CN111384873B - Bionic inchworm type driving device and excitation method thereof - Google Patents

Bionic inchworm type driving device and excitation method thereof Download PDF

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Publication number
CN111384873B
CN111384873B CN202010050003.1A CN202010050003A CN111384873B CN 111384873 B CN111384873 B CN 111384873B CN 202010050003 A CN202010050003 A CN 202010050003A CN 111384873 B CN111384873 B CN 111384873B
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rotor
hinge mechanism
driving
flexible hinge
unit
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CN111384873A (en
Inventor
万嫩
李建平
温建明
张昱
马继杰
胡意立
程光明
阚君武
蔡俊杰
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Zhejiang Normal University CJNU
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Zhejiang Normal University CJNU
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The application belongs to the field of precise driving, and particularly relates to a bionic inchworm type driving device and an excitation method thereof. The inchworm-type piezoelectric driving device solves the technical problems that the inchworm-type piezoelectric driving device is complex in structure and difficult to control. The device comprises a driving unit, a clamping unit, a rotor, a screw and a base; the driving unit and the clamping unit are mounted on the base through screws; the device adopts an excitation method of voltage signal time sequence control, so that the driving unit and the clamping unit alternately work cooperatively, large-stroke high-precision rotary motion can be realized, and the device can be applied to the fields of precision ultra-precision machining, micro-electromechanical systems, micro-operation robots, biotechnology, aerospace and the like.

Description

Bionic inchworm type driving device and excitation method thereof
Technical Field
The application relates to a micro-nano precise driving device, in particular to a bionic inchworm type driving device and an excitation method thereof.
Background
The precise driving technology with micro/nano positioning precision is a key technology in the fields of high-tip science and technology such as ultra-precise machining and measurement, optical engineering, intelligent robots, modern medical treatment, aerospace science and technology and the like. In order to realize the micro/nano-scale output precision, the application of modern precise driving technology puts higher demands on the precision of the driving device. The traditional driving device has low output precision and large overall size, and cannot meet the requirements of a precision system on micro/nano-level high precision and the micro size of the driving device in the modern advanced technology. The piezoelectric driving device has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and has been increasingly applied to micro-positioning and precise ultra-precise machining. The inchworm piezoelectric driving device can ensure higher output precision and bearing capacity while obtaining larger output stroke, and is widely focused by researchers. The inchworm type driving device usually needs to adopt two clamping units and one driving unit for multi-path control, has the problems of complex structure and difficult control, and is not beneficial to the practical application of inchworm type piezoelectric driving. Therefore, it is necessary to design an inchworm-type piezoelectric driving apparatus capable of simplifying the structure and control.
Disclosure of Invention
The application aims to provide a bionic inchworm type driving device and an excitation method thereof, which solve the problems in the prior art. According to the application, through time sequence control of voltage signals, a group of driving units and a group of clamping units are used for alternately and cooperatively working, so that large-stroke high-precision rotary driving can be realized, and meanwhile, the structure and control of the device can be effectively simplified.
The above object of the present application is achieved by the following technical solutions:
a bionic inchworm type driving device comprises a driving unit, a clamping unit, a rotor, a screw and a base, wherein the driving unit and the clamping unit are arranged on the base through the screw; the device controls the time sequence of the voltage signal to enable the driving unit and the clamping unit to work alternately and cooperatively so as to drive the rotor to do rotary motion.
The driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is obliquely arranged in the flexible hinge mechanism and is pre-tightened through the pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, the initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped protruding portion is in contact with the rotor, and the piezoelectric stack can push the arc-shaped protruding portion to push against the rotor and drive the rotor to rotate after being electrically stretched.
The clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block; the piezoelectric stack is arranged in the flexible hinge mechanism and is pre-tightened through the pre-tightening wedge block; the flexible hinge mechanism comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism and the rotor can be adjusted through screws, the arc-shaped protruding portion is in contact with the rotor, and the piezoelectric stack can push the arc-shaped protruding portion to prop against the rotor to achieve clamping.
An excitation method of a bionic inchworm type driving device comprises the following steps:
step (1), initial state: the adjusting screw is used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor; two groups of voltage signals are adopted to respectively control the driving unit and the clamping unit; the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
step (2), the driving unit pushes the rotor to rotate;
step (3), the clamping unit clamps the rotor;
step (4), the driving unit is restored to an initial state;
step (5), the clamping unit is restored to an initial state, and one movement period is ended;
and (6) repeating the steps, wherein the driving unit and the clamping unit work alternately, and the driving device can realize large-stroke high-precision rotary motion.
The application has the main advantages that: through the time sequence control of voltage signals, a group of driving units and a group of clamping units are adopted to alternately and cooperatively work, so that micro-nano large-stroke rotary motion can be realized, and meanwhile, the structure and control of the device can be effectively simplified. The device can be applied to important scientific engineering fields such as precise ultra-precise machining, micro-operation robots, micro-electromechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like.
Drawings
The accompanying drawings are included to provide a further understanding of the application, and are incorporated in and constitute a part of this specification, illustrate and explain the application and are not to be construed as limiting the application.
FIG. 1 is an isometric view of the present application;
FIG. 2 is a schematic view of a drive unit flexible hinge mechanism of the present application;
FIG. 3 is a schematic view of the flexible hinge mechanism of the clamping unit of the present application;
fig. 4 is a voltage signal applied to the drive unit piezoelectric stack and the clamp unit piezoelectric stack.
In the figure:
1. a driving unit; secondly, a rotor; third, the base;
4. a clamp unit; fifthly, screws; 1-1, piezoelectric stack I;
1-2, pre-tightening a wedge block I; 1-3, a flexible hinge mechanism I; 4-1, piezoelectric stack II;
4-2, pre-tightening the wedge block II; 4-3. Flexible hinge mechanism II.
Detailed Description
The details of the present application and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, a bionic inchworm type driving device mainly comprises a driving unit (1), a clamping unit (4), a rotor (2), a screw (5) and a base (3), wherein the driving unit (1) and the clamping unit (4) are installed on the base (3) through the screw (5); the device enables the driving unit (1) and the clamping unit (4) to work alternately and cooperatively through time sequence control of the voltage signals, and drives the rotor (2) to do rotary motion.
The driving unit (1) comprises a flexible hinge mechanism I (1-3), a pre-tightening wedge I (1-2) and a piezoelectric stack I (1-1); the piezoelectric stack I (1-1) is arranged in the flexible hinge mechanism I (1-3) and is pre-tensioned through the pre-tensioning wedge I (1-2); the flexible hinge mechanism I (1-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism I (1-3) and the rotor (2) can be adjusted through the screw (5), the arc-shaped protruding portion is in contact with the rotor (2), and the piezoelectric stack I (1-1) can push the arc-shaped protruding portion to push against the rotor (2) and drive the rotor (2) to rotate through electric extension.
The clamping unit (4) comprises a piezoelectric stack II (4-1), a pre-tightening wedge block II (4-2) and a flexible hinge mechanism II (4-3); the piezoelectric stack II (4-1) is arranged in the flexible hinge mechanism II (4-3) and is pre-tensioned through the pre-tensioning wedge block II (4-2); the flexible hinge mechanism II (4-3) comprises four thin-wall flexible hinges, initial pretightening force between the flexible hinge mechanism II (4-3) and the rotor (2) can be adjusted through the screw (5), the arc-shaped protruding portion is in contact with the rotor (2), and the piezoelectric stack II (4-1) can push the arc-shaped protruding portion to push against the rotor (2) to achieve clamping after being electrically stretched.
An excitation method of a bionic inchworm type driving device comprises the following steps:
step (1), initial state: the adjusting screw (5) is used for controlling the initial pretightening force among the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2); two groups of voltage signals are adopted to respectively control the driving unit (1) and the clamping unit (4); the piezoelectric stacks of the driving unit (1) and the clamping unit (4) are not electrified;
step (2), the driving unit (1) pushes the rotor (2) to rotate;
step (3), the clamping unit (4) clamps the rotor (2);
step (4), the driving unit (1) is restored to an initial state;
step (5), the clamping unit (4) is restored to an initial state, and one movement period is ended;
and (6) repeating the steps, wherein the driving unit (1) and the clamping unit (4) work alternately, and the driving device can realize large-stroke high-precision rotary motion.
Referring to fig. 1 to 4, the specific working procedure of the present application is as follows:
step (1), initial state: the adjusting screw (5) is used for controlling the initial pretightening force among the flexible hinge mechanism I (1-3), the flexible hinge mechanism II (4-3) and the rotor (2). Using two sets of voltage signals U 1 、U 2 The piezoelectric stack I (1-1) in the driving unit (1) and the piezoelectric stack II (4-1) in the clamping unit (4) are respectively controlled. Neither the piezoelectric stack I (1-1) nor the piezoelectric stack II (4-1) is charged;
step (2), U 1 Rising signal, driving unit (1) acts: when the piezoelectric stack I (1-1) is electrified, the switch-onThe over-inverse piezoelectric effect stretches to drive the flexible hinge mechanism I (1-3) to deform, so that the arc-shaped bulge of the flexible hinge mechanism I (1-3) is propped against the rotor (2) and drives the rotor (2) to rotate;
step (3), U 2 Rising signal, clamp unit (4) acts: before the piezoelectric stack I (1-1) loses electricity and retreats, the piezoelectric stack II (4-1) of the clamping unit (4) is electrified, and the arc-shaped bulge of the flexible hinge mechanism II (4-3) is pushed to tightly prop against the rotor (2) to clamp by stretching through the inverse piezoelectric effect;
step (4), U 1 The falling signal, the driving unit (1) resumes: the piezoelectric stack I (1-1) is powered off, the flexible hinge mechanism I (1-3) is restored to the initial state, and the rotor (2) is still kept at a position rotated by an angle;
step (5), U 2 A falling signal, the clamp unit (4) resumes: the piezoelectric stack II (4-1) is powered off, the original state is restored, the flexible hinge mechanism II (4-3) is restored to the original state, and one movement period is ended;
the driving unit (1) and the clamping unit (4) work alternately by repeating the steps, and the driving device can realize large-stroke high-precision rotary motion.
The inchworm-like driving device and the excitation method thereof can realize large-stroke precise rotary driving by alternately and cooperatively working a group of driving units and a group of clamping units through time sequence control of voltage signals, and have the characteristics of small heating, stable driving, reliability and high efficiency.

