JP2009052985A - Positioning mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning mechanism with a mechanism which prevents a stage from exerting torque about θ-axis by thrust in X-axis and Y-axis directions when the stage is positioned at an arbitrary position within a plane consisting of two axes at high speed with precision of 0.1 nm or less. <P>SOLUTION: A first actuator 3 for transmitting thrust generated by a thrust generation means in the X-axis direction through a thrust transmission section and a second actuator 4 for transmitting thrust generated by the thrust generation means in the Y-axis direction perpendicular to the X-axis direction through a thrust transmission section are mounted to the same plane of a base 2. The stage 5 as a movable body is coupled to the thrust transmission section 13x of the first actuator 3 and the thrust transmission section 13y of the second actuator 4 through a first link mechanism 6 and a second link mechanism 7 constituting a parallel link mechanism. The stage 5 is supported by the base 2 in a floating manner through an elastic spring mechanism 8a as an elastic support mechanism. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention can control the positioning of a stage as a moving body at an arbitrary position in a plane constituted by an X axis and a Y axis orthogonal to each other with a high precision resolution of nm or less and a high speed response. The present invention relates to a positioning mechanism that can be used.

  Conventionally, fine movement stages used in scanning probe microscopes, electron microscopes, semiconductor and liquid crystal related manufacturing and inspection processes, etc. have positioning accuracy of nm or less in the plane composed of orthogonal X axis and Y axis. However, there is a demand for performance capable of performing a scanning operation accurately in a region of several hundred μm square. For example, at present, in a scanning probe microscope, since a facing sample surface is scanned with a probe made of silicon or the like, a height of about 5 μm is adjusted on a stage operating in a 100 μm square XY axis plane. An XYZ stage combined with a Z-axis stage has been put into practical use by applying a laminated piezoelectric element, and is used for observation at the nm level. However, at present, it is technically very difficult to realize a stage that can achieve both high-speed scanning operation and positioning accuracy of sub-nm while expanding the scanning area to several hundred μm square, and various efforts have been made. However, it has not been realized.

  In circuit inspection of a semiconductor wafer after exposure, development and etching by a stepper or a scanner (semiconductor exposure apparatus), a stable improvement in the yield rate has become a more important issue as the wiring pitch becomes finer. Analysis of circuit defects in a semiconductor wafer after process is an important key for improving the yield rate, and application of a scanning probe microscope is an effective means for analyzing defects in circuit patterns and the like. In such circuit inspection, a piezo-element type XY stage having an operation area of about 100 μm square is combined with an XY stage composed of a linear motor and a linear guide, so that the current state is 8 inches (diameter). 200mm). However, in order to meet the currently required wafer size of 12 inches (diameter 300 mm), it is required to shorten the measurement time while expanding the measurement range, and has a scanning range of 500 μm square or more. However, there is a great demand for a piezoelectric element type XY stage that realizes positioning accuracy at the nm level in the XY plane together with high-speed operation.

  In an XY stage that is directly driven by a piezoelectric element, particularly a laminated piezoelectric element, it is possible to obtain positioning accuracy of nm level at the present time, but positioning of nm level while having a scanning ability of 500 μm square or more. It is extremely difficult to stably obtain accuracy. The reason for this is that the extension of the laminated piezoelectric element is extremely small, about 1/1000 of the self-stack length in the unloaded state. Even if there is not, it is necessary to arrange two elements having a laminated thickness of 500 mm orthogonally. However, it is practically impossible to directly transmit the extension amount of the multilayer piezoelectric element having a self length of 500 mm to the XY stage. As a countermeasure, the displacement (extension) amount of the multilayer piezoelectric element is increased. Various types of actuators have been proposed, but in general, the mechanism that expands the displacement inhibits the rigidity of the actuator as the amount of displacement increases, so that the resonance frequency of the actuator itself that affects the control performance can be reduced. This is a factor that causes a decline. In addition, the conventional displacement magnifying mechanism causes an operation that is parallel to the X-axis and the Y-axis and that is accompanied by a rotation operation in the XY plane in addition to an accurate operation. It has become. Considering this point, as means for enlarging the displacement amount of the multilayer piezoelectric element, the following Patent Document 1 (Japanese Patent Laid-Open No. 2005-312208) and Patent Document 2 (Japanese Patent Laid-Open No. 2005) filed earlier by the present applicant are disclosed. -261167), etc. have been proposed.

  In Patent Document 1, in order to expand the displacement generated by the multilayer piezoelectric element, the first to fourth arms are coupled to the connecting portion via a hinge portion so as to have a symmetrical rhombus shape, Two stacked piezoelectric elements are placed on the long side of the opposite side of the center fixed part, and the information is read / written from / to the magnetic disk, for example, on the end face of one of the other diagonal side hinges A positioning device with a head attached is described. In the displacement magnifying type positioning device described in Patent Document 1, when a voltage is applied to the laminated piezoelectric element to expand and contract the element itself, the first to fourth arms have an axisymmetric rhombus link shape. Accordingly, the displacement is enlarged at a ratio of the diagonal line of the rhombus, and the two laminated piezoelectric elements are operated while sandwiching the fixed portion. Therefore, the reaction force to the fixed portion is canceled and there is no reaction. Then, the minute displacement generated by the multilayer piezoelectric element is expanded by the rhombus mechanism, so that the connecting portion to which the magnetic head is attached operates in the radial direction of the disk, and the magnetic head is a recording track on the magnetic medium (rotating disk). It is disclosed that the following operation is performed.

  Patent Document 2 proposes an actuator including a laminated piezoelectric element and a displacement enlarging mechanism. The actuator disclosed in Patent Document 2 accurately and in parallel transmits a multilayer piezoelectric element, a mechanism for expanding the displacement generated by the multilayer piezoelectric element by a lever, and a linear displacement generated by the multilayer piezoelectric element. A displacement enlarging mechanism composed of a parallel spring mechanism is provided. This displacement magnifying mechanism connects a support portion to which one end of the multilayer piezoelectric element is fixed, a mover disposed opposite to the support portion, and connects the support portion and the mover to each other. And a link unit that moves in response. Further, the other end of the laminated piezoelectric element is connected to one link portion via a lever, and both end portions of the ring portion are connected to a support portion and a mover via elastic hinges, respectively.

When the stacked piezoelectric element is displaced, the displacement is increased in accordance with the lever ratio, and the displacement magnifying mechanism is changed from a rectangle to a parallelogram by being transmitted to one link portion constituting the parallel spring. Therefore, it is disclosed that the actuator amplifies the displacement generated by the laminated piezoelectric element while maintaining high rigidity, and outputs an exact linear motion as the displacement of the mover. In addition, by placing a restraining member between the link part and the mover via a viscoelastic body, the actuator controls the actuator by effectively attenuating and reducing the very large peak amplitude generated at the resonance frequency. It is disclosed that the performance can be dramatically improved.

  In a stage where four sides used in a scanning probe microscope or the like are supported by elastic springs, when the extension of the multilayer piezoelectric element is directly transmitted, the stage according to the extension of the multilayer piezoelectric element in one direction (for example, the X-axis direction) If the shape that the movement of the four-way spring support mechanism is constrained other than the extension in one direction (in this case, the X-axis direction) is used, the accurate movement in the X-axis direction is accompanied by the translational operation due to the extension. Positioning becomes possible. However, the stage is positioned in the XY plane by providing a laminated piezoelectric element that extends in the direction perpendicular to the X-axis direction (Y-axis direction) in the same plane with respect to the stage supported by the elastic springs on all four sides. In this case, accurate translation can be expected on the X-axis and Y-axis in the range where the displacement is very small. Regardless of the shape of the spring support mechanism and the restrained state, each acts as a shearing force on the other axis, and the respective translational operations interfere with each other to antagonize and act as a moment. Therefore, it is superimposed on each translation operation as a bending operation (rotational moment) around the θ axis (rotational axis around the Z axis perpendicular to the XY plane). However, since the stage does not have the function to suppress or correct the movement around the θ axis or the degree of freedom to compensate, it is expected that accurate positioning in the XY plane is hindered and the scanning operation cannot be controlled. it can.

  When the stage is positioned at an arbitrary position in the XY plane, a means is generally employed in which a stage moving in the X-axis direction and a stage moving in the Y-axis direction are arranged so as to be orthogonal to each other. This means that the two stages that move in only one direction are perpendicular to each other, so that the thrust generation mechanisms such as the two stacked piezoelectric elements do not interfere with each other, but are not operated in the same XY plane. By operating in this manner, it is possible to prevent rotational moments around the θ-axis that act on each other's axes. However, on the other hand, one shaft (lower shaft) and the other shaft (upper shaft) are placed perpendicular to each other, so the lower shaft is mounted on the weight of the upper shaft. Are always loaded as inertial mass. Further, the position of the center of gravity of the entire XY stage always changes due to the movement of the upper stage to be mounted, and also changes as an object to be controlled. Therefore, it cannot be said that the controllability is good from the viewpoint of the control system. Such a large load mass or a change in the control target causes a significant decrease in the resonance frequency or servo band, which is a factor that significantly suppresses the high speed and control performance of the stage. For this reason, when high-speed and high-precision positioning accuracy is required, the above-described means cannot be applied because responsiveness and controllability are hindered.

  Even in a scanning probe microscope, two stages that directly transmit the extension of the multilayer piezoelectric element as described above (the stage is finely moved in accordance with the extension of the multilayer piezoelectric element in one direction) are orthogonally stacked. It is possible to eliminate the bending moment from being superimposed on the translational motion, and this is applied to some scanning probe microscopes. However, since the other shaft is placed on one shaft, the mass on the other shaft side is always loaded on one shaft side as in the above problem, and inertia increases. As a result, the responsiveness is affected. Also, it is configured by combining a linear motor with a linear guide that is applied to perform an operation range from several tens of centimeters to several meters, such as a machine tool or a Cartesian coordinate system robot, or a combination of a ball screw and a rotary motor. In this case, there is no large change in the center of gravity due to the movement of the moving part as in the case of a single-axis stage.However, since a significant decrease in the resonance frequency or change in the control target cannot be avoided in principle, It becomes a factor that speedup and control performance are greatly suppressed.

  As a technique for precisely moving and aligning the stage (table) in the X-axis, Y-axis direction, and Z-axis direction, a stage apparatus described in Patent Document 3 below has been proposed.

  In Patent Document 3, there are three support points P1, P2, and P3 arranged on the fine movement stage, in order to precisely move and position the stage with high rigidity and support the center of gravity. Each of the tables is described as being connected by a pair of telescopic rods from the front and back sides of the table. Further, it is disclosed that a piezoelectric actuator driven by a piezoelectric element is used for the rod portion of the telescopic rod.

Japanese Patent Laying-Open No. 2005-312208 JP 2005-261167 A (Patent No. 3612670) JP 2004-146718 A

  The invention described in Patent Document 1 discloses a mechanism that two-dimensionally controls the position of a magnetic head or the like attached to a connecting portion of an arm by changing a rhombus mechanism composed of four link mechanisms. When the displacement of the multilayer piezoelectric element is enlarged using the rhombus link mechanism, when the two multilayer piezoelectric elements arranged on the long side with the central fixing portion interposed therebetween are individually operated, X- It shows that it can be positioned at any position in the Y plane. However, positioning in the XY plane essentially requires the two stacked piezoelectric elements to be individually operated, reducing the reaction force of the stacked piezoelectric elements that characterize the proposed actuator. Therefore, the two elements cannot be applied simultaneously and with the same force. Therefore, it cannot be said that a mechanism for positioning at high speed and with high accuracy is disclosed for the purpose of positioning in the XY plane.

  The invention described in Patent Document 2 is a damping mechanism that reduces the peak value of the amplitude at the resonance frequency of the actuator that transmits the displacement of the laminated piezoelectric element to the link portion via the lever and expands the displacement. This means shows a means, and no means for positioning in the XY plane is disclosed.

  In the invention described in Patent Document 3, three support points P1, P2, and P3 arranged on a table are connected to each other by a pair of telescopic rods from the front and back sides of the table, and a piezoelectric element is attached to the rod portion of the telescopic rod. The stage device for supporting the center of gravity with high rigidity by using the piezo actuator driven by the above is not disclosed for a mechanism for accurately positioning the table on the XY plane.

  Accordingly, an object of the present invention is to perform accurate positioning of the stage in the X-axis direction and the Y-axis direction using an actuator that generates displacement in the orthogonal X-axis and Y-axis directions. The stage can be positioned at a high speed while having a precision of the order of nanometers or less in the same XY plane through a mechanism that does not apply a rotational force to the stage with respect to axial displacement. To provide a mechanism.

In order to achieve the above object, the positioning mechanism of the present invention arbitrarily moves the stage in a plane constituted by the X axis and the Y axis orthogonal to each other, and positions the stage at a predetermined position with high speed and high accuracy. In the positioning mechanism,
A first actuator that is fixed to the base and transmits the thrust generated by the thrust generating means in the X-axis direction via a thrust transmission unit;
Similarly, a second actuator for transmitting the thrust generated by the thrust generating means in the Y-axis direction via the thrust transmission unit,
The stage is connected to the thrust transmission unit of the first actuator and the thrust transmission unit of the second actuator via a link mechanism, respectively.

  Further, in the positioning mechanism of the present invention, the stage is supported by the base via an elastic spring mechanism made of one or a plurality of elastic bodies.

Furthermore, in the positioning mechanism of the present invention, the stage is
The link mechanism that transmits the thrust from the first actuator is transmitted to one of two adjacent sides orthogonal to the X axis and the Y axis, and the thrust from the second actuator is transmitted to the other side. The link mechanism is arranged,
Further, the four corners of the stage facing each other are respectively supported by the base via the elastic spring mechanism.

Furthermore, in the positioning mechanism of the present invention, the stage is disposed on the base such that one of two diagonal lines connecting opposing corners is on the X axis and the other is in the Y axis direction. The link mechanism that transmits the thrust from the first actuator is disposed at one of a pair of adjacent corners of the stage, and the link mechanism that transmits the thrust of the second actuator is disposed at the other corner. It is characterized by being.

Furthermore, in the positioning mechanism of the present invention, the stage is characterized in that four sides constituting two sets of opposing sides are supported by the base via the elastic spring mechanism, respectively. The four sides are sides of two sets of stages facing each other in plan view, and include an outer surface that forms the height (thickness) of the stage.

  Furthermore, in the positioning mechanism of the present invention, the link mechanism is constituted by a parallel link mechanism having link members arranged in parallel to each other.

Furthermore, the positioning mechanism of the present invention is characterized in that the link member is rotatably connected to the thrust transmission unit and the stage.

  Furthermore, in the positioning mechanism of the present invention, the link member is constituted by a member formed integrally with the thrust transmission unit and the stage.

  Furthermore, in the positioning mechanism of the present invention, the link member is constituted by a member joined to the thrust transmission unit and the stage by a coupling means.

  Furthermore, the positioning mechanism of the present invention is characterized in that the elastic spring mechanism is disposed in a predetermined direction with respect to the direction of the X axis or the Y axis.

  Furthermore, in the positioning mechanism of the present invention, the predetermined direction is set to a direction of 45 ° with respect to the X axis and the Y axis.

  Furthermore, in the positioning mechanism of the present invention, the predetermined direction is set in parallel to the X axis or the Y axis.

  Furthermore, in the positioning mechanism of the present invention, the predetermined direction is set at an arbitrary angle with respect to the X axis or the Y axis.

  Furthermore, the positioning mechanism of the present invention is characterized in that the first and second actuators include the thrust generating means including a mechanism capable of linearly moving the generated displacement.

Furthermore, in the positioning mechanism of the present invention, the mechanism capable of linearly moving the generated displacement by the thrust generating means of the first and second actuators is composed of a laminated piezoelectric element.

Furthermore, the positioning mechanism of the present invention is characterized in that the thrust generating means of the first and second actuators composed of the laminated piezoelectric element includes a mechanism for amplifying the generated displacement.

Furthermore, in the positioning mechanism of the present invention, the mechanism capable of linearly moving the generated displacement by the thrust generating means of the first and second actuators is composed of an electromagnetic actuator such as a voice coil motor or a linear motor. It is a feature. As this electromagnetic actuator, in addition to the above-described boil coil motor and linear motor, for example, a configuration in which a ball screw and a rotary motor are combined can be employed.

Further, in the positioning mechanism of the present invention, the coupling means includes a mechanical coupling means, an adhesive coupling means, a brazing coupling means, a welding coupling means, a friction pressure welding coupling means, a diffusion bonding coupling means, a glass hermetic. It is characterized in that it is a coupling means of any of the coupling means. The present invention is characterized by a positioning mechanism itself in which the link member is connected to the thrust transmission unit and the stage, and the coupling means may employ means other than the coupling means described above. .

In the positioning mechanism of the present invention, the first and second actuators are disposed so that the directions of thrust generated by the first actuator and the second actuator fixed on the base are orthogonal to each other. A stage that is positioned at an arbitrary position in the XY plane is connected to the thrust transmission portion of the actuator and the thrust transmission portion of the second actuator via a link mechanism, and the first and second actuators The link mechanisms that are directly connected to each other directly transmit thrust in the X-axis and Y-axis directions. At the same time, since they act as shearing forces on mutually orthogonal link mechanisms, in that case the link mechanism changes from a rectangular shape to a parallelogram shape in plan view by the transmitted thrust, so that the X axis, Acts to transmit only translational motion to the Y axis. As a result, in the conventional stage structure, the rotational moment around the θ-axis that is inevitably generated by the shearing force can be prevented, so that the stage to be positioned by the operation of the first and second actuators can be prevented. It is possible to perform positioning accurately at high speed and with accuracy of the order of nm or less.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of a positioning mechanism showing an embodiment of the present invention, and FIG. 2 is a sectional view taken along line AA in FIG.

In a positioning mechanism 1 showing an example of an embodiment of the present invention, a base 2 and a side surface portion (L-shaped standing side surface portion) 2a standing in an L shape are dug out inside the edge portion of the base 2. A first actuator 3 fixed to the side surface 2b, a second actuator 4 also fixed to the side surface portion 2b, a stage 5, a first link mechanism 6 connecting the first actuator 3 and the stage 5, Four elasticities that serve as a second link mechanism 7 that connects the second actuator 4 and the stage 5 and a support mechanism (hereinafter referred to as an elastic support mechanism) made of an elastic body that fixes the four sides of the stage 5 to the base 2. Spring mechanisms 8a, 8b, 8c, and 8d are provided. The stage 5 is a controlled object (moving body) for performing highly accurate positioning in the present invention. For example, when the present invention is applied to a scanning probe microscope, a sample to be measured or, conversely, a measurement probe. Is mounted, a relative scanning operation is realized between the sample to be measured and the measurement probe, and a stage for measuring the region in the XY plane is obtained. In the embodiment shown in FIG. 1, the stage 5 has a quadrangular shape in plan view having four sides 5s1, 5s2, 5s3, 5s4 and an outer surface (the height of the stage 5) formed by each of these sides. Further, the lower surface of the structure is supported by elastic spring mechanisms 8a, 8b, 8c, and 8d in a floating state with respect to the base 2 as shown in FIG.

Further, the positioning mechanism 1 includes a control device (control device 30 shown in FIG. 7) for controlling the driving of the first and second actuators 3 and 4, and an X-axis drive circuit 31x and Y shown in FIG. An axis drive circuit 31y, an X-axis position detection sensor 9x for detecting the position of the stage 5, and a Y-axis position detection sensor 9y are provided. As the X-axis position detection sensor 9x and the Y-axis position detection sensor 9y, an optical scale, laser length measuring device, optical fiber type, electrostatic or eddy current can be applied at high speed, and a high-resolution displacement meter Can be used. In FIG. 2, the X-axis position detection sensor 9x and the Y-axis position detection sensor 9y are not shown.

The first actuator 3 includes a laminated piezoelectric element 10x serving as a thrust generating means, a support portion 11x that fixes one end of the element 10x, and a thin-walled material that applies the bending of the entire beam to a position facing the support portion 11x. A mover 13x supported by a parallel spring mechanism composed of a link beam portion 12x and a link beam portion 14x is provided. One end of the link beam portion 14x in the longitudinal direction is connected to the movable element 13x via the elastic hinge portion 15x, and the other end of the link beam portion 14x in the longitudinal direction is connected to the support portion 11x via the elastic hinge portion 16x. ing. Further, on the outer surface of the link beam portion 14x in the vicinity of the elastic hinge portion 16x in the longitudinal direction, a lever portion 17x connecting the other end of the multilayer piezoelectric element 10x is provided. The mover 13x serves as a thrust transmission unit for transmitting the thrust generated by the stacked piezoelectric element 10x to the stage 5 through the lever part 17x disposed in the link beam unit 14x.

