CN110434621A - A kind of macro micro- double drive precision positioning device and control method based on active vibration isolation - Google Patents
A kind of macro micro- double drive precision positioning device and control method based on active vibration isolation Download PDFInfo
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- CN110434621A CN110434621A CN201910808354.1A CN201910808354A CN110434621A CN 110434621 A CN110434621 A CN 110434621A CN 201910808354 A CN201910808354 A CN 201910808354A CN 110434621 A CN110434621 A CN 110434621A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/002—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B3/00—Details of movements not otherwise provided for
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- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of macro micro- double drive precision positioning device and control method based on active vibration isolation, including mechanical movement body unit, detection unit and drive control unit；The mechanical movement body unit includes positioning device pedestal, U-shaped platform, micromotion platform, has iron linear motor and APA driver；The detection unit include for detecting the grating displacement sensor of U-shaped platform displacement, the laser interferometer for detecting micromotion platform displacement and for detect micromotion platform with respect to U-shaped platform horizontal direction vibratory output capacitance displacement sensor；Described control unit includes Linear motor servo amplifier, APA linear amplifier, motion control card, computer and data collecting card, the device carries out vibration isolation by the way of active vibration, it is effectively reduced the influence because of machine vibration to locating platform, can further realize the positioning of higher precision.
Description
Technical field
The present invention relates to precision positioning fields, and in particular to a kind of macro micro- double drive precision positioning dress based on active vibration isolation
It sets and control method.
Background technique
Modern Scientific Instruments and equipment constantly develop towards higher precision direction, either the equipment for processing and manufacturing
Or for the instrument of detection, their requirements to precision controlling are higher and higher, on the other hand, in order to meet efficient production system
Requirement is made, it is also higher and higher to the operation and its response speed of machine.But while with to these performance boosts, it is other can not
The problem of ignoring also occurs therewith.Wherein the requirement to the control of micro-vibration has reached unprecedented height, active vibration control
Technology processed is frequently used for controlling low frequency micro-vibration.
Compliant mechanism is since its structure is simple, work efficiency is high, is usually applied to robot precision without the features such as friction
In positioning system, but since micro-positioning platform inevitably has the problems such as larger inertia, easy impact during the motion,
And spring rates of flexure hinges is low, is just easy to the influence for making micromotion platform by elastic vibration, reduces the positioning accurate of whole device
Degree and movenent performance.
It is a kind of to carry out vibration isolation by the way of active vibration, macro/micromotion displacement output is taken into account, can guarantee big stroke
Realize that the device of precision positioning is good solution under range motion.
Summary of the invention
In order to overcome shortcoming and deficiency of the existing technology, primary and foremost purpose of the present invention is to provide a kind of based on active vibration isolation
Macro micro- double drive precision positioning device.
The control of the secondary purpose of the present invention is to provide a kind of macro micro- double drive precision positioning device based on active vibration isolation
Method.
In order to achieve the above object, the present invention adopts the following technical scheme that:
A kind of macro micro- double drive precision positioning device based on active vibration isolation, including mechanical movement body unit, detection list
Member and drive control unit；
The mechanical movement body unit includes positioning device pedestal, U-shaped platform, micromotion platform, has iron linear motor and APA
Driver；
Two linear guides are fixed on the boss of the positioning device pedestal, are set in every linear guide there are two sliding block；
The U-shaped platform is made of two blocks of identical U-shaped platform side plates and U-shaped base plate, and two blocks of U-shaped platform side plates are parallel to each other and hang down
Directly it is fixed on U-shaped platform bottom plate；U-shaped platform is connect with the sliding block on guide rail, is slided relative to positioning device pedestal；
The top of U-shaped platform bottom plate is arranged in by flexible hinge for the micromotion platform；
The stator for having iron linear motor is fixed on positioning device pedestal, and mover is fixed under U-shaped platform bottom plate
Face；
APA driver one end connects U-shaped platform side plate, and the other end is connect by connects hinge with micromotion platform；
The detection unit includes for detecting the grating displacement sensor of U-shaped platform displacement, for detecting micromotion platform
The laser interferometer of displacement and for detect micromotion platform with respect to U-shaped platform horizontal direction vibratory output capacitance displacement sensor；
Described control unit include Linear motor servo amplifier, APA linear amplifier, motion control card, computer and
Data collecting card, the detection unit detection signal are exported to data collecting card, are further input to computer, the computer
It is connected with each other with motion control card, the motion control card outputs signal to Linear motor servo amplifier respectively and APA is linear
Amplifier, further driving has iron linear motor and APA driver.
