JP2006322714A - Motion stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a motion stage capable of precise positional adjustment for the structure as a whole provided with the X-axis direction and Y-axis direction actuators. <P>SOLUTION: An X-direction moving intermediate stage 12 which is separated from the stage table 11, capable of moving only in the X-direction and also capable of transferring the displacement in the X-direction, is connected to the X-directional actuator 37 and similarly, an Y-directional moving intermediate stage 14, which is separated from the stage table 11 and capable of moving only in the Y-direction and also capable of transferring the displacement to the stage table 11 in the Y-direction is connected to the Y-directional actuator. Crosstalks, caused by connecting the X-directional actuator 37 and the Y-directional actuator 38, are connected to the stage table are avoided. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a moving stage device that adjusts the position of a stage table supported by a base whose position is fixed, and more specifically, a moving stage that adjusts the position of a stage table in the XY directions orthogonal to each other at a nanoscale level. Relates to the device.

A moving stage apparatus (also referred to as an XY stage apparatus) that moves a stage table on which a sample is placed along a X direction and a Y direction orthogonal to each other in a two-dimensional plane is, for example, a scanning probe microscope (SPM). This is used for various sample stages and various machine tools.
A moving stage device that moves in a two-dimensional plane requires an X-axis control mechanism and a Y-axis control mechanism. When these two axes are controlled, crosstalk in the axial direction of each other (when one of the axes is displaced) It is necessary to avoid a phenomenon in which the other shaft is slightly displaced. Therefore, conventionally, a two-stage structure in which an X-axis stage and a Y-axis stage are stacked has been made. In an apparatus with a two-stage structure in which an X-axis stage and a Y-axis stage are stacked, the lower stage supports the weight of the upper stage, and a large load is applied to the movement operation, so that the maximum movement speed is achieved. There are problems such as a decrease in size and the need to enlarge the drive mechanism.

In contrast, an intermediate member (intermediate frame) is disposed between the base and the outer frame frame (stage), and an elastic hinge that is displaceable in the X direction is disposed between the base and the intermediate member. An XY stage support structure is disclosed in which an elastic hinge that can be displaced in the Y direction is disposed between a member and an outer frame (stage), and a compact configuration enables high-speed and high-precision control. (See Patent Document 1). According to this, by providing appropriate driving means such as a linear motor for driving the outer frame (stage) in the X direction and the Y direction, the outer frame (stage) can be moved in an arbitrary direction in the XY plane. It can be driven minutely.
Japanese Patent Laid-Open No. 2002-22868

The support structure of the XY stage described in Patent Document 1 uses an elastic hinge, and is attached to the base so that the intermediate member and the elastic hinge are left-right anteroposterior symmetric or point symmetric. The Z direction, the X-axis rotation (θx), the Y-axis rotation (θy), and the Z-axis rotation (θz) function as “rigid bodies” so that crosstalk does not occur.
On the other hand, although it is described that appropriate drive means such as a linear motor for driving the outer frame frame in the X direction and the Y direction is provided, the mounting position of these drive means to the outer frame frame is also described. In order to prevent crosstalk, it is necessary to attach so that the weight balance is symmetrical in the X-axis direction and symmetrical in the longitudinal direction in the Y-axis direction. However, in reality, one driving means is attached to either the left or right side in the X direction, and one driving means is attached to any one of the front and rear sides in the Y direction, so that the weight balance becomes asymmetric.
As a result of the asymmetrical mounting of the driving means, when the X-direction or Y-direction linear motor is driven, Z-axis rotation occurs and crosstalk occurs.

The fact that crosstalk occurs due to the asymmetric mounting of the driving means will be described with reference to the drawings. FIG. 5 is a plan view showing a configuration of a moving stage device in which symmetrical X-stages and Y-stages are arranged in a nested structure. That is, in this moving stage device, a base 50 is disposed outside, an X-axis stage 52 is disposed inside the base, and a Y-axis stage 55 is disposed further inside. The base 50, the X-axis stage 52, and the Y-axis stage 55 all have a rectangular frame or a square shape that is symmetrical in the left-right direction in the X and Y directions.
The X-axis stage 52 is coupled to the base by X-axis elastic hinges 53a to 53d at two symmetrical positions on the left side and the right side, and an X-axis actuator 51 for pressing in the X direction is attached to the center of the left side. It has been.
The Y-axis stage 55 is coupled to the X-axis stage 52 by two Y-axis elastic hinges 56a to 56d at two symmetrical positions on the front side and the rear side, and further, in the center of the front side, Y for pressing in the Y direction. A shaft actuator 54 is attached.

