CN108389603B - Double-composite flexible parallel four-bar mechanism - Google Patents
Double-composite flexible parallel four-bar mechanism Download PDFInfo
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- CN108389603B CN108389603B CN201810288164.7A CN201810288164A CN108389603B CN 108389603 B CN108389603 B CN 108389603B CN 201810288164 A CN201810288164 A CN 201810288164A CN 108389603 B CN108389603 B CN 108389603B
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
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Abstract
The invention discloses a double-composite flexible parallel four-bar mechanism which comprises an outer frame formed by an upper frame and a lower frame, wherein a flexible supporting component is arranged between the upper frame and the lower frame. The flexible supporting components are divided into an inner group of flexible supporting components and an outer group of flexible supporting components. The inside at outer frame is equipped with the voice coil motor that is used as the actuating source, and voice coil motor's voice coil motor stator is connected with outside group flexible supporting component through the support, and voice coil motor's voice coil motor rotor is connected with inside group flexible supporting component. According to the invention, the effective linear travel range of the flexible mechanism is improved by connecting two groups of flexible support assemblies in series, parasitic displacement generated by a single flexible unit is eliminated by a parallel connection mode, and the single-degree-of-freedom linear motion with large travel, high precision and no parasitic displacement can be realized by utilizing the current and linear relation of the voice coil motor in a conventional control mode.
Description
Technical Field
The invention relates to a micro-nano positioning device in the mechanical field, in particular to a double-composite flexible parallel four-bar mechanism based on voice coil motor driving.
Background
Ultra-high precision positioning technology is a key to precision manufacturing. With the development of modern manufacturing industry, the requirements on the machining size of parts and the positioning precision of precise instruments already reach the nanometer level, so that the realization of micro-nano positioning is a key for promoting the development of the modern manufacturing industry. Besides being applied to the fields of precision manufacturing, precision measurement and the like, the micro-nano positioning has wide application in the fields of semiconductor manufacturing and assembly, biomedicine, nano imprinting, optical fiber alignment, data storage and reading, various precision optical instruments and the like. The micro-nano positioning platform formed by the flexible hinge and the high-performance motor is an effective mode for realizing the micro-nano positioning task, and is also widely studied: in the beginning of sixties, the U.S. national standard agency successfully developed a one-dimensional micro-motion platform with a stroke of 0-50 μm, wherein a displacement driver of the platform is made of piezoelectric ceramics, and an actuating mechanism of the platform is a flexible hinge, and the platform is mainly applied to the field of aerospace. In 2005, the one-dimensional micro-motion mechanism designed by Korea Gwang-Ju et al and using a voice coil motor as a displacement driver and a flexible hinge as an actuating mechanism has the positioning accuracy of 0.5nm, but the stroke of only +/-10 mu m. In 2008, singapore scholars Teo et al propose a single degree of freedom nano positioning device, which uses a voice coil motor as a displacement driver and adopts a double flexible parallel four-bar structure as a displacement guiding mechanism of the voice coil motor.
However, the existing micro-nano positioning device is difficult to meet the requirement of large travel under the condition that the positioning precision reaches the nano level, and the performance of the positioning device is closely related to the structure of the flexible hinge and the adopted motor: the piezoelectric ceramic brake is a device for realizing nano positioning, but the stroke of the piezoelectric ceramic brake can only reach hundreds of micrometers; the magnetic levitation technology can realize nano positioning in a larger stroke, but the efficiency is very sensitive to load change; the traditional voice coil motor has quick response and long stroke, but the force constant is smaller and can only reach 10N/A. In practical application, a flexible supporting structure required by a high-performance motor aiming at large thrust and large stroke is lacked.
Disclosure of Invention
Aiming at the current state of the art, the invention provides a double-composite flexible parallel four-bar mechanism, which is driven by a voice coil motor to realize large linear travel and high positioning precision of a flexible supporting structure.
The technical scheme adopted for solving the technical problems is as follows: a double-composite flexible parallel four-bar mechanism comprises an outer frame formed by an upper frame and a lower frame, wherein a flexible supporting component is arranged between the upper frame and the lower frame. The flexible supporting components are divided into an inner group of flexible supporting components and an outer group of flexible supporting components. The inside at outer frame is equipped with the voice coil motor that is used as the actuating source, and voice coil motor's voice coil motor stator is connected with outside group flexible supporting component through the support, and voice coil motor's voice coil motor rotor is connected with inside group flexible supporting component.