It preferably, further include a crossbeam, the crossbeam is fixed on positioning device pedestal, and laser interferometer is fixed on cross
Liang Shang.
Preferably, fine motion detection plate is installed in a side of the micromotion platform, motionless relative to micromotion platform.
Preferably, it is described have iron linear motor installation after mover and stator between there are the gaps 2mm.
Preferably, it is smooth flat that fine motion detection plate, which is used to detect a face of displacement,.
Preferably, the flexible hinge is six.
Preferably, a kind of control method of macro micro- double drive precision positioning device based on active vibration isolation, including walk as follows
It is rapid:
Grating displacement sensor detects the position of current U-shaped platform, and location information is sent to calculating by data collecting card
In machine, computer is by the information processing and obtains control information, which is put through motion control card, Linear motor servo
Big device has been sent to iron linear motor and has generated macro dynamic movement；
Laser interferometer detects the position of micromotion platform, and information is sent to computer, computer by data collecting card
Operation related algorithm is transferred to motion control card, APA linear amplifier for information is controlled, and finally controlling APA driver makes fine motion
Platform generates fine motion displacement and reaches precision positioning；
Capacitance displacement sensor opposite U-shaped of detection micromotion platform during the macro dynamic movement of micromotion platform and precision positioning
The vibratory output of platform, and the information content is sent to computer by data collecting card, vibration isolation control algolithm is run by computer, is known
Whether the information is not abnormal vibrations and generates the corresponding signal for inhibiting vibration, which is linearly put through motion control card, APA
Big device is transmitted to ADA driver, and the nuisance vibration is made to be inhibited.
Beneficial effects of the present invention:
(1) a kind of macro micro- double drive precision positioning device based on active vibration isolation of the present invention can reach the macro dynamic of 500mm
Displacement, minimum resolution 11nm.
(2) present invention has ironcore linear motor to be capable of providing unit using there is core type linear motor to drive macro-moving stage
The bigger power of volume, advantageously, while linear motor stator electric and mover be with air gap for the device small and exquisite for design outline,
Without Mechanical Contact, no friction and noise, the friction of device are existed only between the sliding rail of linear guide and sliding block, what which generated
High thrust and high moving mass improve the overall performance of device；
(3) present invention inhibits nuisance vibration using active vibration by the way of, and then reaches vibration isolating effect, passively vibrate by
The performance of visco-elastic damping material limits, and service life machine effectiveness in vibration suppression is often difficult to meet design requirement, and active vibration is opposite
Passive vibration possesses faster stabilized speed.
(4) present invention use APA driver, it is small in size convenient for assembly, high resolution, run smoothly, driving force it is big, with
Flexible hinge use makes device possess higher positioning accuracy.
Detailed description of the invention
Fig. 1 is general structure schematic diagram of the invention；
Fig. 2 is main view of the invention；
Fig. 3 is top view of the invention；
Fig. 4 is left view of the invention.
Specific embodiment
Below with reference to examples and drawings, the present invention is described in further detail, but embodiments of the present invention are not
It is limited to this.
