CN111049421A - Piezoelectric linear driving device simulating sliding plate movement design and control method - Google Patents

Piezoelectric linear driving device simulating sliding plate movement design and control method Download PDF

Info

Publication number
CN111049421A
CN111049421A CN202010020386.8A CN202010020386A CN111049421A CN 111049421 A CN111049421 A CN 111049421A CN 202010020386 A CN202010020386 A CN 202010020386A CN 111049421 A CN111049421 A CN 111049421A
Authority
CN
China
Prior art keywords
driving
unit
guide rail
piezoelectric
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010020386.8A
Other languages
Chinese (zh)
Inventor
黄虎
王馗沣
李轩
孙午向
徐智
杨智鑫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jilin University
Original Assignee
Jilin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jilin University filed Critical Jilin University
Priority to CN202010020386.8A priority Critical patent/CN111049421A/en
Publication of CN111049421A publication Critical patent/CN111049421A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods

Abstract

The invention relates to a piezoelectric linear driving device simulating a sliding plate movement design and a control method, and belongs to the field of precision machinery. The driving device comprises a guide rail, a driving unit, a pretightening force adjusting unit and a moving unit. The pretightening force adjusting unit is installed on the driving unit through a screw, the driving unit is connected with the moving unit through a screw, and the pretightening force between the guide rail and the driving foot of the driving unit is micro-adjusted through the pretightening screw of the pretightening force adjusting unit. The driving device realizes continuous linear motion through a periodic sawtooth-shaped driving voltage waveform, and the step pitch and the speed of the driving device are adjusted by controlling the amplitude and the frequency of the driving voltage waveform. Has the advantages that: the structure is simple, the control is convenient, the backspacing displacement is small, the moving speed is high, and the theoretical infinite stroke can be realized when the guide rail is infinite. The method has good application prospect in the fields of precision machining, precision measurement, precision optics, biomedical engineering and the like which need large-stroke and high-precision positioning.

Description

Piezoelectric linear driving device simulating sliding plate movement design and control method
Technical Field
The invention relates to the field of precision machinery, in particular to a piezoelectric linear driving device and a control method simulating the motion design of a sliding plate, which can be used in the fields of precision machining, precision measurement, precision optics, biomedical engineering and the like requiring large-stroke and high-precision driving.
Background
The precise piezoelectric driving device has the advantages of compact and flexible structure, good control characteristic, high response speed, high output precision and the like, has wide application value and actual requirements in academic and industrial fields, and plays an increasingly important role in the fields of precision and ultra-precision machining, biomedical, aerospace, photoelectron and the like.
The piezoelectric driving device converts electric energy into mechanical energy by utilizing piezoelectric materials under the inverse piezoelectric effect, realizes rotation or linear motion by controlling the mechanical deformation of the piezoelectric materials, and can be divided into the following parts according to the driving principle of the work of the piezoelectric driving device: ultrasonic piezoelectric driving device, impact piezoelectric driving device, inchworm piezoelectric driving device and stick-slip piezoelectric driving device. The stick-slip piezoelectric driving device is an important component, and has the advantages of simple structure, convenience in assembly, large stroke and the like, so that the parasitic motion principle and the stick-slip driving principle related to the stick-slip piezoelectric driving device are widely applied to the design of the piezoelectric driving device and become a research hotspot in recent years. However, most of the current stick-slip piezoelectric driving devices often have the problems of low speed, large backing displacement and the like, and the output performances such as driving efficiency, positioning accuracy and the like are influenced. For example, in Design and experimental performance of a piezoelectric cantilever application to the stick-slip motion test, a piezoelectric cart is designed by using a stick-slip driving principle, and displacement outputs show good linear relation under different driving voltages and driving frequencies, but the proposed piezoelectric cart cannot effectively operate when the driving voltage is less than 32 v; in addition, the moving speed is not high, the backspacing displacement is large, the driving efficiency is limited, and the application in practice is influenced. For example, in Design, analysis and experiments of a linear piezoelectric actuator mechanism with a long blade structure, a linear piezoelectric actuator is designed by using a flexible mechanism with a wing skeleton structure, and the actuator solves the difference of positive and negative motion output performance based on a stick-slip driving principle, but the structure and control of the actuator are relatively complex, the motion performance is not superior, the backspacing phenomenon is serious, and the moving speed is slow and unstable. From the above analysis, it is still a difficult point and an urgent problem to be solved to develop a novel piezoelectric driving device with practical performance indexes such as simple structure, convenient control, small backspacing displacement, fast moving speed, large moving stroke and the like.
Disclosure of Invention
The invention aims to provide a piezoelectric linear driving device and a control method simulating the motion design of a sliding plate, which solve the problems in the prior art. The piezoelectric linear driving device designed by simulating the sliding plate movement has the advantages of simple structure and convenience and rapidness in control, the output performance can be conveniently regulated and controlled by adjusting the pretightening screws of the pretightening force adjusting units, the large-range continuous linear movement can be realized by applying the periodic sawtooth driving voltage, the movement speed can reach millimeter-scale per second, the piezoelectric linear driving device has good output performance, and an available scheme is provided for large-stroke, high-speed and high-precision driving. In addition, the bionic design is widely applied to the fields of sensors, drivers, new materials, aerospace and the like, and provides a new idea for solving some scientific and technical problems.
The above object of the present invention is achieved by the following technical solutions:
the piezoelectric linear driving device simulating the sliding plate movement design comprises four parts, namely a guide rail 1, a driving unit, a pretightening force adjusting unit and a moving unit, wherein the pretightening force adjusting unit is arranged on the driving unit through a screw 8; the driving unit is connected with the moving unit through a screw 8, the pretightening force between the driving unit and the guide rail 1 can be adjusted through the pretightening force adjusting unit, and the moving unit moves linearly along the guide rail 1 under the action of the driving force generated by the driving unit.
The driving unit comprises a driving foot 2, a flexible hinge 3, a piezoelectric stack 4 and a wedge block 5; the piezoelectric stack 4 is pre-tightened and installed in the groove of the flexible hinge 3 through a wedge block 5 in a tight fit mode; the driving feet 2 are matched with the guide rail 1 in an elastic contact manner.