The number of the flexible supporting components is even. The flexible supporting components are divided into two parts, the two parts are symmetrically distributed at two opposite side surfaces of the outer frame, and each flexible supporting component in each part is arranged in parallel.
The number of the inner group flexible supporting components and the outer group flexible supporting components of each part is even.
Each of the flexible support assemblies described above includes two flexible support units. Each flexible support unit comprises a rectangular arm and two right angle flexible hinges connected in series by the rectangular arm.
The outer side group flexible supporting component is connected with the two flexible supporting units through the stator connecting piece, so that a corresponding pair of flexible supporting units form a parallel structure. The inner side group flexible supporting component is connected with the two flexible supporting units through the rotor connecting piece, so that a corresponding pair of flexible supporting units form a parallel structure.
The voice coil motor rotor of the voice coil motor is connected with the inner side group flexible support assembly through the rotor connecting piece.
The support comprises a left support and a right support, and the left support and the right support are respectively connected with the corresponding outer side group flexible support assemblies through stator connecting pieces.
The left side support and the right side support are connected with the lower bottom plate of the voice coil motor through bolts to form a rigid whole and support the outer frame.
The upper frame and the lower frame are of rectangular frame structures which are vertically symmetrical, the voice coil motor stator and the voice coil motor rotor are compactly arranged inside the rectangular frame structures, and the voice coil motor stator adopts a Halbach structure.
The flexible supporting component is of an integrated structure formed by processing in a linear cutting mode.
Compared with the prior art, the invention improves the effective linear travel range of the flexible mechanism by connecting two groups of flexible supporting components in series, which is twice of that of a common double-parallel flexible four-bar mechanism; the parasitic displacement generated by a single flexible unit is eliminated in a parallel connection mode, and the parasitic displacement is assembled with the voice coil motor to form a positioning device with compact structure and simple control; by utilizing the linear relation between the current of the voice coil motor and the force line, the single-degree-of-freedom linear motion with large stroke, high precision and no parasitic displacement can be realized by a conventional control mode.
Drawings
Fig. 1 is a schematic perspective view of an embodiment of the present invention.
Fig. 2 is a front view of fig. 1.
Fig. 3 is a schematic perspective view of the parallel four-bar mechanism part in fig. 1.
Detailed Description
The double composite flexible parallel four-bar mechanism and the corresponding driving device according to the present invention will be described in further detail below with reference to specific examples and drawings, but the embodiments of the present invention are not limited thereto.
Fig. 1 to 3 are schematic structural views of the present invention.
Wherein the reference numerals are as follows: the outer set of flexible support members 11, 12, 13, 14, the inner set of flexible support members 21, 22, 23, 24, the right angle flexible hinge 111, the rectangular arm 112, the stator connectors 311, 312, 313, 314, the mover connectors 321, 322, the lower frame 41, the upper frame 42, the left side brackets 51, 53, the right side brackets 52, 54, the voice coil motor lower plate 61, the voice coil motor upper plate 62, the voice coil motor stator 63, the voice coil motor mover 64.
The double-composite flexible parallel four-bar mechanism can realize linear motion with one degree of freedom in a plane. The double-composite flexible parallel four-bar mechanism comprises an outer frame formed by an upper frame 42 and a lower frame 41, and flexible supporting components 11, 12, 13, 14, 21, 22, 23 and 24 are arranged between the upper frame 42 and the lower frame 41. The flexible support assemblies 11, 12, 13, 14, 21, 22, 23, 24 are divided into two groups of inner group flexible support assemblies 21, 22, 23, 24 and outer group flexible support assemblies 11, 12, 13, 14.
A voice coil motor serving as a driving source is provided inside the outer frame, and a Halbach voice coil motor is used in this embodiment. The voice coil motor has the characteristics of quick response, large thrust and simple structure, and mainly comprises a voice coil motor lower base plate 61, a voice coil motor upper base plate 62, a voice coil motor stator 63 and a voice coil motor rotor 64.
