CN109787505B - Linear piezoelectric motor and driving method thereof - Google Patents
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Abstract
The invention discloses a linear piezoelectric motor, which comprises a rotor, a fixed block and a stator, wherein the stator comprises a contact rod, a micro-displacement amplifying mechanism and a first piezoelectric stack, the first end of the contact rod is in frictional contact with a rotor slider in the rotor to push the rotor slider to move linearly, the second end of the contact rod is in surface contact with the first piezoelectric stack, the other end of the first piezoelectric stack is fixed, the third end of the contact rod is fixedly connected with the fixed block, the fourth end of the contact rod is in contact with a driving foot of the micro-displacement amplifying mechanism, and the micro-displacement amplifying mechanism is a piezoelectric driving mechanism; the first piezoelectric stack applies normal pretightening force to the rotor slider through the contact rod, and the micro-displacement amplifying mechanism applies tangential force to the rotor slider through the contact rod. The invention utilizes the output voltage of the piezoelectric stack as a power source, based on the non-resonance mode, the movement of the rotor slider is pushed through the displacement amplification output of the contact rod, and the invention has the advantages of simple structure, good control performance, high motor movement precision, high motor reliability and wide application range.
Description
Technical Field
The invention relates to the field of piezoelectric motor research, in particular to a linear piezoelectric motor and a driving method thereof.
Background
The ultrasonic motor is a brand new type miniature special motor which is developed in the 80 th of the 20 th century. With the rapid development of precision machining, robots, optical instruments, and MEMS operations, ultrasonic motor research is becoming more and more demanding. The ultrasonic motor has the advantages of power-off self-locking, quick response and high position resolution, and provides inherent good conditions for accurate positioning control.
The linear ultrasonic motor is used as an ultrasonic motor according to the classification of the motion of the rotor, has the characteristics of large thrust-weight ratio, quick response, low speed, large torque, good control performance, power failure self-locking and the like, is widely applied to the fields of robots, precise instruments and meters, medical instruments and the like, can directly generate linear motion thrust, and is particularly suitable for driving and controlling small and precise linear motion devices.
The linear piezoelectric motor can be classified into a resonant type and a non-resonant type according to the excitation of the stator by the piezoelectric element. The stator of the traditional resonance type piezoelectric linear motor generally works in a resonance state, the amplitude of a driving foot is amplified by utilizing resonance, the amplitude, the frequency and the phase difference of an excitation signal applied to a piezoelectric material have certain strict requirements, and when the temperature changes, the frequency of the excitation signal of the piezoelectric material needs to be properly adjusted to keep the stability of the output performance of the motor, so that the design circuit of an ultrasonic motor driver is complex. In addition, the resonance state is an unstable state, the working frequency of the motor is easily affected by many factors, for example, precision errors in the processing and assembly of the motor, and the problem of frequency consistency adjustment exists, which is often difficult to optimize so as to improve the frequency consistency, and as a result, the motor deviates from the working resonance frequency, which causes the reduction of the output performance of the motor and even influences the normal operation of the motor.
In recent years, the development of non-resonant piezoelectric motors has been vigorously developed, and researchers have proposed to develop piezoelectric motors with high positioning accuracy by utilizing the characteristics of piezoelectric stacks under non-resonant conditions, but the existing piezoelectric motors generally have the defects of small stroke and low accuracy.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a linear piezoelectric motor and a driving method thereof.
The purpose of the invention is realized by the following technical scheme: a linear piezoelectric motor comprises a base plate, a rotor, a fixed block and a stator, wherein the rotor, the fixed block and the stator are arranged on the base plate, the stator comprises a contact rod, a micro-displacement amplifying mechanism and a first piezoelectric stack, the first end of the contact rod is in friction contact with a rotor slider in the rotor to push the rotor slider to move linearly, the second end of the contact rod is in surface contact with the first piezoelectric stack, the other end of the first piezoelectric stack is fixed, the third end of the contact rod is fixedly connected with the fixed block, the fourth end of the contact rod is in contact with a driving foot of the micro-displacement amplifying mechanism, and the micro-displacement amplifying mechanism is a piezoelectric; the first piezoelectric stack applies normal pretightening force to the rotor slider through the contact rod, and the micro-displacement amplifying mechanism applies tangential force to the rotor slider through the contact rod. The invention utilizes the output voltage of the piezoelectric stack as a power source, based on the non-resonance mode, the movement of the rotor slide block is pushed through the displacement amplification displacement output of the micro-displacement amplification mechanism and the contact rod, so that the direct output force of the motor is large, the control precision is high, the invention can be applied to the precise positioning on a driving control platform, the application range is wide, and the invention has wide industrial application prospect.
Preferably, the rotor sliding block slides on a sliding block fixing seat, the sliding block fixing seat is fixed on the bottom plate, and the sliding block fixing seat is provided with a groove. The slider fixing base can be fastened to the base plate through screws and the like, so that the position of the rotor slider on the base plate is limited, and meanwhile, a lubricating material can be coated in the groove, so that the friction force is reduced when the rotor slider is stirred by the contact rod, and other position errors cannot be introduced.
Furthermore, a friction-resistant coating is arranged on one side of the rotor slider, which is in contact with the contact rod, so that the motion life of the rotor slider is prolonged, and the motion precision of the motor is ensured.
Preferably, the linear piezoelectric motor comprises two stators, each stator is fixed on a stator fixing plate, and the stator fixing plate is fixed on the bottom plate; the two stators are symmetrical about the central axis of the base plate. The reliability of the motor and the output stroke of the motor can be increased.
Preferably, the end part of the second end of the contact rod is provided with an arc transition section; the first end of the contact rod adopts a prismatic amplitude transformer, and the section of the contact rod is smaller when the contact rod is closer to the end part. By adopting the contact rod, the displacement output by the piezoelectric stack has the effect of amplifying the displacement by the lever.
Preferably, the first piezoelectric stack is provided with a vertical pre-tightening mechanism in the vertical direction, and the vertical pre-tightening mechanism applies a certain pre-tightening force to the first piezoelectric stack to enable the first piezoelectric stack to be fully contacted with the contact rod.
Preferably, the micro-displacement amplifying mechanism comprises a second piezoelectric stack, a third piezoelectric stack and a deformation support, the deformation support is formed by connecting a semi-elliptical mechanism and a semi-rectangular mechanism and is a metal elastic body, two side faces of the deformation support are directly attached to the second piezoelectric stack and the third piezoelectric stack respectively, and a driving foot is arranged at the top end of the deformation support. The horizontal thrust generated by the second piezoelectric stack and the third piezoelectric stack is converted to provide static friction between the rotor slider and the contact rod under the action of clamping pretension force.
Furthermore, two side faces of the deformation support are in surface contact with the binding faces of the second piezoelectric stack and the third piezoelectric stack, the driving foot is in point contact with the contact rod, and the driving foot is a flexible hinge block and is integrated with the micro-displacement amplification mechanism.
Furthermore, the ratio of the major axis to the minor axis of the ellipse in the semi-ellipse mechanism is 1.7-1.9.
Preferably, the position of the micro-displacement amplifying mechanism on the stator fixing plate is limited by a horizontal pre-tightening mechanism, and the horizontal pre-tightening mechanism applies certain pre-tightening force to the outer side surfaces of the second piezoelectric stack and the third piezoelectric stack. Through clamping the piezoelectric stack, a certain pretightening force is applied to the micro-displacement amplifying mechanism, so that the micro-displacement amplifying mechanism is fully contacted with the contact rod.
Furthermore, the horizontal pre-tightening mechanism comprises a pre-tightening combined rod and a pre-tightening clamping bolt, the pre-tightening combined rod is arranged on two sides of the micro-displacement amplifying mechanism, and the pre-tightening combined rod is fixed by the pre-tightening clamping bolt. The distance between the pre-tightening combined rods can be adjusted by rotating the pre-tightening clamping bolt, so that the micro-displacement amplification mechanism is pre-tightened in the horizontal direction.
Preferably, the first piezoelectric stack, the second piezoelectric stack and the third piezoelectric stack in the micro-displacement amplifying mechanism respectively comprise a plurality of piezoelectric ceramic pieces and electrode pieces, and the two adjacent piezoelectric ceramic pieces are opposite in polarization direction and are bonded together.
A driving method based on the linear piezoelectric motor comprises the following steps:
under the action of a certain pretightening force, voltage excitation is given to a piezoelectric stack in the micro-displacement amplifying mechanism, so that a driving foot in the micro-displacement amplifying mechanism deforms towards the tangential direction, fully contacts with the contact rod and pushes the contact rod to move towards the tangential direction;
meanwhile, under the action of a certain pretightening force, voltage excitation is applied to the first piezoelectric stack, so that the first piezoelectric stack deforms in the horizontal direction, fully contacts with the contact rod and pushes the contact rod to move in the horizontal direction;
by controlling the voltage excitation waveform of each piezoelectric stack, the contact rod pushes the rotor slider to move, and further motor driving is achieved.
Preferably, the voltage waveform applied by the piezoelectric stack in the micro-displacement amplification mechanism is an intermittent triangular wave, and the voltage waveform applied by the first piezoelectric stack is an intermittent trapezoidal wave.
Compared with the prior art, the invention has the following advantages and beneficial effects:
the invention avoids the problems that the high temperature of the motor is caused by the high-frequency vibration generated by the resonance mode of the motor in the prior art, and the working performance of the motor is influenced by adjusting the symmetrical frequency and the asymmetrical frequency which are required to be consistent, based on the non-resonance mode, the electric energy is converted into the mechanical energy of the linear motion of the rotor by utilizing the inverse piezoelectric effect of the piezoelectric ceramic, and the micro-amplitude motion of the elastomer micro-displacement amplifying mechanism is converted into the macro motion of the rotor through the friction action of the stator and the rotor so as to directly push the load. The negative effect of the motor in the resonance mode is avoided, the stability and the reliability of the working performance of the motor are improved, the method has important significance for the development of the linear piezoelectric motor in the non-resonance mode, and the method has the advantages of simple structure, good control performance, high motor motion precision, high motor reliability, wide application range, large output force, quick response, good stability and the like.
Drawings
Fig. 1 is a schematic structural view of a linear piezoelectric motor according to the present embodiment.
Fig. 2 is a schematic structural diagram of the micro-displacement amplification mechanism in the present embodiment.
Fig. 3 is a schematic structural diagram of the contact rod in the present embodiment.
Fig. 4 is a schematic structural diagram of the horizontal preloading mechanism in the present embodiment.
Fig. 5 is a schematic voltage waveform applied by the piezoelectric stack and the first piezoelectric stack in the micro-displacement amplifying mechanism when the motor of the embodiment works.
Fig. 6 is a displacement track diagram of any point on the piezoelectric stack in the micro-displacement amplifying structure of the embodiment, and a moving track diagram of the mover slider.
Fig. 7 is a schematic view of the polarization direction of the piezoelectric stack in this embodiment.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited thereto.
The embodiment provides a linear piezoelectric motor based on non-resonant mode operation, which includes a base plate, and a mover, a fixed block, and a stator disposed on the base plate, and referring to fig. 1 to 4, the components referred to in the figures are: the device comprises a slider fixing seat 1, a slider fixing seat bolt 2, a rotor slider 3, a contact rod 4, a horizontal pre-tightening mechanism 5, a pre-tightening clamping bolt 6, a pre-tightening combined rod 7, a vertical pre-tightening mechanism 8, a stator fixing plate 9, a deformation support 10, a bottom plate 11, a second piezoelectric stack 12, a fixing block 13, a fixing block bolt 15 and a first piezoelectric stack 16.
In this embodiment, the rotor includes slider fixing base 1, slider fixing base bolt 2, rotor slider 3, is equipped with the screw hole on the bottom plate 11, and slider fixing base 1 passes through slider fixing base bolt 2 and above-mentioned screw hole to be fixed on bottom plate 11. The rotor slide block 3 is matched with the slide block fixing seat 1 and can slide on the slide block fixing seat. The sliding block fixing seat is provided with a groove, and a lubricating material is coated in the groove and used for reducing the sliding friction force of the rotor. And a friction-resistant coating is arranged on one side of the rotor slider, which is in contact with the contact rod, and is used for prolonging the motion life of the rotor slider and ensuring the motion precision of the motor.
As shown in fig. 1, in the present embodiment, the linear piezoelectric motor includes two stators, each of which is fixed to a stator fixing plate 9, and the stator fixing plate 9 is fixed to a base plate 11; the two stators are symmetrical about the central axis of the base plate. Each stator comprises a contact rod, a micro-displacement amplification mechanism and a first piezoelectric stack.
As shown in fig. 3, the contact rods 4 in the two stators are symmetrical about the central axis of the base plate 11, each contact rod 4 includes 4 end portions, a first end 4-1 of the contact rod is in frictional contact with a mover slide block in the mover to push the mover slide block to move linearly, a second end 4-2 of the contact rod is in surface contact with the first piezoelectric stack, the other end of the first piezoelectric stack is fixed, a third end 4-3 of the contact rod is fixedly connected with a fixed block, and a fourth end of the contact rod is in contact with a driving foot of the micro-displacement amplification mechanism. Wherein, the end part of the second end 4-2 of the contact rod is provided with an arc transition section; the first end 4-1 of the contact rod is a prismatic amplitude transformer, and the section of the amplitude transformer is smaller as the amplitude transformer is closer to the end part. By adopting the contact rod, the displacement output by the piezoelectric stack has the effect of amplifying the displacement by the lever.
As shown in fig. 2, the micro-displacement amplifying mechanism is a piezoelectric driving mechanism, and includes a second piezoelectric stack 12, a third piezoelectric stack and a deformable support 10, where the deformable support 10 is formed by connecting a semi-elliptical mechanism and a semi-rectangular mechanism, and is a metal elastic body, a ratio of a major axis to a minor axis of an ellipse in the semi-elliptical mechanism is 1.7-1.9, and two side surfaces of the deformable support are directly attached to the second piezoelectric stack and the third piezoelectric stack, respectively, and are in surface contact with each other. The top end of the deformation support is provided with a driving foot 10-1, the driving foot is in point contact with the contact rod 4, and the driving foot is a flexible hinge block and can be designed to be integrated with the micro-displacement amplification mechanism. The horizontal thrust generated by the second piezoelectric stack and the third piezoelectric stack is converted to provide static friction between the rotor slider and the contact rod under the action of clamping pretension force.
As shown in fig. 4, the position of the micro displacement amplifying mechanism on the stator fixing plate is limited by a horizontal pre-tightening mechanism, and the horizontal pre-tightening mechanism is used for applying a certain pre-tightening force to the micro displacement amplifying mechanism, so that the micro displacement amplifying mechanism and the contact rod can be fully contacted when being driven. The horizontal pre-tightening mechanism comprises a pre-tightening combination rod 7, a pre-tightening clamping bolt 6 and a screw rod, one end of the pre-tightening combination rod 7 is arranged on the screw rod through the pre-tightening clamping bolt 6, and the other end of the pre-tightening combination rod 7 is fixed with the micro-displacement amplification mechanism. The pre-tightening clamping bolt 6 comprises a position adjusting bolt 6-1 and a fixing bolt 6-3, wherein the position adjusting bolt 6-1 is arranged on the screw rod and used for screwing or unscrewing two ends of the pre-tightening combined rod 7 so as to adjust the pre-tightening force. A gasket 6-2 is fixed between the positioning bolt 6-1 and the end part of the pre-tightening combined rod 7. And the fixing bolts 6-3 are used for fixing the end parts of the pre-tightening combined rods 7 with the second piezoelectric stacks and the third piezoelectric stacks on the left side and the right side of the micro-displacement amplification mechanism. And applying a certain pretightening force to the outer side surfaces of the second piezoelectric stack and the third piezoelectric stack.
As shown in fig. 7, in the present embodiment, the first piezoelectric stack 16 includes three piezoelectric ceramic plates, electrode plates are disposed between the piezoelectric ceramic plates, and two adjacent piezoelectric ceramic plates have opposite polarization directions and are bonded to each other. The vertical pre-tightening mechanism 8 is arranged in the vertical direction of the first piezoelectric stack and used for applying a certain pre-tightening force to the first piezoelectric stack so as to enable the first piezoelectric stack to be fully contacted with the contact rod. The vertical pre-tightening mechanism can be realized through the matching of threaded bolts.
In this embodiment, the fixing block 13 is a square block, which is formed with an internally threaded hole and is assembled with the bottom plate 11 by a fixing block bolt 15. In practical application, the fixing block 13 may be a rectangular parallelepiped block. One end of the fixed block 13 is in surface contact with the contact rod 4 and is used for limiting the tangential displacement of the contact rod.
The micro-displacement amplifying mechanisms on two sides are symmetrically arranged according to the central axis of the motor bottom plate, the piezoelectric stacks are arranged on two sides of the motor bottom plate, and the pre-tightening combined rod is used for excessive matching clamping and pre-tightening. Under the action of a certain pretightening force, voltage excitation is applied to the piezoelectric stacks on the left side and the right side of the micro-displacement amplification mechanism of the motor, the piezoelectric ceramic plates are polarized and deformed along the axial direction and are converted into normal displacement through the micro-displacement amplification mechanism, and a certain static friction force is provided for the friction part of the contact rod and the rotor slide block. Under the action of a certain pretightening force, voltage excitation is applied to the first piezoelectric stack, so that the first piezoelectric stack deforms in the horizontal direction, fully contacts with the contact rod and pushes the contact rod to move in the horizontal direction; by controlling the voltage excitation waveform of each piezoelectric stack, the contact rod pushes the rotor slider to move, and further motor driving is achieved.
The excitation pattern of the motor and its motion are described as follows: taking a view angle of fig. 1 as an example, when the rotor slider 3 moves to the right, firstly, the piezoelectric stacks on both sides of the left micro-displacement amplification mechanism are energized with a voltage with a certain amplitude, so that the driving foot 10-1 of the micro-displacement amplification mechanism deforms towards the tangential direction, fully contacts with the contact rod 4 and pushes the contact rod to move towards the tangential direction. And then, a direct current voltage with a certain amplitude is applied to the first piezoelectric stack at the lower end of the contact rod, a certain displacement can be output in the vertical direction due to the inverse piezoelectric effect of the piezoelectric stack, and due to the structural design, the displacement output by the first piezoelectric stack in the vertical direction is amplified and output at the end lever of the amplitude-variable rod, so that a certain pre-tightening force is provided. And then stopping applying excitation, and recovering the excitation of the previous voltage waveform, so circulating, and under the action of the friction force, the rotor slide block slides rightwards under the action of horizontal thrust.
In order to realize that the contact rod continuously drives the rotor slider to deform, as shown in fig. 5, the voltage waveforms applied by the piezoelectric stacks on the two sides of the micro-displacement amplification mechanism are discontinuous triangular waves, and the voltage waveform applied by the first piezoelectric stack is discontinuous trapezoidal waves.
As shown in fig. 6, the displacement output by the micro-displacement amplifying structure is in a triangular sawtooth wave shape as the applied voltage waveform. At t1To t2Stage, the rotor slide block is increased along with the increase of the output displacement of the piezoelectric stack, t2To t3In the stage, the displacement of the piezoelectric stack is reduced due to the reduction of voltage, the rotor slide block continues to move forwards due to the action of inertia of movement, but the displacement increases slowly, t3At the T stage, the piezoelectric stack does not give excitation displacement of 0, the rotor slide block is kept static from T1And calculating an excitation period by T. When the excitation is provided, the piezoelectric stack at the right end of the right-end contact rod inputs voltage with a certain amplitude, so that the piezoelectric stack outputs a certain amount of displacement and force, and fatigue damage caused by overlarge output force of the left piezoelectric stack on the central fixed block is reduced. When the rotor moves in the opposite direction, the piezoelectric stack on the other side is excited. The triangular wave and trapezoidal wave voltage signals described in the invention generate two vertical linear motion tracks at the amplitude-variable end 4-1 of the contact rod. The driving of the motor can be realized by controlling the motion track.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (9)
1. A linear piezoelectric motor is characterized by comprising a base plate, a rotor, a fixed block and a stator, wherein the rotor, the fixed block and the stator are arranged on the base plate, the stator comprises a contact rod, a micro-displacement amplification mechanism and a first piezoelectric stack, the first end of the contact rod is in frictional contact with a rotor slider in the rotor to push the rotor slider to move linearly, the second end of the contact rod is in surface contact with the first piezoelectric stack, the other end of the first piezoelectric stack is fixed, the third end of the contact rod is fixedly connected with the fixed block, the fourth end of the contact rod is in contact with a driving foot of the micro-displacement amplification mechanism, and the micro-displacement amplification mechanism is a piezoelectric drive; the first piezoelectric stack applies normal pretightening force to the rotor slider through the contact rod, and the micro-displacement amplification mechanism applies tangential force to the rotor slider through the contact rod;
the contact rod comprises a first supporting rod, a second supporting rod, a third supporting rod and a fourth supporting rod, wherein the axes of the first supporting rod, the second supporting rod and the fourth supporting rod are all perpendicular to the third supporting rod, the first supporting rod and the second supporting rod are respectively arranged on two sides of the third supporting rod, and the first supporting rod and the second supporting rod are not coaxial to form a lever;
the micro-displacement amplifying mechanism comprises a second piezoelectric stack, a third piezoelectric stack and a deformation support, the deformation support is formed by connecting a semi-elliptical mechanism and a semi-rectangular mechanism and is a metal elastic body, two side faces of the deformation support are directly attached to the second piezoelectric stack and the third piezoelectric stack respectively, and a driving foot is arranged at the top end of the deformation support.
2. The linear piezoelectric motor according to claim 1, wherein the mover slide slides on a slide holder fixed to the base plate, the slide holder having a slot; and a friction-resistant coating is arranged on one side of the rotor slider, which is in contact with the contact rod.
3. The linear piezoelectric motor according to claim 1, comprising two stators, each of which is fixed to a stator fixing plate fixed to the base plate; the two stators are symmetrical about the central axis of the base plate.
4. The linear piezoelectric motor according to claim 1 or 3, wherein the end of the second end of the contact rod is provided with a circular arc transition section; the first end of the contact rod adopts a prismatic amplitude transformer, and the section of the contact rod is smaller when the contact rod is closer to the end part.
5. The linear piezoelectric motor according to claim 4,
the two side surfaces of the deformation support are in surface contact with the binding surfaces of the second piezoelectric stack and the third piezoelectric stack, the driving foot is in point contact with the contact rod, and the driving foot is a flexible hinge block and is integrated with the micro-displacement amplification mechanism;
the ratio of the long axis to the short axis of the ellipse in the semi-ellipse mechanism is 1.7-1.9.
6. The linear piezoelectric motor according to claim 4,
a vertical pre-tightening mechanism is arranged in the vertical direction of the first piezoelectric stack and applies a certain pre-tightening force to the first piezoelectric stack to enable the first piezoelectric stack to be fully contacted with the contact rod;
the position of the micro-displacement amplifying mechanism on the stator fixing plate is limited by a horizontal pre-tightening mechanism, and the horizontal pre-tightening mechanism applies certain pre-tightening force to the outer side surfaces of the second piezoelectric stack and the third piezoelectric stack.
7. The linear piezoelectric motor according to claim 6,
the horizontal pre-tightening mechanism comprises a pre-tightening combined rod and a pre-tightening clamping bolt, the pre-tightening combined rod is arranged on two sides of the micro-displacement amplification mechanism, and the pre-tightening combined rod is fixed by the pre-tightening clamping bolt;
the first piezoelectric stack, the second piezoelectric stack and the third piezoelectric stack in the micro-displacement amplifying mechanism respectively comprise a plurality of piezoelectric ceramic pieces and electrode pieces, and the adjacent two piezoelectric ceramic pieces are opposite in polarization direction and are mutually bonded together.
8. A driving method of a linear piezoelectric motor according to any one of claims 1 to 7, comprising the steps of:
under the action of a certain pretightening force, voltage excitation is given to a piezoelectric stack in the micro-displacement amplifying mechanism, so that a driving foot in the micro-displacement amplifying mechanism deforms towards the tangential direction, fully contacts with the contact rod and pushes the contact rod to move towards the tangential direction;
meanwhile, under the action of a certain pretightening force, voltage excitation is applied to the first piezoelectric stack, so that the first piezoelectric stack deforms in the horizontal direction, fully contacts with the contact rod and pushes the contact rod to move in the horizontal direction;
by controlling the voltage excitation waveform of each piezoelectric stack, the contact rod pushes the rotor slider to move, and further motor driving is achieved.
9. The driving method according to claim 8, wherein the voltage waveform applied by the piezoelectric stacks in the micro-displacement amplifying mechanism is an intermittent triangular wave, and the voltage waveform applied by the first piezoelectric stack is an intermittent trapezoidal wave.
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| CN113726216B (en) * | 2021-08-30 | 2022-05-20 | 合肥工业大学 | Non-same-frequency double-stator driving piezoelectric motor |
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