CN109818527B - Isosceles trapezoid stick-slip piezoelectric linear driver - Google Patents

Isosceles trapezoid stick-slip piezoelectric linear driver Download PDF

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CN109818527B
CN109818527B CN201910261303.1A CN201910261303A CN109818527B CN 109818527 B CN109818527 B CN 109818527B CN 201910261303 A CN201910261303 A CN 201910261303A CN 109818527 B CN109818527 B CN 109818527B
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sliding block
isosceles trapezoid
driving foot
contact point
stator
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CN109818527A (en
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董景石
曹义
丁吉
徐智
刘畅
田大越
关志鹏
范尊强
赵宏伟
曾平
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Jilin University
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Jilin University
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Abstract

The invention discloses an isosceles trapezoid stick-slip piezoelectric linear driver which consists of a base, a sliding block, an isosceles trapezoid stator and a pre-tightening mechanism. The slider and the pre-tightening mechanism are arranged on the base, and the pre-tightening mechanism provided with the isosceles trapezoid stator is used for pre-loading the isosceles trapezoid stator and the slider. The isosceles trapezoid stator comprises an isosceles trapezoid flexible mechanism and four rectangular piezoelectric ceramic plates, and the isosceles trapezoid flexible mechanism is fixed on the surface of the pre-tightening mechanism through two mounting holes. The sawtooth wave signals excite the piezoelectric ceramic plates, so that the isosceles trapezoid mechanism changes the displacement of the driving foot in the x and y directions of the contact point of the driving foot and the sliding block, and the friction force of the contact surface is changed. The sawtooth wave signal rising edge, the driving foot has great y displacement, has increased the positive pressure of slow polarization stage, and then has increased static friction drive power, and the sawtooth wave falling edge, the driving foot has less y displacement, has reduced the dynamic friction resistance of quick reply stage, reaches the purpose of restraining the back, has improved the motion performance.

