CN106082114A - A kind of flexible big stroke micro-nano technology equipment - Google Patents
A kind of flexible big stroke micro-nano technology equipment Download PDFInfo
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- CN106082114A CN106082114A CN201610716013.8A CN201610716013A CN106082114A CN 106082114 A CN106082114 A CN 106082114A CN 201610716013 A CN201610716013 A CN 201610716013A CN 106082114 A CN106082114 A CN 106082114A
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- flexible hinge
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2900/00—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems
Abstract
The invention discloses a kind of flexible big stroke micro-nano technology equipment, platform is performed including platform base and the processing being slideably positioned on platform base, the two groups of motion input devices being arranged in a mutually vertical manner with input direction, the delivery of motion input device is respectively connected with micro-sprocket bit moving device of single-degree-of-freedom；The connection of micro-sprocket bit moving device symmetry has the attachment structure of lever and pull bar and flexible hinge, and the two ends performing this side of platform with processing by this mechanism are connected.At respective outfan, micro-sprocket bit moving device is set, by pull bar and the transmission of flexible hinge, displacement is amplified output with accurate multiplying power, owing to motion input direction is mutually perpendicular to so the displacement exported can effectively cover all directions of whole working face, it is achieved multivariant exact shift；The pull bar and the flexible hinge that are arranged by motion input direction sides adjacent effectively realize the decoupling on this direction of displacement, and the friction being prevented effectively between parts is creeped, and improve the precision of displacement output.
Description
Technical field
The present invention relates to precise machining equipment technical field, more particularly, it relates to a kind of flexible big stroke micro-nano technology
Equipment.
Background technology
Ultraprecision Machining is as one of the technology of competitiveness great in machinery manufacturing industry, the most by many countries
Concern.In recent years, Ultraprecision Machining quickly grows, and machining accuracy improves constantly, and range of application constantly expands, as miniature
Precision processing technology, nanofabrication technique and Micro Electro Mechanical Systems (MEMS) etc. involved by machine-building, these technology all exist
In Precision and Ultra-precision Machining category.
But the development of the technology in some of which field imperfection, but many for the Tool Servo drive mechanism of Ultra-precision Turning
Linear motion for single-degree-of-freedom, although be significantly improved in terms of machining accuracy, is but difficult to microminiature labyrinth
Ultra-precision Turning.
Although there is also few in number on the market, there is the micro-nano technology actuator of two-freedom motion, however general
Time situation be that this type of process equipment the most all has the less large scale that is difficult to carry out of stroke and requires the scarce of lower processing tasks
Point, and also there is the shortcomings such as error not can compensate for.
In sum, how to efficiently solve the big stroke of Precision Machining actuator and high-precision contradiction, processing perform
Error compensation in mechanism kinematic is difficult to cause the technical problem of machining accuracy reduction etc., is current those skilled in the art
Urgent problem.
Summary of the invention
In view of this, it is an object of the invention to provide a kind of flexible big stroke micro-nano technology equipment, the big stroke of this flexibility
The structure design of micro-nano technology equipment can efficiently solve the big stroke of Precision Machining actuator and high-precision contradiction, processing
Error compensation in actuator campaign is difficult to cause the technical problem of machining accuracy reduction etc..
