CN207677649U - The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement - Google Patents
The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement Download PDFInfo
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- CN207677649U CN207677649U CN201721671589.3U CN201721671589U CN207677649U CN 207677649 U CN207677649 U CN 207677649U CN 201721671589 U CN201721671589 U CN 201721671589U CN 207677649 U CN207677649 U CN 207677649U
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- hinge
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- guide rail
- piezoelectric stack
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Abstract
The utility model is related to a kind of piezo-electric type precision linear driving devices of exportable forward and reverse bidirectional-movement, belong to precision engineering technical field.Including units such as pedestal, mobile platform, stator module and mover assemblies, pedestal is attached with stator module by bolt, and pedestal is attached with mover assembly by screw, and mobile platform is attached with mover assembly by screw.Piezoelectric stack is under the action of encouraging electric signal, axial elongation is generated based on its inverse piezoelectric effect, driving is made to generate lateral displacement enough, driving mobile platform generates precise linear movement, by the direction and the sequential that change driving voltage, you can control mobile platform carries out reciprocating linear movement or positioning.The utility model has many technical advantages such as simple in structure, round-trip positioning accuracy height and fast response time.The utility model has wide practical use in precision engineering technical field.
Description
Technical field
The utility model is related to precision engineering technical field, more particularly to a kind of piezoelectricity of exportable forward and reverse bidirectional-movement
Type precision linear driving device.
Background technology
In recent years, with the development of science and technology, nanometer technique is in life science, microelectronics, optics, ultraprecise machine
It is occupied in the subjects field such as tool and its manufacture, accurate measurement, medical and health, semiconductor, biochemistry, data storage more next
More consequence.Micro mechanical technology, micro-nano measuring technique, the positioning of micro/nano level and actuation techniques have become the world today
The hot topic of high-technology field.Form is different to be filled with precision actuation, accurate measurement and the novel driving of precision positioning function
It sets to be developed successively and come out.Often there are the disadvantages such as structure size is bigger than normal, round-trip positioning accuracy is low in existing driving device；
Although wherein there are also driver outputs to stablize, precision is high, stroke is small, seriously limits the range of its application.And piezoelectricity
Ceramic material have frequency response is high, small, displacement resolution is high, fever less, noiseless, High power output, conversion efficiency height,
Driving force is big, driving power is low, working frequency is wide, not by electromagnetic interference many advantages, such as, therefore in recent years thus class component make
It increasingly attracts attention for the micro/nano level precision driver of precision actuation.
Invention content
The purpose of this utility model is to provide a kind of piezo-electric type precision linear drives of exportable forward and reverse bidirectional-movement
Device, solves that structure size of the existing technology is bigger than normal, round-trip positioning accuracy is low and the technical problems such as stroke is small.
The above-mentioned purpose of the utility model is achieved through the following technical solutions：
The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement includes pedestal 1, mobile platform 2, stator
Component 3 and mover assembly 4, the pedestal 1 are fastenedly connected by stator fixing glue 3-5 and stator module 3；The pedestal 1 is logical
Guide rail fixing glue 4-3 is crossed to be fastenedly connected with mover assembly 4；The mobile platform 2 passes through table top fixing glue 2-2 and mover assembly 4
It is fastenedly connected；The stator module 3 is by driving one 3-1-1-1 of foot and two 3-1-2-1 of driving foot to contact and match with mover assembly 4
It closes.
The pedestal 1 is：Fixed guide supporting face 1-1 is set to the both side ends of pedestal 1, fixed guide supporting face 1-
It is provided with guide rail on 1 and fixes internal thread hole 1-1-1；Movable guiding rail active face 1-2 is set to the both side ends of pedestal 1, and close
The inside of fixed guide supporting face 1-1, height are less than the height of fixed guide supporting face 1-1, prevent movable guiding rail active face
1-2 is interfered with movable guiding rail 4-2；Stator module support column 1-3 is set to the upper surface middle part of pedestal 1, stator module branch
It is provided with stator in the middle part of dagger 1-3 and fixes internal thread hole 1-3-1.
The mobile platform 2 is：The upper surfaces table top 2-1 both sides of the edge are evenly arranged with countersunk head through-hole one 2-1-1, described
The both sides of the edge of the side wall of table top 2-1 are provided with guide rail receiving hole 2-1-2, convenient for fixing guide rail 4-1 when mobile platform 2 moves
Disengaging, prevent mobile platform 2 from being interfered with fixed guide rail 4-1；The upper surface of the mobile platform 2 is evenly arranged with M rows N
The internal thread hole 2-1-3, described M, N of row are the positive integer more than or equal to 1.
The stator module 3 is：Stator 3-1 is provided with one 3-1-1 of driving hinge, driving two 3-1-2 of hinge and stator
Holder 3-1-3；The center of one 3-1-1-5 of crossbeam of the front end of one 3-1-1 of the driving hinge is provided with one 3- of driving foot
1-1-1；One 3-1-1-4 of buckstay of one sides 3-1-1 of the driving hinge is provided at both ends with one 3-1-1-2 of flexible hinge, institute
One 3-1-1-4 of buckstay for stating one other sides 3-1-1 of driving hinge is provided at both ends with two 3-1-1-3 of flexible hinge, flexible hinge
The value range of the ratio between the thickness of two 3-1-1-3 and one 3-1-1-2 of flexible hinge is 0.1 ~ 0.9；One 3-1-1-4 of buckstay and cross
The value range of the ratio between the thickness of one 3-1-1-5 of beam is 0.1 ~ 1；One 3-1-1 of driving hinge is provided with piezoelectric stack installation
The center of one 3-1-1-6 of slot, two 3-1-2-5 of crossbeam of the front end of two 3-1-2 of driving hinge are provided with two 3-1- of driving foot
Two 3-1-2-4 of buckstay of 2-1, two sides 3-1-2 of driving hinge are provided at both ends with three 3-1-2-2 of flexible hinge, drive hinge
Two 3-1-2-4 of buckstay of two other sides 3-1-2 is provided at both ends with four 3-1-2-3 of flexible hinge, four 3-1-2-3 of flexible hinge with
The value range of the ratio between the thickness of three 3-1-2-2 of flexible hinge is 0.1 ~ 0.9；Two 3-1-2-4 of buckstay and two 3-1-2-5 of crossbeam
The value range of the ratio between thickness be 0.1 ~ 1；Two 3-1-2 of driving hinge is provided with two 3-1-2-6 of piezoelectric stack mounting groove；
Stator support 3-1-3's is provided at both ends with through-hole 3-1-3-1；It is provided in the middle part of two beam side walls of the stator support 3-1-3
Pre-loading screw screws hole 3-1-3-2；Piezoelectric stack 3-2 is placed in one 3-1-1-6 of piezoelectric stack mounting groove and piezoelectric stack installation
In two 3-1-2-6 of slot, the inverse piezoelectric effect based on piezoelectric element, piezoelectric stack 3-2 can encourage stator 3-1 to generate shape after powered up
Become, and driving one 3-1-1-1 of foot and two 3-1-2-1 of driving foot is made to generate lateral displacement, and then encourages mover assembly 4 that activity is made to lead
Rail 4-2 drives mobile flat 2 to be moved；A side end face of gasket 3-3 is engaged with piezoelectric stack 3-2, another side end face with
One 3-1-1-6 of piezoelectric stack mounting groove or two 3-1-2-6 of piezoelectric stack mounting groove are engaged, and are carried out just to piezoelectric stack 3-2
Step pre-tightens, and can effectively prevent piezoelectric stack 3-2 from generating shear strain or unbalance stress.
The mover assembly 4 includes fixed guide rail 4-1, movable guiding rail 4-2, guide rail fixing glue 4-3, guide rail caging bolt
4-4 and guide holder 4-5；The upside end face of the fixed guide rail 4-1 is equipped with two 4-1-1 of countersunk head through-hole, fixed guide rail 4-1's
Both sides of the face are equipped with one 4-1-2 of limit threaded hole；The upside end face of the movable guiding rail 4-2 is equipped with internal thread hole 4-2-1, activity
The both sides of the face of guide rail 4-2 are equipped with two 4-2-2 of limit threaded hole；The countersunk head of the guide rail fixing glue 4-3 and fixed guide rail 4-1 are logical
Two 4-1-1 of hole coordinates, and screws and connect with guide rail fixation internal thread hole 1-1-1；The guide rail caging bolt 4-4 and limit screw thread
One 4-1-2 of hole and limit two 4-2-2 of threaded hole screw connection, realize the limit to fixed guide rail 4-1 and the positions movable guiding rail 4-2
It is fixed, and guide holder 4-5 and roller is avoided to skid off guide rail；The guide holder 4-5 and the sliding that roller is mover assembly 4
Support is provided.
