CN109217724B - Full displacement amplification type piezoelectric inchworm linear platform - Google Patents
Full displacement amplification type piezoelectric inchworm linear platform Download PDFInfo
- Publication number
- CN109217724B CN109217724B CN201811095424.5A CN201811095424A CN109217724B CN 109217724 B CN109217724 B CN 109217724B CN 201811095424 A CN201811095424 A CN 201811095424A CN 109217724 B CN109217724 B CN 109217724B
- Authority
- CN
- China
- Prior art keywords
- clamping
- frame body
- rigid block
- driving
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003321 amplification Effects 0.000 title claims abstract description 54
- 238000003199 nucleic acid amplification method Methods 0.000 title claims abstract description 54
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 30
- 241000256247 Spodoptera exigua Species 0.000 title claims abstract description 25
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 230000008602 contraction Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 230000009193 crawling Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a full-displacement amplification type piezoelectric inchworm linear platform, wherein a fixed platform is provided with a slideway, a rotor is arranged in the slideway, the rotor comprises a first frame body and a second frame body which are arranged at intervals along the length direction of the slideway, the first frame body is fixedly arranged on a movable table surface, and the first frame body and the second frame body are respectively connected with a first driving unit and a second driving unit; a bridge part is connected between the first driving unit and the second driving unit; the fixed platform is provided with a first clamping group clamped on the first frame body and a second clamping group clamped on the second frame body, and the first clamping group and the second clamping group are respectively arranged in a telescopic manner along the width direction of the slide way; the rotor and the movable table top walk and are positioned in an inchworm mode along the slide way through sequential control of the first clamping group, the first driving unit, the second clamping group and the second driving unit. The invention has compact structure, large movable table surface, low requirements on the processing and assembling precision of the clamping unit and the driving mechanism, full clamping and releasing, clamping by power failure, high movement speed and small movement error.
Description
Technical Field
The invention belongs to the technical field of nano positioning, relates to a large-stroke and high-resolution nano positioning platform, and particularly relates to a full-displacement amplification type piezoelectric inchworm linear platform.
Background
The piezoelectric inchworm linear platform is a large-stroke and high-resolution precise positioning platform. The method is based on an inchworm crawling principle in bionics, and tiny displacements of a piezoelectric actuator are accumulated continuously to form continuous large-stroke displacements. Compared with an electromagnetic linear motor type platform, the piezoelectric inchworm linear platform has the advantages of small volume, no heating, easy control, no end effect, no thrust fluctuation and the like; compared with the constant-voltage linear platform in an ultrasonic resonance mode and an inertia driving mode, the constant-voltage linear platform has the advantages of large output force, large power density, stable positioning, no friction and abrasion and the like. Therefore, the piezoelectric inchworm linear platform has more advantages in the fields of large stroke, high resolution and precise positioning. However, the current piezoelectric inchworm linear platform has the following defects:
1) the structure is not compact, the movable table top is small, the clamping displacement or the releasing displacement of the clamping unit is the output displacement of the piezoelectric actuator, the output displacement of the piezoelectric actuator is small, and the clamping unit and the driving unit are required to have very high processing and assembling precision in order to enable the clamping unit to be reliably clamped and released;
2) the output displacement of the clamping unit is small, so that the clamping unit cannot clamp or release the rotor fully, the rotor cannot clamp fully, the clamping force applied to the rotor is small, and the motion stability is reduced; the rotor can not be fully released, so that serious friction and abrasion can be generated, and the service life of the platform is shortened;
3) the platform can not be self-locked (namely, clamping can not be powered off), namely, when the platform does not work, the rotor can not be clamped by the clamping unit;
4) the single-step displacement of the driving unit is the output displacement of the piezoelectric actuator, which is often very small, so that the moving speed of the platform is low;
5) the clamping unit and the driving unit are arranged on the platform, the clamping unit is arranged on the platform, the driving unit is arranged on the platform, the clamping unit is arranged on the platform, and the clamping unit is arranged on the platform.
Disclosure of Invention
The invention aims to solve the technical problem of providing a full-displacement amplification type piezoelectric inchworm linear platform which has the advantages of compact structure, large movable table surface, low requirements on machining and assembling precision of a clamping unit and a driving unit, full clamping and releasing, clamping with outage, high movement speed and small movement error.
The technical scheme adopted by the invention for solving the technical problems is as follows: a full-displacement amplification type piezoelectric inchworm linear platform comprises a fixed platform and a movable platform surface which is connected with the fixed platform in a sliding mode through crossed roller guide rails, wherein the fixed platform is provided with a slide way, a rotor is arranged in the slide way, the rotor comprises a first frame body and a second frame body which are arranged along the length direction of the slide way, a movable gap is arranged between the first frame body and the second frame body, the first frame body is fixedly arranged on the movable platform surface, and the first frame body and the second frame body are respectively connected with a first driving unit and a second driving unit which stretch along the length direction of the slide way; a bridge part is connected between the first driving unit and the second driving unit; the fixed platform is provided with a first clamping group clamped on the first frame body and a second clamping group clamped on the second frame body, and the first clamping group and the second clamping group are respectively arranged in a telescopic manner along the width direction of the slide way; the rotor and the movable table top walk and are positioned in an inchworm mode along the slide way through sequential control of the first clamping group, the first driving unit, the second clamping group and the second driving unit.
In order to optimize the technical scheme, the adopted measures further comprise:
the first clamping group and the second clamping group respectively comprise clamping units arranged adjacent to each other in a mirror image manner, each clamping unit comprises a clamping bridge type amplification unit and a piezoelectric actuator for releasing, the telescopic direction of the piezoelectric actuator for releasing is consistent with the length direction of the slide way, and the telescopic end of the piezoelectric actuator for releasing is supported in the clamping bridge type amplification unit; one side of the clamping bridge type amplification unit is connected to the fixed platform, and the other side of the clamping bridge type amplification unit is positioned on the rotor;
the first driving unit and the second driving unit are mirror structures and respectively comprise a driving bridge type amplifying unit and a driving piezoelectric actuator, the telescopic direction of the driving piezoelectric actuator is perpendicular to the length direction of the slideway, and the telescopic end of the driving piezoelectric actuator is supported in the driving bridge type amplifying unit; the driving bridge type amplification units in the first driving unit are respectively connected to the first frame body and the bridging part, and the driving bridge type amplification units in the second driving unit are respectively connected to the second frame body and the bridging part.
The clamping bridge type amplifying unit comprises a first rigid block and a second rigid block which are oppositely arranged at the telescopic end of the piezoelectric actuator for releasing, and a third rigid block and a fourth rigid block which are arranged at two sides of the piezoelectric actuator for releasing; the clamping flexible thin plate is sequentially connected among the first rigid block, the third rigid block, the second rigid block and the fourth rigid block; each clamping flexible thin plate is arranged around the piezoelectric actuator for releasing in a rhombic shape; the first rigid block is provided with a first screw used for fixing the piezoelectric actuator for releasing, and the third rigid block is connected to the fixed platform;
the driving bridge type amplifying unit comprises a fifth rigid block and a sixth rigid block which are oppositely arranged at the telescopic end of the piezoelectric actuator for driving, and a seventh rigid block and an eighth rigid block which are arranged at two sides of the piezoelectric actuator for driving; the driving flexible thin plates are sequentially connected among the fifth rigid block, the seventh rigid block, the sixth rigid block and the eighth rigid block, and are arranged around the piezoelectric actuator for driving in a rhombic shape; the fifth rigid block is provided with a second screw used for fixing the piezoelectric actuator for releasing, a seventh rigid block in the first driving unit is connected to the first frame body, a seventh rigid block in the second driving unit is connected to the second frame body, and an eighth rigid block is connected to the bridging part.
A first through groove for arranging a first clamping group and a second clamping group is formed in the edge of the slide way, and a second through groove for arranging a first driving unit, a bridging part and a second driving unit is formed in the rotor; the first frame body, the second frame body, the driving bridge type amplification unit and the bridging part are of an integrated structure.
And a first flexible hinge, a connecting rod and a second flexible hinge which are integrally formed are sequentially connected between the bridging part and the first frame body and between the bridging part and the second frame body respectively.
The first flexible hinge, the connecting rod and the second flexible hinge are all perpendicular to the slide way.
The crossed roller guide rail comprises a movable guide rail and a fixed guide rail, and the movable table top is provided with a first convex strip which is matched with the upper end surface of the movable guide rail; the fixed platform is provided with a mounting groove for placing the crossed roller guide rail, a second raised line matched with the lower end surface of the fixed guide rail at the top is arranged in the mounting groove, and the side wall of the mounting groove is provided with a side hole for conveniently placing a guide rail pre-tightening screw; the lower end of the movable guide rail is provided with a third screw for fixing the movable guide rail on the movable table board in a rotating manner, the upper end of the fixed guide rail is provided with a fourth screw for fixing the fixed guide rail on the fixed platform in a rotating manner, and the movable table board is provided with a through hole for conveniently adjusting the fourth screw.
The fixed platform and the clamping bridge type amplifying unit are of an integrated structure.
Compared with the prior art, the fixed platform of the full-displacement amplification type piezoelectric inchworm linear platform is provided with the slide way, the slide way is internally provided with the rotor, the rotor comprises a first frame body and a second frame body which are arranged at intervals along the length direction of the slide way, the first frame body is fixedly arranged on the movable table surface, and the first frame body and the second frame body are respectively connected with a first driving unit and a second driving unit; a bridge part is connected between the first driving unit and the second driving unit; the fixed platform is provided with a first clamping group clamped in the first frame body and a second clamping group clamped in the second frame body, and the first clamping group and the second clamping group are respectively arranged in a telescopic manner along the width direction of the slide way; the rotor and the movable table top walk and are positioned in an inchworm mode along the slide way through sequential control of the first clamping group, the first driving unit, the second clamping group and the second driving unit. The invention has the advantages that:
1) the structure is compact, and the movable table top is large;
2) the clamping unit is a bridge type amplifying mechanism and can amplify the output displacement of the piezoelectric actuator in the clamping unit by more than 3, so that the clamping unit can fully clamp and release the rotor, and the requirements on the machining and assembling precision of the clamping unit and the driving unit can be further reduced;
3) because the output displacement of the clamping unit is increased, on one hand, the clamping force applied to the mover when the mover is clamped by the clamping unit is increased, and the motion stability of the mover is improved; on the other hand, when the clamping unit releases the rotor, the rotor can be completely loosened, friction and abrasion cannot be generated between the clamping unit and the rotor, and the service life of the platform can be prolonged;
4) when the platform does not work, the piezoelectric actuator for releasing is not electrified, and the rotor is clamped by the clamping unit and cannot move, so that the self-locking of the platform is realized;
5) the driving unit is also a bridge type amplifying unit, and can amplify the output displacement of the piezoelectric actuator therein by more than 3 times, so that the single-step displacement of the driving unit is increased, and the movement speed of the platform is further increased;
6) the cross roller guide rails are adopted to guide the motion of the movable table top, so that the horizontal swing error and the longitudinal pitching error of the platform can be effectively reduced, and the positioning precision of the platform can be improved.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is an exploded schematic view of FIG. 1;
FIG. 3 is a schematic bottom view of FIG. 2;
FIG. 4 is a schematic structural diagram of the fixed platform of FIG. 2;
FIG. 5 is a schematic diagram of the clamping bridge amplifying unit in FIG. 4;
FIG. 6 is a schematic structural diagram of the movable table top and the movable cell after being connected;
fig. 7 is a schematic structural view of the mover in fig. 2;
FIG. 8 is a schematic diagram of the driving bridge amplifying unit of FIG. 7;
FIG. 9 is a schematic structural view of the cross roller guide of FIG. 2;
FIG. 10 is a schematic view of a mover in a slide;
FIG. 11 is a voltage timing diagram of the present invention.
Wherein the reference numerals are: 1 fixed platform, 1a slide way, 1b first through groove, 1c mounting groove, 1d second protruding strip, 1e side hole, 12 first clamping group, 13 second clamping group, 2 movable table surface, 2a through hole, 2b first protruding strip, 3 mover, 3a movable gap, 3b second through groove, 31 first frame, 32 second frame, 4 crossed roller guide rail, 41 fixed guide rail, 41a fourth screw, 42 movable guide rail, 42a third screw, 5 first driving unit, 51 driving piezoelectric actuator, 52 driving bridge type amplification unit, 52a fifth rigid block, 52b sixth rigid block, 52c seventh rigid block, 52d eighth rigid block, 52e driving flexible thin plate, 52f second screw, 6 second driving unit, 7 clamping unit, 71 releasing piezoelectric actuator, 72 clamping bridge type amplification unit, 72a first rigid block, 72b second rigid block, 72c third rigid block, 72d fourth rigid block, 72e clamp flexible sheet, 72f first screw, 8 bridge, 81 first flexible hinge, 82 link, 83 second flexible hinge.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings.
Fig. 1 to 10 are schematic structural diagrams of the present invention, and as shown in the drawings, the present invention provides a full displacement amplification type piezoelectric inchworm linear platform, which includes a fixed platform 1 and a movable platform surface 2 slidably connected through a cross roller guide rail 4, the fixed platform 1 is provided with a slide way 1a, a mover 3 is arranged in the slide way 1a, the mover 3 includes a first frame 31 and a second frame 32 arranged along the length direction of the slide way 1a, a movable gap 3a is arranged between the first frame 31 and the second frame 32, the first frame 31 is fixedly arranged on the movable platform surface 2, and the first frame 31 and the second frame 32 are respectively connected with a first driving unit 5 and a second driving unit 6 which are telescopic along the length direction of the slide way 1 a; a bridge part 8 is drawn between the first driving unit 5 and the second driving unit 6; the fixed platform 1 is provided with a first clamping group 12 clamped on the first frame 31 and a second clamping group 13 clamped on the second frame 32, and the first clamping group 12 and the second clamping group 13 are respectively arranged in a telescopic manner along the width direction of the slideway 1 a; the mover 3 and the movable table top 2 are made to walk and position inchworm along the slide way 1a by the timing control of the first clamping group 12, the first driving unit 5, the second clamping group 13 and the second driving unit 6. The first clamping group 12, the first drive unit 5, the second clamping group 13 and the second drive unit 6 are linear motors of any type.
As shown in fig. 4 and 10, the first clamping group 12 and the second clamping group 13 respectively include clamping units 7 arranged adjacent to each other in a mirror image manner, each clamping unit 7 includes a clamping bridge type amplification unit 72 and a piezoelectric actuator 71 for releasing, the expansion and contraction direction of the piezoelectric actuator 71 for releasing is consistent with the length direction of the slideway 1a, and the expansion and contraction end of the piezoelectric actuator 71 for releasing is arranged in the clamping bridge type amplification unit 72 in a propping manner; one side of the clamping bridge type amplification unit 72 is connected to the fixed platform 1, and the other side of the clamping bridge type amplification unit is positioned on the rotor 3; the energized release piezoelectric actuator 71 is extended, and then the clamp bridge amplification unit 72 is deformed and contracted to release the mover 3, whereas when the release piezoelectric actuator 71 is de-energized, the clamp bridge amplification unit 72 is restored in shape to clamp the mover 3.
As shown in fig. 7 and 10, the first driving unit 5 and the second driving unit 6 are mirror images, and each of the first driving unit 5 and the second driving unit 6 includes a driving bridge type amplifying unit 52 and a driving piezoelectric actuator 51, wherein the extension and contraction direction of the driving piezoelectric actuator 51 is perpendicular to the length direction of the slideway 1a, and the extension and contraction end of the driving piezoelectric actuator 51 is arranged in the driving bridge type amplifying unit 52; the driving bridge amplification units 52 in the first driving unit 5 are connected to the first frame 31 and the bridge portion 8, respectively, and the driving bridge amplification units 52 in the second driving unit 6 are connected to the second frame 32 and the bridge portion 8, respectively. The piezoelectric actuator 51 for driving with a voltage applied thereto is extended, and then the bridge-type amplifier 52 is deformed and contracted, and the corresponding bridge portions 8 are pulled, and the first clamping groups 12 of the first frame 31 are brought close to each other; conversely, when the driving piezoelectric actuator 51 is de-energized, the bridge amplification unit 52 is driven to restore its shape, pushing the corresponding bridge portions 8, and then pushing the first clamping groups 12 of the first frame 31 away from each other.
As shown in fig. 4 and 5, the clamping bridge type amplifying unit 72 includes a first rigid block 72a and a second rigid block 72b provided opposite to the telescopic end of the piezoelectric actuator 71 for release, and a third rigid block 72c and a fourth rigid block 72d provided on both sides of the piezoelectric actuator 71 for release; and a clamp flexible thin plate 72e connected in sequence among the first rigid block 72a, the third rigid block 72c, the second rigid block 72b, and the fourth rigid block 72 d; each clamping flexible thin plate 72e is arranged around the piezoelectric actuator 71 for releasing in a rhombic shape; the first rigid block 72a is provided with a first screw 72f for fixing the piezoelectric actuator 71 for release, and the third rigid block 72c is connected to the fixed platform 1;
as shown in fig. 7 and 8, the driving bridge amplifying unit 52 includes a fifth rigid block 52a and a sixth rigid block 52b provided opposite to the telescopic ends of the driving piezoelectric actuator 51, and a seventh rigid block 52c and an eighth rigid block 52d provided on both sides of the driving piezoelectric actuator 51; and a driving flexible thin plate 52e sequentially connected among the fifth rigid block 52a, the seventh rigid block 52c, the sixth rigid block 52b and the eighth rigid block 52d, each driving flexible thin plate 52e being surrounded around the driving piezoelectric actuator 51 in a rhombic shape; the fifth rigid block 52a is provided with a second screw 52f for fixing the release piezoelectric actuator 71, the seventh rigid block 52c in the first drive unit 5 is connected to the first frame 31, the seventh rigid block 52c in the second drive unit 6 is connected to the second frame 32, and the eighth rigid block 52d is connected to the bridge portion 8.
As shown in fig. 4, the edge of the slide way 1a is provided with a first through groove 1b for arranging the first clamping group 12 and the second clamping group 13, and the mover 3 is provided with a second through groove 3b for arranging the first driving unit 5, the bridge portion 8 and the second driving unit 6; the first frame 31, the second frame 32, the driving bridge amplification unit 52, and the bridge portion 8 are integrally formed.
As shown in fig. 7, the first flexible hinge 81, the link 82, and the second flexible hinge 83, which are integrally formed, are connected in order between the bridge portion 8 and the first frame 31 and between the bridge portion and the second frame 32.
The first flexible hinge 81, the connecting rod 82 and the second flexible hinge 83 are perpendicular to the slideway 1 a.
As shown in fig. 9, the cross roller guide 4 includes a movable guide rail 42 and a fixed guide rail 41, and as shown in fig. 4, the movable table 2 is provided with a first convex strip 2b which is matched with the upper end surface of the movable guide rail 42; as shown in fig. 3, the fixed platform 1 is provided with an installation groove 1c for placing the crossed roller guide rail 4, as shown in fig. 4, a second raised strip 1d which is matched with the lower end surface of the fixed guide rail 41 is arranged in the installation groove 1c, as shown in fig. 1, 2 and 3, the side wall of the installation groove 1c is provided with a side hole 1e for conveniently placing a guide rail pretension screw; as shown in fig. 2 and 3, the lower end of the movable guide rail 42 is rotatably provided with a third screw 42a for fixing the movable guide rail 42 to the movable table top 2, the upper end of the fixed guide rail 41 is rotatably provided with a fourth screw 41a for fixing the fixed guide rail 41 to the fixed table top 1, and the movable table top 2 is provided with a through hole 2a for conveniently adjusting the fourth screw 41 a.
The fixed platform 1 and the clamping bridge type amplifying unit 72 are integrally formed.
When the first clamping group 12, the second driving unit 6, and the second clamping group 13 are respectively applied with the voltages u (t) in the timings shown in fig. 11(a), (b), and (c), the moving table 2 moves along the direction from the first frame 31 to the second frame 32, and the moving table 2 moves along the direction from the first frame 31 to the second frame 32 in one movement cycle by one step is realized as follows:
1) as shown in fig. 11(a), the piezoelectric actuator 71 for release in the first clamping group 12 is energized, the clamping bridge type amplification unit 72 in the first clamping group 12 is deformed, and the first clamping group 12 releases the first frame 31 in the mover 3;
2) when the piezoelectric actuator 71 for release in the first clamping group 12 is energized to reach a steady state (e.g., at time t 1), as shown in fig. 11(b), the piezoelectric actuator 51 for driving in the second driving unit 6 is energized, the bridge-type amplification unit 52 in the second driving unit 6 is deformed, the first frame 31 in the mover 3 is driven by the bridge portion 8 to move one step in a direction approaching the second frame 32 in the mover 3, and the movable table 2 is driven by the first frame 31 to move one step in a direction approaching the second frame 32;
3) when the piezoelectric actuator 51 for driving in the second drive unit 6 is energized to reach a steady state (e.g., at time t 2), as shown in fig. 11(a), the piezoelectric actuator 71 for release in the first clamping group 12 is deenergized, the deformation of the clamping bridge type amplification unit 72 in the first clamping group 12 is restored, and the first clamping group 12 clamps the first frame body 31 in the mover 3;
4) when the piezoelectric actuator 71 for release in the first clamping group 12 is deenergized to reach a steady state (e.g., at time t 3), as shown in fig. 11(c), the piezoelectric actuator 71 for release in the second clamping group 13 is energized, the clamping bridge type amplification unit 72 in the second clamping group 13 is deformed, and the second clamping group 13 opens the second frame body 32 in the mover 3;
5) when the piezoelectric actuator 71 for release in the second clamping group 13 is energized to reach a steady state (e.g., at time t 4), as shown in fig. 11(b), the piezoelectric actuator 51 for driving in the second driving unit 6 is de-energized, the driving bridge amplification unit 52 in the second driving unit 6 is deformed and restored, and the second frame 32 in the mover 3 is driven to move one step in a direction away from the first frame 31 in the mover 3;
6) when the piezoelectric actuator 51 for driving in the second drive unit 6 is deenergized to reach the steady state (e.g., at time t 5), as shown in fig. 11(c), the piezoelectric actuator 71 for release in the second clamping group 13 is deenergized, the deformation of the clamping bridge type amplification unit 72 in the second clamping group 13 is restored, and the second clamping group 13 clamps the second frame body 32 in the mover 3;
when the piezoelectric actuator 71 for release in the second clamping group 13 is de-energized and reaches a steady state (e.g., time T6), the next movement period T is started, and so on, the movable table 2 continuously outputs a linear displacement in the direction from the first frame 31 to the second frame 32.
When the second clamping group 13, the first driving unit 5, and the first clamping group 12 are respectively applied with the voltages u (t) in the timings shown in fig. 11(a), (b), and (c), the moving table 2 moves along the direction from the second frame 32 to the first frame 31, and the moving table 2 moves along the direction from the second frame 32 to the first frame 31 in one movement cycle by one step is realized as follows:
1) as shown in fig. 11(a), the piezoelectric actuator 71 for release in the second clamping group 13 is energized, the clamping bridge type amplification unit 72 in the second clamping group 13 is deformed, and the second clamping group 13 releases the second frame 32 in the mover 3;
2) when the piezoelectric actuator 71 for release in the second clamping group 13 is energized to reach a steady state (e.g., at time t 1), as shown in fig. 11(b), the piezoelectric actuator 51 for driving in the first driving unit 5 is energized, the driving bridge amplification unit 52 in the first driving unit 5 is deformed, and the second frame 32 in the mover 3 is driven by the bridge portion 8 to move one step in a direction approaching the first frame 31 in the mover 3;
3) when the piezoelectric actuator 51 for driving in the first driving unit 5 is energized to reach a steady state (e.g., at time t 2), as shown in fig. 11(a), the piezoelectric actuator 71 for release in the second clamping group 13 is de-energized, the clamping bridge type amplifying unit 72 in the second clamping group 13 is restored, and the second clamping group 13 clamps the second frame body 32 in the mover 3;
4) when the piezoelectric actuator 71 for release in the second clamping group 13 is deenergized to reach a steady state (e.g., at time t 3), as shown in fig. 11(c), the piezoelectric actuator 71 for release in the first clamping group 12 is energized, the clamping bridge type amplification unit 72 in the first clamping group 12 is deformed, and the first clamping group 12 opens the first frame body 31 in the mover 3;
5) when the piezoelectric actuator 71 for release in the first clamping group 12 is energized to reach a steady state (e.g., at time t 4), as shown in fig. 11(b), the piezoelectric actuator 51 for driving in the first driving unit 5 is de-energized, the bridge-type amplification unit 52 in the first driving unit 5 is restored, the first frame 31 in the mover 3 is driven to move one step in a direction away from the second frame 32 in the mover 3, and the movable table 2 is driven by the first frame 31 to move one step in a direction away from the second frame 32;
6) when the piezoelectric actuator 51 for driving in the first drive unit 5 is deenergized to reach the steady state (e.g., at time t 5), as shown in fig. 11(c), the piezoelectric actuator 71 for release in the first clamping group 12 is deenergized, the clamping bridge type amplification unit 72 in the first clamping group 12 is restored, and the first clamping group 12 clamps the first frame body 31 in the mover 3;
when the piezoelectric actuator 71 for release in the first clamping group 12 is de-energized and reaches a steady state (e.g., time T6), the next movement period T is started, and so on, the movable table 2 continuously outputs a linear displacement in the direction from the second frame 32 to the first frame 31.
While the preferred embodiments of the present invention have been illustrated, various changes and modifications may be made by one skilled in the art without departing from the scope of the invention.
Claims (7)
1. The utility model provides a full displacement amplification formula piezoelectricity inchworm linear platform, includes fixed platform (1) and moves mesa (2) through cross roller guide rail (4) sliding connection, characterized by: the movable platform is characterized in that the fixed platform (1) is provided with a slide way (1a), a rotor (3) is arranged in the slide way (1a), the rotor (3) comprises a first frame body (31) and a second frame body (32) which are arranged along the length direction of the slide way (1a), a movable gap (3a) is arranged between the first frame body (31) and the second frame body (32), the first frame body (31) is fixedly arranged on the movable table top (2), and the first frame body (31) and the second frame body (32) are respectively connected with a first driving unit (5) and a second driving unit (6) which stretch along the length direction of the slide way (1 a); a bridge part (8) is connected between the first driving unit (5) and the second driving unit (6); the fixed platform (1) is provided with a first clamping group (12) clamped on the first frame body (31) and a second clamping group (13) clamped on the second frame body (32), and the first clamping group (12) and the second clamping group (13) are respectively arranged in a telescopic manner along the width direction of the slide way (1 a); the rotor (3) and the movable table top (2) walk and position in an inchworm manner along the slideway (1a) by controlling the time sequence of the first clamping group (12), the first driving unit (5), the second clamping group (13) and the second driving unit (6); the first clamping group (12) and the second clamping group (13) respectively comprise clamping units (7) which are arranged adjacently in a mirror image mode, each clamping unit (7) comprises a clamping bridge type amplification unit (72) and a piezoelectric actuator (71) for releasing, the expansion direction of the piezoelectric actuator (71) for releasing is consistent with the length direction of the slide way (1a), and the expansion end of the piezoelectric actuator (71) for releasing is in top fit with the clamping bridge type amplification unit (72); one side of the clamping bridge type amplification unit (72) is connected to the fixed platform (1), and the other side of the clamping bridge type amplification unit is clamped on the rotor (3);
the first driving unit (5) and the second driving unit (6) are mirror-image structures and respectively comprise a driving bridge type amplification unit (52) and a driving piezoelectric actuator (51), the telescopic direction of the driving piezoelectric actuator (51) is perpendicular to the length direction of the slideway (1a), and the telescopic end of the driving piezoelectric actuator (51) is in top fit in the driving bridge type amplification unit (52); the driving bridge type amplification units (52) in the first driving unit (5) are respectively connected with the first frame body (31) and the bridge part (8), and the driving bridge type amplification units (52) in the second driving unit (6) are respectively connected with the second frame body (32) and the bridge part (8).
2. The full displacement amplification type piezoelectric inchworm linear platform according to claim 1, which is characterized in that: the clamping bridge type amplifying unit (72) comprises a first rigid block (72a) and a second rigid block (72b) which are oppositely arranged at the telescopic end of the piezoelectric actuator (71) for releasing, and a third rigid block (72c) and a fourth rigid block (72d) which are arranged at the two sides of the piezoelectric actuator (71) for releasing; and a clamping flexible thin plate (72e) connected among the first rigid block (72a), the third rigid block (72c), the second rigid block (72b) and the fourth rigid block (72d) in sequence; each clamping flexible thin plate (72e) is arranged around the piezoelectric actuator (71) for releasing in a diamond shape; the first rigid block (72a) is provided with a first screw (72f) for fixing a piezoelectric actuator (71) for releasing, and the third rigid block (72c) is connected to the fixed platform (1);
the driving bridge type amplifying unit (52) comprises a fifth rigid block (52a) and a sixth rigid block (52b) which are oppositely arranged at the telescopic end of the driving piezoelectric actuator (51), and a seventh rigid block (52c) and an eighth rigid block (52d) which are arranged at the two sides of the driving piezoelectric actuator (51); and drive flexible thin plates (52e) connected in sequence among the fifth rigid block (52a), the seventh rigid block (52c), the sixth rigid block (52b) and the eighth rigid block (52d), wherein each drive flexible thin plate (52e) is arranged around the drive piezoelectric actuator (51) in a rhombic shape; the fifth rigid block (52a) is provided with a second screw (52f) for fixing the piezoelectric actuator (71) for releasing, a seventh rigid block (52c) in the first driving unit (5) is connected with the first frame body (31), a seventh rigid block (52c) in the second driving unit (6) is connected with the second frame body (32), and an eighth rigid block (52d) is connected with the bridging part (8).
3. The full displacement amplification type piezoelectric inchworm linear platform according to claim 2, which is characterized in that: a first through groove (1b) for arranging a first clamping group (12) and a second clamping group (13) is formed in the edge of the slide way (1a), and a second through groove (3b) for arranging a first driving unit (5), a bridging part (8) and a second driving unit (6) is formed in the rotor (3); the first frame body (31), the second frame body (32), the driving bridge type amplification unit (52) and the bridge part (8) are of an integrated structure.
4. The full displacement amplification type piezoelectric inchworm linear platform according to claim 3, which is characterized in that: a first flexible hinge (81), a connecting rod (82) and a second flexible hinge (83) which are integrally formed are sequentially connected between the bridging part (8) and the first frame body (31) and between the bridging part and the second frame body (32).
5. The full displacement amplification type piezoelectric inchworm linear platform according to claim 4, which is characterized in that: the first flexible hinge (81), the connecting rod (82) and the second flexible hinge (83) are all perpendicular to the slideway (1 a).
6. The full displacement amplification type piezoelectric inchworm linear platform according to claim 2, which is characterized in that: the crossed roller guide rail (4) comprises a movable guide rail (42) and a fixed guide rail (41), and the movable table top (2) is provided with a first convex strip (2b) which is matched with the upper end surface of the movable guide rail (42); the fixed platform (1) is provided with a mounting groove (1c) for placing the crossed roller guide rail (4), a second raised strip (1d) which is matched with the lower end surface of the fixed guide rail (41) in a propping manner is arranged in the mounting groove (1c), and the side wall of the mounting groove (1c) is provided with a side hole (1e) for conveniently placing a guide rail pre-tightening screw; move the lower extreme of guide rail (42) and be equipped with soon and be fixed in third screw (42a) that move mesa (2) guide rail (42), the upper end of deciding guide rail (41) be equipped with soon and decide guide rail (41) and be fixed in fourth screw (41a) of deciding platform (1), move mesa (2) be equipped with through-hole (2a) of conveniently adjusting fourth screw (41 a).
7. The full displacement amplification type piezoelectric inchworm linear platform according to claim 6, which is characterized in that: the fixed platform (1) and the clamping bridge type amplifying unit (72) are of an integrated structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811095424.5A CN109217724B (en) | 2018-09-19 | 2018-09-19 | Full displacement amplification type piezoelectric inchworm linear platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811095424.5A CN109217724B (en) | 2018-09-19 | 2018-09-19 | Full displacement amplification type piezoelectric inchworm linear platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109217724A CN109217724A (en) | 2019-01-15 |
| CN109217724B true CN109217724B (en) | 2020-01-14 |
Family
ID=64985141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811095424.5A Active CN109217724B (en) | 2018-09-19 | 2018-09-19 | Full displacement amplification type piezoelectric inchworm linear platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109217724B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110011564B (en) * | 2019-05-05 | 2023-10-03 | 中国人民解放军陆军工程大学 | Clamp type giant magnetostrictive linear driving device |
| CN111327228B (en) * | 2020-04-08 | 2024-07-16 | 宁波奥克斯电气股份有限公司 | Inchworm type piezoelectric linear driver |
| CN111490700B (en) * | 2020-04-23 | 2023-09-19 | 中国科学院光电技术研究所 | Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof |
| CN112271953B (en) * | 2020-10-30 | 2022-09-02 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6019514A (en) * | 1998-02-27 | 2000-02-01 | Bayside Controls, Inc. | Linear guide system having a flexure |
| CN104167953B (en) * | 2014-08-26 | 2016-06-15 | 哈尔滨工业大学 | Drive-type clamp passively piezoelectric actuator in a kind of |
| CN104467525B (en) * | 2014-12-01 | 2016-08-24 | 苏州大学 | Preload adjustable formula inertia stick-slip drives across yardstick precisely locating platform |
| CN207677649U (en) * | 2017-12-05 | 2018-07-31 | 吉林大学 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
| CN108173453A (en) * | 2018-01-29 | 2018-06-15 | 长春工业大学 | Parallel-connection driving type piezoelectricity stick-slip line motor and its driving method |
| CN108199613B (en) * | 2018-01-29 | 2020-06-02 | 长春工业大学 | Double-stator fixed type precise piezoelectric stick-slip linear motor and driving method thereof |
-
2018
- 2018-09-19 CN CN201811095424.5A patent/CN109217724B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109217724A (en) | 2019-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109217724B (en) | Full displacement amplification type piezoelectric inchworm linear platform | |
| CN109217723B (en) | Structure-integrated in-situ driving full-displacement amplification type piezoelectric inchworm linear platform | |
| CN109104118B (en) | The structure-integrated full displacement compound amplifying type piezoelectricity looper linear platform of driving in situ | |
| CN115242121B (en) | Piezoelectric stepping actuator based on synchronous double-foot drive | |
| CN113922701B (en) | Four-bar stick-slip motor with force amplification characteristic and driving method | |
| CN105743387A (en) | Lever amplification based alternative stepping piezoelectric linear motor | |
| CN109818527A (en) | Isosceles trapezoid stick-slip piezoelectric linear actuator | |
| CA3088745A1 (en) | Compact piezoelectric inertial drive stage | |
| CN110768571B (en) | Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle | |
| CN100413202C (en) | Ultra magnetostrictive high precision linear driver using piezozelectric effect clamping | |
| CN110912444B (en) | Bionic creeping type piezoelectric actuator | |
| CN110798094B (en) | Piezoelectric linear precision driving device based on parasitic inertia principle | |
| CN110661448B (en) | Biped driving non-resonant piezoelectric linear motor and electric excitation method | |
| CN105897043A (en) | Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof | |
| JPH02228265A (en) | Linear actuator drive controller | |
| CN104377987B (en) | Clamping type piezoelectric motor | |
| CN204316374U (en) | A kind of clamp formula piezoelectric motor | |
| CN217824770U (en) | Four-bar linkage direct-pushing piezoelectric linear motor | |
| CN114268241B (en) | Non-contact type bidirectional linear displacement actuating device and actuating method thereof | |
| CN112271953B (en) | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process | |
| CN113938052B (en) | Piezoelectric stick-slip driver based on two-stage lever amplifying mechanism | |
| CN112713799B (en) | Large-stroke non-return nano piezoelectric motor based on flexible hinge guide | |
| CN110855179B (en) | Creeping type piezoelectric precision driving device | |
| CN210629371U (en) | Biped driving non-resonant piezoelectric linear motor | |
| CN107994804B (en) | Ultrasonic driving macro-micro composite motion platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |