CN113258824A - Microminiature stick-slip piezoelectric motor and driving method thereof - Google Patents
Microminiature stick-slip piezoelectric motor and driving method thereof Download PDFInfo
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention relates to a microminiature stick-slip piezoelectric motor and a driving method thereof, belonging to the technical field of motors. The motor consists of a piezoelectric stack, a rolling bearing, a bearing support, an articulated mechanism and a base, wherein the articulated mechanism comprises a flexible driving sheet, an auxiliary friction sheet, an adjusting screw, a lever, a fixed end hinge, an input end hinge and a mounting hole. The friction force between the friction plate and the rolling bearing can be adjusted by adjusting the adjusting screw. The piezoelectric stack is electrically extended and drives the bearing to rotate through the lever-type flexible hinge, and directional driving of the sliding block is achieved through friction force. The invention has the advantages that: through the compact structure of design, make stick-slip formula piezoelectric motor small, the area ratio is big, and the serious phenomenon of rolling back that appears after restraining the miniaturization through the auxiliary friction piece simultaneously can realize exporting higher speed under the miniaturization condition. The invention can be used in the fields of micro/nano mechanical test, optical instruments, integrated circuit packaging, bioengineering, aerospace technology and the like.
Description
Technical Field
The invention relates to a microminiature stick-slip piezoelectric motor and a driving method thereof, belonging to the technical field of motors. The invention solves the problems of larger backspacing and reduced output performance of the stick-slip piezoelectric motor in miniaturization. The invention can be used in the fields of micro/nano mechanical test, optical instruments, precision machining, integrated circuit packaging, bioengineering, aerospace technology and the like.
Background
Since the 21 st century, aerospace, material science, bioengineering, precision mechanical instruments and the like have gradually become key scientific and technological fields of attack, along with the continuous development of the technologies, the mechanical field also meets the challenges of extreme directions such as extremely complex, huge and ultra-precise technologies, and a plurality of novel motors and driving technologies appear industrially based on physical effects such as memory alloy, magnetostriction, piezoelectricity and the like. Among many new motors, the piezoelectric motor is considered to be the most promising one due to its advantages of no magnetic field interference, compact structure, high positioning accuracy, and the like.
With the research of precision instruments, the demand for micro piezoelectric motors is increasing. In the past, researchers proposed piezoelectric motors based on different working principles, and according to the driving principle, the stepping piezoelectric actuators mainly include inchworm type, ultrasonic type, stick-slip type and inertia type. Aiming at a miniaturized motor, the inchworm actuator can output larger force, but the structural control is more complex, and the miniaturization difficulty is large. The ultrasonic actuator can easily realize high speed, but the positioning resolution and precision are relatively low, and the abrasion is serious. The inertia impact type speed is low, and the output performance is seriously reduced after miniaturization. Compared with other types of motors, the stick-slip actuator has the advantages of higher speed, relatively simple structure and easy realization of miniaturization, thereby being most suitable for miniature instruments. However, the stick-slip actuator is generally large in size, relatively low in working area and large in retraction degree after miniaturization, so that the size of the motor still needs to be further reduced, and meanwhile, high output performance of the motor is guaranteed.
At present, innovative designs of piezoelectric motors are still necessary. In order to improve the output performance of the microminiature stick-slip piezoelectric motor, a rotary microminiature high-performance piezoelectric motor is developed. In the conventional design, the back-off phenomenon of the stick-slip motor is generally suppressed by improving the flexible hinge, but for a micro motor, on one hand, the complex structure is not easy to reduce the volume, and on the other hand, the small mass of the rotor reduces the structural action after the micro motor is miniaturized, so that the serious back-off phenomenon is generated after the micro motor is miniaturized. In order to solve the problem, the invention provides a method for reducing the rotor back-off by designing a special auxiliary friction plate and generating an auxiliary friction force in the rotor back-off process so that the friction force causing the back-off is counteracted with the auxiliary friction force.
Disclosure of Invention
The invention provides a rotary micro high-performance piezoelectric motor, aiming at solving the problems of larger backspacing and reduced output performance of a stick-slip piezoelectric motor in miniaturization.
The technical scheme adopted by the invention for realizing the purpose is as follows:
a rotary microminiature high-performance piezoelectric motor is characterized in that: by designing the special auxiliary friction plate, the friction force causing the backspacing is offset with the auxiliary friction force, thereby greatly improving the output performance of the motor. The motor comprises a piezoelectric stack, a rolling bearing, a bearing support, a hinge mechanism and a base; the hinge mechanism comprises a flexible driving plate, an auxiliary friction plate, an adjusting screw, a lever, a fixed end hinge, an input end hinge and a mounting hole; the adjusting screw is in contact with the auxiliary friction plate through a threaded hole in the hinge mechanism; the hinge mechanism is connected with the base through the baffle and is fixed through two fastening screws; the piezoelectric stack is embedded into the hinge mechanism and fixed through the pretightening force of the mechanism, and is periodically slowly extended and rapidly contracted under the control of a sawtooth-shaped electric signal, so that the rolling bearing continuously rotates according to the stick-slip principle.