The pre-tightening force adjusting unit consists of an L-shaped plate 6 and a pre-tightening screw 7; the L-shaped plate 6 is arranged on the flexible hinge 3 in the driving unit through a screw 8; the deformation of the flexible hinge 3 in the driving unit around the z direction is finely adjusted by changing the screwing degree of the pretightening screw 7 into the L-shaped plate 6, so that the pretightening force adjustment of the driving foot 2 and the guide rail 1 in the driving unit is realized.
The moving unit comprises a connecting plate 9 and a sliding block 10, and the connecting plate 9 is fixed on the sliding block 10 through screws.
Another object of the present invention is to provide a method for controlling a piezoelectric linear actuator designed to simulate a skateboard, comprising the steps of:
A) the pretightening screw 7 of the pretightening force adjusting unit is slightly adjusted to enable the driving foot 2 to be in elastic contact fit with the guide rail 1;
B) applying sawtooth-shaped driving voltage to the piezoelectric stack 4 of the driving unit, wherein in the process of slowly increasing the driving voltage, the piezoelectric stack 4 slowly extends under the action of inverse piezoelectric effect, so that the flexible part in the flexible hinge 3 elastically deforms, static friction force is generated between the driving foot 2 and the guide rail 1, rolling friction force is generated between the slide block 10 in the moving unit and the guide rail 1, and the slide block 10 is caused to generate forward displacement towards the x axis because the rolling friction force is far smaller than the static friction force, so that the forward movement of the slide block 10 is realized; in the process that the driving voltage is rapidly reduced, due to the action of the inertia force and the elastic recovery of the flexible hinge 3, the sliding block 10 only has a relatively tiny retraction displacement, so that the sliding block 10 finally realizes forward movement in a driving voltage period, and the driving device can realize continuous forward movement under the action of the periodic sawtooth-shaped driving voltage;
C) the reverse motion of the slider 10 can be realized by applying reverse periodic sawtooth wave driving voltage to the piezoelectric stack 4, and the motion speed of the slider 10 can be controlled by changing the amplitude and the driving frequency of the driving voltage of the piezoelectric stack 4.
The invention has the beneficial effects that: the piezoelectric linear driving device provided by the invention has the advantages of simple structure, convenience and quickness in control, small backspacing displacement, high moving speed and large moving stroke, and the pretightening force between the guide rail and the driving foot of the driving unit is micro-adjusted through the pretightening force adjusting unit, so that the bearing capacity of the piezoelectric linear driving device is adjusted, and the applicability of the piezoelectric linear driving device is improved. Theoretically, the piezoelectric linear driving device developed by the scheme can realize infinite displacement stroke when the guide rail is infinite; under the condition of 120V of driving voltage and 10 Hz of driving frequency, the moving speed of the moving unit exceeds 0.37 mm/s; the driving speed can be conveniently adjusted by changing the amplitude and the frequency of the driving voltage so as to meet the application requirements of different occasions. The method can be used in the fields of precision machining, precision measurement, precision optics, biomedical engineering and the like which need large-stroke and high-precision driving. The application range is wide, the output performance is stable, and the practicability is strong.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic perspective view of a piezoelectric linear actuator designed to simulate the motion of a skateboard in accordance with the present invention;
FIG. 2 is a front view structural diagram of the present invention;
FIG. 3 is a schematic perspective view of a driving unit according to the present invention;
FIG. 4 is a schematic view of the drive foot and flexible hinge of the drive unit of the present invention;
FIG. 5 is a schematic diagram of the operation of a skateboard based on the simulation of skateboard movement according to the present invention;
FIG. 6 is a schematic diagram of the linear driving of the present invention based on the simulation of the sliding plate movement and stick-slip principle;
FIG. 7 shows the actual forward motion output characteristics of the driving device of the present invention measured at a driving frequency of 10 Hz and a driving voltage amplitude of 40-120V;
FIG. 8 is a graph showing the actual forward motion output characteristics of the driving device of the present invention measured at a driving frequency between 1 and 10 Hz when the driving voltage amplitude is fixed at 100V.
FIG. 9 is a timing diagram of the periodic sawtooth driving voltage according to the present invention.
FIG. 10 is a timing diagram of an inverted periodic sawtooth driving voltage according to the present invention.
In the figure: 1. a guide rail; 2. a drive foot; 3. a flexible hinge; 4. a piezoelectric stack; 5. a wedge block; 6. an L-shaped plate; 7. pre-tightening the screw; 8, a screw; 9. a connecting plate; 10. a slide block.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 and 2, the piezoelectric linear driving device simulating the sliding plate motion design of the present invention includes four parts, namely a guide rail 1, a driving unit, a pretightening force adjusting unit and a moving unit, wherein the pretightening force adjusting unit is installed on the driving unit through a screw 8; the driving unit is connected with the moving unit through a screw 8, the pretightening force between the driving unit and the guide rail 1 can be adjusted through the pretightening force adjusting unit, and the moving unit moves linearly along the guide rail 1 under the action of the driving force generated by the driving unit.
Referring to fig. 1 to 4, the driving unit includes a driving foot 2, a flexible hinge 3, a piezoelectric stack 4, and a wedge 5; the piezoelectric stack 4 is pre-tightened and installed in the groove of the flexible hinge 3 through a wedge block 5 in a tight fit mode; the driving feet 2 are matched with the guide rail 1 in an elastic contact manner.
Referring to fig. 1 and 2, the pretension adjusting unit is composed of an L-shaped plate 6 and a pretension screw 7; the L-shaped plate 6 is arranged on the flexible hinge 3 in the driving unit through a screw 8; the deformation of the flexible hinge 3 in the driving unit around the z direction is finely adjusted by changing the screwing degree of the pretightening screw 7 into the L-shaped plate 6, so that the pretightening force adjustment of the driving foot 2 and the guide rail 1 in the driving unit is realized.
Referring to fig. 1 and 2, the moving unit includes a connecting plate 9 and a sliding block 10, and the connecting plate 9 is fixed on the sliding block 10 by screws.
Referring to fig. 5, it is a schematic diagram of the operation of the skateboard based on the simulation of the motion of the skateboard, which is just a step of simulating the start of the motion of the skateboard, and the continuous linear motion is realized by repeatedly executing the step, and the specific steps of the motion are as follows:
a preparation stage: as shown in fig. 5 (a), the skateboard is first placed on the ground, and then, one foot is placed on the upper side of the skateboard and the other foot is placed on the ground;
a starting stage: as shown in fig. 5 (b), in the case where the upper body is slightly bent forward and the knees are bent, the weight of the body will slightly move to the feet of the skateboard having been put on, and the arms are extended to maintain balance. The foot on the ground is gently removed from the ground and the skateboard will then move forward a distance L. By repeating this process, long distances can be obtained by stepwise accumulation.
Referring to fig. 6, it is a working principle diagram of the present invention for realizing linear driving based on the principle of simulating the movement of a sliding plate and stick-slip, and the following is a detailed description of the working principle and control method of a piezoelectric linear driving device with a design simulating the movement of a sliding plate, which mainly includes the following steps:
A) the pretightening screw 7 of the pretightening force adjusting unit is slightly adjusted to enable the driving foot 2 to be in elastic contact fit with the guide rail 1;
B) a sawtooth-shaped drive voltage (shown in fig. 9) is applied to the piezoelectric stack 4 of the drive unit, as shown in (a) of fig. 6, at t0At that time, no driving voltage is applied to the piezoelectric stack 4, and the entire driving apparatus is maintainedHeld in its initial position; as shown in (b) of fig. 6, from time t0To t1The process of slowly increasing the driving voltage is that the piezoelectric stack 4 slowly extends under the action of the inverse piezoelectric effect, so that the flexible part in the flexible hinge 3 elastically deforms, and a static friction force f is generated between the driving foot 2 and the guide rail 1RThe sliding block 10 in the moving unit and the guide rail 1 are rolling friction force, and because the rolling friction force is far smaller than static friction force, the sliding block 10 is caused to generate positive displacement L towards the x axis, so that the positive movement of the sliding block 10 is realized; as shown in (c) of fig. 6, from time t1To T, the driving voltage rapidly drops, the piezoelectric stack 4 rapidly recovers to the initial length, the flexible hinge also rapidly recovers to the initial state, and due to the action of the inertia force and the elastic recovery action of the flexible hinge 3, relative sliding can occur between the driving foot 2 and the guide rail 1, because the guide rail is fixed, and the friction force fLWill drive the slide 10 to generate a relatively small back-off displacement L0Thus, the slider 10 finally achieves a forward motion within one driving voltage period; at time T, the drive voltage drops to zero, one drive voltage cycle ends, and the single step effective displacement is Δ L-L0By periodically repeating t0In the driving process to T time, the driving device can realize continuous forward motion, and theoretically can realize continuous linear motion with infinite stroke, small backspacing and high speed;
C) the reverse motion of the slider 10 can be realized by applying a reverse periodic sawtooth wave driving voltage (shown in fig. 10) to the piezoelectric stack 4, and the motion speed of the slider 10 can be controlled by changing the amplitude and the magnitude of the driving voltage and the driving frequency of the piezoelectric stack 4.
Referring to fig. 7, it is the actual forward motion output characteristic measured when the driving frequency of the driving device of the present invention is fixed at 10 hz and the amplitude of the driving voltage is between 40-120 v; at a drive voltage of 120 volts and a drive frequency of 10 hertz, the movement speed of the movement unit exceeds 0.37 mm/sec.
Referring to fig. 8, the actual forward motion output characteristics of the driving device of the present invention measured at a driving frequency between 1 and 10 hz when the driving voltage amplitude was fixed at 100 v.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.

Claims (5)

1. A piezoelectric linear driving device simulating the movement design of a sliding plate is characterized in that: the device comprises a guide rail (1), a driving unit, a pretightening force adjusting unit and a moving unit, wherein the pretightening force adjusting unit is installed on the driving unit through a screw (8); the driving unit is connected with the moving unit through a screw (8), the pretightening force between the driving unit and the guide rail (1) can be adjusted through the pretightening force adjusting unit, and the moving unit moves linearly along the guide rail (1) under the action of the driving force generated by the driving unit.
2. A piezoelectric linear actuator designed to mimic the motion of a skateboard as in claim 1, wherein: the driving unit comprises a driving foot (2), a flexible hinge (3), a piezoelectric stack (4) and a wedge block (5); the piezoelectric stack (4) is installed in the groove of the flexible hinge (3) in a tight fit mode through a wedge block (5) in a pre-tightening mode; the driving foot (2) is matched with the guide rail (1) in an elastic contact manner.
3. A piezoelectric linear actuator designed to mimic the motion of a skateboard as in claim 1, wherein: the pre-tightening force adjusting unit consists of an L-shaped plate (6) and a pre-tightening screw (7); the L-shaped plate (6) is arranged on a flexible hinge (3) in the driving unit through a screw (8); the deformation of the flexible hinge (3) in the driving unit around the z direction is finely adjusted by changing the screwing degree of the pretightening screw (7) into the L-shaped plate (6), so that the pretightening force adjustment of the driving foot (2) and the guide rail (1) in the driving unit is realized.
4. A piezoelectric linear actuator designed to mimic the motion of a skateboard as in claim 1, wherein: the movement unit comprises a connecting plate (9) and a sliding block (10), and the connecting plate (9) is fixed on the sliding block (10) through screws.
5. A control method of a piezoelectric linear driving device simulating the movement design of a sliding plate is characterized in that: the method comprises the following steps:
A) the pretightening screw (7) of the pretightening force adjusting unit is subjected to micro-motion adjustment so that the driving foot (2) and the guide rail (1) are in elastic contact fit;
B) applying sawtooth-shaped driving voltage to a piezoelectric stack (4) of a driving unit, wherein in the process of slowly rising of the driving voltage, the piezoelectric stack (4) slowly extends under the action of inverse piezoelectric effect, so that a flexible part in a flexible hinge (3) elastically deforms, static friction force is generated between a driving foot (2) and a guide rail (1), rolling friction force is generated between a sliding block (10) and the guide rail (1) in a moving unit, and the sliding block (10) is caused to generate forward displacement towards an x axis because the rolling friction force is far smaller than the static friction force, so that the forward movement of the sliding block (10) is realized; in the process that the driving voltage is rapidly reduced, due to the action of the inertia force and the elastic recovery action of the flexible hinge (3), the sliding block (10) only has a relatively tiny retraction displacement, so that the sliding block (10) finally realizes forward movement in a driving voltage period, and the driving device can realize continuous forward movement under the action of the periodic sawtooth-shaped driving voltage;
C) the reverse motion of the slider (10) can be realized by applying reverse periodic sawtooth wave driving voltage to the piezoelectric stack (4), and the motion speed of the slider (10) can be controlled by changing the amplitude and the driving frequency of the driving voltage of the piezoelectric stack (4).
CN202010020386.8A 2020-01-09 2020-01-09 Piezoelectric linear driving device simulating sliding plate movement design and control method Pending CN111049421A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010020386.8A CN111049421A (en) 2020-01-09 2020-01-09 Piezoelectric linear driving device simulating sliding plate movement design and control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010020386.8A CN111049421A (en) 2020-01-09 2020-01-09 Piezoelectric linear driving device simulating sliding plate movement design and control method

Publications (1)

Publication Number Publication Date
CN111049421A true CN111049421A (en) 2020-04-21

Family

ID=70244144

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010020386.8A Pending CN111049421A (en) 2020-01-09 2020-01-09 Piezoelectric linear driving device simulating sliding plate movement design and control method

Country Status (1)

Country Link
CN (1) CN111049421A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112803829A (en) * 2021-01-13 2021-05-14 吉林大学 Friction asymmetric inertia piezoelectric linear driving device and method
CN113114067A (en) * 2021-05-08 2021-07-13 吉林大学 Piezoelectric stick-slip type driving device capable of measuring distance in large stroke and distance measuring method
US11323599B1 (en) 2020-12-23 2022-05-03 Waymo Llc Flexure amplified piezo actuator for focus adjustment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11323599B1 (en) 2020-12-23 2022-05-03 Waymo Llc Flexure amplified piezo actuator for focus adjustment
US11678039B2 (en) 2020-12-23 2023-06-13 Waymo Llc Flexure amplified piezo actuator for focus adjustment
CN112803829A (en) * 2021-01-13 2021-05-14 吉林大学 Friction asymmetric inertia piezoelectric linear driving device and method
CN113114067A (en) * 2021-05-08 2021-07-13 吉林大学 Piezoelectric stick-slip type driving device capable of measuring distance in large stroke and distance measuring method
CN113114067B (en) * 2021-05-08 2022-05-10 吉林大学 Distance measurement method of piezoelectric stick-slip type driving device capable of measuring distance in large stroke

Similar Documents

Publication Publication Date Title
CN111049421A (en) Piezoelectric linear driving device simulating sliding plate movement design and control method
Ho et al. A piezoelectric motor for precision positioning applications
CN109217717B (en) Device and method for restraining rollback movement of parasitic piezoelectric driver by arc-shaped structure hinge
CN112803829B (en) Friction asymmetric inertia piezoelectric linear driving device and method
CN111711381B (en) Stick-slip piezoelectric driver for realizing bidirectional driving and control method
CN109787505B (en) Linear piezoelectric motor and driving method thereof
CN109713936A (en) Elliptical vibration piezoelectric actuator and its driving method
CN108306546A (en) Compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method
CN107786120B (en) Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method
CN110912444B (en) Bionic creeping type piezoelectric actuator
CN110768571B (en) Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle
CN209389958U (en) The device of active suppression parasitic motion principle piezoelectric actuator rollback movement
CN110798094B (en) Piezoelectric linear precision driving device based on parasitic inertia principle
CN210927484U (en) Piezoelectric linear driving device simulating sliding plate movement design
CN113114067B (en) Distance measurement method of piezoelectric stick-slip type driving device capable of measuring distance in large stroke
CN209389957U (en) Elliptical vibration piezoelectric actuator
CN109818524B (en) Piezoelectric precision driving device and method based on bird wing-shaped bionic flexible mechanism
CN110855179B (en) Creeping type piezoelectric precision driving device
CN214506903U (en) Piezoelectric linear driving device simulating animal tree climbing movement design
CN112910310A (en) Inertial impact type piezoelectric driver capable of carrying large load and driving method thereof
CN113078845B (en) Piezoelectric rotary positioning platform of asymmetric flexible hinge and driving method thereof
CN110752768B (en) Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism
CN110798093B (en) Linear piezoelectric precision driving platform
CN110829881A (en) Umbrella-shaped crawling type piezoelectric driving platform
CN110829883A (en) Umbrella-shaped piezoelectric driving device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination