CN109586611B - Alternate stepping piezoelectric stick-slip driver with anisotropic friction surface - Google Patents
Alternate stepping piezoelectric stick-slip driver with anisotropic friction surface Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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Abstract
The invention relates to an alternating stepping piezoelectric stick-slip driver with anisotropic friction surfaces, which consists of a stator, a pre-tightening force loading platform, a fixed base and a rotor. The stator comprises an I-shaped front beam, an I-shaped connecting beam, an I-shaped rear beam, a reset spring, a straight round flexible hinge, a piezoelectric stack and driving feet. The parallel guide mechanism is arranged in the driving foot, so that the driving foot is still in surface contact with the rotor after pre-tightening; the contact surfaces of the mover and the driving foot adopt a nano manufacturing technology to ensure that friction has direction dependence, and the friction force generated when the mover moves rightwards is smaller than the friction force generated when the mover moves leftwards; the extension and shortening of the piezoelectric stack are controlled, so that the driving feet are alternately deformed rightward to push the mover to move rightward, and the effect of alternately stepping is achieved. The invention has the characteristics of high control precision, simple and compact structure, large movement stroke and the like.
Description
Technical Field
The invention relates to an alternating stepping piezoelectric stick-slip driver with an anisotropic friction surface, and belongs to the field of piezoelectric precision driving.
Background
In recent years, micro-nano technology has been rapidly developed, and the requirements for precision driving technology in the technical fields of ultra-precision machining, robots, optical engineering, computers, aerospace science and technology, precision measurement, modern medical treatment and the like are increasing, and micro-nano precision driving technology is a key technology. The traditional driving device, such as a servo motor, a pneumatic transmission, a hydraulic transmission and other driving devices with large size, can finish the output of a large load, but has lower output precision, and can not meet the requirements of modern technology on fine size and precision. In this context, many new drivers, such as a memory alloy motor, an electrostrictive motor, a piezoelectric motor, etc., have been developed, and among them, a driver using a piezoelectric material as a driving element has become an important research direction for precision driving devices in recent years because of its simple structure, high tolerance, etc.
The piezoelectric stick-slip drive mainly applies a sawtooth excitation electric signal to the piezoelectric element to excite the stator to generate motion deformation with alternating speed, controls the mutual conversion between the stator and the rotor in the two motion states of 'sticking' and 'sliding', and drives the rotor by using friction force to realize mechanical motion output. The current piezoelectric stick-slip driver working process can be divided into a slow deformation stage and a fast recovery stage, wherein friction forces between a stator and a rotor play different roles in the two processes, the slow deformation stage is represented by friction driving force, the fast recovery stage is represented by friction resistance, and the working efficiency is reduced due to the influence of the friction resistance on movement.
Disclosure of Invention
In order to achieve the effect of alternately stepping motion and improve the output efficiency of the driver, the invention discloses an alternately stepping piezoelectric stick-slip driver with an anisotropic friction surface.
The technical scheme adopted by the invention is as follows:
an alternating stepping piezoelectric stick-slip driver with an anisotropic friction surface is characterized by comprising a stator (1), a pre-tightening force loading platform (2), a fixed base (3) and a rotor (4); the stator (1) is fixedly arranged on the pre-tightening force loading platform (2), the pre-tightening force loading platform (2) is arranged on the fixed base (3), and the rotor (4) is arranged on the fixed base (3) and is in elastic contact with the driving foot; the stator (1) comprises an I-shaped front beam (1-1), a straight round flexible hinge (1-2), an I-shaped connecting beam (1-3), a C-shaped reset spring (1-4), an I-shaped rear beam (1-5), a mounting hole (1-6), an inverted C-shaped reset spring (1-7), a piezoelectric stack (1-8), a first driving foot (1-9) and a second driving foot (1-10); the rigid part of the stator (1) is I-shaped; a straight round flexible hinge (1-2) is arranged between the I-shaped front beam (1-1) and the I-shaped connecting beam (1-3), so that the I-shaped front beam (1-1) can rotate conveniently; the first driving foot (1-9) is arranged at the left end of the H-shaped front beam (1-1), the second driving foot (1-10) is arranged at the right end of the H-shaped front beam (1-1), and the first driving foot (1-9) and the second driving foot (1-10) are inclined rightwards; the right end of the H-shaped front beam (1-1) is connected with the right end of the H-shaped rear beam (1-5) through a C-shaped reset spring (1-4); the left end of the H-shaped front beam (1-1) is connected with the left end of the H-shaped rear beam (1-5) through an inverted C-shaped reset spring (1-7); two ends of the H-shaped rear beam (1-5) are provided with two mounting holes (1-6) for fixing the stator (1) on the pre-tightening force loading platform (2); the piezoelectric stack (1-8) is arranged between the inverted C-shaped reset spring (1-7) and the I-shaped connecting beam (1-3); the friction surface of the driving foot and the rotor (4) has anisotropy, namely, the friction force generated when the rotor (4) moves rightwards is smaller than the friction force generated when the rotor moves leftwards; applying triangular waves to the piezoelectric stacks (1-8), and when the piezoelectric stacks (1-8) stretch, the first driving feet (1-9) deform rightwards to push the mover (4) to move rightwards; when the piezoelectric stacks (1-8) retract, the second driving feet (1-10) deform rightwards to push the mover (4) to move rightwards, so that the mover (4) achieves the effect of alternately stepping.
