CN112803829B - Friction asymmetric inertia piezoelectric linear driving device and method - Google Patents
Friction asymmetric inertia piezoelectric linear driving device and method Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention relates to a friction asymmetric inertia piezoelectric linear driving device and method, and belongs to the field of precision machinery. The driving device comprises a base unit, a driving unit and a sliding block. The driving unit is an asymmetric flexible hinge mechanism with a bridge type displacement amplification hinge and a left pair of driving feet and a right pair of driving feet with different rigidities, and is connected with the sliding block through a screw; the sliding block slides on the guide rail of the basic unit; the drive unit is installed in the U-shaped groove of the base unit through interference fit. The driving method of the device comprises the following steps: the left pair of driving feet and the right pair of driving feet have different rigidity, so that the maximum static friction force borne by the driving feet and the U-shaped groove is different, and when continuous sawtooth-shaped driving voltage is applied to the piezoelectric stack, the sliding block can generate linear stepping motion based on the inertial impact principle. Has the advantages that: the structure is simple, the processing, the assembly and the control are easy, the high-speed large stroke and the high-load output can be realized, and the backspacing displacement is avoided. Has good application prospect in the fields of micro-nano operation, precise instruments, precise processing and the like.
Description
Technical Field
The invention relates to the field of precision machinery, in particular to a friction asymmetric inertia piezoelectric linear driving device and a method, which can be used in the fields of precision/ultra-precision machining, precision optics and instruments, micromanipulation, biomedical engineering and the like.
Background
The driving device with both large stroke and high precision has very important application and requirement in both scientific and industrial fields. The stepping piezoelectric precision driving device has the advantages of high precision, quick response, simple and flexible structure, simple control and the like, and is widely applied to the fields of precision machining and assembly, micro-nano operation, precision machinery, instruments and the like. The stepping piezoelectric driving device is different according to the driving principle, and mainly comprises an inchworm type, a stick-slip type, an ultrasonic type and an inertia type. Although the driving principle is different, the piezoelectric driving devices achieve a large stroke by means of step displacement accumulation. The inchworm type piezoelectric driving device generally easily realizes large output force, the output displacement does not return, but the structure and the assembly are quite complex, and the practical application of the inchworm type piezoelectric driving device is limited. The stick-slip piezoelectric driving device is relatively simple in structure and control and flexible in design, but the output displacement of the stick-slip piezoelectric driving device is backspacing, and the output force is relatively low. The ultrasonic piezoelectric driving device works in a resonance state, the design is complex, the positioning resolution and the positioning precision are low, and meanwhile, friction and abrasion caused by contact of a high-frequency operation rotor and a stator are serious. The structure and control of the inertial piezoelectric driver are simpler, but most of the prior inertial piezoelectric drivers have the problems of overturning moment and large-mass cantilever, so that the whole driving device is unstable in motion. For example, in the literature (a low-frequency structure-control-type piezoelectric actuators using a miniaturized bimorph piezoelectric actuators, IEEE transformations on Industrial Electronics,2019, 66, 6179-. The literature (inert linear actuator driver by piezoelectric stack with changeable friction coefficients, Nanotechnology and Precision Engineering, 2008, 6(3), 190-. In conclusion, it can be seen that the development of an inertial piezoelectric linear driving device having the problems of stability, large stroke, high speed, large load, simple structure, easy control, no overturning moment and large mass cantilever is still a difficult problem and is a problem to be solved urgently.
Disclosure of Invention
The invention aims to provide a friction asymmetric inertia piezoelectric linear driving device and a method, which solve the problems in the prior art. The invention pre-tightens the asymmetric flexible hinge mechanism with two pairs of driving feet with different left and right rigidity into the U-shaped groove so as to generate asymmetric friction in the movement process, and realizes the large-stroke stable output of the driving device based on the inertial impact movement principle. The device is simple to control, large-stroke linear stepping motion can be realized through continuous sawtooth-shaped driving voltage, the symmetry of the sawtooth-shaped driving voltage is changed, and reverse motion of the device can be realized. The friction asymmetric inertia piezoelectric linear driving device has the advantages of exquisite structure, easiness in processing and assembling, simplicity in control, low cost and the like, and can realize stable, high-speed, bidirectional, large-stroke, large-load and non-rollback continuous linear stepping motion.
The technical scheme adopted by the invention for realizing the purpose is as follows:
the friction asymmetric inertia piezoelectric linear driving device comprises a basic unit, a driving unit and a sliding block 3; the driving unit is connected with the sliding block 3 through a screw; the sliding block 3 slides on a guide rail 4 of the basic unit; the driving unit is arranged in the U-shaped groove 5 of the base unit in an interference fit mode.
The base unit comprises a guide rail 4 and a U-shaped groove 5; the guide rail 4 is fixed on the bottom middle line of the U-shaped groove 5 through screws.
The driving unit comprises an asymmetric flexible hinge mechanism 1 and a piezoelectric stack 2; the asymmetric flexible hinge mechanism 1 consists of a thin end driving foot 1-1, a bridge type displacement amplifying hinge 1-2 and a thick end driving foot 1-3; the asymmetric flexible hinge mechanism 1 is fixed on the sliding block 3 through a screw at one side of the thin-end driving foot 1-1; the thin end driving foot 1-1 and the thick end driving foot 1-3 are arranged in a U-shaped groove 5 of the base unit in an interference fit mode with the same deformation amount; the piezoelectric stack 2 is pre-installed in a groove of the bridge type displacement amplifying hinge 1-2.
Another object of the present invention is to provide a method for controlling a friction asymmetric inertial piezoelectric linear driving device, comprising the following steps:
a) a sawtooth-shaped driving voltage is applied to the piezoelectric stack 2 of the driving unit, and when the voltage rises slowly, the piezoelectric stack 2 stretches slowly, so that the flexible part in the bridge type displacement amplifying hinge 1-2 deforms elastically. Because the initial pre-deformation of the thin end driving foot 1-1 and the thick end driving foot 1-3 is the same when the thin end driving foot 1-1 and the thick end driving foot 1-3 are installed in the U-shaped groove 5, the contact force between the thin end driving foot 1-1 and the U-shaped groove 5 is smaller than the contact force between the thick end driving foot 1-3 and the U-shaped groove 5, and further the maximum static friction force which can be borne by the thin end driving foot 1-1 is smaller than that of the thick end driving foot 1-3. Along with the increase of the driving voltage, the elastic deformation of the bridge type displacement amplification hinge 1-2 is increased, and the friction force between the thin end driving foot 1-1 and the thick end driving foot 1-3 and the U-shaped groove 5 is gradually increased; at the critical driving voltage, the thin-end driving foot 1-1 reaches the maximum static friction force, and then the thin-end driving foot 1-1 slides relative to the U-shaped groove 5 with the further increase of the driving voltage. In the above process, the thick end driving foot 1-3 remains stationary because the maximum static friction force that the thick end driving foot 1-3 can bear is not reached. When the driving voltage is rapidly reduced, the piezoelectric stack 2 is rapidly shortened, the bridge type displacement amplifying hinge 1-2 is rapidly and elastically restored to the initial state, the maximum static friction force between the thick end driving foot 1-3 and the U-shaped groove 5 is overcome by the inertial impact force generated in the process, and the thick end driving foot 1-3 moves for a certain distance along the x axis; by repeating the process, continuous stepping motion along the x-axis can be realized;
b) the amplitude and the frequency of the driving voltage of the piezoelectric stack 2 are adjusted, so that the movement speed of the piezoelectric stack can be regulated and controlled;
c) by applying a reverse sawtooth wave drive voltage to the piezoelectric stack 2, a reverse motion can be achieved.