Description

Isosceles trapezoid stick-slip piezoelectric linear driver
Technical Field
The invention relates to a precise driving device adopting intelligent materials, in particular to a piezoelectric linear driver.
Background
Piezoelectric actuators refer to actuators made of lead zirconate titanate (PZT), lead zinc niobate (PZN), lead magnesium niobate (PMN) and the like, which have many advantages in micro, nano or positioning applications, which have the remarkable characteristics of high resolution (sub-nano scale), high natural frequency (greater than kilohertz) and high driving force (greater than kilonewton scale) compared to other actuators, but which also have the characteristic of small displacement stroke (10 μm-100 μm), and thus often incorporate a stick-slip mechanism to achieve high resolution motion of millimeter-scale stroke.
The working principle of the piezoelectric stick-slip drive is as follows: under the excitation of asymmetric sawtooth voltage signals, the purpose of controlling the driven object to generate tiny displacement is achieved by utilizing the difference between dynamic friction force and static friction force caused by asymmetric vibration of the piezoelectric vibrator. The implementation can adopt asymmetric sawtooth waves to excite the piezoelectric stack slowly and rapidly in an alternating manner, and the inverse piezoelectric effect is utilized to excite the stator to generate slow and rapid alternating motion deformation, so that the stator and the rotor are in two motion states of 'sticking' and 'sliding', and mechanical motion output is realized under the action of friction force.
However, since the piezoelectric stick-slip drive is slow and fast in the deformation stage, the friction force between the stator and the mover acts differently, and in particular, the slow deformation drive stage is represented by a friction driving force and the fast deformation drive stage is represented by a friction resistance. In view of this, the conventional piezoelectric stick-slip driver has obvious rollback phenomenon and lower output efficiency.
Disclosure of Invention
The invention discloses an isosceles trapezoid stick-slip piezoelectric linear driver, which aims to realize a large-stroke, high-precision and large-load combined precise driving device and simultaneously inhibit the rollback phenomenon of piezoelectric stick-slip driving. The isosceles trapezoid stator of the piezoelectric linear driver can enable the force of the piezoelectric ceramics to act on the sliding block moving direction and the positive pressure direction of the stator at the same time, and generates transverse movement to increase the positive pressure of the piezoelectric ceramics in the slow polarization stage, reduce the dynamic friction force of the piezoelectric ceramics in the quick recovery stage and achieve the purpose of inhibiting rollback.
The technical scheme adopted for solving the technical problems is as follows:
an isosceles trapezoid stick-slip piezoelectric linear driver mainly comprises a base (1), a sliding block (2), an isosceles trapezoid stator (3) and a pre-tightening mechanism (4); the sliding block (2) and the pre-tightening mechanism (4) are arranged on the base (1), and the pre-tightening mechanism (4) is used for pre-loading the isosceles trapezoid stator (3) and the sliding block (2); the isosceles trapezoid stator (3) comprises an isosceles trapezoid flexible mechanism (3-1) and four rectangular piezoelectric ceramic plates (3-2), and the isosceles trapezoid flexible mechanism (3-1) is fixed on the surface of the pre-tightening mechanism (4) through two mounting holes (3-1-6); the isosceles trapezoid flexible mechanism (3-1) is a flexible double-rocker mechanism, wherein a transverse shaft (3-1-5) is a fixed frame, a rod where a driving foot is located is a connecting rod, and a left flexible beam (3-1-3) and a right flexible beam (3-1-4) are respectively stuck with left bending piezoelectric ceramics (3-2-1) and right bending piezoelectric ceramics (3-2-2) as driving rockers; when the device works, four piezoelectric ceramic plates (3-2) are excited by the same positive sawtooth wave signal, the four piezoelectric ceramic plates (3-2) generate the same-direction polarization, the left flexible beam (3-1-3) and the right flexible beam (3-1-4) are subjected to the action of the piezoelectric ceramic plates (3-2) to generate bending deformation, the virtual motion track of the contact point of the left driving foot (3-1-1) and the sliding block (2) can be decomposed into displacement in the x direction and the y direction, and when the driving foot is tightly contacted with the sliding block, the virtual motion track change of the contact point is expressed as the change of the normal pressure and the tangential friction force between the contact point of the left driving foot (3-1-1) and the contact point of the right driving foot (3-1-2) and the sliding block (2); in the 'sticking' stage, namely when the left driving foot (3-1-1) and the sliding block (2) contact and move, the virtual track of the contact point is synthesized by positive x-direction and negative y-direction movements, and larger positive pressure can be generated between the left driving foot (3-1-1) and the sliding block (2), so that larger static friction force can be generated between the left driving foot and the sliding block to drive the sliding block (2) to move along the positive x-direction; in the sliding stage, namely when the left flexible beam (3-1-3) is quickly restored due to self elasticity, the virtual track of the contact point is synthesized by negative x-direction and positive y-direction movements, at the moment, the left driving foot (3-1-1) and the sliding block (2) have smaller positive pressure, the dynamic friction resistance between the left driving foot and the sliding block is smaller, and the sliding block (2) is also less retracted under the action of the sliding block.
When the four piezoelectric ceramic plates (3-2) are excited by the same positive sawtooth wave signal in a mode with the same polarization direction, the left flexible beam (3-1-3) and the right flexible beam (3-1-4) are slowly bent and deformed in a slowly rising stage of the sawtooth wave signal, the right driving foot (3-1-2) is separated from the sliding block (2), the left driving foot (3-1-1) and the sliding block (2) are mainly subjected to the action of static friction force, and the contact point is provided with negative y displacement, namely the left flexible beam (3-1-3) and the sliding block (2) are more compact, and the positive pressure of the contact point is increased, so that the static friction driving force is larger and the load capacity is better; in the stage of rapid falling of the sawtooth wave signal, the left flexible beam (3-1-3) is restored to the original state due to self elasticity, and the left driving foot (3-1-1) and the sliding block (2) are mainly acted by the action of dynamic friction force, at the moment, the contact point has positive y-direction displacement, so that the positive pressure of the contact point is reduced, and the sliding block (2) has smaller dynamic friction resistance, so that the retraction of the sliding block (2) is smaller; when the four piezoelectric ceramic plates (3-2) are excited by the same negative sawtooth wave signal, the slider (2) is acted by the right driving foot (3-1-2) to generate negative x-direction motion.
The invention has the advantages that the whole structure of the driver is simple, the output is convenient to adjust, the isosceles trapezoid stator is adopted to generate transverse motion so as to increase the positive pressure of the slow polarization stage of the piezoelectric ceramic, reduce the dynamic friction of the quick recovery stage of the piezoelectric ceramic, and achieve the purpose of inhibiting rollback.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic diagram of an isosceles trapezoid stick-slip piezoelectric linear actuator;
FIG. 2 is a schematic diagram of an isosceles trapezoid stator;
FIG. 3 is a schematic view of the direction of motion of an isosceles trapezoid stator;
FIG. 4 is a schematic diagram of the operation of an isosceles trapezoid stick-slip piezoelectric linear actuator;
fig. 5 is a schematic diagram of an isosceles trapezoid stick-slip piezoelectric linear actuator of the inclined straight-plate type flexible mover.
In the figure, 1, a base, 2, a sliding block, 3, an isosceles trapezoid stator and 4, a pre-tightening mechanism
Detailed Description
The following further describes the implementation method with reference to the accompanying drawings:
[ example 1 ]
The isosceles trapezoid stick-slip piezoelectric linear driver shown in fig. 1 mainly comprises a base (1), a sliding block (2), an isosceles trapezoid stator (3) and a pre-tightening mechanism (4). The slider (2) and the pre-tightening mechanism (4) are arranged on the base (1), and the pre-tightening mechanism (4) provided with the isosceles trapezoid stator (3) is used for pre-loading the isosceles trapezoid stator (3) and the slider (2). In the embodiment, a cylindrical roller sliding block is selected, the working stroke is about 28mm, and the mass of the sliding block is about 23.6g; in the embodiment, the pre-tightening mechanism (4) adopts a manual displacement platform, and the aim of pre-loading can be achieved by adjusting and locking the position of the platform. The isosceles trapezoid stator (3) generates transverse movement after being electrified, and the driving foot (3-1) pushes the sliding block (2) to horizontally move according to the stick-slip movement principle. The isosceles trapezoid stator (3) is a core component of the driver and is used for providing driving force required by movement of the sliding block, and as shown in fig. 2, the isosceles trapezoid stator (3) comprises an isosceles trapezoid flexible mechanism (3-1) and four rectangular piezoelectric ceramic plates (3-2), and the isosceles trapezoid flexible mechanism (3-1) is fixed on the surface of the pre-tightening mechanism (4) through two mounting holes (3-1-6). The left two piezoelectric ceramic plates are called left bending piezoelectric ceramics (3-2-1) and are bonded to the left and right sides of the left flexible beam (3-1-3) through epoxy resin, and the other two ceramic plates are called right bending piezoelectric ceramics (3-2-2) and are bonded to the left and right sides of the right flexible beam (3-1-4). The four piezoelectric ceramic plates (3-2) are polarized along the thickness direction and have the same polarization direction. The movement direction of the sliding block is shown in fig. 3, the left driving foot (3-1-1) is used for driving the sliding block to move towards the positive direction x, and the right driving foot (3-1-2) is used for driving the sliding block to move towards the negative direction x. An angle theta is formed between the flexible beam and the transverse axis, and the x and y displacement of the driving foot is adjusted by adjusting the angle theta.
Lateral motion refers to motion that produces motion in both the x (direction of slider motion) and the y (direction of positive pressure) directions simultaneously. The isosceles trapezoid stator of the piezoelectric linear driver can generate transverse movement to increase positive pressure of the piezoelectric ceramic in a slow polarization stage, so that static friction force of the driving stage is increased, and meanwhile, dynamic friction force of the piezoelectric ceramic in a quick recovery stage is reduced, and the purpose of inhibiting rollback is achieved.
The specific working principle and the stress analysis of the contact point are shown in figure 4.
In the initial state, as shown in FIG. 4a, the preload force F 0 Keeping the slider and the two driving feet in contact with each other when t=t 0 When the preload force F of the slider 0 Equal to positive pressure F generated by the preloading means P The driving signals of the left and right bending piezoelectric ceramics are saw-tooth waves. Each movement period is divided intoTwo steps:
step 1: from time t 0 To t 1 The left and right bending piezoelectric ceramics are slowly polarized at the same time, so that the left driving foot of the isosceles trapezoid flexible mechanism obtains two displacements (l) in x and y directions x And l y ) As shown in fig. 4b, the generated static friction force F S Pushing the slider to forward move by delta L along the x axis;
step 2: from time t 1 To t 2 The left and right bending piezoelectric ceramics are simultaneously and rapidly restored, so that the isosceles trapezoid flexible mechanism returns to its original position, and the slider is kept at the position shown in fig. 4c due to the action of inertial force. By repeating steps 1 and 2, the proposed piezoelectric actuator gradually achieves a large working stroke movement in the positive x-axis direction.
As can be seen from fig. 4, at t 0 -t 1 Stage, static friction force F S Is the driving force for the slide block to advance, and the X-axis positive displacement l generated by the left driving foot x The device is used for pushing the sliding block to move along the positive direction of the x axis; the resulting negative displacement of the y-axis y For increasing the generation of static friction force F S Is a positive pressure F of (2) P . In step 2, by positive pressure F P Generated kinetic friction force F d Is resistance. Kinetic friction force F d Can be defined as F d =μ d F P The method comprises the steps of carrying out a first treatment on the surface of the Wherein F is d Is dynamic friction force, mu d Is the dynamic friction coefficient, F P Is a positive pressure, positive pressure F P Is a variable. At time t1, positive pressure F P Reaching a maximum value, positive pressure F from time t1 to time t2 P Rapidly decrease to F 0 As can be seen from the definition of kinetic friction force, a positive pressure F P Reducing the kinetic friction force F for generating rollback d And is reduced, thus suppressing rollback. When the large-stroke motion along the negative direction of the x-axis is realized, only a reverse sawtooth wave driving electric signal is needed to be provided, and the right driving foot of the isosceles trapezoid stator drives the sliding block to move along the negative direction of the x-axis.
[ example 2 ]
The isosceles trapezoid stick-slip piezoelectric linear driver can also be improved and optimized in structure, as shown in fig. 5, is an isosceles trapezoid stick-slip piezoelectric linear driver additionally provided with an inclined straight-plate type flexible rotor, and the flexible rotor (2 a) mainly comprises a fixed guide rail and a flexible sliding block, wherein key components are that the flexible sliding block comprises a sliding block, a sliding block contact end, an inclined straight-beam type flexible hinge and left and right driving foot contact ends. The sliding blocks in the fixed guide rail and the flexible sliding block are linear guide rail sliding blocks, the sliding block contact ends, the inclined straight beam type flexible hinge and the left and right driving foot contact ends are formed by wire cutting, and the sliding blocks are adhered together through epoxy resin glue. The whole driver mainly comprises a base, a flexible rotor, an isosceles trapezoid stator and a pre-tightening mechanism. The flexible rotor and the pre-tightening mechanism are arranged on the base, the isosceles trapezoid stator is fixed on the pre-tightening mechanism, and the locking force between the isosceles trapezoid stator and the flexible rotor is regulated through the pre-tightening mechanism. The flexible rotor converts the pretightening displacement in the y direction (positive pressure direction) into the displacement in the x direction (rotor moving direction) for pushing the rotor to move while inhibiting the backspacing, so that the output performance of the driver is improved.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples merely represent a few embodiments of the present invention, which are described in more detail and are not to be construed as limiting the scope of the patent. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the present patent. Accordingly, the protection scope of this patent shall be subject to the appended claims.

Claims (2)

1. An isosceles trapezoid stick-slip piezoelectric linear driver is characterized in that: mainly comprises a base (1), a sliding block (2), an isosceles trapezoid stator (3) and a pre-tightening mechanism (4); the sliding block (2) and the pre-tightening mechanism (4) are arranged on the base (1), and the pre-tightening mechanism (4) is used for pre-loading the isosceles trapezoid stator (3) and the sliding block (2); the isosceles trapezoid stator (3) comprises an isosceles trapezoid flexible mechanism (3-1) and four rectangular piezoelectric ceramic plates (3-2), and the isosceles trapezoid flexible mechanism (3-1) is fixed on the surface of the pre-tightening mechanism (4) through two mounting holes (3-1-6); the isosceles trapezoid flexible mechanism (3-1) is a flexible double-rocker mechanism, wherein a transverse shaft (3-1-5) is a fixed frame, a rod where a driving foot is located is a connecting rod, and a left flexible beam (3-1-3) and a right flexible beam (3-1-4) are respectively stuck with left bending piezoelectric ceramics (3-2-1) and right bending piezoelectric ceramics (3-2-2) as driving rockers; when the device works, four piezoelectric ceramic plates (3-2) are excited by the same positive sawtooth wave signal, the four piezoelectric ceramic plates (3-2) generate the same-direction polarization, the left flexible beam (3-1-3) and the right flexible beam (3-1-4) are subjected to the action of the piezoelectric ceramic plates (3-2) to generate bending deformation, the virtual motion track of the contact point of the left driving foot (3-1-1) and the sliding block (2) can be decomposed into displacement in the x direction and the y direction, and when the driving foot is tightly contacted with the sliding block, the virtual motion track change of the contact point is expressed as the change of the normal pressure and the tangential friction force between the contact point of the left driving foot (3-1-1) and the contact point of the right driving foot (3-1-2) and the sliding block (2); in the 'sticking' stage, namely when the left driving foot (3-1-1) and the sliding block (2) contact and move, the virtual track of the contact point is synthesized by positive x-direction and negative y-direction movements, and larger positive pressure can be generated between the left driving foot (3-1-1) and the sliding block (2), so that larger static friction force can be generated between the left driving foot and the sliding block to drive the sliding block (2) to move along the positive x-direction; in the sliding stage, namely when the left flexible beam (3-1-3) is quickly restored due to self elasticity, the virtual track of the contact point is synthesized by negative x-direction and positive y-direction movements, at the moment, the left driving foot (3-1-1) and the sliding block (2) have smaller positive pressure, the dynamic friction resistance between the left driving foot and the sliding block is smaller, and the sliding block (2) is also less retracted under the action of the sliding block.
2. The isosceles trapezoid stick-slip piezoelectric linear actuator of claim 1, wherein: when the four piezoelectric ceramic plates (3-2) are adhered in a mode with the same polarization direction and excited by the same positive sawtooth wave signal, the left flexible beam (3-1-3) and the right flexible beam (3-1-4) are slowly bent and deformed in a slowly rising stage of the sawtooth wave signal, the right driving foot (3-1-2) is separated from the sliding block (2), the left driving foot (3-1-1) and the sliding block (2) are mainly subjected to the action of static friction force, and the contact point is provided with negative y displacement, namely the left flexible beam (3-1-3) and the sliding block (2) are more compact, and the positive pressure of the contact point is larger, so that the static friction driving force is larger and the load capacity is better; in the stage of rapid falling of the sawtooth wave signal, the left flexible beam (3-1-3) is restored to the original state due to self elasticity, and the left driving foot (3-1-1) and the sliding block (2) are mainly acted by the action of dynamic friction force, at the moment, the contact point has positive y-direction displacement, so that the positive pressure of the contact point is reduced, and the sliding block (2) has smaller dynamic friction resistance, so that the retraction of the sliding block (2) is smaller; when the four piezoelectric ceramic plates (3-2) are excited by the same negative sawtooth wave signal, the slider (2) is acted by the right driving foot (3-1-2) to generate negative x-direction motion.
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CN110120760A (en) * 2019-06-18 2019-08-13 哈尔滨理工大学 Double mode piezoelectricity stick-slip linear actuator
CN111162690B (en) * 2020-01-08 2023-08-25 浙江师范大学 Piezoelectric driving device and control method thereof
CN111030505B (en) * 2020-02-20 2024-04-30 吉林大学 Secondary displacement amplifying piezoelectric driver
CN113612406B (en) * 2021-08-17 2023-07-21 吉林大学 Piezoelectric driver based on differential motion principle and control method thereof
CN115085581B (en) * 2022-07-25 2024-06-04 山东大学 Stick-slip driver and method for actively inhibiting rollback movement

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6979934B1 (en) * 1999-06-30 2005-12-27 Pi Ceramic Gmbh Piezoelectric drive, especially a holding frame, a friction element and a circuit configuration
CN102497130A (en) * 2011-12-20 2012-06-13 哈尔滨工业大学深圳研究生院 Linear ultrasonic motor
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN108199613A (en) * 2018-01-29 2018-06-22 长春工业大学 The fixed accurate piezoelectricity stick-slip line motor of bimorph transducer and its driving method
CN109217717A (en) * 2018-09-26 2019-01-15 吉林大学 Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6979934B1 (en) * 1999-06-30 2005-12-27 Pi Ceramic Gmbh Piezoelectric drive, especially a holding frame, a friction element and a circuit configuration
CN102497130A (en) * 2011-12-20 2012-06-13 哈尔滨工业大学深圳研究生院 Linear ultrasonic motor
CN106685262A (en) * 2017-01-12 2017-05-17 广东工业大学 Full-flexible micro-displacement amplification mechanism
CN108199613A (en) * 2018-01-29 2018-06-22 长春工业大学 The fixed accurate piezoelectricity stick-slip line motor of bimorph transducer and its driving method
CN109217717A (en) * 2018-09-26 2019-01-15 吉林大学 Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement

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