CN108306546A - Compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method - Google Patents
Compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method Download PDFInfo
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- CN108306546A CN108306546A CN201810176962.0A CN201810176962A CN108306546A CN 108306546 A CN108306546 A CN 108306546A CN 201810176962 A CN201810176962 A CN 201810176962A CN 108306546 A CN108306546 A CN 108306546A
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- 230000009977 dual effect Effects 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- 239000000919 ceramic Substances 0.000 claims description 15
- 241000209094 Oryza Species 0.000 claims description 14
- 235000007164 Oryza sativa Nutrition 0.000 claims description 14
- 235000009566 rice Nutrition 0.000 claims description 14
- 238000009434 installation Methods 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 238000012216 screening Methods 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000002783 friction material Substances 0.000 claims description 6
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 4
- 239000003365 glass fiber Substances 0.000 claims description 4
- 229910001094 6061 aluminium alloy Inorganic materials 0.000 claims description 3
- 229910001008 7075 aluminium alloy Inorganic materials 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 9
- 230000033001 locomotion Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 208000018672 Dilatation Diseases 0.000 description 1
- 241000565675 Oncomelania Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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Abstract
A kind of compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method is difficult to realize big stroke, high-precision precise motion to solve current piezoelectric actuator due to frictional force adjusting difficulty during driving.The present invention includes workbench, double guide rail movers, double drive stator and screw thread loader；Double guide rail movers are fixedly mounted on the mover mounting plane of workbench, and the double drive stator is mounted on stator mounting plane, and the screw thread loader couples workbench and double drive stator by screw-thread fit.The present invention realizes the friction adjusting function of triangle double driving mechanism by screw thread loader, can be obviously improved its mechanical output characteristics, have both the features such as compact-sized, easy to assembly, positioning accuracy is high and stroke is big.It can be used widely in the micro-nanos such as microstoning, precision optics precision actuation and field of locating technology.
Description
Technical field
The present invention relates to a kind of compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Methods, belong to accurate drive
Dynamic and field of locating technology.
Background technology
With the fast development of modern science and technology, micro-nano technology, micro-nano operation, precision optics, biomedical engineering, boat
Variation with rapid changepl. never-ending changes and improvements has occurred in many forward position high-tech areas such as empty space flight.While these fields are constantly progressive, to its core
Heart support technology --- ultraprecise actuation techniques propose the newer requirement of higher.Piezoelectric driving technology be it is a kind of utilize piezoresistive material
The inverse piezoelectric effect of material converts electrical energy into the novel type of drive of mechanical energy, and piezoelectric actuator is in volume, precision, response speed
Degree, power output and power density etc. have apparent comprehensive advantage, all kinds of novel precise drivers occurred at present very big
Ground has pushed the development of precision actuation technology, wherein the piezoelectric actuator based on stick-slip inertial drive principle due to it is compact-sized,
The advantages that stroke is big, kinematic accuracy is high, stable and reliable for performance has a good application prospect.But most of piezoelectricity stick-slip driver
Comprehensive regulation can not be carried out to frictional force during driving, cause the output performance of piezoelectricity stick-slip driver limited, limit
The application and development of piezoelectric actuator.
Invention content
To solve piezoelectric actuator of current piezoelectricity stick-slip driver during driving caused by frictional force adjusting difficulty
The technical problems such as limited performance, the invention discloses a kind of compact dual actuation component piezoelectricity stick-slip driving device and its driving sides
Method.
The technical solution adopted in the present invention：
The compact dual actuation component piezoelectricity stick-slip driving device is by workbench, double guide rail movers, double drive stator and screw thread
Loader forms；Double guide rail movers are fixedly mounted on the mover mounting plane of workbench, the double drive stator installation
On stator mounting plane, the screw thread loader passes through screw-thread fit connecting working table and double drive stator.