The alternating stepping piezoelectric stick-slip driver with the anisotropic friction surface is characterized in that parallel guide mechanisms (1-9-1 and 1-10-1) are arranged in the first driving feet (1-9 and 1-10), so that after pretension, the driving feet and the rotor (4) are still in surface contact.
The alternating stepping piezoelectric stick-slip driver with the anisotropic friction surface is characterized in that the rotor (4) and the first driving foot contact surface (4-1, 1-9-2, 1-10-2) adopt a nano manufacturing technology to enable friction to have direction dependence, namely a friction angle alpha > beta, and the friction force generated when the rotor (4) moves rightwards is smaller than the friction force generated when the rotor moves leftwards.
The alternating stepping piezoelectric stick-slip driver with the anisotropic friction surface is characterized in that: the first driving foot (1-9, 1-10) and the rotor (4) are kept in elastic contact by proper pre-tightening before working; applying triangular waves to the piezoelectric stacks (1-8) to control the extension and shortening of the piezoelectric stacks (1-8); when the piezoelectric stack (1-8) stretches, the I-shaped front beam (1-1) inclines rightwards, the first driving foot (1-9) deforms rightwards to push the rotor (4) to move rightwards, and meanwhile the second driving foot (1-10) moves leftwards; when the piezoelectric stack (1-8) is retracted, the H-shaped front beam (1-1) is restored to the horizontal under the action of the C-shaped and inverted C-shaped reset springs (1-4 and 1-7), the second driving foot (1-10) pushes the rotor (4) to move rightwards, and meanwhile the first driving foot (1-9) moves leftwards.
The beneficial effects of the invention are as follows: the structure is simple and compact, the control is convenient, the extension and the shortening of the piezoelectric stack are controlled, and the driving feet are enabled to alternately deform rightwards to push the mover to move rightwards, so that the effect of alternately stepping is achieved, and the output efficiency of the driver is improved.
Drawings
The invention is further described with reference to the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a piezoelectric stick-slip actuator with an anisotropic friction surface according to the present invention;
FIG. 2 is a schematic illustration of a stator structure of a piezoelectric stick-slip actuator with an anisotropic friction surface in accordance with the present invention;
FIG. 3 is a schematic view of an anisotropic friction surface according to the present invention;
FIG. 4 is a schematic view of the stator structure of the present invention before and after pre-tightening of the drive foot;
fig. 5 is a schematic diagram of the operation of a piezoelectric stick-slip actuator with an anisotropic friction surface according to the present invention.
Detailed Description
The following further describes the implementation method with reference to the accompanying drawings:
as shown in fig. 1 and 2, the piezoelectric stick-slip driver consists of a stator (1), a pretightening force loading platform (2), a fixed base (3) and a rotor (4); the stator (1) is fixedly arranged on the pre-tightening force loading platform (2), the pre-tightening force loading platform (2) is arranged on the fixed base (3), and the rotor (4) is arranged on the fixed base (3) and is in elastic contact with the driving foot; the stator (1) comprises an I-shaped front beam (1-1), a straight round flexible hinge (1-2), an I-shaped connecting beam (1-3), a C-shaped reset spring (1-4), an I-shaped rear beam (1-5), a mounting hole (1-6), an inverted C-shaped reset spring (1-7), a piezoelectric stack (1-8), a first driving foot (1-9) and a second driving foot (1-10); the rigid part of the stator (1) is I-shaped; a straight round flexible hinge (1-2) is arranged between the I-shaped front beam (1-1) and the I-shaped connecting beam (1-3), so that the I-shaped front beam (1-1) can rotate conveniently; the first driving foot (1-9) is arranged at the left end of the H-shaped front beam (1-1), the second driving foot (1-10) is arranged at the right end of the H-shaped front beam (1-1), and the first driving foot (1-9) and the second driving foot (1-10) are inclined rightwards; the right end of the H-shaped front beam (1-1) is connected with the right end of the H-shaped rear beam (1-5) through a C-shaped reset spring (1-4); the left end of the H-shaped front beam (1-1) is connected with the left end of the H-shaped rear beam (1-5) through an inverted C-shaped reset spring (1-7); two ends of the H-shaped rear beam (1-5) are provided with two mounting holes (1-6) for fixing the stator (1) on the pre-tightening force loading platform (2); the piezoelectric stack (1-8) is arranged between the inverted C-shaped reset spring (1-7) and the I-shaped connecting beam (1-3); the friction surface of the driving foot and the mover (4) has anisotropy, namely, the friction force generated when the mover (4) moves rightwards is smaller than the friction force generated when the mover moves leftwards.
The alternate stepping piezoelectric stick-slip driver with the anisotropic friction surface provided by the implementation method is characterized in that the driving feet are pre-tightened appropriately before working, so that the first driving feet (1-9) and the second driving feet (1-10) are in elastic contact with the rotor (4); triangular waves are applied to the piezoelectric stacks (1-8), and the extension and shortening of the piezoelectric stacks (1-8) are controlled. Fig. 5 is a schematic diagram of the operation of the piezoelectric stick-slip actuator with anisotropic friction surface according to the present invention, wherein the actuation is performed according to the following steps:
step a: from t 0 To t 1 At moment, the piezoelectric stack (1-8) stretches, the I-shaped front beam (1-1) inclines rightwards, the first driving foot (1-9) deforms rightwards to increase the pretightening force between the piezoelectric stack and the rotor (4), and therefore the rotor (4) is pushed to rightwards to generate a tiny displacement delta L 1 While the second driving foot (1-10) moves to the left.
Step b: from t 1 To t 2 At moment, the piezoelectric stack (1-8) is retracted, the H-shaped front beam (1-1) is restored to the horizontal under the action of the C-shaped and inverted C-shaped reset springs (1-4 and 1-7), and the second driving foot (1-10) pushes the rotor (4) to generate a tiny displacement delta L to the right 2 While the first driving foot (1-9) is moved to the left.
In summary, the invention provides an alternate stepping piezoelectric stick-slip driver with an anisotropic friction surface, which adopts a nano manufacturing technology to enable friction to have direction dependence, and when a rotor moves rightwards, the friction force generated is smaller than the friction force generated when the rotor moves leftwards, so that the stability of output performance is improved; the driving foot is alternately deformed rightward by the extension and retraction of the piezoelectric stack to push the mover to move rightward, so that the effect of alternately stepping is achieved. The invention has the characteristics of simple and compact structure, convenient control and the like, and has good application prospect in the micro-nano precise driving and positioning fields of precise medical appliances, optical precise instruments, semiconductor processing and the like.
Claims (3)
1. An alternating step piezoelectric stick-slip actuator having an anisotropic friction surface, characterized by: the piezoelectric stick-slip driver consists of a stator (1), a pre-tightening force loading platform (2), a fixed base (3) and a rotor (4); the stator (1) is fixedly arranged on the pre-tightening force loading platform (2), the pre-tightening force loading platform (2) is arranged on the fixed base (3), and the rotor (4) is arranged on the fixed base (3) and is in elastic contact with the driving foot; the stator (1) comprises an I-shaped front beam (1-1), a straight round flexible hinge (1-2), an I-shaped connecting beam (1-3), a C-shaped reset spring (1-4), an I-shaped rear beam (1-5), a mounting hole (1-6), an inverted C-shaped reset spring (1-7), a piezoelectric stack (1-8), a first driving foot (1-9) and a second driving foot (1-10); the rigid part of the stator (1) is I-shaped; a straight round flexible hinge (1-2) is arranged between the I-shaped front beam (1-1) and the I-shaped connecting beam (1-3), so that the I-shaped front beam (1-1) can rotate conveniently; the first driving foot (1-9) is arranged at the left end of the H-shaped front beam (1-1), the second driving foot (1-10) is arranged at the right end of the H-shaped front beam (1-1), and the first driving foot (1-9) and the second driving foot (1-10) are inclined rightwards; the right end of the H-shaped front beam (1-1) is connected with the right end of the H-shaped rear beam (1-5) through a C-shaped reset spring (1-4); the left end of the H-shaped front beam (1-1) is connected with the left end of the H-shaped rear beam (1-5) through an inverted C-shaped reset spring (1-7); two ends of the H-shaped rear beam (1-5) are provided with two mounting holes (1-6) for fixing the stator (1) on the pre-tightening force loading platform (2); the piezoelectric stack (1-8) is arranged between the inverted C-shaped reset spring (1-7) and the I-shaped connecting beam (1-3); the friction