One 3-1-1-1 of the described driving foot, two 3-1-2-1 of driving foot cross-sectional shape can be it is semicircle, parabola shaped,
Class L-type etc..
One 3-1-1-2 of flexible hinge, two 3-1-1-3 of flexible hinge, three 3-1-2-2 of flexible hinge, flexible hinge
Four 3-1-2-3 can be straight round hinge, ellipse hinge, hyperbolic-type hinge, parabolic type hinge or perpendicular type hinge etc..
The gasket 3-3 is made of wolfram steel, No. 45 steel.
The beneficial effects of the utility model are：The utility model mainly uses piezoelectric stack as power resources, when right
Inverse piezoelectric effect based on piezoelectric stack when piezoelectric stack passes to excitation electric signal, piezoelectric stack will produce axial elongation, by
In the structure feature of stator, cause buckstay one different with the axial rigidity of two both sides of buckstay, therefore make driving foot one and drive
Action spot two generates lateral displacement, and then drives movable guiding rail that mobile table top is driven to move back and forth.Due to piezoceramic material
It is high, small with frequency response, displacement resolution is high, fever less, noiseless, High power output, conversion efficiency be high, driving force
Greatly, driving power is low, working frequency is wide, not by electromagnetic interference many advantages, such as.And can effective solution have driving device deposit
Structure size is bigger than normal, round-trip positioning accuracy is low and the technical problems such as stroke is small.
Description of the drawings
Attached drawing described herein is used to provide a further understanding of the present invention, and is constituted part of this application,
The illustrative example and its explanation of the utility model do not constitute the improper limit to the utility model for explaining the utility model
It is fixed.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the pedestal of the utility model；
Fig. 3 is the structural schematic diagram of the mobile platform of the utility model；
Fig. 4 is the structural schematic diagram of the stator module of the utility model；
Fig. 5 is the structural schematic diagram of the stator of the utility model；
Fig. 6 is the vertical view of the stator of the utility model；
Fig. 7 is the structural schematic diagram of the piezoelectric stack of the utility model；
Fig. 8 is the structural schematic diagram of the gasket of the utility model；
Fig. 9 is the structural schematic diagram of the mover assembly of the utility model；
Figure 10 is the workflow schematic diagram of the utility model；
Figure 11 is the schematic diagram that driving foot generates positive-displacement when the stator of the utility model is driven by piezoelectric stack；
Figure 12 is the schematic diagram that driving foot generates upstream shift when the stator of the utility model is driven by piezoelectric stack；
Figure 13 is the schematic diagram that driving foot generates when displacement is offset when the stator of the utility model is driven by piezoelectric stack.
In figure：1, pedestal；1-1, fixed guide supporting face；1-2, movable guiding rail active face；1-3 stator module support columns；
1-1-1, guide rail fix internal thread hole；1-3-1, stator fix internal thread hole；2, mobile platform；2-1, table top；2-1-1, countersunk head
Through-hole one；2-1-2, guide rail receiving hole；2-1-3, internal thread hole；2-2, table top fixing glue；3, stator module；3-1, stator；3-
1-1, driving hinge one；3-1-2, driving hinge two；3-1-3, stator support；3-1-1-1, driving foot one；3-1-1-2, flexibility
Hinge one；3-1-1-3, flexible hinge two；3-1-1-4, buckstay one；3-1-1-5, crossbeam one；3-1-1-6, piezoelectric stack peace
Tankage one；3-1-2-1 drivings foot two；3-1-2-2, flexible hinge three；3-1-2-3, flexible hinge four；3-1-2-4, buckstay
Two；3-1-2-5, crossbeam two；3-1-2-6, piezoelectric stack mounting groove two；3-1-3-1, through-hole；3-1-3-2, pre-loading screw screw
Hole；3-2, piezoelectric stack；3-3, gasket；3-4, pre-loading screw；3-5, stator fixing glue；4, mover assembly；4-1, fixed guide rail；
4-1-1, countersunk head through-hole two；4-1-2, limit threaded hole one；4-2, movable guiding rail；4-2-1, internal thread hole；4-2-2, limit spiral shell
Pit two；4-3, guide rail fixing glue；4-4, guide rail caging bolt；4-5, guide holder.
Specific implementation mode
The detailed content and its specific implementation mode of the utility model are further illustrated below in conjunction with the accompanying drawings.