The voice coil motor stator 63 of the voice coil motor is connected with the outer group flexible supporting members 11, 12, 13, 14 through brackets, and the voice coil motor mover 64 of the voice coil motor is connected with the inner group flexible supporting members 21, 22, 23, 24.
The number of flexible support members 11, 12, 13, 14, 21, 22, 23, 24 is an even number of groups. And the flexible supporting components 11, 12, 13, 14, 21, 22, 23 and 24 are divided into two parts which are symmetrically distributed at two opposite sides of the outer frame, and the flexible supporting components in each part are arranged in parallel.
The number of inner set of flexible support members 21, 22, 23, 24 and outer set of flexible support members 11, 12, 13, 14 of each section is an even number.
Each flexible support assembly 11, 12, 13, 14, 21, 22, 23, 24 comprises two flexible support units. Each flexible support unit comprises a rectangular arm 112 and two right angle flexible hinges 111 connected in series by the rectangular arm 112.
The outer sets of flexible support assemblies 11, 12, 13, 14 connect two flexible support units through stator connectors 311, 312, 313, 314, such that a corresponding pair of flexible support units form a parallel structure. The inner group of flexible support assemblies 21, 22, 23, 24 are connected with two flexible support units through mover connectors 321, 322, so that a corresponding pair of flexible support units form a parallel structure.
The voice coil motor mover 64 of the voice coil motor is connected to the inner group flexible support members 21, 22, 23, 24 through mover links 321, 322.
In the present invention, the brackets include left brackets 51, 53 and right brackets 52, 54, and the left brackets 51, 53 and the right brackets 52, 54 are connected to the corresponding outer sets of flexible support assemblies 11, 12, 13, 14 by stator connectors 311, 312, 313, 314, respectively.
The left brackets 51, 53 and the right brackets 52, 54 are connected with the voice coil motor lower base plate 61 through bolts to form a rigid whole, thereby realizing the functions of fixing and supporting the whole flexible mechanism.
The upper frame 42 and the lower frame 41 are rectangular frame structures which are vertically symmetrical, the voice coil motor stator 63 and the voice coil motor mover 64 are compactly installed inside the rectangular frame structures, and the voice coil motor stator 63 adopts a Halbach structure. The upper frame 42 is connected to the lower frame 41 by eight flexible support assemblies 11, 12, 13, 14, 21, 22, 23, 24 and serves as a secondary platform for the mechanism to place the flexible support assemblies 11, 12, 13, 14, 21, 22, 23, 24 in parallel relationship. The frame structure of the upper frame 42 and the lower frame 41 reserves a mounting space for the voice coil motor of the driving device, and improves the compactness of the whole mechanism.
The outer sets of flexible support assemblies 11, 12, 13, 14 form a parallel structure with a corresponding pair of flexible support units via stator connections 311, 312, 313, 314, thereby eliminating parasitic displacement created by individual flexible support units. The outer side groups of flexible supporting components 11, 12, 13 and 14 form a parallel structure through an outer frame, the inner side groups of flexible supporting components 21, 22, 23 and 24 also form a parallel structure through the outer frame, and the two groups of parallel structures form series connection through a secondary platform, namely an upper frame 42 and a lower frame 41, so that the effective stroke of the whole mechanism is improved by 2 times of the stroke of the original single parallel structure.
Compared with the traditional transmission mechanism such as a bearing, a guide rail and the like, the double-composite flexible parallel four-bar mechanism has the following advantages: 1. the flexible mechanism has the characteristics of no clearance and no friction, reduces physical factors influencing the operation of the device, and effectively improves the positioning precision; 2. the stress and the generated displacement of the flexible mechanism are in a linear relation, so that the control difficulty is reduced; 3. the mechanism has simple structure, is convenient to process and can be manufactured into an integrated structure in a wire cutting mode.
The invention improves the effective linear travel range of the double-composite flexible parallel four-bar mechanism by two groups of serial connection modes, eliminates parasitic displacement generated by a single flexible unit by a parallel connection mode, and is assembled with a voice coil motor to form a positioning device with compact structure and simple control; by utilizing the linear relation between the current of the voice coil motor and the force line, the single-degree-of-freedom linear motion with large stroke, high precision and no parasitic displacement can be realized by a conventional control mode.
