CN210431263U - Novel piezoelectric rotation precision driving platform - Google Patents
Novel piezoelectric rotation precision driving platform Download PDFInfo
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- CN210431263U CN210431263U CN201920490205.0U CN201920490205U CN210431263U CN 210431263 U CN210431263 U CN 210431263U CN 201920490205 U CN201920490205 U CN 201920490205U CN 210431263 U CN210431263 U CN 210431263U
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- rotor
- hinge mechanism
- flexible hinge
- asymmetric thin
- piezoelectric stack
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Abstract
The utility model relates to a novel rotatory precision driving platform of piezoelectricity comprises piezoelectric stack, the flexible hinge mechanism of asymmetric thin wall formula, rotor, pretension screw, pretension voussoir and base. The piezoelectric stack can extend and recover under the drive of a voltage signal, and the asymmetric thin-wall flexible hinge mechanism can realize parasitic inertia motion; the pretightening screw adjusts the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism and the rotor; the base supports and mounts other components. The main output direction of the piezoelectric stack and the rotation center of the rotor are on the same straight line, and the rigidity of the main output direction of the piezoelectric stack is fully utilized; the asymmetric thin-wall flexible hinge mechanism has good rigidity, can bear larger load and improves the output load of the driving platform. The platform can realize rotary stepping motion along a certain direction, and can be applied to the fields of precision ultraprecise machining, micro-electro-mechanical systems, micro-operation robots, large-scale integrated circuit manufacturing and biotechnology.
Description
Technical Field
The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a novel piezoelectric rotation precise driving platform.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving device, a piezoelectric element and a rotor mass block are usually arranged in parallel in the motion direction of the piezoelectric element, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole device mainly depends on the friction force generated by the pretightening force. However, piezoelectric elements, such as piezoelectric stacks, usually employ d33The working mode of (2) is that the rigidity of the section perpendicular to the main output direction is small, the generated pretightening force is small, so that the output load of the whole device is greatly reduced, and the large rigidity of the piezoelectric element in the main output direction is not fully utilized. Therefore, it is necessary to design a novel piezoelectric rotary precision driving platform which further improves the output load of the piezoelectric driving device by making full use of the stiffness of the piezoelectric stack in the main output direction.
Disclosure of Invention
The invention aims to provide a novel piezoelectric rotation precision driving platform, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the rotary motion output function.
According to the invention, the main output direction of the piezoelectric stack and the rotation center of the rotor are arranged on the same straight line, the asymmetric thin-wall flexible hinge mechanism with good rigidity output characteristic is adopted, and the composite load is transmitted through the asymmetric thin-wall flexible hinge mechanism, so that the rotation motion of the rotor is finally realized.
The above object of the present invention is achieved by the following technical solutions:
the utility model provides a novel rotatory precision driving platform of piezoelectricity, mainly includes rotor (1), piezoelectric stack (2), pretension voussoir (3), pretension screw (4), flexible hinge mechanism of asymmetric thin-walled formula (5) and base (6), the precision driving platform realizes the rotatory precision driving of piezoelectricity through parasitic inertia principle. The structure of the rotor (1) uses a high-precision bearing to reduce the friction loss of the rotor, and the bearing is connected with a base through a rotating shaft; the rotor (1) comprises a rotating platform, a bearing and a rotating shaft, wherein the rotating platform is in interference fit with an outer ring of the bearing, the rotating shaft is in interference fit with an inner ring of the bearing, and the rotating shaft is in interference fit with the base; the asymmetric thin-wall flexible hinge mechanism (5) is arranged on the base through screws; the piezoelectric stack (2) is arranged in the asymmetric thin-wall flexible hinge mechanism (5), and the main output direction of the piezoelectric stack and the rotation center of the rotor (1) are on the same straight line; the pre-tightening wedge block (3) is arranged between the piezoelectric stack (2) and the asymmetric thin-wall flexible hinge mechanism (5) and can be pre-tightened through the pre-tightening wedge block (3); the pre-tightening screw (4) is fastened on the base and is in contact with the lower end of the asymmetric thin-wall type hinge, the asymmetric thin-wall type flexible hinge mechanism (5) is of an asymmetric thin-wall type structure, and the arc-shaped structure of the upper end of the asymmetric thin-wall type flexible hinge mechanism is in contact with the rotor (1); the base (6) plays a role in supporting and installing and fixing other parts.
