CN107457765A - A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device - Google Patents
A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device Download PDFInfo
- Publication number
- CN107457765A CN107457765A CN201710712289.3A CN201710712289A CN107457765A CN 107457765 A CN107457765 A CN 107457765A CN 201710712289 A CN201710712289 A CN 201710712289A CN 107457765 A CN107457765 A CN 107457765A
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- China
- Prior art keywords
- leverage
- bridge type
- matrix
- clamping device
- enlarger
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
Abstract
The invention discloses a kind of driving type piezoelectric actuator three-level displacement equations micro clamping device, including matrix I, piezoelectric ceramic actuator, bridge type enlarger, matrix II, two leverages I, two leverage II and pretension bolt；Piezoelectric ceramic actuator is arranged in the bridge type enlarger by pretension bolt, bridge type enlarger includes the crossbeam positioned at piezoelectric ceramic actuator both sides and symmetrically arranged two bridge type flexure hinge mechanisms and two bridge type flexure hinge mechanisms of connection, bridge type flexure hinge mechanism is respectively made up of flexible hinge and three connecting rods, is connected on the downside of bridge type enlarger with matrix I；Leverage I is made up of flexible hinge and a rigid rod, and two leverage I are connected by the flexible hinge of downside with the left and right sides of the bridge type enlarger respectively；Leverage II is made up of flexible hinge, a rigid rod and jaw.The present invention has larger displacement multiplication factor, can realize three-level function of displacement amplification.
Description
Technical field
The invention belongs to micro-nano field operation, and in particular to one kind is directly driven by piezoelectric ceramic actuator, has three-level
The flexible micro clamping device of displacement equations.
Background technology
In recent years, flourishing with microelectric technique, the micro-nano for the purpose of processing micron/nanometer mechanism and system
Technology is arisen at the historic moment, so as to cause microelectromechanical systems (MEMS) appearance.MEMS technology is cured to advanced manufacturing technology, biology
Many fields such as, Aero-Space, national defence and people's lives generate important influence, are most with prospects to grind 21 century
Study carefully one of field and leading industry.With the development of MEMS technology, there is the microdevice of difference in functionality to need to be assembled together
MEMS system is formed, this just needs to use microoperation technology, while microoperation technology is also the pass that MEMS technology realizes industrialization
Key link, thus it is also just increasingly urgent to the demand of microoperation technology.
Micro assemby and microoperation refer to be assembled into multiple micro parts more complicated MEMS, and micro clamping device exists
Directly with clamping object contact during microoperation and micro assemby, it is micro- as typical end in microoperation and microassembly system
Actuator, its performance quality directly affect operation quality, play the role of to microoperation and the realization of micro assemby task important.
Traditional micro clamping device is mainly using the type of drive such as magnetic valve, voice coil motor, linear electric motors, these type of drive
Selection influence the compactedness of micro clamping device mechanical structure, may cause that wire clamp folding is unstable, clamping force is non-constant, limit
The raising of wire clamp kinematic accuracy and package quality.Magnetostrictor used also as micro clamping device driver, but such wire clamp drive
Dynamic and control system is more complicated.Existing micro clamping device uses piezoelectric ceramic actuator mostly, but defeated due to piezoelectric ceramics
Go out that displacement is smaller, compliant mechanism of the design with larger multiplication factor is most important.Existing most of piezoelectric type micro clamping device
It is generally possible to realize one-level, two-stage displacement equations, therefore designs the micro- folder of multistage displacement equations with larger displacement multiplication factor
Holder is most important.
The content of the invention
The present invention provides a kind of driving type piezoelectric actuator three-level displacement equations to solve technical problem present in known technology
Micro clamping device, the micro clamping device small volume, compact-sized, manufacturing cost is low, has larger displacement multiplication factor, can realize three
Level function of displacement amplification.