Embodiment
As Figure 1-Figure 4, a kind of macro micro- double drive precision positioning device based on active vibration isolation, the device include machinery
Motion body unit, detection unit and drive control unit；
The mechanical movement body unit includes positioning device pedestal 13, U-shaped platform, micromotion platform 1, has iron linear motor 12
And APA driver；
Be fixed with the linear guide 11 of two same sizes on the boss of positioning device pedestal 13, on every guide rail there are two
Sliding block, two guide rails are installed in parallel, and two guide rails distance is 120mm；U-shaped platform is by two blocks of identical U-shaped platform side plates 7 and one piece of U-shaped
Platform bottom plate 17 is spliced, and two blocks of U-shaped platform side plates are parallel to each other and are perpendicularly fixed on U-shaped platform bottom plate；On U-shaped platform and guide rail
Sliding block connection, can the movement of relative positioning pedestal；Four identical flexible hinges 16 and other two identical flexibilities
Hinge can generate the displacement of horizontal direction for connecting micromotion platform 1 and U-shaped platform bottom plate, micromotion platform around flexible hinge.
There is the stator of iron linear motor 12 to be fixed on positioning device pedestal, mover is fixed below U-shaped platform bottom plate；Two
Block U-shaped platform side plate is all connected with APA driver 6, and APA driver one end connects U-shaped platform side plate, and one end connects connects hinge 4, even
Hinge is connect to connect with micromotion platform again；
Described to have after the installation of iron linear motor between mover and stator there are the gap 2mm, this gap answers strict control,
Gap crosses the driving force that conference reduces motor, influences the response speed of device, gap is too small may be due to the magnetic absorption of motor
Impurity iron filings damage motor.
The detection unit includes grating displacement sensor 14, laser interferometer 9 and capacitance displacement sensor 3.
The laser interferometer is skin light precision laser interferometer.
The grating displacement sensor is used to detect the displacement output quantity of linear motor and the macro dynamic displacement of U-shaped platform,
One piece of fine motion detection plate 2 is installed on a side of micromotion platform, opposite micromotion platform is motionless；Grating displacement sensor
Positioning device pedestal is fixed in 14 grating scale part, and the Grating examinations head point of grating sensor passes through sensor link block 15
It is fixed on U-shaped platform pedestal, grating scale can be moved relatively when U-shaped platform generates displacement, and then detect the displacement of U-shaped platform.
A piece crossbeam 10 is fixed in positioning device pedestal, and is located at the side of U-shaped side plate, and crossbeam is door subrack structure,
Two vertical beams of door subrack structure are vertically fixed on positioning device pedestal, and laser interferometer retaining element 8 is fixed on door
On the intermediate beam of subrack, micromicron precision laser interferometer 9 is fixed on laser interferometer retaining element；Capacitance displacement sensor
3 are fixed on U-shaped platform side plate by capacitance sensor retaining element 5, and capacitance displacement sensor is the inspection of active vibration isolation part
Device is surveyed, for detecting micromotion platform with respect to the vibratory output in U-shaped platform horizontal direction.
Drive control unit includes:
Macro dynamic drive part: iron linear motor is one of the main body of macro dynamic drive part, needs to carry out in positioning device
On a large scale when linear motion, control amount is transmitted to by computer via motion control card 21, Linear motor servo amplifier 18
Linear motor controls it, to make U-shaped platform that the displacement of big stroke occur；Correlation displacement information is by grating displacement sensor
It measures and is sent to computer, the Linear motor servo amplifier and motion control card are connected with each other；
Fine motion drive part: APA driver is the main body for generating fine motion displacement, when micromicron precision laser interferometer detects
The position of current locating platform and by information after data collecting card 20 is sent to computer 22, computer is by fine motion driving portion
Divide required displacement information to control via motion control card, APA linear amplifier 19 APA driver, makes micromotion platform
Micro-displacement is generated, further locating platform is accurately positioned；
Active vibration isolation part: APA driver and capacitance displacement sensor are the important components of active vibration isolation；Capacitor position
The relative displacement of displacement sensor real-time detection micromotion platform and U-shaped platform, and computer is transferred information to, computer operation is related
Vibration isolation control algolithm, when recognizing micromotion platform and being the abnormal displacements generated due to vibration by vibration suppression amount via movement
Control card, APA linear amplifier control APA driver make micromotion platform generate active movement, caused by compensation is as vibration
Redundant displacement achievees the effect that vibration isolation by active vibration.
