CN111245290B - Single-degree-of-freedom piezoelectric turntable and excitation method thereof - Google Patents
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Abstract
The invention provides a single-degree-of-freedom piezoelectric turntable and an excitation method thereof, and belongs to the technical field of piezoelectric driving. The single-degree-of-freedom piezoelectric turntable comprises an annular base, N two-dimensional piezoelectric actuators, a disc rotor, 2N axial fixing screws, N axial pressing blocks and N radial fastening screws, wherein N is an even number which is more than or equal to 6; the time sequence and the amplitude of a path of excitation voltage signal applied to N two-dimensional piezoelectric actuators are controlled by designing, the N two-dimensional piezoelectric actuators are excited to generate bending motion along the tangential direction of the outer edge of the disc rotor, and the disc rotor is driven by friction force to realize single-degree-of-freedom rotation; and the friction force between the two-dimensional piezoelectric actuator and the disk rotor is controlled by adjusting the amplitude of the other path of voltage signal applied to the two-dimensional piezoelectric actuator. The single-degree-of-freedom piezoelectric turntable has the advantages of no support, controllable friction force, large stroke and high motion resolution, and has wide application prospect in the fields of precision driving and positioning.
Description
Technical Field
The invention belongs to the technical field of piezoelectric driving, and particularly relates to a single-degree-of-freedom piezoelectric turntable and an excitation method thereof.
Background
The piezoelectric driving technology is a precise driving technology which converts electric energy into mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material and realizes the motion output of a piezoelectric device by a specific actuating principle, and has the advantages of high motion precision, electromagnetic interference resistance, high response speed, power failure self-locking and the like. In recent years, with the rapid development of the fields of biomedicine, optical engineering and precision machining, the fields of biomedicine, optical engineering and precision machining have made urgent demands on precision rotary motion platforms. In view of the remarkable advantages of high displacement resolution, large stroke, simple structure, power-off self-locking, no electromagnetic interference and the like of the precise rotary motion platform utilizing the piezoelectric driving technology, the precise rotary motion platform has wide application prospects in the field of precise driving and positioning, and therefore, a plurality of scholars at home and abroad carry out extensive research on the precise piezoelectric rotary motion platform.
According to different working principles, the current piezoelectric rotary motion platform mainly comprises a resonant type and a non-resonant type. The resonant piezoelectric rotary motion platform utilizes an excitation voltage signal with ultrasonic frequency to excite the stator to generate ultrasonic vibration, and then drives the rotor to realize rotary motion output through friction coupling; the piezoelectric rotary motion platform has the motion output capacity of large stroke, high speed and large moment, but the piezoelectric rotary motion platform works in a high-frequency state, is accompanied by serious friction, abrasion and heating problems during running, has low motion precision and can only reach the micron order. The non-resonant piezoelectric rotary motion platform mainly realizes motion output by utilizing the alternate change of dynamic friction and static friction between a rotor and a stator, and has lower working frequency; although the output speed and the moment of the piezoelectric rotary platform are lower than those of a resonant piezoelectric rotary motion platform, the piezoelectric rotary motion platform realizes higher motion resolution and positioning accuracy; because the piezoelectric rotary platform works in a low-frequency range, the problem of friction and abrasion is weakened, and the problem of heating caused by high-speed and high-frequency operation is avoided; in a word, the non-resonant piezoelectric rotary motion platform is more suitable for application requirements of high motion precision, good stability and intermittent operation, and gradually becomes a hot spot of current research. For the piezoelectric rotary motion platform, the supporting mode of the mover and the friction force between the mover and the stator are two key factors determining the motion output characteristics of the mover; in order to support the mover and limit the redundant freedom of motion of the mover, the conventional piezoelectric rotary motion platform usually needs to design a support structure to support the mover; in order to ensure that the friction force required by the work is formed between the rotor and the stator, a complex pre-tightening mechanism is often required to be configured so as to adjust the pre-tightening force between the rotor and the stator and further adjust the friction force between the rotor and the stator, so that the stator can stably drive the rotor to realize motion output; however, the pre-tightening mechanism is usually a fixed mechanical device, and it is difficult to adjust the pre-tightening force during operation so as to control the magnitude of the friction force.
