CN110912447B - Piezoelectric rotary driving platform based on crawling principle - Google Patents
Piezoelectric rotary driving platform based on crawling principle Download PDFInfo
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- CN110912447B CN110912447B CN201910291764.3A CN201910291764A CN110912447B CN 110912447 B CN110912447 B CN 110912447B CN 201910291764 A CN201910291764 A CN 201910291764A CN 110912447 B CN110912447 B CN 110912447B
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- 230000009193 crawling Effects 0.000 title claims abstract description 7
- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 230000003071 parasitic effect Effects 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000008901 benefit Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000005611 electricity Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
- H02N2/123—Mechanical transmission means, e.g. for gearing
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Abstract
The invention relates to a piezoelectric rotation driving platform based on a crawling principle. The platform mainly comprises two groups of piezoelectric driving units, spring gaskets, a rotor, a pre-tightening nut, a screw shaft, a screw and a base, wherein each piezoelectric driving unit comprises a piezoelectric stack, a pre-tightening wedge block and a thin-wall flexible hinge mechanism. The two groups of thin-wall flexible hinge mechanisms can realize parasitic inertial motion; the two piezoelectric stacks are obliquely arranged in the two thin-wall flexible hinge mechanisms respectively, and the rotation driving of the rotor is realized through the parasitic inertia motion of the two groups of thin-wall flexible hinge mechanisms. The invention adopts two groups of driving units to carry out time sequence control on two groups of voltages, and the two groups of driving units work alternately, thereby eliminating the backspacing phenomenon and improving the output performance. The platform can realize high-efficiency rotary motion, and can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro operation robots, large-scale integrated circuit manufacturing and biotechnology.
Description
Technical Field
The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a piezoelectric rotation driving platform based on a crawling principle.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving platform. The traditional driving platform has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving platform. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. The backspacing phenomenon can occur in the motion of the existing parasitic piezoelectric driving platform, and the output performance of the platform is greatly reduced. Therefore, there is a need to design a highly efficient piezoelectric driving platform that can eliminate the rollback phenomenon and improve the output load of the piezoelectric driving platform.
Disclosure of Invention
The invention aims to provide a piezoelectric rotation driving platform based on a crawling principle, and solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, large output rigidity and output load and high output frequency, can eliminate the backspacing phenomenon and realizes the high-efficiency rotary motion output function.
The above object of the present invention is achieved by the following technical solutions:
the utility model provides a piezoelectricity rotary driving platform based on principle of crawling, includes two sets of piezoelectricity drive unit, spring shim, rotor, pretightening nut, screw axle, screw and base, and piezoelectricity drive unit includes pretensioning voussoir, piezoelectric stack, the flexible hinge mechanism of thin wall formula, its characterized in that: the platform utilizes the parasitic inertia principle to realize the precise driving of the rotary motion by adopting two groups of driving units to alternately drive. The thin-wall flexible hinge mechanism is in a similar semi-cylindrical shape, the upper end face and the lower end face are semi-circular, the upper end face and the lower end face are provided with a table top for mounting the piezoelectric stack, the upper end face and the lower end face are fixedly connected by two side posts, two ends of the side posts are thin-wall flexible hinges, the piezoelectric stack is obliquely arranged in the thin-wall flexible hinge mechanism, the piezoelectric stack extends under the control of voltage to drive the flexible hinge mechanism to do parasitic inertia motion, and meanwhile, the pretightening force between the thin-wall flexible hinge mechanism and a rotor and the driving force for the rotation of the rotor are provided.