The purpose of the present invention is achieved through the following technical solutions：
A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device, including matrix I, piezoelectric ceramic actuator, bridge type amplification
Mechanism, matrix II, two leverages I, two leverage II and pretension bolt；
The piezoelectric ceramic actuator is arranged in the bridge type enlarger by the pretension bolt, and the bridge type is put
Great institutions are included positioned at the piezoelectric ceramic actuator both sides and symmetrically arranged two bridge type flexure hinge mechanisms and connection two
The crossbeam of individual bridge type flexure hinge mechanism, the bridge type flexure hinge mechanism is respectively made up of flexible hinge and three connecting rods, described
It is connected on the downside of bridge type enlarger with matrix I；The leverage I is made up of flexible hinge and a rigid rod, described in two
Leverage I is connected by the flexible hinge of downside with the left and right sides of the bridge type enlarger respectively, two levers
Flexible hinge in the middle part of mechanism I is connected with matrix I；
The leverage II is made up of flexible hinge, a rigid rod and jaw, two leverage II difference
It is connected with the leverage I of homonymy by flexible hinge, the bottom of the leverage II is connected by flexible hinge and matrix II
Connect；Described matrix I is provided with four mounting holes, and described matrix II is provided with a mounting hole.
Micro clamping device is along the symmetrical structure of piezoelectric ceramic actuator longitudinal axis, for realizing that Thermal Error is mended
Repay, reduce the error caused by micro clamping device uneven heating.
Described matrix I, matrix II, the structure that bridge type enlarger, leverage I and leverage II are formed in one.
The bridge type flexure hinge mechanism, leverage I and leverage II are respectively equipped with four, three and two flexibilities
Hinge.
Two leverage II are connected with the leverage I of homonymy by two flexible hinges respectively.
Compared with prior art, beneficial effect caused by technical scheme is：
Using type of drive of the piezoelectric ceramic actuator as micro clamping device, micro clamping device total quality can be substantially reduced
And movement inertia.Other piezoelectric ceramic actuator has the characteristics that small volume, rigidity height, fast response time, displacement resolution are high,
Two-arm folding is driven using piezoelectric ceramic actuator, the Static and dynamic performance of micro clamping device system can be effectively improved.Using bridge type
Enlarger, leverage I and leverage II realize three-level displacement amplifying mechanism, micro clamping device is had larger opening and closing
Amount, realizes the stable holding to different size objects.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the overlooking the structure diagram of the present invention；
Fig. 3 is the structural representation of bridge type enlarger.
Embodiment
In order to further understand the content, features and effects of the present invention, hereby enumerating following examples, and coordinate accompanying drawing
Describe in detail as follows：
Fig. 1~Fig. 3 is referred to, the embodiment of the present invention protects a kind of driving type piezoelectric actuator three-level displacement equations micro clamping device, bag
Include matrix I1, piezoelectric ceramic actuator 2, bridge type enlarger 3, matrix II4, two leverage I5, two leverages
II6, pretension bolt 7.
Piezoelectric ceramic actuator 2 is arranged in bridge type enlarger 3 by pretension bolt 7, and bridge type enlarger 3 includes position
In the both sides of piezoelectric ceramic actuator 2 and symmetrically arranged two bridge type flexure hinge mechanism A and two bridge type flexible hinges of connection
Mechanism A crossbeam 3-8, bridge type flexure hinge mechanism A respectively by four flexible hinges 3-1,3-3,3-5,3-7 and three connecting rod 3-2,
3-4,3-6 are formed, and the downside of bridge type enlarger 3 is connected with matrix I1, and leverage I6 is by three flexible hinges 6-1,6-2,6-4
Formed with a rigid rod 6-3, two leverage I6 pass through downside flexible hinge 6-1 and bridge type enlarger 3 left side respectively
Right both sides connection, two leverage I6 are connected by middle part flexible hinge 6-2 with matrix I1 respectively.
Leverage II5 is made up of two flexible hinges 5-1,5-2, a rigid rod 5-3 and jaw 5-4, two Lever machines
Respectively with homonymy leverage I6 by two flexible hinge 5-2,6-4 connections, leverage II5 bottom passes through soft structure II5
Property hinge 5-1 is connected with matrix II4, and leverage II4 top is provided with jaw 5-4.Matrix I1 is provided with four mounting hole 1-
1,1-2,1-3,1-4, matrix II4 are provided with a mounting hole 4-1.In order to avoid piezoelectric ceramic actuator 2 bear it is unnecessary
Shearing and moment of flexure, the present embodiment micro clamping device are designed to along the longitudinal axis bilateral symmetry of piezoelectric ceramic actuator 2, are answered
Heat error compensation can be realized with symmetrical structure, reduces the error caused by micro clamping device uneven heating.
In the present embodiment, in order to ensure the precision of micro clamping device, matrix I1, matrix II4, bridge type enlarger 3, lever
Mechanism I6 and leverage II5 are formed in one.
The operation principle of the present invention is as follows：
When the both ends of piezoelectric ceramic actuator 2 apply driving voltage, piezoelectric ceramic actuator 2 will extend and promote bridge type to put
The output micro-displacement of piezoelectric ceramic actuator 2 is amplified by the crossbeam 3-8 in great institutions 3, bridge type flexure hinge mechanism A,
And vertical direction displacement is converted into the opposite horizontal direction displacement of both direction, so as to pull flexible hinge 6-1, drives thick stick
Linkage I6 is moved, and leverage I6 is swung around flexible hinge 6-2, and leverage II5 is driven by flexible hinge 6-4 and 5-2,
Leverage II5 is swung around flexible hinge 5-1, the 5-4 motions of band movable clamp port, realizes jaw 5-4 closures with grip objects.When removing
After the driving voltage at the both ends of piezoelectric ceramic actuator 2, piezoelectric ceramic actuator 2 will then revert to former length, and micro clamping device is in flexible hinge
Original position is returned in the presence of chain elastic force, jaw 5-4 is opened so as to discharge held object.Changed by adjusting pretension bolt 7
Become the pretightning force of piezoelectric ceramic actuator 2, be capable of adjusting jaw 5-4 spacing, to meet to clamp the needs of different size objects.
The present invention is not limited to embodiments described above.The description to embodiment is intended to describe and said above
Bright technical scheme, above-mentioned embodiment is only schematical, is not restricted.This is not being departed from
In the case of invention objective and scope of the claimed protection, one of ordinary skill in the art may be used also under the enlightenment of the present invention
The specific conversion of many forms is made, these are belonged within protection scope of the present invention.
Claims (5)
- A kind of 1. driving type piezoelectric actuator three-level displacement equations micro clamping device, it is characterised in that including matrix I, piezoelectric ceramic actuator, Bridge type enlarger, matrix II, two leverages I, two leverage II and pretension bolt；The piezoelectric ceramic actuator is arranged in the bridge type enlarger by the pretension bolt, the bridge type enlarger Structure is included positioned at the piezoelectric ceramic actuator both sides and symmetrically arranged two bridge type flexure hinge mechanisms and two bridges of connection The crossbeam of type flexure hinge mechanism, the bridge type flexure hinge mechanism are respectively made up of flexible hinge and three connecting rods, the bridge type It is connected on the downside of enlarger with matrix I；The leverage I is made up of flexible hinge and a rigid rod, two levers Mechanism I is connected by the flexible hinge of downside with the left and right sides of the bridge type enlarger respectively, two leverage I The flexible hinge at middle part is connected with matrix I；The leverage II is made up of flexible hinge, a rigid rod and jaw, two leverage II respectively with together The leverage I of side is connected by flexible hinge, and the bottom of the leverage II is connected by flexible hinge with matrix II；Institute State matrix I and be provided with four mounting holes, described matrix II is provided with a mounting hole.
- A kind of 2. driving type piezoelectric actuator three-level displacement equations micro clamping device according to claim 1, it is characterised in that micro clamping device Along the symmetrical structure of piezoelectric ceramic actuator longitudinal axis, for realizing heat error compensation, to reduce due to micro- folder Error caused by holder uneven heating.
- A kind of 3. driving type piezoelectric actuator three-level displacement equations micro clamping device according to claim 1, it is characterised in that described matrix I, matrix II, the structure that bridge type enlarger, leverage I and leverage II are formed in one.
- A kind of 4. driving type piezoelectric actuator three-level displacement equations micro clamping device according to claim 1, it is characterised in that the bridge type Flexure hinge mechanism, leverage I and leverage II are respectively equipped with four, three and two flexible hinges.
- 5. according to a kind of driving type piezoelectric actuator three-level displacement equations micro clamping device of claim 1 or 4, it is characterised in that two The leverage II is connected with the leverage I of homonymy by two flexible hinges respectively.
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| CN201710712289.3A CN107457765A (en) | 2017-08-18 | 2017-08-18 | A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device |
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| CN201710712289.3A CN107457765A (en) | 2017-08-18 | 2017-08-18 | A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device |
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Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108312086A (en) * | 2017-12-21 | 2018-07-24 | 宁波大学 | The adjustable multiple degrees of freedom flexible micro clamping device of constant force |
| CN108406738A (en) * | 2018-02-27 | 2018-08-17 | 天津大学 | A kind of two degrees of freedom micro clamping device |
| CN109317778A (en) * | 2018-11-01 | 2019-02-12 | 深圳市德沃先进自动化有限公司 | A kind of high speed wire-clamping device based on bonding equipment |
| CN109650327A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of plate type three-dimensional large-stroke nanometer operating platform |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN109909976A (en) * | 2019-03-18 | 2019-06-21 | 天津大学 | Symmetrical space multistory mechanical arm with three-level motion amplification mechanism |
| CN110014447A (en) * | 2019-05-13 | 2019-07-16 | 东华大学 | A kind of submissive micro-clamp of space four paws |
| CN110137108A (en) * | 2019-05-15 | 2019-08-16 | 北京派和科技股份有限公司 | A kind of piezoelectricity thimble system of symmetrical structure layout |
| CN110143278A (en) * | 2018-10-09 | 2019-08-20 | 宁波大学 | The bionic flapping-wing machine people of flexible piezoelectric fiber driving |
| CN110900565A (en) * | 2019-11-28 | 2020-03-24 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Piezoelectric micro-twisting clamping forceps based on flexible hinge amplification |
| CN111015625A (en) * | 2019-12-31 | 2020-04-17 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro gripper with twisting function and control method |
| CN111299996A (en) * | 2020-03-10 | 2020-06-19 | 重庆大学 | Micro-clamping robot |
| CN111546312A (en) * | 2020-04-24 | 2020-08-18 | 天津大学 | Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism |
| CN111571621A (en) * | 2020-05-11 | 2020-08-25 | 宁波大学 | Structure-integrated clamp finger translation type compliant mechanism piezoelectric micro clamp |
| CN112476407A (en) * | 2020-12-15 | 2021-03-12 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on 3D printing micro-channel |
| CN112476406A (en) * | 2020-12-15 | 2021-03-12 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device with clamping and drawing functions and method |
| CN112545582A (en) * | 2020-12-15 | 2021-03-26 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-nano operation device and method with expansion function |
| CN112659096A (en) * | 2020-12-15 | 2021-04-16 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Dual-drive micro-nano operation device and method with clamping and drawing functions |
| CN112688590A (en) * | 2020-12-16 | 2021-04-20 | 大连理工大学 | Adjustable three-stage displacement amplification micro-gripper |