In order to achieve the above object, the present invention provides following technical scheme:
A kind of flexible big stroke micro-nano technology equipment, including platform base be slideably positioned in adding on described platform base
Work performs platform, and two groups of motion input devices that all fixing with described stage+module input direction is arranged in a mutually vertical manner, institute
The delivery stating motion input device is respectively connected with micro-location displacement dress of the single-degree-of-freedom arranged along respective movement output direction
Put；
Described micro-sprocket bit moving device includes output table, and the connection of the head and the tail two ends symmetry of described output table has the first pull bar
With the second pull bar, described first pull bar and described second pull bar each parallel to motion input direction, the tail end of the two is all towards right
The motion input device answered, the tail end of described first pull bar and described second pull bar respectively with in the first lever and the second lever
Section is connected by flexible hinge；
The head end of described first lever and described second lever is all connected by flexible, hinged with described platform base, described
The tail end of the first lever and described second lever is connected by flexible hinge respectively the 3rd pull bar and four-pull-rod, and the described 3rd
Pull bar and described four-pull-rod are each parallel to the input direction of this motion input device, described 3rd pull bar and described four-pull-rod
The two ends performing this side of platform with described processing respectively are connected.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described processing performs the other both sides of platform and is also associated with
The two group adverse movement input equipment the most contrary with the input direction of above-mentioned two groups of motion input devices, described adverse movement is defeated
Enter device to be connected with described processing execution platform also by corresponding micro-sprocket bit moving device.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described micro-sprocket bit moving device be additionally provided with body with
Described platform base installs fixing fixed part, and the head end of described first lever and the second lever is all by described fixed part and institute
State platform base to connect.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described 3rd pull bar and described four-pull-rod are with described
Processing performs all to be connected by flexible hinge between platform.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described 3rd pull bar and described four-pull-rod are with described
Processing perform the flexible hinge between platform, flexible hinge between described 3rd pull bar and described first lever, the described 4th
Flexible hinge between flexible hinge, described first pull bar and described first lever between second lever described in pull bar, described
Flexible hinge between second pull bar and described second lever, described first pull bar and described second pull bar and described output table it
Between flexible hinge, above flexible hinge is straight beam type flexible hinge.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described micro-sprocket bit moving device includes and described motion
The lever assembly that the delivery of input equipment connects, described lever assembly includes three grades of levers being connected mutually, between lever, thick stick
All it is connected by flexible hinge between bar with described platform base, logical between outfan and the described output table of described lever assembly
Cross flexible hinge to connect, the motion that described delivery exports is amplified by a certain percentage.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described motion input device includes Piezoelectric Ceramic
Device.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described motion input device also includes that export orientation is tied
Structure, described export orientation structure is provided with and accommodates the gathering sill that the delivery of described piezoelectric ceramic actuator stretches out, described output
Guide frame is fixedly installed in described platform base.
Preferably, in above-mentioned flexibility big stroke micro-nano technology equipment, described processing performs to be mounted with cutter on platform
Module.
The flexible big stroke micro-nano technology equipment that the present invention provides, including platform base be slideably positioned on platform base
Processing perform platform, and the two groups of motion input devices being arranged in a mutually vertical manner of input direction all fixed with stage+module, transport
The delivery of dynamic input equipment is respectively connected with micro-sprocket bit moving device of the single-degree-of-freedom arranged along respective movement output direction；Micro-
Sprocket bit moving device includes output table, and the connection of the head and the tail two ends symmetry of output table has the first pull bar and the second pull bar, and first draws
Bar and the second pull bar are each parallel to motion input direction, and the tail end of the two is all towards corresponding motion input device, the first pull bar
Stage casing with the first lever and the second lever is connected by flexible hinge respectively with the tail end of the second pull bar；First lever and second
The head end of lever is all connected by flexible, hinged with platform base, and the tail end of the first lever and the second lever passes through flexible hinge respectively
Chain connects the 3rd pull bar and four-pull-rod, the 3rd pull bar and the four-pull-rod input side each parallel to this motion input device
To, the two ends that the 3rd pull bar and four-pull-rod perform this side of platform with processing respectively are connected.Use the technical side that the present invention provides
Case arranges the orthogonal motion input device of input direction, arranges micro-sprocket bit moving device at respective outfan, by drawing
The displacement enlargement output of the accurate multiplying power that micro-sprocket bit moving device is exported by the transmission of bar and flexible hinge, due to motion input
Direction is mutually perpendicular to so the displacement exported can effectively cover all directions of whole working face, it is achieved multivariant standard
Really displacement；Additionally, when the motion input device in a direction inputs displacement, be adjacent pull bar and flexible hinge that side is arranged
Being acted on by resilient support, effectively realize the decoupling on this direction of displacement, the friction being prevented effectively between parts is creeped, and improves
The precision of displacement output.In sum, the flexible big stroke micro-nano technology equipment that the present invention provides efficiently solves precision and adds
Error compensation in the big stroke of work actuator and high-precision contradiction, processing actuator campaign is difficult to cause processing smart
The technical problem of degree reduction etc..
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to
Other accompanying drawing is obtained according to these accompanying drawings.
The structural representation of the flexible big stroke micro-nano technology equipment that Fig. 1 provides for the embodiment of the present invention；
The vertical view close-up schematic view of the flexible big stroke micro-nano technology equipment that Fig. 2 provides for the embodiment of the present invention.
In accompanying drawing, labelling is as follows:
Platform base 1, micro-sprocket bit moving device 2, export orientation structure 3, piezoelectric ceramic actuator 4, processing perform platform
5, platform pad 6, output table the 7, first pull bar the 8, second pull bar the 9, the 3rd pull bar 10, four-pull-rod the 11, first lever 12, fixing
Portion 13.
