CN108199613B - Double-stator fixed type precise piezoelectric stick-slip linear motor and driving method thereof - Google Patents
Double-stator fixed type precise piezoelectric stick-slip linear motor and driving method thereof Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 50
- 230000033001 locomotion Effects 0.000 claims abstract description 101
- 229910003460 diamond Inorganic materials 0.000 claims description 25
- 239000010432 diamond Substances 0.000 claims description 25
- 230000008569 process Effects 0.000 claims description 21
- 230000005284 excitation Effects 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 238000009434 installation Methods 0.000 claims description 12
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 6
- 229910001008 7075 aluminium alloy Inorganic materials 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000002783 friction material Substances 0.000 claims description 4
- 239000003365 glass fiber Substances 0.000 claims description 4
- 229910001094 6061 aluminium alloy Inorganic materials 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 48
- 230000033228 biological regulation Effects 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000003068 static effect Effects 0.000 description 14
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000005489 elastic deformation Effects 0.000 description 7
- 230000003071 parasitic effect Effects 0.000 description 7
- 230000000630 rising effect Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010353 genetic engineering Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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Abstract
A double-stator fixed type precise piezoelectric stick-slip linear motor and a driving method thereof are provided to solve the technical problems of small output thrust, short stroke, low precision and the like caused by the adoption of single-stator driving of the conventional piezoelectric stick-slip linear motor. The invention is composed of a wedge-shaped stator, a double-guide-rail type rotor, a sliding boss, a loading device and a base. The oblique wedge-shaped stator adjusts the contact positive pressure between the oblique wedge-shaped stator and the double-guide-rail type rotor by generating lateral displacement so as to realize comprehensive regulation and control of friction force; meanwhile, the oblique wedge-shaped stator is excited by combining different asymmetric electric signals, so that various driving modes such as an output enhanced type and a motion scram type can be realized. The invention has the characteristics of simple structure, strong load capacity, stable motion and the like, and has good application prospect in the technical field of micro-nano precision driving such as optical precision instruments, semiconductor processing and the like.
Description
Technical Field
The invention relates to a double-stator fixed type precise piezoelectric stick-slip linear motor and a driving method thereof, belonging to the technical field of micro-nano precise driving and positioning.
Background
Due to the rapid development of micro-nano technology, the conventional macroscopic large-size driving devices such as a common motor, gear transmission, a lead screw nut, a worm gear and the like are difficult to meet the precision requirement of modern technology. The high-end scientific and technical fields of various precision ultra-precision processing and measuring technologies, micro-electro-mechanical systems, precision optics, semiconductor manufacturing, modern medicine and biological genetic engineering, aerospace, robots, military technologies and the like have urgent needs for submicron-level and micron/nanometer-level precision driving motors. The discovery of the inverse piezoelectric effect of the piezoelectric material and the appearance of the piezoelectric ceramic material with excellent performance enable the research of the piezoelectric precision motor to be widely concerned, and the piezoelectric precision motor has wide application prospect in the field of precision driving.
Because the piezoelectric stack has the advantages of small volume, high frequency response, less heat generation, large output force, no noise, stable performance and the like, a novel high-precision driving motor based on a piezoelectric stack driving source is widely adopted in the precision machining and positioning technology. The traditional driving motor often has the defects of complex structure, small load output, poor motion stability and the like, so that the design of a micro-nano stick-slip inertial driving motor which has simple structure, strong load capacity and stable motion is very necessary.
Disclosure of Invention
The invention discloses a double-stator fixed type precise piezoelectric stick-slip linear motor and a driving method thereof, aiming at solving the problems of complex structure, small load output, poor motion stability and the like of the traditional driving motor.
The technical scheme adopted by the invention is as follows:
the double-stator fixed type precise piezoelectric stick-slip linear motor comprises a wedge-shaped stator, a double-guide-rail type rotor, a sliding boss, a loading device and a base. The double-guide-rail type rotor is arranged on a sliding boss, the sliding boss is arranged on the base, and the loading device is arranged at the rear end part of the base.
The wedge-shaped stator comprises a piezoelectric stack, a square gasket, a hinge fixing bolt, a horizontal diamond-shaped structure hinge and a pre-tightening bolt; the piezoelectric stack is fixed in the horizontal diamond-shaped structure hinge through the square gasket and the pre-tightening bolt; the hinge fixing bolt is fixedly provided with a horizontal diamond-structure hinge; the horizontal diamond-structure hinge can be made of 5025 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy; rigid beams are arranged around the horizontal diamond-shaped structure hinge, and the rigid beams are connected end to end in a closed manner to form a main body frame of the horizontal diamond-shaped structure hinge; gasket limiting surfaces are arranged at the left end and the right end of the horizontal diamond-structure hinge; the rear end part of the horizontal diamond-shaped structure hinge is provided with a fixing bolt mounting hole, and the horizontal diamond-shaped structure hinge is fixedly mounted on the base through the threaded connection of the fixing bolt and the hinge mounting threaded hole; the left end and the right end of the horizontal diamond structure hinge are provided with pre-tightening bolt mounting threaded holes, and pre-tightening bolts are mounted in the pre-tightening bolt mounting threaded holes; the top of the horizontal diamond-structure hinge is provided with a semicircular driving foot; the front end part of the horizontal diamond-shaped structure hinge is provided with an inclined wedge-shaped motion conversion beam.
The double-guide-rail type rotor is a double-row crossed roller guide rail; the double-guide-rail type rotor comprises a fixed guide rail, a peripheral device mounting threaded hole, a movable guide rail, a limiting bolt, a guide rail mounting hole, a guide rail fixing bolt and a roller retainer assembly; the peripheral device mounting threaded hole can be connected with a peripheral device; the roller retainer assembly is respectively contacted with the movable guide rail and the fixed guide rail; the limiting bolts are arranged at the two ends of the fixed guide rail and the movable guide rail; the guide rail mounting hole is in threaded connection with the guide rail mounting threaded hole through a guide rail fixing bolt, and the guide rail is mounted and fixed on the guide rail mounting plane of the sliding boss.
The sliding boss comprises a guide rail mounting threaded hole, a guide rail mounting plane, a loading device groove, an upper limiting screw, a support frame, an upper spring fixing bolt and an upper sliding rail; the guide rail mounting threaded hole is in threaded connection with the guide rail fixing bolt; the guide rail mounting plane fixes the double-guide-rail type rotor on the sliding boss; the loading device groove is contacted with the decoupling ball head; the upper limiting screws are arranged at two ends of the upper sliding track; the support frame is contacted with the mounting plane of the sliding boss; the upper spring fixing bolt is matched with the lower spring fixing bolt to fixedly install the spring; the upper sliding track is in contact with the spherical sliding guide rail.
The loading device comprises a manual adjusting screw and a decoupling ball head; the external thread of the manual adjusting screw is in threaded connection fit with the internal thread of the mounting threaded hole of the loading device; the decoupling ball head is in contact with the loading device groove.
The base comprises a lower spring fixing bolt, a spring, a sliding boss mounting plane, a hinge limiting boss, a hinge mounting plane, a hinge mounting threaded hole, a lower limiting screw, a spherical sliding guide rail, a cushion block, a base mounting hole, a lower sliding rail and a loading device mounting threaded hole; the lower spring fixing bolt is matched with the upper spring fixing bolt to fixedly install the spring; the mounting plane of the sliding boss is contacted with the support frame; the hinge limiting boss limits the installation position of the wedge-shaped stator; the hinge mounting plane and the hinge mounting threaded hole fix the tapered wedge stator; the lower limiting screws are arranged at two ends of the lower sliding track; the spherical sliding guide rail moves in a sliding rail formed by the upper sliding rail and the lower sliding rail; the cushion block can be contacted with other peripheral devices; the base mounting hole can be fixedly mounted with other peripheral devices; the lower sliding track is in contact with the spherical sliding guide rail; and the loading device mounting threaded hole is in threaded connection with the loading device.
The width of the gasket limiting surface is B, the width of the square gasket is C, the thickness of the square gasket is B, the value range of B is 1-2.5 mm, and B = (C + 1) mm; the thickness of the semicircular driving foot is N, the radius of the semicircular driving foot is Q, the value range of N is 6-9 mm, the value range of Q is 1.5-2.5 mm, and the end face of the semicircular driving foot is correspondingly coated with a ceramic or glass fiber friction material.
The invention provides a double-stator fixed type precise piezoelectric stick-slip linear motor driving method, which is realized based on the double-stator fixed type precise piezoelectric stick-slip linear motor; the driving method is mainly characterized in that under the excitation of asymmetric electric signals, if two groups of symmetry are simultaneously D1Respectively input into two wedge-shaped stators, wherein the symmetry D1The value range of the double-guide-rail rotor is 51-99%, and the forward output thrust of the double-guide-rail rotor can be obviously increased; if two groups of symmetry are simultaneously defined as D2Respectively input into two wedge-shaped stators, wherein the symmetry D2The value range of the double-guide-rail rotor is 1-49%, and the reverse output thrust of the double-guide-rail rotor can be remarkably increased; if a set of symmetries is D at the same time1And the other group has symmetry of D2The electric signals are respectively input into the two wedge-shaped stators, and the accurate emergency stop of the double-guide-rail type rotor in the motion process can be realized.
The asymmetric wave electric signal comprises a sawtooth wave electric signal, a power function wave electric signal, a trapezoidal wave electric signal, an asymmetric square wave electric signal or a combination of any two signals.
The invention has the beneficial effects that: the wedge-shaped stator adopts a wedge-shaped motion conversion beam structure, so that the wedge-shaped stator is unevenly distributed along the axial rigidity, the driving end of the wedge-shaped stator is excited to generate lateral displacement, the positive pressure of the contact between the wedge-shaped stator and the double-guide-rail type rotor is adjusted, the friction driving force between the wedge-shaped stator and the double-guide-rail type rotor is increased, the friction resistance between the wedge-shaped stator and the double-guide-rail type rotor is reduced, the friction force between the wedge-shaped stator and the double-guide-rail type rotor is comprehensively regulated, the displacement tape-back rate is reduced, and the comprehensive regulation and control of the friction force in the whole driving process of the piezoelectric stick-slip horizontal driving device are realized; meanwhile, under the excitation of asymmetric electric signals, the asymmetric electric signals of different combinations are input into the two wedge-shaped stators, so that various driving modes such as an output reinforced type and a motion scram type can be realized, the mechanical output characteristic of the piezoelectric stick-slip linear motor is obviously improved, and the nanoscale positioning precision and millimeter-scale motion stroke can be achieved under the open-loop condition. Compared with the prior art, the device has the characteristics of simple structure, strong load capacity, stable motion and the like.
Drawings
Fig. 1 is a schematic structural diagram of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 2 is a schematic structural diagram of a tapered wedge stator of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
FIG. 3 is a schematic view of a horizontal type rhombic hinge mechanism of a double-stator fixed precise piezoelectric stick-slip linear motor according to the present invention;
fig. 4 is a schematic structural view of a dual-rail type mover of a dual-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 5 is a schematic structural view i of a sliding boss of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 6 is a schematic structural diagram ii of a sliding boss of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 7 is a schematic structural diagram of a loading device of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 8 is a schematic structural diagram of a base of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 9 is a schematic diagram of an asymmetric electrical signal driving waveform of a double-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 10 is a schematic diagram showing different combined excitation signal waveforms and their motion principles of a driving method of a dual-stator fixed precision piezoelectric stick-slip linear motor according to the present invention;
fig. 11 is a schematic structural diagram of a double-stator fixed precision piezoelectric stick-slip linear motor with tapered wedge-shaped stators installed back-to-back according to the present invention;
fig. 12 is a schematic diagram showing different combined excitation signal waveforms and motion principles of a double-stator fixed precision piezoelectric stick-slip linear motor driving method according to the present invention, in which tapered wedge stators are installed back-to-back.
Detailed Description
The first embodiment is as follows: the present embodiment is described with reference to fig. 1 to 8, and provides a specific embodiment of a dual-stator fixed precision piezoelectric stick-slip linear motor, which is described as follows:
the double-stator fixed type precise piezoelectric stick-slip linear motor is composed of a tapered wedge-shaped stator 1, a double-guide-rail type rotor 2, a sliding boss 3, a loading device 4 and a base 5.
The oblique wedge-shaped stator 1 comprises a piezoelectric stack 1-1, a square gasket 1-2, hinge fixing bolts 1-3, a horizontal diamond-structured hinge 1-4 and pre-tightening bolts 1-5. The piezoelectric stack 1-1 is fixed in the horizontal diamond structure hinge 1-4 through the square gasket 1-2 and the pre-tightening bolt 1-5. The piezoelectric stack 1-1 may be a product of PI or NEC. The square gasket 1-2 is made of tungsten steel materials and aims to protect the piezoelectric stack 1-1 and prevent shear strain or local uneven stress. The hinge fixing bolt 1-3 is used for installing and fixing the horizontal diamond-shaped hinge 1-4. The horizontal diamond-shaped hinge 1-4 can be made of 5025 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy, and the horizontal diamond-shaped hinge 1-4 is made of 7075 aluminum alloy in the embodiment. The horizontal diamond structure hinge 1-4 comprises a rigid beam 1-4-1, a gasket limiting surface 1-4-2, a fixing bolt mounting hole 1-4-3, a pre-tightening bolt mounting threaded hole 1-4-4, a semicircular driving foot 1-4-5 and a wedge-shaped motion conversion beam 1-4-6. The rigid beams 1-4-1 are connected end to end in a closed manner to form a main body frame of the horizontal diamond-shaped hinge 1-4. The horizontal diamond structure hinge comprises a horizontal diamond structure hinge body 1-4, and is characterized in that gasket limiting surfaces 1-4-2 are arranged at the left end and the right end of the horizontal diamond structure hinge body 1-4, the width of the gasket limiting surfaces 1-4-2 is B, the width of the square gasket 1-2 is C, the thickness of the square gasket is B, the value range of B is 1-2.5 mm, B = (C + 1) mm, and in the implementation mode, B =1.5mm, B =7mm, and C =6 mm. The rear end part of the horizontal diamond-shaped structure hinge 1-4 is provided with a fixing bolt mounting hole 1-4-3, and the horizontal diamond-shaped structure hinge 1-4 is directly fixed on the base 5 through the threaded connection of the hinge fixing bolt 1-3 and the hinge mounting threaded hole 5-6. The left end and the right end of the horizontal diamond structure hinge 1-4 are provided with pre-tightening bolt installation threaded holes 1-4-4, and the pre-tightening bolts 1-5 achieve axial pre-tightening on the piezoelectric stacks 1-1 through the pre-tightening bolt installation threaded holes 1-4-4. The top of the horizontal diamond-structure hinge 1-4 is provided with a semicircular driving foot 1-4-5, the thickness of the semicircular driving foot 1-4-5 is N, the radius is Q, the thickness of the movable guide rail 2-3 is M, the effective contact area can be guaranteed when N is less than M, the transmission efficiency is improved, the value range of N is 6-9 mm, M = (N + 2) mm, and the value range of Q is 1.5-2.5 mm, in the implementation mode, N =6mm, M =8mm, and Q =2 mm. The end faces of the semicircular driving feet 1-4-5 are correspondingly coated with ceramic or glass fiber friction materials, and the semicircular driving feet 1-4-5 drive the movable guide rails 2-3 to move linearly. The oblique wedge-shaped motion conversion beams 1-4-6 enable the semicircular driving feet 1-4-5 of the oblique wedge-shaped stator 1 to generate lateral displacement due to uneven axial rigidity distribution, increase the friction driving force in the slow deformation driving stage, reduce the friction resistance in the fast deformation driving stage, and realize comprehensive regulation and control of the friction force.
The double-guide-rail type rotor 2 is a double-row crossed roller guide rail, and the double-guide-rail type rotor 2 comprises a fixed guide rail 2-1, peripheral device installation threaded holes 2-2, a movable guide rail 2-3, limit bolts 2-4, guide rail installation holes 2-5, guide rail fixing bolts 2-6 and roller retainer assemblies 2-7. The peripheral device mounting threaded hole 2-2 can be connected with a peripheral device. The contact end face of the movable guide rail 2-3 and the tapered wedge-shaped stator 1 is coated with ceramic or glass fiber friction materials. The roller cage assemblies 2-7 are in contact with the movable rail 2-3 and the fixed rail 2-1, respectively. The limiting bolt 2-4 is used for limiting the movement of the movable guide rail 2-3. The guide rail mounting holes 2-5 are in threaded connection with the guide rail mounting threaded holes 3-1 through guide rail fixing bolts 2-6, so that the fixed guide rails 2-1 are fixed on the guide rail mounting plane 3-2 of the sliding bosses 3.
The sliding boss 3 can be made of stainless steel materials, and the sliding boss 3 comprises guide rail mounting threaded holes 3-1, guide rail mounting planes 3-2, loading device grooves 3-3, upper limiting screws 3-4, support frames 3-5, upper spring fixing bolts 3-6 and upper sliding rails 3-7. The guide rail mounting threaded hole 3-1 is in threaded connection with the guide rail fixing bolt 2-6. The guide rail mounting plane 3-2 is used for mounting and fixing the double-guide rail type rotor 2 on the sliding boss 3. The loading device groove 3-3 is in contact with the loading device 4 and is used for limiting the movement of the decoupling ball head 4-2 at the top end of the loading device 4. The upper limiting screws 3-4 are arranged at two ends of the upper sliding rail 3-7 and used for limiting the movement of the spherical sliding guide rails 5-8 and preventing the spherical sliding guide rails from sliding out of the upper sliding rail 3-7. The support frame 3-5 is in contact with the sliding boss mounting plane 5-3 and is used for supporting the sliding boss 3. The upper spring fixing bolt 3-6 is matched with the lower spring fixing bolt 5-1 to be used for installing and fixing the spring 5-2. The upper sliding track 3-7 is in contact with the spherical sliding guide rail 5-8 and is used for sliding the sliding boss 3.
The loading device 4 comprises a manual adjusting screw 4-1 and a decoupling ball 4-2. The manual adjusting screw rod 4-1 is made of high alloy steel materials. The external thread of the manual adjusting screw rod 4-1 is in threaded connection and matching with the internal thread of the loading device mounting threaded hole 3-3, and the screw motion can be realized by adjusting the manual adjusting screw rod 4-1. And the decoupling ball head 4-2 is used for motion decoupling, and the decoupling ball head 4-2 pushes the sliding boss 3 to linearly move along a sliding rail formed by the upper sliding rail 3-7 and the lower sliding rail 5-11 to complete the movement of the tapered wedge-shaped stator 1.
The base 5 can be made of stainless steel materials, and the base 5 comprises a lower spring fixing bolt 5-1, a spring 5-2, a sliding boss mounting plane 5-3, a hinge limiting boss 5-4, a hinge mounting plane 5-5, a hinge mounting threaded hole 5-6, a lower limiting screw 5-7, a spherical sliding guide rail 5-8, a cushion block 5-9, a base mounting hole 5-10, a lower sliding rail 5-11 and a loading device mounting threaded hole 5-12. The lower spring fixing bolt 5-1 is matched with the upper spring fixing bolt 3-6 to be used for installing and fixing the spring 5-2. The spring 5-2 is used for the return movement of the sliding boss 3. The sliding boss mounting plane 5-3 is in contact with the support frame 3-5. The hinge limiting bosses 5-4 are used for limiting the installation position of the oblique wedge-shaped stator 1, and the fixed installation of the oblique wedge-shaped stator 1 can be completed quickly. The hinge mounting plane 5-5 and the hinge mounting threaded hole 5-6 are used for fixedly mounting the inclined wedge-shaped stator 1. The lower limiting screws 5-7 are arranged at two ends of the lower sliding track 5-11 and used for limiting the movement of the spherical sliding guide rails 5-8. The spherical sliding guide rails 5-8 move in a sliding rail formed by the upper sliding rails 3-7 and the lower sliding rails 5-11. The cushion blocks 5-9 can be in contact with other peripheral devices, and have the functions of shock absorption and skid resistance. The base mounting holes 5-10 can be fixedly mounted with other peripheral devices. The lower sliding rail 5-11 is in contact with the spherical sliding guide rail 5-6 for sliding of the sliding boss 3. The mounting threaded holes 5-12 of the loading device are in threaded connection with the loading device 4, and the position of the sliding boss 3 can be adjusted through the screwing length of the loading device 4, so that the pre-tightening force can be adjusted by the loading device 4.
The second embodiment is as follows: the present embodiment is described with reference to fig. 9 to 10, and the present embodiment proposes a specific embodiment of a double-stator fixed precision piezoelectric stick-slip linear motor driving method, which is expressed as follows:
the driving method of the double-stator fixed precise piezoelectric stick-slip linear motor can be divided into an output reinforced type and a motion scram type, and is mainly characterized in that the double-stator fixed precise piezoelectric stick-slip linear motor adopts a wedge-shaped motion conversion beam 1-4-6 structure, so that the wedge-shaped stator 1 is unevenly distributed along the axial rigidity to generate lateral displacement, the positive pressure of contact between the wedge-shaped stator 1 and the double-guide-rail type rotor 2 is adjusted, and the friction force between the wedge-shaped stator 1 and the double-guide-rail type rotor 2 is further adjusted and controlled; meanwhile, under the excitation of different combined asymmetric electric signals, various driving modes such as an output enhanced type and a motion scram type are realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is comprehensively improved. The asymmetric-wave electrical signal includes: sawtooth wave electric signal, power function wave electric signal, trapezoidal wave electric signal, asymmetric square wave electric signal or any two signal combinations thereof. In this embodiment, the asymmetric electrical signal is a sawtooth electrical signal.
The output enhanced driving method may be embodied as a forward output enhanced type and a reverse output enhanced type. The output enhanced forward output enhanced driving method comprises the following steps:
according to the invention, two oblique wedge-shaped stators 1 are connected in parallel to be used as a driving source, and two groups of sawtooth wave electric signals with the symmetry of 51% -99% in (a) are respectively input into the two oblique wedge-shaped stators 1, wherein the symmetry is 90% in the embodiment, so that the oblique wedge-shaped stators 1 can generate forward output thrust, the output thrust is improved by more than 1 time, the output speed is improved by more than 1 time, and the output efficiency is improved by more than 1 time. The specific movement process is as follows:
the first step is as follows: t is t0At the initial moment, the piezoelectric stacks 1-1 of the two wedge-shaped stators 1 are not powered, the horizontal diamond-shaped structure hinges 1-4 are in a free state, and the movable guide rails 2-3 are in contact with the semicircular driving feet 1-4-5 and are still;
the second step is that: t is t0To t1At the moment, two groups of excitation signals are sawtooth wave slow rising edges, the two piezoelectric stacks 1-1 slowly extend for a certain distance along with the slow increase of voltage in the time period, the piezoelectric stacks 1-1 are embedded into the horizontal rhombic structure hinge 1-4, so that the horizontal rhombic structure hinge 1-4 generates main motion in the y direction, the elastic deformation elongation in the y direction is equal to that of the piezoelectric stacks 1-1, and the main deformation motion of the horizontal rhombic structure hinge 1-4 in the y direction enables the semicircular driving feet 1-4-5 and the movable guide rails 2-3 to moveAnd extruding to increase the maximum static friction force between the semicircular driving feet 1-4-5 and the movable guide rail 2-3, so that the slippage phenomenon is not easy to generate, and the viscous phenomenon in the 'viscous' stage, namely the movable guide rail 2-3 and the semicircular driving feet 1-4-5 are kept relatively static. Because the horizontal rhombic structure hinge 1-4 adopts an inclined wedge-shaped motion conversion beam structure, additional parasitic motion is generated in the positive X direction, the displacement of the semicircular driving feet 1-4-5 is delta X, the two inclined wedge-shaped stators 1 of the motion directly promote the movable guide rails 2-3 to generate delta X displacement in the positive X direction, and the delta X displacement is generated>2Δx；
The third step: t is t1To t2At the moment, two groups of excitation signals are sawtooth wave sharp falling edges, two piezoelectric stacks 1-1 in the time period are rapidly shortened by a certain distance along with the rapid voltage falling to return to the initial length, the horizontal diamond-shaped structure hinge 1-4 is not extruded by the piezoelectric stacks 1-1 and also returns to the initial shape, the semicircular driving feet 1-4-5 simultaneously perform rapid retraction movement in the x direction and the y direction, the retraction movement of the semicircular driving feet 1-4-5 in the y direction does not extrude the movable guide rail 2-3 any more, the positive pressure which is direct to the movable guide rail 2-3 is reduced, the slippage phenomenon between the semicircular driving feet 1-4-5 is easier to occur, the interference of the retraction movement of the semicircular driving feet 1-4-5 in the x direction on the movable guide rail 2-3 is reduced, and the slippage phenomenon in the 'sliding' stage is ensured to occur more efficiently, the tiny displacement delta l in the negative x direction when the movable guide rail 2-3 is retracted is effectively reduced, and the step length of the wedge-shaped stator 1 is increased;
the final displacement of the movable rail 2-3 is Δ s = Δ X- Δ l, (Δ s > 0);
the fourth step: the process from the second step to the third step is repeated, and the tapered wedge stator 1 continuously moves in a stepping manner in the positive x direction.
As described in conjunction with fig. 10 (b), the output enhanced type inverted output enhanced type driving method is as follows:
according to the invention, two wedge-shaped stators 1 are connected in parallel to be used as a driving source, and two groups of sawtooth wave electric signals with the symmetry of 1% -49% in (b) are respectively input into two piezoelectric stacks 1-1, wherein the symmetry is 10% in the embodiment, so that the wedge-shaped stators 1 can generate reverse output thrust, the output thrust is improved by more than 1 time, the output speed is improved by more than 1 time, and the output efficiency is improved by more than 1 time. The specific movement process is as follows:
the first step is as follows: t is t0At the initial moment, the piezoelectric stacks 1-1 of the two wedge-shaped stators 1 are not powered, the horizontal diamond-shaped structure hinges 1-4 are in a free state, and the movable guide rails 2-3 are in contact with the semicircular driving feet 1-4-5 and are still;
the second step is that: t is t0To t1At the moment, two groups of excitation signals are sawtooth wave sharp rising edges, two piezoelectric stacks 1-1 in the time period rapidly extend for a certain distance along with the sharp increase of voltage, because the piezoelectric stacks 1-1 are embedded into horizontal diamond structure hinges 1-4, the horizontal diamond structure hinges 1-4 generate main motion in the y direction, the elastic deformation elongation in the y direction is equal to that of the piezoelectric stacks 1-1, the main deformation motion of the horizontal diamond structure hinges 1-4 in the y direction enables semicircular driving feet 1-4-5 to be extruded with movable guide rails 2-3, because the horizontal diamond structure hinges 1-4 adopt an inclined wedge-shaped motion conversion beam structure, additional parasitic motion is generated in the x positive direction, the displacement of the semicircular driving feet 1-4-5 is delta x, the acceleration of the semicircular driving feet 1-4-5 is far greater than that of the sliding guide rail, so that the sliding phenomenon in a sliding stage is more easily generated, namely the displacement of the sliding guide rail is far smaller than that of the semicircular driving feet 1-4-5, the two inclined wedge-shaped stators 1 of the movement directly promote the movable guide rails 2-3 to generate delta l displacement in the positive x direction, and the delta l displacement is generated<Δx；
The third step: t is t1To t2At the moment, two groups of excitation signals are sawtooth wave slow falling edges, two piezoelectric stacks 1-1 in the time period are slowly shortened to a certain distance along with the slow falling of voltage and are restored to the initial length, the horizontal diamond-shaped structure hinge 1-4 is not extruded by the piezoelectric stacks 1-1 and is also restored to the initial shape, the semicircular driving feet 1-4-5 are subjected to slow retraction movement in the x and y directions simultaneously, the maximum static friction force exists between the semicircular driving feet 1-4-5 and the sliding guide rail at the moment and is not easy to generate the sliding phenomenon, the viscous phenomenon in the 'sticky' stage, namely the movable guide rail 2-3 and the semicircular driving feet 1-4-5 are kept relatively static, and the semicircular driving feet 1-4-5 are retracted to the initial shapeThe displacement in the negative X direction is Deltax, the two wedge stators 1 of the motion directly cause the movable guide rails 2-3 to produce Deltax displacement in the negative X direction, and the Deltax>2Δx；
The final displacement of the movable rail 2-3 is Δ s = Δ l- Δ X, (Δ s < 0);
the fourth step: the process from the second step to the third step is repeated, and the wedge-shaped stator 1 continuously moves in a stepping mode in the negative x direction.
As explained with reference to fig. 10 (c), the sport scram type driving method is as follows:
according to the invention, two oblique wedge-shaped stators 1 are connected in parallel to serve as a driving source, and two groups of sawtooth wave electric signals with the symmetries of 51% -99% and 1% -49% in (c) are respectively input into two piezoelectric stacks 1-1, wherein the symmetries of 90% and 10% in the embodiment are respectively input into one oblique wedge-shaped stator 1 and the other oblique wedge-shaped stator 1, so that one oblique wedge-shaped stator 1 can generate a forward output thrust, the other oblique wedge-shaped stator 1 can generate a reverse output thrust, and finally, the accurate emergency stop in the movement process of the double-guide-track type rotor 2 is realized. The specific movement process is as follows:
the first step is as follows: t is t0At the initial moment, the piezoelectric stacks 1-1 of the two wedge-shaped stators 1 are not powered, the horizontal diamond-shaped structure hinges 1-4 are in a free state, and the movable guide rails 2-3 are in contact with the semicircular driving feet 1-4-5 and are still;
the second step is that: t is t0To t1At the moment, one group of excitation signals are sawtooth wave slow rising edges, one group of excitation signals are sawtooth wave fast rising edges, one piezoelectric stack 1-1 in the time interval slowly extends for a certain distance along with the slow increase of voltage, the horizontal diamond structure hinge 1-4 generates main motion in the y direction, the elastic deformation extension amount in the y direction is equal to that of the piezoelectric stack 1-1, the main deformation motion of the horizontal diamond structure hinge 1-4 in the y direction enables the semicircular driving feet 1-4-5 to be extruded with the movable guide rail 2-3, the maximum static friction force between the semicircular driving feet 1-4-5 and the movable guide rail 2-3 is increased, the slippage phenomenon is not easy to generate, the viscous phenomenon in the 'viscous' stage, namely the movable guide rail 2-3 and the semicircular driving feet 1-4-5 are kept relatively static, because the horizontal rhombic structure hinges 1-4 adopt the inclined wedge-shaped motion conversion beam structure, the product can be produced in the positive x directionGenerating additional parasitic motion, wherein the displacement of the semicircular driving feet 1-4-5 is delta x, and the moving wedge-shaped stator 1 directly drives the movable guide rails 2-3 to generate delta x displacement in the positive direction of x;
the other piezoelectric stack 1-1 rapidly extends for a certain distance along with the rapid increase of voltage, the horizontal rhombus structure hinge 1-4 generates main motion in the y direction, the elastic deformation elongation in the y direction is equal to the elongation of the piezoelectric stack 1-1, the main deformation motion of the horizontal rhombus structure hinge 1-4 in the y direction enables the semicircular driving feet 1-4-5 to be extruded with the movable guide rail 2-3, and additional parasitic motion is generated in the x positive direction due to the fact that the horizontal rhombus structure hinge 1-4 adopts an inclined wedge-shaped motion conversion beam structure, the displacement of the semicircular driving feet 1-4-5 is delta x, the acceleration of the semicircular driving feet 1-4-5 is far greater than that of the sliding guide rail, the sliding phenomenon in the 'sliding' stage is more easily generated, namely the displacement of the sliding guide rail is far smaller than that of the semicircular driving feet 1-4-5, the moving wedge-shaped stator 1 directly prompts the movable guide rails 2-3 to generate delta l displacement in the positive direction x, and delta l is less than delta x; the displacement of the movable guide rail 2-3 in the time period is delta x + delta l;
the third step: t is t1To t2At the moment, one group of excitation signals are sawtooth wave sharp falling edges, one group of excitation signals are sawtooth wave slow falling edges, one piezoelectric stack 1-1 in the time period is rapidly shortened for a certain distance along with the rapid voltage falling to return to the initial length, the horizontal diamond structure hinge 1-4 is not extruded by the piezoelectric stack 1-1 and also returns to the initial shape, the semicircular driving feet 1-4-5 simultaneously and rapidly retreat in the x direction and the y direction, the retreat movement of the semicircular driving feet 1-4-5 in the y direction does not extrude the movable guide rail 2-3 any more, the direct positive pressure with the movable guide rail 2-3 is reduced, the slippage phenomenon between the semicircular driving feet is easier to occur, and the interference of the retreat movement of the semicircular driving feet 1-4-5 in the x direction on the movable guide rail 2-3 is reduced, the slipping phenomenon in the slipping stage is ensured to be more efficient, and the tiny displacement delta l in the x negative direction when the movable guide rail 2-3 is retracted is effectively reduced;
the other piezoelectric stack 1-1 is slowly shortened to a certain distance to return to the initial length along with the slow reduction of the voltage, the horizontal rhombic hinge 1-4 is not extruded by the piezoelectric stack 1-1 and also returns to the initial shape, the semicircular driving feet 1-4-5 synchronously perform slow retraction movement in the x and y directions, the semicircular driving feet 1-4-5 and the sliding guide rail have the maximum static friction force and are not easy to slip, the sticking phenomenon in the sticking stage, namely the movable guide rail 2-3 and the semicircular driving feet 1-4-5 are kept relatively static, the displacement of the semicircular driving feet 1-4-5 is delta x, and the moving wedge-shaped stator 1 directly prompts the movable guide rail 2-3 to generate delta x displacement in the x negative direction;
the final displacement of the movable rails 2 to 3 is Δ s = (Δ x + Δ l) - (Δ l + Δ x) = 0;
the fourth step: the processes from the second step to the third step are repeated in sequence, and the inclined wedge-shaped stator 1 can realize accurate sudden stop in motion.
The third concrete implementation mode: the present embodiment is described with reference to fig. 9, 11, and 12, and the present embodiment proposes a specific embodiment of a double-stator fixed precision piezoelectric stick-slip linear motor driving method for back-to-back installation of tapered wedge stators 1, where the double-stator fixed precision piezoelectric stick-slip linear motor driving method for back-to-back installation of tapered wedge stators is expressed as follows:
the driving method of the double-stator fixed precise piezoelectric stick-slip linear motor with the inclined wedge-shaped stators 1 arranged back to back can be divided into an output reinforced type and a motion scram type, and mainly comprises the steps that the double-stator fixed precise piezoelectric stick-slip linear motor with the inclined wedge-shaped stators 1 arranged back to back adopts an inclined wedge-shaped motion conversion beam 1-4-6 structure, so that the inclined wedge-shaped stators 1 are unevenly distributed along the axial rigidity to generate lateral displacement, the positive pressure of contact between the inclined wedge-shaped stators 1 and the double-guide-rail type rotor 2 is adjusted, and the friction force between the inclined wedge-shaped stators 1 and the double-guide-rail type rotor 2 is further adjusted and controlled; meanwhile, under the excitation of different combined asymmetric electric signals, various driving modes such as an output enhanced type and a motion scram type are realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is comprehensively improved. As shown in fig. 9, the asymmetric-wave electric signal includes: sawtooth wave electric signal, power function wave electric signal, trapezoidal wave electric signal, asymmetric square wave electric signal or any two signal combinations thereof. In this embodiment, the asymmetric electrical signal is a sawtooth electrical signal.
The output enhanced driving method may be embodied as a forward output enhanced type and a reverse output enhanced type. In conjunction with fig. 12 (a), the output-enhanced forward output enhanced driving method is as follows:
according to the invention, two oblique wedge-shaped stators 1 are connected in parallel to serve as a driving source, and two groups of sawtooth wave electric signals with the symmetries of 51% -99% and 1% -49% in (a) are respectively provided, wherein the symmetries are 90% and 10% in the embodiment, the sawtooth wave electric signals with the symmetries of 90% are input into the left oblique wedge-shaped stator 1, and the sawtooth wave electric signals with the symmetries of 10% are input into the right oblique wedge-shaped stator 1, so that the oblique wedge-shaped stator 1 can generate forward output thrust, the output thrust is improved by more than 1 time, the output speed is improved by more than 1 time, and the output efficiency is improved by more than 1 time. The specific movement process is as follows:
the first step is as follows: t is t0At the initial moment, the piezoelectric stacks 1-1 of the two wedge-shaped stators 1 are not powered, the horizontal diamond-shaped structure hinges 1-4 are in a free state, and the movable guide rails 2-3 are in contact with the semicircular driving feet 1-4-5 and are still;
the second step is that: t is t0To t1At the moment, the electric signal with the symmetry of 90% is a sawtooth wave slow rising edge, the left piezoelectric stack 1-1 slowly extends for a certain distance along with the slow increase of the voltage in the time period, as the piezoelectric stack 1-1 is embedded into the horizontal diamond-structured hinge 1-4, the horizontal diamond-structured hinge 1-4 generates main motion in the y direction, the elastic deformation elongation in the y direction is equal to the elongation of the piezoelectric stack 1-1, and the main deformation motion of the horizontal diamond-structured hinge 1-4 in the y direction enables the semicircular driving foot 1-4-5 to be extruded with the movable guide rail 2-3, so that the maximum static friction force between the semicircular driving foot 1-4-5 and the movable guide rail 2-3 is increased, the slippage phenomenon is not easy to generate, and the adhesion phenomenon in the adhesion stage, namely the movable guide rail 2-3 and the semicircular driving foot 1-4-5 are kept relatively static. Because the horizontal rhombic structure hinge 1-4 adopts an inclined wedge-shaped motion conversion beam structure, additional parasitic motion is generated in the positive x direction, the displacement of the semicircular driving feet 1-4-5 is delta x, and the left inclined wedge-shaped stator 1 directly prompts the movable guide rail 2-3 in the positive x direction in the motionProducing a Δ x displacement;
the electrical signal with the symmetry of 10% is a sawtooth wave sharp rising edge, the piezoelectric stack 1-1 on the right side rapidly extends for a certain distance along with the sharp increase of voltage in the time period, because the piezoelectric stack 1-1 is embedded in the horizontal diamond structure hinge 1-4, the horizontal diamond structure hinge 1-4 generates main motion in the y direction, the elastic deformation elongation in the y direction is equal to the elongation of the piezoelectric stack 1-1, the main deformation motion of the horizontal diamond structure hinge 1-4 in the y direction enables the semicircular driving feet 1-4-5 to be extruded with the movable guide rail 2-3, because the horizontal diamond structure hinge 1-4 adopts an inclined wedge-shaped motion conversion beam structure, additional parasitic motion is generated in the x positive direction, the displacement of the semicircular driving feet 1-4-5 is delta x, the acceleration of the semicircular driving feet 1-4-5 is far greater than that of the sliding guide rail, so that the sliding phenomenon in a sliding stage is more easily generated, namely the displacement of the sliding guide rail is far smaller than that of the semicircular driving feet 1-4-5, and the inclined wedge-shaped stator 1 on the right side directly prompts the movable guide rail 2-3 to generate delta l displacement in the x negative direction in the movement, wherein the delta l is less than delta x; the displacement of the final movable guide rail 2-3 in the time period is deltax-deltal;
the third step: t is t1To t2At the moment, an electric signal with 90% symmetry is a sawtooth wave sharp falling edge, the left piezoelectric stack 1-1 in the time period is rapidly shortened by a certain distance along with the rapid voltage falling to return to the initial length, the horizontal diamond-shaped structure hinge 1-4 is not extruded by the piezoelectric stack 1-1 and also returns to the initial shape, the semicircular driving feet 1-4-5 simultaneously perform rapid retraction movement in the x and y directions, the retraction movement of the semicircular driving feet 1-4-5 in the y direction does not extrude the movable guide rail 2-3 any more, the direct positive pressure with the movable guide rail 2-3 is reduced, the slippage phenomenon between the semicircular driving feet 1-4-5 is easier to occur, the interference of the retraction movement of the semicircular driving feet 1-4-5 in the x direction on the movable guide rail 2-3 is reduced, and the slippage phenomenon in the 'sliding' stage is ensured to occur more efficiently, the tiny displacement delta l of the movable guide rail 2-3 in the x negative direction when the movable guide rail is retracted is effectively reduced, and the left inclined wedge-shaped stator 1 directly prompts the movable guide rail 2-3 to generate delta l displacement in the x negative direction during the movement;
the electrical signal with the symmetry of 10% is a sawtooth wave slow falling edge, the right piezoelectric stack 1-1 in the time period is slowly shortened for a certain distance along with the slow voltage falling to return to the initial length, the horizontal diamond-shaped structure hinge 1-4 is not extruded by the piezoelectric stack 1-1 and also returns to the initial shape, the semicircular driving feet 1-4-5 simultaneously generate slow retraction motion in the x and y directions, the semicircular driving feet 1-4-5 and the sliding guide rail have the maximum static friction force, the sliding phenomenon is not easy to generate, the viscous phenomenon in the 'sticky' stage, namely the movable guide rail 2-3 and the semicircular driving feet 1-4-5 are kept relatively static, the displacement amount of the semicircular driving feet 1-4-5 is delta x, and the oblique wedge-shaped stator 1 on the right side directly prompts the movable guide rail 2-3 to generate delta x displacement in the positive direction of x in the movement;
the final displacement of the movable rail 2-3 is Δ s =2 Δ x-2 Δ l, (Δ s > 0);
the fourth step: the process from the second step to the third step is repeated, and the tapered wedge stator 1 continuously moves in a stepping manner in the positive x direction.
As described in conjunction with fig. 12 (b), the output enhanced type inverted output enhanced type driving method is as follows:
according to the invention, two oblique wedge-shaped stators 1 are connected in parallel to be used as a driving source, and two groups of sawtooth wave electric signals with the symmetries of 1% -49% and 51% -99% in (b) are respectively provided, wherein the symmetries are 10% and 90% in the embodiment, the sawtooth wave electric signal with the symmetry of 10% is input into the left oblique wedge-shaped stator 1, and the sawtooth wave electric signal with the symmetry of 90% is input into the right oblique wedge-shaped stator 1. The specific motion process refers to the specific motion process of the positive output enhancement type.
The sport scram type driving method may be embodied as a forward sport scram type and a reverse sport scram type. As described with reference to fig. 12 (c), the forward motion scram type driving method is as follows:
according to the invention, two oblique wedge-shaped stators 1 are connected in parallel to serve as a driving source, two groups of sawtooth wave electric signals with the symmetry of 51% -99%, in the embodiment, the symmetry is 90%, the two groups of sawtooth wave electric signals with the symmetry of 90% are respectively input into the oblique wedge-shaped stators 1 on the left side and the right side, so that the oblique wedge-shaped stator 1 on the left side can generate forward output thrust, the oblique wedge-shaped stator 1 on the right side can generate reverse output thrust, and finally, the accurate emergency stop of the double-guide-rail type rotor 2 in the forward motion process is realized. The specific movement process is as follows:
the first step is as follows: t is t0At the initial moment, the piezoelectric stacks 1-1 of the two wedge-shaped stators 1 are not powered, the horizontal diamond-shaped structure hinges 1-4 are in a free state, and the movable guide rails 2-3 are in contact with the semicircular driving feet 1-4-5 and are still;
the second step is that: t is t0To t1At the moment, two groups of excitation signals are sawtooth wave slow rising edges, two piezoelectric stacks 1-1 in the time period slowly extend for a certain distance along with the slow increase of the voltage, as the piezoelectric stack 1-1 is embedded into the horizontal diamond-structured hinge 1-4, the horizontal diamond-structured hinge 1-4 generates main motion in the y direction, the elastic deformation elongation in the y direction is equal to the elongation of the piezoelectric stack 1-1, and the main deformation motion of the horizontal diamond-structured hinge 1-4 in the y direction enables the semicircular driving foot 1-4-5 to be extruded with the movable guide rail 2-3, so that the maximum static friction force between the semicircular driving foot 1-4-5 and the movable guide rail 2-3 is increased, the slippage phenomenon is not easy to generate, and the adhesion phenomenon in the adhesion stage, namely the movable guide rail 2-3 and the semicircular driving foot 1-4-5 are kept relatively static. And because the horizontal diamond-shaped structure hinge 1-4 adopts an inclined wedge-shaped motion conversion beam structure, additional parasitic motion is generated in the positive direction of x, and the displacement of the semicircular driving foot 1-4-5 is delta x. In the movement, the left side inclined wedge-shaped stator 1 directly prompts the movable guide rail 2-3 to generate delta x displacement in the positive x direction, and the right side inclined wedge-shaped stator 1 directly prompts the movable guide rail 2-3 to generate delta x displacement in the negative x direction; the displacement of the movable guide rail 2-3 in this time period is 0, i.e. the movable guide rail 2-3 remains stationary in this time period;
the third step: t is t1To t2At the moment, two groups of excitation signals are sawtooth wave sharp falling edges, the two piezoelectric stacks 1-1 in the time period are rapidly shortened for a certain distance along with the sharp falling of the voltage and are recovered to the initial length, and the horizontal diamond-shaped structure hinge 1-4 is not extruded by the piezoelectric stacks 1-1 and is also recovered to the initial lengthThe shape is that the semicircular driving feet 1-4-5 can simultaneously generate rapid retraction movement in the x direction and the y direction, at the moment, the retraction movement of the semicircular driving feet 1-4-5 in the y direction does not extrude the movable guide rail 2-3 any more, the direct positive pressure with the movable guide rail 2-3 is reduced, so that the slippage phenomenon can be generated between the semicircular driving feet and the movable guide rail more easily, meanwhile, the interference of the retraction motion of the semicircular driving feet 1-4-5 in the x direction on the movable guide rails 2-3 is reduced, the slippage phenomenon in the 'slipping' stage is ensured to be more efficiently generated, the small displacement delta l in the x direction when the movable guide rails 2-3 are retracted is effectively reduced, in the motion, the left inclined wedge-shaped stator 1 directly prompts the movable guide rails 2-3 to generate delta l displacement in the x negative direction, and the right inclined wedge-shaped stator 1 directly prompts the movable guide rails 2-3 to generate delta l displacement in the x positive direction; the final displacement of the movable guide rail 2-3 is 0, namely the movable guide rail 2-3 is kept still;
the fourth step: and the processes from the second step to the third step are repeatedly and sequentially carried out, and the inclined wedge-shaped stator 1 can realize accurate sudden stop in the positive motion process.
As explained in connection with fig. 12 (d), the reverse motion scram type driving method is as follows:
according to the invention, two oblique wedge-shaped stators 1 are connected in parallel to serve as a driving source, two groups of sawtooth wave electric signals with the symmetry of 1% -49% are arranged in (c), the symmetry is 10% in the embodiment, the two groups of sawtooth wave electric signals with the symmetry of 10% are respectively input into the oblique wedge-shaped stators 1 on the left side and the right side, and similarly, the oblique wedge-shaped stator 1 on the left side can generate reverse output thrust, the oblique wedge-shaped stator 1 on the right side can generate forward output thrust, and finally, the accurate emergency stop in the reverse motion process of the double-guide-rail type rotor 2 is realized. The specific motion process refers to the specific motion process of the positive motion scram type.
In summary, the present invention provides a double-stator fixed precise piezoelectric stick-slip linear motor and a driving method thereof, wherein the double-stator fixed precise piezoelectric stick-slip linear motor adopts an oblique wedge-shaped motion transfer beam structure, such that the oblique wedge-shaped stator generates lateral displacement due to non-uniform axial stiffness distribution, a positive pressure of contact between the oblique wedge-shaped stator and a double-guide-rail type mover is adjusted, and a frictional force between the oblique wedge-shaped stator and the double-guide-rail type mover is comprehensively regulated and controlled; the driving method provided by the invention can realize various driving modes such as output enhancement type and motion scram type, and further remarkably improves the mechanical output characteristic of the piezoelectric stick-slip linear motor. The horizontal rhombic structure hinge and the piezoelectric stack are assembled into the wedge-shaped stator, so that the assembly is simple and the adjustment is easy; the designed loading mechanism can accurately ensure that the tapered wedge-shaped stator is driven along a straight line. The invention has the characteristics of simple structure, strong load capacity, stable motion and the like, and has good application prospect in the micro-nano precision driving and positioning field of optical precision instruments, semiconductor processing and the like.
Claims (8)
1. The utility model provides a fixed accurate piezoelectricity of two stators glues smooth linear motor which characterized in that: the double-stator fixed type precise piezoelectric stick-slip linear motor consists of a tapered wedge-shaped stator (1), a double-guide-rail type rotor (2), a sliding boss (3), a loading device (4) and a base (5); the double-guide-rail type rotor comprises two wedge-shaped stators (1) taking a piezoelectric stack as a driving source, wherein the two wedge-shaped stators are parallelly fixed on a base (5) through corresponding threaded holes at the front end part of the base (5), a double-guide-rail type rotor (2) is installed on a sliding boss (3), the sliding boss (3) is installed on the base (5), and a loading device (4) is installed at the rear end part of the base (5); the wedge-shaped stator (1) comprises a piezoelectric stack (1-1), a square gasket (1-2), a hinge fixing bolt (1-3), a horizontal diamond structure hinge (1-4) and a pre-tightening bolt (1-5); the piezoelectric stack (1-1) is fixed in the horizontal diamond structure hinge (1-4) through the square gasket (1-2) and the pre-tightening bolt (1-5); the hinge fixing bolt (1-3) is fixedly provided with a horizontal diamond structure hinge (1-4); the horizontal diamond structure hinge (1-4) is made of 5025 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy; rigid beams (1-4-1) are arranged on the periphery of the horizontal diamond-structure hinge (1-4), and the rigid beams (1-4-1) are connected end to end in a closed manner to form a main body frame of the horizontal diamond-structure hinge (1-4); the left end and the right end of the horizontal diamond-structure hinge (1-4) are provided with gasket limiting surfaces (1-4-2); the rear end part of the horizontal diamond-shaped structure hinge (1-4) is provided with a fixing bolt mounting hole (1-4-3), and the horizontal diamond-shaped structure hinge (1-4) is fixedly mounted on the base (5) through the threaded connection of the hinge fixing bolt (1-3) and the hinge mounting threaded hole (5-6); the left end and the right end of the horizontal diamond structure hinge (1-4) are provided with pre-tightening bolt mounting threaded holes (1-4-4), and pre-tightening bolts (1-5) are mounted in the pre-tightening bolt mounting threaded holes (1-4-4); the top of the horizontal diamond structure hinge (1-4) is provided with a semicircular driving foot (1-4-5); the front end part of the horizontal diamond structure hinge (1-4) is provided with an inclined wedge-shaped motion conversion beam (1-4-6).
2. The dual-stator fixed precision piezoelectric stick-slip linear motor according to claim 1, wherein: the double-guide-rail type rotor (2) is a double-row crossed roller guide rail; the double-guide-rail type rotor (2) comprises a fixed guide rail (2-1), peripheral device installation threaded holes (2-2), a movable guide rail (2-3), limiting bolts (2-4), guide rail installation holes (2-5), guide rail fixing bolts (2-6) and a roller retainer assembly (2-7); the peripheral device mounting threaded hole (2-2) can be connected with a peripheral device; the roller retainer assemblies (2-7) are respectively contacted with the movable guide rails (2-3) and the fixed guide rails (2-1); the limiting bolts (2-4) are arranged at two ends of the fixed guide rail (2-1) and the movable guide rail (2-3); the guide rail fixing bolt (2-6) is in threaded connection with the guide rail mounting threaded hole (3-1), and the guide rail fixing bolt (2-6) is used for mounting and fixing the guide rail (2-1) on the guide rail mounting plane (3-2) of the sliding boss (3).
3. The dual-stator fixed precision piezoelectric stick-slip linear motor according to claim 1, wherein: the sliding boss (3) comprises a guide rail mounting threaded hole (3-1), a guide rail mounting plane (3-2), a loading device groove (3-3), an upper limiting screw (3-4), a support frame (3-5), an upper spring fixing bolt (3-6) and an upper sliding track (3-7); the guide rail mounting threaded hole (3-1) is in threaded connection with a guide rail fixing bolt (2-6); the guide rail mounting plane (3-2) is used for fixing the double-guide-rail type rotor (2) on the sliding boss (3); the loading device groove (3-3) is in contact with the decoupling ball head (4-2); the upper limiting screws (3-4) are arranged at two ends of the upper sliding track (3-7); the support frame (3-5) is in contact with the sliding boss mounting plane (5-3); the upper spring fixing bolt (3-6) is matched with the lower spring fixing bolt (5-1) to fixedly install the spring (5-2); the upper sliding tracks (3-7) are in contact with spherical sliding guide rails (5-8).
4. The dual-stator fixed precision piezoelectric stick-slip linear motor according to claim 1, wherein: the loading device (4) comprises a manual adjusting screw rod (4-1) and a decoupling ball head (4-2); the external thread of the manual adjusting screw rod (4-1) is in threaded connection fit with the internal thread of the loading device mounting threaded hole (5-12); the decoupling ball head (4-2) is in contact with the loading device groove (3-3).
5. The dual-stator fixed precision piezoelectric stick-slip linear motor according to claim 1, wherein: the base (5) comprises a lower spring fixing bolt (5-1), a spring (5-2), a sliding boss mounting plane (5-3), a hinge limiting boss (5-4), a hinge mounting plane (5-5), a hinge mounting threaded hole (5-6), a lower limiting screw (5-7), a spherical sliding guide rail (5-8), a cushion block (5-9), a base mounting hole (5-10), a lower sliding rail (5-11) and a loading device mounting threaded hole (5-12); the lower spring fixing bolt (5-1) is matched with the upper spring fixing bolt (3-6) to fixedly install the spring (5-2); the sliding boss mounting plane (5-3) is contacted with the support frame (3-5); the hinge limiting boss (5-4) limits the installation position of the inclined wedge-shaped stator (1); the hinge mounting plane (5-5) and the hinge mounting threaded hole (5-6) are used for fixing the wedge-shaped stator (1); the lower limiting screws (5-7) are arranged at two ends of the lower sliding track (5-11); the spherical sliding guide rail (5-8) moves in a sliding rail formed by the upper sliding rail (3-7) and the lower sliding rail (5-11); the pads (5-9) can be in contact with other peripheral devices; the base mounting holes (5-10) can be fixedly mounted with other peripheral devices; the lower sliding track (5-11) is in contact with the spherical sliding guide rail (5-8); the loading device mounting threaded holes (5-12) are in threaded connection with the loading device (4).
6. The dual-stator fixed precision piezoelectric stick-slip linear motor according to claim 1, wherein: the width of the gasket limiting surface (1-4-2) is B, the width of the square gasket (1-2) is C, and the thickness of the square gasket is B, wherein the value range of B is 1-2.5 mm, and B = (C + 1) mm; the thickness of the semicircular driving foot (1-4-5) is N, the radius of the semicircular driving foot is Q, the value range of N is 6-9 mm, the value range of Q is 1.5-2.5 mm, and the end face of the semicircular driving foot (1-4-5) is correspondingly coated with a ceramic or glass fiber friction material.
7. A driving method applied to the double-stator fixed precision piezoelectric stick-slip linear motor of claim 1, characterized in that: the driving method is mainly characterized in that under the excitation of asymmetric electric signals, if two groups of symmetry are simultaneously D1Respectively input into two wedge-shaped stators (1), wherein the symmetry D1The value range of (2) is 51-99%, and the forward output thrust of the double-guide-rail type rotor (2) can be obviously increased; if two groups of symmetry are simultaneously defined as D2Respectively input into two wedge-shaped stators (1), wherein the symmetry D2The value range of the double-guide-rail rotor is 1-49%, and the reverse output thrust of the double-guide-rail rotor (2) can be obviously increased; if a set of symmetries is D at the same time1And the other group has symmetry of D2The electric signals are respectively input into the two wedge-shaped stators (1), and the accurate emergency stop of the double-guide-rail type rotor (2) in the motion process can be realized.
8. The driving method of a double-stator fixed precision piezoelectric stick-slip linear motor according to claim 7, wherein: the asymmetric electric signal comprises a sawtooth wave electric signal, a power function wave electric signal, a trapezoidal wave electric signal, an asymmetric square wave electric signal or a combination of any two signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN108923682B (en) * | 2018-08-08 | 2019-09-27 | 苏州大学 | A kind of driving of stick-slip is across the big stroke motion platform of scale |
| CN108923683B (en) * | 2018-08-13 | 2019-09-27 | 苏州大学 | A kind of across the scale precision movement platform of miniature stick-slip driving |
| CN109217724B (en) * | 2018-09-19 | 2020-01-14 | 宁波大学 | Full displacement amplification type piezoelectric inchworm linear platform |
| CN109818527B (en) * | 2019-04-02 | 2023-10-20 | 吉林大学 | Isosceles trapezoid stick-slip piezoelectric linear driver |
| CN112468013A (en) * | 2020-11-18 | 2021-03-09 | 哈尔滨工程大学 | Double-diamond topological structure non-resonant inchworm type piezoelectric driver |
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| CN204190647U (en) * | 2014-10-13 | 2015-03-04 | 吉林大学 | Tandem Three Degree Of Freedom Precision Piezoelectric based on stick-slip inertia drives platform |
| CN105897043A (en) * | 2016-06-06 | 2016-08-24 | 长春工业大学 | Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof |
| CN105897044A (en) * | 2016-06-06 | 2016-08-24 | 长春工业大学 | Wedge type diamond-shaped amplification mechanism piezoelectric stick-slip linear motor and excitation method thereof |
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