CN211183830U - Secondary displacement amplification type piezoelectric driver - Google Patents
Secondary displacement amplification type piezoelectric driver Download PDFInfo
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- CN211183830U CN211183830U CN202020189081.5U CN202020189081U CN211183830U CN 211183830 U CN211183830 U CN 211183830U CN 202020189081 U CN202020189081 U CN 202020189081U CN 211183830 U CN211183830 U CN 211183830U
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Abstract
The utility model relates to a secondary displacement amplification type piezoelectric actuator belongs to piezoelectricity precision drive field. The device comprises a stator, a pre-tightening mechanism, a mover, a base and the like. The stator is fixedly arranged on the base through a pre-tightening mechanism, and the stator and the rotor realize positioning and driving transmission in an elastic contact mode. The stator comprises a triangular flexible hinge displacement amplification mechanism, a driving foot, a hexagonal flexible hinge displacement amplification mechanism and a piezoelectric stack actuator. The driving foot is a circular arc-shaped thin metal plate, two identical flexible thin plates are arranged on the metal plate, are symmetrically arranged and are flexibly connected with the metal plate. Through applying the control signal of telecommunication to piezoelectric stack actuator, promote the flexible hinge mechanism of amplifying and produce forward displacement and then realize displacement and enlarge, arc drive foot produces self bending deformation simultaneously, and the flexible sheet metal receives the positive pressure change and produces self elongation, realizes that the secondary displacement enlargies. Has the advantages of simple structure, high precision, large stroke and the like.
Description
Technical Field
The utility model relates to a miniature precision drive field, in particular to secondary displacement amplification type piezoelectric actuator.
Background
The high-precision positioning technology is a hot problem of research in the future, and the piezoelectric driver is the core research content thereof. At present, the piezoelectric actuator plays a key role in the fields of aerospace, ultra-precision machining and the like. Although the traditional piezoelectric driver has high driving speed, the traditional piezoelectric driver is often not compact enough in structure, low in resolution and poor in motion accuracy. With the improvement of the technological level, the traditional piezoelectric actuator can not meet the requirement, and the research on a novel piezoelectric actuator with high speed, high precision and miniaturization is one of the most important problems at present.
Disclosure of Invention
An object of the utility model is to provide a secondary displacement amplification type piezoelectric actuator has solved the above-mentioned problem that prior art exists. Traditional direct action formula piezoelectric actuator often the displacement is less, in order to reach the purpose of enlargiing the displacement, enlargies the mechanism through flexible hinge and reaches the displacement and enlarge the effect once, carries out surface treatment to the drive foot simultaneously and reaches the secondary displacement and enlarge the effect. The secondary displacement amplification type piezoelectric linear driver utilizes the micro deformation and force generated by the inverse piezoelectric effect of the piezoelectric stack to drive the flexible hinge amplification mechanism to generate overall large displacement, and positive pressure is generated to deform the surface of the driving foot so as to achieve the effect of secondary displacement amplification. The utility model discloses a secondary displacement amplification type piezoelectricity linear actuator can realize the motion of big stroke, high accuracy, heavy load, can realize the linear motion of positive and negative two directions simultaneously. The triangular flexible hinge mechanism of the piezoelectric linear driver can amplify the small deformation of the piezoelectric stack to generate large forward motion, so that primary displacement amplification is achieved, and meanwhile, the driving foot can generate deformation to achieve secondary displacement amplification.
The above object of the utility model is realized through following technical scheme:
the secondary displacement amplification type piezoelectric driver comprises a base 1, a sliding block 2, a stator 3 and a pre-tightening mechanism 4, wherein the sliding block 2 and the pre-tightening mechanism 4 are both arranged on the base 1, and the stator 3 is arranged on the pre-tightening mechanism 4 and is in elastic contact with the sliding block 2;
the stator 3 comprises a first hexagonal flexible hinge mechanism 3-1, a second hexagonal flexible hinge mechanism 3-2, a third triangular flexible hinge 3-3, an arc-shaped driving foot 3-4, a first piezoelectric stack 3-5, a second piezoelectric stack 3-6, a first mounting hole 3-7 and a second mounting hole 3-8, wherein the first hexagonal flexible hinge mechanism 3-1 comprises a first bottom fixing beam 3-1-1, a first side flexible hinge 3-1-2 and a first top connecting beam 3-1-3; two ends of the piezoelectric stack I3-5 are respectively connected with the bottom fixed beam I3-1-1 and the top connecting beam I3-1-3 in a tight fit mode; the hexagonal flexible hinge mechanism I3-1 is fixed on the pre-tightening mechanism 4 through the mounting hole I3-7; the hexagonal flexible hinge mechanism II 3-2 and the hexagonal flexible hinge mechanism I3-1 are completely the same in structure and are symmetrically arranged on the pre-tightening mechanism 4; the triangular flexible hinge 3-3 comprises a first hinge 3-3-1 and a second hinge 3-3-2, the first top connecting beam 3-1-3 is connected with the bottom of the first hinge 3-3-1 of the triangular flexible hinge 3-3, and the second top connecting beam 3-2-3 is connected with the bottom of the second hinge 3-3-2 of the triangular flexible hinge 3-3.
The arc-shaped driving foot 3-4 comprises an arc thin plate 3-4-1, a flexible thin plate I3-4-2 and a flexible thin plate II 3-4-3, wherein the arc thin plate 3-4-1 is an easily-deformable metal thin plate and is flexibly connected with the top of a triangular flexible hinge 3-3, the included angles between the arc thin plate 3-4-1 and the top of the triangular flexible hinge 3-3 are theta 1 and theta 2 respectively, the surface of the arc thin plate 3-4-1 is provided with the flexible thin plate I3-4-2 and the flexible thin plate II 3-4-3 which are symmetrically arranged, the flexible thin plate I3-4-2 and the arc thin plate 3-4-1 are inclined at an angle of α 1 degrees and have a radian of β 1 per se, the flexible thin plate II 3-4-3 and the arc thin plate 3-4-1 are inclined at an angle of α 2 radians and have a radian of β 2 per se, and the flexible thin plate I3-4-2 and the flexible thin plate II 3-4-3 are in.
When the slider 2 needs to move in the positive direction along the x axis, a sawtooth wave electric signal is applied to the first piezoelectric stack 3-5, y-axis positive displacement is generated at the bottom of the first hinge 3-3-1 of the triangular flexible hinge 3-3, the triangular flexible hinge 3-3 integrally inclines rightwards under the limitation of the slider 2 at the top, an imaginary movement track of a contact point of the circular arc driving foot 3-4 and the slider 2 can be decomposed into x-direction displacement and y-direction displacement, when the circular arc driving foot 3-4 is tightly contacted with the slider 2, the circular arc thin plate 3-4-1 of the circular arc driving foot 3-4 generates self deformation under positive pressure, because only the first piezoelectric stack 3-5 extends, a force point is concentrated on the left side, theta 1 is reduced, theta 2 is increased, the self radian β 1 of the first flexible thin plate 3-4-2 is reduced, α 1 formed by the circular arc thin plate 3-4-1 is reduced and tends to be flat, self elongation is generated, meanwhile, the contact area between the first piezoelectric stack 2 and the positive driving friction force is increased, the second flexible thin plate 3-4-3, α and the secondary displacement amplification effect is increased.
The motion of the secondary displacement amplification type piezoelectric driver has bidirectional consistency, the whole structure is completely symmetrical left and right, and when the negative motion of the x axis is needed, the piezoelectric stack II 3-6 is excited by the same positive sawtooth wave signal, and the slide block 2 moves along the negative direction of the x axis under the action of the arc-shaped driving feet 3-4.