surface of the driving foot and the mover (4) has anisotropy, and the friction angle alpha is larger than beta, so that the friction has direction dependence, and the friction force generated when the mover (4) moves rightwards is smaller than the friction force generated when the mover moves leftwards; applying triangular waves to the piezoelectric stacks (1-8), and when the piezoelectric stacks (1-8) stretch, the I-shaped front beams (1-1) incline rightwards, and the first driving feet (1-9) deform rightwards to push the mover (4) to move rightwards; when the piezoelectric stack (1-8) is retracted, the H-shaped front beam (1-1) is restored to be horizontal under the action of the C-shaped and inverted C-shaped reset springs (1-4 and 1-7), the second driving foot (1-10) deforms rightwards to push the rotor (4) to move rightwards, parallel guide mechanisms (1-9-1 and 1-10-1) are arranged in the first driving foot (1-9) and the second driving foot (1-10) to ensure that the driving foot is still in surface contact with the rotor (4) after pretensioning.
2. An alternating stepped piezoelectric stick-slip actuator with anisotropic friction surface according to claim 1, characterized in that the mover (4) and the driving foot contact surface (4-1, 1-9-2, 1-10-2) are directionally dependent by means of nano-fabrication technology, the friction angle α > β, the friction force generated when the mover (4) moves to the right being smaller than the friction force generated when it moves to the left.
3. An alternating step piezoelectric stick-slip actuator with anisotropic friction surface according to claim 1, wherein: the first driving foot (1-9, 1-10) and the rotor (4) are kept in elastic contact by proper pre-tightening before working; applying triangular waves to the piezoelectric stacks (1-8) to control the extension and shortening of the piezoelectric stacks (1-8); when the piezoelectric stack (1-8) stretches, the I-shaped front beam (1-1) inclines rightwards, the first driving foot (1-9) deforms rightwards to push the rotor (4) to move rightwards, and meanwhile the second driving foot (1-10) moves leftwards; when the piezoelectric stack (1-8) is retracted, the H-shaped front beam (1-1) is restored to the horizontal under the action of the C-shaped and inverted C-shaped reset springs (1-4 and 1-7), the second driving foot (1-10) pushes the rotor (4) to move rightwards, and meanwhile the first driving foot (1-9) moves leftwards.
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| CN109905052B (en) * | 2019-04-23 | 2020-04-10 | 苏州大学 | Self-adsorption inertial stick-slip trans-scale precision motion platform based on interface effect |
| CN110061654B (en) * | 2019-04-25 | 2020-09-25 | 宁波大学 | Variable pretightening force stick-slip inertia linear driver for friction regulation of special-shaped texture |
| CN113206615B (en) * | 2021-04-26 | 2022-06-28 | 天津大学 | Inchworm type linear driver with static self-locking function |
| CN114257124A (en) * | 2022-01-04 | 2022-03-29 | 长春工业大学 | Coupling type piezoelectric driving platform of bionic frog leg and driving method thereof |
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| CN101860256A (en) * | 2010-04-02 | 2010-10-13 | 大连理工大学 | High-precision adjustable-speed linear micro-displacement work table |
| CN105827141A (en) * | 2016-06-06 | 2016-08-03 | 长春工业大学 | Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof |
| CN108199615A (en) * | 2018-01-29 | 2018-06-22 | 长春工业大学 | Orthogonal Double drive-type precision piezoelectricity stick-slip line motor and its driving method |
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| US8653762B2 (en) * | 2010-12-23 | 2014-02-18 | General Electric Company | Particle accelerators having electromechanical motors and methods of operating and manufacturing the same |
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Patent Citations (3)
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|---|---|---|---|---|
| CN101860256A (en) * | 2010-04-02 | 2010-10-13 | 大连理工大学 | High-precision adjustable-speed linear micro-displacement work table |
| CN105827141A (en) * | 2016-06-06 | 2016-08-03 | 长春工业大学 | Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof |
| CN108199615A (en) * | 2018-01-29 | 2018-06-22 | 长春工业大学 | Orthogonal Double drive-type precision piezoelectricity stick-slip line motor and its driving method |
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