The platform alternately provides driving voltage by controlling the time sequence of the two groups of piezoelectric driving units, when only one group of piezoelectric driving units works, the piezoelectric stacks in the group are electrified, the piezoelectric stacks slowly extend, and the flexible hinge mechanisms in the group are driven to do parasitic inertial motion to push the rotor to rotate; when the group of piezoelectric stacks lose electricity, the piezoelectric stacks in the other group of piezoelectric driving units are slowly extended by electricity, and the flexible hinge mechanisms in the other group are driven to do parasitic inertial motion to push the rotor to continuously rotate. In the process, when the piezoelectric stack retracts to the initial position after losing power, the flexible hinge mechanism also returns to the initial state, and the rotor keeps the angle after rotating still under the inertia effect. The alternate driving mode can eliminate the backspacing phenomenon of the rotor in the motion period, greatly increase the output load and improve the output performance.
The thin-wall flexible hinge mechanism is arranged on the base through a screw; the piezoelectric stack can be pre-tightened through a pre-tightening wedge block; the pretightening nut can adjust the initial pretightening force between the thin-wall flexible hinge mechanism and the rotor;
the piezoelectric stack adopts a piezoelectric ceramic stack PZT with a shape controllable surface, and piezoelectric signals adopt a piezoelectric signal time sequence in a sawtooth wave or triangular wave form to control the piezoelectric stack, so that the piezoelectric stack slowly extends according to the time sequence to push the flexible hinge mechanism to alternately do parasitic inertia motion, thereby realizing the rotation motion of the rotor.
The main advantages of the invention are: by utilizing the parasitic inertia motion principle, two groups of piezoelectric driving units work alternately according to time sequence, and the backspacing phenomenon in the motion process is eliminated. The invention greatly improves the output load of the driving platform, simultaneously realizes the rotary motion of the rotor, and has the advantages of high driving reliability, good stability, high working efficiency and the like. Can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like. The invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.
Drawings
FIG. 1 is a schematic isometric view of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is an isometric schematic view of the flexible hinge mechanism of the present invention;
FIG. 4 is a front schematic view of the flexible hinge mechanism of the present invention.
In the figure:
1. a spring washer; 2, pre-tightening a wedge block I; 3, piezoelectric stack I; 4, a flexible thin-wall hinge mechanism I; 5, a rotor; 6, pre-tightening the nut; a screw shaft; 8, pre-tightening a wedge block II; 9, piezoelectric stack II; 10, a thin-walled flexible hinge mechanism II; a screw; a base.
Detailed Description
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
realization of the rotary motion of the rotor, initial state: adjusting a pretightening nut (6) to control the initial pretightening force between the thin-wall flexible hinge mechanisms I and II (4 and 10) and the rotor (5); the piezoelectric stacks I and II (3 and 9) are controlled by a piezoelectric signal in the form of sawtooth waves or triangular waves. When the piezoelectric stacks I and II (3 and 9) are not electrified, the system is in a free state; when only the piezoelectric stack I (3) is electrified, the thin-wall flexible hinge mechanism I (4) is pushed to deform by the extension of the inverse piezoelectric effect, the rotor (5) is tightly pressed by the thin-wall flexible hinge mechanism I (4), and the rotor (5) is driven to rotate by the thin-wall flexible hinge mechanism I (4) under the action of the static friction force between the thin-wall flexible hinge mechanism I (4) and the rotor (5); when the piezoelectric stack I (3) is about to lose power, the piezoelectric stack II (9) is electrified to extend to push the thin-wall flexible hinge mechanism II (10) to deform, the thin-wall flexible hinge mechanism II (10) compresses the rotor (5), and the rotor (5) is driven to continue rotating under the action of static friction force between the rotor and the rotor (5). When the piezoelectric stack II (9) is about to lose electricity, the piezoelectric stack I (3) is electrically extended again, the thin-wall flexible hinge mechanism I (4) is driven to do parasitic inertia motion, and the motion cycle of the next period is started. In the process, when the piezoelectric stack I (3) loses power and rapidly returns to the initial position, the flexible hinge mechanism I (4) also returns to the initial state. Similarly, when the piezoelectric stack II (9) loses power and rapidly returns to the initial position, the flexible hinge mechanism II (10) also returns to the initial state. By repeating the process, the driving platform can realize high-efficiency rotary motion and obtain a larger output rotation angle.
