 18-5,18-6,
18-7,18-8 are combined, and inward upper cover plate 16 is fixed on to the upper surface of moving platform 2；Through hole 16-2-1~16-2-28 is respectively with moving
Perpendicular screwed hole 2-1-5~2-1-32 on platform 2 aligns.
The lower surface (as shown in Figure 10) for being used for closing fixed platform 1 and moving platform 2 of lower cover 17 and x are to displacement equations list
Member 3, x transmit single to displacement transfer unit 4, x to auxiliary unit 5, x to adjustment unit 6, y to displacement equations unit 7, y to displacement
Member 8, y to prevent dust from falling into, while make flexible knot to auxiliary unit 9, y to the lower surface of this eight mechanisms of adjustment unit 10
Structure micromotion platform is more attractive in appearance；There are taper counter sink 17-1,17-2,17-3,17-4 on lower cover 17；Taper counter sink 17-1,
17-2,17-3,17-4 from the lower surface of fixed platform 1 respectively with normal thread through hole 1-2-1,1-2-2,1-2- on fixed platform 1
3rd, 1-2-4 is aligned, and is combined with holding screw 18-9,18-10,18-11,18-12, and lower cover 17 is fixed on into fixed platform
1 lower surface.
As shown in Fig. 1 (a), only x extends to piezo actuator 11 under driving voltage effect, promotes x to displacement equations list
Rigid support arm 3-1-1,3-1-2 of member 3 make x to the intermediate bar 3-4-2 of displacement equations unit 3 along x to defeated to two lateral movements
Go out displacement, this is displaced through x and passes to moving platform 2 to displacement transfer unit 4, because y is to displacement transfer unit 7 and y to auxiliary
Mechanism 8 to platform 2 along x to guide effect, moving platform 2 just along x to producing strict straight line micro-displacement, without in y to generation
Couple displacement.
As shown in Fig. 1 (a), only y extends to piezo actuator 12 under driving voltage effect, promotes y to displacement equations list
Stiff Block 6-1-1,6-1-2 of member 7 make y to the intermediate bar 7-4-2 of displacement equations unit 7 along y to carry-out bit to two lateral movements
Move, this is displaced through y and passes to moving platform 2 to displacement transfer unit 8, because x is to displacement transfer unit 4 and x to auxiliary body 5
To platform 2 along y to guide effect, moving platform 2 is just along y to producing strict straight line micro-displacement, without coupling position to producing in x
Move.
As shown in Fig. 1 (a), when applying driving voltage to piezo actuator 10 to piezo actuator 9, y to x simultaneously, move
Simultaneously along x and y to strict straight line micro-displacement is produced, displacement just is coupled without producing for platform 2.
Content described in this specification embodiment is only enumerating to the way of realization of inventive concept, protection of the invention
Scope is not construed as being only limitted to the concrete form that embodiment is stated, protection scope of the present invention is also and in art technology
Personnel according to present inventive concept it is conceivable that equivalent technologies mean.
Claims (8)
1. a kind of translation two-freedom parallel flexible structure piezoelectric micromotion platform, including fixed platform, moving platform, transverse motion mechanism
And longitudinal motion mechanism, moving platform is inside fixed platform, and the upper surface of moving platform protrudes from the upper surface of fixed platform, fixed platform
Upper surface protrudes from the upper surface of each motion, and the lower surface of fixed platform protrudes from the lower surface of moving platform and each fitness machine
The lower surface of structure；The motion in each direction is respectively by respective displacement output unit, displacement transfer unit and auxiliary unit
Composition, displacement output unit is by piezo actuator as power source, and the displacement transfer unit and auxiliary unit in each direction are with dynamic
The center line of platform is symmetrical, and displacement transfer unit is between displacement output unit and moving platform；
It is characterized in that：The output end of displacement output unit connects with the rigid link of displacement transfer unit；Displacement transfer unit
Be made up of respectively respective rigid link and two groups of flexible thins with auxiliary unit, first group of flexible thin connection rigid link and
Fixed platform, second group of flexible thin connection rigid link and moving platform；First group of lateral displacement transfer unit and auxiliary unit
Flexible thin is longitudinally disposed, and second group of flexible thin of lateral displacement transfer unit and auxiliary unit is transversely set；Longitudinal direction
Displacement transfer unit and first group of flexible thin of auxiliary unit are transversely set, length travel transfer unit and auxiliary unit
Second group of flexible thin is longitudinally disposed.
2. translation two-freedom parallel flexible structure piezoelectric micromotion platform as claimed in claim 1, it is characterised in that：First group
Flexible thin at least has a pair and has at least one pair of along rigid link pair along the symmetrical thin plate of moving platform, second group of flexible thin
The thin plate of title.