The main output direction of the piezoelectric stack (2) and the rotation center of the rotor (1) are on the same straight line, so that the larger rigidity of the main output direction of the piezoelectric stack (2) is fully utilized; the asymmetric thin-wall flexible hinge mechanism (5) is good in rigidity output performance, the upper end of the asymmetric thin-wall flexible hinge mechanism can bear larger pretightening force, the movement is stable and efficient, the piezoelectric stack (2) is electrified, and the driving force of the rotation movement of the rotor (1) and the pretightening force of the contact surface between the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) are transmitted through the asymmetric thin-wall flexible hinge mechanism (5), so that the output load of the piezoelectric driving platform is greatly improved, and the rotation stepping movement along the required direction can be realized.
The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) is adjusted through a pretightening screw (4);
the piezoelectric stack (2) adopts a piezoelectric ceramic stack PZT with a controllable surface shape, and the parasitic inertial motion drive is realized by controlling the voltage of the piezoelectric stack (2).
The contact part of the upper end of the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) is of an arc-shaped structure, and the contact stability is facilitated.
The main advantages of the invention are: by utilizing the parasitic inertial motion principle, the main output direction of the piezoelectric stack and the rotation center of the rotor are in the same line, and the parasitic inertial motion of the asymmetric thin-wall flexible hinge mechanism is utilized to transfer load, so that the output load of the driving platform is greatly improved, and the rotation motion of the rotor is realized. The driving device has the advantages of high driving reliability, good stability, high working efficiency and the like. Can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like. The invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic left side view of the present invention;
FIG. 4 is a schematic view of an asymmetric thin wall flexible hinge mechanism of the present invention.
In the figure:
1. a rotor; 2, piezoelectric stack; 3, pre-tightening the wedge block;
4. pre-tightening the screw; an asymmetric thin-wall flexible hinge mechanism; and 6, a base.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a novel piezoelectric rotation precision driving platform mainly comprises a rotor (1), a piezoelectric stack (2), a pre-tightening wedge block (3), a pre-tightening screw (4), an asymmetric thin-wall flexible hinge mechanism (5) and a base (6). The rotor (1) comprises a rotating platform, a bearing and a rotating shaft, wherein the rotating platform is in interference fit with an outer ring of the bearing, the rotating shaft is in interference fit with an inner ring of the bearing, and the rotating shaft is in interference fit with the base; the structure of the rotor (1) uses a high-precision bearing to reduce the friction loss of the rotor, and the bearing is connected with a base through a rotating shaft; the asymmetric thin-wall flexible hinge mechanism (5) is arranged on the base through screws; the piezoelectric stack (2) is arranged in the asymmetric thin-wall flexible hinge mechanism (5), and the main output direction of the piezoelectric stack and the rotation center of the rotor (1) are on the same straight line; the pre-tightening wedge block (3) is arranged between the piezoelectric stack (2) and the asymmetric thin-wall flexible hinge mechanism (5) and can be pre-tightened through the pre-tightening wedge block (3); the pre-tightening screw (4) is fastened on the base (6) and is contacted with the lower end of the asymmetric thin-wall type hinge, the asymmetric thin-wall type flexible hinge mechanism (5) is of an asymmetric thin-wall type structure, and the arc-shaped structure of the upper end of the asymmetric thin-wall type flexible hinge mechanism is contacted with the rotor (1); the base (6) plays a role in supporting and installing and fixing other parts.
The main output direction of the piezoelectric stack (2) and the rotation center of the rotor (1) are on the same straight line, so that the larger rigidity of the main output direction of the piezoelectric stack (2) is fully utilized; the asymmetric thin-wall flexible hinge mechanism (5) is good in rigidity output performance, the upper end of the asymmetric thin-wall flexible hinge mechanism (5) can bear larger pretightening force, the movement is stable and efficient, the piezoelectric stack (2) is electrified, and the driving force of the rotation movement of the rotor (1) and the pretightening force between the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) are transmitted through the asymmetric thin-wall flexible hinge mechanism (5), so that the output load of the piezoelectric driving platform is greatly improved, and the rotation stepping movement along a certain direction can be realized.
The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) is adjusted through a pretightening screw (4);
the piezoelectric stack (2) adopts a piezoelectric ceramic stack PZT with a controllable surface shape, and parasitic inertial motion is realized by controlling the voltage of the piezoelectric stack (2).
The contact part of the upper end of the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) is of an arc-shaped structure, and the contact stability is facilitated.
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
the realization of rotor step-by-step rotary motion, initial state: the contact distance between the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1) is adjusted by adjusting the pretightening screw (4), namely the initial pretightening force in the parasitic motion process. The piezoelectric stack (2) is controlled by a piezoelectric signal in the form of sawtooth wave or triangular wave. The piezoelectric stack (2) is not electrified, and the system is in a free state; when the piezoelectric stack (2) is electrified, the asymmetric thin-wall flexible hinge mechanism (5) is pushed to deform by stretching through the inverse piezoelectric effect, the rotor (1) is tightly pressed by the asymmetric thin-wall flexible hinge mechanism (5), and the rotor (1) is driven to rotate by the asymmetric thin-wall flexible hinge mechanism (5) under the action of static friction force between the rotor (1) and the rotor; when the piezoelectric stack (2) loses power and rapidly returns to the initial position, the asymmetric thin-wall flexible hinge mechanism (5) also returns to the initial state, and the rotor (1) is still kept at the position after rotation under the action of the inertia force, so that one motion cycle of the driving platform is completed. By repeating the steps, the driving platform can realize stepping type rotary motion in the required direction, and a larger output rotation angle is obtained.
The novel piezoelectric rotary precision driving platform adopts the piezoelectric stack as a driving source and the asymmetric thin-wall flexible hinge mechanism as a power transmission element, has the characteristics of small heat, stable driving, reliability and high efficiency, and can realize step-by-step rotary precision motion.
Claims (4)
1. The utility model provides a novel rotatory precision driving platform of piezoelectricity, includes rotor (1), piezoelectric stack (2), pretension voussoir (3), pretension screw (4), flexible hinge mechanism of asymmetric thin wall formula (5) and base (6), its characterized in that: the precise driving platform realizes rotary motion by using a parasitic inertia principle; the rotor (1) comprises a rotating platform, a bearing and a rotating shaft, wherein the rotating platform is in interference fit with an outer ring of the bearing, the rotating shaft is in interference fit with an inner ring of the bearing, and the rotating shaft is in interference fit with the base; the structure of the rotor (1) adopts a high-precision bearing to reduce the friction loss of the rotor, and the bearing is connected with the base through a rotating shaft and is used for realizing high-precision rotary motion; the asymmetric thin-wall flexible hinge mechanism (5) is arranged on the base through screws; the piezoelectric stack (2) is arranged in the asymmetric thin-wall flexible hinge mechanism (5) and can be pre-tightened through the pre-tightening wedge block (3); the pretightening screw (4) can adjust the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (5) and the rotor (1).
2. The novel piezoelectric rotary precision driving platform according to claim 1, wherein the designed asymmetric thin-wall flexible hinge mechanism (5) is made of spring steel or aluminum alloy and is connected by eight thin-wall flexible hinges to form an asymmetric parallelogram structure.
3. A novel piezoelectric rotary precision driving platform according to claim 1, characterized in that the main output direction of the piezoelectric stack (2) is in line with the rotation center of the rotor (1).
4. The novel piezoelectric rotary precision driving platform according to claim 1, wherein the designed asymmetric thin-wall flexible hinge mechanism (5) and the pressing part of the rotor (1) are in arc-shaped structures.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920490205.0U CN210431263U (en) | 2019-04-08 | 2019-04-08 | Novel piezoelectric rotation precision driving platform |
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| CN201920490205.0U CN210431263U (en) | 2019-04-08 | 2019-04-08 | Novel piezoelectric rotation precision driving platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114257125A (en) * | 2022-01-04 | 2022-03-29 | 长春工业大学 | Orthogonal rhombus dual-mode precise piezoelectric stick-slip rotating platform and driving method thereof |
| CN116015097A (en) * | 2023-03-28 | 2023-04-25 | 睿恩光电有限责任公司 | Piezoelectric driving assembly, rotary motor and electronic device |
| CN116388609A (en) * | 2023-05-26 | 2023-07-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
-
2019
- 2019-04-08 CN CN201920490205.0U patent/CN210431263U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114257125A (en) * | 2022-01-04 | 2022-03-29 | 长春工业大学 | Orthogonal rhombus dual-mode precise piezoelectric stick-slip rotating platform and driving method thereof |
| CN116015097A (en) * | 2023-03-28 | 2023-04-25 | 睿恩光电有限责任公司 | Piezoelectric driving assembly, rotary motor and electronic device |
| CN116015097B (en) * | 2023-03-28 | 2023-07-14 | 睿恩光电有限责任公司 | Piezoelectric driving assembly, rotary motor and electronic device |
| CN116388609A (en) * | 2023-05-26 | 2023-07-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
| CN116388609B (en) * | 2023-05-26 | 2023-08-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
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Granted publication date: 20200428 Termination date: 20210408 |