It needs to apply certain pretightning force when the described APA driver installation, avoids generating because of assembly or mismachining tolerance
Gap influences locating effect.
The fine motion detection plate, which is used to detect the one side being displaced and the processes such as need to be refined, be polished, keeps the piece test face
Flatness, to improve positioning accuracy and vibration isolating effect.
Control process of the invention:
Grating displacement sensor detects the position of current U-shaped platform, and location information is sent to calculating by data collecting card
In machine, computer is by the information processing and obtains control information, which is put through motion control card, Linear motor servo
Big device has been sent to iron linear motor control motor and has generated macro dynamic movement；
Micromicron precision laser interferometer detects the position of micromotion platform, and information is sent to calculating by data collecting card
Machine, computer run related algorithm and are transferred to motion control card, APA linear amplifier for information is controlled, and finally control APA driving
Device makes micromotion platform generate fine motion displacement and reaches precision positioning；
During macro dynamic movement and precision positioning, capacitance displacement sensor constantly detects micromotion platform with respect to U-shaped platform
Vibratory output, and the information content is sent to computer by data collecting card, vibration isolation control algolithm, identification is run by computer
Whether the information is abnormal vibrations and generates the corresponding signal for inhibiting vibration, by the signal through motion control card, APA Linear Amplifer
Device is transmitted to ADA driver, and the nuisance vibration is made to be inhibited.
In the present embodiment, there is ironcore linear motor using Heng Chuan company LMC100-080-S1 model, the motor peak value thrust
406N continues thrust 115N.
Guide rail is C5MBS series, guide rail wide 12mm, long 500mm, every 2 sliding blocks, installation pitch of holes 25mm.Grating position
Displacement sensor uses 2320 grating sensor of Italy GIVI MISUER company ISA, effectively detects stroke 500mm, resolution ratio
0.5um.Using capaNCDT-capacitive displacement transducer and measuring system, sensor model number CS005, static resolution
0.0375nm, dynamic resolution 1nm are suitable for small straight-line displacement and measure.In the device, using the skin of attocube company
Rice precision laser interferometer IDS3010, longer range measuring head model M12/C1.6, basic size is diameter of phi 14mm, long
17.4mm is spent, type of laser is collimation-type, and spot size 1.6mm, operating distance 0-1000mm, maximum detection rates 2m/s are moved
State resolution ratio is less than 13nm.
Fine motion part uses APA1000XL series of driver, driver effective travel stroke 1100um, average thrust
770N；Resonant frequency 210Hz, minimum resolution 11nm.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by the embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (7)
1. a kind of macro micro- double drive precision positioning device based on active vibration isolation, which is characterized in that including mechanical movement ontology list
Member, detection unit and drive control unit；
The mechanical movement body unit includes positioning device pedestal, U-shaped platform, micromotion platform, has iron linear motor and APA driving
Device；
Two linear guides are fixed on the boss of the positioning device pedestal, are set in every linear guide there are two sliding block；
The U-shaped platform is made of two blocks of identical U-shaped platform side plates and U-shaped base plate, and two blocks of U-shaped platform side plates are parallel to each other and vertically consolidate
Due on U-shaped platform bottom plate；U-shaped platform is connect with the sliding block on guide rail, is slided relative to positioning device pedestal；
The top of U-shaped platform bottom plate is arranged in by flexible hinge for the micromotion platform；
The stator for having iron linear motor is fixed on positioning device pedestal, and mover is fixed below U-shaped platform bottom plate；
APA driver one end connects U-shaped platform side plate, and the other end is connect by connects hinge with micromotion platform；
The detection unit includes for detecting the grating displacement sensor of U-shaped platform displacement, for detecting micromotion platform displacement
The laser interferometer of amount and for detect micromotion platform with respect to U-shaped platform horizontal direction vibratory output capacitance displacement sensor；
Described control unit includes Linear motor servo amplifier, APA linear amplifier, motion control card, computer and data
Capture card, the detection unit detection signal are exported to data collecting card, are further input to computer, the computer and fortune
Dynamic control card is connected with each other, and the motion control card outputs signal to Linear motor servo amplifier and APA Linear Amplifer respectively
Device, further driving has iron linear motor and APA driver.
2. macro micro- double drive precision positioning device according to claim 1, which is characterized in that further include a crossbeam, institute
It states crossbeam to be fixed on positioning device pedestal, laser interferometer is fixed on crossbeam.
3. macro micro- double drive precision positioning device according to claim 1, which is characterized in that one of the micromotion platform
Fine motion detection plate is installed in side, motionless relative to micromotion platform.
4. macro micro- double drive precision positioning device according to claim 1, which is characterized in that described to have iron linear motor peace
There are the gaps 2mm between mover and stator after dress.
5. macro micro- double drive precision positioning device according to claim 3, which is characterized in that fine motion detection plate is for detecting
One face of displacement is smooth flat.
6. macro micro- double drive precision positioning device according to claim 1, which is characterized in that the flexible hinge is six
Item.
7. a kind of control method based on any one of claim 1-6 macro micro- double drive precision positioning device, feature exist
In including the following steps:
Grating displacement sensor detects the position of current U-shaped platform, and location information is sent in computer by data collecting card,
Computer is by the information processing and obtains control information, by the control information through motion control card, Linear motor servo amplifier
It has been sent to iron linear motor and has generated macro dynamic movement；
Laser interferometer detects the position of micromotion platform, and information is sent to computer, computer operation by data collecting card
Related algorithm is transferred to motion control card, APA linear amplifier for information is controlled, and finally controlling APA driver makes micromotion platform
It generates fine motion displacement and reaches precision positioning；
Capacitance displacement sensor opposite U-shaped platform of detection micromotion platform during the macro dynamic movement of micromotion platform and precision positioning
Vibratory output, and the information content is sent to computer by data collecting card, vibration isolation control algolithm is run by computer, identification should
Whether information is abnormal vibrations and generates the corresponding signal for inhibiting vibration, by the signal through motion control card, APA linear amplifier
It is transmitted to ADA driver, the nuisance vibration is made to be inhibited.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111026166A (en) * | 2019-12-20 | 2020-04-17 | 华南理工大学 | Planar two-degree-of-freedom macro-micro composite positioning system and control method |
| CN117047499A (en) * | 2023-10-11 | 2023-11-14 | 无锡星微科技有限公司杭州分公司 | Nano positioning precision controller and motion platform |
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| CN103170845A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device and accuracy compensation method thereof |
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| CN210790014U (en) * | 2019-08-29 | 2020-06-19 | 华南理工大学 | Macro-micro dual-drive precise positioning device based on active vibration isolation |
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| JPH10217162A (en) * | 1997-01-29 | 1998-08-18 | Mitsubishi Electric Corp | Positioning device |
| US20060013894A1 (en) * | 2004-07-13 | 2006-01-19 | Pentax Corporation | Method for producing bone filler of calcium phosphate |
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| CN111026166A (en) * | 2019-12-20 | 2020-04-17 | 华南理工大学 | Planar two-degree-of-freedom macro-micro composite positioning system and control method |
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| CN117047499A (en) * | 2023-10-11 | 2023-11-14 | 无锡星微科技有限公司杭州分公司 | Nano positioning precision controller and motion platform |
| CN117047499B (en) * | 2023-10-11 | 2024-01-19 | 无锡星微科技有限公司杭州分公司 | Nano positioning precision controller and motion platform |
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