The hinge mechanism is connected with the piezoelectric stack in an interference fit manner, and the lever takes one side of the input end hinge as a power arm, one side of the flexible driving sheet as a resistance arm and the fixed end hinge as a fulcrum to serve as an amplifying mechanism; when the piezoelectric stack is electrically stretched, the input hinge drives the lever power arm to lift upwards, the fixed end hinge is used as a fulcrum to drive the flexible driving sheet to incline downwards, and therefore the rolling bearing generates rotary displacement, and continuous rotary displacement is generated based on the stick-slip principle. Another object of the present invention is to provide a method for suppressing a rollback of a stick-slip piezoelectric motor in a miniaturized configuration, comprising the steps of:
firstly, in the initial stage, the piezoelectric stack is embedded into a hinge mechanism in a tight fit mode, and before the piezoelectric stack works, the contact force between an auxiliary friction plate and a rolling bearing is adjusted by adjusting the contact force between an adjusting screw on the hinge mechanism and the auxiliary friction plate, so that the friction force is adjusted, and the rolling bearing is subjected to proper auxiliary friction force;
secondly, in a piezoelectric slow extension stage, a sawtooth type electric signal is input into the piezoelectric stack, when the voltage amplitude is slowly increased, the piezoelectric stack is gradually extended based on the inverse piezoelectric effect, the lever is subjected to the thrust action, so that the flexible driving sheet has the tendency of moving downwards and is in contact with the rolling bearing to generate bending deformation, and the friction force of the flexible driving sheet on the rolling bearing is greater than the reverse friction force of the auxiliary friction sheet on the rolling bearing, so that the rolling bearing rotates clockwise;
thirdly, in the rapid retraction stage of the piezoelectric stack, when the voltage amplitude is sharply reduced to 0V, the piezoelectric stack is rapidly retracted, the hinge mechanism is restored to the initial state, and at the moment, the flexible driving sheet generates a sliding friction force in the counterclockwise direction on the rolling bearing, and the sliding friction force is set as f1The auxiliary friction plate generates a clockwise sliding friction force on the rolling bearing, and is set as f2At f1And f2Will produce a counterclockwise rotational back-off S':
wherein m is the mass of the rolling bearing. Thereby passing through the auxiliary friction force f2The backspacing size is reduced, and the output speed of the motor is improved.
And fourthly, stable stepping can be realized by repeating the steps, the voltage amplitude and the driving frequency of the electric signal input by the piezoelectric stack are adjusted, and the change of the motion state of the motor can be realized.
The invention has the beneficial effects that: the rotary micro high-performance piezoelectric motor can effectively improve the output performance of a high-viscosity sliding type motor, realize the restraint of rollback and higher movement speed after miniaturization, and obviously improve the output power of the micro high-viscosity sliding type piezoelectric motor. Meanwhile, the stick-slip piezoelectric motor is small in size, and the advantages of simple structure, easiness in control, high resolution and the like are kept.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a front view of the hinge mechanism of the present invention.
Fig. 3 is a schematic diagram of the working process of the present invention.
Fig. 4 and 5 are actual output displacement time curves measured under the condition that the driving voltage U is 100V and the driving frequency f is 10Hz respectively without auxiliary friction force and with auxiliary friction force.
In the figure: 1. a piezoelectric stack; 2. a rolling bearing; 3. a bearing support; 4. a hinge mechanism; 4.1, a flexible driving sheet; 4.2, auxiliary friction plates; 4.3, adjusting screws; 4.4, a lever; 4.5, fixing end hinge; 4.6, an input end is hinged; 4.7, mounting holes; 5. a base.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, the invention provides a micro stick-slip piezoelectric motor and a driving method thereof, designs a novel motor, improves the output performance of the miniaturized stick-slip piezoelectric motor, and has important significance for realizing the miniaturized application of the motor.
The microminiature stick-slip piezoelectric motor is characterized in that: the piezoelectric device comprises a piezoelectric stack (1), a rolling bearing (2), a bearing support (3), a hinge mechanism (4) and a base (5); the hinge mechanism (4) comprises a flexible driving plate (4.1), an auxiliary friction plate (4.2), an adjusting screw (4.3), a lever (4.4), a fixed end hinge (4.5), an input end hinge (4.6) and a mounting hole (4.7). In the prior art, the back-off phenomenon of a stick-slip motor is generally inhibited by improving a flexible hinge, but for a micro motor, on one hand, the complex structure is not easy to reduce the volume, and on the other hand, the small mass of a rotor reduces the structural action after the micro motor is miniaturized, so that the problem of the serious back-off phenomenon after the micro motor is miniaturized is caused. In order to solve the problem, the invention provides a method, by designing a special auxiliary friction plate, in the process of rotor backspacing, an auxiliary friction force is generated, so that the friction force causing backspacing is offset with the auxiliary friction force, thereby reducing the rotor backspacing and expanding the application of the method in the fields of micro/nano mechanical test, optical instruments, precision machining, integrated circuit packaging, biological engineering, aerospace technology and the like.
Referring to fig. 1 and 2, the inertia impact type piezoelectric motor with an ultra-large load of the invention comprises a piezoelectric stack (1), a rolling bearing (2), a bearing support (3), a hinge mechanism (4) and a base (5); the hinge mechanism (4) comprises a flexible driving sheet (4.1), an auxiliary friction sheet (4.2), an adjusting screw (4.3), a lever (4.4), a fixed end hinge (4.5), an input end hinge (4.6) and a mounting hole (4.7); the adjusting screw (4.3) is in contact with the auxiliary friction plate (4.2) through a threaded hole on the flexible driving plate (4.1); the hinge mechanism (4) is connected with the base (5) through a baffle and is fixed through two fastening screws; the piezoelectric stack (1) is embedded into the hinge mechanism and fixed through pretightening force of the mechanism, slowly extends and rapidly contracts periodically under the control of a sawtooth-shaped electric signal, and continuous rotary motion of the rolling bearing (2) is realized according to a stick-slip principle.
The hinge mechanism (4) is connected with the piezoelectric stack (1) in an interference fit manner, and the lever (4.4) takes one side of the input end hinge (4.6) as a power arm, one side of the flexible driving sheet (4.1) as a resistance arm and a fixed end hinge (4.5) as a fulcrum to serve as an amplification mechanism; when the piezoelectric stack (1) is electrically stretched, the input hinge (4.6) drives the power arm of the lever (4.4) to lift upwards, the fixed end hinge (4.5) is used as a fulcrum to drive the flexible driving sheet (4.1) to incline downwards, so that the rolling bearing (2) generates rotary displacement, and continuous rotary displacement is generated based on the stick-slip principle.
Referring to fig. 3, a micro stick-slip piezoelectric motor and a driving method thereof are characterized in that: the method comprises the following steps:
firstly, in the initial stage, the piezoelectric stack (1) is embedded into a hinge mechanism (4) in a tight fit mode, and before the piezoelectric stack works, the contact force between an auxiliary friction plate (4.2) and a rolling bearing (2) is adjusted by adjusting the contact force between an adjusting screw (4.3) on the hinge mechanism (4) and the auxiliary friction plate (4.2), so that the friction force is adjusted, and the rolling bearing (2) is subjected to proper auxiliary friction force;
secondly, in a piezoelectric slow extension stage, a sawtooth type electric signal is input into the piezoelectric stack (1), when the voltage amplitude is slowly increased, the piezoelectric stack (1) is gradually extended based on the inverse piezoelectric effect, the lever (4.4) is subjected to the thrust action, so that the flexible driving sheet (4.1) tends to move downwards and is in contact with the rolling bearing (2) to generate bending deformation, and the friction force of the flexible driving sheet (4.1) on the rolling bearing (2) is greater than the reverse friction force of the auxiliary friction sheet (4.2) on the rolling bearing (2), so that the rolling bearing (2) rotates clockwise;
thirdly, in the rapid retraction stage of the piezoelectric stack, when the voltage amplitude is sharply reduced to 0V, the piezoelectric stack (2) is rapidly retracted, the hinge mechanism (4) is restored to the initial state, at the moment, the flexible driving sheet (4.1) generates a sliding friction force in the anticlockwise direction on the rolling bearing (2), the sliding friction force is set to be h, the auxiliary friction sheet (4.2) generates a sliding friction force in the clockwise direction on the rolling bearing (2), and the sliding friction force is set to be f2At f1And f2Will generate a counterclockwise rotational back-off S':
wherein m is the mass of the rolling bearing (2). Thereby passing through the auxiliary friction force f2The backspacing size is reduced, and the output speed of the motor is improved.
And fourthly, stable stepping can be realized by repeating the steps, the voltage amplitude and the driving frequency of the electric signal input by the piezoelectric stack (1) are adjusted, and the change of the motion state of the motor can be realized.
Referring to fig. 4 and 5, the actual output displacement-time curve of the microminiature stick-slip piezoelectric motor of the present invention is measured without auxiliary friction when the driving voltage U is 100V and the driving frequency f is 10 Hz. Referring to fig. 5, a curve of actual output displacement versus time measured by an auxiliary friction force when the driving voltage U is 100V and the driving frequency f is 10Hz is shown for a micro stick-slip piezoelectric motor according to the present invention. It can be seen that without auxiliary friction, the motor advances by S3.5 μm, retracts by S' 1.0 μm, and single step pitch Δ S2, 5 μm; after the application of the auxiliary friction force, the backset S' is 0.1 μm and the single step pitch Δ S is 3.4 μm. Experimental results show that the invention effectively inhibits the serious rollback phenomenon of the miniaturized stick-slip piezoelectric motor and improves the output performance of the miniaturized stick-slip piezoelectric motor.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.
Claims (3)
1. A microminiature stick-slip piezoelectric motor is characterized in that: the piezoelectric actuator comprises a piezoelectric stack (1), a rolling bearing (2), a bearing support (3), a hinge mechanism (4) and a base (5); the hinge mechanism (4) comprises a flexible driving sheet (4.1), an auxiliary friction sheet (4.2), an adjusting screw (4.3), a lever (4.4), a fixed end hinge (4.5), an input end hinge (4.6) and a mounting hole (4.7); the adjusting screw (4.3) is in contact with the auxiliary friction plate (4.2) through a threaded hole on the flexible driving plate (4.1); the hinge mechanism (4) is connected with the base (5) through a baffle and is fixed through two fastening screws; the piezoelectric stack (1) is embedded into the hinge mechanism and fixed through pretightening force of the mechanism, slowly extends and rapidly contracts periodically under the control of a sawtooth-shaped electric signal, and continuous rotary motion of the rolling bearing (2) is realized according to a stick-slip principle.
2. A microminiature stick-slip piezoelectric motor as claimed in claim 1, wherein: the hinge mechanism (4) is connected with the piezoelectric stack (1) in an interference fit manner; one side of the input end hinge (4.6) of the lever (4.4) is taken as a power arm, one side of the flexible driving sheet (4.1) is taken as a resistance arm, and the fixed end hinge (4.5) is taken as a fulcrum to be taken as an amplifying mechanism; when the piezoelectric stack (1) is electrically stretched, the input hinge (4.6) drives the power arm of the lever (4.4) to lift upwards, and the fixed end hinge (4.5) is used as a fulcrum to drive the flexible driving sheet (4.1) to incline downwards, so that the rolling bearing (2) generates rotary displacement.
3. A driving method of a microminiature stick-slip piezoelectric motor is characterized in that: the method comprises the following steps:
firstly, in the initial stage, the piezoelectric stack (1) is embedded into a hinge mechanism (4) in an interference fit mode, and before the piezoelectric stack works, the contact force between an auxiliary friction plate (4.2) and a rolling bearing (2) is adjusted by adjusting the contact force between an adjusting screw (4.3) on the hinge mechanism (4) and the auxiliary friction plate (4.2), so that the friction force is adjusted, and the rolling bearing (2) is subjected to proper auxiliary friction force;
secondly, in a piezoelectric slow extension stage, a sawtooth type electric signal is input into the piezoelectric stack (1), when the voltage amplitude is slowly increased, the piezoelectric stack (1) is gradually extended based on the inverse piezoelectric effect, the lever (4.4) is subjected to the thrust action, so that the flexible driving sheet (4.1) tends to move downwards and is in contact with the rolling bearing (2) to generate bending deformation, and the friction force of the flexible driving sheet (4.1) on the rolling bearing (2) is greater than the reverse friction force of the auxiliary friction sheet (4.2) on the rolling bearing (2), so that the rolling bearing (2) rotates clockwise;
thirdly, in the rapid retraction stage of the piezoelectric stack, when the voltage amplitude is sharply reduced to 0V, the piezoelectric stack (2) is rapidly retracted, the hinge mechanism (4) is restored to the initial state, and at the moment, the flexible driving sheet (4.1) generates the sliding friction force f in the counterclockwise direction on the rolling bearing (2)1The auxiliary friction plate (4.2) generates a clockwise sliding friction force f on the rolling bearing (2)2At f1And f2Will generate a counterclockwise rotational back-off S':
where m is the mass of the rolling bearing (2), whereby the auxiliary friction force f is used2The backspacing size is reduced, and the output speed of the motor is improved;
and fourthly, stable stepping can be realized by repeating the steps, the voltage amplitude and the driving frequency of the electric signal input by the piezoelectric stack (1) are adjusted, and the change of the motion state of the motor can be realized.
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Cited By (2)
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| CN113922701A (en) * | 2021-11-15 | 2022-01-11 | 宁波大学 | Four-rod stick-slip motor with force amplification characteristic and driving method |
| CN114057158A (en) * | 2021-11-18 | 2022-02-18 | 吉林大学 | Method for realizing surface composite micro-nano structure processing by using stick-slip driving rollback phenomenon |
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| CN114057158A (en) * | 2021-11-18 | 2022-02-18 | 吉林大学 | Method for realizing surface composite micro-nano structure processing by using stick-slip driving rollback phenomenon |
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