Stainless steel material can be used in the workbench, and the workbench includes mover mounting plane, mover installation screw, determines
Sub- mounting plane, sliding rail I, loading bench, load screw hole and sliding rail II, the mover installation screw setting are pacified in mover
It fills in plane, double guide rail movers are fixedly mounted on mover peace by the mover installation screw by the threaded connection with fixing bolt
Fill plane, the sliding rail I, loading bench and sliding rail II are arranged on stator mounting plane, the sliding rail I with it is double
The dovetail groove I of driving stator is engaged, and the sliding rail II and the dovetail groove II of double drive stator are engaged, described to add
It carries screw hole to be arranged on loading bench, screw thread loader one end is threadedly coupled with load screw hole, the other end and double drive stator
It is fixedly connected.
Double guide rail movers are biserial decussation roller guide rail, and double guide rail movers include quiet guide rail, external microscope carrier spiral shell
Hole, dynamic guide rail, stop screw, guide rail mounting hole, fixing bolt and roller sliding panel, the external microscope carrier screw hole array setting exist
On dynamic guide rail, the external microscope carrier screw hole can be connect with peripheral microscope carrier, the dynamic guide rail and double drive stator sliding contact, described
The thickness of dynamic guide rail is M, and the wherein value range of M is 6 ~ 9mm, and the dynamic guide rail contact end face is coated with ceramic-like or glass fibre
Class friction material, the stop screw are installed on the both sides of quiet guide rail and dynamic guide rail, the roller sliding panel respectively with quiet guide rail
With dynamic guide rail sliding contact, the guide rail is fixed hole array and is arranged on quiet guide rail, and the guide rail mounting hole passes through fixing bolt
Quiet guide rail is fixedly mounted on the table for threaded connection with mover installation screw.
The double drive stator by triangle double driving mechanism, stack piezoelectric ceramics, screening glass and Ji meter screws and form, it is described
Triangle double driving mechanism uses 5025 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-13 titanium alloys
Material, the triangle double driving mechanism are provided with triangle crossbeam, tie-beam II and bottom girder, and the triangle crossbeam is isoceles triangle
Shape, the setting of the tie-beam II at triangle double driving mechanism center, the both ends of the tie-beam II respectively with triangle crossbeam and bottom
Beam is rigidly connected, and the both sides of the triangle double driving mechanism are symmetrically arranged with right circular flexure hinge I, tie-beam I and straight circle flexibility
Hinge II, I front end of the tie-beam are rigidly connected by right circular flexure hinge II and triangle crossbeam, and I rear end of the tie-beam is logical
It crosses right circular flexure hinge I to be rigidly connected with bottom girder, the base angle of the triangle crossbeam is α, wherein the value range of base angle is 15 °
~ 45 °, the hinge thickness of the right circular flexure hinge I and right circular flexure hinge II is h, wherein the value range of h is 0.2 ~
0.8mm, the triangle crossbeam front end center are provided with semicircle driving head, the semicircle driving head and dynamic guide rail sliding contact, institute
It states semicircle driving head contact face and is coated with ceramic-like or glass fibre class friction material, the vertical height of the semicircle driving head is
N, wherein N=（M-2）Mm, N<M can ensure effective contact area, improve transmission efficiency, base rice spiral shell is provided on the bottom girder
Oncomelania hole, dovetail groove I, load through-hole and dovetail groove II, the base rice screw are installed in base rice bolt-hole, the dovetail groove
I and dovetail groove II be symmetricly set on the bottom girder both sides of triangle double driving mechanism, pass through screw thread loader, institute in the load through-hole
State and stack piezoelectric ceramics and be placed in triangle double driving mechanism, the screening glass be installed on stack piezoelectric ceramics and base rice screw it
Between, the screening glass uses wolfram steel material.
The screw thread loader includes loading bolt, fixing nut, load nut and spring, and the loading bolt, which passes through, to be added
Through-hole is carried, and is threadedly coupled with load screw hole, the fixing nut is threadedly coupled with loading bolt, and loading bolt is fixedly mounted
On double drive stator, the spring pocket is mounted on loading bolt between fixing nut and loading bench inner plane, described
Load nut is threadedly coupled with load screw hole, is mounted on loading bench outerplanar.