The beneficial effects of the utility model reside in that: two times of displacement amplification are generated by one piezoelectric stack in one working period, so that the output efficiency of the driver is improved; while consistency of bi-directional motion may be achieved. The utility model discloses a secondary displacement amplification type piezoelectricity linear actuator can realize the motion of big stroke, high accuracy, heavy load, can realize the linear motion of positive and negative two directions simultaneously. The triangular flexible hinge mechanism of the piezoelectric linear driver can amplify the small deformation of the piezoelectric stack to generate large forward motion, so that primary displacement amplification is achieved, and meanwhile, the driving foot can generate deformation to achieve secondary displacement amplification. The utility model has the advantages of simple structure, compactness, control are convenient, have fine application prospect in accurate medical instrument, the micro-nano accurate drive such as optics precision instruments and semiconductor processing and the location field.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate example embodiments of the invention and together with the description serve to explain the invention without limitation.
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic view of a stator of the present invention;
FIG. 3 is a schematic structural view of the hexagonal flexible hinge mechanism and the triangular flexible hinge mechanism of the present invention;
fig. 4 is a schematic structural view of the arc-shaped driving foot of the present invention;
FIG. 5 is a schematic view of the working of the arc driving foot of the present invention;
fig. 6 is a schematic diagram of the operation of the secondary displacement amplification driver of the present invention.
In the figure: 1. a base; 2. a slider; 3. a stator; 4. a pre-tightening mechanism;
3-1, a hexagonal flexible hinge mechanism I; 3-2, a hexagonal flexible hinge mechanism II; 3-3, a trilateral flexible hinge; 3-4, arc-shaped driving feet; 3-5, stacking the piezoelectric layer I; 3-6, piezoelectric stack II; 3-7, mounting holes I; 3-8, mounting holes II; 3-1-1, fixing a beam I at the bottom; 3-1-2, a first side flexible hinge; 3-1-3, connecting a first top beam; 3-2-3, and a top connecting beam II; 3-3-1, hinge I; 3-3-2 and a second hinge; 3-4-1, arc thin plate; 3-4-2, a first flexible sheet; 3-4-3 and a second flexible sheet.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 6, the secondary displacement amplification type piezoelectric actuator of the present invention includes a base 1, a slider 2, a stator 3 and a pre-tightening mechanism 4, wherein the slider 2 and the pre-tightening mechanism 4 are both mounted on the base 1, and the stator 3 is mounted on the pre-tightening mechanism 4 and is in elastic contact with the slider 2; the preloading mechanism 4 is used for preloading the stator 3 and the slide block 2.
The stator 3 comprises a first hexagonal flexible hinge mechanism 3-1, a second hexagonal flexible hinge mechanism 3-2, a third triangular flexible hinge 3-3, an arc-shaped driving foot 3-4, a first piezoelectric stack 3-5, a second piezoelectric stack 3-6, a first mounting hole 3-7 and a second mounting hole 3-8, wherein the first hexagonal flexible hinge mechanism 3-1 comprises a first bottom fixing beam 3-1-1, a first side flexible hinge 3-1-2 and a first top connecting beam 3-1-3; two ends of the piezoelectric stack I3-5 are respectively connected with the bottom fixing beam I3-1-1 and the top connecting beam I3-1-3 in a tight fit mode, and the end parts of the bottom fixing beam I3-1-1 and the top connecting beam I3-1-3 are connected through a side flexible hinge I3-1-2; the piezoelectric stacks two 3-6 and the piezoelectric stacks one 3-5 are connected in the same way. The first hexagonal flexible hinge mechanism 3-1 is fixed on the pre-tightening mechanism 4 through the first mounting hole 3-7, and the second hexagonal flexible hinge mechanism 3-2 is fixed on the pre-tightening mechanism 4 through the second mounting hole 3-8; the hexagonal flexible hinge mechanism II 3-2 and the hexagonal flexible hinge mechanism I3-1 are completely the same in structure and are symmetrically arranged on the pre-tightening mechanism 4; the triangular flexible hinge 3-3 comprises a first hinge 3-3-1 and a second hinge 3-3-2, the first top connecting beam 3-1-3 is connected with the bottom of the first hinge 3-3-1 of the triangular flexible hinge 3-3, and the second top connecting beam 3-2-3 is connected with the bottom of the second hinge 3-3-2 of the triangular flexible hinge 3-3.
When the slide block 2 needs to move in the positive direction along the x axis, in a working cycle of extension/shortening of the piezoelectric stack excited by an electric signal, in a stage from 0T to 3/4T, positive sawtooth wave signal excitation is applied to the piezoelectric stack I3-5 to generate y-axis positive displacement, so that the hexagonal flexible hinge mechanism I3-1 y axis is driven to extend in the positive direction, as the geometry can be known, the y axis at the bottom of the hinge I3-3-1 at one side of the triangular flexible hinge 3-3 is lifted in the positive direction, as the slide block 2 limits the y-direction displacement, the end part of the triangular flexible hinge 3-3 can generate x-direction displacement and y-direction positive pressure, namely the arc-shaped driving foot 3-4 at the top of the triangular flexible hinge 3-3 generates x-direction displacement and y-direction positive pressure, and the arc-shaped driving foot 3-4 is bent and deformed by the y-direction, because only one side of the piezoelectric stack extends, the single side part of the circular arc driving foot 3-4 is subjected to larger positive pressure, the flexible thin plate I3-4-2 at one side is subjected to positive pressure, the bending deflection is reduced, the included angle between the flexible thin plate I and the circular arc thin plate I3-4-1 is reduced, the flexible thin plate I extends, and the flexible thin plate II 3-4-3 drives the sliding block 2 to generate x-direction displacement, so that the secondary displacement amplification effect is achieved.
At the 3/4T to T stage, the sawtooth wave signal rapidly drops to 0, and the rapid reset is realized, and the backspacing displacement is small due to the action of the inertia force.
The arc-shaped driving foot 3-4 comprises an arc-shaped thin plate 3-4-1, a flexible thin plate 3-4-2 and a flexible thin plate 3-4-3, the arc-shaped thin plate 3-4-1 is an easily-deformable metal thin plate and is flexibly connected with the top of a triangular flexible hinge 3-3, the included angles between the arc-shaped thin plate 3-4-1 and the top of the triangular flexible hinge 3-3 are theta 1 and theta 2 respectively, the surface of the arc-shaped thin plate 3-4-1 is provided with two symmetrically-arranged flexible thin plates 3-4-2 and a flexible thin plate 3-4-3, the flexible thin plate 3-4-2 and the arc-shaped thin plate 3-4-1 are inclined at an angle of α 1 and have a certain radian β 1, the flexible thin plate 3-4-3 and the arc-4-1 are inclined at an angle of α 2 radian and have a certain radian β 2, the flexible thin plate 3-4-3 and the slider 2 are in surface contact with each other, an electric signal is applied to the piezoelectric stack-3, the triangular flexible thin plate 3-4-3, the slider is in contact with the slider 2, the slider is in a secondary elastic force generated by the slider, the slider is enlarged when the slider, the slider moves towards the slider 2-3-4-3, the slider is enlarged, the slider is enlarged from the slider.
The motion of the secondary displacement amplification type piezoelectric driver has bidirectional consistency, the whole structure is completely symmetrical left and right, and when the negative motion of the x axis is needed, the two piezoelectric stacks 3-6 are excited by the same positive sawtooth wave signal, and the slide block 2 moves along the negative direction of the x axis under the action of the arc-shaped driving feet 3-4.
Example (b):
referring to fig. 1 to 4, a piezoelectric actuator of a secondary displacement amplification type is composed of a base 1, a slider 2, a stator 3, and a pre-tightening mechanism 4. The sliding block 2 and the pre-tightening mechanism 4 are both installed on the base 1 through screws, and the stator 3 is installed on the pre-tightening mechanism 4 through screws and is in elastic contact with the sliding block 2. The preloading mechanism 4 is used for preloading the stator 3 and the slide block 2. The stator 3 comprises a first hexagonal flexible hinge mechanism 3-1, a second hexagonal flexible hinge mechanism 3-2, a third triangular flexible hinge 3-3, a circular arc driving foot 3-4, a first piezoelectric stack 3-5, a second piezoelectric stack 3-6, a first mounting hole 3-7 and a second mounting hole 3-8.
The hexagonal flexible hinge mechanism I3-1 comprises a bottom fixed beam I3-1-1, a side flexible hinge I3-1-2 and a top connecting beam I3-1-3; two ends of the piezoelectric stack I3-5 are respectively connected with the bottom fixed beam I3-1-1 and the top connecting beam I3-1-3 in a tight fit mode; the hexagonal flexible hinge mechanism I3-1 is fixed on the pre-tightening mechanism 4 through the mounting hole I3-7. The hexagonal flexible hinge mechanism II 3-2 and the hexagonal flexible hinge mechanism I3-1 are completely the same in structure and are symmetrically arranged on the pre-tightening mechanism 4. The triangular flexible hinge 3-3 comprises a first hinge 3-3-1 and a second hinge 3-3-2. The top connecting beam I3-1-3 is connected with the bottom of the hinge I3-3-1 of the triangular flexible hinge 3-3. The top connecting beam II 3-2-3 is connected with the bottom of the hinge II 3-3-2 of the triangular flexible hinge 3-3.
The arc-shaped driving foot 3-4 comprises an arc thin plate 3-4-1, a flexible thin plate one 3-4-2 and a flexible thin plate two 3-4-3, the arc thin plate 3-4-1 is an easily-deformable metal thin plate and is flexibly connected with the top of a triangular flexible hinge 3-3, the included angles between the arc thin plate 3-4-1 and the top of the triangular flexible hinge 3-3 are theta 1 and theta 2 respectively, the surface of the arc thin plate 3-4-1 is provided with the flexible thin plate one 3-4-2 and the flexible thin plate two 3-4-3 which are symmetrically arranged, the flexible thin plate one 3-4-2 and the arc thin plate 3-4-1 are inclined at an angle of α 1 degrees and have a certain radian β 1, the flexible thin plate two 3-4-3 and the arc thin plate 3-4-1 are inclined at an angle of α 2 degrees and have a certain radian β 2, and are in surface contact with the sliding block 2.
Referring to fig. 4 and 5, when the slider 2 needs to move in the positive x-axis direction, a sawtooth wave electric signal is applied to the first piezoelectric stack 3-5, the y-axis positive displacement is generated at the bottom of the first hinge 3-3-1 of the triangular flexible hinge 3-3, the triangular flexible hinge 3-3 integrally inclines rightwards under the limitation of the slider 2 at the top, the imaginary movement track of the contact point of the circular arc driving foot 3-4 and the slider 2 can be decomposed into the x-direction displacement and the y-direction displacement, when the driving foot is tightly contacted with the slider 2, the circular arc sheet 3-4-1 of the driving foot is greatly deformed under the positive pressure, because only the first piezoelectric stack 3-5 is elongated, the force point is concentrated on the left side, the theta 1 is reduced, the theta 2 is increased, the radian β 1 of the first flexible sheet 3-4-2 is reduced, the angle α 1 formed by the circular arc sheet 3-4-1 is reduced, the self elongation is generated, the indirect contact area with the slider 2 is increased, the positive driving force is increased, and the secondary displacement effect of the second flexible slider 3-4-2 is achieved, the 3683 is enlarged.
Referring to fig. 6, it is a working schematic diagram of the secondary displacement amplification driver of the present invention, and the driving method is performed according to the following steps:
step a: from t0 to t1, positive sawtooth wave signal excitation is applied to the first piezoelectric stack 3-5, the first piezoelectric stack 3-5 y axis extends in a positive direction h to drive the first hexagonal flexible hinge mechanism 3-1y axis to extend in a positive direction h, and as the geometry can be known, the virtual motion track of the end point P of the first hinge 3-3-1 bottom y axis of the triangular flexible hinge 3-3 rises in a positive direction h, can be decomposed into displacements in an x direction and a y direction (lx and ly), namely, the arc-shaped driving foot 3-4 at the top of the triangular flexible hinge 3-3 generates x axis positive displacement and y axis positive force (lx and Fp), and the generated driving friction force Fs pushes the slider 2 to move forwards along the x axis, so that a displacement amplification effect is achieved.
As Fp is increased, when the driving foot is in close contact with the sliding block 2, the circular arc driving foot 3-4 is subjected to bending deformation by negative pressure Fn of the y axis, stress points are mainly concentrated on the left side, the radian of the flexible thin plate 3-4-2 is reduced due to stress, an angle formed by the flexible thin plate and the circular arc thin plate 3-4-1 is reduced, the contact area between the flexible thin plate and the sliding block 2 is increased when the flexible thin plate extends, driving friction force Fs is increased, the sliding block 2 is pushed to move forwards along the x axis, and secondary displacement amplification effect is achieved.
Step b: during the period from t1 to t2, the sawtooth signal rapidly drops to 0, and the piezoelectric stack one 3-5 retracts to realize rapid reset, and the slide block 2 will keep the position shown in part (c) of fig. 6 due to the action of inertia force. By repeating steps a and b, the piezoelectric driver gradually achieves a large working stroke movement in the positive direction along the x-axis.
When the piezoelectric stacks two 3-6 are excited by the same positive sawtooth wave signal, the slide block 2 generates negative movement of the x axis, and the consistency of the two-way movement can be realized.
The utility model discloses a secondary displacement amplification type piezoelectricity glues smooth driver and comprises parts such as stator, pretension mechanism, active cell, base. The stator is fixedly arranged on the base through a pre-tightening mechanism, and the stator and the rotor realize positioning and driving transmission in an elastic contact mode. The stator comprises a triangular flexible hinge displacement amplification mechanism, a driving foot, a hexagonal flexible hinge displacement amplification mechanism and a piezoelectric stack actuator. The driving foot is a circular arc-shaped thin metal plate, two identical flexible thin plates are arranged on the metal plate, are symmetrically arranged and are flexibly connected with the metal plate. Through applying the control signal of telecommunication to piezoelectric stack actuator, promote the flexible hinge mechanism of amplifying and produce forward displacement and then realize displacement and enlarge, arc drive foot produces self bending deformation simultaneously, and the flexible sheet metal receives the positive pressure change and produces self elongation, realizes that the secondary displacement enlargies. The utility model has the characteristics of simple structure, precision height, stroke are big etc, utilize the flexible mechanism of amplification of triangle and the sufficient structure of arc drive to produce the secondary and enlarge the effect, can realize two-way drive motion.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made to the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A secondary displacement amplification type piezoelectric actuator is characterized in that: the device comprises a base (1), a sliding block (2), a stator (3) and a pre-tightening mechanism (4), wherein the sliding block (2) and the pre-tightening mechanism (4) are both arranged on the base (1), and the stator (3) is arranged on the pre-tightening mechanism (4) and is in elastic contact with the sliding block (2);
the stator (3) comprises a first hexagonal flexible hinge mechanism (3-1), a second hexagonal flexible hinge mechanism (3-2), a triangular flexible hinge (3-3), an arc-shaped driving foot (3-4), a first piezoelectric stack (3-5), a second piezoelectric stack (3-6), a first mounting hole (3-7) and a second mounting hole (3-8), and the first hexagonal flexible hinge mechanism (3-1) comprises a first bottom fixing beam (3-1-1), a first side flexible hinge (3-1-2) and a first top connecting beam (3-1-3); two ends of the piezoelectric stack I (3-5) are respectively connected with the bottom fixing beam I (3-1-1) and the top connecting beam I (3-1-3) in a tight fit mode; the hexagonal flexible hinge mechanism I (3-1) is fixed on the pre-tightening mechanism (4) through the mounting hole I (3-7); the hexagonal flexible hinge mechanism II (3-2) and the hexagonal flexible hinge mechanism I (3-1) have the same structure, and are symmetrically arranged on the pre-tightening mechanism (4); the triangular flexible hinge (3-3) comprises a first hinge (3-3-1) and a second hinge (3-3-2), the first top connecting beam (3-1-3) is connected with the bottom of the first hinge (3-3-1) of the triangular flexible hinge (3-3), and the second top connecting beam (3-2-3) is connected with the bottom of the second hinge (3-3-2) of the triangular flexible hinge (3-3).
2. The secondary displacement amplification type piezoelectric actuator according to claim 1, wherein the circular arc driving foot (3-4) comprises a circular arc thin plate (3-4-1), a first flexible thin plate (3-4-2) and a second flexible thin plate (3-4-3), the circular arc thin plate (3-4-1) is an easily deformable metal thin plate and is flexibly connected with the top of the triangular flexible hinge (3-3), included angles between the circular arc thin plate (3-4-1) and the top of the triangular flexible hinge (3-3) are theta 1 and theta 2 respectively, the surface of the circular arc thin plate (3-4-1) is provided with the first flexible thin plate (3-4-2) and the second flexible thin plate (3-4-3) which are symmetrically arranged, the first flexible thin plate (3-4-2) and the circular arc thin plate (3-4-1) are inclined at an angle of α 1 angle and have a radian of β 1, the second flexible thin plate (3-4-3) and the circular arc thin plate (3-4-1) are inclined at an angle of α 2-2 and have a radian of β 2, and the second flexible thin plate (3-4-3-2) is in contact with the flexible thin plate (3-4-3-4-3.
3. The secondary displacement amplification type piezoelectric driver as claimed in claim 1 or 2, wherein when the slider (2) moves in the positive direction along the x axis, a sawtooth wave electric signal is applied to the piezoelectric stack I (3-5), the y axis positive displacement is generated at the bottom of the hinge I (3-3-1) of the triangular flexible hinge (3-3), the triangular flexible hinge (3-3) is integrally inclined to the right under the limitation of the slider (2) at the top, the imaginary movement track of the contact point of the arc-shaped driving foot (3-4) and the slider (2) can be decomposed into x and y displacement, when the arc-shaped driving foot (3-4) is in close contact with the slider (2), the arc sheet (3-4-1) of the arc-shaped driving foot (3-4) is subjected to self deformation by the positive pressure, the force is concentrated on the left side due to the extension of only the piezoelectric stack I (3-5), the theta 1 is reduced, the theta 2 is increased, the arc is reduced from the arc β 1, the arc and the slider (3-4) and the angle with the slider (362) is increased, the secondary displacement amplification effect is achieved by increasing the secondary displacement of the slider (β).
4. The secondary displacement amplification type piezoelectric driver according to claim 1, characterized in that: the motion of the secondary displacement amplification type piezoelectric driver has bidirectional consistency, the whole structure is completely symmetrical left and right, and when the negative motion of the x axis is needed, the piezoelectric stack II (3-6) is excited by the same positive sawtooth wave signal, and the slide block (2) moves along the negative direction of the x axis under the action of the arc-shaped driving foot (3-4).
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112727689A (en) * | 2020-12-29 | 2021-04-30 | 河北科技大学 | Permanent magnet generator and power generation system |
| CN113206615A (en) * | 2021-04-26 | 2021-08-03 | 天津大学 | Inchworm type linear driver with static self-locking function |
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2020
- 2020-02-20 CN CN202020189081.5U patent/CN211183830U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112727689A (en) * | 2020-12-29 | 2021-04-30 | 河北科技大学 | Permanent magnet generator and power generation system |
| CN113206615A (en) * | 2021-04-26 | 2021-08-03 | 天津大学 | Inchworm type linear driver with static self-locking function |
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Granted publication date: 20200804 Effective date of abandoning: 20230614 |