CN114584001A - Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method - Google Patents

Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method Download PDF

Info

Publication number
CN114584001A
CN114584001A CN202210275205.5A CN202210275205A CN114584001A CN 114584001 A CN114584001 A CN 114584001A CN 202210275205 A CN202210275205 A CN 202210275205A CN 114584001 A CN114584001 A CN 114584001A
Authority
CN
China
Prior art keywords
impact
driver
displacement
slip
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210275205.5A
Other languages
Chinese (zh)
Inventor
黄虎
刘艳伟
徐智
李轩
孙午向
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jilin University
Original Assignee
Jilin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jilin University filed Critical Jilin University
Priority to CN202210275205.5A priority Critical patent/CN114584001A/en
Publication of CN114584001A publication Critical patent/CN114584001A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention relates to a composite stick-slip and impact multi-mode driver and a linear smooth motion implementation method, and belongs to the field of precision machinery. The multi-mode driver includes a motion unit, a friction track, a preload mechanism, a base plate, and a proof mass. The linear smooth motion implementation method comprises the following steps: the displacement of stick-slip and impact are combined, the voltage amplitude of the impact is adjusted, the impact displacement of the impact is equal to the back-off displacement of the stick-slip, and the piezoelectric driver can realize linear smooth motion. The multi-mode driver has three working modes, namely an inertial stick-slip mode, an inertial impact mode and a composite driving mode, can realize that one piezoelectric driver works in various scenes, and increases the adaptability of the piezoelectric driver to the environment; the composite driving method is simple in control and controllable in regulation of voltage amplitude, and linear smooth motion can be achieved under no-load and load. Has important application value in the fields of biological cell engineering, integrated circuit packaging and precise optics.

Description

Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method
Technical Field
The invention relates to the field of precision machinery, in particular to a composite stick-slip and impact multi-mode driver and a linear smooth motion implementation method. The invention provides a multi-mode driver with three working modes, which combines stick-slip and impact; meanwhile, a technical method for compensating the backspacing motion by using the impact displacement to realize the linear smooth motion of the driver is provided. Has important application value in the fields of biological cell engineering, integrated circuit packaging and precise optics.
Background
The stick-slip piezoelectric driver has the advantages of compact structure, simple control, capability of realizing large-stroke displacement and the like, is widely concerned in the technical field of precision driving and is applied to the fields of precision positioning, biological cell engineering, integrated circuit packaging and the like.
However, the piezoelectric actuator has a backspacing displacement, which affects output performances such as output speed and positioning accuracy of the actuator, and limits the application field of the actuator. The inhibition of the rollback movement of the stick-slip actuator, and the elimination of the effects of the rollback movement to improve the output performance of the actuator, is a key issue for current researchers. The current methods for suppressing rollback mainly include the following four methods: modulating control waveform, adjusting pretightening force, coordinating movement and sequential control, and adding auxiliary structure. However, the above methods have respective disadvantages: modulation control waveforms are difficult to control and generally require high frequency operation, which increases control difficulty and also reduces the life of the driver; the pre-tightening force is adjusted to have strict requirements on the working environment of the driver, and the load capacity is reduced; the cooperative motion and the sequential control need to provide two paths of control signals with phase difference, and the requirement on the two paths of control signals is higher; the auxiliary structure is added and designed based on experience, so that the structure has no calculability and poor active control. Therefore, it is worth to further study and solve the problems to propose a simple and effective method and driver for implementing linear smooth motion.
Disclosure of Invention
The invention aims to provide a composite stick-slip and impact multi-mode driver and a linear smooth motion implementation method. An integrated flexible mechanism is designed by rigidly connecting stick-slip and impact, and the provided multi-mode driver with three working modes has the function of working under various scenes, so that the adaptability of the driver to the environment is improved; based on the idea of compensating the backspacing motion by using the impact displacement, when the voltage amplitudes of stick-slip and impact are respectively adjusted, the impact displacement of the impact is equal to the backspacing displacement of the stick-slip, and the linear smooth motion of the driver is realized.
The above object of the present invention is achieved by the following technical solutions:
a composite stick-slip and impact multi-mode driver is composed of a motion unit 1, a friction track 2, a preloading mechanism 3, a substrate 4 and a mass block 5; the friction track 2 is arranged on the preloading mechanism 3, and the preloading mechanism 3 is fixed on the substrate 4;
the motion unit 1 comprises an integrated compliant mechanism 1-1, a piezoelectric stack A1-2, a piezoelectric stack B1-3, a wedge-shaped block 1-4, a connecting plate 1-5 and a guide sliding group 1-6; the integrated compliant mechanism 1-1 comprises a lever amplification compliant mechanism 1-1-1 of a stick-slip part and a butterfly amplification compliant mechanism 1-1-2 of an impact part, and the two parts are rigidly connected and integrated into a whole; the piezoelectric stacks A1-2 and the piezoelectric stacks B1-3 are respectively pre-tightened and installed in grooves of the lever amplification compliant mechanism 1-1-1 and the butterfly amplification compliant mechanism 1-1-2 by wedge blocks 1-4; the upper part and the lower part of the connecting plate 1-5 are respectively connected with the integrated compliant mechanism 1-1 and the sliding block of the guide sliding group 1-6 by screws; the guide rails of the guide sliding groups 1-6 are arranged on the base through screws;
the front end of a lever of the integrated flexible mechanism 1-1 is used as a driving foot to be in contact with the friction track 2, and the pre-tightening is carried out by rotating a knob of the pre-loading mechanism 3.
The three working modes of the composite stick-slip and impact multi-mode driver are respectively realized as follows:
a) when excitation voltage is applied to the piezoelectric stack A1-2 independently, only the lever amplification compliant mechanism 1-1-1 is stressed and deformed, and the driver moves under the action of friction force and is in an inertial stick-slip mode;
b) when excitation voltage is applied to the piezoelectric stack B1-3 independently, only the butterfly amplification compliant mechanism 1-1-2 is stressed and deformed, and the driver moves under the action of inertia force and is in an inertia impact mode;
c) when excitation voltage is simultaneously applied to the piezoelectric stacks A1-2 and the piezoelectric stacks B1-3, the lever amplification compliant mechanism 1-1-1 and the butterfly amplification compliant mechanism 1-1-2 deform simultaneously, and the driver generates displacement under the combined action of friction force and inertia force, so that the composite driving mode is realized.
One method of compensating for backlash with impact to achieve linear smooth motion is as follows:
a) under the excitation of voltage, the stick-slip driver generates a backspacing displacement deltad in a 'slip stage';
b) under the excitation of voltage, the impact driver generates impact displacement S in an' impact stageImpact of；
c) Under the excitation of voltage with same frequency and phase, the output displacements of the stick-slip driver and the impact driver are compounded to obtain a compound displacement delta S ═ SImpact of-δd；
d) Under the condition of the stick-slip excitation voltage with a fixed amplitude, the amplitude of the impact excitation voltage is adjusted to enable the delta S to be 0, namely the impact displacement is used for compensating the backspacing motion to achieve linear smooth motion.
The specific implementation process of the multi-mode driver for realizing the linear smooth motion comprises the following steps:
a) connecting the piezoelectric stacks A1-2 and B1-3 with the voltage of an input end respectively, wherein the two voltage input signals have the same frequency and phase; adjusting the amplitude of the access voltage of the piezoelectric stack A1-2 to be UAThe amplitude of the access voltage of the piezoelectric stack B1-3 is UB；
b) Under no load, the voltage of the piezoelectric stack A1-2 is UA-FWhile the stick-slip part of the driver generates a step displacement S1And a backspacing displacement Δ d; the voltage of the piezoelectric stack B1-3 is UB-FWhen the driver is driven, the impact part of the driver generates impact displacement of delta S; under the voltage, the impact displacement is equal to the backspacing displacement, namely delta S is equal to delta d, and the linear smooth motion of the driver under no load is realized;
c) within the load capacity of the driver, when the voltage amplitudes of the piezoelectric stacks A1-2 and the piezoelectric stacks B1-3 are respectively adjusted to beUA-L、UB-LWhen the impact displacement is equal to the backspacing displacement, namely delta 'S is equal to delta'd, linear smooth motion under load is realized;
d) by applying a continuous periodic voltage, a continuous linear smooth motion of the driver is achieved.
The invention has the following effects: the impact displacement is utilized to compensate the backspacing displacement, the backspacing motion is inhibited to realize linear smooth motion, and the defects of ultrasonic abrasion, load rejection capability, complex control and the like of the conventional smooth motion are overcome; the multi-mode driver has three working modes, namely a stick-slip mode, an impact mode and a composite driving mode, can realize that one driver works under various scenes, increases the adaptability of the driver to the environment, and expands the practicability and the application field of the driver.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic perspective view of a composite stick-slip and impact multi-mode actuator of the present invention;
FIG. 2 is a schematic perspective view of a moving unit of the multi-mode driver of the present invention;
FIG. 3 is a schematic perspective view of an integrated compliant mechanism of the multi-mode actuator of the present invention;
FIG. 4 is a schematic diagram of an implementation of a method for compensating for a rollback motion with an impact displacement to achieve a linear smooth motion;
FIG. 5 is an output characteristic of the multi-mode driver of the present invention at idle;
FIG. 6 is an output characteristic of the multi-mode driver of the present invention under a 1N load;
in the figure: 1. a motion unit; 1-1, an integrated compliant mechanism; 1-1-1, a lever amplification compliant mechanism; 1-1-2, a butterfly amplification compliant mechanism; 1-2, a piezoelectric stack A; 1-3, piezoelectric stack B; 1-4, wedge-shaped blocks; 1-5, connecting plates; 1-6, a guide sliding group; 2. rubbing the rail; 3. a preload mechanism; 4. a substrate; 5. and a mass block.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1, the composite stick-slip and impact multi-mode driver of the present invention is composed of a motion unit 1, a friction track 2, a preloading mechanism 3, a substrate 4 and a mass block 5; the friction track 2 is arranged on the preloading mechanism 3, and the preloading mechanism 3 is fixed on the substrate 4;
referring to fig. 2 and 3, the motion unit 1 comprises an integrated compliance mechanism 1-1, a piezoelectric stack A1-2, a piezoelectric stack B1-3, a wedge block 1-4, a connecting plate 1-5 and a guide sliding set 1-6; the integrated compliant mechanism 1-1 comprises a lever amplification compliant mechanism 1-1-1 of a stick-slip part and a butterfly amplification compliant mechanism 1-1-2 of an impact part, and the two parts are rigidly connected and integrated into a whole; the piezoelectric stacks A1-2 and the piezoelectric stacks B1-3 are respectively pre-tightened and installed in grooves of the lever amplification compliant mechanism 1-1-1 and the butterfly amplification compliant mechanism 1-1-2 by wedge blocks 1-4; the upper part and the lower part of the connecting plate 1-5 are respectively connected with the integrated compliant mechanism 1-1 and the sliding block of the guide sliding group 1-6 by screws; the guide rails of the guide sliding groups 1-6 are arranged on the base through screws;
the front end of a lever of the integrated flexible mechanism 1-1 is used as a driving foot to be in contact with the friction track 2, and the pre-tightening is carried out by rotating a knob of the pre-loading mechanism 3.
Referring to the three-dimensional structure of the driver in fig. 1 to 3, the three operation modes of the composite stick-slip and impact multi-mode driver are respectively realized as follows:
a) when excitation voltage is applied to the piezoelectric stack A1-2 independently, only the lever amplification compliant mechanism 1-1-1 is stressed and deformed, and the driver moves under the action of friction force and is in an inertial stick-slip mode;
b) when excitation voltage is applied to the piezoelectric stack B1-3 independently, only the butterfly amplification compliant mechanism 1-1-2 is stressed and deformed, and the driver moves under the action of inertia force and is in an inertia impact mode;
c) when excitation voltage is simultaneously applied to the piezoelectric stacks A1-2 and the piezoelectric stacks B1-3, the lever amplification compliant mechanism 1-1-1 and the butterfly amplification compliant mechanism 1-1-2 deform simultaneously, and the driver generates displacement under the combined action of friction force and inertia force, so that the composite driving mode is realized.
Referring to fig. 4, one method of compensating for rollback with impact to achieve linear smooth motion is as follows:
a) under the excitation of voltage, the stick-slip driver generates a backspacing displacement deltad in a 'slip stage';
b) under the excitation of voltage, the impact driver generates impact displacement S in an' impact stageImpact of；
c) Under the excitation of voltage with same frequency and phase, the output displacements of the stick-slip driver and the impact driver are compounded to obtain a compound displacement delta S ═ SImpact of-δd；
d) Output displacement Δ l — nd of the piezoelectric stack33U, where n is the number of piezoelectric ceramic layers, d33Is the piezoelectric constant, U is the excitation voltage;
so impact displacement xImpact of＝λImpact of×Δl＝nλImpact ofd33U, in the formula of lambdaImpact ofFor the output amplification ratio of the impact driver, it can be seen that the impact displacement is proportional to the value of the excitation voltage, i.e., xImpact ofOc U, so the magnitude of the impulse displacement can be changed by adjusting the voltage value;
under the excitation voltage of stick-slip with fixed amplitude, the amplitude of the excitation voltage of impact is adjusted to make δ S equal to 0, namely the linear smooth motion is realized by compensating the backspacing motion through impact displacement.
Referring to fig. 5 and 6, under no load, the voltage of the piezoelectric stack A1-2 is UA-FWhile the stick-slip part of the driver generates a step displacement S1And a backspacing displacement Δ d; the voltage of the piezoelectric stack B1-3 is UB-FWhen the driver is driven, the impact part of the driver generates impact displacement of delta S; under the voltage, the impact displacement is equal to the backspacing displacement, namely delta S is equal to delta d, and the linear smooth motion of the driver under no load is realized; within the load capacity of the driver, when the voltage amplitudes of the piezoelectric stacks A1-2 and the piezoelectric stacks B1-3 are adjusted to be U respectivelyA-L、UB-LAt the same time, satisfy the impact displacement and the likeRealizing linear smooth motion under load at backspacing displacement, namely delta 'S-delta'd; by applying a continuous periodic voltage, a continuous linear smooth motion of the driver is achieved.
Referring to fig. 5, in the multi-mode driver, under the no-load state, the voltage amplitude of the piezoelectric stack a is 100V, and the displacement output characteristic obtained after changing the voltage amplitude of the piezoelectric stack B shows that when the voltage is 20V to 30V, the displacement curve has good linear smoothness.
Referring to fig. 6, in the multi-mode driver, under a 1N load condition, the voltage amplitude of the piezoelectric stack a is 100V, and the displacement output characteristic obtained after changing the voltage amplitude of the piezoelectric stack B shows that when the voltage is 90V to 100V, the displacement curve has good linear smoothness.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.

Claims (4)

1. A composite stick-slip and impact multi-mode driver, comprising: the multi-mode driver consists of a motion unit (1), a friction track (2), a preloading mechanism (3), a substrate (4) and a mass block (5); the friction track (2) is arranged on the preloading mechanism (3), and the preloading mechanism (3) is fixed on the substrate (4);
the motion unit (1) comprises an integrated compliant mechanism (1-1), a piezoelectric stack A (1-2), a piezoelectric stack B (1-3), wedge blocks (1-4), connecting plates (1-5) and a guide sliding group (1-6); the integrated flexible mechanism (1-1) comprises a lever amplification flexible mechanism (1-1-1) of a stick-slip part and a butterfly amplification flexible mechanism (1-1-2) of an impact part, and the two parts are rigidly connected and integrated into a whole; a wedge-shaped block (1-4) is used for respectively pre-tightening and installing a piezoelectric stack A (1-2) and a piezoelectric stack B (1-3) in grooves of a lever amplification compliant mechanism (1-1-1) and a butterfly amplification compliant mechanism (1-1-2); the upper part and the lower part of the connecting plate (1-5) are respectively connected with the integrated compliant mechanism (1-1) and the sliding block of the guide sliding group (1-6) by screws; the guide rails of the guide sliding groups (1-6) are arranged on the base through screws;
the front end of a lever of the integrated flexible mechanism (1-1) is used as a driving foot to be in contact with the friction track (2), and is pre-tightened by rotating a knob of the pre-loading mechanism (3).
2. The three operating modes of a compound stick-slip and impact multi-mode driver according to claim 1, characterized by the following: the three working modes are respectively realized as follows:
a) when excitation voltage is applied to the piezoelectric stack A (1-2) independently, only the lever amplification compliant mechanism (1-1-1) is stressed and deformed, and the driver moves under the action of friction force and is in an inertial stick-slip mode;
b) when excitation voltage is applied to the piezoelectric stack B (1-3) independently, only the butterfly amplification compliant mechanism (1-1-2) is stressed to deform, and the driver moves under the action of inertia force and is in an inertia impact mode;
c) when excitation voltage is applied to the piezoelectric stacks A (1-2) and B (1-3) at the same time, the lever amplification compliant mechanism (1-1-1) and the butterfly amplification compliant mechanism (1-1-2) deform at the same time, and the driver generates displacement under the combined action of friction force and inertia force, so that the composite driving mode is realized.
3. A linear smooth motion implementation method is mainly characterized in that: the method for compensating for the backspacing motion by the impact displacement to realize the linear smooth motion comprises the following steps:
a) under the excitation of voltage, the stick-slip driver generates a backspacing displacement deltad in a 'slip stage';
b) under the excitation of voltage, the impact driver generates impact displacement S in an' impact stageImpact of；
c) Under the excitation of voltage with same frequency and phase, the output displacements of the stick-slip driver and the impact driver are compounded to obtain a compound displacement delta S ═ SImpact of-δd；
d) Under the excitation voltage of stick-slip with fixed amplitude, the amplitude of the excitation voltage of impact is adjusted to make δ S equal to 0, namely the linear smooth motion is realized by compensating the backspacing motion through impact displacement.
4. The method for realizing linear smooth motion of the composite stick-slip and impact multi-mode driver based on the claim 1 is characterized by comprising the following steps: the specific implementation of the linear smooth motion of the multi-mode driver includes the following steps:
a) the piezoelectric stacks A (1-2) and B (1-3) are respectively connected with input end voltage, and the two voltage input signals have the same frequency and phase; adjusting the amplitude of the access voltage of the piezoelectric stack A (1-2) to be UAThe amplitude of the access voltage of the piezoelectric stack B (1-3) is UB；
b) When no load, the voltage of the piezoelectric stack A (1-2) is UA-FWhile the stick-slip part of the driver generates a step displacement S1And a backspacing displacement Δ d; the voltage of the piezoelectric stack B (1-3) is UB-FWhen the driver is driven, the impact part of the driver generates impact displacement of delta S; under the voltage, the impact displacement is equal to the backspacing displacement, namely delta S is equal to delta d, and the linear smooth motion of the driver under no load is realized;
c) in the load range of the driver, when the voltage amplitudes of the piezoelectric stacks A (1-2) and B (1-3) are adjusted to be U respectivelyA-L、UB-LWhen the impact displacement is equal to the backspacing displacement, namely delta 'S is equal to delta'd, linear smooth motion under load is realized;
d) by applying a continuous periodic voltage, a continuous linear smooth motion of the driver is achieved.
CN202210275205.5A 2022-03-21 2022-03-21 Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method Pending CN114584001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210275205.5A CN114584001A (en) 2022-03-21 2022-03-21 Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210275205.5A CN114584001A (en) 2022-03-21 2022-03-21 Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method

Publications (1)

Publication Number Publication Date
CN114584001A true CN114584001A (en) 2022-06-03

Family

ID=81783169

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210275205.5A Pending CN114584001A (en) 2022-03-21 2022-03-21 Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method

Country Status (1)

Country Link
CN (1) CN114584001A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107104608A (en) * 2017-06-20 2017-08-29 吉林大学 Precision Piezoelectric linear drives platform based on stick-slip inertia
CN111614284A (en) * 2020-06-19 2020-09-01 吉林大学 Force control device and method for inhibiting rollback motion of stick-slip piezoelectric actuator
CN113258825A (en) * 2021-05-31 2021-08-13 吉林大学 Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof
CN113708661A (en) * 2021-08-30 2021-11-26 吉林农业科技学院 Piezoelectric inertia impact type in-pipe moving device and moving method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107104608A (en) * 2017-06-20 2017-08-29 吉林大学 Precision Piezoelectric linear drives platform based on stick-slip inertia
CN111614284A (en) * 2020-06-19 2020-09-01 吉林大学 Force control device and method for inhibiting rollback motion of stick-slip piezoelectric actuator
CN113258825A (en) * 2021-05-31 2021-08-13 吉林大学 Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof
CN113708661A (en) * 2021-08-30 2021-11-26 吉林农业科技学院 Piezoelectric inertia impact type in-pipe moving device and moving method

Similar Documents

Publication Publication Date Title
US7834519B2 (en) Method and device for precisely resisting and moving high load
CN109676403B (en) Large-stroke high-speed high-precision macro-micro composite motion platform
CN115242121B (en) Piezoelectric stepping actuator based on synchronous double-foot drive
CN104467525A (en) Pretightening force adjustable inertial stick-slip drive trans-dimension precision locating platform
CN111030505A (en) Secondary displacement amplification type piezoelectric driver
CN112803829B (en) Friction asymmetric inertia piezoelectric linear driving device and method
CN109296895B (en) X-Z long-stroke high-speed scanning device
CN110912444B (en) Bionic creeping type piezoelectric actuator
CN110768571B (en) Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle
CN110798094B (en) Piezoelectric linear precision driving device based on parasitic inertia principle
CN114584001A (en) Composite stick-slip and impact multi-mode driver and linear smooth motion implementation method
CN111049421A (en) Piezoelectric linear driving device simulating sliding plate movement design and control method
CN211183830U (en) Secondary displacement amplification type piezoelectric driver
CN212572421U (en) Force control device for restraining rollback motion of stick-slip piezoelectric actuator
CN113726216A (en) Non-same-frequency double-stator driving piezoelectric motor
Egashira et al. 0.69 nm resolution ultrasonic motor for large stroke precision stage
CN111614284A (en) Force control device and method for inhibiting rollback motion of stick-slip piezoelectric actuator
CN113612406A (en) Piezoelectric driver based on differential motion principle and control method thereof
CN112865593B (en) Bionic impact piezoelectric driver with high output performance and control method thereof
CN102136811B (en) Multi-pin clamping type piezoelectric motor
CN110798093B (en) Linear piezoelectric precision driving platform
CN215498762U (en) Friction regulation and control type inertia piezoelectric motor
Fu et al. Piezoelectric inchworm-type probe-approaching stepper
CN116587277B (en) Inertial piezoelectric driven planar three-degree-of-freedom mobile robot and driving method
CN114567200A (en) Flexible parallel four-link amplifying mechanism type piezoelectric stick-slip linear platform

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination