CN103557412A - Bipolar two-dimensional fully flexible high-precision servo platform - Google Patents
Bipolar two-dimensional fully flexible high-precision servo platform Download PDFInfo
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- CN103557412A CN103557412A CN201310545708.0A CN201310545708A CN103557412A CN 103557412 A CN103557412 A CN 103557412A CN 201310545708 A CN201310545708 A CN 201310545708A CN 103557412 A CN103557412 A CN 103557412A
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Abstract
The invention discloses a bipolar two-dimensional fully flexible high-precision servo platform, which comprises a base, a macro moving platform, first and second voice coil motors, a micro moving platform, first and second bimorphs, first and second displacement sensors and a controller connected with the voice coil motors, the bimorphs and the displacement sensors. The servo platform provided by the invention adopts a fully flexible structure and is formed by connecting the macro moving platform and the micro moving platform in series, and the macro moving platform and the micro moving platform respectively adopt a parallel structure, are respectively and directly driven by the voice coil motors and the bimorphs, move by relying on the transmission of flexible hinge structure based macro and micro moving platform guide rails, do not need to be assembled and lubricated, have no gaps and friction, and make large-stroke, high-speed and high-precision movement while ensuring movement decoupling and improving carrying capacity. The first and second displacement sensors are respectively used for measuring displacement signals of the servo platform in X and Y directions and feeding back to the controller to realize the full closed loop control of the servo platform.
Description
Technical field
The present invention relates to a kind of two-dimentional elaborate servo platform, particularly a kind of based on voice coil motor and piezoelectric bimorph double drive, can realize the full flexible high-precision servo platform of large stroke motion in two-dimensional space.
Background technique
At present, in recent years, continuous progress along with science and technology and industrial technology, the field develop rapidlys such as microelectronic manufacture, ultraprecise machine-building, micro robot operation, precision measuremnt optical instrument and biomedical operation, the significance of high-accuracy kinetic control system becomes increasingly conspicuous, in the urgent need to location and the operation system of large stroke (cm level), high-speed (m/s level) and highi degree of accuracy (submicron order and nanometer).Therefore, the status of the ultraprecise motion servo platform of large stroke becomes increasingly conspicuous, to its research researcher's favor extremely both at home and abroad.
Conventional two-dimensional translation highi degree of accuracy mini positioning platform adopts cascaded structure more, the moving platform that is about to two one dimensions is vertically superimposed or in the mode of connecting, the moving platform of a direction is nested in another one direction platform, realize two dimensional motion, such second platform is as the load of first platform, increase the inertia of moving element, limited speed and the acceleration of whole system.How existing parallel-connection structure two-dimensional micromotion stage only adopts the single drivers such as electric rotating machine+ball screw, linear electric motor or voice coil motor, although can realize the range of movement of large stroke, but its positioning precision only can reach micron or submicron order, and speed of response is lower.Although adopt the locating platform of the microdrives such as piezoelectric constant can reach nanometer location, its stroke is little, generally can only reach tens to hundreds of micron; Although the locating platform that adopts servomotor, piezoelectricity looper to drive can be realized the motion of large stroke, its movement velocity is too low.Therefore, for realizing nanometer-level ultra-precise motion and the positioning action of large stroke, adopt grand micro-dual-positioning mode more, on the basis of grand moving locating platform, the micromotion platform of stack or nested Piezoelectric Ceramic.
Chinese patent CN1731081A has proposed a kind of plane positioning system of large travel high-speed nano-precision of macro/micro driving, this positioning system using voice coil motor is as grand driver, micromotion platform on macro-moving stage is installed piezoelectric constant as microdrive, the positioning error of high frequency dynamic compensating system, and guarantee that by the full closed-loop position control of system system realizes nano level positioning precision when realizing Centimeter Level range of movement.But the macro-moving stage of this platform adopts cascaded structure, and adopts linear motion guide as guide mechanism, make platform have larger frictional force, limited the raising of locating platform speed and precision simultaneously; Its micromotion platform adopts piezoelectric ceramic actuator directly to drive, and macro-moving stage is produced to larger active force, makes to have coupled motions between grand, microfluidic platform.
Chinese patent CN102490021A has proposed a kind of grand/micro-two-dimension displacement platform, this platform adopts cascaded structure, macro-moving stage is directly driven by micrometer, fine motion displacement platform adopts " ten " font layout, by the hydraulic type driver drives based on resiliently deformable being fixed on micromotion platform, it drives resolution generally can reach 10nm, thereby can realize stroke at the submicron order precise motion of 10-20mm.But the macro-moving stage of this platform adopts guide rail as guide mechanism, makes platform frictional force, and use the micrometer of manual tune as driver, use inconvenience, and be of limited application; Although hydraulic type driver has advantages of that rigidity is large, the linearity good, strong without hysteresis and antijamming capability, its resolution is lower, cannot realize nano level precise motion, and has coupled motions between grand, microfluidic platform.
Chinese patent CN102543217A has proposed a kind of macro and micro servo two dimension integral type mini positioning platform, this platform is by adopting grand micro-bipolar platform of parallel-connection structure and full flexibility structure in series, macro-moving stage is directly driven by voice coil motor, and the positioning precision of large stroke motion scope and submicron order can be provided; Micromotion platform is driven by displacement amplifying mechanism by piezoelectric constant, has reduced the active force to macro-moving stage, has reduced the sports coupling between micromotion platform and macro-moving stage, and system accuracy is brought up to nanometer.But this platform is the coupled motions that reduce micromotion platform and macro-moving stage, its micromotion platform adopts bridge-type enlarger, although by amplifying output displacement, reduce ouput force, thereby dwindle the active force of micromotion platform to macro-moving stage, but the stress of flexible hinge also increases thereupon, easily causes the fatigue ruption of hinge.
Summary of the invention
The object of the invention is the technical deficiency existing in the two-dimensional stage of existing macro-micro dual-drive for overcoming, provide a kind of bipolar two dimension full flexible high-precision servo platform, it has compact structure, mobile decoupling, precision is high, stroke is large and the advantage such as fast response time, can be widely used in precision positioning and tracking field.
For achieving the above object, the present invention adopts following technical proposals:
The full flexible high-precision servo platform of a kind of bipolar two dimension, it comprises pedestal, macro-moving stage, first, second voice coil motor, micromotion platform, first, second piezoelectric bimorph, first, second displacement transducer and the controller being connected with described voice coil motor, piezoelectric bimorph and displacement transducer; Described pedestal, macro-moving stage and micromotion platform are interconnective integral structure, by a sheet material, are processed; Described macro-moving stage is driven by first, second voice coil motor; Described micromotion platform is embedded in macro-moving stage, with macro-moving stage, together moves, and micromotion platform is directly driven by first, second piezoelectric bimorph being attached on micromotion platform guide rail.
Described macro-moving stage comprises grand moving output stage and some macro-moving stage guide rails being arranged in parallel.
Described macro-moving stage guide rail adopts full flexible structure, by the identical first, second, third, fourth macro-moving stage guide rail of structure, is composed in parallel, and relies on the resiliently deformable of material that the motion of voice coil motor is passed to grand moving output stage.
Described first, second, third, fourth macro-moving stage guide rail is connected with four sides of grand moving output stage respectively, and is symmetrically distributed in the surrounding of grand moving output stage.
Described the first macro-moving stage guide rail is comprised of first, second flexible hinge, one end of the first macro-moving stage guide rail is connected with the first voice coil motor by the first connecting plate, the other end is connected with grand moving output stage by the flexible board reed of the first flexible hinge, in addition, the second flexible hinge is connected with pedestal by flexible board reed; Described the second macro-moving stage guide rail is comprised of the 3rd, the 4th flexible hinge, and wherein the 3rd flexible hinge is connected with grand moving output stage by flexible board reed, and the 4th flexible hinge is connected with pedestal by flexible board reed; Described the 3rd macro-moving stage guide rail is comprised of the 5th, the 6th flexible hinge, the 3rd macro-moving stage guide rail one end is connected with the second voice coil motor by the second connecting plate, the other end is connected with grand moving output stage by the flexible board reed of the 5th flexible hinge, in addition, the 6th flexible hinge is connected with pedestal by flexible board reed; Described the 4th macro-moving stage guide rail is comprised of the 7th, the 8th flexible hinge, and wherein the 7th flexible hinge is connected with grand moving output stage by flexible board reed, and the 8th flexible hinge is connected with pedestal by flexible board reed.
Described the first, second, third, fourth, the 5th, the 6th, the 7th, the 8th flexible hinge is two parallel leaf spring type structures, in order to realize the range of movement of large stroke.
Described the first voice coil motor and the second voice coil motor all adopt the structure of outside permanent magnetism, internal electromagnetic, and permanent magnetism part is as mover, and electromagnet portion is as stator, gapped between described stator and mover.
Described the first voice coil motor arranges with the second voice coil motor is vertical, the first described voice coil motor mover is connected with the first flexible hinge by the first connecting plate, the second voice coil motor mover is connected with the 5th flexible hinge by the second connecting plate, and described the first voice coil motor stator and the second voice coil motor stator are all fixed by screws on pedestal.
Described the first flexible hinge passes to grand moving output stage by the motion of the first voice coil motor, the micromotion platform that promotes macro-moving stage and be embedded in macro-moving stage completes the motion on directions X, and the second, the 4th flexible hinge being connected with pedestal and the 5th, the 7th flexible hinge that is distributed in Y-direction are retraining macro-moving stage coupled motions in the Y direction simultaneously; Described the 5th flexible hinge passes to grand moving output stage by the motion of the second voice coil motor, the micromotion platform that promotes macro-moving stage and be embedded in macro-moving stage completes the motion in Y-direction, the the 6th, the 8th flexible hinge being connected with pedestal and the first, the 3rd flexible hinge that is distributed in directions X are retraining the coupled motions of macro-moving stage on directions X simultaneously, thereby have realized the mobile decoupling of macro-moving stage in XY direction.
It is central that described micromotion platform is embedded in grand moving output stage, adopts parallel-connection structure, and micromotion platform comprises fine motion output stage and is attached thereto the micromotion platform guide rail connecing.
Described micromotion platform guide rail is the compound parallel four-bar guide mechanism that eight groups of flexible hinges form, by double connecting rod, form symplex structure, wherein, one end of first, second, third, fourth group of described micromotion platform flexible hinge is hinged with pedestal respectively, the other end is hinged with the 5th, the 6th, the 7th, the 8th group of micromotion platform flexible hinge respectively, and the other end of the 5th, the 6th, the 7th, the 8th group of micromotion platform flexible hinge be hinged on four sides of fine motion output stage respectively.
First, second, third, fourth, the 5th, the 6th, the 7th, the 8th group of micromotion platform flexible hinge of described micromotion platform guide rail is lobate flexible hinge, and each group micromotion platform flexible hinge forms by two lobate flexible hinges.
Totally four of described the first piezoelectric bimorphs, be attached to respectively on four lobate flexible hinges of first, the 3rd group of micromotion platform flexible hinge, totally four of the second described piezoelectric bimorphs, are attached to respectively on four lobate flexible hinges of second, the 4th group of micromotion platform flexible hinge.
During described the first piezoelectric bimorph energising, produce bending deflection, thereby drive first, the 3rd group of micromotion platform flexible hinge produces resiliently deformable, by the 5th, the 7th group of micromotion platform flexible hinge drives fine motion output stage to move along directions X, simultaneously symmetrical in the Y direction second, the 4th group of micromotion platform flexible hinge and the 6th, the 8th group of flexible hinge retraining micromotion platform coupled motions in the Y direction, when the second described piezoelectric bimorph is switched on, produce bending deflection, thereby drive second, the 4th group of micromotion platform flexible hinge produces resiliently deformable, by the 6th, the 8th group of micromotion platform flexible hinge drives fine motion output stage to move along Y-direction, be symmetrically distributed in first on directions X simultaneously, the 3rd group of micromotion platform flexible hinge and the 5th, the 7th group of flexible hinge retraining the coupled motions of micromotion platform on directions X, thereby realize the mobile decoupling of micromotion platform in XY direction.
Described first, second displacement transducer is laser displacement sensor, sensor probe and measurement plate two-part, consists of, and is respectively used to measure the displacement signal of fine motion output stage on XY both direction.
The sensor probe of described first, second displacement sensor is all bolted on pedestal.
The measurement plate of described first, second displacement sensor is arranged vertically on fine motion output stage, and relative with first, second sensor probe respectively, and keeps measuring distance.
Described controller comprises data acquisition module, main control computer, D/A modular converter, voice coil motor driver and piezoelectric bimorph driver, described data acquisition module is with first, second displacement sensor is connected, described voice coil motor driver and first, the second voice coil motor is connected, described piezoelectric bimorph driver is respectively with first, the second piezoelectric bimorph is connected, described main control computer is communicated by letter with D/A modular converter with data acquisition module, D/A modular converter is connected with piezoelectric bimorph driver with voice coil motor driver, described first, second displacement sensor passes to main control computer by the displacement signal of fine motion output stage by data acquisition module, main control computer is by D/A modular converter outputting analog signal, via described voice coil motor driver and piezoelectric bimorph driver, control respectively first, the second voice coil motor and first, the output of the second piezoelectric bimorph, adjust position and the motion of fine motion output stage, form closed-loop structure, reach needed location and tracking accuracy.
In view of in existing market and some problems of existing of the locating platform proposing in previous patent, therefore be necessary to design a kind of high-precision servo platform of new macro-micro dual-drive, when keeping the advantages such as locating platform precision is high, speed is fast, stroke is large and not increasing locating platform control algorithm difficulty, reduce as far as possible the sports coupling of grand microfluidic platform, and from electromechanical integration angle, micromotion platform is carried out to creation and optimization.
Ultraprecise servo platform provided by the invention adopts integral structure, in series by macro-moving stage and micromotion platform, macro-moving stage and micromotion platform all adopt parallel-connection structure and full flexible structure, macro-moving stage is directly driven by voice coil motor, micromotion platform is directly driven by piezoelectric bimorph, the grand moving and micromotion platform guide rail transmission campaign of dependence based on flexible hinge structure, do not need assembling, gapless, without friction, do not need to lubricate, when guaranteeing mobile decoupling and improving bearing capacity, not only can realize large stroke (cm level), the motion of highi degree of accuracy (nm level), and the coupled motions between micromotion platform and macro-moving stage have been effectively reduced, first, second displacement sensor is measured respectively the displacement signal of servo platform X and Y-direction and is fed back to controller, realizing the closed-loop of servo platform controls.The present invention has compact structure, mobile decoupling, precision is high, stroke is large and the advantage such as fast response time, can be widely used in precision positioning and tracking field.
With conventional art, compare, advantage of the present invention is as follows:
1, in the full flexible high-precision servo platform of Novel Bipolar two dimension provided by the invention, macro-moving stage and micromotion platform all adopt symmetrical configuration in parallel-connection structure and XY direction, guarantee that on both direction, dynamics is identical, and have that rigidity is high, movement inertia is low, bearing capacity is high, precision is high, without advantages such as cumulative error, compact structures.
2, in the full flexible high-precision servo platform of Novel Bipolar two dimension provided by the invention, macro-moving stage is directly driven by voice coil motor, reduced the error that medium tache transmission brings, can realize the positioning precision of the submicron order of large stroke, and driving force is large, can obtain larger acceleration of motion and speed.
3, the full flexible high-precision servo platform of Novel Bipolar two dimension provided by the invention adopts the voice coil motor of outside permanent magnetism, internal electromagnetic, and its ouput force and input current have good linear relationship, are easy to control.
4, the full flexible high-precision servo platform of Novel Bipolar two dimension provided by the invention adopts full flexible structure as decoupling mechanism and guide mechanism, relies on the resiliently deformable transmission campaign of flexible hinge, does not need assembling, gapless, without friction, do not need to lubricate, be easy to realize hi-Fix.
5, in the full flexible high-precision servo platform of Novel Bipolar two dimension provided by the invention, micromotion platform is directly driven by piezoelectric bimorph, reduced the active force of micromotion platform to macro-moving stage, effectively reduce the sports coupling of micromotion platform and macro-moving stage, and can realize nano level precision positioning.
6, in the full flexible high-precision servo platform of Novel Bipolar two dimension provided by the invention, micromotion platform adopts compound parallelogram lindage as decoupling zero and guide mechanism, by double connecting rod stroke symplex structure, thereby effectively eliminated the generation of the parasitic displacements such as displacement, cumulative error and moving platform rotation of between centers output coupling, guarantee moving platform two-degree of freedom translation, increased rigidity, the bearing capacity of structure simultaneously.
Accompanying drawing explanation
Fig. 1 is embodiment's perspective view;
Fig. 2 is embodiment's plane structure schematic diagram;
Fig. 3 is embodiment's two parallel leaf spring type flexible hinge structural representation (the 5th flexible hinge 28 is example);
Fig. 4 is embodiment's micromotion platform structure enlarged diagram;
Fig. 5 is embodiment's compound parallel four-bar guiding principle figure (the micromotion platform directions X of take motion is example);
Fig. 6 is embodiment's controller module schematic diagram;
In figure: 1 pedestal, 2 the 6th groups of micromotion platform flexible hinges, 3 the 3rd groups of micromotion platform flexible hinges, 4 the 3rd flexible hinges, 5 the 4th flexible hinges, 6 first sensor probes, 7 the 7th groups of micromotion platform flexible hinges, 8 second piezoelectric bimorphs, 9 first measure plate, 10 the 4th groups of micromotion platform flexible hinges, 11 second sensor probes, 12 the 7th flexible hinges, 13 the 8th flexible hinges, 14 second measure plate, 15 fine motion output stages, 16 first piezoelectric bimorphs, 17 first groups of micromotion platform flexible hinges, 18 first connecting plates, 19 first voice coil motor movers, 20 first voice coil motor stators, 21 first flexible hinges, 22 grand moving output stages, 23 second flexible hinges, 24 the 5th groups of micromotion platform flexible hinges, 25 second connecting plates, 26 second voice coil motor stators, 27 second voice coil motor movers, 28 the 5th flexible hinges, 29 second groups of micromotion platform flexible hinges, 30 the 6th flexible hinges, 31 the 8th groups of micromotion platform flexible hinges, 28-1 first connecting rod, 28-2 second connecting rod, the parallel leaf spring type flexible hinge of 28-3 first, the parallel leaf spring type flexible hinge of 28-4 second.
Embodiment
For making object, technological scheme and the advantage of the embodiment of the present invention clearer, accompanying drawing below in conjunction with the embodiment of the present invention, and taking into account on the basis of factors such as considering platform structure optimization, manufacturing process, the technological scheme in the embodiment of the present invention is carried out to clear, complete description.Certainly, it is exemplary crossing the embodiment who is described with reference to the drawings, and is intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
Fig. 1 is the perspective view of one embodiment of the invention, by figure, be can clearly be seen that, the whole cascaded structure that adopts of the present invention, is embedded in macro-moving stage central authorities by micromotion platform and forms.
Macro-moving stage adopts parallel-connection structure, macro-moving stage guide rail and grand moving output stage 22, consists of, and by the first voice coil motor and the second voice coil motor, is directly driven.Macro-moving stage guide rail adopts full flexible structure, by symmetry, be hinged on first of 22 4 sides of grand moving output stage, second, the 3rd, the 4th macro-moving stage guide rail forms, first, second, the 3rd, the 4th macro-moving stage guide rail is respectively by the first flexible hinge 21 and the second flexible hinge 23, the 3rd flexible hinge 4 and the 4th flexible hinge 5, the 5th flexible hinge 28 and the 6th flexible hinge 30, the 7th flexible hinge 12 and the 8th flexible hinge 13 form, rely on the resiliently deformable of flexible hinge, macro-moving stage guide rail passes to macro-moving stage by the motion of voice coil motor, thereby the micromotion platform that promotes macro-moving stage and inlay within it completes the grand moving of large stroke submicron order precision.
Micromotion platform adopts parallel-connection structure equally, fine motion output stage 15 and micromotion platform guide rail, consists of, and by the first piezoelectric bimorph 16 and the second piezoelectric bimorph 8, is directly driven.Micromotion platform guide rail adopts compound parallel four-bar guide mechanism, by with first group of hinged micromotion platform flexible hinge 17 of grand moving output stage, second group of micromotion platform flexible hinge 29, the 3rd group of micromotion platform flexible hinge 3, the 4th group of micromotion platform flexible hinge 10 and be hinged on the 5th group of micromotion platform flexible hinge 24 on 15 4 sides of fine motion output stage, the 6th group of micromotion platform flexible hinge 2, the 7th group of micromotion platform flexible hinge 7, the 8th group of micromotion platform flexible hinge 31 formation that is hinged, rely on the resiliently deformable of these eight groups of micromotion platform flexible hinges, micromotion platform guide rail changes the bending deflection of piezoelectric bimorph into the fine motion of fine motion output stage 15 nano-precisions.
In servo platform X and Y-direction, be equipped with laser displacement sensor, laser displacement sensor is by measuring plate and sensor probe two-part form, the first measurement plate 9 and second is measured plate 14 and is vertically fixed on fine motion output stage 15, first sensor probe 6 and the second sensor probe 11 are measured relative and the maintenance measuring distance of plate 14 with the first measurement plate 9 and second respectively, first sensor probe the 6 and second sensor probe 11 is fixed by screws on pedestal 1, by the motion feedback of fine motion output stage 14 to controller (not shown), realizing the closed-loop of servo platform controls, guarantee its kinematic accuracy.
Fig. 2 is the plane structure schematic diagram of one embodiment of the invention, be can clearly be seen that structure and the motion principle of the macro-moving stage that voice coil motor drives by figure.
The first voice coil motor adopts the structure of outside mover, internal stator, the first voice coil motor stator 20 is hot-wire coil, be fixed by screws on pedestal 1, the first voice coil motor mover 19 is permanent-magnet structure, by the first connecting plate 18, with the first flexible hinge 21, connect, the first flexible hinge 21 is hinged on grand moving output stage 22, and meanwhile, the first flexible hinge 21 connects with the second flexible hinge 23 being hinged on pedestal 1.The structure of the 3rd flexible hinge 4 and the 4th flexible hinge 5 is identical with the second flexible hinge 23 with the first flexible hinge 21, and the 3rd flexible hinge 4 is hinged on grand moving output stage 22, is connected with the 4th flexible hinge 5 being hinged on pedestal 1 simultaneously.The second voice coil motor adopts the structure of outside mover, internal stator equally, the second voice coil motor stator 26 is hot-wire coil, be fixed by screws on pedestal 1, the second voice coil motor mover 27 is permanent-magnet structure, by the second connecting plate 25, with the 5th flexible hinge 28, connect, the 5th flexible hinge 28 is hinged on grand moving output stage 22, and meanwhile, the 5th flexible hinge 28 connects with the 6th flexible hinge 30 being hinged on pedestal 1.The structure of the 7th flexible hinge 12 and the 8th flexible hinge 13 is identical with the 6th flexible hinge 30 with the 5th flexible hinge 28, and the 7th flexible hinge 12 is hinged on grand moving output stage 22, is connected with the 8th flexible hinge 13 being hinged on pedestal 1 simultaneously.
Above-mentioned the first flexible hinge 21, the second flexible hinge 23, the 3rd flexible hinge 4, the 4th flexible hinge 5, the 5th flexible hinge 28, the 6th flexible hinge 30, the 7th flexible hinge 12 and the 8th flexible hinge 13 all adopt two parallel leaf spring type structures, in order to realize the range of movement of large stroke.When the first voice coil motor energising work, the first voice coil motor mover 19 promotes grand moving output stage 22 and is embedded in its inner micromotion platform to move along directions X by the first flexible hinge 21, meanwhile, the second flexible hinge 23, the 4th flexible hinge 4, the 5th flexible hinge 28 and the 7th flexible hinge 12 have limited the coupled motions of macro-moving stage in Y-direction.When the second voice coil motor energising work, the second voice coil motor mover 27 promotes grand moving output stage 22 and is embedded in its inner micromotion platform to move along Y-direction by the 5th flexible hinge 28, simultaneously, the 6th flexible hinge 30, the 8th flexible hinge 13, the first flexible hinge 21 and the 3rd flexible hinge 4 have limited the coupled motions of macro-moving stage on directions X, thereby have realized the mobile decoupling of macro-moving stage in XY direction.
Fig. 3 is the two parallel leaf spring type flexible hinge structural representation (the 5th group of flexible hinge 28 of take is example) of one embodiment of the invention, and two parallel leaf spring type flexible hinges (the 5th group of flexible hinge 28) are by first connecting rod 28-1, second connecting rod 28-2, the first parallel leaf spring type flexible hinge 28-3 and second parallel leaf spring type flexible hinge 28-4 hinged composition.Above-mentioned the first parallel leaf spring type flexible hinge 28-3 is two leaf spring type flexible hinges that are parallel to each other, and with the second connecting rod 28-2 being hinged with it and fine motion output stage 15, forms parallelogram sturcutre; Above-mentioned the second parallel leaf spring type flexible hinge 28-4 is two leaf spring type flexible hinges that are parallel to each other, and with the first connecting rod 28-1 being hinged with it and second connecting rod 28-2, forms parallelogram sturcutre.Two parallelogram sturcutre series connection, form two parallel leaf spring type flexible hinge structures, and wherein second connecting rod 28-2 can move, thereby can realize the range of movement of large stroke.
Fig. 4 is the micromotion platform structure enlarged diagram of one embodiment of the invention, be can clearly be seen that structure and the motion principle of the micromotion platform that piezoelectric bimorph drives by figure.
Micromotion platform guide rail is the compound parallel four-bar guide mechanism being comprised of eight groups of micromotion platform flexible hinges, first group of micromotion platform flexible hinge 17 one end and grand moving output stage 22 are hinged, the other end and the 5th group of micromotion platform flexible hinge 24 are hinged, and the 5th group of micromotion platform flexible hinge 24 is hinged on fine motion output stage 15 simultaneously; Second group of micromotion platform flexible hinge 29 one end and grand moving output stage 22 are hinged, and the other end and the 6th group of micromotion platform flexible hinge 2 are hinged, and the 6th group of micromotion platform flexible hinge 2 is hinged on fine motion output stage 15 simultaneously; The 3rd group of micromotion platform flexible hinge 3 one end and grand moving output stage 23 are hinged, and the other end and the 7th group of micromotion platform flexible hinge 7 are hinged, and the 7th group of micromotion platform flexible hinge 7 is hinged on fine motion output stage 15 simultaneously; The 4th group of micromotion platform flexible hinge 10 one end and grand moving output stage 23 are hinged, and the other end and the 8th group of micromotion platform flexible hinge 31 are hinged, and the 8th group of micromotion platform flexible hinge 31 is hinged on fine motion output stage 15 simultaneously.Above-mentioned every group of micromotion platform flexible hinge forms by two flexible hinges, and is lobate flexible hinge.Totally four of the first piezoelectric bimorphs 16, be attached to respectively on four lobate flexible hinges of first group of micromotion platform flexible hinge 17 and the 3rd group of micromotion platform flexible hinge 3, totally four of the second piezoelectric bimorphs 8, are attached to respectively on four lobate flexible hinges of second group of micromotion platform flexible hinge 29 and the 4th group of micromotion platform flexible hinge 10.
Fig. 5 is the compound parallel four-bar guide mechanism schematic diagram (the micromotion platform directions X of take motion is example) of one embodiment of the invention, above-mentioned eight groups of micromotion platform flexible hinges hinge, consists of.Above-mentioned eight groups of micromotion platform flexible hinges evenly and be symmetrically distributed in four sides of micromotion platform output stage 15 and form parallelogram sturcutre, two compound parallel four-bar guide mechanisms of parallelogram sturcutre formation parallel with one another of connection in each moving direction of micromotion platform, when realizing micromotion platform motion transmission, guarantee the mobile decoupling of micromotion platform.When the first piezoelectric bimorph 16 energising work, produce bending deflection, drive first group of micromotion platform flexible hinge 17 and the 3rd group of micromotion platform flexible hinge 3 to produce resiliently deformable, by the 5th group of micromotion platform flexible hinge 24 and the 7th group of micromotion platform flexible hinge 7 being hinged with it, promote fine motion output stage 15 along directions X fine motion, the 6th group of micromotion platform flexible hinge 2 and the 8th group of micromotion platform flexible hinge 31 that distribute have in the Y direction limited fine motion output stage 15 coupled motions in the Y direction simultaneously.When the second piezoelectric bimorph 8 energising work, produce bending deflection, drive second group of micromotion platform flexible hinge 29 and the 4th group of micromotion platform flexible hinge 10 to produce resiliently deformable, by the 6th group of micromotion platform flexible hinge 2 and the 8th group of micromotion platform flexible hinge 31 being hinged with it, promote fine motion output stage 15 along Y-direction fine motion, the 5th group of micromotion platform flexible hinge 24 and the 7th group of micromotion platform flexible hinge 7 that are distributed on directions X have limited the coupled motions of fine motion output stage 15 on directions X simultaneously, thereby realized the mobile decoupling of micromotion platform in XY direction.
Fig. 6 is the controller module schematic diagram of one embodiment of the invention, controller is by main control computer, data acquisition module, D/A modular converter, voice coil motor driver and piezoelectric bimorph driver form, data acquisition module is with first, the second laser displacement sensor connects, the displacement signal of fine motion output stage 15 is passed to main control computer, main control computer converts analog output signal to through D/A modular converter, output through voice coil motor driver and piezoelectric bimorph driver control voice coil motor and piezoelectric bimorph, adjust position and the motion of fine motion output stage, form closed-loop structure, reach needed location and tracking accuracy.
Although above-mentioned, by reference to the accompanying drawings the specific embodiment of the present invention is described; but be not limiting the scope of the invention; one of ordinary skill in the art should be understood that; on the basis of technological scheme of the present invention, those skilled in the art do not need to pay various modifications that creative work can make or distortion still in protection scope of the present invention.
Claims (10)
1. the full flexible high-precision servo platform of bipolar two dimension, it is characterized in that: comprise pedestal, macro-moving stage, first, second voice coil motor, micromotion platform, first, second piezoelectric bimorph, first, second displacement transducer and the controller being connected with described voice coil motor, piezoelectric bimorph and displacement transducer; Described pedestal, macro-moving stage and micromotion platform are interconnective integral structure, by a sheet material, are processed; Described macro-moving stage is driven by first, second voice coil motor; Described micromotion platform is embedded in macro-moving stage, with macro-moving stage, together moves, and micromotion platform is directly driven by first, second piezoelectric bimorph being attached on micromotion platform guide rail.
2. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 1, is characterized in that: described macro-moving stage comprises grand moving output stage and some macro-moving stage guide rails being arranged in parallel.
3. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 2, it is characterized in that: described macro-moving stage guide rail adopts full flexible structure, comprise structure in parallel identical first, second, the 3rd, the 4th macro-moving stage guide rail, described first, second, the 3rd, the 4th macro-moving stage guide rail is articulated with respectively on four sides of grand moving output stage, first, second, the 3rd, the 4th macro-moving stage guide rail includes two flexible hinges, one end of two flexible hinges is hinged on respectively on grand moving output stage and pedestal, and each flexible hinge all adopts two parallel leaf spring type structures, in order to realize stroke motion scope and mobile decoupling.
4. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 1, it is characterized in that: the first described voice coil motor and the second voice coil motor all adopt the structure of outside permanent magnetism, internal electromagnetic, and permanent magnetism part is as mover, electromagnet portion is as stator, the first voice coil motor stator and the second voice coil motor stator are vertically fixed on respectively on pedestal, the first described voice coil motor mover is connected with the first flexible hinge by the first connecting plate, and the second voice coil motor mover is connected with the 5th flexible hinge by the second connecting plate.
5. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 1, it is characterized in that: it is central that described micromotion platform is embedded in grand moving output stage, and micromotion platform comprises fine motion output stage and is attached thereto a plurality of micromotion platform guide rails that are arranged in parallel that connect.
6. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 5, it is characterized in that: described micromotion platform guide rail is the compound parallel four-bar guide mechanism that eight groups of flexible hinges form, wherein, described first, second, one end of third and fourth group of micromotion platform flexible hinge is hinged with pedestal respectively, the other end is respectively with the 5th, the 6th, the the 7th and the 8th group of micromotion platform flexible hinge is hinged, and the 5th, the 6th, the 7th, the other end of the 8th group of micromotion platform flexible hinge be hinged on four sides of fine motion output stage respectively, described first, second, the 3rd, the 4th, the 5th, the 6th, the the 7th and the 8th group of micromotion platform flexible hinge is lobate flexible hinge, and each group micromotion platform flexible hinge forms by two lobate flexible hinges.
7. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 6, is characterized in that: four of described the first piezoelectric bimorphs, are attached to respectively on four lobate flexible hinges of first, the 3rd group of micromotion platform flexible hinge totally; Totally four of the second described piezoelectric bimorphs, are attached to respectively on four lobate flexible hinges of second, the 4th group of micromotion platform flexible hinge.
8. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 1, it is characterized in that: described first, second displacement transducer is all for by sensor probe with measure plate laser displacement sensor dimerous, and first, second displacement transducer is respectively used to measure the displacement signal of fine motion output stage on XY both direction.
9. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 8, it is characterized in that: the measurement plate of described first, second displacement transducer is all arranged vertically on fine motion output stage, the sensor probe of described first, second displacement transducer is bolted on pedestal, and relative with the measurement plate of first, second displacement transducer respectively, and keep measuring distance.
10. the full flexible high-precision servo platform of bipolar two dimension as claimed in claim 1, it is characterized in that: described controller comprises main control computer, data acquisition module, D/A modular converter, voice coil motor driver and piezoelectric bimorph driver, data acquisition module is with first, second displacement sensor connects, the displacement signal of fine motion output stage is passed to main control computer, main control computer converts analog signal output to through D/A modular converter, output through voice coil motor described in voice coil motor driver and piezoelectric bimorph driver control and piezoelectric bimorph, adjust position and the motion of fine motion output stage, form closed-loop structure, reach needed kinematic accuracy.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10217162A (en) * | 1997-01-29 | 1998-08-18 | Mitsubishi Electric Corp | Positioning device |
| CN1562729A (en) * | 2004-04-14 | 2005-01-12 | 哈尔滨工业大学 | Running fix platform for macro/micro dual driven miniature type robot |
| CN1597268A (en) * | 2004-07-30 | 2005-03-23 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1731082A (en) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system |
| CN101474758A (en) * | 2009-01-20 | 2009-07-08 | 西安理工大学 | Macro/micro drive accurate feeding system with parallel series guiding rail joint portion |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
-
2013
- 2013-11-06 CN CN201310545708.0A patent/CN103557412B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10217162A (en) * | 1997-01-29 | 1998-08-18 | Mitsubishi Electric Corp | Positioning device |
| CN1562729A (en) * | 2004-04-14 | 2005-01-12 | 哈尔滨工业大学 | Running fix platform for macro/micro dual driven miniature type robot |
| CN1597268A (en) * | 2004-07-30 | 2005-03-23 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
| CN1644329A (en) * | 2005-01-11 | 2005-07-27 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN1731082A (en) * | 2005-08-26 | 2006-02-08 | 哈尔滨工业大学 | Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system |
| CN101474758A (en) * | 2009-01-20 | 2009-07-08 | 西安理工大学 | Macro/micro drive accurate feeding system with parallel series guiding rail joint portion |
| CN102543217A (en) * | 2012-01-20 | 2012-07-04 | 澳门大学 | Macro-micro driven bidimensional integrated micro positioning platform |
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