The above examples represent only one preferred embodiment of the present invention, and it is possible for a person skilled in the art to make several variations and modifications without departing from the spirit of the present invention, all of which fall within the scope of the present invention.
Claims (6)
1. A double-composite flexible parallel four-bar mechanism is characterized in that: the flexible support device comprises an outer frame composed of an upper frame (42) and a lower frame (41), wherein flexible support components (11, 12, 13, 14, 21, 22, 23, 24) are arranged between the upper frame (42) and the lower frame (41); the flexible support assemblies (11, 12, 13, 14, 21, 22, 23, 24) are divided into two groups of inner group flexible support assemblies (21, 22, 23, 24) and outer group flexible support assemblies (11, 12, 13, 14); the voice coil motor is arranged in the outer frame and used as a driving source, and mainly comprises a voice coil motor lower bottom plate (61), a voice coil motor upper bottom plate (62), a voice coil motor stator (63) and a voice coil motor rotor (64), wherein the voice coil motor stator (63) is connected with the outer side group flexible supporting components (11, 12, 13 and 14) through a bracket, and the voice coil motor rotor (64) is connected with the inner side group flexible supporting components (21, 22, 23 and 24);
each flexible support assembly (11, 12, 13, 14, 21, 22, 23, 24) comprises two flexible support units; each flexible support unit comprises a rectangular arm (112) and two right-angle flexible hinges (111) connected in series through the rectangular arm (112);
the outer side group flexible supporting components (11, 12, 13, 14) are connected with two flexible supporting units through stator connecting pieces (311, 312, 313, 314), so that a corresponding pair of flexible supporting units form a parallel structure; the inner side group flexible supporting components (21, 22, 23, 24) are connected with the two flexible supporting units through rotor connecting pieces (321, 322), so that a corresponding pair of flexible supporting units form a parallel structure;
the voice coil motor rotor (64) of the voice coil motor is connected with the inner side group flexible supporting components (21, 22, 23, 24) through rotor connecting pieces (321, 322);
the support comprises a left support (51, 53) and a right support (52, 54), and the left support (51, 53) and the right support (52, 54) are respectively connected with the corresponding outer side group flexible support assemblies (11, 12, 13, 14) through stator connecting pieces (311, 312, 313, 314).
2. The dual compound flexible parallel four bar mechanism of claim 1, wherein: the number of the flexible supporting components (11, 12, 13, 14, 21, 22, 23, 24) is an even number group, the flexible supporting components (11, 12, 13, 14, 21, 22, 23, 24) are divided into two parts, the two parts are symmetrically distributed at two opposite side surfaces of the outer frame, and each flexible supporting component in each part is arranged in parallel.
3. The dual compound flexible parallel four bar mechanism of claim 2, wherein: the number of inner set of flexible support members (21, 22, 23, 24) and outer set of flexible support members (11, 12, 13, 14) of each section is even.
4. The dual compound flexible parallel four bar mechanism of claim 1, wherein: the left side brackets (51, 53) and the right side brackets (52, 54) are connected with the voice coil motor lower bottom plate (61) through bolts to form a rigid whole and support the outer frame.
5. The dual compound flexible parallel four bar mechanism of claim 1, wherein: the upper frame (42) and the lower frame (41) are of rectangular frame structures which are vertically symmetrical, the voice coil motor stator (63) and the voice coil motor rotor (64) are compactly arranged in the rectangular frame structures, and the voice coil motor stator (63) adopts a Halbach structure.
6. The dual compound flexible parallel four bar mechanism of claim 1, wherein: the flexible support components (11, 12, 13, 14, 21, 22, 23 and 24) are integrated structures processed in a linear cutting mode.
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| CN201810288164.7A CN108389603B (en) | 2018-04-03 | 2018-04-03 | Double-composite flexible parallel four-bar mechanism |
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| CN201810288164.7A CN108389603B (en) | 2018-04-03 | 2018-04-03 | Double-composite flexible parallel four-bar mechanism |
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| CN108389603B true CN108389603B (en) | 2023-09-01 |
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