Detailed description of the invention
The embodiment of the invention discloses a kind of flexible big stroke micro-nano technology equipment, big to solve Precision Machining actuator
Error compensation in stroke and high-precision contradiction, processing actuator campaign is difficult to cause the skill of machining accuracy reduction etc.
Art problem.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
Refer to Fig. 1, Fig. 2, the structural representation of the flexible big stroke micro-nano technology equipment that Fig. 1 provides for the embodiment of the present invention
Figure；The vertical view close-up schematic view of the flexible big stroke micro-nano technology equipment that Fig. 2 provides for the embodiment of the present invention.
The flexible big stroke micro-nano technology equipment that the present invention provides, including platform base 1 be slideably positioned in platform base 1
On processing perform platform 5, and the two groups of motion input devices being arranged in a mutually vertical manner of input direction all fixed with stage+module,
The delivery of motion input device is respectively connected with micro-sprocket bit moving device of the single-degree-of-freedom arranged along respective movement output direction
2；Micro-sprocket bit moving device 2 includes output table 7, and the connection of the head and the tail two ends symmetry of output table 7 has the first pull bar 8 and the second pull bar
9, the first pull bar 8 and the second pull bar 9 are each parallel to motion input direction, and the tail end of the two is all towards corresponding motion input dress
Putting, the tail end of the first pull bar 8 and the second pull bar 9 is respectively with the stage casing of the first lever 12 and the second lever by flexible hinge even
Connect；The head end of the first lever 12 and the second lever is all connected by flexible, hinged with platform base 1, the first lever 12 and the second thick stick
The tail end of bar is connected by flexible hinge respectively the 3rd pull bar 10 and four-pull-rod 11, and the 3rd pull bar 10 and four-pull-rod 11 are equal
Being parallel to the input direction of this motion input device, the 3rd pull bar 10 and four-pull-rod 11 perform this side of platform 5 with processing respectively
Two ends connect.
The flexible big stroke micro-nano technology equipment operation principle that the present embodiment provides is as follows: when one of them motion input dress
Put input displacement time, output table in accompanying drawing right side translation, drive the first pull bar to draw the first lever motion, the first lever with
Rotating clockwise centered by itself and the pin joint of platform base, under the effect of flexible hinge, the 3rd pull bar promotes processing to perform to put down
The side of platform, four-pull-rod in like manner promotes processing to perform the opposite side of platform, at the 3rd pull bar and the common work of four-pull-rod
Promote processing to perform platform to translate to the direction of movement output with lower, and by with the pull bar of movement output direction vertical direction and
The traction of flexible hinge, makes mechanism can realize the decoupling in the direction of motion, eliminates the impact on precise displacement of creeping that rubs.Can
Arranging platform pad 6 between platform base with micro-sprocket bit moving device stops the two directly to contact, and prevents frictional influence micro-fixed
Bit Shift device output displacement precision.
The technical scheme using the present invention to provide arranges the orthogonal motion input device of input direction, respective defeated
Go out end and micro-sprocket bit moving device is set, accurate times micro-sprocket bit moving device exported by the transmission of pull bar and flexible hinge
The displacement enlargement output of rate, due to motion input direction be mutually perpendicular to thus the displacement that export can effectively to cover whole work flat
The all directions in face, it is achieved multivariant exact shift；Additionally, when the motion input device in a direction inputs displacement,
The pull bar and the flexible hinge that are adjacent side setting are acted on by resilient support, effectively realize the decoupling on this direction of displacement,
The friction being prevented effectively between parts is creeped, and improves the precision of displacement output；Make equipment overall by symmetrical structure design
Structure is compacter, improves system stiffness and makes output displacement more stably decrease the deviation of platform motion.In sum, originally
The flexible big stroke micro-nano technology equipment that invention provides efficiently solves the big stroke of Precision Machining actuator and high-precision
Error compensation in contradiction, processing actuator campaign is difficult to cause the technical problem of machining accuracy reduction etc..
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described processing performs the other both sides of platform 5 and is also associated with and the input side of above-mentioned two groups of motion input devices
To two groups of the most contrary adverse movement input equipment, described adverse movement input equipment is also by corresponding micro-location displacement dress
Put 2 to be connected with described processing execution platform 5.
With above-described embodiment in like manner, the offside at former motion input direction also sets up two groups of adverse movement input equipment,
The displacement of two degree of freedom four directions in same plane can be realized accurately export.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described micro-sprocket bit moving device 2 is additionally provided with body and installs fixing fixed part with described platform base 1
13, the head end of described first lever 12 and the second lever is all connected with described platform base 1 by described fixed part 13.
In the technical scheme that the present embodiment provides, fixed part is the extension of micro-sprocket bit moving device, and the displacement of micro-location fills
Putting to realize installing by fixed part and platform base and fix, fixed part not merely refers to some ad hoc structure but micro-sprocket bit
Moving device and the fixed part of platform base are effective by one end of the first lever and the second lever and the connection of fixed part
Ensure that the fixed pivot of lever motion is stable.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described 3rd pull bar 10 and described four-pull-rod 11 and described processing perform between platform 5 all by flexible
Chain connection.
Flexible hinge is the elastic bearing of a kind of simple in construction, shape more rule, has and geometrical central axis coincidence
The centre of gyration, the finite deformation of the elastic sheet relying on circumference radial equipartition is operated.Under torsional load, turn round around it
Center produces gyration in limited angular range.The flexible hinge itself used in the present invention can be with lever or pull bar etc.
The one-body molded processing of other fixed components, can be prevented effectively from rigging error.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receive in process equipment, described 3rd pull bar 10 and described four-pull-rod 11 and described processing perform the flexible hinge between platform 5,
Described in flexible hinge between described 3rd pull bar 10 and described first lever 12, described four-pull-rod 11 between second lever
Flexible hinge between flexible hinge, described first pull bar 8 and described first lever 12, described second pull bar 9 are with described second
Flexible hinge between flexible hinge between lever, described first pull bar 8 and described second pull bar 9 and described output table 7, with
Upper flexible hinge is straight beam type flexible hinge.
Straight beam type hinge is that hinged two ends all use the design of square in excessive position, owing to design needs,
The hinge of the above link position is required to realize bigger displacement transmission, due to other flexible hinges position-limiting action not
Exigent kinematic accuracy, so using straight beam type flexible hinge.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described micro-sprocket bit moving device 2 includes the lever assembly being connected with the delivery of described motion input device,
Described lever assembly includes three grades of levers being connected mutually, all by flexible between lever, between lever and described platform base 1
Chain connection, is connected by flexible hinge between the outfan of described lever assembly with described output table 7, by defeated for described delivery
The motion gone out is amplified by a certain percentage.
Micro-sprocket bit moving device of the present embodiment include three grades of differential type levers by displacement equations, between lever and lever with
Flexible hinge is all used to connect conduction displacement, in the own position of flexible hinge and lever and size situation accurately between base
Under, it is possible to achieve amplifying the most accurately of displacement；And this design structure is simple and clear, in the space hinge structure occupied
Design less, be designed with symmetrical structure, integral rigidity is higher, can relatively stable and output displacement accurately, at machine
On the premise of the size of structure own is accurate, it is possible to effectively eliminate lateral additional displacement, the Longitudinal data displacement of reducing mechanism self is by mistake
Difference, improves the precision of displacement equations, and the design of flexible hinge is prone to be integrally machined, and can avoid rigging error.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described motion input device includes piezoelectric ceramic actuator 4.
Piezoelectric ceramic actuator is a kind of inverse piezoelectric principle utilizing piezoelectric ceramics, realizes accurately by controlling electric current input
The device of displacement output, uses piezoelectric ceramic actuator can provide input of moving accurately, thus order is put down through compliant motion
Platform sends out the displacement of big output can be the most controlled.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described motion input device also includes that export orientation structure 3, described export orientation structure 3 are provided with receiving
The gathering sill that the delivery of described piezoelectric ceramic actuator 4 stretches out, described export orientation structure 3 is fixedly installed at the bottom of described platform
Seat 1.
Present embodiments provide guide frame, in order to the output displacement of motion input device is exported axis with it and strictly hangs down
Directly, the precision of displacement output is further increased.
For optimizing technique scheme further, the big stroke of above-mentioned flexibility is micro-on the basis of above-described embodiment preferably
Receiving in process equipment, described processing performs to be mounted with cutter module on platform 5.
In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is and other
The difference of embodiment, between each embodiment, identical similar portion sees mutually.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses the present invention.