Shown in Fig. 1 to Figure 13, the piezo-electric type precision straight line of exportable forward and reverse bidirectional-movement of the utility model drives
Dynamic device, including pedestal 1, mobile platform 2, stator module 3 and mover assembly 4, the pedestal 1 by stator fixing glue 3-5 with
Stator module 3 is fastenedly connected；The pedestal 1 is fastenedly connected by guide rail fixing glue 4-3 and mover assembly 4；The mobile platform
2 are fastenedly connected by table top fixing glue 2-2 and mover assembly 4；The stator module 3 is by driving one 3-1-1-1 of foot and drive
Two 3-1-2-1 of action spot is engaged with mover assembly 4.
Shown in Figure 2, pedestal 1 described in the utility model is：Fixed guide supporting face 1-1 is set to the two of pedestal 1
Side end is fixed on guide supporting face 1-1 and is provided with guide rail fixation internal thread hole 1-1-1；Movable guiding rail active face 1-2 is set to
The both side ends of pedestal 1, and close to the inside of fixed guide supporting face 1-1, height is slightly below fixed guide supporting face 1-1's
Highly, prevent movable guiding rail active face 1-2 from being interfered with movable guiding rail 4-2；Stator module support column 1-3 is set to pedestal 1
Upper surface middle part, stator is provided in the middle part of stator module support column 1-3 and fixes internal thread hole 1-3-1.
Shown in Figure 3, mobile platform 2 described in the utility model is：The upper surfaces table top 2-1 both sides of the edge are uniformly arranged
There are one 2-1-1 of countersunk head through-hole, the both sides of the edge of the side wall of the table top 2-1 to be provided with guide rail receiving hole 2-1-2, convenient in movement
The disengaging that guide rail 4-1 is fixed when platform 2 moves prevents mobile platform 2 from being interfered with fixed guide rail 4-1；The mobile platform 2
To be evenly arranged with the internal thread hole 2-1-3, described M, N of M rows N row be the positive integer more than or equal to 1 for upper surface.
Shown in Fig. 4 to Fig. 8, stator module 3 described in the utility model is：Stator 3-1 is provided with driving hinge one
3-1-1, driving hinge two 3-1-2 and stator support 3-1-3；One 3-1-1-5 of crossbeam of the front end of one 3-1-1 of the driving hinge
Center be provided with one 3-1-1-1 of driving foot, the cross-sectional shape of one 3-1-1-1 of the driving foot can be semicircle, throw
Linear, class L-type of object etc.；One 3-1-1-4 of buckstay of one sides 3-1-1 of the driving hinge is provided at both ends with one 3- of flexible hinge
The thickness of 1-1-2, one 3-1-1-2 of flexible hinge are d3；One 3-1-1-4 of buckstay of one other sides 3-1-1 of the driving hinge
It is provided at both ends with two 3-1-1-3 of flexible hinge, the thickness of two 3-1-1-3 of flexible hinge is d4, d4/ d3Value range be 0.1 ~
0.9；One 3-1-1-2 of flexible hinge and two 3-1-1-3 of flexible hinge can be straight round hinge, ellipse hinge, hyperbolic-type hinge
Chain, parabolic type hinge or perpendicular type hinge etc.；The thickness of one 3-1-1-4 of buckstay of one both sides 3-1-1 of the driving hinge
For d2；The thickness of one 3-1-1-5 of crossbeam of one front ends 3-1-1 of driving hinge setting is d1, d2/ d1Value range be
0.1~1；One 3-1-1 of driving hinge is provided with one 3-1-1-6 of piezoelectric stack mounting groove, the front end of two 3-1-2 of driving hinge
Two 3-1-2-5 of crossbeam center be provided with driving foot two 3-1-2-1, it is described driving foot two 3-1-2-1 cross section shape
Shape can be semicircle, parabola shaped, class L-type etc.；Two 3-1-2-4 of buckstay of two sides 3-1-2 of driving hinge is provided at both ends with
The thickness of three 3-1-2-2 of flexible hinge, three 3-1-2-2 of flexible hinge are d3；Drive the buckstay two of two other sides 3-1-2 of hinge
3-1-2-4 is provided at both ends with four 3-1-2-3 of flexible hinge, and the thickness of four 3-1-2-3 of flexible hinge is d4；d4/ d3Value model