3. translation two-freedom parallel flexible structure piezoelectric micromotion platform as claimed in claim 2, it is characterised in that：Moving platform
The groove for accommodating first group of flexible thin is provided with, first group of flexible thin is located in groove.
4. translation two-freedom parallel flexible structure piezoelectric micromotion platform as claimed in claim 3, it is characterised in that：Fixed platform
The upper mounting hole for setting installation displacement transducer, the rigid link of auxiliary unit are provided with through hole, and through hole aligns with mounting hole.
5. translation two-freedom parallel flexible structure piezoelectric micromotion platform as claimed in claim 4, it is characterised in that：Each side
To motion be aligned an adjustment unit, adjustment unit positioned at moving platform and auxiliary unit between, moving platform be provided with revolve
Twist the tapped through hole of adjustment unit；Adjustment unit is made up of Stiff Block and two flexible folding beam groups, each flexible folding beam group
Formed by a pair along the symmetrically arranged flexible folding beam of Stiff Block, flexible folding beam one end is connected with Stiff Block, and the other end is with moving
Platform connects, and flexible folding beam is serpentine-like, and the end face of Stiff Block alignment sensor gauge head is measuring surface.
6. the translation two-freedom parallel flexible structure piezoelectric micromotion platform as described in one of claim 1-5, it is characterised in that：
Displacement output unit is made up of piezo actuator and displacement equations unit, and displacement equations unit is put including a pair of support arms, first
Big bar assembly and the second amplification bar assembly；Piezo actuator is set between support arm, the both ends of piezo actuator respectively with one
Arm contact is supported, the first amplification bar assembly and the second amplification bar assembly are symmetrical arranged with the center line of piezo actuator, the first amplification
Bar assembly and the second amplification bar assembly are included between the first side lever, intermediate bar, the second side lever, the first side lever and support arm respectively
The flexible thin between flexible thin, the second side lever and intermediate bar between flexible thin, the first side lever and intermediate bar, the second side lever
Flexible thin between support arm, between the flexible thin and the first side lever and intermediate bar between the first side lever and support arm
Flexible thin misplaces, and the flexible thin between the flexible thin and the second side lever and support arm between the second side lever and intermediate bar is wrong
Position, the flexible thin at intermediate bar both ends flush；The intermediate bar of first amplification bar assembly is connected with fixed platform, the second amplification bar assembly
Intermediate bar be connected with the rigid link of displacement transmission mechanism, the first side lever, intermediate bar and the second side lever are rigid element, flexible
Thin plate is elastomeric element；The flexible thin between flexible thin and the first side lever and intermediate bar between first side lever and support arm
Misplace, the flexible thin dislocation between the flexible thin and the second side lever and support arm between the second side lever and intermediate bar, refer to
Two flexible thins are not point-blank；The thin plate dislocation at side lever both ends so that the two of two tie points of thin plate and side lever
Line is in oblique line, and the line segment of thin plate and two tie points of side lever is considered as into connecting rod, then the first side lever formed connecting rod, intermediate bar and
The connecting rod that second side lever is formed is in arch-shaped, the displacement that connecting rod exports as lever amplification piezo actuator.
7. translation two-freedom parallel flexible structure piezoelectric micromotion platform as claimed in claim 6, it is characterised in that：Support arm
Positioning side block and positioning bottom gear are provided with, position side block and positioning bottom gear will position bottom gear with support arm centering, positioning side block
It is trapped among in it, positioning side block and positioning bottom keep off the medial surface for protruding from support arm, and positioning the region inside side block allows piezoelectricity to hold
The end of row device is inserted, and positioning bottom gear props up the end of piezo actuator.
8. translation two-freedom parallel flexible structure piezoelectric micromotion platform as claimed in claim 7, it is characterised in that：Platform has
There are upper outer cover plate, inward upper cover plate and lower cover；The rigidity that upper outer cover plate seals fixed platform, displacement transfer unit and auxiliary unit connects
Bar and second group of flexible thin, and fixed by screw and fixed platform；Inward upper cover plate seals moving platform, displacement transfer unit and auxiliary
First group of flexible thin, adjustment unit of unit are helped, and is fixed by screw and moving platform, inward upper cover plate and moving platform are provided with
Multiple screws for being used to install carrying object；Lower cover seals the bottom of platform, and is fixed by screw and fixed platform.
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| CN109872768A (en) * | 2019-01-18 | 2019-06-11 | 宁波大学 | The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing |
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| CN112959298A (en) * | 2021-02-03 | 2021-06-15 | 宁波大学 | Large-stroke five-degree-of-freedom nanometer manipulator |
| CN112959298B (en) * | 2021-02-03 | 2022-04-26 | 宁波大学 | Large-stroke five-degree-of-freedom nanometer manipulator |
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