Claims (1)
1. The utility model provides a piezoelectricity rotary driving platform based on principle of crawling, includes two sets of piezoelectricity drive unit, spring shim, rotor, pretightening nut, screw axle, screw and base, and piezoelectricity drive unit includes pretensioning voussoir, piezoelectric stack, the flexible hinge mechanism of thin wall formula, its characterized in that: the platform adopts two groups of driving units to alternately drive by utilizing a parasitic inertia principle to realize the precise driving of the rotary motion; the thin-wall flexible hinge mechanism is in a similar semi-cylindrical shape, the upper end surface and the lower end surface are semi-circular, the upper end surface and the lower end surface are provided with a table board for mounting the piezoelectric stacks, the upper end surface and the lower end surface are fixedly connected by two side posts, two ends of the side posts are thin-wall flexible hinges, the piezoelectric stacks are obliquely arranged in the thin-wall flexible hinge mechanism, the piezoelectric stacks extend under the control of voltage, the flexible hinge mechanism is driven to do parasitic inertia motion, and meanwhile, the pretightening force between the thin-wall flexible hinge mechanism and a rotor and the driving force for the rotation of the rotor are provided; the platform alternately provides driving voltage by controlling the time sequence of two groups of piezoelectric driving units, when only one group of piezoelectric driving units works, the piezoelectric stacks in the group are electrified, the piezoelectric stacks slowly extend, and the flexible hinge mechanisms in the group are driven to do parasitic inertia motion to push the rotor to rotate; when the group of piezoelectric stacks is about to lose power, the piezoelectric stacks in the other group of piezoelectric driving units are slowly extended by power, and the flexible hinge mechanisms in the other group are driven to do parasitic inertial motion to push the rotor to continuously rotate; in the process, when the piezoelectric stack retracts to the initial position after losing power, the flexible hinge mechanism also restores to the initial state, and the rotor keeps the angle after rotating still under the inertia effect.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910291764.3A CN110912447B (en) | 2019-04-08 | 2019-04-08 | Piezoelectric rotary driving platform based on crawling principle |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910291764.3A CN110912447B (en) | 2019-04-08 | 2019-04-08 | Piezoelectric rotary driving platform based on crawling principle |
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| CN110912447B true CN110912447B (en) | 2023-01-31 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000111349A (en) * | 1998-10-08 | 2000-04-18 | Japan Aviation Electronics Industry Ltd | Method for manufacturing inertia sensor chip and inertia sensor chip semi-finished goods |
| CN105281597A (en) * | 2015-01-06 | 2016-01-27 | 长春工业大学 | Powerful output sandwich type mode conversion ultrasonic motor, drive platform and drive method thereof |
| CN106921309A (en) * | 2017-04-13 | 2017-07-04 | 西安交通大学 | A kind of plane three-level enlarger and method based on rhombus ring and lever principle |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN207677649U (en) * | 2017-12-05 | 2018-07-31 | 吉林大学 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
-
2019
- 2019-04-08 CN CN201910291764.3A patent/CN110912447B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000111349A (en) * | 1998-10-08 | 2000-04-18 | Japan Aviation Electronics Industry Ltd | Method for manufacturing inertia sensor chip and inertia sensor chip semi-finished goods |
| CN105281597A (en) * | 2015-01-06 | 2016-01-27 | 长春工业大学 | Powerful output sandwich type mode conversion ultrasonic motor, drive platform and drive method thereof |
| CN106921309A (en) * | 2017-04-13 | 2017-07-04 | 西安交通大学 | A kind of plane three-level enlarger and method based on rhombus ring and lever principle |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN207677649U (en) * | 2017-12-05 | 2018-07-31 | 吉林大学 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
Non-Patent Citations (1)
| Title |
|---|
| 三角位移转换式压电直线电机;王寅等;《光学精密工程》;20160815(第08期);全文 * |
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