Enclose is 0.1 ~ 0.9；Three 3-1-2-2 of flexible hinge and four 3-1-2-3 of flexible hinge can be straight round hinge, ellipse hinge, double
Shaped form hinge, parabolic type hinge or perpendicular type hinge etc.；Two both sides 3-1-2 of driving hinge are provided with two 3- of buckstay
1-2-4, thickness d2；Two front ends 3-1-2 of driving hinge are provided with crossbeam two 3-1-2-5, thickness d1, wherein d2/
d1Value range be 0.1 ~ 1；Two 3-1-2 of driving hinge is provided with two 3-1-2-6 of piezoelectric stack mounting groove；Stator support
3-1-3's is provided at both ends with through-hole 3-1-3-1；It is provided with pre-loading screw in the middle part of two beam side walls of the stator support 3-1-3
Screw hole 3-1-3-2；Piezoelectric stack 3-2 is placed in two 3-1- of one 3-1-1-6 of piezoelectric stack mounting groove and piezoelectric stack mounting groove
In 2-6, the inverse piezoelectric effect based on piezoelectric element after powered up, piezoelectric stack 3-2 can encourage stator 3-1 to generate deformation, and make
Driving one 3-1-1-1 of foot and two 3-1-2-1 of driving foot generate lateral displacement, and then mover assembly 4 is encouraged to make movable guiding rail 4-2 bands
Dynamic mobile flat 2 are moved；A side end face of gasket 3-3 is engaged with piezoelectric stack 3-2, another side end face and piezoelectric stack
One 3-1-1-6 of mounting groove or two 3-1-2-6 of piezoelectric stack mounting groove are engaged, and are tentatively pre-tightened to piezoelectric stack 3-2, and
It can effectively prevent piezoelectric stack 3-2 generation shear strains or unbalance stress, the gasket 3-3 can be by materials such as wolfram steel, No. 45 steel
It is made.
Shown in Figure 9, mover assembly 4 described in the utility model includes fixed guide rail 4-1, movable guiding rail 4-2, guide rail
Fixing glue 4-3, guide rail caging bolt 4-4 and guide holder 4-5；The upside end face of the fixed guide rail 4-1 is logical equipped with countersunk head
The both sides of the face of two 4-1-1 of hole, fixed guide rail 4-1 are equipped with one 4-1-2 of limit threaded hole；The upside of the movable guiding rail 4-2
Face is equipped with internal thread hole 4-2-1, and the both sides of the face of movable guiding rail 4-2 are equipped with two 4-2-2 of limit threaded hole；The guide rail fixing glue
Two 4-1-1 of countersunk head through-hole of 4-3 and fixed guide rail 4-1 coordinate, and screw and connect with guide rail fixation internal thread hole 1-1-1；It is described
Guide rail caging bolt 4-4 is screwed and is connect with limit one 4-1-2 of threaded hole and limit two 4-2-2 of threaded hole, is realized to fixed guide rail
The restriction of 4-1 and the positions movable guiding rail 4-2, and guide holder 4-5 and roller is avoided to skid off guide rail；The guide holder 4-
5 and roller provide support for the sliding of mover assembly 4.
Embodiment：
Shown in Fig. 1 to Figure 13, the piezo-electric type precision straight line of exportable forward and reverse bidirectional-movement of the utility model drives
Dynamic device, pedestal 1, mobile platform 2, stator module 3 and mover assembly 4.Pedestal 1 is attached with stator module 3 by bolt,
Pedestal 1 is attached with mover assembly 4 by screw, and mobile platform 2 is attached with mover assembly 4 by screw.Piezo stack
Under the action of piling up excitation electric signal, axial elongation is generated based on its inverse piezoelectric effect, driving is made to generate lateral displacement, driving enough
Mobile platform 2 generates precise linear movement, by the direction and the sequential that change driving voltage, you can control mobile platform 2 carries out
Reciprocating linear is mobile or positions.The utility model has simple in structure, round-trip positioning accuracy height and fast response time etc. many
Technical advantage.The utility model has wide practical use in precision engineering technical field.
The pedestal 1 includes fixed guide supporting face 1-1, movable guiding rail active face 1-2 and stator module support column 1-
3；The fixed guide supporting face 1-1 is set to the both side ends of pedestal 1；It is provided with and leads on the fixed guide supporting face 1-1
Rail fixes internal thread hole 1-1-1, is used to screw with guide rail fixing glue 4-3 and connect, realizes the tight of fixation guide rail 4-1 and pedestal 1
It is solidly connected；The movable guiding rail active face 1-2 is set to the both side ends of pedestal 1, and close to the interior of fixed guide supporting face 1-1
Side, height are slightly below the height of fixed guide supporting face 1-1, prevent movable guiding rail active face 1-2 from occurring with movable guiding rail 4-2
Interference；The stator module support column 1-3 is set to the upper surface middle part of pedestal 1, is used to support stator module 3；It is described fixed
It is provided with stator in the middle part of sub-component support column 1-3 and fixes internal thread hole 1-3-1, is used to screw company with stator fixing glue 3-5
It connects, realization stator module 3 is fastenedly connected with pedestal 1.
The mobile platform 2 includes table top 2-1 and table top fixing glue 2-2；The upper surfaces table top 2-1 both sides of the edge are uniform
It is provided with one 2-1-1 of countersunk head through-hole, is used to coordinate with table top fixing glue 2-2, realizes mobile platform 2 and movable guiding rail 4-2's
It is fastenedly connected；The both sides of the edge of the side wall of the table top 2-1 are provided with guide rail receiving hole 2-1-2, convenient for being moved in mobile platform 2
The disengaging that guide rail 4-1 is fixed when dynamic prevents mobile platform 2 from being interfered with fixed guide rail 4-1；The upper table of the mobile platform 2
Face is evenly arranged with the internal thread hole 2-1-3 of M rows N row, is used to be connected with other elements, realizes other elements and movement
Platform 2 is fastenedly connected, so that mobile platform 2 moves the transport of other elements, M, N are the positive integer more than or equal to 1, this
M=3 in specific implementation mode, N=7；The table top fixing glue 2-2 that the mobile platform 2 includes is used for and one 2-1- of countersunk head through-hole
1 cooperation, and screw and connect with the internal thread hole 4-2-1 being arranged on movable guiding rail 4-2, realize movable guiding rail 4-2 and mobile platform 2
Be fastenedly connected.
The stator module 3 includes stator 3-1, piezoelectric stack 3-2, gasket 3-3, pre-loading screw 3-4 and stator fixing glue
3-5。
The stator 3-1 is provided with one 3-1-1 of driving hinge, driving hinge two 3-1-2 and stator support 3-1-3；It is described
The center of one 3-1-1-5 of crossbeam of the front end of driving hinge one 3-1-1 is provided with driving one 3-1-1-1 of foot, be used for
The side wall of movable guiding rail 4-2 is engaged, and realizes the driving to movable guiding rail 4-2, the cross section of one 3-1-1-1 of the driving foot
Shape can be semicircle, parabola shaped, class L-type etc., and the cross-sectional shape of one 3-1-1-1 of driving foot is in present embodiment
Semicircle, radius R1, R1For the number more than 1, R in present embodiment1=1.6mm；One 3-1-1 mono- of driving hinge
One 3-1-1-4 of buckstay of side is provided at both ends with one 3-1-1-2 of flexible hinge, and the thickness of one 3-1-1-2 of flexible hinge is d3；Institute
One 3-1-1-4 of buckstay for stating one other sides 3-1-1 of driving hinge is provided at both ends with two 3-1-1-3 of flexible hinge, flexible hinge
The thickness of two 3-1-1-3 is d4；Wherein d4/ d3Value range be 0.1 ~ 0.9, d in present embodiment4/ d3Value
It is 0.5, one 3-1-1-2 of the flexible hinge and two 3-1-1-3 of flexible hinge can be straight round hinge, ellipse hinge, hyperbolic
Line style hinge, parabolic type hinge and perpendicular type hinge, one 3-1-1-2 of flexible hinge and flexible hinge in present embodiment
Two 3-1-1-3 are straight round hinge；One both sides 3-1-1 of driving hinge are provided with one 3-1-1-4 of buckstay, and thickness is
d2；One front ends 3-1-1 of driving hinge are provided with crossbeam one 3-1-1-5, thickness d1, wherein d2/ d1Value range
It is 0.1 ~ 1, d in present embodiment2/ d1Value be 1；One 3-1-1 of driving hinge is provided with piezoelectric stack installation
One 3-1-1-6 of slot is used to be connected with piezoelectric stack 3-2, realizes the restriction to the positions piezoelectric stack 3-2；The driving
The center of two 3-1-2-5 of crossbeam of the front end of two 3-1-2 of hinge is provided with driving two 3-1-2-1 of foot, is used for and activity
The side wall of guide rail 4-2 is engaged, and realizes the driving to movable guiding rail 4-2, the cross-sectional shape of two 3-1-2-1 of the driving foot
Can be semicircle, parabola shaped, class L-type etc., it is semicircle that the cross-sectional shape of two 3-1-2-1 of foot is driven in present embodiment
Shape, radius R1, R1For the number more than 1, R in present embodiment1=1.6mm；Two sides 3-1-2 of the driving hinge
Two 3-1-2-4 of buckstay is provided at both ends with III 3-1-2-2 of flexible hinge, and the thickness of III 3-1-2-2 of flexible hinge is d3；The drive
Two 3-1-2-4 of buckstay of dynamic two other sides 3-1-2 of hinge is provided at both ends with IV 3-1-2-3 of flexible hinge, IV 3- of flexible hinge
The thickness of 1-2-3 is d4；Wherein d4/ d3Value range be 0.1 ~ 0.9, d in present embodiment4/ d3Value be
0.5, III 3-1-2-2 of the flexible hinge and IV 3-1-2-3 of flexible hinge can be straight round hinge, ellipse hinge, hyperbola
Type hinge, parabolic type hinge and perpendicular type hinge, III 3-1-2-2 of flexible hinge and flexible hinge IV in present embodiment
3-1-2-3 is straight round hinge；Two both sides 3-1-2 of driving hinge are provided with buckstay two 3-1-2-4, thickness d2；
Two front ends 3-1-2 of driving hinge are provided with crossbeam two 3-1-2-5, thickness d1, wherein d2/ d1Value range be
0.1 ~ 1, d in present embodiment2/ d1Value be 1；Two 3-1-2 of driving hinge is provided with piezoelectric stack mounting groove
Two 3-1-2-6 are used to be connected with piezoelectric stack 3-2, realize the restriction to the positions piezoelectric stack 3-2；The stator branch
Frame 3-1-3's is provided at both ends with through-hole 3-1-3-1, is used to coordinate with stator fixing glue 3-5, realizes stator module 3 and pedestal 1
Be fastenedly connected；It is provided with pre-loading screw in the middle part of two beam side walls of the stator support 3-1-3 and screws hole 3-1-3-2, uses
It is connect in being screwed with pre-loading screw 3-4, realizes the preload to piezoelectric stack 3-2.
The piezoelectric stack 3-2 is placed in two 3-1-2-6 of one 3-1-1-6 of piezoelectric stack mounting groove and piezoelectric stack mounting groove
Interior, the inverse piezoelectric effect based on piezoelectric element after powered up, piezoelectric stack 3-2 can encourage stator 3-1 to generate deformation, and make drive
One 3-1-1-1 of action spot and two 3-1-2-1 of driving foot generate lateral displacement, and then encourage mover assembly 4 that movable guiding rail 4-2 is made to drive
Mobile platform 2 is moved, and piezoelectric stack 3-2 is using THORLABS companies of the U.S. in present embodiment
The piezoelectric stack of AE0505D16F models.
A side end face of the gasket 3-3 is engaged with piezoelectric stack 3-2, another side end face and piezoelectric stack mounting groove
One 3-1-1-6 or two 3-1-2-6 of piezoelectric stack mounting groove are engaged, and realize the preliminary preload to piezoelectric stack 3-2, and can have
Effect prevents piezoelectric stack 3-2 generation shear strains or unbalance stress, the gasket 3-3 that can be made of materials such as wolfram steel, No. 45 steel,
Gasket 3-3 in present embodiment is made of wolfram steel.
The pre-loading screw 3-4, is used to screw hole 3-1-3-2 with pre-loading screw to screw and connect, and realizes to piezoelectric stack
The further preload of 3-2.
The stator fixing glue 3-5 is used to coordinate with through-hole 3-1-3-1, and fixes internal thread hole 1-3-1 with stator and revolve
Connection is closed, realization stator module 3 is fastenedly connected with pedestal 1.
The mover assembly 4 includes fixed guide rail 4-1, movable guiding rail 4-2, guide rail fixing glue 4-3, guide rail caging bolt 4-
4 and guide holder 4-5.
