CN106737597A - A kind of XYZ three-freedom degree precisions positioner - Google Patents
A kind of XYZ three-freedom degree precisions positioner Download PDFInfo
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- CN106737597A CN106737597A CN201710019564.3A CN201710019564A CN106737597A CN 106737597 A CN106737597 A CN 106737597A CN 201710019564 A CN201710019564 A CN 201710019564A CN 106737597 A CN106737597 A CN 106737597A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/08—Programme-controlled manipulators characterised by modular constructions
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
A kind of XYZ three-freedom degree precisions positioner, including XY moving bases and Z axis motion module, Z axis motion module are installed on XY moving bases；XY moving bases include substrate, and substrate is provided with gearshift and motion platform, and gearshift is provided with two groups, and gearshift is located at X-axis and Y-axis respectively；Gearshift is the compliant mechanism for being provided with piezoelectric ceramics；Gearshift includes lever left, right lever, input mounting blocks and output end mounting blocks；Substrate offers the first holding tank, gearshift is installed on the first holding tank, the lower end of lever left and right lever is articulated with the lower cell wall of the first holding tank by hinge, and the used hinge of the left lower of the lower right side of lever left and right lever is hinged with input mounting blocks；The left upper portion of the right upper portion of lever left and right lever is hinged with output end mounting blocks by straight beam type flexible hinge；Output end mounting blocks are installed by straight beam type flexible hinge with motion platform.
Description
Technical field
The present invention relates to nanometer technique field, and in particular to a kind of XYZ three-freedom degree precisions positioner.
Background technology
With science and technology growing, the continuous improvement of nanometer technology, in order to pursue the quality of life of quality, perhaps
It is multi-field that requirement higher is proposed to micro/nano level locating platform.Such as Ultra-precision Turning manufacturing industry, 3D printing, biological cell work
Journey, chip litho machine and lead sewing machine etc. have precision and dimension requirement higher to micro-nano platform.
Based on a kind of flexible mechanical position with grade stroke, nano-precision of the differential lever amplification principle design of three-level
Shift amplifier, current three-dimensional platform has the disadvantage that；Tri- directions of XYZ are in the presence of motion coupling, especially in acceleration high at a high speed
In the case of, substantially, complex structure assembling is difficult for Z-direction dancing.
The content of the invention
For drawbacks described above, it is an object of the invention to propose a kind of three-degree of freedom flexible hinge displacement amplifier, expand
Original operating space, more adapts to the demand such as micro-nano operation detection in reality.Meet high accuracy, big stroke, height in practice
Bandwidth and multivariant purpose.
It is that, up to this purpose, the present invention uses following technical scheme：
A kind of XYZ three-freedom degree precisions positioner, including XY moving bases and Z axis motion module, the Z axis move mould
Block is installed on the XY moving bases；
The XY moving bases include substrate, and the substrate is provided with gearshift and motion platform, institute's displacement apparatus
Two groups are provided with, institute's displacement apparatus are located at X-axis and Y-axis respectively；Institute's displacement apparatus are the compliant mechanism for being provided with piezoelectric ceramics E；
Institute's displacement apparatus include lever left, right lever, input mounting blocks and output end mounting blocks；The substrate is opened up
There is the first holding tank, institute's displacement apparatus are installed on first holding tank, the lower end of the lever left and right lever is by hinge
Chain is articulated with the lower cell wall of first holding tank, the used hinge of the left lower of the lower right side of the lever left and right lever
Chain is hinged with input mounting blocks；The left upper portion of the right upper portion of the lever left and right lever passes through straight beam type flexible hinge
Chain is hinged with the output end mounting blocks；The output end mounting blocks are pacified by straight beam type flexible hinge with the motion platform
Dress.
Further, the substrate offers the second holding tank, and the motion platform is arranged at second holding tank, institute
State four sides of motion platform by straight beam type flexible hinge respectively with input mounting blocks and be arranged at second receiving
The decoupling fixed block connection of groove cell wall；
The left side of second holding tank and rear side are respectively equipped with the first holding tank for being mounted with gearshift, described second
The preceding cell wall and right cell wall of holding tank are respectively equipped with the decoupling fixed block.
It is preferred that the decoupling fixed block includes fixed block and straight beam type flexible hinge, the fixed block both sides are by straight
Beam type flexible hinge is installed on the side wall of the corresponding inner side of second holding tank two in the fixed block both sides.
Further, the output end mounting blocks upper and bottom section is located at second holding tank and first and holds respectively
Receive groove, the upper part both sides of the output end mounting blocks are installed on the output end mounting blocks both sides by straight beam type flexible hinge
The side wall of the inner side of corresponding second holding tank two.
It is preferred that the Z axis motion module includes base and is vertically installed on the amplifying device arranged side by side of the base, it is described
At least provided with two groups, the central shaft of amplifying device arranged side by side described in two groups intersects amplifying device arranged side by side, is set in cross；
The amplifying device arranged side by side includes one-level enlarger and two grades of enlargers, and the one-level enlarger includes a left side
The lever of side first and the lever of the right first, room is provided between the lever of the left side first and the lever of the right first；The left side
The right side bottom surface of the first lever is articulated with the base, the left side bottom of the lever of described the right first by rounding straight beam type hinge
Face is articulated with the base by rounding straight beam type hinge；
The one-level enlarger also includes left side the first displacement conductive bar and the first displacement of right side conductive bar, the left side
First displacement conductive bar lower end is articulated with upper surface the right of the lever of the left side first, the displacement of the right side first by hinge
Conductive bar lower end is articulated with the upper surface left side of the lever of described the right first by hinge；
The one-level enlarger also includes input platform, and the input platform is in rectangular-shape, first, the left side
Move the upper end of conductive bar and the first displacement of right side conductive bar respectively by hinge be articulated with the input platform base the left side and
The right；
The base plate is provided with the piezoelectric ceramics, and the piezoelectric ceramics end is pushed against in the input platform lower surface.
Further, two grades of enlargers include left side second displacement conductive bar and right side second displacement conductive bar,
Two grades of enlargers also include left column and right column；
The left side second displacement conductive bar lower end is articulated with the left side the first lever upper surface left side, institute by hinge
The lower end for stating right side second displacement conductive bar is articulated with described the right the first lever upper surface the right by hinge；
Two grades of enlargers also include the lever of the left side second and the lever of the right second, the lever of the left side second and the right side
The horizontal setting of the lever of side second；The left side of the lever of the left side second is articulated with institute by rounding straight beam type hinge
Left column is stated, the upper end of the left side second displacement conductive bar is articulated with the thick stick of the left side second by rounding straight beam type hinge
The left side of bar bottom surface；The right side of the lever of described the right second is articulated with the right column, the right side second by hinge
The upper end for moving conductive bar is articulated with the right of the lever of described the right second by hinge；
Output end side chain, the upper surface of the lever of described the right second are provided with the right of the upper surface of the lever of the left side second
The left side is provided with output end side chain, and the bottom surface left side of the output end and the right are hingedly connected to the output end branch on the left side and the right
Chain.
It is preferred that two groups of left columns and two groups of right column tops are mutually supported by lateral connection post, the lateral connection
Post is interconnected to frame-shaped.
It is preferred that the hinge is circular arc flexible hinge, the second hinge is rounding straight beam type hinge
Gearshift employs structure for amplifying, will the small displacement of piezoelectric ceramics zoom into larger displacement, from
And make the direction of motion that there is bigger stroke；And axle motion module is arranged on moving base, that is, three-freedom degree precision positioning is constituted,
So as to meet the positioning requirements of the big stroke of multiple degrees of freedom simultaneously；Use two knots of decoupling fixed block and straight beam type flexible hinge
Structure, you can it is the input coupling phenomenon for existing in motion to solve moving base, so as to improve the transmitting accuracy of motion platform；Pass through
Straight beam type flexible hinge and straight beam type flexible hinge are connected in length and breadth, you can motion platform is had enough frees degree not in motion
Coupling is constituted, enough straight beam type flexible hinges are connected by fixed block, while ensureing the straight beam type flexible hinge being connected with each other
Chain has enough intensity；Using two groups of symmetrical expression structure for amplifying, and amplifying type structure is set in cross, so that device
More compact structure, more preferably, integral rigidity is bigger, and substantially eliminates coupling error for stability；Circular arc type flexible hinge has larger
Slewing area, and in the absence of mechanical friction, also with autokinesis advantage high and gapless, be adapted to tight fine motion and adjust
Whole, hinge is more convenient for being driven using circular arc type flexible hinge；The kinematic accuracy of straight beam type flexible hinge is higher, but movement travel is received
To very big limitation, the rotation of slight amplitude can only be realized.Most common form is and this elasticity around an axle elastic bending
Deformation is reversible, and when not applying active force, circular arc flexible hinge can reset rapidly.
Brief description of the drawings
Fig. 1 is the overall structure diagram of one embodiment of the present of invention；
Fig. 2 is the XY moving base structural representations of one embodiment of the present of invention；
Fig. 3 is the Z axis motion module sectional view of one embodiment of the present of invention；
Fig. 4 is the amplifying device structural representation arranged side by side of one embodiment of the present of invention；
Fig. 5 is the axle motion module oblique mining figure of one embodiment of the present of invention.
Wherein：XY moving bases 100, substrate 110, the first holding tank 120, the second holding tank 130, decoupling fixed block 140,
Z axis motion module 200, base 210, gearshift 300, lever left 310, right lever 320, input mounting blocks 330, output end
Mounting blocks 340, motion platform 400, amplifying device arranged side by side 500, one-level enlarger 510, the left side the first lever 511, the right
One lever 512, the first displacement of left side conductive bar 513, the first displacement of right side conductive bar 514, input 515, two grades of enlargers of platform
Structure 520, left side second displacement conductive bar 521, right side second displacement conductive bar 522, the second lever of the left side 523, the thick stick of the right second
Bar 524, left column 530, right column 540, hinge A, straight beam type flexible hinge B, rounding straight beam type hinge C, output end side chain
D, piezoelectric ceramics E.
Specific embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by specific embodiment.
As Figure 1-5, a kind of XYZ three-freedom degree precisions positioner, including XY moving bases 100 and Z axis motion mould
Block 200, the Z axis motion module 200 is installed on the XY moving bases 100；
The XY moving bases 100 include substrate 110, and the substrate 110 is provided with gearshift 300 and motion platform
400, institute's displacement apparatus 300 are provided with two groups, and institute's displacement apparatus 300 are located at X-axis and Y-axis respectively；Institute's displacement apparatus 300 are
It is provided with the compliant mechanism of piezoelectric ceramics E；
Institute's displacement apparatus 300 include lever left 310, right lever 320, input mounting blocks 330 and output end mounting blocks
340；The substrate 110 offers the first holding tank 120, and institute's displacement apparatus 300 are installed on first holding tank 120, institute
The lower end for stating lever left 310 and right lever 320 is articulated with the lower cell wall of first holding tank 120, the left thick stick by hinge A
The used hinge A of the left lower of the lower right side of bar 310 and right lever 320 is hinged with input mounting blocks 330；The left thick stick
The left upper portion of the right upper portion of bar 310 and right lever 320 is hinged with the output end and installs by straight beam type flexible hinge B
Block 340；The output end mounting blocks 340 are installed by straight beam type flexible hinge B with the motion platform 400.
XY moving bases 100, by the integrated setting of gearshift 300, make device globality more preferably by substrate, and phase
Do not allow in transmission to be also easy to produce deformation for such that it is able to lift displacement transmitted precision, gearshift 300 employs amplification
Structure, displacement that will be piezoelectric ceramics E small zooms into larger displacement, so that the XY directions of motion have bigger row
Journey；And Z axis motion module 200 is arranged on XY moving bases 100, that is, constitute three-freedom degree precision positioning such that it is able to while full
The positioning requirements of the sufficient big stroke of multiple degrees of freedom.
Wherein, the substrate 110 offers the second holding tank 130, and the motion platform 400 is arranged at described second and accommodates
Groove 130, four sides of the motion platform 400 by straight beam type flexible hinge B respectively with input mounting blocks 330 and set
Connected in the decoupling fixed block 140 of the cell wall of the second holding tank 130；
The left side of second holding tank 130 and rear side are respectively equipped with the first holding tank for being mounted with gearshift 300
120, the preceding cell wall and right cell wall of second holding tank 130 are respectively equipped with the decoupling fixed block 140.
By straight beam type flexible hinge B and input mounting blocks 330 and described the is arranged at around motion platform 400
The decoupling fixed block 140 of the cell wall of two holding tank 130 is connected, i.e., one end input displacement when, in addition two ends can also be affected so as to
It is subjected to displacement, uses decoupling fixed block 140 and straight beam type flexible hinge two structures of B, you can solves XY moving bases 100 in fortune
Dynamic is the input coupling phenomenon for existing, so as to improve the transmitting accuracy of motion platform 400.
Additionally, the decoupling fixed block 140 includes fixed block and straight beam type flexible hinge B, the fixed block both sides pass through
Straight beam type flexible hinge B is installed on the side wall of the both sides of the fixed block 140 130 liang of inner sides of corresponding second holding tank.
Because decoupling fixed block 140 has flexibility ratio higher, simplest mode is by straight beam type flexible hinge B here
Connected in length and breadth with straight beam type flexible hinge B, you can make motion platform 400 there are enough frees degree not constitute coupling in motion,
Enough straight beam type flexible hinge B are connected by fixed block, while ensureing that the straight beam type flexible hinge B being connected with each other has enough
Intensity.
Wherein, the upper and bottom section of output end mounting blocks 340 is located at second holding tank 130 and first respectively
Holding tank 120, the upper part both sides of the output end mounting blocks 340 are installed on the output end by straight beam type flexible hinge B
The side wall of the both sides of mounting blocks 340 130 liang of inner sides of corresponding second holding tank.
Make device make 400 4 end faces of motion platform that all there is the free degree higher using this structure, and then make motion
Four end faces of platform 400 all have the function of decoupling, so as to only be moved in the case of one in X-axis or Y-axis, other three ends
Face will not also constitute coupling, it is ensured that displacement transmitted accuracy.
Additionally, the Z axis motion module 200 includes base 210 and is vertically installed on the amplification arranged side by side dress of the base 210
500 are put, at least provided with two groups, the central shaft of amplifying device 500 arranged side by side described in two groups intersects the amplifying device arranged side by side 500, is in
Cross is set；
The amplifying device arranged side by side 500 includes one-level enlarger 510 and two grades of enlargers 520, and the one-level is amplified
Mechanism 510 includes the first lever of the left side 511 and the first lever of the right 512, the first lever of the left side 511 and the lever of the right first
Room is provided between 512；The right side bottom surface of the first lever of the left side 511 is articulated with described by rounding straight beam type hinge C
Base 210, the left side bottom surface of the first lever of described the right 512 is articulated with the base 210 by rounding straight beam type hinge C；
The one-level enlarger 510 also includes the first displacement of left side conductive bar 513 and the first displacement of right side conductive bar
514, the lower end of the first displacement of left side conductive bar 513 is right by the upper surface that hinge is articulated with the first lever of the left side 511
Side, the lower end of the first displacement of right side conductive bar 514 is left by the upper surface that hinge is articulated with the first lever of described the right 512
Side；
The one-level enlarger also includes input platform 515, and the input platform 515 is in rectangular-shape, the left side
The upper end of the first displacement conductive bar 513 and the first displacement of right side conductive bar 514 is articulated with the input platform by hinge A respectively
The left side and the right of 515 bottom surfaces；
The base plate is provided with the piezoelectric ceramics E, and the piezoelectric ceramics E ends are pushed against in the input following table of platform 515
Face.
One-level enlarger directly sends out the displacement for being exaggerated piezoelectric ceramics E, and the displacement of piezoelectric ceramics E will be input into platform
515 jack-up, so that being input into platform 515 drives the first displacement conductive bar 513 of left side and the first displacement of right side conductive bar 514, and then
Be exaggerated for displacement by the first lever of the left side 511 and the first lever of the right 512；The first lever of the subsequent left side 511 and the right
First lever 512 drives left side second displacement conductive bar 521 and right side second displacement conductive bar 522；Put using two groups of symmetrical expressions
Big structure, and amplifying type structure is set in cross so that the more compact structure of device, stability more preferably, integral rigidity
It is bigger, and substantially eliminate coupling error.
Used as the supplement to above-mentioned technology, two grades of enlargers 520 include left side second displacement conductive bar 521 and right
Side second displacement conductive bar 522, two grades of enlargers 520 also include left column 530 and right column 540；
The lower end of left side second displacement conductive bar 521 is articulated with the upper surface of the first lever of the left side 511 by hinge
The left side, the lower end of the right side second displacement conductive bar 522 is articulated with the upper surface of the first lever of described the right 512 by hinge A
The right；
Two grades of enlargers 520 also include the second lever of the left side 523 and the second lever of the right 524, the left side the
Two levers 523 and the horizontal setting of the second lever of the right 524；The left side of the second lever of the left side 523 passes through rounding
Angle straight beam type hinge C is articulated with the left column 530, and the upper end of the left side second displacement conductive bar 521 is straight by rounding
Beam type hinge C is articulated with the left side of the bottom surface of the second lever of the left side 523；The right side of the second lever of described the right 524 passes through
Hinge A is articulated with the right column 540, and the upper end of the right side second displacement conductive bar 522 is articulated with the right side by hinge A
The right of the second lever of side 524；
Output end side chain D, the second lever of described the right 524 are provided with the right of the upper surface of the second lever of the left side 523
The upper surface left side be provided with output end side chain D, the bottom surface left side of the output end and the right are hingedly connected to the left side and the right
Output end side chain D.
Left side second displacement conductive bar 521 and right side second displacement conductive bar 522 drive the second lever of the left side 523 and the right
After second lever 524, the second lever of the left side 523 and the second lever of the right 524 again amplify displacement, output is delivered to
End；One-level enlarger add two grades of enlargers, constitute two grades of symmetrical structure for amplifying, its more compact structure, integral rigidity is more
Greatly, and substantially eliminate coupling error, more adapt to the demand in reality.Meet the purpose of high-speed high-precision motion in practice.
Additionally, two groups of left columns 530 and two groups of tops of right column 540 are mutually supported by lateral connection post, the transverse direction
Connecting pole is interconnected to frame-shaped.
Frame like structure makes the more compact structure of device, and then makes the external support structure of device more reliable, in displacement transmission,
Avoid left column 530 and right column 540 to produce deformation as far as possible, displacement is accurately delivered to output end.
Additionally, the hinge A is circular arc flexible hinge, the second hinge B is rounding straight beam type hinge.
Circular arc type flexible hinge has larger slewing area, and in the absence of mechanical friction, it is also high with autokinesis
With gapless advantage, it is adapted to tight fine motion adjustment, hinge A is more convenient for being driven using circular arc type flexible hinge；Straight beam type is flexible
The kinematic accuracy of hinge is higher, but movement travel is very restricted, and can only realize the rotation of slight amplitude.Most common shape
Formula is that, around an axle elastic bending, and this elastic deformation is reversible, and when not applying active force, circular arc flexible hinge can
It is rapid to reset.
Know-why of the invention is described above in association with specific embodiment.These descriptions are intended merely to explain of the invention
Principle, and can not by any way be construed to limiting the scope of the invention.Based on explanation herein, the technology of this area
Personnel associate other specific embodiments of the invention by would not require any inventive effort, these modes fall within
Within protection scope of the present invention.
Claims (8)
1. a kind of XYZ three-freedom degree precisions positioner, it is characterised in that：It is described including XY moving bases and Z axis motion module
Z axis motion module is installed on the XY moving bases；
The XY moving bases include substrate, and the substrate is provided with gearshift and motion platform, and institute's displacement apparatus are provided with
Two groups, institute's displacement apparatus are located at X-axis and Y-axis respectively；Institute's displacement apparatus are the compliant mechanism for being provided with piezoelectric ceramics；
Institute's displacement apparatus include lever left, right lever, input mounting blocks and output end mounting blocks；The substrate offers
One holding tank, institute's displacement apparatus are installed on first holding tank, and the lower end of the lever left and right lever is cut with scissors by hinge
It is connected to the lower cell wall of first holding tank, the used hinge hinge of the left lower of the lower right side of the lever left and right lever
It is connected to input mounting blocks；The left upper portion of the right upper portion of the lever left and right lever is cut with scissors by straight beam type flexible hinge
It is connected to the output end mounting blocks；The output end mounting blocks are installed by straight beam type flexible hinge with the motion platform.
2. XYZ three-freedom degree precisions positioner according to claim 1, it is characterised in that：The substrate offers
Two holding tanks, the motion platform is arranged at second holding tank, and four sides of the motion platform are soft by straight beam type
Property hinge respectively with input mounting blocks and be arranged at the decoupling fixed block of the second holding tank cell wall and be connected；
The left side of second holding tank and rear side are respectively equipped with the first holding tank for being mounted with gearshift, and described second accommodates
The preceding cell wall and right cell wall of groove are respectively equipped with the decoupling fixed block.
3. XYZ three-freedom degree precisions positioner according to claim 2, it is characterised in that：The decoupling fixed block bag
Fixed block and straight beam type flexible hinge are included, the fixed block both sides are installed on the fixed block both sides by straight beam type flexible hinge
The side wall of the inner side of corresponding second holding tank two.
