CN109713936A - Elliptical vibration piezoelectric actuator and its driving method - Google Patents
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Abstract
The present invention relates to a kind of elliptical vibration piezoelectric actuator and its driving methods, belong to Precision Piezoelectric actuation techniques field.Device includes pedestal, driving unit, mover, gap adjustment unit；Driving unit is made of compliant mechanism, two groups of piezoelectric stacks and voussoir, wherein compliant mechanism has symmetrical structure, left and right is respectively distributed in orthogonal two groups of flexible hinge structures, and intersects at positive front end, realizes that the synthesis of the movement generated to left and right piezoelectric stack exports；Gap adjustment unit and mover pass through sunk screw and connect with pedestal.Advantage is: inhibiting the generation for retracting and moving from driving principle, improves the output performance of piezoelectric actuator, enhance it in the application prospect in the fields such as precision optics, micromanipulation, micro mechanical property test.
Description
Technical field
The present invention relates to Precision Piezoelectric actuation techniques field, in particular to a kind of elliptical vibration piezoelectric actuator and its driving
Method.Driver and driving method provided by the invention compare driving principles and the drivers such as existing stick-slip, inertia, parasitism,
The generation for retracting and moving is inhibited from driving principle, is improved the output performance of piezoelectric actuator, is enhanced it in precise light
The application prospect in the fields such as, micromanipulation, micro mechanical property test.
Background technique
With mechanical, equipment, the microminaturization of instrument and precise treatment, precision positioning device is in micro-/ nano operation, precise light
The demand in the fields such as, precision instrument is growing.Precision Piezoelectric actuation techniques are as a kind of novel actuation techniques, because of its output
Precision and the significant advantages such as high resolution, fast response time, compact-sized, are widely used in developing all kinds of precise driving devices
In.Among these, the device directly driven using piezoelectric stack is the simplest and easy to control, but piezoelectric stack output bit itself
Move it is very limited, usually only several microns to tens microns, the movement travel demand not being able to satisfy in numerous practical applications, therefore
The research and application of accurate big stroke piezoelectric actuator obtain extensive concern in recent years.Currently, relatively common big stroke pressure
Electric drive mainly has Inchworm type, inertia-type and three kinds of stick-slip formula.The inchworm motion of Inchworm type piezoelectric actuator natural imitation circle
Process generallys use the timing control that 3 groups of piezoelectric stacks realize clampers and driving movement, and power output is larger, theoretically can be with
Realize step motion.But Inchworm type piezoelectric actuator causes it to add since structure is complicated, more using piezoelectric stack quantity
Work, assembly, control are complicated, and clamper and driving movement handoff procedure are also easy to produce impact, and motion-affecting stationarity is asked above
Topic greatly limits its practical application.Inertia-type compares Inchworm type with stick-slip formula driver, and structure and control are more simple, still
Its driving principle causes bearing capacity low, and curve of output has the more significant movement that retracts, and reduces its displacement output
Efficiency increases the complexity of control.As seen through the above analysis, existing driving principle and driver, although can be with
It realizes big stroke, but also there are some technical problems.For this reason, it may be necessary to it is further proposed that new Piezoelectric Driving principle, and develop
Corresponding driver, to realize the simple big stroke step motion without rollback simultaneously of structure, control.
Summary of the invention
The purpose of the present invention is to provide a kind of elliptical vibration piezoelectric actuator and its driving methods, solve the prior art
The existing above problem.Elliptical vibration piezoelectric actuator structure of the invention is simple, and control methods are versatile and flexible, to realize piezoelectricity
Driver, which is generated, provides a kind of feasible program without rollback step motion.
Above-mentioned purpose of the invention is achieved through the following technical solutions:
Elliptical vibration piezoelectric actuator, including pedestal 2, driving unit, mover 1, gap adjustment unit 4, the driving are single
Member is connect by screw with gap adjustment unit 4, and gap adjustment unit 4 is connect by sunk screw with pedestal 2, the mover 1
Positioned at the front end of driving unit, it is connect by sunk screw with pedestal 2.
The driving unit includes piezoelectric stack 3, compliant mechanism 5, voussoir 6, and the piezoelectric stack 3 is pre- by voussoir 6
Tightly it is mounted in 5 groove of compliant mechanism；The compliant mechanism 5 has symmetrical structure, and left and right is respectively distributed in orthogonal two
Group flexible hinge structure, and positive front end is intersected at, realize that the synthesis of the movement generated to the two groups of piezoelectric stacks 3 in left and right exports.
Another object of the present invention is to provide a kind of driving methods of elliptical vibration piezoelectric actuator, including following step
It is rapid:
A) knob for adjusting gap adjustment unit 4, realizes the adjusting in gap between the positive front end and mover 1 of compliant mechanism 5；
B) apply two continuous simple harmonic quantities with 45 ° of phase differences to two in driving unit orthogonal piezoelectric stacks 3 simultaneously
Wave, described two monochromatic waves such as have at the characteristic of frequencies, and through voltage shifts conversion process, making its voltage value is always non-negative shape
State；The orthogonal piezoelectric stack 3 of two-way is respectively completed respective elongation and replys, in this process under the action of inverse piezoelectric effect
In, compliant mechanism 5 realizes the synthesis to two-way orthogonal motion, and the front end Yu Qizheng exports elliptic motion；In period elliptic motion
Under the action of, the positive front end of compliant mechanism 5 periodically contacts and is detached from 1 side wall of mover, and then realizes mover 1 along x-axis side
To step motion；In above process, the elliptical orbit length that control participates in driving is less than or equal to the one of elliptical orbit overall length
Half, i.e., inhibit the generation moved that retracts from principle, thus, in a cycle of elliptical vibration, make the only unidirectional fortune of mover 1
It is dynamic；Similarly, the positive and negative realization for controlling two input monochromatic wave phase differences is driven in the reverse direction；
C) voltage magnitude and frequency that piezoelectric stack 3 inputs monochromatic wave are adjusted, realizes the regulation to 1 speed of mover；
D) by adjusting gap adjustment unit 4, change the elliptical vibration path length for participating in driving, realize every step displacement
It adjusts, can also realize the fine tuning to 1 speed of mover.
The beneficial effects of the present invention are: the elliptical vibration piezoelectric actuator and its driving method provided through the invention,
It can inhibit the rollback movement that the driver based on the principles development such as stick-slip, inertia, parasitism occurred in the past from principle, change significantly
The output performance of kind piezoelectric actuator, promotes its delivery efficiency, and then extend it in precision optics, micromanipulation, Micromechanics
The application prospect in the fields such as performance test.The configuration of the present invention is simple, flexibly, by adjusting, voltage, frequency, gap is adjustable for control
The advantages of saving the speed of mover, and having both the theoretical unlimited stroke of stick-slip formula driver.It is applied widely, it is practical.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair
Bright illustrative example and its explanation is used to explain the present invention, and is not constituted improper limitations of the present invention.
Fig. 1 is the overall structure diagram of elliptical vibration piezoelectric actuator of the invention；
Fig. 2 is compliant mechanism schematic top plan view of the invention；
Fig. 3 is the timing control figure of elliptical vibration piezoelectric actuator of the invention；
Fig. 4 is the theoretical ellipse trajectory diagram of elliptical vibration piezoelectric actuator of the invention under the conditions of Fig. 3；
Fig. 5 is the driving principle figure of elliptical vibration piezoelectric actuator of the invention；
Fig. 6 is that the present invention is driven using independent side piezoelectric stack to simulate the result of stick-slip principle output；
Fig. 7 is the output result that driving method proposed by the present invention measures；
Fig. 8 is that driving voltage amplitude of the present invention is 80V, and the actual displacement output measured under different driving electric voltage frequency is bent
Line.
In figure: 1, mover；2, pedestal；3, piezoelectric stack；4, gap adjustment unit；5, compliant mechanism；6, voussoir.
Specific embodiment
Detailed content and its specific embodiment of the invention are further illustrated with reference to the accompanying drawing.
Referring to shown in Fig. 1 and Fig. 2, elliptical vibration piezoelectric actuator of the invention, including pedestal, driving unit, mover,
Gap adjusts unit, and the driving unit is connect by screw with gap adjustment unit 4, and gap adjustment unit 4 passes through sunk screw
It is connect with pedestal 2, the mover 1 is located at the front end of driving unit, is connect by sunk screw with pedestal 2.
The driving unit mainly includes two groups of piezoelectric stacks 3, compliant mechanism 5, voussoir 6；Piezoelectric stack 3 passes through voussoir
6 preloads are mounted in 5 groove of compliant mechanism；The compliant mechanism 5 has symmetrical structure, and it is in be mutually perpendicular to that left and right, which is respectively distributed with,
Two groups of flexible hinge structures, and intersect at positive front end, realize that the synthesis of the movement generated to the two groups of piezoelectric stacks 3 in left and right is defeated
Out.
Ginseng as shown in figs. 3 to 5, the driving method of elliptical vibration piezoelectric actuator of the invention is simultaneously to driving unit
In two orthogonal piezoelectric stacks apply the continuous monochromatic waves of frequencies such as two with 45 ° of phase differences, export via submissive machine
Structure synthesis, forms elliptical vibration, is periodically contacted and be detached from mover side wall, and then realizes mover straight line stepping fortune
It is dynamic.The following steps are included:
A) knob for adjusting gap adjustment unit 4, realizes the gap adjustment between the positive front end and mover 1 of compliant mechanism 5,
The initial position of the positive front end of compliant mechanism is position 1 at this time；
B) apply two continuous simple harmonic quantities with 45 ° of phase differences to two in driving unit orthogonal piezoelectric stacks 3 simultaneously
The characteristic of frequencies such as there is to make voltage value always and through voltage shifts conversion process for wave pzt1 and pzt2, described two monochromatic waves
For non-negative state.The orthogonal piezoelectric stack 3 of two-way is respectively completed respective elongation and replys under the action of inverse piezoelectric effect.
In the process, compliant mechanism 5 realizes the synthesis to above-mentioned two-way orthogonal motion, and the front end Yu Qizheng exports elliptic motion.Often
In subelliptic movement, when the positive nose motion of compliant mechanism 5 is to position 2, just contacted with 1 side wall of mover, at this time mover 1 by
In by contact force FNWith the frictional force F with driving effectf, displacement will be generated by driving, this displacement process will continue to soft
The positive nose motion of suitable mechanism 5 is to position 3, and hereafter the side wall of compliant mechanism 5 and mover 1 is detached from, and mover is not affected by driving force, will
It is remain stationary state, until the positive front end arriving at location 2 of compliant mechanism 5 next time, indicates that an elliptic motion terminates.It is above-mentioned
The process that mover generates displacement can be divided into two parts, and first part is contact force FNReach maximum process from zero, mover 1 generates
First segment is displaced S1, and then contact force FNThe process for being decreased to zero from maximum can be considered that second part, mover 1 generate second segment
It is displaced S2, due to direction of displacement twice and driving frictional force FfDirection is all the same, thus mover 1 in an elliptic motion in total
Generate displacement S1+S2.Under the action of period elliptic motion, the positive front end of compliant mechanism 5 is periodically contacted with 1 side wall of mover
With disengaging, and then the step motion along the x-axis direction of mover 1 is realized.In above process, it is long to participate in the elliptical orbit driven for control
Degree is less than or equal to the half of elliptical orbit overall length, i.e., the path length undergone from position 2 along track direction of motion in-position 3 is small
In the half for being equal to entire elliptical vibration track, the generation moved that retracts can be inhibited from principle, thus, in elliptical vibration
In a cycle, mover 1 is made to only have one-way movement.Similarly, controlling two the positive and negative of input monochromatic wave phase differences can be realized instead
To driving.
C) voltage magnitude and frequency that piezoelectric stack 3 inputs monochromatic wave are adjusted, the regulation to 1 speed of mover can be realized.
D) by adjusting gap adjustment unit 4, change the elliptical vibration path length for participating in driving, it can be achieved that every step displacement
Adjusting, can also realize the fine tuning to 1 speed of mover.
It is viscous referring to shown in Fig. 6 and Fig. 7, being that the curve of output of the invention based on elliptical vibration principle and independent side are based on
The comparing result of the curve of output of sliding principle, it can be seen that elliptical vibration driving drives compared to stick-slip principle, and the movement that retracts obtains
Apparent inhibition shows the advantage of elliptical vibration driving.It is shown in Figure 8, it is that driving voltage amplitude of the present invention is
80V, the actual displacement curve of output measured under different driving electric voltage frequency, it can be seen that elliptical vibration driver can pass through
It adjusts driving voltage frequency and realizes speed adjustment, further illustrating elliptical vibration driving has feasibility.
The foregoing is merely preferred embodiments of the invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention,
It should all be included in the protection scope of the present invention.
Claims (3)
1. a kind of elliptical vibration piezoelectric actuator, it is characterised in that: including pedestal (2), driving unit, mover (1), gap adjustment
Unit (4), the driving unit are connect by screw with gap adjustment unit (4), and gap adjustment unit (4) passes through sunk screw
It is connect with pedestal (2), the mover (1) is located at the front end of driving unit, is connect by sunk screw with pedestal (2).
2. elliptical vibration piezoelectric actuator according to claim 1, it is characterised in that: the driving unit includes piezoelectricity
Stack (3), compliant mechanism (5), voussoir (6), the piezoelectric stack (3) pre-tightens that be mounted on compliant mechanism (5) recessed by voussoir (6)
In slot；The compliant mechanism (5) has symmetrical structure, and left and right is respectively distributed in orthogonal two groups of flexible hinge structures, and
Positive front end is intersected at, realizes that the synthesis of the movement generated to the two groups of piezoelectric stacks (3) in left and right exports.
3. a kind of driving method of elliptical vibration piezoelectric actuator, it is characterised in that: the following steps are included:
A) knob for adjusting gap adjustment unit (4), realizes the tune in gap between the positive front end and mover (1) of compliant mechanism (5)
Section；
B) apply two continuous monochromatic waves with 45 ° of phase differences to two in driving unit orthogonal piezoelectric stacks (3) simultaneously,
Described two monochromatic waves such as have at the characteristic of frequencies, and through voltage shifts conversion process, making its voltage value is always non-negative state；
The orthogonal piezoelectric stack of two-way (3) is respectively completed respective elongation and replys, in this process under the action of inverse piezoelectric effect
In, compliant mechanism (5) realizes the synthesis to two-way orthogonal motion, and the front end Yu Qizheng exports elliptic motion；It is transported in period ellipse
Under the action of dynamic, the positive front end of compliant mechanism (5) periodically contacts and is detached from mover (1) side wall, and then realizes mover (1)
Step motion along the x-axis direction；In above process, it is complete that the elliptical orbit length that control participates in driving is less than or equal to elliptical orbit
Long half inhibits the generation moved that retracts that is, from principle, thus, in a cycle of elliptical vibration, make mover (1) only
There is one-way movement；Similarly, the positive and negative realization for controlling two input monochromatic wave phase differences is driven in the reverse direction；
C) voltage magnitude and frequency for adjusting piezoelectric stack (3) input monochromatic wave, realize the regulation to mover (1) speed；
D) by adjusting gap adjustment unit (4), change the elliptical vibration path length for participating in driving, realize the tune of every step displacement
Section, can also realize the fine tuning to mover (1) speed.
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| CN110474563A (en) * | 2019-09-27 | 2019-11-19 | 长春工业大学 | A kind of Bidirectional interlocking formula piezoelectricity stick-slip driving device and its motivational techniques |
| CN111162693A (en) * | 2020-01-08 | 2020-05-15 | 浙江师范大学 | Piezoelectric driving platform |
| CN111384873A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Bionic inchworm type driving device and excitation method thereof |
| CN111614284A (en) * | 2020-06-19 | 2020-09-01 | 吉林大学 | Force control device and method for inhibiting rollback motion of stick-slip piezoelectric actuator |
| CN112713799A (en) * | 2020-12-08 | 2021-04-27 | 广东工业大学 | Large-stroke non-return nano piezoelectric motor based on flexible hinge guide |
| CN113114067A (en) * | 2021-05-08 | 2021-07-13 | 吉林大学 | Piezoelectric stick-slip type driving device capable of measuring distance in large stroke and distance measuring method |
| CN113612406A (en) * | 2021-08-17 | 2021-11-05 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
| CN117066917A (en) * | 2023-10-18 | 2023-11-17 | 山东理工大学 | Combined dual-mode multi-frequency vibration auxiliary processing device |
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| CN110474563B (en) * | 2019-09-27 | 2021-10-29 | 长春工业大学 | Bidirectional interlocking type piezoelectric stick-slip driving device and excitation method thereof |
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| CN111162693A (en) * | 2020-01-08 | 2020-05-15 | 浙江师范大学 | Piezoelectric driving platform |
| CN111384873A (en) * | 2020-01-08 | 2020-07-07 | 浙江师范大学 | Bionic inchworm type driving device and excitation method thereof |
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| CN113114067A (en) * | 2021-05-08 | 2021-07-13 | 吉林大学 | Piezoelectric stick-slip type driving device capable of measuring distance in large stroke and distance measuring method |
| CN113114067B (en) * | 2021-05-08 | 2022-05-10 | 吉林大学 | Distance measurement method of piezoelectric stick-slip type driving device capable of measuring distance in large stroke |
| CN113612406A (en) * | 2021-08-17 | 2021-11-05 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
| CN117066917A (en) * | 2023-10-18 | 2023-11-17 | 山东理工大学 | Combined dual-mode multi-frequency vibration auxiliary processing device |
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