Disclosure of Invention
In view of the above, the invention aims to provide a single-degree-of-freedom piezoelectric turntable and an excitation method thereof, and solves the problems that the existing single-degree-of-freedom piezoelectric driving device is complex in supporting and limiting structure, and the friction force is difficult to regulate and control in operation.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a single-degree-of-freedom piezoelectric turntable comprises an annular base, N two-dimensional piezoelectric actuators, a disc rotor, 2N axial fixing screws, N axial pressing blocks and N radial fastening screws, wherein N is an even number which is more than or equal to 6; the N two-dimensional piezoelectric actuators are divided into an upper layer and a lower layer which are uniformly distributed on the circumference of the annular base, and the upper layer and the lower layer respectively comprise N/2 two-dimensional piezoelectric actuators; the N two-dimensional piezoelectric actuators have the same structure; each two-dimensional piezoelectric actuator comprises a rectangular base, a piezoelectric element and a driving foot, wherein the rectangular base, the piezoelectric element and the driving foot are fixedly connected in sequence; the annular base comprises an annular base, N rectangular notches and N annular notches, wherein the N rectangular notches and the N annular notches are respectively and uniformly distributed along the circumferential direction of the upper end surface and the circumferential direction of the lower end surface of the annular base, the rectangular notches and the annular notches on each end surface of the annular base are respectively arranged in a one-to-one correspondence mode, the annular notches are formed by removing part of annular bodies from the corresponding end surfaces of the annular base, the rectangular notches are located on the bottom surfaces of the annular notches, and 2 axial threaded holes are formed in the bottom surfaces of the annular; a radial fastening threaded hole is formed in the outer cylindrical surface of the annular base and in the radial direction passing through the center of each rectangular notch; the annular gap, the rectangular gap, the axial threaded hole and the radial fastening threaded hole on the upper end surface and the annular gap, the rectangular gap, the axial threaded hole and the radial fastening threaded hole on the lower end surface are arranged in a mirror image relationship by taking the axial symmetry plane of the annular base as the center; the annular gap is matched with the axial pressing block in structure, and the axial pressing block is embedded into the annular gap and fixedly connected with the annular base through an axial fixing screw; the rectangular base of the two-dimensional piezoelectric actuator has the same shape characteristics with the rectangular notch on the annular base, and the rectangular base is embedded into the rectangular notch; the radial set screw is connected with the annular base through the radial set threaded hole and is in contact with the rectangular base of the two-dimensional piezoelectric actuator, and fine adjustment of the radial distribution position of the two-dimensional piezoelectric actuator along the annular base is realized by adjusting the position of the radial set screw; the outer edge of the disk rotor is provided with an upper conical ring surface and a lower conical ring surface, the driving feet of the upper N/2 two-dimensional piezoelectric actuators are in contact with the upper conical ring surface of the disk rotor, and the driving feet of the lower N/2 two-dimensional piezoelectric actuators are in contact with the lower conical ring surface of the disk rotor.
Further, the disk mover is supported by the N two-dimensional piezoelectric actuators uniformly arranged on the ring-shaped base, and all degrees of freedom of movement of the disk mover except for the rotational movement about its axis are restricted by the contact between the N two-dimensional piezoelectric actuators and the disk mover.
Furthermore, by using a path of voltage signal, the positive pressure between the two-dimensional piezoelectric actuator and the disc rotor is controlled by controlling the bending motion of the N two-dimensional piezoelectric actuators along the axis direction of the disc rotor, and the friction force between the two-dimensional piezoelectric actuator and the disc rotor is further controlled.
Further, each two-dimensional piezoelectric actuator produces independent bending motion along two orthogonal directions.
Furthermore, a threaded hole, a countersunk hole or a through hole is processed on the annular base and used for fixedly connecting the single-degree-of-freedom piezoelectric turntable with other parts.
An excitation method of a single-degree-of-freedom piezoelectric turntable is used for exciting N two-dimensional piezoelectric actuators to realize bending motion along the circumferential tangential direction outside a disc rotor at the same time and driving the disc rotor to realize single-degree-of-freedom rotary motion; namely, the driving disc rotor realizes the counterclockwise or clockwise rotary motion around the Z axis;
the specific process of the driving disc rotor rotating around the Z axis in the anticlockwise direction is as follows:
firstly, slowly-descending excitation voltage signals are applied to piezoelectric elements of N two-dimensional piezoelectric actuators, the N two-dimensional piezoelectric actuators generate slow bending deformation to a negative electrode limit position along a tangential direction anticlockwise around a Z axis, driving feet of the N two-dimensional piezoelectric actuators generate slow micro displacement along the tangential direction anticlockwise around the Z axis, and a disc rotor is driven by static friction force to generate micro angular displacement along the anticlockwise direction around the Z axis;
secondly, applying a rapidly rising excitation voltage signal to the piezoelectric elements of the N two-dimensional piezoelectric actuators, enabling the N two-dimensional piezoelectric actuators to rapidly bend and deform to a positive limit position in the clockwise tangential direction around the Z axis, enabling driving feet of the N two-dimensional piezoelectric actuators to rapidly generate small displacement in the clockwise tangential direction around the Z axis, and enabling the disc rotor to keep static due to inertia;
step three, repeating the step one to the step two to realize the continuous rotary motion of the disc rotor around the Z axis in the anticlockwise direction;
the specific process of the clockwise rotary motion of the driving disc rotor around the Z axis is as follows:
firstly, applying slowly rising excitation voltage signals on piezoelectric elements of N two-dimensional piezoelectric actuators, enabling the N two-dimensional piezoelectric actuators to generate slow bending deformation to a positive limit position along a tangential direction clockwise around a Z axis, enabling driving feet of the N two-dimensional piezoelectric actuators to generate slow micro displacement along the tangential direction clockwise around the Z axis, and driving a disc rotor to generate micro displacement clockwise around the Z axis through static friction force;
secondly, applying a rapidly-descending excitation voltage signal to piezoelectric elements of the N two-dimensional piezoelectric actuators, enabling the N two-dimensional piezoelectric actuators to rapidly bend and deform to a negative limit position along a tangential direction anticlockwise around the Z axis, enabling driving feet of the N two-dimensional piezoelectric actuators to rapidly generate micro displacement along the tangential direction anticlockwise around the Z axis, and enabling the disc rotor to keep static due to inertia;
and step three, repeating the step one to the step two to realize the continuous rotation motion of the disc rotor around the Z axis in the clockwise direction.
Further, the excitation voltage signal required for implementing the method is a periodic, asymmetric sawtooth or trapezoidal waveform, and the rising and falling processes of the excitation voltage signal in each period can be linear or nonlinear, but the duration of the rising and falling processes is not equal.
Compared with the prior art, the single-degree-of-freedom piezoelectric turntable and the excitation method thereof have the following advantages:
the single-degree-of-freedom rotary motion output of the disc rotor can be realized; the disc rotor has large stroke and high resolution motion output capacity; the double-layer configuration of the two-dimensional piezoelectric actuator in the single-degree-of-freedom piezoelectric rotating table and the special outer edge structural design of the disc rotor realize self-supporting and limiting of the disc rotor without adding other auxiliary devices on one hand, and realize regulation of positive pressure between the two-dimensional piezoelectric actuator and the disc rotor during operation on the other hand, thereby realizing regulation and control of friction between the two-dimensional piezoelectric actuator and the disc rotor; the single-degree-of-freedom piezoelectric rotary table disclosed by the invention overcomes the defects that the traditional piezoelectric rotary table is complex in pre-tightening structure and difficult in friction regulation and control; the electric regulation and control of the friction force between the two-dimensional piezoelectric actuator and the disc rotor are realized through electric signals, the mechanical output performance of the disc rotor is hopefully improved, and the application of the disc rotor in ultra-precise rotation driving and positioning is expanded.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a three-dimensional schematic view of a single degree of freedom piezoelectric turret where N is equal to 6;
FIG. 2 is an exploded view of a single two-dimensional piezoelectric actuator hold-down structure of a single degree of freedom piezoelectric turret where N equals 6;
FIG. 3 is a schematic representation of a single two-dimensional piezoelectric actuator performing forward and reverse bending motions in two orthogonal directions A1 and A2, respectively; wherein, the partial graph (a) represents the positive bending motion of the single two-dimensional piezoelectric actuator along the A2 direction, the partial graph (b) represents the negative bending motion of the single two-dimensional piezoelectric actuator along the A2 direction, the partial graph (c) represents the positive bending motion of the single two-dimensional piezoelectric actuator along the A1 direction, and the partial graph (d) represents the negative bending motion of the single two-dimensional piezoelectric actuator along the A1 direction;
FIG. 4 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator moving slowly and curvedly from a positive pole position to a negative pole position;
FIG. 5 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator simultaneously bending rapidly from a negative limit position to a positive limit position;
FIG. 6 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator moving slowly and curvedly from a negative limit position to a positive limit position;
FIG. 7 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator simultaneously bending rapidly from a positive limit position to a negative limit position;
FIG. 8 is a schematic diagram of an excitation voltage signal of a single degree of freedom piezoelectric rotary stage; wherein, VmaxIs the maximum value of the amplitude of the forward voltage, -VmaxThe amplitude of the negative voltage is the maximum value, T is a period, T is the duration of the slow change of the voltage signal in one period, and T exceeds a half period T/2; a partial graph (a) shows that an excitation voltage signal with the amplitude value decreasing from the large positive value to the large negative value is applied first in one period T, and a partial graph (b) shows that an excitation voltage signal with the amplitude value increasing from the large negative value to the large positive value is applied first in one period T;
FIG. 9 is a schematic diagram of the realization of the pre-load adjustment of a single-degree-of-freedom piezoelectric rotary table, wherein the dotted arrows indicate the bending motion directions of the corresponding two-dimensional piezoelectric actuators.
In the above-mentioned drawings, the coordinate system XYZ is a cartesian space rectangular coordinate system, and the Z axis coincides with the axis of the disk rotor, and the X and Y axes respectively represent two orthogonal directions on the axial symmetry plane of the disk rotor.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, are within the scope of the present invention.
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
The first embodiment is as follows: the present embodiment will be described in further detail with reference to fig. 1 and 2 of the specification. The embodiment provides a specific implementation scheme of a single-degree-of-freedom piezoelectric turntable, which comprises an annular base 1, N two-dimensional piezoelectric actuators 2, a disc rotor 3, 2N axial fixing screws 4, N axial pressing blocks 5 and N radial fastening screws 6, wherein N is an even number greater than or equal to 6; the N two-dimensional piezoelectric actuators 2 are divided into an upper layer and a lower layer which are uniformly distributed on the circumference of the annular base 1, and the upper layer and the lower layer respectively comprise N/2 two-dimensional piezoelectric actuators 2; the N two-dimensional piezoelectric actuators 2 have the same structure; each two-dimensional piezoelectric actuator 2 comprises a rectangular base 2-1, a piezoelectric element 2-2 and a driving foot 2-3, wherein the rectangular base 2-1, the piezoelectric element 2-2 and the driving foot 2-3 are fixedly connected in sequence; n rectangular gaps 1-1 and N annular gaps 1-2 are respectively and uniformly distributed along the circumferential direction of the upper end surface and the lower end surface of the annular base 1, the rectangular gaps 1-1 and the annular gaps 1-2 on each end surface of the annular base 1 are uniformly and correspondingly arranged, wherein the annular gaps 1-2 are formed by removing part of annular bodies from the corresponding end surfaces of the annular base 1, the rectangular gaps 1-1 are positioned on the bottom surfaces of the annular gaps 1-2, and 2 axial threaded holes 1-3 are arranged on the bottom surfaces of the annular gaps 1-2; a radial fastening threaded hole 1-4 is formed in the outer cylindrical surface of the annular base 1 in the radial direction passing through the center of each rectangular notch 1-1; the annular gap 1-2, the rectangular gap 1-1, the axial threaded hole 1-3 and the radial fastening threaded hole 1-4 on the upper end surface are arranged in a mirror image relationship with the annular gap 1-2, the rectangular gap 1-1, the axial threaded hole 1-3 and the radial fastening threaded hole 1-4 on the lower end surface by taking the axial symmetry plane of the annular base 1 as the center; the annular gap 1-2 is matched with the axial compression block 5 in structure, and the axial compression block 5 is embedded into the annular gap 1-2 and fixedly connected with the annular base 1 through an axial fixing screw 4; the rectangular base 2-1 of the two-dimensional piezoelectric actuator 2 has the same shape characteristics with the rectangular gap 1-1 on the annular base 1, and the rectangular base 2-1 is embedded into the rectangular gap 1-1; the radial set screw 6 is connected with the annular base 1 through a radial set threaded hole 1-4 and is in contact with the rectangular base 2-1 of the two-dimensional piezoelectric actuator 2, and the fine adjustment of the radial distribution position of the two-dimensional piezoelectric actuator 2 along the annular base 1 is realized by adjusting the position of the radial set screw 6; the outer edge of the disk rotor 3 is provided with an upper conical ring surface 3-1 and a lower conical ring surface 3-2, the driving feet 2-3 of the upper N/2 two-dimensional piezoelectric actuators 2 are in contact with the upper conical ring surface 3-1 of the disk rotor 3, and the driving feet 2-3 of the lower N/2 two-dimensional piezoelectric actuators 2 are in contact with the lower conical ring surface 3-2 of the disk rotor 3; the upper end face and the lower end face of the annular base 1 can be processed with threaded holes, countersunk holes or through holes for connecting the single-degree-of-freedom piezoelectric turntable with other parts.
The second embodiment is as follows: this embodiment will be described in further detail with reference to fig. 3 of the specification. The present embodiment provides a specific embodiment in which a single two-dimensional piezoelectric actuator 2 realizes bending motions in two orthogonal directions a1 and a 2. The two-dimensional bending motion of a single two-dimensional piezoelectric actuator 2 can be realized by applying a single excitation voltage signal to the piezoelectric element 2-2, as shown in fig. 3, so as to realize positive and negative bending motions along the a2 axis: when the amplitude of the excitation voltage signal is positive, the two-dimensional piezoelectric actuator 2 generates a bending motion in the positive direction along the a2 axis, as shown in fig. 3 (a); when the excitation voltage signal amplitude is negative, the two-dimensional piezoelectric actuator 2 generates a bending motion in the negative direction of the a2 axis, as shown in fig. 3 (b). Positive and negative bending movements along the a1 axis can be realized by applying another excitation voltage signal to the piezoelectric element 2-2, respectively, and when the amplitude of the excitation voltage signal is positive, the two-dimensional piezoelectric actuator 2 generates a positive bending movement along the a1 axis, as shown in fig. 3 (c); when the excitation voltage signal amplitude is negative, the two-dimensional piezoelectric actuator 2 generates a bending motion in the negative direction of the a1 axis, as shown in fig. 3 (d). The above-described a1 and a2 axis directions only represent two orthogonal bending motion directions achieved by the two-dimensional piezoelectric actuator 2.
The third concrete implementation mode: this embodiment is described in further detail with reference to fig. 4 to 8 of the specification. The embodiment provides a specific implementation scheme of an excitation method of a single-degree-of-freedom piezoelectric turntable, a Cartesian rectangular coordinate system XYZ is established by taking the center of a disc rotor 3 as a coordinate origin, and the Z axis of the coordinate system is collinear with the axis of the disc rotor 3, so that the excitation method can excite the disc rotor 3 of the single-degree-of-freedom piezoelectric turntable to realize the output of the anticlockwise or clockwise rotary motion around the Z axis; the following description is a case where the number N of the two-dimensional piezoelectric actuators 2 is equal to six.
The specific process of the counterclockwise rotary motion output of the driving disc rotor 3 around the Z axis is as follows:
step one, applying a path of slowly-descending excitation voltage signal on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a period T in one excitation voltage signal period T in the graph (a) of FIG. 8; the six two-dimensional piezoelectric actuators 2 generate slow bending deformation to the position of a negative electrode in the tangential direction anticlockwise around the Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate slow micro displacement in the tangential direction anticlockwise around the Z axis, and the disc rotor 3 is driven by static friction force to generate micro angular displacement in the anticlockwise direction around the Z axis, as shown in FIG. 4;
step two, applying a path of excitation voltage signal which rises rapidly on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a T-T period in one excitation voltage signal period T in the graph (a) of FIG. 8; the six two-dimensional piezoelectric actuators 2 generate rapid bending deformation to a positive electrode limit position along a tangential direction clockwise around the Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate rapid micro displacement along the tangential direction clockwise around the Z axis, and the disc rotor 3 keeps static due to inertia, as shown in FIG. 5;
in the first step and the second step, the duration of the T period is longer than half of an excitation period T/2 of the excitation voltage signal;
step three, repeating the step one to the step two, namely, repeatedly applying excitation voltage signals of a plurality of periods shown in fig. 8(a) to the six two-dimensional piezoelectric actuators to realize continuous rotary motion output of the disc rotor 3 around the Z axis in the counterclockwise direction;
the specific process of driving the disc rotor 3 to rotate clockwise around the Z axis to output is as follows:
step one, applying a path of slowly rising excitation voltage signal on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a period T in one excitation voltage signal period T in fig. 8 (b); the six two-dimensional piezoelectric actuators 2 generate slow bending deformation to the positive limit position along the clockwise tangential direction around the Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate slow micro displacement along the clockwise tangential direction around the Z axis, and the disc rotor 3 is driven by static friction force to generate micro angular displacement along the clockwise tangential direction around the Z axis, as shown in FIG. 6;
step two, applying a path of excitation voltage signal which is rapidly dropped on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a T-T period in one excitation voltage signal period T in the graph (a) of FIG. 8; the six two-dimensional piezoelectric actuators 2 generate rapid bending deformation to a negative electrode limit position along a tangential direction anticlockwise around a Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate rapid micro displacement along the tangential direction anticlockwise around the Z axis, and the disc rotor 3 keeps static due to inertia, as shown in FIG. 7;
in the first step and the second step, the duration of the T period is longer than half of an excitation period T/2 of the excitation voltage signal;
and step three, repeating the step one to the step two, namely, repeatedly applying excitation voltage signals of a plurality of cycles shown in fig. 8(b) to the six two-dimensional piezoelectric actuators to realize the continuous rotation motion output of the disc rotor 3 around the Z axis in the clockwise direction.
The fourth concrete implementation mode: this embodiment will be described in further detail with reference to fig. 9 of the specification. The embodiment provides a specific implementation scheme for adjusting the pretightening force of the single-degree-of-freedom piezoelectric turntable by using the voltage signal so as to regulate and control the friction force; the following description is a case where the number N of the two-dimensional piezoelectric actuators 2 is equal to six. The pretightening force of the single-degree-of-freedom piezoelectric turntable refers to positive pressure between six two-dimensional piezoelectric actuators 2 of the single-degree-of-freedom piezoelectric turntable and a disc rotor 3; the positive pressure determines the sliding friction force between the two-dimensional piezoelectric actuator 2 and the disk rotor 3, and the sliding friction force between the two-dimensional piezoelectric actuator 2 and the disk rotor 3 is in a direct proportional relation with the positive pressure between the two; voltage signals with positive and negative amplitudes are respectively applied to an upper three-dimensional piezoelectric actuator 2 and a lower three-dimensional piezoelectric actuator 2 of the single-degree-of-freedom piezoelectric turntable, the upper three-dimensional piezoelectric actuator 2 generates bending motion along the negative direction of the Z axis, the lower three-dimensional piezoelectric actuator 2 generates bending motion along the positive direction of the Z axis, and the direction of the bending motion of the two-dimensional piezoelectric actuator 2 along the Z axis is shown by a dotted arrow in FIG. 9; because the two-dimensional piezoelectric actuator 2 belongs to an elastic body, when the two-dimensional piezoelectric actuator 2 on the upper layer and the two-dimensional piezoelectric actuator 2 on the lower layer respectively generate slight bending motion along the negative direction of the Z axis and the positive direction of the Z axis, the driving feet 2-3 of the two-dimensional piezoelectric actuator 2 are always kept in contact with the upper conical ring surface 3-1 and the lower conical ring surface 3-2 of the disk rotor 3; the positive pressure between the six two-dimensional piezoelectric actuators 2 and the disc rotor 3 is adjusted to be large or small by increasing or decreasing the amplitude of the used voltage signal; because the friction force between the six two-dimensional piezoelectric actuators 2 and the disc rotor 3 is in direct proportion to the positive pressure, the magnitude regulation and control of the friction force are realized by using voltage signals.
The invention provides a piezoelectric turntable with single degree of freedom, which realizes the unification of supporting and driving parts and avoids the use of other supporting and limiting mechanisms by designing the configuration relation of a plurality of two-dimensional piezoelectric actuators and the structure of a disk rotor; on the other hand, the friction force of the piezoelectric rotating platform can be electrically adjusted in the running process; the defects that the friction force between the rotor and the stator is difficult to regulate and control due to the complex structure and uncontrollable pretightening force in operation of the traditional piezoelectric turntable are overcome; the excitation method of the single-degree-of-freedom piezoelectric turntable is provided, a plurality of two-dimensional piezoelectric actuators of the single-degree-of-freedom piezoelectric turntable are excited by periodic excitation signals to generate bending motion, tiny displacement along a specific direction is formed on a driving foot, and a rotor is driven to continuously rotate by using friction force. In summary, the single-degree-of-freedom piezoelectric turntable provided by the invention realizes the self-supporting and limiting of the rotor and the electric regulation and control of the friction force in operation, and has the characteristics of large stroke, no heating, high motion resolution and the like, and the characteristics can powerfully support the application of the single-degree-of-freedom piezoelectric turntable in ultra-precise driving and positioning engineering.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (7)
1. A single degree of freedom piezoelectric turntable is characterized in that: the piezoelectric actuator comprises an annular base (1), N two-dimensional piezoelectric actuators (2), a disk rotor (3), 2N axial fixing screws (4), N axial compression blocks (5) and N radial set screws (6), wherein N is an even number which is more than or equal to 6; the N two-dimensional piezoelectric actuators (2) are divided into an upper layer and a lower layer which are uniformly distributed on the circumference of the annular base (1), and the upper layer and the lower layer respectively comprise N/2 two-dimensional piezoelectric actuators (2); the N two-dimensional piezoelectric actuators (2) have the same structure; each two-dimensional piezoelectric actuator (2) comprises a rectangular base (2-1), a piezoelectric element (2-2) and a driving foot (2-3), wherein the rectangular base (2-1), the piezoelectric element (2-2) and the driving foot (2-3) are fixedly connected in sequence; n rectangular notches (1-1) and N annular notches (1-2) are respectively and uniformly distributed along the circumferential direction of the upper end face and the lower end face of the annular base (1), the rectangular notches (1-1) and the annular notches (1-2) on each end face of the annular base (1) are uniformly and correspondingly arranged, the annular notches (1-2) are formed by removing part of annular bodies from the corresponding end faces of the annular base (1), the rectangular notches (1-1) are located on the bottom faces of the annular notches (1-2), and 2 axial threaded holes (1-3) are formed in the bottom faces of the annular notches (1-2); a radial fastening threaded hole (1-4) is formed in the outer cylindrical surface of the annular base (1) in the radial direction passing through the center of each rectangular notch (1-1); the annular gap (1-2), the rectangular gap (1-1), the axial threaded hole (1-3) and the radial fastening threaded hole (1-4) on the upper end surface are arranged in a mirror image relationship with the annular gap (1-2), the rectangular gap (1-1), the axial threaded hole (1-3) and the radial fastening threaded hole (1-4) on the lower end surface by taking the axial symmetry plane of the annular base (1) as the center; the annular gap (1-2) is matched with the axial compression block (5) in structure, and the axial compression block (5) is embedded into the annular gap (1-2) and fixedly connected with the annular base (1) through an axial fixing screw (4); the rectangular base (2-1) of the two-dimensional piezoelectric actuator (2) is the same as the rectangular notch (1-1) on the annular base (1) in shape and characteristic, and the rectangular base (2-1) is embedded into the rectangular notch (1-1); the radial set screw (6) is connected with the annular base (1) through a radial set threaded hole (1-4) and is in contact with the rectangular base (2-1) of the two-dimensional piezoelectric actuator (2), and the fine adjustment of the radial distribution position of the two-dimensional piezoelectric actuator (2) along the annular base (1) is realized by adjusting the position of the radial set screw (6); the outer edge of the disc rotor (3) is provided with an upper conical ring surface (3-1) and a lower conical ring surface (3-2), the driving feet (2-3) of the upper N/2 two-dimensional piezoelectric actuators (2) are in contact with the upper conical ring surface (3-1) of the disc rotor (3), and the driving feet (2-3) of the lower N/2 two-dimensional piezoelectric actuators (2) are in contact with the lower conical ring surface (3-2) of the disc rotor (3).
2. The single degree of freedom piezoelectric turntable of claim 1, wherein: the disc rotor (3) is supported by N two-dimensional piezoelectric actuators (2) uniformly arranged on the annular base (1), and all motion freedom degrees of the disc rotor (3) except for the rotation motion around the axis of the disc rotor are limited by the contact between the N two-dimensional piezoelectric actuators (2) and the disc rotor (3).
3. The single degree of freedom piezoelectric turntable of claim 1, wherein: by means of one path of voltage signals, positive pressure between the two-dimensional piezoelectric actuators (2) and the disc rotor (3) is controlled by controlling bending motion of the N two-dimensional piezoelectric actuators (2) along the axis direction of the disc rotor (3), and friction between the two-dimensional piezoelectric actuators (2) and the disc rotor (3) is further controlled.
4. The single degree of freedom piezoelectric turntable of claim 1, wherein: each two-dimensional piezoelectric actuator (2) produces independent bending motion along two orthogonal directions.
5. The single degree of freedom piezoelectric turntable of claim 1, wherein: the annular base (1) is provided with a threaded hole, a countersunk hole or a through hole for fixedly connecting the single-degree-of-freedom piezoelectric turntable with other parts.
6. The excitation method of the single degree of freedom piezoelectric turntable as set forth in any one of claims 1 to 5, wherein: the method is used for exciting N two-dimensional piezoelectric actuators (2) to realize bending motion along the circumferential tangential direction outside a disc rotor (3) at the same time, and driving the disc rotor (3) to realize single-degree-of-freedom rotary motion; namely, the disc rotor (3) realizes the rotation motion around the Z axis in the anticlockwise or clockwise direction;
the specific process of the driving disc rotor (3) rotating around the Z axis in the anticlockwise direction is as follows:
firstly, slowly-descending excitation voltage signals are applied to piezoelectric elements (2-2) of N two-dimensional piezoelectric actuators (2), the N two-dimensional piezoelectric actuators (2) generate slow bending deformation to a negative electrode limit position along a tangential direction anticlockwise around a Z axis, driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) generate slowly-changing micro displacement along the tangential direction anticlockwise around the Z axis, and the disc rotor (3) is driven by static friction force to generate micro angular displacement along the anticlockwise direction around the Z axis;
secondly, applying a rapidly rising excitation voltage signal to the piezoelectric elements (2-2) of the N two-dimensional piezoelectric actuators (2), enabling the N two-dimensional piezoelectric actuators (2) to rapidly bend and deform to a positive limit position along a clockwise tangential direction around the Z axis, enabling the driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) to rapidly change micro displacement along the clockwise tangential direction around the Z axis, and enabling the disc rotor (3) to keep static due to inertia;
step three, repeating the step one to the step two to realize the continuous rotary motion of the disc rotor (3) around the Z axis in the anticlockwise direction;
the specific process of the clockwise rotary motion of the driving disc rotor (3) around the Z axis is as follows:
firstly, applying slowly rising excitation voltage signals to piezoelectric elements (2-2) of N two-dimensional piezoelectric actuators (2), enabling the N two-dimensional piezoelectric actuators (2) to generate slow bending deformation to a positive limit position along a clockwise tangential direction around a Z axis, enabling driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) to generate slowly changing micro displacement along the clockwise tangential direction around the Z axis, and driving a disc rotor (3) to generate micro angular displacement along the clockwise direction around the Z axis through static friction force;
secondly, applying a rapidly-descending excitation voltage signal to the piezoelectric elements (2-2) of the N two-dimensional piezoelectric actuators (2), enabling the N two-dimensional piezoelectric actuators (2) to rapidly bend and deform to a negative limit position along a tangential direction anticlockwise around the Z axis, enabling the driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) to rapidly change micro displacement along the tangential direction anticlockwise around the Z axis, and enabling the disc rotor (3) to keep static due to inertia;
and step three, repeating the step one to the step two to realize the continuous rotation motion of the disc rotor (3) around the Z axis in the clockwise direction.
7. The excitation method of the single-degree-of-freedom piezoelectric turntable as claimed in claim 6, wherein: the excitation voltage signal required for realizing the method is a periodic, asymmetric sawtooth or trapezoidal waveform, the rising and falling processes of the excitation voltage signal in each period can be linear or nonlinear, but the duration of the rising and falling processes is not equal.
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