The complex incentive electric signal that is used in the driving method realizes, complex incentive electric signal include friction regulation and control wave and
Wave is driven, by the regulation and control wave complex superposition that will rub in the quick power-on stage of driving wave, excitation double drive stator is quickly becoming
The shape stage is in micro- secondary high-frequency resonance state, and rapid deformation stage double drive stator and double guide rails are reduced based on ultrasonic antifriction effect
Frictional resistance between mover；The driving wave is sawtooth wave, and friction regulation and control wave is sine wave, and the period of wherein sawtooth wave is
T1, driving voltage amplitude is V1, symmetry S, sine wave period T2, driving voltage amplitude is V2, sawtooth wave and sine wave
Period ratio is T1/T2=100 ~ 20000, driving voltage Amplitude Ration is V1/V2=2~6。
The beneficial effects of the invention are as follows：The present invention uses the triangle double driving mechanism with frictional force comprehensive regulation function,
And use parasitic motion principle, it is possible to increase driving force of the piezoelectric actuator in " viscous " stage reduces piezoelectric actuator in " cunning " rank
The frictional resistance of section realizes the comprehensive regulation for driving process frictional force to Piexoelectric actuator, can be obviously improved Piezoelectric Driving
The output performance of device, compared with prior art, power output promote 30% or more, and output speed promotes 40% or more, fixed under closed loop
Position precision is up to nanoscale.
Description of the drawings
Fig. 1 show a kind of structural representation of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Figure；
Fig. 2 show a kind of Working table structure signal of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Figure；
Fig. 3 show a kind of double guide rail Structure of mover of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Schematic diagram；
Fig. 4 show a kind of double drive stator structure of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Schematic diagram；
Fig. 5 show a kind of triangle double driving mechanism of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Vertical view；
Fig. 6 show a kind of triangle double driving mechanism of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Front view；
Fig. 7 show a kind of screw thread loader structure of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Schematic diagram；
Fig. 8 show a kind of composite excitation signal wave of compact dual actuation component piezoelectricity stick-slip driving device proposed by the present invention
Shape schematic diagram.
Specific implementation mode
Specific implementation mode one：Illustrate present embodiment in conjunction with Fig. 1 ~ Fig. 7, it is double that present embodiments provide for a kind of compacts
The specific implementation mode of actuating assembly piezoelectricity stick-slip driving device, a kind of compact dual actuation component piezoelectricity stick-slip driving dress
The specific implementation mode set is expressed as follows：
A kind of compact dual actuation component piezoelectricity stick-slip driving device is by workbench 1, double guide rail movers 2, double drive stator 3
It is formed with screw thread loader 4；Double guide rail movers 2 are fixedly mounted on the mover mounting plane 1-1 of workbench 1, described double
Stator 2 is driven to be mounted on stator mounting plane 1-3, the screw thread loader 4 passes through screw-thread fit connecting working table 1 and double drives
Dynamic stator 3.
Stainless steel material can be used in the workbench 1, and the workbench 1 includes mover mounting plane 1-1, mover installation spiral shell
Hole 1-2, stator mounting plane 1-3, I 1-4 of sliding rail, loading bench 1-5, load screw hole 1-6 and sliding rail II 1-7, it is described
Mover installation screw 1-2 is arranged on mover mounting plane 1-1, and the mover installation screw 1-2 passes through with fixing bolt 2-6's
It is threadedly coupled and double guide rail movers 2 is fixedly mounted on mover mounting plane 1-1, I 1-4 of the sliding rail, loading bench 1-5 and cunning
II 1-7 of dynamic rail road is arranged on stator mounting plane 1-3, and I 1-4 of the sliding rail limits double with sliding rail II 1-7 cooperations
Glide direction of the stator 3 on stator mounting plane 1-3 is driven, the load screw hole 1-6 is arranged on loading bench 1-5, described
Load screw hole 1-6 is for installing screw thread loader 4.
Double guide rail movers 2 are biserial decussation roller guide rail, and double guide rail movers 2 include quiet guide rail 2-1, external load
Platform screw hole 2-2, dynamic guide rail 2-3, stop screw 2-4, guide rail mounting hole 2-5, fixing bolt 2-6 and roller sliding panel 2-7, it is described
External microscope carrier screw hole 2-2 arrays are arranged on dynamic guide rail 2-3, and the external microscope carrier screw hole 2-2 can be connect with peripheral microscope carrier, described
The thickness of dynamic guide rail 2-3 and 3 sliding contact of double drive stator, the dynamic guide rail 2-3 is M, and wherein the value range of M is 6 ~ 9mm,
M=8mm in present embodiment, the dynamic guide rail 2-3 contact faces are coated with ceramic-like or glass fibre class friction material, institute
The both sides that stop screw 2-4 is installed on quiet guide rail 2-1 and dynamic guide rail 2-3 are stated, the stop screw 2-4 is for moving guide rail 2-3's
Sports limiting, the roller sliding panel 2-7 respectively with quiet guide rail 2-1 and dynamic guide rail 2-3 sliding contacts, the guide rail mounting hole 2-
5 arrays are arranged on quiet guide rail 2-1, the spiral shell that the guide rail mounting hole 2-5 passes through fixing bolt 2-6 and mover installation screw 1-2
Quiet guide rail 2-1 is fixedly mounted on workbench 1 by line connection.
The double drive stator 3 by triangle double driving mechanism 3-1, stack piezoelectric ceramics 3-2, screening glass 3-3 and Ji meter spiral shell
3-4 compositions are followed closely, the triangle double driving mechanism 3-1 is using 5025 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titaniums
Alloy or Ti-13 titanium alloy materials, the triangle double driving mechanism 3-1 are provided with triangle crossbeam 3-1-4, II 3-1-6 of tie-beam
It is isosceles triangle with bottom girder 3-1-7, the triangle crossbeam 3-1-4, II 3-1-6 of the tie-beam is arranged in triangle double drive machine
The both ends at the centers structure 3-1, II 3-1-6 of the tie-beam are rigidly connected with triangle crossbeam 3-1-4 and bottom girder 3-1-7 respectively, described
The both sides of triangle double driving mechanism 3-1 are symmetrically arranged with I 3-1-1 of right circular flexure hinge, I 3-1-2 of tie-beam and directly justify flexible hinge
II 3-1-3 of chain, I front ends 3-1-2 of the tie-beam are rigidly connected by II 3-1-3 of right circular flexure hinge and triangle crossbeam 3-1-4,
I rear ends 3-1-2 of the tie-beam are rigidly connected by I 3-1-1 of right circular flexure hinge and bottom girder 3-1-7, the triangle crossbeam 3-
The base angle of 1-4 is α, wherein the value range of base angle is 15 ° ~ 45 °, and in present embodiment, α=15 ° are described directly round soft
Property I 3-1-1 of hinge and right circular flexure hinge II 3-1-3 hinge thickness be h, wherein the value range of h is 0.2 ~ 0.8mm, this
In specific implementation mode, h=0.2mm, the triangle crossbeam 3-1-4 front end centers are provided with semicircle driving head 3-1-5, and described half
Circle driving head 3-1-5 and dynamic guide rail 2-3 sliding contacts, the semicircle driving head 3-1-5 contact faces are coated with ceramic-like or glass
The vertical height of fiber-like friction material, the semicircle driving head 3-1-5 is N, wherein N=（M-2）Mm, N<M can ensure have
Contact area is imitated, transmission efficiency is improved, in present embodiment, base rice screw is provided on N=6mm, the bottom girder 3-1-7
Screw hole 3-1-8, I 3-1-9 of dovetail groove, load through-hole 3-1-10 and dovetail groove II 3-1-11, the base rice screw 3-4 are installed on base
In rice bolt-hole 3-1-8, by changing screwing the number of turns and realizing the axial direction to stacking piezoelectric ceramics 3-2 for base rice screw 3-4
The adjusting of pretightning force, I 3-1-9 of the dovetail groove and II 3-1-11 of dovetail groove are symmetricly set on the bottom of triangle double driving mechanism 3-1
The both sides beam 3-1-7, I 3-1-9 of the dovetail groove are engaged with I 1-4 of sliding rail, II 3-1-11 of the dovetail groove and sliding rail
II 1-7 of road is engaged, and for installing screw thread loader 4, the piezoelectric ceramics 3-2 that stacks is placed in the load through-hole 3-1-10
In triangle double driving mechanism 3-1, the screening glass 3-3, which is installed on, to be stacked between piezoelectric ceramics 3-2 and base rice screw 3-4, wherein
PI or the product of NEC Corporation can be used in the piezoelectric ceramics 3-2 that stacks, and the screening glass 3-3 uses wolfram steel material, is used to protect
Shield stacks piezoelectric ceramics 3-2, prevents it from generating shear strain or local pressure unevenness.
The screw thread loader 4 includes loading bolt 4-1, fixing nut 4-2, load nut 4-3 and spring 4-4, described
Loading bolt 4-1 passes through load through-hole 3-1-10, and is threadedly coupled with load screw hole 1-6, the fixing nut 4-2 and load spiral shell
Loading bolt 4-1 is fixedly mounted on double drive stator 3 by bolt 4-1 threaded connections, and the spring 4-4 is sleeved on loading bolt 4-1
On, and be mounted between fixing nut 4-2 and loading bench 1-5 inner planes, the load nut 4-3 and load screw hole 1-6 screw threads
Connection is mounted on loading bench 1-5 outerplanars, since loading bolt 4-1 and double drive stator 3 are fixed, as rotation load nut 4-3
When spring 4-4 dilatations, make double drive stator 3 with the movement of loading bolt 4-1 on stator mounting plane 1-3 straight line slide
It is dynamic, realize that the pretightning force between double drive stator 3 and double guide rail movers 2 is adjusted.
Specific implementation mode two：Embodiment is described with reference to Fig.8, and present embodiments provide for a kind of compact dual actuations
The specific implementation mode of component piezoelectricity stick-slip driving device driving method, a kind of compact dual actuation component piezoelectricity stick-slip drive
Dynamic apparatus driving circuit is as follows.
The complex incentive electric signal that is used in the driving method realizes, complex incentive electric signal include friction regulation and control wave and
Wave is driven, by the regulation and control wave complex superposition that will rub in the quick power-on stage of driving wave, excitation double drive stator is quickly becoming
The shape stage is in micro- secondary high-frequency resonance state, and rapid deformation stage double drive stator and double guide rails are reduced based on ultrasonic antifriction effect
Frictional resistance between mover；The driving wave is sawtooth wave, and friction regulation and control wave is sine wave, and the period of wherein sawtooth wave is
T1, driving voltage amplitude is V1, symmetry S, sine wave period T2, driving voltage amplitude is V2, sawtooth wave and sine wave
Period ratio is T1/T2=100 ~ 20000, driving voltage Amplitude Ration is V1/V2=2~6。
Operation principle：
The present invention uses asymmetric sawtooth wave electric signal as pumping signal, when the saw for applying high symmetry to stacking piezoelectric ceramics
When tooth waveform signal, piezoelectric ceramics first slowly elongation is stacked, it is rear quickly to shorten, simultaneously because the Axis Tripod of triangle double driving mechanism
It is uneven to Stiffness Distribution, when stacking piezoelectric ceramics and slowly extending between double drive stator and double guide rail movers be static friction, this
When one gradual increased oblique pressure is applied with to double guide rail movers for double drive stator, this oblique pressure can be analyzed to method
To normal pressure and tangential friction drive, since normal direction normal pressure gradually increases, friction drive also therewith gradually increase,
The output characteristics of " viscous " stage double guide rail movers can be increased；It is between double drive stator and double guide rail movers when quick shorten
Friction, double drive stator is gradually reduced the oblique pressure of double guide rail movers at this time, and frictional resistance is also gradually reduced therewith.It repeats
Above step can be such that double guide rail movers continuously move.
In summary the content, a kind of compact dual actuation component piezoelectricity stick-slip driving device of present invention offer and its drive
Dynamic method, with solve current piezoelectric actuator due to during driving frictional force adjust difficult, be difficult to realize big stroke, high-precision
The precise motion of degree.Compact dual actuation component piezoelectricity stick-slip driving device proposed by the invention has both compact-sized, assembly
The features such as convenience, positioning accuracy are high and stroke is big.It can be notable by using the triangle double driving mechanism with friction adjusting function
Its mechanical output characteristics is promoted, can be obtained extensively in the micro-nanos such as microstoning, precision optics precision actuation and field of locating technology
General application.
Claims (6)
1. a kind of compact dual actuation component piezoelectricity stick-slip driving device, it is characterised in that：The compact dual actuation component piezoelectricity
Stick-slip driving device is by workbench（1）, double guide rail movers（2）, double drive stator（3）With screw thread loader（4）Composition；It is described double
Guide rail mover（2）It is fixedly mounted on workbench（1）Mover mounting plane（1-1）On, the double drive stator（3）Mounted on fixed
Sub- mounting plane（1-3）On, the screw thread loader（4）Pass through screw-thread fit connecting working table（1）With double drive stator（3）.
2. a kind of compact dual actuation component piezoelectricity stick-slip driving device according to claim 1, it is characterised in that：It is described
Workbench（1）Using stainless steel material, the workbench（1）Including mover mounting plane（1-1）, mover installation screw（1-2）、
Stator mounting plane（1-3）, sliding rail I（1-4）, loading bench（1-5）, load screw hole（1-6）With sliding rail II（1-7）,
The mover installation screw（1-2）It is arranged in mover mounting plane（1-1）On, the mover installation screw（1-2）By with it is solid
Determine bolt（2-6）Threaded connection by double guide rail movers（2）It is fixedly mounted on mover mounting plane（1-1）, the sliding rail I
（1-4）, loading bench（1-5）With sliding rail II（1-7）It is arranged in stator mounting plane（1-3）On, the sliding rail I（1-
4）With double drive stator（3）Dovetail groove I（3-1-9）It is engaged, the sliding rail II（1-7）With double drive stator（3）
Dovetail groove II（3-1-11）It is engaged, the load screw hole（1-6）It is arranged in loading bench（1-5）On, the screw thread load
Device（4）One end and load screw hole（1-6）It is threadedly coupled, the other end and double drive stator（3）It is fixedly connected.
3. a kind of compact dual actuation component piezoelectricity stick-slip driving device according to claim 1, it is characterised in that：It is described double
Guide rail mover（2）For biserial decussation roller guide rail, double guide rail movers（2）Including quiet guide rail（2-1）, external microscope carrier screw hole
（2-2）, dynamic guide rail（2-3）, stop screw（2-4）, guide rail mounting hole（2-5）, fixing bolt（2-6）With roller sliding panel（2-
7）, the external microscope carrier screw hole（2-2）Array is arranged in dynamic guide rail（2-3）On, the external microscope carrier screw hole（2-2）It can be with periphery
Microscope carrier connects, the dynamic guide rail（2-3）With double drive stator（3）Sliding contact, the dynamic guide rail（2-3）Thickness be M, wherein
The value range of M is 6 ~ 9mm, the dynamic guide rail（2-3）Contact face is coated with ceramic-like or glass fibre class friction material, described
Stop screw（2-4）It is installed on quiet guide rail（2-1）With dynamic guide rail（2-3）Both sides, the roller sliding panel（2-7）Respectively with it is quiet
Guide rail（2-1）With dynamic guide rail（2-3）Sliding contact, the guide rail mounting hole（2-5）Array is arranged in quiet guide rail（2-1）On, institute
State fixing bolt（2-6）With mover installation screw（1-2）Threaded connection by quiet guide rail（2-1）It is fixedly mounted on workbench（1）
On.
4. a kind of compact dual actuation component piezoelectricity stick-slip driving device according to claim 1, it is characterised in that：It is described double
Drive stator（3）Including triangle double driving mechanism（3-1）, stack piezoelectric ceramics（3-2）, screening glass（3-3）With base rice screw（3-
4）, the triangle double driving mechanism（3-1）Using 5025 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or
Ti-13 titanium alloy materials, the triangle double driving mechanism（3-1）It is provided with triangle crossbeam（3-1-4）, tie-beam II（3-1-6）
And bottom girder（3-1-7）, the triangle crossbeam（3-1-4）For isosceles triangle, the tie-beam II（3-1-6）Setting is double in triangle
Driving mechanism（3-1）Center, the tie-beam II（3-1-6）Both ends respectively with triangle crossbeam（3-1-4）And bottom girder（3-1-7）
Rigid connection, the triangle double driving mechanism（3-1）Both sides be symmetrically arranged with right circular flexure hinge I（3-1-1）, tie-beam I
（3-1-2）With right circular flexure hinge II（3-1-3）, the tie-beam I（3-1-2）Front end passes through right circular flexure hinge II（3-1-
3）With triangle crossbeam（3-1-4）Rigid connection, the tie-beam I（3-1-2）Rear end passes through right circular flexure hinge I（3-1-1）With
Bottom girder（3-1-7）Rigid connection, the triangle crossbeam（3-1-4）Base angle be α, wherein the value range of base angle be 15 ° ~
45 °, the right circular flexure hinge I（3-1-1）With right circular flexure hinge II（3-1-3）Hinge thickness be h, wherein the value of h
Ranging from 0.2 ~ 0.8mm, the triangle crossbeam（3-1-4）Front end center is provided with semicircle driving head（3-1-5）, the semicircle drive
Dynamic head（3-1-5）With dynamic guide rail（2-3）Sliding contact, the semicircle driving head（3-1-5）Contact face is coated with ceramic-like or glass
Glass fiber-like friction material, the semicircle driving head（3-1-5）Vertical height be N, wherein N=（M-2）Mm, N<M can be protected
Effective contact area is demonstrate,proved, transmission efficiency, the bottom girder are improved（3-1-7）On be provided with base rice bolt-hole（3-1-8）, dovetail groove
Ⅰ（3-1-9）, load through-hole（3-1-10）With dovetail groove II（3-1-11）, the base rice screw（3-4）It is installed on base rice screw spiral shell
Hole（3-1-8）It is interior, the dovetail groove I（3-1-9）With dovetail groove II（3-1-11）It is symmetricly set on triangle double driving mechanism（3-1）
Bottom girder（3-1-7）Both sides, the load through-hole（3-1-10）It is interior to pass through screw thread loader（4）, described to stack piezoelectric ceramics（3-
2）It is placed in triangle double driving mechanism（3-1）It is interior, the screening glass（3-3）It is installed on and stacks piezoelectric ceramics（3-2）With base rice screw
（3-4）Between, the screening glass（3-3）Using wolfram steel material.
5. a kind of compact dual actuation component piezoelectricity stick-slip driving device according to claim 1, it is characterised in that；The spiral shell
Line loader（4）Including loading bolt（4-1）, fixing nut（4-2）, load nut（4-3）And spring（4-4）, the load
Bolt（4-1）Across load through-hole（3-1-10）, and with load screw hole（1-6）It is threadedly coupled, the fixing nut（4-2）With add
Carry bolt（4-1）It is threadedly coupled loading bolt（4-1）It is fixedly mounted on double drive stator（3）On, the spring（4-4）It is sleeved on
Loading bolt（4-1）On, and it is mounted on fixing nut（4-2）With loading bench（1-5）Between inner plane, the load nut（4-
3）With load screw hole（1-6）It is threadedly coupled, is mounted on loading bench（1-5）Outerplanar.
6. a kind of driving method of compact dual actuation component piezoelectricity stick-slip driving device, which is to be based on claim
What the compact dual actuation component piezoelectricity stick-slip driving device described in 1 was realized, the complex incentive electricity used in the driving method
Signal realizes that complex incentive electric signal includes friction regulation and control wave and driving wave, by the regulation and control wave complex superposition that will rub in driving
The quick power-on stage of wave, excitation double drive stator are in micro- secondary high-frequency resonance state in the rapid deformation stage, are subtracted based on ultrasound
Effect of rubbing reduces the frictional resistance between rapid deformation stage double drive stator and double guide rail movers；The driving wave is sawtooth wave,
The friction regulation and control wave is sine wave, and the wherein period of sawtooth wave is T1, driving voltage amplitude is V1, symmetry S, sine wave
Period is T2, driving voltage amplitude is V2, the period ratio of sawtooth wave and sine wave is T1/T2=100 ~ 20000, driving voltage amplitude
Than for V1/V2=2~6。
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