Multiple amendment to these embodiments will be apparent from for those skilled in the art, as defined herein
General Principle can realize without departing from the spirit or scope of the present invention in other embodiments.Therefore, the present invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein and features of novelty phase one
The widest scope caused.
Claims (9)
1. a flexibility big stroke micro-nano technology equipment, it is characterised in that include platform base and be slideably positioned in described platform
Processing on base performs platform, and two groups of motions that all fixing with described stage+module input direction is arranged in a mutually vertical manner are defeated
Entering device, the delivery of described motion input device is respectively connected with the micro-fixed of the single-degree-of-freedom along the setting of respective movement output direction
Bit Shift device；
Described micro-sprocket bit moving device includes output table, and the symmetrical connection in the head and the tail two ends of described output table has the first pull bar and the
Two pull bars, described first pull bar and described second pull bar are each parallel to motion input direction, and the tail end of the two is all towards correspondence
Motion input device, the tail end of described first pull bar and described second pull bar is logical with the stage casing of the first lever and the second lever respectively
Cross flexible hinge to connect；
The head end of described first lever and described second lever is all connected by flexible, hinged with described platform base, and described first
The tail end of lever and described second lever is connected by flexible hinge respectively the 3rd pull bar and four-pull-rod, described 3rd pull bar
With described four-pull-rod each parallel to the input direction of this motion input device, described 3rd pull bar and described four-pull-rod respectively
The two ends performing this side of platform with described processing are connected.
Flexibility the most according to claim 1 big stroke micro-nano technology equipment, it is characterised in that it is another that described processing performs platform
Outer both sides are also associated with the two group adverse movement input equipment the most contrary with the input direction of above-mentioned two groups of motion input devices,
Described adverse movement input equipment performs platform also by corresponding micro-sprocket bit moving device with described processing and is connected.
Flexibility the most according to claim 2 big stroke micro-nano technology equipment, it is characterised in that described micro-sprocket bit moving device
Being additionally provided with body and install fixing fixed part with described platform base, the head end of described first lever and the second lever all passes through
Described fixed part is connected with described platform base.
Flexibility the most according to claim 3 big stroke micro-nano technology equipment, it is characterised in that described 3rd pull bar and described
Four-pull-rod performs with described processing to be all connected by flexible hinge between platform.
Flexibility the most according to claim 4 big stroke micro-nano technology equipment, it is characterised in that described 3rd pull bar and described
Flexible hinge between four-pull-rod and described processing execution platform, the flexibility between described 3rd pull bar and described first lever
Between flexible hinge, described first pull bar and described first lever between second lever described in hinge, described four-pull-rod
Flexible hinge between flexible hinge, described second pull bar and described second lever, described first pull bar and described second pull bar
And the flexible hinge between described output table, above flexible hinge is straight beam type flexible hinge.
6. according to the flexible big stroke micro-nano technology equipment described in any one of claim 1 to 5, it is characterised in that described micro-fixed
Bit Shift device includes the lever assembly being connected with the delivery of described motion input device, and described lever assembly includes three grades mutually
The lever being connected, between lever, lever be all connected by flexible hinge between described platform base, described lever assembly
It is connected by flexible hinge between outfan with described output table, the motion that described delivery exports is amplified by a certain percentage.
Flexibility the most according to claim 6 big stroke micro-nano technology equipment, it is characterised in that described motion input device bag
Include piezoelectric ceramic actuator.
Flexibility the most according to claim 7 big stroke micro-nano technology equipment, it is characterised in that described motion input device is also
Including export orientation structure, described export orientation structure is provided with leading of accommodating that the delivery of described piezoelectric ceramic actuator stretches out
To groove, described export orientation structure is fixedly installed in described platform base.
Flexibility the most according to claim 6 big stroke micro-nano technology equipment, it is characterised in that described processing performs on platform
It is mounted with cutter module.
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| CN106711075A (en) * | 2017-03-23 | 2017-05-24 | 广东工业大学 | X-Y-theta nano compensation device for wafer-level chip packaging and aligning |
| CN106737597A (en) * | 2017-01-12 | 2017-05-31 | 广东工业大学 | A kind of XYZ three-freedom degree precisions positioner |
| CN108453492A (en) * | 2018-03-30 | 2018-08-28 | 天津大学 | A kind of big stroke pressing mechanism for micro-nano delineation |
| WO2024000776A1 (en) * | 2022-06-30 | 2024-01-04 | 北京华卓精科科技股份有限公司 | Positioning apparatus for loading and unloading and lithography device |
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