In the first actuator 3 configured as described above, the laminated piezoelectric element 10x is fixed between the lever part 17x provided in the link beam part 14x and the support part 11x, so that the laminated piezoelectric element 10x is displaced. When the lever 17x is expanded and contracted, the lever 17x leverages the geometric distance between the fulcrums of the elastic hinges 15x and 16x, and the fulcrum of the elastic hinge 16x and the point of action of the lever 17x (the lever 17x and the lever 17x). A mechanism that amplifies the generated displacement of the stacked piezoelectric element 10x (expands the generated displacement amount) by the ratio to the distance on the Y axis between the link beam portion 14x and the connecting portion). When the displacement amount expanded by the displacement expansion (displacement amplification) mechanism is transmitted to the movable element 13x, the movable element 13x is displaced on the X axis in the X1 direction or the X2 direction. Therefore, for example, when the mover 13x is displaced in the X1 direction or the X2 direction, the thrust generated by the actuator 3 is transmitted to the stage 5 via the first link mechanism 6. As a result, the stage 5 moves a predetermined distance in the X-axis direction.

The first actuator 3 used for explaining the configuration of the positioning mechanism is described as an example of a mechanism for enlarging a minute displacement generated by the multilayer piezoelectric element. It does not prescribe the shape of the magnifying mechanism. As long as the displacement and thrust generated by the laminated piezoelectric element can be efficiently transmitted to the stage 5 via the link beam portion 14x, the mechanism and shape of the actuator are not limited.

The configuration of the second actuator 4 is the same as that of the first actuator 3. That is, the second actuator 4 applies the bending of the entire beam to the laminated piezoelectric element 10y serving as a thrust generating means, the support part 11y that fixes one end of the element 10y, and the position facing the support part 11y. A parallel spring mechanism composed of the thin link beam portion 12y and the link beam portion 14y supports the mover 13y. One end of the link beam portion 14y in the longitudinal direction is connected to the movable element 13y via the elastic hinge portion 15y, and the other end of the link beam portion 14y in the longitudinal direction is connected to the support portion 11y via the elastic hinge portion 16y. ing. Further, a lever portion 17y connected to the other end of the multilayer piezoelectric element 10y is provided on the outer surface of the link beam portion 14y in the vicinity of the elastic hinge portion 16y in the longitudinal direction. The mover 13y serves as a thrust transmission unit for transmitting the thrust generated by the stacked piezoelectric element 10y to the stage 5 via the lever part 17y disposed in the link beam part 14y.

In the second actuator 4 configured as described above, the laminated piezoelectric element 10y is fixed between the lever part 17y provided in the link beam part 14y and the support part 11y, so that the laminated piezoelectric element 10y is displaced. When the lever 17y is extended and contracted, the lever portion 17y leverages the geometrical distance between the fulcrums of the elastic hinge portions 15y and 16y, and the fulcrum of the elastic hinge portion 16y and the action point of the lever portion 17y (the lever portion 17y and It is a mechanism that amplifies the displacement generated by the stacked piezoelectric element 10y (increases the amount of displacement) by the ratio to the distance on the X-axis between the link beam portion 14y and the connecting portion). By transmitting the displacement amount expanded by the displacement expansion (displacement amplification) mechanism to the movable element 13y, the movable element 13y is displaced on the Y axis in the Y1 direction or the Y2 direction. Therefore, for example, when the movable element 13y is displaced in the Y1 direction or the Y2 direction, the thrust generated by the actuator 4 is transmitted to the stage 5 via the second link mechanism 7. As a result, the stage 5 moves a predetermined distance in the Y-axis direction.

  The second actuator 4 used for the description of the configuration of the positioning mechanism is described as an example of a mechanism for enlarging a minute displacement generated by the laminated piezoelectric element, like the first actuator 3 described above. However, it does not define the arrangement of the stacked piezoelectric elements or the shape of the displacement enlarging mechanism. As long as the displacement and thrust generated by the stacked piezoelectric element can be efficiently transmitted to the stage 5 via the link beam portion 14y, the mechanism and shape of the actuator are not limited.

The support portion 11x (11y), the link beam portion 12x (12y), the mover 13x (13y), the link beam portion 14x (14y), and the elastic hinge portion 15x (which constitute the first and second actuators 3 and 4 described above. 15y), the elastic hinge portion 16x (16y), and the lever portion 17x (17y) are formed as an integral structure. This integrated structure has a material with high Young's modulus, light specific gravity, fatigue fracture resistance, low thermal expansion coefficient, and suitable for wire-cut electrical discharge machining (for example, titanium (Ti)) Alloys, super duralumin, stainless steel, sialon, etc.) are desirable.

In addition, the following means can be employ | adopted as the method of fixing the 1st and 2nd actuators 3 and 4 to the base 2. FIG. That is, a plurality of screw grooves (holes) 18 (see FIG. 2) are arranged (perforated) on the side surfaces of the support portions 11x and 11y of the first and second actuators 3 and 4. Then, as shown in FIG. 1, bolt holes 19b are provided on the side surfaces of the base 2 on the side surfaces 2a and 2b of the L shape, and the bolts 19a are inserted into the bolt holes from the side surfaces outside the side surfaces 2a and 2b. The first and second actuators 3 and 4 can be fixed to the L-shaped inner wall surface provided at the edge of the base 2 by screwing into the screw hole 18 through 19b. However, the above fixing method is an example. If the first and second actuators can be fixed with high rigidity, mechanical fixing methods other than screws, fixing by brazing, welding, adhesion, etc. may be used. This fixing method is not particularly limited.

As shown in FIG. 1, the first link mechanism 6 is composed of two link members 6a and 6b disposed at a predetermined interval so as to be parallel to each other, and is movable near both ends. The child 13x and the stage 5 are connected (coupled) so as to be able to rotate (turn). In the embodiment shown in FIG. 1, a method for rotatably connecting the end portions of the link members 6a and 6b to the movable element 13x and the stage 5, respectively, employs a mechanical joining means such as a screw or pin connection. be able to. In addition, one end of each of the link members 6a and 6b is one side (side) of the stage 5 having a quadrangular shape in plan view (top view), and is a side (Y-axis direction) orthogonal to the X-axis direction. Parallel side portions) 5s4 are rotatably connected.

In this manner, the end portions of the two link members 6a and 6b are connected to the movable element 13x and the stage 5 so as to be rotatable (rotatable), so the two link members 6a and 6b are parallel links. Configure the mechanism. Thus, the parallel link mechanism efficiently transmits the linear motion of the movable element 13x to the stage 5, and further, the parallel link mechanism is flat with respect to the linear motion (shearing force) of the movable element 13y. Since the shape changes from a rectangular shape to a parallelogram as viewed, the stage 5 is operated as a translation error in the X-axis direction, but no rotational moment around the θ-axis is generated. Therefore, the movement control of the stage 5 is coordinated and coordinated simultaneously with respect to the X axis and the Y axis, and the position control is performed while correcting the position error, so that the stage 5 can be accurately positioned at an arbitrary position in the XY plane. It becomes possible to do.
The link members 6a and 6b are made of a material having a resistance to buckling stress and a small specific gravity. For example, titanium (Ti) which is a material such as the mover 13x (13y) constituting the actuators 3 and 4 described above. ) Alloys, super duralumin, stainless steel, sialon, etc. are suitable.

Similarly, as shown in FIG. 1, the second link mechanism 7 is composed of two link members 7 a and 7 b that are arranged to be parallel to each other with a predetermined distance therebetween, and each end portion The vicinity is rotatably connected (linked) to the mover 13y and the stage 5. In the embodiment shown in FIG. 1, a method of connecting each end of the link members 7a and 7b to the movable element 13y and the stage 5 in a rotatable manner employs, for example, mechanical joining means such as screws or pin connections. be able to. One end of each of the link members 7a and 7b is one side (side) of the stage 5 having a quadrangular shape in plan view (top view), and is a side (X-axis direction) perpendicular to the Y-axis direction. Parallel side portions) 5s1 are rotatably connected.

In this way, since the end portions of the two link members 7a and 7b are connected to the movable element 13y and the stage 5 so as to be rotatable (rotatable), the two link members 7a and 7b are parallel links. Configure the mechanism. Thereby, the parallel link mechanism efficiently transmits the linear motion of the movable element 13y to the stage 5, and further, the parallel link mechanism is flat for the linear motion (shearing force) of the movable element 13x. Since the shape changes from a rectangular shape to a parallelogram as viewed, the stage 5 is operated as a translation error in the Y-axis direction, but no rotational moment around the θ-axis is generated. Therefore, the movement control of the stage 5 is simultaneously linked and coordinated with respect to the X axis and the Y axis, and the position control is performed while correcting the position error, thereby positioning the stage 5 at an arbitrary position in the XY plane with high accuracy. It becomes possible.
The material of the link members 7a and 7b is the same as that of the link members 6a and 6b. The material of the link members 7a and 7b has a resistance to buckling strength and a small specific gravity. Titanium (Ti) alloys, ultra-duralumin, stainless steel, sialon, etc., which are materials such as (13y), are suitable.

The arrangement relationship between the link members 6a and 6b and the link members 7a and 7b is orthogonal to the X-axis direction and the Y-axis direction of the stage 5 having a square shape in plan view (top view) as shown in FIG. It is connected to one of the two adjacent sides (5s4 or 5s1) and the central portion of the outer surface thereof.

The first and second link mechanisms 6 and 7 shown in FIG. 1 have a movable element 13x, a stage 5, and a movable element 13y with two link members 6a and 6b or 7a and 7b arranged in parallel. Although an example is shown in which the stage 5 is rotatably connected to the stage 5 by screws, pin connections, or the like, in the present invention, the link mechanisms 6 and 7 may be configured as shown in FIG.

The first and second link mechanisms 6 and 7 serving as the parallel link mechanism shown in FIG. 3 have a structure manufactured by integral molding together with the movable element 13x, the movable element 13y, and the stage 5.
In other words, the two link members 6a and 6b that connect the movable element 13x to be the first link mechanism 6 and the stage 5 are arranged so as to be parallel to each other, and a notch portion is formed at the base portion to be connected. The elastic hinge portions 6a1 and 6a2 and the elastic hinge portions 6b1 and 6b2 are formed. Similarly, the two link members 7a and 7b for connecting the movable element 13y serving as the second link mechanism 7 and the stage 5 are arranged so as to be parallel to each other, and a notch portion is provided at the base portion to be connected. The elastic hinge portions 7a1 and 7a2 and the elastic hinge portions 7b1 and 7b2 are formed. As shown in FIG. 3, the link members 6a and 6b and the link members 7a and 7b are adjacent to each other perpendicular to the X-axis direction and the Y-axis direction of the stage 5 having a quadrangular shape in plan view (top view). Are connected to one of the two sides (5s4 or 5s1) and the central portion of the outer surface thereof.

In this way, the link members 6a and 6b constituting the first and second link mechanisms 6 and 7 and the link members 7a and 7b operate like a rotary joint by concentrating stress on a part of the elastic body. By providing the elastic hinge portions 6a1, 6a2, 6b1, 6b2, and 7a1, 7a2, 7b1, 7b2, the first and the second arranged orthogonal to the linear motion of the movable element 13x and the movable element 13y Since the shearing force is applied to the link members 6a and 6b and the link members 7a and 7b constituting the link mechanisms 6 and 7, the link members 6a and 6b constituting the parallel link mechanism or the link member by the hinge operation by elastic deformation. The shape of 7a and 7b changes from a rectangle to a parallelogram in plan view, and a parallel link mechanism similar to a mechanical joining means such as a screw or pin connection shown in FIG. The operation of Te becomes possible.

The first and second link mechanisms 6 and 7 shown in FIG. 3 have a structure in which a movable element 13x (movable element 13y) and an outer member of the stage 5 are linked and connected by integral molding without using screws or pin couplings. Indicates. As a configuration example of such link mechanisms 6 and 7, a configuration as shown in FIG. 4 can also be employed.

The link mechanism shown in FIG. 4 has a movable element 13x as the first link mechanism 6 and two link members (beams) 6c and 6d for connecting the stage 5 arranged in parallel, and has a base portion cut at the base. Without providing the elastic hinge portions (6a1 and 6a2 and 6b1 and 6b2 shown in FIG. 3) having the chipped portions, the bending rigidity of the beams 6c and 6d constituting the first link mechanism 6 is lowered, and the beam itself is not operated. A parallel link mechanism is realized using a device.

Similarly, two link members (beams) 7c and 7d for connecting the movable element 13y serving as the second link mechanism 7 and the stage 5 are disposed in parallel, and an elastic portion having a notch at the base portion thereof. Without providing the hinge portions (7a1 and 7a2 and 7b1 and 7b2 shown in FIG. 3), the bending rigidity of the beams 7c and 7d constituting the second link mechanism 7 is lowered and parallel using the bending of the beam itself. The link mechanism is realized.

As shown in FIG. 4, the beams 6 c and 6 d and the beams 7 c and 7 d are adjacent to each other in two orthogonal directions orthogonal to the X-axis direction and the Y-axis direction of the stage 5 having a square shape in plan view (top view). One of the sides (5s4 or 5s1) is connected to the central portion of the outer surface.

In the link mechanism shown in FIG. 4, the beams 6c and 6d and the beams 7c and 7d constituting the first and second link mechanisms 6 and 7 orthogonal to the linear motion of the movable element 13x and the movable element 13y. As a parallel link mechanism, the shape can be changed from a rectangle to a parallelogram in plan view. As long as the mechanism of the parallel link mechanism is satisfied in this way, the shape and form of the link mechanism itself are not limited.

In the embodiment shown in FIGS. 1, 3, and 4, the link members 6a and 6b and the like, the beams 6c and 6d, and the like are in the X-axis direction of the stage 5 having a quadrangular shape in plan view (top view). The two adjacent sides (5s4 or 5s1) that are orthogonal to the Y-axis direction and the central part of the outer surface of the two sides are arranged, offset from the central part up and down or left and right, and offset from the center. A configuration in which each position is connected is also possible.

In the embodiment shown in FIGS. 3 and 4, the first and second link mechanisms 6 and 7, the movable element 13 x (movable element 13 y), and the stage 5 are made of these members by, for example, wire-cut electric discharge machining or the like. The first link mechanism 6 is connected to the stage 5 and the movable element 13x, and the second link mechanism 7 is connected to the stage 5 and the movable element using the following coupling (joining) means. You may couple | bond with 13y integrally.
That is, the first link mechanism 6 is connected to the stage 5 and the movable element 13x, and the second link mechanism 7 is connected to the stage 5 and the movable element 13y. The bonding means by adhesive, the bonding means by brazing, the bonding means by welding, the friction Bonding is performed integrally by using any one of a joining means by pressure welding, a joining means by diffusion joining, a joining means by glass hermetic and the like. However, as long as the first and second link mechanisms and the stage 5 can be joined with high rigidity, it is possible to adopt a mechanical fixing method such as a screw. This fixing method is particularly brazed, welded, bonded, etc. It is not limited to.

The elastic spring mechanisms 8a, 8b, 8c, and 8d serving as the elastic support mechanisms are formed of an elastic body having an appropriate elastic coefficient. For example, coil springs or checkered cuts are alternately formed on both side surfaces of a square pillar. It is conceivable to apply a support mechanism that applies the elasticity of a high-strength alloy steel for springs, such as a spring mechanism having an inserted direction. In the present invention, the elastic spring mechanisms 8a, 8b, 8c, and 8d suppress fluctuations in the Z-axis direction perpendicular to this surface (having directivity) when the stage 5 moves freely in the XY plane. Therefore, an elastic spring mechanism having a remarkably high rigidity in the Z-axis direction as compared to the XY plane direction, for example, the configuration shown in FIG. 5, that is, checkered cuts alternately on both sides of the elastic body of the quadrangular prism It is desirable to employ the elastic spring mechanisms 8a, 8b, 8c and 8d. 5 shows only the elastic spring mechanism 8c, the other elastic spring mechanisms 8a, 8b, and 8d have the same configuration as the elastic spring mechanism 8c.

The elastic spring mechanism 8c (8a, 8b, 8d) shown in FIG. 5 has a plurality of checkered grooves (notches) 8c1 arranged alternately on both side surfaces of the quadrangular prism in the Z-axis direction (from the upper surface of the elastic spring mechanism 8c). The bottom surface is made to penetrate. By providing the checkered groove 8c1 in this way, a flexible spring property is added in the U-axis direction, and the decrease in the rigidity in the Z-axis direction is suppressed from the relation of the cross-section secondary moment, and the fluctuation in the Z-axis direction is suppressed. When the elastic spring mechanisms 8a, 8b, 8c, and 8d having directivity that are suppressed are used, when the stage 5 freely moves in the XY plane, the fluctuation in the Z-axis direction perpendicular to the plane is achieved. Therefore, there is an effect of improving the positioning accuracy in the operation defined in the XY plane of the stage 5.

One end of each elastic spring mechanism 8a, 8b, 8c, 8d, which is an elastic support mechanism, is integrally connected to the stage 5 or integrally connected by bonding, brazing, welding, welding, screws, etc. The method itself is not limited. The other end of each elastic spring mechanism 8 a, 8 b, 8 c, 8 d is fixed in a state of being supported by a bolt 20 screwed into the base 2. These four elastic spring mechanisms 8a, 8b, 8c, and 8d make the angle α or β with respect to the X-axis direction or Y-axis direction shown in FIG. For example, the angles α and β are desirably set to form an angle of 45 °. Thereby, the four corners of the stage 5 are elastically supported by the elastic spring mechanisms 8a, 8b, 8c, and 8d, respectively, and are in a floating state with no friction with respect to the base 2. The stage 5 can freely move in the XY plane according to the thrust output from the actuators 3 and 4. The embodiment shown in FIG. 1 shows an example in which the four corners (four corners) of the rectangular stage 5 are elastically supported by the elastic spring mechanisms 8a, 8b, 8c, and 8d in a plan view (top view). ing.

On the upper surface of the base 2, as shown in FIG. 6, there are respective bolt holes 21 into which four bolts 20 for elastically supporting the stage 5 by elastic spring mechanisms 8a, 8b, 8c, 8d are inserted. The bolt 20 is arranged at four locations, and the lower end of the bolt 20 is fixed from the bottom surface side of the base 2 by a nut 22 (see FIG. 2). It may be fixed by screwing. Moreover, as for this fixing method, adhesion, brazing, welding, welding, etc. can be considered in addition to mechanical coupling such as screws, but the fixing method itself is not limited as long as it can be fixed with high rigidity. In the example shown in FIG. 6, a bolt hole 23 is provided on the upper surface of the base 2 for fixing to a facility on which the positioning mechanism 1 is mounted, for example, a scanning probe microscope or a semiconductor inspection apparatus.

Subsequently, the main features of the configuration of the positioning mechanism of the present invention will be described. The first characteristic configuration is a thrust generating means of the first and second actuators 3 and 4, for example, when a displacement is generated by applying a voltage to the stacked piezoelectric elements 10x and 10y, respectively. This is because the first and second actuators 3 and 4 are arranged and attached to the base 2 so that the displacement directions of the movers 13x and 13y are orthogonal to each other and on the same plane. As a result, the stage 5 can be positioned at high speed and with high accuracy in the same two-dimensional (XY) plane constituted by the X axis and Y axis orthogonal to each other.

The second characteristic configuration is that the stage 5 is connected to the respective movable elements 13x and 13y of the first and second actuators 3 and 4 and a link mechanism that can change the shape from a rectangle to a parallelogram in plan view ( (Parallel link mechanism) 6 and 7 are connected (linked). When the stage 5 is connected via the parallel link mechanisms 6 and 7, the displacement of the stacked piezoelectric elements 10x and 10y is expanded by the action of the lever and transmitted to the movable element 13x or 13y. Includes a force (rotational moment) for rotating the stage 5 around the θ axis by being orthogonal to each other in the same plane. However, the parallel link mechanisms 6 and 7 that transmit the thrust generated by the first and second actuators 3 and 4 to the stage 5 are caused by force components (shearing forces) perpendicular to each other. As described above, the shape of the parallel link mechanism changes from a rectangle to a parallelogram and is converted into a translational operation on the X axis or the Y axis, thereby suppressing the generation of a rotational moment.

Therefore, when each displacement (thrust) generated by the first and second actuators 3 and 4 is directly transmitted from the mover 13x or 13y to the stage 5, the mover 13x or 13y whose operation directions are orthogonal to each other is sheared. Although it works as a force but is configured to transmit via the parallel link mechanisms 6 and 7, the displacement (thrust) transmitted to the mover 13x causes the stage 5 to move in the X-axis direction and simultaneously in the Y-axis direction. It will also move in parallel (translate). The displacement (thrust) transmitted to the mover 13y moves in parallel in the X-axis direction (translation) while moving the stage 5 in the Y-axis direction. It is defined by linear motion on the controllable X axis and Y axis, and can substantially suppress the component of rotational motion around the θ axis that cannot be controlled only by the first and second actuators 3 and 4.

The third characteristic configuration is that the stage 5 is attached to the base 2 in a floating state. As described above, the stage 5 is connected to the movable elements 13x and 13y of the first and second actuators 3 and 4 via the parallel link mechanisms 6 and 7 that can change the shape from a rectangle to a parallelogram in plan view. However, as shown in FIG. 2, the stage 5 itself is supported in a floating state with respect to the base 2 via an elastic spring mechanism 8a serving as an elastic support mechanism. In this way, by supporting the stage 5 in a floating state without friction caused by sliding with respect to the base 2 via the elastic spring mechanism 8a or the like, the component force for rotating the stage 5 around the θ axis is elastic. The non-linear sliding friction or axis in the XY plane that must be prevented from occurring when the stage 5 moves in the XY plane at high speed and accurately, while also acting to absorb and suppress the spring mechanism 8a and the like. It is also possible to prevent minute fluctuations and shakes in the direction.

  Next, a method for controlling the driving of the positioning mechanism 1 shown in FIG. 1 will be described. FIG. 7 is a control block diagram illustrating an example for controlling the driving of the positioning mechanism 1. In FIG. 7, the control device 30 includes, for example, a CPU or DSP (Digital Signal Processor), ROM, RAM, an A / D converter for input / output of analog signals, a D / A converter, and digital input / output. The control device includes a circuit including a PIO and the like, and various programs including an algorithm for controlling the driving of the positioning mechanism 1 are stored in the ROM. As this program, a control program for positioning the stage 5 at a target position in the XY plane at high speed, with high stability and high accuracy by performing position feedback control on the operation of the first and second actuators 3 and 4. It is included. In the control device 30, in a device equipped with the positioning mechanism 1, for example, a scanning probe microscope, a scanning command for moving the stage 5 to the target position is sent from the host control device (not shown) to the target. Input as command M.

  In FIG. 7, the X-axis and Y-axis drive circuits 31x and 31y are used to drive the thrust generation circuits of the first and second actuators 3 and 4, respectively, for example, the stacked piezoelectric elements 10x and 10y. Circuit. When the stage 5 is moved from the current position to the target position, these circuits 31x and 31y amplify a signal output from the D / A conversion in accordance with a movement command generated by the control device 30, and the stacked piezoelectric element 10x, This is a circuit for supplying a driving voltage to 10y to operate the first actuator 3 for X axis and the second actuator 4 for Y axis. As this voltage value, for example, a voltage in the range of 0 to 150 V is supplied to the multilayer piezoelectric elements 10x and 10y.

Next, the operation of suppressing the rotation of the stage 5 by the first link mechanism 6 and the second link mechanism 7 described above will be described with reference to FIGS. In the following description, the action of suppressing the rotation of the stage 5 by the first link mechanism 6 and the second link mechanism 7 is the same as the stage 5 and the first link mechanism 6 as shown in FIG. The second link mechanism 7 will be described with reference to the drawings in which the second link mechanism 7 is connected by mechanical joining means such as pin (screw) coupling. However, as shown in FIGS. 3 and 4, the stage 5 without adopting pin coupling or the like. In the configuration in which the first link mechanism 6 and the second link mechanism 7 are integrally molded, the same action can be obtained.

The state shown in FIG. 8 shows a state in which no thrust is generated in the thrust generating means of the first actuator 3 or the second actuator 4. In this state, the two link members 6a and 6b constituting the first link mechanism 6 are in a quadrilateral (rectangular) state parallel to the X-axis direction in plan view (top view). Similarly, the two link members 7a and 7b constituting the second link mechanism 7 are in a quadrilateral (rectangular) state parallel to the Y-axis direction.

Subsequently, for example, when a target command M is input to the control device 30 from a control device such as a scanning probe microscope, the control device 30 performs control for moving the stage 5 to the target position based on the target command M. Perform the operation. Next, the control device 30 outputs the control amount for each axis to the X-axis drive circuit 31x and the Y-axis drive circuit 31y based on the calculation result. The X-axis drive circuit 31x and the Y-axis drive circuit 31y output drive voltages to the first actuator 3 or the second actuator 4, respectively, based on the input control amount. Thereby, for example, when the laminated piezoelectric element 10x which is the thrust generating means of the first actuator 3 shown in FIG. 1 is extended, the thrust in the X1 direction is transmitted to the movable element 13x via the lever portion 17x. This thrust is transmitted to the two link members 6 a and 6 b that constitute the first link mechanism 6.

FIG. 9 shows a state when thrust in the X1 direction is transmitted to the mover 13x of the first actuator 3 in the state shown in FIG. As shown in FIG. 9, when the thrust in the X1 direction is transmitted to the movable element 13x, the thrust is transmitted to the two link members 6a and 6b constituting the first link mechanism 6. It moves based on a control command from the control device 30 in the axial direction. At this time, a rotational moment around the θ axis is generated at the connecting portion between the movable element 13y and the stage 5 by the thrust transmitted to the movable element 13x. At this time, the two link members 7a and 7b constituting the second link mechanism 7 are, as described above, mechanical joining means such as a pin (screw) coupling that is rotatable with the movable element 13y and the stage 5. 8 in a plan view (top view), the shape changes from a rectangle shown in FIG. 8 to a parallelogram shape as shown in FIG. 9, and is converted into a translational motion in the Y-axis direction by this operation. The stage 5 causes a minute movement error in the Y2 direction without rotating.

This movement error in the Y-axis direction is position-feedbacked to the control device 30 by the Y-axis position detection sensor 9y, whereby a movement command (control amount) from the new control device 30 for correcting the movement error with respect to the target position. ) And is input to the Y-axis drive circuit 31y, and a drive voltage based on this control amount is applied to the second actuator 4, thereby correcting the movement error of the stage 5 in the Y-axis direction. At this time, the four elastic spring mechanisms 8a, 8b, 8c, and 8d supporting the stage 5 on the base 2 form an angle of 45 ° (α or β) with respect to the X-axis direction and the Y-axis direction. Thus, the stage 5 is also prevented from rotating.

Next, the operation when the thrust is transmitted to the mover 13y of the second actuator 4 will be described. In FIG. 8 showing a state where no thrust is generated in the thrust generating means of the first and second actuators 3 and 4, when the thrust in the Y1 direction (shown in FIG. 10) is transmitted to the mover 13y, this thrust is Since the signal is transmitted to the two link members 7 a and 7 b constituting the second link mechanism 7, the stage 5 moves in the Y-axis direction based on a control command from the control device 30. At this time, a rotational moment around the θ axis is generated at the connecting portion between the movable element 13x and the stage 5 by the thrust transmitted to the movable element 13y as described above. At this time, the two link members 6a and 6b constituting the first link mechanism 6 change from a rectangle shown in FIG. 8 to a parallelogram shape as shown in FIG. 10 in a plan view (top view). The stage 5 is converted into a translational motion in the X-axis direction by this operation, so that the stage 5 causes a minute movement error in the X2 direction without rotating.

This movement error in the X-axis direction is position-feedbacked to the control device 30 by the X-axis position detection sensor 9x, whereby a movement command (control amount) from the new control device 30 for correcting the movement error with respect to the target position. ) And is input to the X-axis drive circuit 31x, and a drive voltage based on this control amount is applied to the first actuator 3, whereby the movement error in the X-axis direction of the stage 5 is corrected. At this time, the four elastic spring mechanisms 8a, 8b, 8c, and 8d supporting the stage 5 on the base 2 form an angle (α or β) of 45 ° with respect to the X-axis direction and the Y-axis direction. Thus, the stage 5 is also prevented from rotating.

As described above, for example, when the first actuator 3 is operated in order to move the stage 5 in the X1 direction, the second interposed between the mover 13y of the second actuator 4 in the Y-axis direction and the stage 5. The link mechanism 7 changes its shape from a rectangle to a parallelogram in plan view (top view), and the position error caused by the stage 5 being displaced in the Y2 direction is a position feedback from the Y-axis position detection sensor 9y. Is corrected by the operation of the second actuator 4 via the control device 30 and the Y-axis drive circuit 31y. In this operation, the first link mechanism 6 interposed between the mover 13x of the first actuator 3 in the X-axis direction and the stage 5, which is the starting point of the operation, is seen from a rectangle in parallel plan view (top view). Changing the shape to a shape causes a new position error in the X2 direction. The position error is corrected by re-operating the first actuator 3 via the control device 30 and the X-axis drive circuit 31x by position feedback from the X-axis position detection sensor 9x. By repeating the operation of the shaft up to the range of the allowable position error, it is possible to converge to the target position in the XY plane.

Therefore, when the stage 5 is moved only in one direction, either the X1 direction or the Y1 direction, the operations of the first link mechanism 6 and the second link mechanism 7 that suppress the rotational moment around the θ axis are as follows: There is a correlation that causes positional errors in the axial direction perpendicular to the moving axis direction. Therefore, the position signals detected by the X-axis position detection sensor 9x and the Y-axis position detection sensor 9y are always fed back to the control device 30 to the first actuator 3 and the second actuator 4, and the control device 30 Simultaneous and coordinated control is possible by high-speed repetitive arithmetic processing, and the stage 5 is moved to the target in the XY plane via the X-axis driving circuit 31x and the Y-axis driving circuit 31y that are high speed and low noise. It is possible to achieve high-speed and high-accuracy positioning with respect to the position.

As described above, the stage 5 can be accurately positioned at the target position on the XY plane with respect to the target command M by the control of the control device 30. In the present invention, the first and second link mechanisms 6 and 7 orthogonal to the thrusts from the first and second actuators 3 and 4 are shaped from a rectangle to a parallelogram in plan view (top view). Is changed into a translational motion, and the rotational moment around the θ axis is suppressed from acting on the stage 5. For this reason, the link mechanisms 6 and 7 are moved in accordance with the shape change from the rectangle to the parallelogram in a plan view (top view), and the position of the stage 5 on the XY plane with respect to the moved amount (X axis and Data (for example, a correction formula) related to the relationship with the Y-axis coordinate) is obtained in advance, and this relationship may be incorporated in the positioning control program of the stage 5 as a correction formula. As a result, the number of convergence calculations for positioning the stage 5 to the target position can be reduced, so that accurate positioning control within the order of nm in the XY plane can be performed at high speed. Become.

11A shows a positioning mechanism in which beams (link members) 6a and 6b are provided as the first link mechanism 6 shown in FIG. 3 and beams (link members) 7a and 7b are provided as the second link mechanism 7. The state when the thrust in the direction of the arrow X1 is transmitted to the mover 13x of one actuator 3 is shown. In the state shown in FIG. 11A, by providing elastic hinge portions 7a1, 7a2, 7b1, 7b2 at both ends of the beams 7a, 7b constituting the second link mechanism 7, the beams 7a, 7b forming the parallel link mechanism are In a plan view (top view), the shape changes from a rectangle to a parallelogram, and an operation equivalent to the operation described in FIG. 9 is performed. Thereby, it is possible to suppress the rotational moment about the θ axis from acting on the stage 5.

Further, FIG. 11B is a positioning mechanism provided with beams 6c and 6d as the first link mechanism 6 and beams 7c and 7d as the second link mechanism 7 shown in FIG. The state when the thrust in the arrow X1 direction is transmitted is shown. In the state shown in FIG. 11B, the beams 7c and 7d constituting the second link mechanism 7 are subjected to bending stress, and the beams 7c and 7d constituting the parallel link mechanism are rectangular in plan view (top view). The shape changes to a parallelogram shape, and an operation equivalent to the operation described with reference to FIG. 9 is performed. Thereby, it is possible to suppress the rotational moment about the θ axis from acting on the stage 5.

  In the present invention, by the above configuration and control, the displacement amount of the first and second actuators 3 and 4 that expands the minute displacement of the laminated piezoelectric element by the lever action of the lever portions 17x and 17y is determined by the link mechanism 6. , 7, the stage 5 can be positioned and controlled at high speed and accurately at an arbitrary position in the XY plane within an operation range of 500 μm square or more, for example. This makes it possible to adapt to various industrial fields such as scanning probe microscopes, semiconductor and liquid crystal manufacturing and inspection processes.

  In the above-described embodiment of the present invention, an example in which the four elastic spring mechanisms 8a, 8b, 8c, 8d are arranged so as to form an angle α (β) of 45 ° with respect to the directions of the X axis and the Y axis. However, the arrangement described below can also be adopted as the arrangement of the link mechanism that connects the first and second actuators 3 and 4 and the stage 5 that are characteristic of the positioning mechanism of the present invention. Hereinafter, configuration examples of other link mechanisms will be described.

One of the other link mechanisms that can be employed in the present invention is a link mechanism having the structure shown in FIG. 12, for example. In the embodiment shown in FIG. 12, a link mechanism that transmits thrust from the first and second actuators to two adjacent (adjacent) corners (corners) of the square stage 5 is provided. The arrangement is arranged. Further, the two diagonal lines connecting the four corners of the stage 5 are the thrust directions of the first and second actuators 3 and 4, that is, the Xa axis and Ya inclined by 45 ° with respect to the X axis and Y axis shown in FIG. The elastic spring mechanisms 8a, 8b, 8c, and 8d are arranged at an angle δ of 45 ° with respect to the directions of the Xa axis and the Y axis a at the central portion of the outer surface formed by the four sides of the stage 5 and the respective sides. The arrangement is such that (γ) is formed.
Note that the angle δ (γ) of the elastic spring mechanisms 8a, 8b, 8c, and 8d with respect to the Xa-axis and Ya-axis directions may be set to an arbitrary angle other than the above 45 °. Further, the direction of thrust of the first and second actuators 3 and 4 may be set to an arbitrary angle γ (δ) in addition to the above 45 ° with respect to the X axis and Y axis shown in FIG. . Note that the orthogonal Xa axis and Y axis a are coordinate axes corresponding to the X axis and Y axis shown in FIG. 1, and are axis names given to distinguish between the X axis and Y axis in FIG. is there.

Furthermore, as another configuration example of the link mechanism, a configuration in which a plurality of elastic spring mechanisms 8a and 8c, or 8b and 8d are disposed only at a pair of corner portions (corner portions) diagonally (facing) on the stage 5. (See FIG. 18). Furthermore, it is possible to adopt a configuration (see FIG. 15) in which the stage 5 is supported only by the link mechanisms 6 and 7 without providing the elastic spring mechanisms 8a, 8b, 8c and 8d. Further, in order to reinforce the support of the stage 5 or to suppress the action of a rotational moment around the θ axis, the support by one or a plurality of elastic spring mechanisms is attached as necessary to the sides or corners of the stage 5. You may arrange | position in arbitrary positions.

  Next, the configuration and operation of the embodiment shown in FIG. 12 will be described in more detail. FIG. 12 shows a configuration in which the thrust from the first and second actuators 3 and 4 is transmitted to two adjacent corners (corners) of the square stage 5 in plan view (top view). ing.

In the embodiment shown in FIG. 12, one corner 5c1 of the quadrangular stage 5 is connected to the movable element 13x of the first actuator 3 via the first link mechanism 6, and the corner 5c1 of the stage 5 is connected. The corner 5c2 adjacent to the second actuator 4 is connected to the movable element 13y of the second actuator 4 via the second link mechanism 7. The first link mechanism 6 includes two link members 6a and 6b that are arranged in parallel to the Ya axis with a predetermined interval across the corner 5c1 of the stage 5. Similarly, the second link mechanism 7 includes link members 7a and 7b arranged in parallel with the Xa axis at a predetermined interval across the corner 5c2 of the stage 5. In FIG. 12, each link member constituting the first and second link mechanisms 6 and 7 is a machine such as a pin (screw) coupling that can rotate with respect to the movers 13x and 13y and the stage 5, respectively. In the example shown in FIG. 3 or FIG. 4, a configuration may be adopted in which the movable elements 13 x and 13 y and the stage 5 are integrally formed (connected).

In the embodiment shown in FIG. 12, each of the four elastic spring mechanisms 8a, 8b, 8c, 8d has four sides of the stage 5 (5s1, 5s2.5s3, 5s4 shown in FIG. 13A) and each side. The other end portions of the elastic spring mechanisms 8 a, 8 b, 8 c, 8 d are fixed to the base 2 by bolts 20. Thereby, similarly to the embodiment shown in FIG. 1, the stage 5 is elastically supported in a floating state with respect to the base 2.
Further, the direction of transmission of thrust from the first actuator 3 is determined by the direction of the diagonal line (Ya axis) connecting the corner 5c1 of the stage 5 connected to the first link mechanism 6 and the corner 5c3 facing the corner 5c1. To match. Similarly, the transmission direction of the thrust from the second actuator 4 is determined by the diagonal line (Xa axis) connecting the corner portion 5c2 of the stage 5 connected to the second link mechanism 7 and the corner portion 5c4 facing the corner portion 5c2. The stage 5 is arranged on the base 2 so as to coincide with the direction.

In the embodiment shown in FIG. 12, the first and second reference points P0 of the stage 5 (the center of the stage 5 serving as the movement origin determined on the basis of the base 2 based on the control command from the control device 30 in the embodiment shown in FIG. In order to move the second link mechanisms 6 and 7 in a rectangular state) to the target coordinate point P1x (see FIG. 13B), the movable element 13x of the first actuator 3 has a thrust in the direction of the arrow Ya1. Shows the state when transmitted.
Subsequently, the first and second link mechanisms 6 for transmitting the thrust in the direction of the arrow Ya1 to the mover 13x of the first actuator 3 to move the reference point P0 of the stage 5 to the target coordinate point P1x. , 7 will be described in detail with reference to FIGS. 13A to 13D.

FIG. 13A shows a situation when no thrust is transmitted to the mover 13x. A movement command is input from the control device 30 to the X-axis drive circuit 31x, and the thrust in the Ya1 direction of the Ya axis that forms an angle of 45 ° with respect to the Y axis is transmitted to the mover 13x according to the output voltage value. Then, since this thrust is transmitted to the two link members 6a and 6b constituting the first link mechanism 6, the center on the stage 5 is the target value of the Ya axis shown in FIG. 13B from the reference point P0. It moves to the coordinate point P1x.

When thrust in the Ya1 direction is transmitted to the mover 13x, a rotational moment around the θ axis is generated at the connecting portion between the mover 13y and the stage 5, as described above. In FIG. 9, the mover 13x As in the case where the thrust in the X1 direction is transmitted to the two link members 7a and 7b constituting the second link mechanism 7, the two link members 7a and 7b are rectangular in plan view (top view) as shown in FIGS. 13A to 13B. The thrust in the Ya1 direction is converted into a translational movement parallel to the Ya axis that forms an angle of 45 ° with respect to the Y axis, and the rotation of the stage 5 is suppressed. However, the movement of the second link mechanism 7 causes minute movement errors (xe1, ye1) in the X-axis and Y-axis directions as shown in FIG. 13D with respect to the target coordinate point P1x, as shown in FIG. 13C. The target value on the Ya axis is Position error amount to the coordinate position P2x from gauge P1x, deviates from the target position.

On the other hand, FIG. 14 shows the second embodiment in order to move the reference point P0 of the stage 5 to the target coordinate point P1y (see FIG. 14B) based on the control command from the control device 30 in the embodiment shown in FIG. The state when the thrust in the arrow Xa1 direction is transmitted to the mover 13y of the actuator 4 of No. 2 is shown. Hereinafter, the operation status of the first and second link mechanisms 6 and 7 when the reference point P0 of the stage 5 is moved to the target coordinate point P1y will be described in detail with reference to FIGS. 14A to 14D.

FIG. 14A shows a situation when no thrust is transmitted to the mover 13y. A movement command is input from the control device 30 to the Y-axis drive circuit 31y, and the thrust in the Xa1 direction of the Xa axis, which forms an angle of 45 ° with respect to the X axis, is transmitted to the mover 13y according to the output voltage value. Then, since this thrust is transmitted to the two link members 7a and 7b constituting the second link mechanism 7, the center of the stage 5 on the stage is from the reference point P0 to the Xa axis shown in FIG. 14B. It moves to the coordinate point P1y that becomes the target value.

When the thrust in the Xa1 direction is transmitted to the mover 13y, a rotational moment around the θ axis is generated at the connecting portion between the mover 13x and the stage 5, as described above. As in the case where the thrust in the Y1 direction is transmitted to 13y, the two link members 6a and 6b constituting the first link mechanism 6 are viewed in plan view (top view) as shown in FIGS. 14A to 14B. By changing from a rectangular shape to a parallelogram shape, this thrust in the Xa1 direction is converted into a translational motion parallel to the Xa axis that forms an angle of 45 ° with respect to the X axis, thereby suppressing the rotation of the stage 5. However, the movement of the first link mechanism 6 causes a movement error (xe2, ye2) as shown in FIG. 14D that is very small in the X-axis and Y-axis directions with respect to the target coordinate point P1y. As shown, set the target value on the Xa axis. Coordinate point position error amount to the coordinate position P2y from P1y, it deviates from the target position.

As shown in FIGS. 13A to 13C and FIGS. 14A to 14C, the stage 5 is moved through the first and second link mechanisms 6 and 7 by the thrust generated by the first and second actuators 3 and 4. It is input as thrust and displacement from a direction angle (Xa axis, Ya axis direction) that forms 45 ° with respect to the axis, and becomes a component force in X axis and Y axis direction (equal force in the case of 45 °) Therefore, when moving to an arbitrary position on the XY plane, the first and second actuators 3 and 4 must always be interlocked even on the X axis or the Y axis. is there. Accordingly, the link mechanisms 6 and 7 connected to the other actuators by the operation of the first and second actuators 3 and 4 change from a rectangular shape to a parallelogram shape in plan view (top view). The minute movement errors (xe1, ye1) and (xe2, ye2) generated in the X-axis and Y-axis directions are always included as position errors in the X-axis and Y-axis operations. In the embodiment having the configuration shown in FIG. 12, when the stage 5 is moved to an arbitrary position in the XY plane, the first and second actuators 3 and 4 of the present embodiment always operate in cooperation with each other. As described above with reference to the operations shown in FIG. 9 and FIG. 10, the translational motion that occurs when the link mechanisms 6 and 7 change from a rectangular shape to a parallelogram shape in plan view (top view). Is a clear position error, but is inevitably taken into the movement in the X-axis and Y-axis directions, and one of the features is that the clear error is not generated in the embodiment shown in FIG. . As a result, it is considered possible to reduce the number of times of the convergence calculation to the target position by the control device 30 as compared with the embodiment shown in FIG. 8, and the effect of improving the positioning accuracy and speeding up by compressing the steady error component. I can expect.

Therefore, the first and second actuators 3 and 4 always operate in cooperation with a movement command from the control device 30, and the control device 30 performs position feedback control based on the position information of the stage 5 detected by the position detection sensors 9x and 9y. Thus, the target position on the XY plane is corrected based on the current position of the stage 5 based on the reference point P0, and can be instantaneously converged to an accurate target position by high-speed calculation processing. At this time, as shown in FIG. 12, the elastic spring mechanisms 8a, 8b, 8c, and 8d at the place where the stage 5 is supported on the base 2 are at an angle of 0 ° with respect to the X-axis and Y-axis directions (X (On the axis, on the Y axis), the stage 5 is also prevented from rotating.

In the embodiment shown in FIG. 8, when the stage 5 is simply moved in the X-axis and Y-axis directions, the operating directions of the first actuator 3 and the second actuator 4 are arranged on the X-axis and Y-axis. Therefore, the independence of each axis is structurally higher than that of the embodiment shown in FIG. However, the translation error caused by the first link mechanism 6 and the second link mechanism 7 changing from a rectangular shape to a parallelogram shape in a plan view (top view) is corrected in the same manner as in the embodiment shown in FIG. The degree of mutual interference is different from that of the embodiment of FIG. 12, and the control characteristics and the operation amount are also different, but the two actuators 3 and 4 are always linked together, and correction is performed while actively cooperating. It is essential. However, unlike the embodiment of FIG. 12, the embodiment shown in FIG. 8 has a translation error superimposed on the X-axis and Y-axis motions, and the operation amount is easy to estimate geometrically. Depending on the degree, the positioning accuracy can be improved and the speed can be increased more than in the embodiment shown in FIG.

In FIG. 15, the stage 5 is connected to the first and second actuators 3 and 4 using the first link mechanism 6 and the second link mechanism 7, but the stage 5 is connected to four elastic springs. Embodiment which is not supported by mechanism 8a, 8b, 8c, 8d is shown.
In the embodiment shown in FIG. 15, when the thrust in the X1 direction is transmitted to the mover 13x of the first actuator 3, as shown in FIG. 16, the second link mechanism 7 is viewed in plan view (top view). Since the shape changes from a rectangle to a parallelogram and the shearing force applied to the second link mechanism 7 is converted into a translational motion in the Y-axis direction, the stage 5 is not rotated around the θ axis. However, the translation error on the Y-axis caused by the parallel link mechanism changing from a rectangle to a parallelogram causes the stage 5 to move in the Y2 direction as in the embodiment of FIG.

In the embodiment shown in FIG. 15, when the thrust in the Y1 direction is transmitted to the mover 13y of the second actuator 4, as shown in FIG. 17, the first link mechanism 6 is viewed in plan view (top view). Since the shape changes from a rectangle to a parallelogram and the shearing force applied to the first link mechanism 6 is converted into a translational motion in the X-axis direction, the stage 5 is not rotated around the θ axis. However, the translation error on the X axis caused by the change in the shape of the parallel link mechanism from the rectangle to the parallelogram causes the stage 5 to move in the X2 direction as in the embodiment of FIG.

In the embodiment shown in FIG. 15, the link members 6 a, 6 b, 7 a, 7 b constituting the first link mechanism 6 and the second link mechanism 7 are made of highly rigid members, so that the stage 5 Even if the elastic spring mechanisms 8a, 8b, 8c, and 8d, which are elastic support portions, are not used, the stage 5 can perform highly accurate positioning control while preventing minute fluctuations and vibrations in the Z-axis direction.

FIG. 18 is a plan view showing still another embodiment of the positioning mechanism of the present invention. In this embodiment, the stage 5 having a quadrangular shape in a plan view has a configuration in which elastic spring mechanisms 8b and 8d are provided only at a pair of opposite corners (corners). Thus, the support rigidity of the stage 5 can be increased compared with the embodiment shown in FIG. 15 by adopting a configuration in which only the pair of corners (corners) opposite to the stage 5 are supported by the elastic spring mechanism. , And the effect of suppressing the action of the rotational moment around the θ axis can be enhanced. Further, in the stage 5 having a quadrangular shape in plan view, the elastic spring mechanisms 8a and 8c may be provided only at the other pair of opposite corners (corners).

FIG. 19 is a plan view showing still another embodiment of the positioning mechanism of the present invention. In this embodiment, when the stage 5 has a quadrangular shape in plan view, the elastic spring mechanisms 8b and 8d are disposed only at a pair of opposite corners (corners), and the other A configuration in which the elastic spring mechanism 8c is arranged at one of the corners, that is, a configuration in which the stage 5 is supported by three elastic spring mechanisms, for example, any one elastic spring mechanism is deleted from the configuration shown in FIG. It is a configuration. By adopting such a configuration, it is possible to further increase the effect of suppressing the action of the rotational moment around the θ axis and increasing the support rigidity of the stage 5 as compared with the embodiment shown in FIG.

Similarly, in the embodiment shown in FIG. 12, although not shown in particular, the elastic spring mechanisms 8b and 8d are provided only on the pair of sides on the X axis facing the stage 5 and the central portion of the outer surface, or the Y axis The elastic spring mechanisms 8a and 8c are connected only to the upper pair of sides and the central portion of the outer surface thereof, so as to match the rigidity required for the stage 5 and the rigidity necessary for suppressing the rotational moment around the θ axis. The configuration of the elastic support mechanism can be simplified. Conversely, an elastic spring mechanism may be added to the corners 5c3 and 5c4 of the stage 5 to further enhance the support rigidity of the stage 5 and further enhance the effect of suppressing the action of the rotational moment around the axis.

Therefore, although not particularly illustrated, the elastic spring mechanism serving as the elastic support mechanism has the effect of increasing the support rigidity of the stage 5 and further reinforcing it, and also suppressing the action of the rotational moment around the θ axis. Depending on the rigidity, one to a plurality of elastic spring mechanisms can be arranged at arbitrary positions on the outer surface formed by the sides and corners of the stage 5 in plan view. For example, in the embodiment having the configuration shown in FIG. 8, the stage 5 is supported by four elastic spring mechanisms 8a, 8b, 8c, and 8d. However, the elastic spring mechanism 8c is eliminated by eliminating 8a, 8b, and 8d. It is also possible to support it. In addition, an elastic spring mechanism can be added to the sides 5s2 and 5s3 of the stage 5 and its outer surface to further enhance the support rigidity of the stage 5 and to further enhance the effect of suppressing the action of the rotational moment around the θ axis. It is.

Subsequently, another embodiment for connecting the stage 5 to the thrust transmission unit of the first actuator 3 and the thrust transmission unit of the second actuator 4 via the link mechanisms 6 and 7, respectively, based on FIG. Will be described.

FIG. 20 shows a mechanism for integrally connecting (coupling) the stage 5 with the thrust transmission part (movable element 13y) of the second actuator 4 and the link mechanism 7 in the embodiment of the present invention shown in FIG. The top view (top view) which shows the example which concerns on the Y-axis connected by the screw connection is shown. Although not shown in FIG. 20, the mechanism related to the X axis that connects the stage 5 to the thrust transmission unit (movable element 13 x) of the first actuator 3 via the link mechanism 6 is also the Y axis shown in FIG. 20. It becomes the same composition.

As shown in FIG. 20, flange portions 24a and 24b having a predetermined width and height are integrally provided at both ends of the link mechanism 7 provided with the link members 7a and 7b arranged in parallel. Further, a plurality of bolt holes 26 are provided in the flange portions 24a and 24b, respectively. On the other hand, a screw hole 27 is provided at a position corresponding to the bolt hole 26 provided in the flange portion 24a on the side surface portion of the mover 13y. Then, by screwing the bolt 25 into the screw hole 27 through the bolt hole 26, the flange portion 24a and the mover 13y are connected.
Similarly, a screw hole 27 is provided on the outer surface formed by the side 5s1 of the stage 5, and the bolt 25 is screwed into the screw hole 27 via the bolt hole 26 of the flange portion 24b. Are connected. Thus, the mover 13y and the stage 5 in the Y-axis direction can be firmly connected by the link mechanism 7 provided with the flange portions 24a and 24b.

By means similar to the above, the mover 13X in the X-axis direction and the outer surface formed by the side 5s4 of the stage 5 can be firmly connected by the link mechanism 6 provided in the flange portions 24a and 24b. Note that the link mechanism provided with the flange portion shown in FIG. 20 is the first and second link mechanisms 6 and 7 in the embodiment shown in FIG. 1 and FIG. It can be changed and adopted as appropriate.

In the present invention, as described above, the stage 5 and the movers 13x and 13y of the first and second actuators 3 and 4 are coupled (connected) via the link mechanisms 6 and 7 as described above, such as integral molding or screwing. However, the connection method is not limited as long as it can be fixed with high rigidity.

