CN113612406A - Piezoelectric driver based on differential motion principle and control method thereof - Google Patents
Piezoelectric driver based on differential motion principle and control method thereof Download PDFInfo
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Abstract
The invention discloses a piezoelectric driver based on a differential motion principle and a control method thereof, wherein the piezoelectric driver comprises a base, a differential unit, a rotor unit and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base through screws, and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge, a left piezoelectric stack and a right piezoelectric stack, and the left piezoelectric stack and the right piezoelectric stack are symmetrically arranged in the differential flexible hinge through pretightening screws respectively; the rotor unit comprises a guide rail and a slide block connected to the guide rail in a sliding mode, and an initial gap between a driving foot of the differential flexible hinge and the slide block is adjusted through the initial gap adjusting unit. The slider slides on the guide rail under the drive of the differential flexible hinge, and the Z-shaped flexible hinge group generates elastic deformation by applying cooperative drive electric signals to the left piezoelectric stack and the right piezoelectric stack simultaneously, and can synthesize and output differential motion to realize the function of restraining the backspacing motion.
Description
Technical Field
The invention relates to the field of precision positioning, in particular to a piezoelectric driver based on a differential motion principle and a control method thereof. Compared with the piezoelectric actuator developed by the existing drive principles of stick-slip type, inertial type, parasitic type and the like, the piezoelectric actuator based on the differential motion principle and the control method thereof provided by the invention realize the suppression of the backspacing motion of the stick-slip type piezoelectric actuator on the drive principle, greatly improve the output performance and the service life of the piezoelectric actuator, and can be used for realizing the backspacing-free and high-precision positioning in the fields of precision positioning, precision/ultra-precision machining, precision optical systems, micromanipulation and the like.
Background
With the increasing demands for micro/nano positioning, processing and operation in the fields of precision positioning, precision/ultra-precision processing, precision optical systems and the like, the demands for precision positioning platforms are also more urgent. The piezoelectric stack based on the inverse piezoelectric effect is favored by researchers due to the advantages of high rigidity, high resolution, quick response and the like, and becomes a mainstream driving element of the driver. Currently, researchers have developed piezoelectric actuators based on a variety of driving principles, such as direct-push, inchworm, stick-slip, inertial, and parasitic types. The direct-push piezoelectric actuator has a very limited stroke, which is often only tens of micrometers, and the application occasion is limited. The bionic inchworm type piezoelectric actuator can output long-stroke linear motion, but the structure of the bionic inchworm type piezoelectric actuator is complex, and usually 3 or more piezoelectric stacks are needed and are driven according to a specific time sequence, so that the control and operation process is complicated. While the piezoelectric actuators of the types such as stick-slip type, inertial type and parasitic type can output linear motion with long stroke, and the structures and the control of the piezoelectric actuators of the types are relatively simple, but the back-off motion generally exists in the working process, which not only reduces the output performance of the actuator, but also shortens the service life of the actuator.
In summary, in the field of piezoelectric actuators, the rollback motion is a hot issue of research, and needs to be solved urgently. Therefore, a new piezoelectric driving principle needs to be provided, and a corresponding device and method are developed, so that the backspacing motion can be inhibited on the basis of keeping the existing stick-slip type, inertia type and parasitic type piezoelectric drivers simple in structure, simple to control and large in stroke.
Disclosure of Invention
The present invention is directed to a piezoelectric actuator based on differential motion principle and a control method thereof, which solve the above problems of the prior art. The piezoelectric actuator based on the differential motion principle has the advantages that the structure is simple, the control method is flexible, the initial gap between the driving pin and the sliding block of the differential flexible hinge can be adjusted through the knob of the fine adjustment mechanism, and under the appropriate initial gap, the differential motion can be output at the driving pin of the differential flexible hinge through the cooperative driving of the two piezoelectric stacks in the driving unit, so that the inherent backspacing motion of the piezoelectric actuator such as a stick-slip type is effectively inhibited. The invention provides a solution for researching the back movement of the piezoelectric actuator of the viscous sliding type, the parasitic type, the inertial type and the like, and has wide application prospect in the fields of precision positioning, precision/ultra-precision machining, precision optical systems, micromanipulation and the like.
The above object of the present invention is achieved by the following technical solutions, in combination with the accompanying drawings:
as an aspect of the present invention, a piezoelectric actuator based on a differential motion principle is provided, including a base 1, a differential unit, a mover unit, and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base 1, and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge 4, a left piezoelectric stack 5 and a right piezoelectric stack 8, wherein the left piezoelectric stack 5 and the right piezoelectric stack 8 are symmetrically arranged in the differential flexible hinge 4 through pretightening screws 9 respectively to realize the synthesis and output of differential motion; the rotor unit comprises a guide rail 6 and a slider 7 connected to the guide rail 6 in a sliding manner, and the slider 7 slides on the guide rail 6 under the driving of differential motion output by the differential flexible hinge 4; the initial gap adjustment unit is used to adjust the initial gap between the driving foot 406 of the differential flexible hinge 4 and the slider 7.
Further, the initial gap adjusting unit comprises a fine adjustment mechanism 2 and a vertical plate 3, the fine adjustment mechanism 2 comprises a fine adjustment knob 201, a locking screw 203, a lower sliding table 204 and an upper sliding table 205, the lower sliding table 204 is fixed on the base 1, the upper sliding table 205 is slidably connected to the lower sliding table 204 and is limited by the locking screw 203, and the fine adjustment knob 201 is used for adjusting the relative displacement between the upper sliding table 205 and the lower sliding table 204; the vertical plate 3 is fixed on the upper surface of the upper sliding table 205, the differential flexible hinge 4 is fixed on the vertical surface of the vertical plate 3 through screws, and the adjustment of the initial gap between the driving foot 406 of the differential flexible hinge 4 and the slider 7 of the mover unit is realized by rotating the fine adjustment knob 201.
Further, the differential unit comprises a differential flexible hinge 4, a left piezoelectric stack 5, a right piezoelectric stack 8 and two pre-tightening screws 9, wherein the differential flexible hinge 4 is of a symmetrical structure as a whole and comprises a fixing frame 401, a fixing hole 402, a piezoelectric stack mounting groove 403, a pre-tightening screw mounting hole 404, a Z-shaped flexible hinge group 405 and a driving pin 406; the piezoelectric stack mounting groove 403 is embedded in the fixing frame 401, the front end of the piezoelectric stack mounting groove 403 is connected with the Z-shaped flexible hinge group 405, and the rear end of the piezoelectric stack mounting groove 403 is connected with the fixing frame 401; the Z-shaped flexible hinge group 405 connects the driving feet 406 with the piezoelectric stack mounting grooves 403 on two sides respectively; the left piezoelectric stack 5 and the right piezoelectric stack 8 are respectively installed in the piezoelectric stack installation groove 403 through a pre-tightening screw 9, and the pre-tightening screw 9 acts on the rear end face of the piezoelectric stack installation groove 403 through a pre-tightening screw installation hole 404 on the fixing frame 401.
Further, the front end of the piezoelectric stack mounting groove 403 is a parallel symmetrical structure provided with a U-shaped groove, and the rear end of the piezoelectric stack mounting groove 403 is an H-shaped structure.
Further, the Z-shaped flexible hinge set 405 is composed of 4 symmetrically distributed Z-shaped hinges, one end of each Z-shaped hinge is connected to the driving pin 406, and the other end of each Z-shaped hinge is connected to the electrical stack mounting groove 403.
Further, the guide 6 of the mover unit is fixed to the boss of the base 1 by screws, and the slider 7 is positioned opposite to the driving leg 406 of the differential flexible hinge 4.
Further, when a cooperative driving electric signal is simultaneously applied to the left piezoelectric stack 5 and the right piezoelectric stack 8, the Z-shaped flexible hinge set 405 will generate elastic deformation, and further synthesize and output differential motion to suppress the rollback motion.
Further, the differential motion process is as follows:
when the voltage U is applied to only the left piezoelectric stack 5lWhen the elongation is expressed as:
xl＝nld33Ul
wherein n islThe number of layers of piezoelectric ceramic sheets of the left piezoelectric stack 5, d33As its piezoelectric constant, UlIs the magnitude of the voltage applied thereto;
after that, shift xlAmplified by the differential flexible hinge 4 and output at the driving foot 406:
xlout＝Axxl
ylout＝Ayxl
wherein A isx、AyThe displacement amplification factors of the differential flexible hinge 4 along the x axis and the y axis respectively;
similarly, when the voltage U is applied to only the right piezoelectric stack 8rThe amount of elongation and the output displacement of the drive foot are expressed as:
xr＝nrd33Ur
xrout＝Axxr
yrout＝Ayxr
wherein n isrNumber of layers of piezoelectric ceramic sheets of the right piezoelectric stack 8, d33As its piezoelectric constant, UrIs the magnitude of the voltage applied thereto;
when simultaneously applying a voltage U to the left piezoelectric stack 5 and the right piezoelectric stack 8 respectivelyl、UrTime, differenceThe movable flexible hinge 4 generates the displacement x of the left piezoelectric stack 5lThe displacement x generated by the right piezoelectric stack 8rSynthesized and output at the driving foot 406 for driving the sliding block 7 to slide on the guide rail 6, and then output motion is represented as:
xout＝xlout-xrout＝Ax(xl-xr)
yout＝ylout+yrout＝Ay(xl+xr)
the two equations above indicate the output x of the drive pin 406 along the x-axisoutDepends on the displacement x generated by the left piezoelectric stack 5lAnd the displacement x generated by the right piezoelectric stack 8rDifference x in displacement ofl-xrAnd the output y of the driving foot along the y-axis directionoutDepends on the displacement x generated by the left piezoelectric stack 5lAnd the displacement x generated by the right piezoelectric stack 8rX of the displacement suml+xr。
As another aspect of the present invention, there is also provided a method for controlling a piezoelectric actuator based on a differential motion principle, including the steps of:
step one, at the time of 0, the piezoelectric driver is in an initial state, the driving pin 406 is at a position A, an initial gap delta y between the driving pin 406 and the slider 7 is changed through an initial gap adjusting unit, the output displacement of the slider 7 is measured at the same time, and when no horizontal hysteresis part exists in an output displacement curve, the corresponding gap is defined as a zero gap; thereafter, the initial gap Δ y is appropriately enlarged;
step two, the first stage: at 0 to t1In time period along with the driving voltage UrWill slowly elongate and push the differential flexure hinge 4 to elastically deform, during which the drive foot 406 undergoes a displacement x from position a1And y1Reaching position B; in the process, the phase difference
Is defined as
Step three, the second stage: at t1～t2In a time period, drive voltage UlAnd UrKeeping the growth in synchronism, the left and right piezoelectric stacks 5 and 8 generate the same amount of elongation, during which the driving foot 406 moves forward along the y-axis by a displacement y2Until the contact force with the slide block 7 is at the position C, and generating a contact force P;
step four and a third stage: at t2～t3In a time period, drive voltage UlContinue to grow while UrBegins to fall, the two change amplitudes are the same, and the change amplitude is defined as the push voltage UpushDuring this period, the left piezoelectric stack 5 is elongated and the right piezoelectric stack 8 is contracted, both of which vary to the same extent; in the process, the driving foot 406 moves from the position C to the position D along the positive direction of the x-axis, and due to the existence of the relative movement, the static friction force f is generated and used as the driving force to drive the slide 7 to generate the same displacement x along the positive direction of the x-axis as the driving foot 4062；
Step five and a fourth stage: at t3～t4In the time period, the driving voltage U is opposite to the voltage change in the third stagelAnd UrWhen the synchronous descending is kept, the left piezoelectric stack 5 and the right piezoelectric stack 8 contract by the same amount, during which the driving foot 406 moves in the negative y-axis direction from the position D to the position E, and accordingly generates a displacement y3And separated from the slider 7; in this process, the slide 7 remains stationary at all times because no relative movement of the drive foot 406 and the slide 7 occurs in the x-direction;
step six and step five: at t4～t5During the time period, the drive pin 406 moves rapidly in the negative x-axis direction from position E by a displacement x, as opposed to the fourth phase voltage change2To position B, ready for the next cycle; in the process, the driving foot 406 and the sliding block 7 are always kept in a separated state, and the sliding block 7 cannot move backwards;
step seven, at t5～tn-1Within the time period, the driver will repeat the third to sixth steps, and the driving pin 406 will produce the corresponding productGenerating periodic differential motion, and periodically contacting and separating with the slide block 7, so as to drive the slide block 7 to perform long-stroke and non-backspacing linear motion on the guide rail 6;
step eight, at tn-1～tnDuring the time period, the drive foot 406 undergoes a displacement x from position E as the slider travels to the target point3And y4Returning to position a, this time the end of the drive process.
Further, the driving electric signal U of the left piezoelectric stack 5 and the right piezoelectric stack 8 is adjustedLAnd URNamely, the movement speed of the slide 7 is regulated and controlled.
The invention has the beneficial effects that:
the piezoelectric actuator based on the differential motion principle and the control method thereof can realize the inhibition of the backspacing motion of the viscous sliding type actuator, the parasitic type actuator, the inertial type actuator and the like on the driving principle, thereby greatly improving the output performance and the service life of the actuator. The invention has simple structure, flexible control, wide application range and strong universality, can adjust the movement speed of the slide block by adjusting the amplitude and the frequency of the cooperative driving electric signal under the set initial clearance, and has the advantage of no limit stroke on the slide block theoretically.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention and not to limit the invention
Fig. 1 is a schematic perspective view of a piezoelectric actuator based on the differential motion principle according to the present invention;
FIG. 2 is a schematic perspective view of the fine adjustment mechanism according to the present invention;
fig. 3(a) is a schematic perspective view of the vertical plate according to the present invention;
FIG. 3(b) is a schematic view of another angle of the vertical plate according to the present invention;
FIG. 4 is a schematic perspective view of the differential flexible hinge of the present invention;
FIG. 5 is a timing control diagram of electrical signals corresponding to diamond traces output by the present invention;
FIG. 6 is a timing control diagram of the output electrical signals of the present invention corresponding to the differential motion;
FIG. 7 is a trace shape of differential motion output by the present invention under different phase differences of the cooperative driving electrical signals;
FIG. 8 is a trace shape of differential motion output under different unloading voltages when the phase difference of the cooperative driving electrical signals and the driving voltage are kept constant according to the present invention;
FIG. 9 is a trace shape of differential motion output under different driving voltages when the phase difference of the cooperative driving electrical signals and the unloading voltage are kept unchanged;
FIG. 10 is a schematic diagram of the process of the present invention for implementing linear driving by the equivalent mechanism of differential motion principle; wherein,
(a) is a state schematic diagram when the driving foot is positioned at an initial position A;
(b) the process state diagram for driving the foot from the position A to the position B is shown;
(c) a schematic diagram of the process state for driving the foot from the position B to the position C;
(d) a schematic diagram of the process state for driving the foot from the position C to the position D;
(e) a schematic diagram of the process state for driving the foot from position D to position E;
(f) a schematic diagram of the process state for driving the foot from the position E to the position B;
(g) a schematic diagram of the process state for driving the foot from the position E to the position A;
FIG. 11 is an experimental graph of output displacement of the slider with time at different initial gaps when a triangular wave with a voltage amplitude of 150V and a driving frequency of 1Hz is independently applied to the right piezoelectric stack in accordance with the present invention;
FIG. 12 is an experimental graph of output displacement of a slider over time at different amplitude unload voltages with initial gap and drive frequency maintained constant in accordance with the present invention;
FIG. 13 is an experimental graph of output displacement of a slider over time under different amplitude push voltages with the unload voltage, initial gap, and drive frequency held constant in accordance with the present invention;
FIG. 14 is an experimental graph of output displacement of a slider over time at different driving frequencies while the unload voltage, the push voltage, and the initial gap remain unchanged in accordance with the present invention;
in the figure:
1-a base; 2-fine adjustment mechanism; 3, erecting a plate; 4-a differential flexible hinge; 5-left piezoelectric stack; 6-a guide rail; 7-a slide block; 8-right piezoelectric stack; 9-pre-tightening the screw; 201-fine tuning knob; 202-positioning holes; 203-locking screws; 204-a lower sliding table; 205-an upper sliding table; 401-a mount; 402-a fixation hole; 403-piezoelectric stack mounting groove; 404-pre-tightening screw mounting holes; 405-a Z-shaped flexible hinge set; 406-drive foot.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a piezoelectric actuator based on a differential motion principle includes a base 1, a differential unit, a mover unit, and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base 1 through screws, and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge 4, a left piezoelectric stack 5 and a right piezoelectric stack 8, wherein the left piezoelectric stack 5 and the right piezoelectric stack 8 are symmetrically arranged in the differential flexible hinge 4 through pretightening screws 9 respectively to realize the synthesis and output of differential motion; the rotor unit comprises a guide rail 6 and a slider 7 connected to the guide rail 6 in a sliding manner, the slider 7 slides on the guide rail 6 under the driving of the differential motion output by the differential flexible hinge 4, and the initial gap between the driving foot 406 of the differential flexible hinge 4 and the slider 7 is adjusted through the initial gap adjusting unit.
Further, as shown in fig. 2 and fig. 3, the initial gap adjusting unit includes a fine adjustment mechanism 2 and a vertical plate 3, the fine adjustment mechanism 2 includes a fine adjustment knob 201, a positioning hole 202, a locking screw 203, a lower sliding table 204 and an upper sliding table 205, the lower sliding table 204 is fixed on the base 1 by a screw, the upper sliding table 205 is slidably connected to the lower sliding table 204 and can be limited by the locking screw 203, the fine adjustment knob 201 is fixed at the end of the lower sliding table 204 by a bracket and is abutted against the upper sliding table 205 for adjusting the relative displacement between the upper sliding table 205 and the lower sliding table 204, the upper sliding table 205 is provided with a plurality of positioning holes 202, the vertical plate 3 is fixed on the upper surface of the upper sliding table 205 by a screw and the positioning hole 202, and the differential flexible hinge 4 is fixed on the vertical surface of the vertical plate 3 by a screw. The adjustment of the initial clearance between the driving foot 406 of the differential flexible hinge 4 and the slider 7 of the mover unit is realized by turning the fine adjustment knob 201 of the fine adjustment mechanism 2, and the self-locking of the fine adjustment mechanism 2 is realized by adjusting the locking screw 203.
As shown in fig. 4, further, the differential unit includes a differential flexible hinge 4, a left piezoelectric stack 5, a right piezoelectric stack 8, and two pre-tightening screws 9, and the differential flexible hinge 4 is a symmetrical structure as a whole, and includes a fixing frame 401, a fixing hole 402, a piezoelectric stack mounting groove 403, a pre-tightening screw mounting hole 404, a Z-shaped flexible hinge group 405, and a driving foot 406. The fixing frame 401 is of a C-shaped structure, and 4 fixing holes 402 are uniformly distributed on the fixing frame; the piezoelectric stack mounting groove 403 is embedded in the fixing frame 401, the front end of the piezoelectric stack mounting groove is of a parallel symmetrical structure provided with a U-shaped groove and is connected with the Z-shaped flexible hinge group 405, and the rear end of the piezoelectric stack mounting groove is of an H-shaped structure and is connected with the fixing frame 401; the piezoelectric stack mounting groove 403 is connected with the driving pin 406 through the Z-shaped flexible hinge group 405, the Z-shaped flexible hinge group 405 is composed of 4Z-shaped hinges which are symmetrically distributed, one end of each Z-shaped hinge is connected with the driving pin 406, and the other end of each Z-shaped hinge is connected with the electric stack mounting groove 403; the differential flexible hinge 4 is fixed on the front end surface of the vertical plate 3 through a fixing hole 402 on a fixing frame 401 and a screw. The pre-tightening screw 9 acts on the rear end face of the piezoelectric stack mounting groove 403 through the pre-tightening screw mounting hole 404, and is used for adjusting the pre-tightening force of the piezoelectric stack. The left piezoelectric stack 5 and the right piezoelectric stack 8 are respectively and symmetrically installed in the two piezoelectric stack installation grooves 403 of the differential flexible hinge 4 in parallel through two pre-tightening screws 9, and the pre-tightening force between the left piezoelectric stack 5, the right piezoelectric stack 8 and the piezoelectric stack installation grooves 403 can be respectively adjusted through adjusting the two pre-tightening screws 9.
Further, the rotor unit comprises a guide rail 6 and a slider 7, the guide rail 6 is fixed on the boss of the base 1 through a screw, and the slider 7 slides on the guide rail 6 under the driving action of the differential motion output by the driving foot 406.
Fig. 5 is a timing chart of an electrical signal corresponding to a diamond-shaped locus outputted by the piezoelectric driver of the present invention, where the diamond-shaped locus is an envelope curve of all differential motions outputted by the present invention. Wherein, ULIs a driving electric signal of the left piezoelectric stack 5, URIs the driving electric signal of the right piezoelectric stack 8.
As shown in fig. 6, it is a timing control diagram of the cooperative driving electrical signals corresponding to the differential motion outputted by the present invention, wherein the phase difference of the cooperative driving electrical signals affects the overall shape and size of the differential motion trajectory, the unloaded voltage affects the y-direction shape and size of the differential motion trajectory, and the pushed voltage affects the x-direction shape and size of the differential motion trajectory. By applying a cooperative driving electric signal to the left piezoelectric stack 5 and the right piezoelectric stack 8 at the same time, the Z-shaped flexible hinge set 405 will generate elastic deformation, and can synthesize and output differential motion to achieve the function of restraining the rollback motion.
As shown in fig. 7 to 9, fig. 7 is a track shape of the differential motion outputted under different phase differences of the cooperative driving electric signals according to the present invention; FIG. 8 is a trace shape of differential motion output under different unloading voltages when the phase difference of the cooperative driving electrical signals and the driving voltage are kept constant according to the present invention; fig. 9 is a trace shape of differential motion output under different driving voltages when the phase difference of the cooperative driving electric signals and the unloading voltage are kept unchanged.
The differential motion principle of the present invention is described below:
when the voltage U is applied to only the left piezoelectric stack 5lWhen the elongation is expressed as:
xl＝nld33Ul
wherein n islThe number of layers of piezoelectric ceramic sheets of the left piezoelectric stack 5, d33As its piezoelectric constant, UlIs the magnitude of the voltage applied thereto.
Then, this displacement xlAmplified by a differential flexible hinge 4 and then output at a driving pin：
xlout＝Axxl
ylout＝Ayxl
Wherein A isx、AyThe displacement magnification of the differential flexible hinge 4 along the x-axis and the y-axis respectively.
Similarly, when the voltage U is applied to only the right piezoelectric stack 8rWhen the displacement is expressed as the following, the elongation and the output displacement of the driving foot can be respectively expressed as:
xr＝nrd33Ur
xrout＝Axxr
yrout＝Ayxr
likewise, nrNumber of layers of piezoelectric ceramic sheets of the right piezoelectric stack 8, d33As its piezoelectric constant, UrIs the magnitude of the voltage applied thereto.
When simultaneously applying a voltage U to the left piezoelectric stack 5 and the right piezoelectric stack 8 respectivelyl、UrThe differential flexible hinge 4 will generate the displacement x of the left piezoelectric stack 5lThe displacement x generated by the right piezoelectric stack 8rSynthesized and output at the driving foot for driving the sliding block 7 to slide on the guide rail 6. The output motion can be expressed as:
xout＝xlout-xrout＝Ax(xl-xr)
yout＝ylout+yrout＝Ay(xl+xr)
this is the differential motion principle, and the two equations indicate the output x of the driving pin 406 along the x-axis directionoutDepends on the displacement x generated by the left piezoelectric stack 5lAnd the displacement x generated by the right piezoelectric stack 8rDifference x in displacement ofl-xrAnd the output y of the driving foot along the y-axis directionoutDepends on the displacement x generated by the left piezoelectric stack 5lAnd the displacement x generated by the right piezoelectric stack 8rX of the displacement suml+xr。
Taking forward driving as an example, when the phase difference of triangular wave voltage is changed, based on the differential motion principle, the output track of the driving foot follows the phase difference
As shown in fig. 6, the direction of movement is clockwise. Further, the triangle wave voltage waveform is modified as shown in FIG. 5 when the unload voltage U is changed separatelyunloadAnd a driving voltage UpushThe output locus of the driving foot changes as shown in fig. 7 and 8, respectively, and the moving direction is also clockwise.
Referring to fig. 5 and 9, a method for controlling a piezoelectric actuator based on a differential motion principle according to the present invention includes the steps of:
first, at time 0, the actuator is in the initial state, the driving foot 406 is in position a, the knob of the fine adjustment mechanism 2 is adjusted, the initial gap Δ y between the driving foot 406 and the slider 7 is changed, and the output displacement of the slider 7 is measured at the same time, when there is no horizontal hysteresis part in the output displacement curve, the corresponding gap is defined as zero gap, as shown in fig. 10, after which the initial gap Δ y is expanded to a suitable extent, and the locking screw 203 is adjusted to fix the initial gap Δ y, which is 30 μm in this example. As shown in fig. 10 (a).
Second, first stage: at 0 to t1In time period along with the driving voltage UrWill slowly elongate and push the differential flexure hinge 4 to elastically deform, during which the drive foot 406 undergoes a displacement x from position a1And y1Position B is reached. In the process, the phase difference
Is defined as
In this example, the phase difference
As shown in fig. 10 (b).
And a third stage: at t1～t2In a time period, drive voltage UlAnd UrKeeping the growth in synchronism, the left and right piezoelectric stacks 5 and 8 generate the same amount of elongation, during which the driving foot 406 moves forward along the y-axis by a displacement y2Until it comes into contact with the slider 7 in position C and generates a contact force P. As shown in fig. 10 (c).
Fourth and third stages: at t2～t3In a time period, drive voltage UlContinue to grow while UrBegins to fall, the two change amplitudes are the same, and the change amplitude is defined as the push voltage UpushIn this example, the driving voltage is set to U push50V. During this time, the left piezo-stack 5 is elongated and the right piezo-stack 8 is contracted to the same extent. In the process, the driving foot 406 moves from the position C to the position D along the positive direction of the x-axis, and due to the existence of the relative movement, the static friction force f is generated and used as the driving force to drive the slide 7 to generate the same displacement x along the positive direction of the x-axis as the driving foot 4062. As shown in fig. 10 (d).
A fifth stage: at t3～t4In the time period, the driving voltage U is opposite to the voltage change in the third stagelAnd UrMaintaining a synchronous fall (the magnitude of this fall is defined as the unload voltage UunloadIs set to U in this exampleunload60V), the left and right piezo stacks 5, 8 contract the same amount, during which the drive foot 406 moves in the negative y-axis direction from position D to position E, correspondingly producing a displacement y3, and separates from the slide 7, during which the slide 7 remains stationary at all times because no relative movement of the drive foot 406 and the slide 7 occurs in the x-axis direction. As shown in fig. 10 (e).
Sixth and fifth stages: at t4～t5In the time period, the voltage change opposite to the fourth stage is equivalent to the 'slip' stage in the work engineering of the stick-slip piezoelectric driver, and the driving pin 406 rapidly moves from the position E to the displacement x along the negative direction of the x axis2To position B in preparation for the next cycle. In the process, the driving foot 406 and the sliding block 7 are always in the same stateThe separated state is maintained, and therefore the slider 7 does not generate a retracting motion, i.e., the retracting motion is suppressed from the driving principle. As shown in fig. 10 (f).
Seven, at t5～tn-1In the time period, the driver repeats the steps three to six, so that the driving foot 406 generates periodic differential motion correspondingly, and is in periodic contact with and separated from the slide block 7, and further drives the slide block 7 to perform long-stroke linear motion without backspacing on the guide rail 6.
Eight, at tn-1～tnDuring the time period, the drive foot 406 undergoes a displacement x from position E as the slider travels to the target point3And y4Returning to position a marks the end of this drive sequence. The above process only takes forward driving as an example, and similarly, the driving electric signals U of the left piezoelectric stack 5 and the right piezoelectric stack 8 are convertedLAnd URThe reverse driving of the slide block 7 can be realized by mutual exchange. As shown in fig. 10 (g).
By adjusting the driving electric signal U of the left piezoelectric stack 5 and the right piezoelectric stack 8LAnd URThe frequency of the slider 7 can be adjusted and controlled.
Referring to fig. 11, it is shown an experimental graph of the output displacement of the slider 7 changing with time when the initial gap Δ y is adjusted to 10 micrometers within a range of 0 micrometers to 20 micrometers under the independent action of the triangular wave voltage with the driving frequency of 1Hz and the voltage amplitude of 150V of the right piezoelectric stack 8 of the present invention. As can be seen from the figure, when the initial gap Δ y of the knob pair of the fine adjustment mechanism 2 is adjusted to be sequentially enlarged by 10 micrometers from 0 micrometer, the horizontal stagnation portion in the output displacement curve of the slider 7 is correspondingly increased.
Referring to FIG. 12, the present invention is shown in the condition of the unloading voltage U under the action of the cooperative driving electric signal with the initial gap of 30 microns and the driving frequency of 1HzunloadAnd the output displacement of the sliding block 7 is changed along with time in an experimental curve chart of regulating 10V in a range of 0V to 60V in sequence. As can be seen from the figure, the backward movement part of the output displacement curve of the slide 7 is along with the unloading voltage UunloadIs increasing and gradually decreasing, indicating that the back-off motion of the actuator is being gradually inhibited, when the voltage is unloadedUunloadAbove 50V, the retraction movement of the driver is completely suppressed.
Referring to fig. 13 and 14, fig. 13 shows the voltage U at the unloading state according to the present invention unload60V, an initial gap delta y of 30 microns and a driving frequency of 1Hz under the action of a cooperative driving electric signalpushAn experimental curve chart of the output displacement of the slide block 7 changing along with time is obtained by sequentially adjusting 10V within the range of 10V to 90V; FIG. 14 shows the driving voltage U of the present invention push50V, the discharge voltage UunloadAn experimental curve graph of 60V, 1Hz of driving frequency is sequentially adjusted under the action of a cooperative driving electric signal with an initial gap delta y of 30 micrometers, and the output displacement of the slide block 7 changes along with time under the driving frequency ranging from 1Hz to 10 Hz; it can be seen that the discharge voltage U is maintained at the initial gap Δ yunloadUnder the premise of no change, the push voltage U is changedpushThe back-off motion of the driver is effectively suppressed at either the driving frequency or the driving frequency.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.
Claims (10)
1. A piezoelectric driver based on a differential motion principle is characterized by comprising a base (1), a differential unit, a rotor unit and an initial gap adjusting unit; the rotor unit and the initial gap adjusting unit are respectively fixed on the base (1), and the differential unit is vertically fixed on the initial gap adjusting unit; the differential unit comprises a differential flexible hinge (4), a left piezoelectric stack (5) and a right piezoelectric stack (8), wherein the left piezoelectric stack (5) and the right piezoelectric stack (8) are respectively and symmetrically arranged in the differential flexible hinge (4) through pretightening screws (9) to realize the synthesis and output of differential motion; the rotor unit comprises a guide rail (6) and a sliding block (7) connected to the guide rail (6) in a sliding mode, and the sliding block (7) slides on the guide rail (6) under the driving of differential motion output by the differential flexible hinge (4); the initial gap adjusting unit is used for adjusting the initial gap between the driving foot (406) of the differential flexible hinge (4) and the sliding block (7).
2. The piezoelectric actuator based on the differential motion principle as claimed in claim 1, wherein the initial gap adjustment unit comprises a fine adjustment mechanism (2) and a vertical plate (3), the fine adjustment mechanism (2) comprises a fine adjustment knob (201), a locking screw (203), a lower sliding table (204) and an upper sliding table (205), the lower sliding table (204) is fixed on the base (1), the upper sliding table (205) is slidably connected to the lower sliding table (204) and is limited by the locking screw (203), and the fine adjustment knob (201) is used for adjusting the relative displacement between the upper sliding table (205) and the lower sliding table (204); the vertical plate (3) is fixed on the upper surface of the upper sliding table (205), the differential flexible hinge (4) is fixed on the vertical surface of the vertical plate (3) through screws, and the adjustment of an initial gap between a driving foot (406) of the differential flexible hinge (4) and a sliding block (7) of the rotor unit is realized by rotating the fine adjustment knob (201).
3. The piezoelectric actuator based on the differential motion principle as claimed in claim 1, wherein the differential unit comprises a differential flexible hinge (4), a left piezoelectric stack (5), a right piezoelectric stack (8) and two pre-tightening screws (9), the differential flexible hinge (4) is a symmetrical structure as a whole, and comprises a fixed frame (401), a fixed hole (402), a piezoelectric stack mounting groove (403), a pre-tightening screw mounting hole (404), a Z-shaped flexible hinge group (405) and a driving pin (406); the piezoelectric stack mounting groove (403) is embedded in the fixed frame (401), the front end of the piezoelectric stack mounting groove (403) is connected with the Z-shaped flexible hinge group (405), and the rear end of the piezoelectric stack mounting groove (403) is connected with the fixed frame (401); the Z-shaped flexible hinge group (405) connects the driving feet (406) with the piezoelectric stack mounting grooves (403) on two sides respectively; the left piezoelectric stack (5) and the right piezoelectric stack (8) are respectively installed in the piezoelectric stack installation groove (403) through pre-tightening screws (9), and the pre-tightening screws (9) act on the rear end face of the piezoelectric stack installation groove (403) through pre-tightening screw installation holes (404) in the fixing frame (401).
4. A piezoelectric actuator based on the differential motion principle as claimed in claim 3, wherein the front end of the piezoelectric stack mounting groove (403) is a parallel symmetrical structure provided with U-shaped grooves, and the rear end of the piezoelectric stack mounting groove (403) is an H-shaped structure.
5. A piezoelectric actuator based on differential motion principle as claimed in claim 3, wherein the Z-shaped flexible hinge set (405) is composed of 4 symmetrically distributed Z-shaped hinges, and one end of each Z-shaped hinge is connected with the driving foot (406) and the other end is connected with the piezoelectric stack mounting groove (403).
6. A piezo-electric drive based on the differential motion principle as claimed in claim 1, characterized in that the guide rail (6) of the mover unit is fixed on the boss of the base (1) by means of screws, and the slider (7) is located opposite to the drive foot (406) of the differential flexible hinge (4).
7. A piezoelectric actuator based on differential motion principle as claimed in claim 1, wherein when the cooperative driving electric signals are applied to the left piezoelectric stack (5) and the right piezoelectric stack (8) simultaneously, the Z-shaped flexible hinge set (405) will generate elastic deformation, and then synthesize and output differential motion to suppress the backset motion.
8. A piezoelectric actuator based on differential motion principle as claimed in claim 7, wherein the differential motion process is:
when a voltage U is only applied to the left piezoelectric stack (5)lWhen the elongation is expressed as:
xl＝nld33Ul
wherein n islThe left piezoelectric stack (5) has the number of piezoelectric ceramic pieces d33As its piezoelectric constant, UlIs the magnitude of the voltage applied thereto;
after that, shift xlThe output is output at a driving foot (406) after being amplified by a differential flexible hinge (4):
xlout＝Axxl
ylout＝Ayxl
wherein A isx、AyThe displacement amplification factors of the differential flexible hinge (4) along the x axis and the y axis are respectively;
similarly, when the voltage U is only applied to the right piezoelectric stack (8)rThe amount of elongation and the output displacement of the drive foot are expressed as:
xr＝nrd33Ur
xrout＝Axxr
yrout＝Ayxr
wherein n isrThe number of layers of piezoelectric ceramic pieces provided for the right piezoelectric stack (8), d33As its piezoelectric constant, UrIs the magnitude of the voltage applied thereto;
when a voltage U is simultaneously applied to the left piezoelectric stack (5) and the right piezoelectric stack (8) respectivelyl、UrWhen in use, the differential flexible hinge (4) makes the displacement x generated by the left piezoelectric stack (5)lAnd the displacement x generated by the right piezoelectric stack (8)rAnd the output is synthesized and is output at a driving foot (406) and is used for driving a sliding block (7) to slide on a guide rail (6), and the output motion is expressed as:
xout＝xlout-xrout＝Ax(xl-xr)
yout＝ylout+yrout＝Ay(xl+xr)
the above two equations indicate the output x of the drive pin (406) along the x-axis directionoutDepends on the displacement x generated by the left piezoelectric stack (5)lAnd the displacement x generated by the right piezoelectric stack (8)rDifference x in displacement ofl-xrAnd the output y of the driving foot along the y-axis directionoutDepends on the displacement x generated by the left piezoelectric stack (5)lAnd the displacement x generated by the right piezoelectric stack (8)rX of the displacement suml+xr。
9. A control method of a piezoelectric actuator based on a differential motion principle as claimed in claim 1, comprising the steps of:
step one, at the time of 0, a piezoelectric driver is in an initial state, a driving pin (406) is at a position A, an initial gap delta y between the driving pin (406) and a sliding block (7) is changed through an initial gap adjusting unit, the output displacement of the sliding block (7) is measured at the same time, and when no horizontal hysteresis part exists in an output displacement curve, a corresponding gap is defined as a zero gap; thereafter, the initial gap Δ y is appropriately enlarged;
step two, the first stage: at 0 to t1In time period along with the driving voltage UrWill slowly elongate and push the differential flexible hinge (4) to elastically deform, during which the drive foot (406) undergoes a displacement x from position a1And y1Reaching position B; in the process, the phase difference
Is defined as
Step three, the second stage: at t1～t2In a time period, drive voltage UlAnd UrThe synchronous growth is kept, and correspondingly, the left piezoelectric stack (5) and the right piezoelectric stack (8) generate the same elongation, and during the process, the driving foot (406) moves forwards along the y axis for displacement y2Until the sliding block (7) is contacted with the position C, and generating a contact force P;
step four and a third stage: at t2～t3In a time period, drive voltage UlContinue to grow while UrBegins to fall, the two change amplitudes are the same, and the change amplitude is defined as the push voltage UpushDuring this period, the left piezoelectric stack (5) is extended and the right piezoelectric stack (8) is contracted to the same extent; in the process, the driving foot (406) moves from the position C to the position D along the positive direction of the x axis, and due to the existence of relative movement, static friction force f is generated and used as a driving force to drive the slide block (7) to generate the same displacement x as the driving foot (406) along the positive direction of the x axis2；
Step five and a fourth stage: at t3～t4In the time period, the driving voltage U is opposite to the voltage change in the third stagelAnd UrWhen the synchronous descending is kept, the left piezoelectric stack (5) and the right piezoelectric stack (8) generate the same contraction quantity, in the period, the driving foot (406) moves from the position D to the position E along the negative direction of the y axis, and correspondingly generates the displacement y3And is separated from the sliding block (7); in the process, the slide block (7) is kept still all the time because the driving foot (406) and the slide block (7) do not generate relative motion in the direction of the x axis;
step six and step five: at t4～t5During the time period, the drive pin (406) is rapidly moved in the negative x-axis direction from position E by a displacement x, opposite the fourth phase voltage change2To position B, ready for the next cycle; in the process, the driving foot (406) and the sliding block (7) are always kept in a separated state, and the sliding block (7) cannot move backwards;
step seven, at t5～tn-1In the time period, the driver repeats the steps three to six, the driving foot (406) generates periodic differential motion correspondingly, and is in periodic contact with and separated from the sliding block (7), so that the sliding block (7) is driven to perform long-stroke linear motion without backspacing on the guide rail (6);
step eight, at tn-1～tnDuring the time period, when the slider is operated to the target point, the drive foot (406) undergoes a displacement x from the position E3And y4Returning to position a, this time the end of the drive process.
10. A control method of a piezoelectric actuator based on differential motion principle as claimed in claim 9, characterized in that the drive electric signal U of the left piezoelectric stack (5) and the right piezoelectric stack (8) is adjustedLAnd URThe control of the movement speed of the slide block (7) is realized.
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