| CN112953295A (en) * | 2021-02-07 | 2021-06-11 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| WO2023142562A1 (en) * | 2022-01-27 | 2023-08-03 | 华南理工大学 | Adaptive compliant assembly mechanism for cross-scale micro-parts |
| CN112476407B (en) * | 2020-12-15 | 2024-04-19 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on 3D printing micro-channel |
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Cited By (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108312086A (en) * | 2017-12-21 | 2018-07-24 | 宁波大学 | The adjustable multiple degrees of freedom flexible micro clamping device of constant force |
| CN108406738B (en) * | 2018-02-27 | 2020-11-20 | 天津大学 | Two-degree-of-freedom micro-gripper |
| CN108406738A (en) * | 2018-02-27 | 2018-08-17 | 天津大学 | A kind of two degrees of freedom micro clamping device |
| CN110143278A (en) * | 2018-10-09 | 2019-08-20 | 宁波大学 | The bionic flapping-wing machine people of flexible piezoelectric fiber driving |
| CN110143278B (en) * | 2018-10-09 | 2022-03-15 | 宁波大学 | Bionic flapping wing robot driven by flexible piezoelectric fibers |
| CN109317778A (en) * | 2018-11-01 | 2019-02-12 | 深圳市德沃先进自动化有限公司 | A kind of high speed wire-clamping device based on bonding equipment |
| CN109650327A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of plate type three-dimensional large-stroke nanometer operating platform |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN109909976A (en) * | 2019-03-18 | 2019-06-21 | 天津大学 | Symmetrical space multistory mechanical arm with three-level motion amplification mechanism |
| CN109909976B (en) * | 2019-03-18 | 2021-12-24 | 天津大学 | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism |
| CN110014447A (en) * | 2019-05-13 | 2019-07-16 | 东华大学 | A kind of submissive micro-clamp of space four paws |
| CN110137108A (en) * | 2019-05-15 | 2019-08-16 | 北京派和科技股份有限公司 | A kind of piezoelectricity thimble system of symmetrical structure layout |
| CN110900565A (en) * | 2019-11-28 | 2020-03-24 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Piezoelectric micro-twisting clamping forceps based on flexible hinge amplification |
| CN111015625A (en) * | 2019-12-31 | 2020-04-17 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro gripper with twisting function and control method |
| CN111299996A (en) * | 2020-03-10 | 2020-06-19 | 重庆大学 | Micro-clamping robot |
| CN111299996B (en) * | 2020-03-10 | 2021-12-21 | 重庆大学 | Micro-clamping robot |
| CN111546312B (en) * | 2020-04-24 | 2022-07-01 | 天津大学 | Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism |
| CN111546312A (en) * | 2020-04-24 | 2020-08-18 | 天津大学 | Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism |
| CN111571621B (en) * | 2020-05-11 | 2021-09-03 | 宁波大学 | Structure-integrated clamp finger translation type compliant mechanism piezoelectric micro clamp |
| CN111571621A (en) * | 2020-05-11 | 2020-08-25 | 宁波大学 | Structure-integrated clamp finger translation type compliant mechanism piezoelectric micro clamp |
| CN112476406A (en) * | 2020-12-15 | 2021-03-12 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device with clamping and drawing functions and method |
| CN112659096A (en) * | 2020-12-15 | 2021-04-16 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Dual-drive micro-nano operation device and method with clamping and drawing functions |
| CN112545582A (en) * | 2020-12-15 | 2021-03-26 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-nano operation device and method with expansion function |
| CN112476407A (en) * | 2020-12-15 | 2021-03-12 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on 3D printing micro-channel |
| CN112476407B (en) * | 2020-12-15 | 2024-04-19 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on 3D printing micro-channel |
| CN112688590A (en) * | 2020-12-16 | 2021-04-20 | 大连理工大学 | Adjustable three-stage displacement amplification micro-gripper |
| CN112953295A (en) * | 2021-02-07 | 2021-06-11 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| CN112953295B (en) * | 2021-02-07 | 2022-10-18 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| WO2023142562A1 (en) * | 2022-01-27 | 2023-08-03 | 华南理工大学 | Adaptive compliant assembly mechanism for cross-scale micro-parts |
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