CN202696501U - Micro/nano-scale bionic rotation driving device - Google Patents

Micro/nano-scale bionic rotation driving device Download PDF

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Publication number
CN202696501U
CN202696501U CN 201220317837 CN201220317837U CN202696501U CN 202696501 U CN202696501 U CN 202696501U CN 201220317837 CN201220317837 CN 201220317837 CN 201220317837 U CN201220317837 U CN 201220317837U CN 202696501 U CN202696501 U CN 202696501U
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China
Prior art keywords
micro
driving device
piezoelectric stack
drive
stator
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Expired - Lifetime
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CN 201220317837
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Chinese (zh)
Inventor
赵宏伟
李建平
任露泉
傅璐
曲涵
黄虎
史成利
白美林
刘丕新
张攀峰
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Jilin University
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Jilin University
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Priority to CN 201220317837 priority Critical patent/CN202696501U/en
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Abstract

The utility model relates to a micro/nano-scale bionic rotation driving device, which belongs to field of precision and ultraprecision machining. The micro/nano-scale bionic rotation driving device is mainly composed of a stator and a rotor, wherein a drive piezoelectric stack is packaged in the stator; and the rotor is a variable interface shaft. The micro/nano-scale bionic rotation driving device can realize the stepwise ultraprecision rotation movement of the rotor around a fixed shaft by using a high-precision piezoelectric driver to drive a level amplification flexible hinge structure to perform related clamping operation and by controlling the clamping sequence of a piezoelectric clamping mechanism in the stator. The micro/nano-scale bionic rotation driving device provided by the utility model can be used in the fields of high-precision driving and processing, and has the advantages of less investment, low cost, quick effectiveness, high benefit and so on. The utility model is a piezoelectric single-degree-of-freedom precision rotation driver capable of improving the system micro-precision and reducing the structure size, and capable of realizing ultraprecision stepwise rotation movement around a determined direction.

Description

The bionical rotating driving device of micro/nano level
Technical field
The utility model relates to precision, ultraprecise manufacture field, particularly the bionical rotating driving device of a kind of micro/nano level.Can be used for precision finishing machine, the micro-electro-mechanical systems fields such as robot that unify.
Background technology
Development along with modern science and technology, human research field expands to microcosmos, the fast development of microelectronics, life science, medical and health, biochemistry, semiconductor, optics, data storage, ultraprecise machinery and the subjects such as manufacturing and accurate measurement thereof, people have increasing demand to the precision positioning technology of micro/nano level and the accurate Driving technique of micro/nano level.Traditional macroscopical large scale drive unit can not satisfy its required precision.Therefore, the novel high-precision drive unit that performance is more superior just seems especially important.Because piezoelectric actuator has that frequency response is high, volume is little, displacement resolution is high, heating less, noiseless, High power output, conversion efficiency advantages of higher, more and more be applied in precision positioning and the Precision Machining so piezoelectric ceramic is the next-generation drive of drive source.Drive unit in the past often exists that physical dimension is bigger than normal, stepping accuracy is low, come and go repetitive positioning accuracy low, be difficult to the shortcoming such as processing.Therefore, a kind of positioning accuracy and repetitive positioning accuracy are all higher, and the microminiature precision driver of exporting of can realizing rotatablely moving is necessary.
Summary of the invention
The purpose of this utility model is to provide a kind of micro/nano level bionical rotating driving device, has solved the problems referred to above that prior art exists.The utlity model has the characteristics that clamp is stable, load output is larger, and can realize large stroke motion, the biomimetic micro-nano level rotating driving device of the functions such as output that rotatablely move.The utility model promotes to drive flexible hinge and clamp flexible hinge by the piezoelectric stack that encapsulates in the stator, makes it to realize that by certain sequential motion output shaft is around the rotation step motion of central shaft.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
The bionical rotating driving device of micro/nano level comprises stator 2 and rotor 4, and the output of described rotor 4 has link screwed hole, the centre bore of described stator 2 and rotor 4 interference fits; The inside of described stator 2 is packaged with and drives piezoelectric stack I, II 1,5 and clamp piezoelectric stack I, II 3,6; Wherein drive piezoelectric stack I 1 and drive the drive amplification mechanism that piezoelectric stack II 5 is respectively applied to drive encapsulation in the stator 2; Clamp piezoelectric stack I 3 and clamp piezoelectric stack II 6 are respectively applied to drive the straight-line flexible hinge of encapsulation in the stator 2.
Described rotor 4 is without winding structure.
Described rotor 4 is the rotating shaft of type variable interface.
Described driving piezoelectric stack I, II 1,5 and clamp piezoelectric stack I, II 3,6 all adopt the piezoelectric element PZT of body controllable face type, its motion is to realize by the sequencing control to piezoelectric ceramic control voltage.
The rotation of described rotor 4 and stop to realize by the clamping action of thin shelf flexible hinge.
Drive amplification mechanism in the described stator 2 is two-stage lever amplification flexible hinge.
The beneficial effects of the utility model are: novel structure, simple, and volume is little; Have that load output is large, the stable characteristics of clamp, and can realize large stroke motion, the function such as the output that rotatablely moves; Can be applied to precision finishing machine, MEMS (micro electro mechanical system) and robot field, improve system's fine motion precision, reduced physical dimension; Can greatly improve simultaneously the driving precision of generic drive, reduce complexity and the size of structure, and have that cost is low, small investment, instant effect, benefit advantages of higher, have broad application prospects.Practical.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present utility model, consists of the application's a part, and illustrative example of the present utility model and explanation thereof are used for explaining the utility model, do not consist of improper restriction of the present utility model.
Fig. 1 is that axle of the present utility model measures intention;
Fig. 2 is that master of the present utility model looks schematic diagram;
Fig. 3 is elevational schematic view of the present utility model.
Among the figure:
1. drive the piezoelectric stack I; 2. stator; 3. clamp piezoelectric stack I;
4. rotor; 5. drive the piezoelectric stack II; 6. clamp piezoelectric stack II.
Embodiment
Further specify detailed content of the present utility model and embodiment thereof below in conjunction with accompanying drawing.
To shown in Figure 3, the bionical rotating driving device of micro/nano level of the present utility model comprises stator 2 and rotor 4 referring to Fig. 1, and the output of described rotor 4 has link screwed hole, the centre bore of described stator 2 and rotor 4 interference fits; The inside of described stator 2 is packaged with and drives piezoelectric stack I, II 1,5 and clamp piezoelectric stack I, II 3,6; Wherein drive piezoelectric stack I 1 and drive the drive amplification mechanism that piezoelectric stack II 5 is respectively applied to drive encapsulation in the stator 2; Clamp piezoelectric stack I 3 and clamp piezoelectric stack II 6 are respectively applied to drive the straight-line flexible hinge of encapsulation in the stator 2.
Described rotor 4 is without winding structure.
Described rotor 4 is the rotating shaft of type variable interface.
Described driving piezoelectric stack I, II 1,5 and clamp piezoelectric stack I, II 3,6 all adopt the piezoelectric element PZT of body controllable face type, its motion is to realize by the sequencing control to piezoelectric ceramic control voltage.
The rotation of described rotor 4 and stop to realize by the clamping action of thin shelf flexible hinge.
Drive amplification mechanism in the described stator 2 is two-stage lever amplification flexible hinge.
To shown in Figure 3, specific works process of the present utility model is as follows referring to Fig. 1:
The realization that the rotor stepping rotatablely moves, initial condition: drive piezoelectric stack I 1, driving piezoelectric stack II 5, clamp piezoelectric stack I 3 and clamp piezoelectric stack II 6 all not charged, system is in free state, and this moment, rotor 4 also was in the state of moving about; When rotor 4 is realized rotatablely moving: be packaged in the driving piezoelectric stack I 1 in the stator and drive 5 energisings of piezoelectric stack II, because inverse piezoelectric effect, drive piezoelectric stack I 1 and drive 5 elongations of piezoelectric stack II, the flexible hinge that amplifies of clamp that promotes respectively in the stator 2 produces distortion, because the flexible amplification of this clamp flexible hinge is two-stage lever amplification flexible hinge, will be rotor 4 clampings, and generation is around the tangential force of balance pivot, so just rotor 4 has been produced tangential couple, thereby drive rotor 4 rotates a certain angle; Clamp piezoelectric stack I 3 and the 6 energising elongations of clamp piezoelectric stack II, the clamp flexible hinge that promotes in the stator 2 produces distortion, with rotor 4 clampings; Drive piezoelectric stack I 1 and drive 5 outages of piezoelectric stack II, the flexible hinge that amplifies of clamp recovers former length under the effect of elastic force, and breaks away from rotor 4.At this moment, rotor 2 has rotated certain angle around its central shaft, repeats above-mentioned action, and rotor 4 will produce step-type rotatablely moving.
The motion of whole biomimetic micro-nano level rotating driving device is carried out according to strict sequential logic, change sequential, can change direction of rotation, and owing to having adopted piezoelectric stack as drive source, it has the advantages that little, the clamp of heating is stable, load output is larger, and can realize large stroke motion, the function such as the output that rotatablely moves.
The above is preferred embodiment of the present utility model only, is not limited to the utility model, and for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.