In the moving stage device having such a structure, the Y-axis actuator 54 is asymmetrically arranged with respect to the X-axis actuator 51, so that the weight balance is lost and crosstalk occurs. . That is, there is a problem that when the X-axis actuator 51 is driven, a twist in the Z-axis rotation direction occurs, a minute displacement occurs, and the position cannot be adjusted accurately.
In view of this, the present invention provides a moving stage device that can perform position adjustment with high accuracy as a whole structure to which actuators in the X-axis direction and the Y-axis direction are attached.

The moving stage device of the present invention made to solve the above problems is separated from the stage table, can be displaced only in the X direction, and can transmit the displacement in the X direction to the stage table. An X-direction actuator is connected to the intermediate stage. Similarly, it is separated from the stage table, can be displaced only in the Y direction, and can transmit the displacement in the Y direction to the stage table. A Y direction actuator is connected to the stage so as to avoid crosstalk caused by the X direction actuator and the Y direction actuator being connected to the stage table.
That is, the moving stage device according to the present invention is a stage that is supported so as to be movable with respect to the base and moves in the XY plane by an X direction actuator and a Y direction actuator that are driven in the X direction and the Y direction orthogonal to each other. In a moving stage apparatus having a table, an X-direction main driving intermediate stage connected to an X-direction actuator and driven only in the X direction and a X-direction main driving intermediate stage are paired between the base and the stage table. X-direction driven intermediate stage driven only in the Y direction, a Y-direction driven intermediate stage connected to the Y-direction actuator and driven only in the Y-direction, and a Y-direction driven intermediate stage paired with the Y-direction driven intermediate stage driven only in the Y-direction Four intermediate stages with the stage intervene, the X direction main driving intermediate stage and the X direction driven intermediate stage The Y direction displacement support means for supporting the base table so as to be displaceable only in the X direction, and the Y direction displacement support means for supporting the stage table so as to be displaceable only in the Y direction. The direction-driven intermediate stage and the Y-direction driven intermediate stage have Y-direction displacement support means for supporting the base table so as to be displaceable only in the Y-direction, and supporting the stage table so as to be displaceable only in the X-direction. Displacement support means is provided.

  According to the present invention, the X-axis actuator and the Y-axis actuator for driving the stage table are connected to the intermediate stage separated from the stage table, and when the X-axis actuator is driven, the stage table for the Y-axis actuator is used. When the Y-axis actuator is driven, the X-axis actuator is disconnected, so the torsion caused by the asymmetry of the weight balance caused by the actuator does not become a problem, and the entire stage structure , Accurate position adjustment can be performed.

(Means and effects for solving other problems)
In the above invention, the X-direction main driving intermediate stage and the X-direction driven intermediate stage are respectively symmetrical with respect to the center axis in the X direction and are formed at positions symmetrical with respect to the center axis in the X direction. A pair of X-direction displacement support means is supported with respect to the base, and is supported with respect to the stage table by one Y-direction displacement support means formed at a symmetrical position with respect to the center axis in the X direction. The main intermediate stage and the Y-direction intermediate stage are each symmetrical with respect to the Y-direction central axis, and a pair of Y-direction displacement supports formed at symmetrical positions with respect to the Y-direction central axis. Supported by the means and supported by the stage table by one X-direction displacement support means formed at a symmetrical position with respect to the central axis in the Y direction. Unishi may be.
According to this, the X-direction main intermediate stage and the X-direction intermediate stage are symmetrical with respect to the central axis in the X direction and are supported at symmetrical positions. When a load in the X direction is applied along the axis (the power point is on the central axis), the intermediate stage moves accurately in the X direction without being twisted or rotated. Similarly, since the Y-direction main intermediate stage and the Y-direction intermediate stage are symmetrical with respect to the Y-direction central axis and are supported at symmetrical positions, the Y-direction main intermediate stage and the Y-direction intermediate stage are arranged along the Y-direction central axis. Then, when a load in the Y direction is applied, it moves accurately in the Y direction without twisting or rotating.