4. XYZ three-freedom degree precisions positioner according to claim 2, it is characterised in that：The output end mounting blocks
Upper and bottom section is located at second holding tank and the first holding tank, the upper part both sides of the output end mounting blocks respectively
The side wall of the corresponding inner side of second holding tank two in the output end mounting blocks both sides is installed on by straight beam type flexible hinge.
5. XYZ three-freedom degree precisions positioner according to claim 1, it is characterised in that：The Z axis motion module bag
Include base and be vertically installed on the amplifying device arranged side by side of the base, the amplifying device arranged side by side is at least provided with two groups, two groups of institutes
The central shaft for stating amplifying device arranged side by side intersects, and is set in cross；
The amplifying device arranged side by side includes one-level enlarger and two grades of enlargers, and the one-level enlarger includes the left side the
One lever and the lever of the right first, room is provided between the lever of the left side first and the lever of the right first；The left side first
The right side bottom surface of lever is articulated with the base by rounding straight beam type hinge, and the left side bottom surface of the lever of described the right first leads to
Cross rounding straight beam type hinge and be articulated with the base；
The one-level enlarger also includes left side the first displacement conductive bar and the first displacement of right side conductive bar, the left side first
Displacement conductive bar lower end is articulated with upper surface the right of the lever of the left side first, the displacement of the right side first conduction by hinge
Bar lower end is articulated with the upper surface left side of the lever of described the right first by hinge；
The one-level enlarger also includes input platform, and the input platform is in rectangular-shape, and the displacement of the left side first is passed
The upper end of guide rod and the first displacement of right side conductive bar is articulated with the left side and the right of the input platform base by hinge respectively；
The base plate is provided with the piezoelectric ceramics, and the piezoelectric ceramics end is pushed against in the input platform lower surface.
6. XYZ three-freedom degree precisions positioner according to claim 5, it is characterised in that：Two grades of enlargers
Including left side second displacement conductive bar and right side second displacement conductive bar, two grades of enlargers also include that left column and the right side are vertical
Post；
The left side second displacement conductive bar lower end is articulated with the left side the first lever upper surface left side, the right side by hinge
The lower end of side second displacement conductive bar is articulated with described the right the first lever upper surface the right by hinge；
Two grades of enlargers also include the lever of the left side second and the lever of the right second, the lever of the left side second and the right the
The horizontal setting of two levers；The left side of the lever of the left side second is articulated with the left side by rounding straight beam type hinge
Column, the upper end of the left side second displacement conductive bar is articulated with the left side the second lever bottom by rounding straight beam type hinge
The left side in face；The right side of the lever of described the right second is articulated with the right column by hinge, and the right side second displacement is passed
The upper end of guide rod is articulated with the right of the lever of described the right second by hinge；
Output end side chain, the upper surface left side of the lever of described the right second are provided with the right of the upper surface of the lever of the left side second
Output end side chain is provided with, the bottom surface left side of the output end and the right are hingedly connected to the output end side chain on the left side and the right.
7. XYZ three-freedom degree precisions positioner according to claim 7, it is characterised in that：Two groups of left columns and two groups
Right column top is mutually supported by lateral connection post, and the lateral connection post is interconnected to frame-shaped.
8. XYZ three-freedom degree precisions positioner according to claim 6, it is characterised in that：The hinge is circular arc
Flexible hinge, the second hinge is rounding straight beam type hinge.
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| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN109650327A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of plate type three-dimensional large-stroke nanometer operating platform |
| CN113404806A (en) * | 2021-07-07 | 2021-09-17 | 四川大学 | Active vibration damping device based on metamaterial |
| WO2024000776A1 (en) * | 2022-06-30 | 2024-01-04 | 北京华卓精科科技股份有限公司 | Positioning apparatus for loading and unloading and lithography device |
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| CN109502542A (en) * | 2018-10-23 | 2019-03-22 | 广东工业大学 | A kind of multi-degree-of-freedom nanometer locating platform based on compliant parallel mechanism |
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| CN109650327A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of plate type three-dimensional large-stroke nanometer operating platform |
| CN113404806A (en) * | 2021-07-07 | 2021-09-17 | 四川大学 | Active vibration damping device based on metamaterial |
| WO2024000776A1 (en) * | 2022-06-30 | 2024-01-04 | 北京华卓精科科技股份有限公司 | Positioning apparatus for loading and unloading and lithography device |
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