Claims (6)

1. bionical rotating driving device of micro/nano level, it is characterized in that: comprise stator (2) and rotor (4), it is characterized in that: the output of described rotor (4) has link screwed hole, the centre bore of described stator (2) and rotor (4) interference fits; The inside of described stator (2) is packaged with and drives piezoelectric stack I, II (1,5) and clamp piezoelectric stack I, II (3,6); Wherein drive piezoelectric stack I (1) and drive the drive amplification mechanism that piezoelectric stack II (5) is respectively applied to drive encapsulation in the stator (2); Clamp piezoelectric stack I (3) and clamp piezoelectric stack II (6) are respectively applied to drive the straight-line flexible hinge of encapsulation in the stator (2).
2. the bionical rotating driving device of micro/nano level according to claim 1 is characterized in that: described rotor (4) is for without winding structure.
3. the bionical rotating driving device of micro/nano level according to claim 1 and 2 is characterized in that: described rotor (4) is the rotating shaft of type variable interface.
4. the bionical rotating driving device of micro/nano level according to claim 1, it is characterized in that: described driving piezoelectric stack I, II (1,5) and clamp piezoelectric stack I, II (3,6) all adopt the piezoelectric element PZT of body controllable face type, and its motion is to realize by the sequencing control to piezoelectric ceramic control voltage.
5. the bionical rotating driving device of micro/nano level according to claim 1 is characterized in that: the rotation of described rotor (4) and stop to realize by the clamping action of thin shelf flexible hinge.
6. the bionical rotating driving device of micro/nano level according to claim 1, it is characterized in that: the drive amplification mechanism in the described stator (2) is two-stage lever amplification flexible hinge.
CN 201220317837 2012-07-03 2012-07-03 Micro/nano-scale bionic rotation driving device Expired - Lifetime CN202696501U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220317837 CN202696501U (en) 2012-07-03 2012-07-03 Micro/nano-scale bionic rotation driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220317837 CN202696501U (en) 2012-07-03 2012-07-03 Micro/nano-scale bionic rotation driving device

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CN202696501U true CN202696501U (en) 2013-01-23

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102723893A (en) * 2012-07-03 2012-10-10 吉林大学 Micro-nano simulation rotating drive device
CN103983526A (en) * 2014-06-04 2014-08-13 吉林大学 Cross-scale micro-nano-scale in-situ shearing mechanical performance testing platform
CN104362889A (en) * 2014-11-14 2015-02-18 西安交通大学 Self-adaptation stepping type angular displacement piezoelectric actuator and method
CN112152507A (en) * 2020-08-25 2020-12-29 江苏大学 Impulse type piezoelectric rotary motor with variable stepping angle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102723893A (en) * 2012-07-03 2012-10-10 吉林大学 Micro-nano simulation rotating drive device
CN103983526A (en) * 2014-06-04 2014-08-13 吉林大学 Cross-scale micro-nano-scale in-situ shearing mechanical performance testing platform
CN104362889A (en) * 2014-11-14 2015-02-18 西安交通大学 Self-adaptation stepping type angular displacement piezoelectric actuator and method
CN112152507A (en) * 2020-08-25 2020-12-29 江苏大学 Impulse type piezoelectric rotary motor with variable stepping angle
CN112152507B (en) * 2020-08-25 2021-12-21 江苏大学 Impulse type piezoelectric rotary motor with variable stepping angle

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