The invention has the beneficial effects that: the device has the advantages of simple structure, easy processing and assembly, convenient control, and capability of realizing stable, non-return, large-load, high-speed and theoretically infinite-stroke continuous stepping motion based on the asymmetric friction and inertial impact principles; through experiment verification, the movement speed exceeds 200 microns/second at the driving voltage of 120 volts and the driving frequency of 10 Hz. Based on the friction asymmetric structure and the method provided by the invention, the dimensional parameters of the friction asymmetric structure can be optimized and adjusted, and the inertia piezoelectric linear driving device with different structural parameters and output performance is designed to meet the actual requirements, so that the friction asymmetric structure and the method have good application prospects in the fields of precision/ultra-precision machining, precision optics and instruments, micromanipulation, biomedical engineering and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic perspective view of a driving device according to the present invention;
FIG. 2 is a top view of the drive of the present invention;
FIG. 3 is a schematic view of an asymmetric flexible hinge mechanism with a piezoelectric stack according to the present invention;
FIG. 4 is a schematic diagram of the deformation of the asymmetric flexible hinge mechanism of the present invention under the displacement output of the piezoelectric element;
FIG. 5 is a timing diagram of forward driving voltages according to the present invention;
FIG. 6 is a timing diagram of the reverse driving voltage according to the present invention;
FIG. 7 is an actual motion output curve measured by the driving device of the present invention under different driving frequencies and driving voltage amplitudes of 120V;
fig. 8 is an actual motion output curve of the driving device of the present invention under different driving voltage amplitudes at a driving frequency of 10 hz.
In the figure: 1. an asymmetric flexible hinge mechanism; 1-1, thin end drive foot; 1-2, a bridge type displacement amplifying hinge; 1-3, thick end drive foot; 2. a piezoelectric stack; 3. a slider; 4. a guide rail; 5. a U-shaped groove.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 and 2, the friction asymmetric inertia piezoelectric linear driving device of the invention comprises a base unit, a driving unit and a sliding block 3; the driving unit is connected with the sliding block 3 through a screw; the sliding block 3 slides on a guide rail 4 of the basic unit; the driving unit is arranged in the U-shaped groove 5 of the base unit in an interference fit mode.
Referring to fig. 1 and 2, the base unit includes a guide rail 4 and a U-shaped groove 5; the guide rail 4 is fixed on the bottom middle line of the U-shaped groove 5 through screws.
Referring to fig. 1 to 4, the driving unit includes an asymmetric flexible hinge mechanism 1 and a piezoelectric stack 2; the asymmetric flexible hinge mechanism 1 consists of a thin end driving foot 1-1, a bridge type displacement amplifying hinge 1-2 and a thick end driving foot 1-3; the asymmetric flexible hinge mechanism 1 is fixed on the sliding block 3 through a screw at one side of the thin-end driving foot 1-1; the thin end driving foot 1-1 and the thick end driving foot 1-3 are arranged in a U-shaped groove 5 of the base unit in an interference fit mode with the same deformation amount; the piezoelectric stack 2 is pre-installed in a groove of the bridge type displacement amplifying hinge 1-2.
Referring to fig. 1 to 6, a method for controlling a friction asymmetric inertial piezoelectric linear driving device is specifically described, which includes:
a) a sawtooth-shaped driving voltage is applied to the piezoelectric stack 2 of the driving unit, when the voltage rises slowly, the piezoelectric stack 2 stretches slowly, so that the flexible part in the bridge-type displacement amplification hinge 1-2 deforms elastically and acts on the thin-end driving foot 1-1 and the thick-end driving foot 1-3, and at the moment, relative movement trends occur between the thin-end driving foot 1-1 and the thick-end driving foot 1-3 and the U-shaped groove 5. Because the initial pre-deformation of the thin end driving foot 1-1 and the thick end driving foot 1-3 is the same when the thin end driving foot 1-1 and the thick end driving foot 1-3 are installed in the U-shaped groove 5, the contact force between the thin end driving foot 1-1 and the U-shaped groove 5 is smaller than the contact force between the thick end driving foot 1-3 and the U-shaped groove 5, and further the maximum static friction force which can be borne by the thin end driving foot 1-1 is smaller than that of the thick end driving foot 1-3. Along with the increase of the driving voltage, the elastic deformation of the bridge type displacement amplification hinge 1-2 is increased, and the friction force between the thin end driving foot 1-1 and the thick end driving foot 1-3 and the U-shaped groove 5 is gradually increased; at the critical driving voltage, the thin-end driving foot 1-1 reaches the maximum static friction force, and then the thin-end driving foot 1-1 slides relative to the U-shaped groove 5 with further increase of the driving voltage, moving the maximum single step displacement Δ S0 along the x-axis. In the above process, the thick end driving foot 1-3 remains stationary because the maximum static friction force that the thick end driving foot 1-3 can bear is not reached. When the driving voltage drops rapidly, the piezoelectric stack 2 shortens rapidly, and the bridge type displacement amplifying hinge 1-2 elastically returns to the initial state rapidly. The rapid contraction of the piezoelectric stack 2 generates inertial impact force, and simultaneously acts on the thin end driving foot 1-1 and the thick end driving foot 1-3, so that the maximum static friction force between the thick end driving foot 1-3 and the U-shaped groove 5 is overcome, the thick end driving foot 1-3 moves for a distance along the x axis, and meanwhile, the thin end driving foot 1-1 also generates smaller sliding displacement L0; by repeating the process, continuous stepping motion along the x-axis can be realized;
b) the amplitude and the frequency of the driving voltage of the piezoelectric stack 2 are adjusted, so that the movement speed of the piezoelectric stack can be regulated and controlled;
c) by applying a reverse sawtooth wave drive voltage to the piezoelectric stack 2, a reverse motion can be achieved.
Referring to fig. 7, it shows the actual motion output curve of the present invention measured at different driving voltage frequencies with the driving voltage amplitude of 120 v. FIG. 8 is a graph of the actual motion output of the present invention measured at a drive frequency of 10 Hz and at different drive voltage amplitudes. At a driving voltage of 120V and a frequency of 10 Hz, the driving speed exceeds 200 microns/second
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.
Claims (3)
1. A friction asymmetric inertia piezoelectric linear driving device is characterized in that: comprises a basic unit, a driving unit and a slide block (3); the driving unit comprises an asymmetric flexible hinge mechanism (1) and a piezoelectric stack (2); the asymmetric flexible hinge mechanism (1) consists of a thin end driving foot (1-1), a bridge type displacement amplification hinge (1-2) and a thick end driving foot (1-3); the asymmetric flexible hinge mechanism (1) is fixed on the sliding block (3) through a screw at one side of the thin-end driving foot (1-1); the thin end driving foot (1-1) and the thick end driving foot (1-3) are arranged in a U-shaped groove (5) of the base unit in an interference fit mode with the same deformation amount; the piezoelectric stack (2) is pre-tightened and installed in a groove of the bridge type displacement amplification hinge (1-2); the sliding block (3) slides on a guide rail (4) of the basic unit.
2. A frictional asymmetric inertial piezoelectric linear drive unit as claimed in claim 1, wherein: the base unit comprises a guide rail (4) and a U-shaped groove (5); the guide rail (4) is fixed on the bottom middle line of the U-shaped groove (5) through screws.
3. A driving method of a friction asymmetric inertia piezoelectric linear driving device is characterized in that: the method comprises the following steps:
a) applying sawtooth-shaped driving voltage to a piezoelectric stack (2) of a driving unit, and when the voltage rises slowly, the piezoelectric stack (2) stretches slowly to enable a flexible part in the bridge type displacement amplification hinge (1-2) to deform elastically; because the initial pre-deformation of the thin end driving foot (1-1) and the initial pre-deformation of the thick end driving foot (1-3) are the same when the thin end driving foot (1-1) and the thick end driving foot (1-3) are installed in the U-shaped groove (5), the contact force between the thin end driving foot (1-1) and the U-shaped groove (5) is smaller than the contact force between the thick end driving foot (1-3) and the U-shaped groove (5), and further the maximum static friction force which can be borne by the thin end driving foot (1-1) is smaller than that of the thick end driving foot (1-3); along with the increase of the driving voltage, the elastic deformation of the bridge type displacement amplification hinge (1-2) is increased, and the friction force between the thin end driving foot (1-1) and the thick end driving foot (1-3) and the U-shaped groove (5) is gradually increased; at the critical driving voltage, the thin-end driving foot (1-1) reaches the maximum static friction force, and then the thin-end driving foot (1-1) generates relative sliding relative to the U-shaped groove (5) along with the further increase of the driving voltage; in the process, the thick end driving feet (1-3) keep still because the maximum static friction force which can be borne by the thick end driving feet (1-3) is not reached; when the driving voltage is rapidly reduced, the piezoelectric stack (2) is rapidly shortened, the bridge type displacement amplification hinge (1-2) rapidly and elastically restores to an initial state, and the inertia impact force generated in the process overcomes the maximum static friction force between the thick end driving foot (1-3) and the U-shaped groove (5) so that the thick end driving foot (1-3) moves for a certain distance along the x axis; by repeating the process, continuous stepping motion along the x-axis can be realized;
b) the amplitude and the frequency of the driving voltage of the piezoelectric stack (2) are adjusted, so that the movement speed of the piezoelectric stack can be regulated and controlled;
c) the reverse movement can be achieved by applying a reverse sawtooth wave drive voltage to the piezoelectric stack (2).
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| CN113206616A (en) * | 2021-05-31 | 2021-08-03 | 苏州大学 | Cross-scale precision motion platform |
| CN114057158B (en) * | 2021-11-18 | 2024-04-09 | 吉林大学 | Method for processing surface composite micro-nano structure by using stick-slip driving rollback phenomenon |
| CN114244183B (en) * | 2021-12-25 | 2023-08-15 | 西安交通大学 | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2001086773A (en) * | 1999-09-10 | 2001-03-30 | Nikon Corp | Oscillation actuator |
| CN106982005A (en) * | 2017-03-23 | 2017-07-25 | 吉林大学 | Asymmetric biplate piezoelectric fabric inertia drive |
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| KR101366213B1 (en) * | 2012-07-10 | 2014-02-24 | 김정훈 | Vibration apparatus employing piezo electric element for mobile terminal |
| CN203339985U (en) * | 2013-06-03 | 2013-12-11 | 吉林大学 | Novel looper type bionic crawling piezoelectric precise driving platform |
| CN204906224U (en) * | 2015-09-02 | 2015-12-23 | 燕山大学 | Novel step -by -step piezoelectricity motor of fine motion |
| CN110768571B (en) * | 2019-04-08 | 2022-08-23 | 浙江师范大学 | Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle |
| CN110138266B (en) * | 2019-06-26 | 2020-04-14 | 西安电子科技大学 | Inchworm type piezoelectric actuator |
| CN111049421A (en) * | 2020-01-09 | 2020-04-21 | 吉林大学 | Piezoelectric linear driving device simulating sliding plate movement design and control method |
| CN111049422B (en) * | 2020-01-15 | 2020-12-29 | 合肥工业大学 | Clamping control inertial impact motor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2001086773A (en) * | 1999-09-10 | 2001-03-30 | Nikon Corp | Oscillation actuator |
| CN106982005A (en) * | 2017-03-23 | 2017-07-25 | 吉林大学 | Asymmetric biplate piezoelectric fabric inertia drive |
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