CN111546312B - Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism - Google Patents
Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism Download PDFInfo
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- CN111546312B CN111546312B CN202010333608.1A CN202010333608A CN111546312B CN 111546312 B CN111546312 B CN 111546312B CN 202010333608 A CN202010333608 A CN 202010333608A CN 111546312 B CN111546312 B CN 111546312B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 121
- 230000003321 amplification Effects 0.000 title claims abstract description 92
- 238000003199 nucleic acid amplification method Methods 0.000 title claims abstract description 92
- 238000006073 displacement reaction Methods 0.000 claims abstract description 77
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims 2
- 230000009471 action Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
- B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
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Abstract
The invention discloses a two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with a three-level amplification mechanism, which is formed by folding two groups of same three-level amplification mechanisms along a symmetry axis; the three-stage amplification mechanism comprises a lever displacement amplification mechanism I, a half-bridge type displacement amplification mechanism, a lever displacement amplification mechanism II, a parallelogram guide mechanism and a base body; the base body is positioned at the bottom, the lever displacement amplification mechanism II and the half-bridge type displacement amplification mechanism are vertically arranged above the base body from outside to inside in sequence, the top end of the half-bridge type displacement amplification mechanism is connected with the lever displacement amplification mechanism I, and the parallelogram guide mechanism is integrated in the lever displacement amplification mechanism II; a piezoelectric ceramic driver is arranged between the base body and the lever mechanism I, and the lever mechanism II is provided with an output end and an input end; the output end of the half-bridge type amplification mechanism is connected with the input end of the lever displacement amplification mechanism II through a connecting rod and a flexible hinge; and the output end of the lever displacement amplifying mechanism II is connected with the clamping jaw.
Description
Technical Field
The invention belongs to the field of micro-operation robots, and particularly relates to a two-degree-of-freedom folding and unfolding three-dimensional micro-manipulator with a three-level amplification mechanism.
Background
In recent years, with the rapid development of microelectronics, life sciences and micromanipulation robotics, micro-nano devices are more and more widely applied. The combination of micro-nano device manufacturing, testing and processing, precise operation and the like with other basic subjects is increasingly close, so that the micro-nano device becomes one of important advanced scientific technologies leading to scientific development and engineering application, and is widely concerned by a plurality of experts and scholars. The micro-manipulation technology has been widely applied in numerous fields such as bioengineering, micro-device bonding, optical device assembly and optical fiber butt joint.
The micro manipulator is used as an end effector of the micro operating system and is directly contacted with an operated object, and the precision and the stability of the micro manipulator have very important influence on the operation quality of the micro operating system. Most of traditional micro-manipulators have a two-dimensional plane structure, and only have one degree of freedom, so that only grabbing actions can be realized. When the planar structure micro-manipulator is combined with the micro-operation robot arm, devices such as a base and the like are needed, the clamping direction is generally vertical to the axis direction of the manipulator, the application range of the micro-operation robot is limited, and the difficulty of motion control of the manipulator is increased. In addition, in the field of complex micromanipulations, single degree of freedom micromanipulators are no longer suitable.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with a three-level amplifying mechanism, wherein the micro manipulator is of a three-dimensional structure, has small plane size, more degrees of freedom, compact structure, stable and reliable clamping force, is convenient to be connected with a mechanical arm of a micro-operation robot, can realize grabbing and twisting operation, has high motion precision, and can realize active release of tiny objects by using friction force generated by twisting motion without the help of an external mechanism.
The purpose of the invention is realized by the following technical scheme:
a two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplifying mechanisms is formed by folding two groups of same three-level amplifying mechanisms along a symmetry axis, and the plane where each group of three-level amplifying mechanisms is located forms a 90-degree included angle; the three-stage amplification mechanism comprises a lever displacement amplification mechanism I, a half-bridge type displacement amplification mechanism, a lever displacement amplification mechanism II, a parallelogram guide mechanism and a base body; the lever displacement amplification mechanism II and the half-bridge type displacement amplification mechanism are vertically arranged above the base body, the top end of the half-bridge type displacement amplification mechanism is connected with the lever displacement amplification mechanism I through a flexible hinge, and the parallelogram guide mechanism is integrated in the lever displacement amplification mechanism II;
a piezoelectric ceramic driver is arranged between the base body and the lever displacement amplification mechanism I, and is provided with a pre-tightening bolt which is connected to the base body; the lever displacement amplification mechanism II is provided with an output end and an input end; the output end of the half-bridge type amplification mechanism is connected with the input end of the lever displacement amplification mechanism II through a connecting rod and a flexible hinge; and the output end of the lever displacement amplification mechanism II is connected with the clamping jaw.
Further, the half-bridge type displacement amplification mechanism is a four-bar linkage mechanism, the four-bar linkage mechanism is composed of a first connecting bar, a second connecting bar and a third connecting bar which are sequentially connected through a flexible hinge from top to bottom, the outer side of the second connecting bar is connected with a fourth connecting bar through the flexible hinge, and the fourth connecting bar is the output end of the half-bridge type displacement amplification mechanism.
Furthermore, the micro mechanical arm is of a spatial three-dimensional structure.
Furthermore, a bolt mounting positioning hole is formed in the base body.
Furthermore, the clamping jaw can realize two-degree-of-freedom motion of clamping and twisting.
Furthermore, the base member is L shape, and the vertical section of the base member of every group tertiary mechanism of amplification becomes 90 contained angles and folds and the top links to each other with lever mechanism I, is equipped with lever displacement mechanism II of amplification and half bridge type displacement mechanism furtherly on the horizontal section of the base member of every group tertiary mechanism of amplification, the micro-mechanical hand structure adopts panel wire-electrode cutting integrated into one piece.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
1. the micro-manipulator adopts a folding and unfolding three-dimensional structure, is convenient to be connected with the manipulator of the micro-operation robot by using the connection mode of hands and arms, simplifies the motion path of the manipulator in the operation process, and can realize two-degree-of-freedom motion of grabbing and twisting.
2. After the related operation tasks are completed, the friction force generated by the twisting freedom degree can be utilized to realize the active release of the operated object. The piezoelectric ceramic driver is used as a driving source of the micro manipulator, so that the overall mass and the motion inertia of the micro manipulator can be obviously reduced.
3. The piezoelectric ceramic driver has the characteristics of small volume, high rigidity, high response speed, high displacement resolution and the like, and the piezoelectric ceramic driver is used for driving the micro-manipulator to complete the actions of grabbing, twisting and releasing, so that the static and dynamic characteristics of the micro-manipulator can be effectively improved. The piezoelectric ceramic driver is arranged inside the micro manipulator, so that the micro manipulator is compact in structure.
4. The micro-manipulator amplifies the output displacement of the piezoelectric ceramic driver by adopting a three-stage displacement amplification mechanism, so that two jaws of the micro-manipulator have larger output displacement, and stable clamping and twisting of objects with different sizes can be realized.
5. The micro mechanical arm body adopts an integrated structure, does not need expensive materials and has low manufacturing cost. The manipulator is suitable for the tail end of a micro-operation robot, can realize grabbing and twisting operations, can realize active release, and has stable and reliable clamping force and low manufacturing cost.
Drawings
FIG. 1 is a schematic three-dimensional structure of the present invention.
Fig. 2a and 2b are schematic front and side views of the left three-stage amplification mechanism in fig. 1.
FIG. 3 is a schematic view of a portion of the structure of the present invention, including a base and a parallelogram guide mechanism.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 to 3, a two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-stage amplification mechanisms is characterized in that a body structure of the micro manipulator is integrally formed by plate linear cutting and comprises two identical three-stage amplification mechanisms and two clamping jaws, the two three-stage amplification mechanisms are folded along a symmetry axis, two planes of the two three-stage amplification mechanisms form an included angle of 90 degrees, each three-stage amplification mechanism comprises a lever displacement amplification mechanism I2, a half-bridge type displacement amplification mechanism 3, a lever displacement amplification mechanism II 5, a parallelogram guide mechanism 9 and a base body 4, and the base body 4 is formed at the bottoms of the half-bridge type displacement amplification mechanism 3 and the lever displacement amplification mechanism II 5.
The lever displacement amplification mechanism I2 is connected with the base body 4 through a flexible hinge 2-2; the half-bridge type displacement amplification mechanism 3 is provided with a flexible hinge 3-1 which is connected with each rod piece in the base body 4, the lever displacement amplification mechanism I2 and the half-bridge type displacement amplification mechanism 3; the outer sides of the two half-bridge type displacement amplifying mechanisms 3 are respectively provided with an output end 3-2 connected with a lever displacement amplifying mechanism II 5; the parallelogram guide mechanism 9 is integrated in the lever displacement amplification mechanism II 5 and is formed by connecting flexible hinges 5-1, so that the guide function is realized, and the parasitic displacement is reduced; a piezoelectric ceramic driver 7 is arranged between the base body 4 and the input end 2-1 of the lever displacement amplification mechanism I2, a pre-tightening bolt 8 is arranged on the piezoelectric ceramic driver 7, the pre-tightening bolt 8 is connected to the base body 4, and a bolt mounting positioning hole is formed in the bottom of the base body 4.
The lever displacement amplification mechanism II 5 is provided with an output end 5-4 and an input end 5-3, and the lever displacement amplification mechanism II 5 is connected with the base body 4 through a flexible hinge 5-1; the input end 5-3 of the lever displacement amplification mechanism II 5 is connected with the output end 3-2 of the half-bridge type displacement amplification mechanism through a flexible hinge 5-2, and the output end 5-4 of the lever displacement amplification mechanism II 5 is connected with the clamping jaw 1 and the clamping jaw 6.
In the embodiment of the invention, a three-dimensional folding structure is adopted, more freedom degrees are realized by utilizing smaller plane structure size, the connection with the mechanical arm of the micro-operation robot is convenient, the connection mode of a hand and the arm is used for reference, the motion path of the mechanical arm in the operation process is simplified, and the clamping and twisting operation can be realized. After the related operation tasks are completed, the twisting freedom degree can be utilized to realize the active release of the operated object.
The specific working principle of the invention is as follows:
referring to fig. 1 to 3, when the micro manipulator of the present invention is used, the micro manipulator is fixed on the micro positioning platform through a bolt. When driving voltage is applied to two ends of a piezoelectric ceramic driver 7, the piezoelectric ceramic driver 7 extends to drive a lever displacement amplification mechanism I2 to rotate around a flexible hinge 2-2 and amplify output displacement of the piezoelectric ceramic driver 7, the lever displacement amplification mechanism I2 is connected with a half-bridge type displacement amplification rod mechanism 3 through a flexible hinge 3-1, the half-bridge type displacement amplification mechanism 3 further amplifies output displacement of the piezoelectric ceramic driver 7, the output displacement is transmitted to an input end 5-3 of a lever displacement amplification mechanism II 5 through an output end 3-2 of the half-bridge type mechanism to drive the lever displacement amplification mechanism II 5 to move, and output ends 5-4 of the lever displacement amplification mechanism II 5 drive clamping jaws 1 and 6 to move to realize clamping and twisting object operation. When the driving voltage at the two ends of the piezoelectric ceramic driver 7 is removed, the piezoelectric ceramic driver 7 is recovered to the original length, the micro mechanical arm returns to the original position under the action of the elastic force of the flexible hinge, and the clamping jaws 1 and 6 are opened to release the clamped object. The pretightening force of the piezoelectric ceramic driver 7 can be changed by adjusting the pretightening bolt 8, and the distance between the clamping jaws 1 and 6 can be adjusted to meet the requirements of clamping objects with different sizes.
The present invention is not limited to the above-described embodiments. The foregoing description of the specific embodiments is intended to describe and illustrate the technical solutions of the present invention, and the above specific embodiments are merely illustrative and not restrictive. Those skilled in the art can make many changes and modifications to the invention without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (7)
1. A two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplifying mechanisms is characterized by being formed by folding two groups of same three-level amplifying mechanisms along a symmetry axis, wherein the plane where each group of three-level amplifying mechanisms is located forms an included angle of 90 degrees; the three-stage amplification mechanism comprises a lever displacement amplification mechanism I, a half-bridge type displacement amplification mechanism, a lever displacement amplification mechanism II, a parallelogram guide mechanism and a base body; the lever displacement amplification mechanism II and the half-bridge type displacement amplification mechanism are vertically arranged above the base body, the top end of the half-bridge type displacement amplification mechanism is connected with the lever displacement amplification mechanism I through a flexible hinge, and the parallelogram guide mechanism is integrated in the lever displacement amplification mechanism II;
a piezoelectric ceramic driver is arranged between the substrate and the input end of the lever displacement amplification mechanism I, and is provided with a pre-tightening bolt which is connected to the substrate; the lever displacement amplification mechanism II is provided with an output end and an input end; the output end of the half-bridge type displacement amplification mechanism is connected with the input end of the lever displacement amplification mechanism II through a connecting rod and a flexible hinge; and the output end of the lever displacement amplification mechanism II is connected with the clamping jaw.
2. The two-degree-of-freedom folding and unfolding three-dimensional manipulator with the three-stage amplification mechanism according to claim 1, wherein the half-bridge type displacement amplification mechanism is a four-bar linkage mechanism, the four-bar linkage mechanism is composed of a first connecting bar, a second connecting bar and a third connecting bar which are sequentially connected through flexible hinges from top to bottom, a fourth connecting bar is connected to the outer side of the second connecting bar through the flexible hinges, and the fourth connecting bar is an output end of the half-bridge type displacement amplification mechanism.
3. The two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with the three-stage amplification mechanism according to claim 1, wherein the micro manipulator is of a spatial three-dimensional structure.
4. The two-degree-of-freedom folded and unfolded three-dimensional micro manipulator with the three-stage amplification mechanism as claimed in claim 1, wherein the base body is provided with bolt mounting positioning holes.
5. The two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with the three-stage amplification mechanism as claimed in claim 1, wherein the clamping jaw can realize two-degree-of-freedom motion of clamping and twisting.
6. The two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with the three-stage amplification mechanisms as claimed in claim 1 or 4, wherein the base body is L-shaped, the vertical section of the base body of each group of three-stage amplification mechanisms is folded at an included angle of 90 degrees, the top of the base body is connected with the lever displacement amplification mechanism I, and the horizontal section of the base body of each group of three-stage amplification mechanisms is provided with the lever displacement amplification mechanism II and a half-bridge type displacement amplification mechanism.
7. The two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with the three-stage amplification mechanism according to claim 1, wherein the micro manipulator structure is integrally formed by adopting plate linear cutting.
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| CN112953295B (en) * | 2021-02-07 | 2022-10-18 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| CN113726217B (en) * | 2021-09-07 | 2024-04-19 | 河南理工大学 | Two-dimensional large-stroke high-load decoupling deflection device |
| CN113829248B (en) * | 2021-10-30 | 2023-07-18 | 重庆大学 | Piezoelectric flexible micro-clamp with thin plate structure |
| CN114227559B (en) * | 2022-01-10 | 2022-10-18 | 山东大学 | Piezoelectric driving micro clamp with three-stage displacement amplification and capable of realizing parallel clamping |
| CN114058474A (en) * | 2022-01-12 | 2022-02-18 | 季华实验室 | Micro-clamping device |
| CN114454143B (en) * | 2022-02-11 | 2023-08-25 | 宁波大学 | Parallel two-degree-of-freedom motion platform |
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