In the above invention, the X-direction displacement support means and the Y-direction displacement support means include the sub driven stage, the sub driven stage and the base, and the sub drive stage interposed between the base and the intermediate stage and between the stage table and the intermediate stage. You may make it comprise the elastic stage mechanism which connects between the member of a driven stage and an intermediate | middle stage, and a sub driven stage and a stage table.
Here, the elastic hinge mechanism refers to the direction in which a load is applied as an axial direction (this axis is referred to as a hinge axis), and the hinge itself is not subjected to deformation such as expansion and contraction or bending with respect to the hinge axis direction. It means a mechanism using a hinge that can transmit the load as it is in the hinge axis direction and elastically deforms in the direction perpendicular to the hinge axis direction.
According to the present invention, the base and the intermediate stage or the stage table and the intermediate stage are not directly connected by the elastic hinge, but are connected via the sub driven stage. That is, between the base and the intermediate stage, the base, the elastic hinge mechanism, the sub driven stage, the elastic hinge mechanism, and the intermediate stage are connected in this order, and between the stage table and the intermediate stage, the stage table, The elastic hinge mechanism, the sub driven stage, the elastic hinge mechanism, and the intermediate stage are connected in this order. As a result, the intermediate stage can be moved between the base and the intermediate stage and between the stage table and the intermediate stage without the intermediate stage being deformed and without the elastic hinge mechanism itself expanding and contracting in the axial direction. (When the stage and the intermediate stage are directly connected by the elastic hinge mechanism between the base and the intermediate stage, either the intermediate stage is deformed or the hinge itself is expanded or contracted in the hinge axis direction. The intermediate stage cannot be moved without providing a).

In the above invention, the elastic hinge mechanism may be configured by a pair of elastic hinge pairs arranged in parallel to connect the members.
That is, by setting the elastic hinge mechanism to an elastic hinge mechanism using a pair of parallel elastic hinges, the intermediate stage can always be moved parallel to the central axis direction. Thereby, even when the position where the load is applied to the intermediate stage deviates from the central axis (the power point is not on the central axis), the intermediate stage can move in the central axis direction without being twisted or rotated.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

FIG. 1 is a plan view showing a configuration of a moving stage apparatus according to an embodiment of the present invention, and FIG. 2 is a partially enlarged view thereof. FIG. 3 is a perspective view showing an example of an elastic hinge.
The moving stage apparatus 10 is mainly composed of a stage table 11, four intermediate stages 12 to 15, bases 16 a to 16 d, an X direction actuator 37, and a Y direction actuator 38.

  The stage table 11 has an X-direction center axis Xc and a Y-direction center axis Yc in the left-right direction as the X direction and the front-rear direction as the Y direction, respectively, and has a symmetrical shape with respect to the center axes Xc, Yc. It has a certain square. Note that the shape of the stage table 11 may be a rectangle, a rhombus, a circle or the like other than a square. Four intermediate stages 12 to 15 are arranged along the extended lines of the X-direction center axis Xc and the Y-direction center axis Yc of the stage table 11.

  The four intermediate stages 12 to 15 are connected to the X direction actuator 37 and transmit the X direction displacement of the X direction actuator 37 to the stage table 11, and follow the movement of the X direction main movement intermediate stage 12. The X-direction driven intermediate stage 13, the Y-direction main-drive intermediate stage 14 connected to the Y-direction actuator 38 and transmitting the Y-direction displacement of the Y-direction actuator 38 to the stage table 11, and the movement of the Y-direction main drive intermediate stage 14. And a Y-direction driven intermediate stage 15. These intermediate stages 12 to 15 have the same shape except that they are connected to an actuator, and are constituted by block-like members that do not deform even when a force is applied.