Claims (2)

1. A bionic inchworm type driving device is characterized in that: the device comprises a group of driving units, a group of clamping units, a rotor, screws and a base, wherein the driving units and the clamping units are arranged on the base through the screws, and the driving units and the clamping units are oppositely arranged on two sides of the rotor; the device adopts an excitation method of voltage signal time sequence control to enable the driving unit and the clamping unit to alternately work cooperatively, so that rotary motion can be realized; the driving unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block, wherein the piezoelectric stack is obliquely arranged in the flexible hinge mechanism, pre-tightening is carried out through the pre-tightening wedge block, the flexible hinge mechanism is square and comprises four thin-wall flexible hinges, initial pre-tightening force between the flexible hinge mechanism and a rotor can be adjusted through screws, the arc-shaped protruding part is contacted with the rotor, and the piezoelectric stack can be electrically stretched to push the arc-shaped protruding part to push the rotor tightly and drive the rotor to rotate; the clamping unit comprises a piezoelectric stack, a flexible hinge mechanism and a pre-tightening wedge block, wherein the piezoelectric stack is arranged in the flexible hinge mechanism, pre-tightening is carried out through the pre-tightening wedge block, the flexible hinge mechanism is similar to a straight line, the clamping unit comprises four thin-wall flexible hinges, initial pre-tightening force between the flexible hinge mechanism and a rotor can be adjusted through screws, an arc-shaped protruding portion is in contact with the rotor, and the piezoelectric stack can stretch electrically to push the arc-shaped protruding portion to push against the rotor to clamp.
2. A method of activating a biomimetic inchworm-type actuator as set forth in claim 1, wherein: the method comprises the following steps:
step (1), initial state: the adjusting screw is used for controlling the initial pretightening force between the flexible hinge mechanism and the rotor; two groups of voltage signals are adopted to respectively control the driving unit and the clamping unit; the piezoelectric stacks of the driving unit and the clamping unit are not electrified;
step (2), the driving unit pushes the rotor to rotate;
step (3), the clamping unit clamps the rotor;
step (4), the driving unit is restored to an initial state;
step (5), the clamping unit is restored to an initial state, and one movement period is ended;
the above steps are repeated, the driving unit and the clamping unit work alternately, and the driving device can realize rotary motion.
CN202010050003.1A 2020-01-08 2020-01-08 Bionic inchworm type driving device and excitation method thereof Active CN111384873B (en)

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CN113162465B (en) * 2021-04-22 2022-05-17 燕山大学 Piezoelectric stack driven stepping type rotating motor

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CN109217717A (en) * 2018-09-26 2019-01-15 吉林大学 Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement
CN109713936A (en) * 2019-03-20 2019-05-03 杨晓峰 Elliptical vibration piezoelectric actuator and its driving method
CN109756148A (en) * 2019-03-20 2019-05-14 唐金岩 The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement
CN110048636A (en) * 2019-04-19 2019-07-23 西安科技大学 Piezoelectric supersonic driver and its application method based on longitudinal-shaking sandwich formula energy converter

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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102723893A (en) * 2012-07-03 2012-10-10 吉林大学 Micro-nano simulation rotating drive device
CN108322090A (en) * 2018-03-04 2018-07-24 长春工业大学 External stirs type rotary piezoelectric stick-slip driver and its driving method
CN109217717A (en) * 2018-09-26 2019-01-15 吉林大学 Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement
CN109713936A (en) * 2019-03-20 2019-05-03 杨晓峰 Elliptical vibration piezoelectric actuator and its driving method
CN109756148A (en) * 2019-03-20 2019-05-14 唐金岩 The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement
CN110048636A (en) * 2019-04-19 2019-07-23 西安科技大学 Piezoelectric supersonic driver and its application method based on longitudinal-shaking sandwich formula energy converter

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