In the embodiment of the present invention described above, the shape of the stage 5 has been described by taking an example of a square (square) stage in plan view (top view), but the shape of the stage 5 employed in the positioning mechanism of the present invention is described. In addition to a square or a substantially square in plan view (top view), a stage having a polygon, such as a rectangle, a hexagon, or an octagon, a circle, or an ellipse can also be used. When the stage 5 having such a shape is employed, the positions of connecting the first and second link mechanisms 6 and 7 and the elastic spring mechanisms 8a, 8b,. As long as it does not deviate from the purpose, it is set appropriately. For example, when the stage 5 constituted by a hexagonal shape or an octagonal shape in plan view (top view) is adopted, the corner portion or the side portion and the outer side surface portion thereof are connected to a plurality of elastic spring mechanisms or a plurality of pieces. You may make it the structure supported by the link mechanism.

In the above-described embodiment of the present invention, the thrust generation means of the actuators 3 and 4 has been described using the multilayer piezoelectric elements 10x and 10y. However, instead of using the displacement enlarging mechanism, A configuration in which thrust is directly transmitted to the stage 5 via a link mechanism can also be employed. Furthermore, a thrust generating means applying a thrust generating mechanism that combines a ball motor or the like with a linear motor, a voice coil motor, or a rotary motor such as an AC servo motor or a pulse motor that can generate thrust or linear displacement (linear motion) It is also possible to use a means for transmitting thrust to the stage 5 via the first link mechanism 6 and the second link mechanism 7. Various thrust generating means for linear motion are conceivable as described above, and the thrust generating means itself can be appropriately selected in consideration of the control distance for positioning the stage 5, positioning accuracy, and the like. .

Moreover, it is good also as a structure of the stage apparatus which mounts the high-speed and highly accurate positioning mechanism of this invention on the table which moves coarsely in an X-axis and a Y-axis direction. In such a piggyback type stage device, first, in the X-axis and Y-axis directions, positioning to a coarse first target position in μm units by a coarse movement stage is performed by controlling, for example, a linear motor, and then In combination with the high-speed and high-accuracy positioning mechanism of the present invention in order to perform position control with respect to a precise target position in nm in the XY plane, the operation and scanning range are dramatically improved. It becomes possible to increase the speed.

It is a top view for demonstrating the one embodiment about the positioning mechanism of this invention. It is an arrow view of the AA line cross section of FIG. FIG. 5 is a plan view for explaining an example of a link mechanism that connects a stage and first and second actuators in the positioning mechanism of the present invention. In the positioning mechanism of this invention, it is a top view for demonstrating another example about the link mechanism which connects a stage and a 1st and 2nd actuator. It is a perspective view for demonstrating an example about the elastic spring mechanism with directivity shown in FIG. It is a top view of the base shown in FIG. It is a control block diagram for demonstrating the control method about the positioning mechanism of this invention. It is a top view for demonstrating the operation | movement about the positioning mechanism shown in FIG. Similarly, it is a top view for demonstrating the operation | movement to a X-axis direction about the positioning mechanism shown in FIG. Similarly, it is a top view for demonstrating the operation | movement to the Y-axis direction about the positioning mechanism shown in FIG. Similarly, it is a top view for demonstrating the operation | movement to a X-axis direction about the positioning mechanism shown in FIG. Similarly, it is a top view for demonstrating operation | movement to the X-axis direction about the positioning mechanism shown in FIG. In the positioning mechanism of this invention, it is a top view for demonstrating other embodiment of the link mechanism which connects a stage and a 1st and 2nd actuator. It is a top view for demonstrating the operation | movement to Ya1 axial direction about the positioning mechanism shown in FIG. It is a top view for demonstrating in detail the operation | movement to Ya1 axial direction about embodiment shown in FIG. Similarly, it is a top view for demonstrating in detail the operation | movement to Ya1 axial direction about embodiment shown in FIG. Similarly, it is a top view for demonstrating in detail the operation | movement to Ya1 axial direction about embodiment shown in FIG. Similarly, in the embodiment shown in FIG. 12, it is a diagram for explaining the target position error before the control operation when operating in the Ya1 axis direction. It is a top view for demonstrating the operation | movement to Xa1 axial direction about the positioning mechanism shown in FIG. It is a top view for demonstrating in detail the operation | movement to a Xa1 axial direction about embodiment shown in FIG. Similarly, it is a top view for demonstrating in detail the operation | movement to Xa1 axial direction about embodiment shown in FIG. Similarly, it is a top view for demonstrating in detail the operation | movement to Xa1 axial direction about embodiment shown in FIG. Similarly, in the embodiment shown in FIG. 12, it is a diagram for explaining the target position error before the control operation when operating in the Xa1-axis direction. It is a top view for demonstrating other embodiment which comprises the positioning mechanism of this invention only by the link mechanism which connects a stage and a 1st and 2nd actuator, and does not use an elastic support mechanism. It is a top view for demonstrating the operation | movement to a X-axis direction about the positioning mechanism shown in FIG. It is a top view for demonstrating the operation | movement to the Y-axis direction about the positioning mechanism shown in FIG. It is a top view for demonstrating other embodiment about the positioning mechanism of this invention. It is a top view for demonstrating other embodiment about the positioning mechanism of this invention. Another embodiment for mechanically connecting a stage manufactured separately for each element, a thrust transmission unit of the first actuator, and a thrust transmission unit of the second actuator via a link mechanism will be described. It is a top view (Y-axis side partial view).

Explanation of symbols

1: Positioning mechanism 2: Base 2a, 2b: L-shaped standing side surface portion of base 2 3: First actuator 4: Second actuator 5: Stages 5c1, 5c2, 5c3, 5c4: Four corners of stage 5 Part (corner)
5 s 1, 5 s 2, 5 s 3, 5 s 4: Four sides of the stage 5 and the outer surface formed by each side 6: First link mechanism 6 a, 6 b: Link member 6 a 1, 6 a 2, 6 b 1, 6 b 2: Elastic hinge portion 6 c, 6 d : Link member (beam)
7: 2nd link mechanism 7a, 7b: Link member 7a1, 7a2, 7b1, 7b2: Elastic hinge part 7c, 7d: Link member (beam)
8a, 8b, 8c, 8d: elastic spring mechanism 8c1: groove (notch)
9x, 9y: Position detection sensor 10x, 10y: Stacked piezoelectric element 11x, 11y: Support member 12x, 12y: Link beam part 13x, 13y: Movable element 14x, 14y: Link beam part 15x, 16x, 15y, 16y: Elasticity Hinge part 17x, 17y: Lever part 18: Screw hole 19a: Bolt 19b: Bolt hole 20: Bolt 21: Bolt hole 22: Nut 23: Bolt hole 24a, 24b: Flange part of link mechanism 25: Bolt 26: Bolt hole 27 : Screw hole 30: Control device 31x: X-axis drive circuit 31y: Y-axis drive circuit

Claims (18)

In a positioning mechanism that arbitrarily moves the stage in a plane constituted by the X axis and the Y axis orthogonal to each other, and positions the stage at a predetermined position at high speed and with high accuracy,
A first actuator that is fixed to the base and transmits the thrust generated by the thrust generating means in the X-axis direction via a thrust transmission unit;
Similarly, a second actuator for transmitting the thrust generated by the thrust generating means in the Y-axis direction via the thrust transmission unit,
A positioning mechanism, wherein the stage is connected to a thrust transmission part of the first actuator and a thrust transmission part of the second actuator via a link mechanism.   The positioning mechanism according to claim 1, wherein the stage is supported by the base via an elastic spring mechanism including one or a plurality of elastic bodies. The stage is
The link mechanism that transmits the thrust from the first actuator is transmitted to one of two adjacent sides orthogonal to the X axis and the Y axis, and the thrust from the second actuator is transmitted to the other side. The link mechanism is arranged,
The positioning mechanism according to claim 1, wherein four corners of the stage facing each other are supported by the base via the elastic spring mechanism. The stage is arranged on the base such that one of two diagonal lines connecting opposite corners is on the X-axis and the other is in the Y-axis direction. The link mechanism for transmitting the thrust from the first actuator to one of the corners, and the link mechanism for transmitting the thrust of the second actuator to the other corner. The positioning mechanism according to claim 1 or 2. The positioning mechanism according to claim 1, wherein the stage is supported by the base through the elastic spring mechanism, respectively, on four sides constituting two opposing sides.   5. The positioning mechanism according to claim 1, wherein the link mechanism includes a parallel link mechanism including link members arranged in parallel to each other. The positioning mechanism according to claim 6, wherein the link member is rotatably connected to the thrust transmission unit and the stage.   The positioning mechanism according to claim 6, wherein the link member is constituted by a member formed integrally with the thrust transmission unit and the stage.   The positioning mechanism according to claim 6, wherein the link member includes a member joined to the thrust transmission unit and the stage by a coupling unit.   The positioning according to any one of claims 2, 3, and 5, wherein the elastic spring mechanism is disposed in a predetermined direction with respect to the direction of the X axis or the Y axis. mechanism.   The positioning mechanism according to claim 10, wherein the predetermined direction is set to a direction of 45 ° with respect to the X axis and the Y axis.   The positioning mechanism according to claim 10, wherein the predetermined direction is set in parallel to the X axis or the Y axis.   The positioning mechanism according to claim 10, wherein the predetermined direction is set to an arbitrary angle with respect to the X axis or the Y axis.   The said 1st and 2nd actuator is provided with the said thrust generation means comprised from the mechanism which can move the generated displacement linearly, The claim 1, The claim 3, The claim 4 characterized by the above-mentioned. Positioning mechanism. The positioning mechanism according to claim 14, wherein the mechanism capable of linearly moving the generated displacement by the thrust generating means of the first and second actuators is composed of a laminated piezoelectric element. The positioning mechanism according to claim 15, wherein the thrust generation means of the first and second actuators configured by the multilayer piezoelectric element includes a mechanism that amplifies the generated displacement. The mechanism capable of linearly moving the generated displacement by the thrust generating means of the first and second actuators is configured by an electromagnetic actuator such as a voice coil motor or a linear motor. Positioning mechanism. The coupling means is any one of mechanical coupling means, adhesive coupling means, brazing coupling means, welding coupling means, friction pressure welding coupling means, diffusion bonding coupling means, and glass hermetic coupling means. The positioning mechanism according to claim 9, wherein the positioning mechanism is a coupling means.

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