  The bases 16a to 16d are a base 16a at a position adjacent to the Y-direction driven intermediate stage 15 and the X-direction main driving intermediate stage 12, a base 16b at a position adjacent to the X-direction main driving intermediate stage 12 and the Y-direction main driving intermediate stage 14, A base 16c is attached to a position adjacent to the Y-direction driven intermediate stage 14 and the X-direction driven intermediate stage 13, and a base 16d is attached to a position adjacent to the X-direction driven intermediate stage 13 and the Y-direction driven intermediate stage 15, respectively. Is fixed. These have the same shape and are arranged symmetrically with respect to the X-direction center axis Xc and the Y-direction center axis Yc. Moreover, it is assembled | attached integrally by the back surface side (paper surface back side) of the stage table 11, and the one base 16 (not shown) is comprised.

  The X-direction main driving intermediate stage 12 has an X-direction actuator 37 connected to the side opposite to the stage table 11, and the Y-direction main driving intermediate stage 14 has a Y-direction actuator 38 connected to the side opposite to the stage table 11. Piezo elements are used for the X direction actuator 37 and the Y direction actuator 38.

Next, a support structure for the base 16, the intermediate stages 12 to 15, and the stage table 11 will be described.
As shown in FIG. 2, the X-direction main driving intermediate stage 12 is supported by the base 16 a and the base 16 b and supports one end of the stage table 11.
The X-direction main driving intermediate stage 12 and the base 16a are connected by a pair of parallel elastic hinges 21a and 21b, a sub driven stage 17, and a pair of parallel elastic hinges 22a and 22b. As shown in FIG. 3, the elastic hinges 21a, 21b, 22a, and 22b used here are rod-shaped having thin portions A and B that have a longitudinal direction as a hinge axis and are cut in the direction perpendicular to the hinge axis in the vicinity of both ends. Consists of members. Therefore, deformation and expansion / contraction do not occur in the hinge axis direction, and it can be bent in a direction perpendicular to the hinge axis. The hinge axis directions of the elastic hinges 21a, 21b, 22a, 22b are directed in the Y direction, and the shaving surfaces of the thin portions A, B are directed in the X direction. Therefore, these elastic hinges can be displaced in the X direction. On the other hand, the sub driven stage 17 is composed of a block-shaped member that does not deform even when a force is applied.

  In addition, a pair of parallel link structures in which elastic hinges are arranged in parallel, such as elastic hinges 21a and 22b and elastic hinges 22a and 22b, eliminates rotational displacement between members coupled by elastic hinges and moves in parallel. I have to do it.

  Similarly, the X-direction main driving intermediate stage 12 and the base 16b are connected by a pair of parallel elastic hinges 23a, 23b, a sub driven stage 18, and a pair of parallel elastic hinges 24a, 24b. The elastic hinges 23a, 23b, 24a, 24b are the same as those shown in FIG. 3, and the sub driven stage 18 is the same as the sub driven stage 17. The elastic hinges 23a, 23b, 24a, and 24b are also configured such that the hinge axis direction is directed in the Y direction and can be displaced in the X direction. The sub driven stage 18 is composed of a block-shaped member that does not deform.

  Further, the sub driven stages 17 and 18 and the elastic hinges 21a, 21b, 22a, 22b, 23a, 23b, 24a and 24b are symmetrical with respect to the X direction central axis Xc with respect to the X direction main driving intermediate stage 12. It is arranged. As a result, when an X-direction force Fx acts on the X-direction main driving intermediate stage 12 by driving the X-direction actuator 37, the X-direction main driving intermediate stage 12 moves from the equilibrium state shown in FIG. 4A to FIG. 4B. Displace to the right as shown in. At this time, the displacement in the Y direction of the X direction main driving intermediate stage 12 itself cancels each other because it has a symmetrical structure with respect to the central axis, and moves only in the X direction. That is, the sub driven stages 17 and 18 move in the X direction and are also displaced in the Y direction, so that the X direction main driving intermediate stage 12 moves only in the X direction.

  On the other hand, the X-direction main driving intermediate stage 12 and the stage table 11 are connected by a pair of parallel elastic hinges 25a and 25b, a sub driven stage 19, and a pair of parallel elastic hinges 26a and 26b. The elastic hinges 25a, 25b, 26a, and 26b are the same as those shown in FIG. The sub driven stage 19 is composed of a block-like member that is not deformed like the sub driven stage 17. The hinge axis directions of the elastic hinges 25a, 25b, 26a, and 26b are oriented in the X direction. Therefore, the elastic hinges can be displaced in the Y direction and cannot be deformed or expanded in the X direction. It is.

  As described above, when the X-direction main driving stage 12 moves only in the X direction by driving the X-direction actuator 37, the X-direction main driving stage 12 pulls the elastic hinges 25a and 25b, but the tensile force is in the hinge axial direction. The elastic hinges 25a and 25b accurately transmit the displacement only in the X direction to the sub driven stage 19 without being deformed. Similarly, the sub driven stage 19 in which the displacement only in the X direction has pushed the elastic hinges 26a and 26b accurately only in the X direction. Since this pressing force is in the hinge axial direction of the elastic hinges 26a and 26b, the displacement only in the X direction is accurately transmitted to the stage table 11 without being deformed. Since the stage table 11 itself has a symmetrical shape with respect to the X-direction central axis Xc, the stage table 11 is accurately displaced in the X direction without rotating in the Z axis.

  An X-direction driven intermediate stage 13 is attached to the opposite side of the X-direction main driving intermediate stage 12 across the stage table 11. The X-direction driven intermediate stage 13 is paired with the X-direction main driving intermediate stage 12 and has the same shape, and the auxiliary driven stages 17, 18, 19 and elastic hinges 21a, 21b,..., 26a, 26b. The same applies to the support structure between the stage table 11 and the bases 16c and 16d (except that the X-direction actuator 37 is not connected).

The Y direction driven intermediate stage 14 and the Y direction driven intermediate stage 15 will be described.
These are basically the same as the support structure for the X-direction driven intermediate stage 12 and the X-direction driven intermediate stage 13, respectively, and the secondary driven stages 27, 28, 29 correspond to the secondary driven stages 17, 18, 19, respectively. And perform the same functions and operations. The elastic hinges 31a, 31b,..., 36a, 36b correspond to the elastic hinges 21a, 21b,..., 26a, 26b, and perform the same functions and operations as these.

Next, the operation of the moving stage device 10 will be described. The X direction actuator 37 and the Y direction actuator 38 are driven by a control mechanism (not shown).
When the X direction actuator 37 is driven, the X direction main driving intermediate stage 12 is pressed in the X direction, the elastic hinges 21a, 21b,..., 24a, 24b are deformed, and the sub driven stages 17, 18 are displaced. The X-direction main driving intermediate stage 12 moves only in the X direction. The movement of the X-direction main driving intermediate stage 12 is accurately transmitted to the stage table 11 by the elastic hinges 25a, 25b, 26a, 26b and the sub driven stage 19 whose hinge axis is directed in the X direction. Move only in the X direction. The X-direction driven intermediate stage 13 located on the opposite side across the stage table 11 receives the movement of the stage table 11 in the X direction, and is constituted by the elastic hinges 21a, 21b,..., 26a, 26b and the sub driven stages 17-19. The X-direction main driving intermediate stage 12 moves in accordance with the movement. Thereby, the stage table 11 moves in the X direction while maintaining the support structure by the X direction main driving intermediate stage 12 and the X direction driven intermediate stage 13.

A relationship between the Y-direction main intermediate stage 14 and the Y-direction intermediate stage 15 when the stage table 11 moves in the X direction will be described.
The Y-direction driven intermediate stage 14 and the Y-direction driven intermediate stage 15 are supported by the bases 16a to 16d via the auxiliary driven stages 27 and 28 and the elastic hinges 31a, 31b, to 34a and 34b. However, since the hinge axes of these elastic hinges 31a, 31b,..., 34a, 34b are oriented in the X direction, the Y direction main driving intermediate stage 14 and the Y direction driven intermediate stage 15 cannot move in the X direction.

On the other hand, the Y-direction driven intermediate stage 14 and the Y-direction driven intermediate stage 15 support the stage table 11 via the auxiliary driven stage 29 and elastic hinges 35a, 35b, 36a, 36b. Since the hinge shafts of the elastic hinges 35a, 35b, 36a, 36b are oriented in the Y direction, they can be deformed in the X direction. Therefore, the movement of the stage table 11 in the X direction can be absorbed by the sub driven stage 29 and the elastic hinges 35a, 35b, 36a, 36b.
For this reason, when the stage table 11 is moved by the force in the X direction, the stage table 11 is separated from the Y-direction main intermediate stage 14 and the Y-direction intermediate stage 15, and therefore the Y-direction actuator 38 is also a stage. Since it is separated from the table 11, it is not affected by this.

The same applies to the case where the Y-direction actuator 38 is driven. When the stage table 11 moves due to the Y-direction force, the X-direction main driving intermediate stage 12 and the X-direction driven intermediate stage 13 are separated. Therefore, the X-direction actuator 37 is also separated from the stage table 11 and is not affected by this.
Therefore, highly accurate position adjustment can be performed without being affected by the asymmetrical arrangement of the X-direction and Y-direction actuators.

  In this embodiment, the elastic hinge is composed of a rod-shaped member and is connected to the stage table, the intermediate stage, and the secondary driven stage. However, the stage table, the intermediate stage, the secondary driven stage, and the elastic hinge are combined into one block material. You may make it implement | achieve the structure of this invention by hollowing out (wire cutting process etc.).

  The present invention can be applied to a movable stage apparatus that performs highly accurate position adjustment, and can be used as, for example, a scanning probe microscope or a sample stage of a machine tool.

The top view which shows the structure of a movement stage apparatus in one Embodiment of this invention. The partially expanded view of FIG. The figure which shows an example of an elastic hinge. The figure explaining the positional relationship of an intermediate stage and a base when an actuator is driven. The top view which shows the structure of the conventional movement stage apparatus.

Explanation of symbols

10: moving stage device 11: stage table 12: X-direction driven intermediate stage 13: X-direction driven intermediate stage 14: Y-direction driven intermediate stage 15: Y-direction driven intermediate stages 16a-16d: bases 17-19: sub-driven stage 21a , 21b, ˜, 26a, 26b: elastic hinges 31a, 31b, ˜, 36a, 36b: elastic hinge 37: X direction actuator 38: Y method actuator

Claims (4)

In a movable stage apparatus including a stage table that is supported so as to be movable with respect to a base and moves in an XY plane by an X direction actuator and a Y direction actuator that are driven in an X direction and a Y direction orthogonal to each other.
Between the base table and the stage table, an X-direction intermediate stage that is connected to an X-direction actuator and is driven only in the X direction, and an X-direction intermediate stage that is driven only in the X direction. And a Y-direction driven intermediate stage connected to the Y-direction actuator and driven only in the Y-direction, and a Y-direction driven intermediate stage which is paired with the Y-direction driven intermediate stage and driven only in the Y-direction. And
The X-direction main intermediate stage and the X-direction intermediate stage have X-direction displacement support means for supporting the base table so as to be displaceable only in the X direction, and supporting the stage table so as to be displaceable only in the Y direction. Directional displacement support means,
The Y-direction main intermediate stage and the Y-direction intermediate stage have Y-direction displacement support means for supporting the base table so as to be displaceable only in the Y direction, and supporting the stage table so as to be displaceable only in the X direction. A moving stage device comprising a direction displacement support means. Each of the X-direction main driving intermediate stage and the X-direction driven intermediate stage has a pair of X directions that are symmetrical with respect to the center axis in the X direction and are formed at positions symmetrical with respect to the center axis in the X direction. The stage table is supported by one Y-direction displacement support means which is supported with respect to the base by the displacement support means and formed at a position symmetrical to the central axis in the X direction,
The Y-direction primary intermediate stage and the Y-direction intermediate stage are each a pair of Y-directions that are symmetrical with respect to the central axis in the Y-direction and that are symmetrically formed with respect to the central axis in the Y-direction. The stage table is supported by one X-direction displacement support means that is supported by the displacement support means with respect to the base and formed at a symmetrical position with respect to the central axis in the Y direction. The moving stage device described. The X-direction displacement support means and the Y-direction displacement support means include a sub driven stage interposed between the base and the intermediate stage, and between the stage table and the intermediate stage,
3. The moving stage device according to claim 2, comprising a sub driven stage and a base, a sub driven stage and an intermediate stage, and an elastic hinge mechanism for connecting members of the sub driven stage and the stage table. 4. The moving stage device according to claim 3, wherein the elastic hinge mechanism is constituted by a pair of elastic hinges arranged in parallel to connect the members.

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