The upside end face of the fixed guide rail 4-1 is equipped with two 4-1-1 of countersunk head through-hole, is used to match with guide rail fixing glue 4-3
It closes；The both sides of the face of the fixed guide rail 4-1 are equipped with limit one 4-1-2 of threaded hole, are used to screw with guide rail caging bolt 4-4
The restriction to the positions fixed guide rail 4-1 is realized in connection.
The upside end face of the movable guiding rail 4-2 is equipped with internal thread hole 4-2-1, is used to screw with table top fixing glue 2-2
Being fastenedly connected for mobile platform 2 and movable guiding rail 4-2 is realized in connection；The both sides of the face of the movable guiding rail 4-2 are equipped with limit spiral shell
Two 4-2-2 of pit, is used to screw with guide rail caging bolt 4-4 and connect, and realizes the restriction to the positions movable guiding rail 4-2.
The guide rail fixing glue 4-3 is used to coordinate with two 4-1-1 of countersunk head through-hole set by fixed guide rail 4-1, and with lead
Rail fixes internal thread hole 1-1-1 and screws connection, realizes being fastenedly connected for pedestal 1 and fixed guide rail 4-1.
The guide rail caging bolt 4-4 is used to screw with limit one 4-1-2 of threaded hole and limit two 4-2-2 of threaded hole
Connection realizes the restriction to fixed guide rail 4-1 and the positions movable guiding rail 4-2, and avoids guide holder 4-5 and roller from skidding off and lead
Rail.
The guide holder 4-5 and roller provide support for the sliding of mover assembly 4.
Operation principle：A kind of piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement, work
It is roughly divided into three phases as process：Positive movement stage, counter motion stage and positioning quiescent phase；The positive movement stage is just
Refer to when the piezoelectric stack 3-2 being located in one 3-1-1 of driving hinge passes to excitation electric signal, piezoelectric stack 3-2 is based on its inverse pressure
Electrical effect generates axial elongation makes driving cut with scissors due to the presence of two 3-1-1-3 of one 3-1-1-2 of flexible hinge and flexible hinge
The axial rigidity of one 3-1-1-4 of buckstay of one both sides 3-1-1 of chain has differences, and causes one 3-1-1-1 of driving foot to generate lateral
Displacement, and then increase the normal pressure of driving foot one 3-1-1-1 and movable guiding rail 4-2, and it is mobile flat to drive movable guiding rail 4-2 to drive
Platform 2 carries out positive movement；The counter motion stage refers to just sharp when being passed to positioned at the piezoelectric stack 3-2 driven in two 3-1-2 of hinge
Encourage electric signal, piezoelectric stack 3-2 generates axial elongation based on its inverse piezoelectric effect, due to III 3-1-2-2 of flexible hinge and soft
The presence of IV 3-1-2-3 of property hinge, makes the axial rigidity of two both sides 3-1-2 buckstay of driving hinge, two 3-1-2-4 have differences,
Cause two 3-1-2-1 of driving foot to generate lateral displacement, and then increase the normal pressure of driving foot two 3-1-2-1 and movable guiding rail 4-2,
And drive movable guiding rail 4-2 that mobile platform 2 is driven to carry out counter motion；To being located at driving one 3-1-1 of hinge and driving hinge two
Piezoelectric stack 3-2 in 3-1-2 alternately passes to excitation electric signal, will realize the reciprocating motion of mobile platform 2；It positions static
Stage refers to just as the piezoelectric stack 3-2 being located in two 3-1-2 of driving one 3-1-1 of hinge and driving hinge while passing to excitation electricity
When signal, since one 3-1-1-2 of flexible hinge is identical with the thickness of III 3-1-2-2 of flexible hinge, two 3-1-1-3 of flexible hinge and
The thickness of IV 3-1-2-3 of flexible hinge is identical, therefore the side for causing driving one 3-1-1-1 of foot to be generated with two 3-1-2-1 of driving foot
It is identical to displacement, but direction on the contrary, therefore may be implemented to mobile platform 2 be position and motion state limitation, into
And realize that being positioned at for mobile platform 2 is static.
The foregoing is merely the preferred embodiments of the utility model, are not intended to limit the utility model, for ability
For the technical staff in domain, various modifications and changes may be made to the present invention.It is all to made by the utility model it is any modification,
Equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.
Claims (8)
1. a kind of piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement, it is characterised in that：Including pedestal
(1), mobile platform (2), stator module (3) and mover assembly (4), the pedestal (1) is by stator fixing glue (3-5) and determines
Sub-component (3) is fastenedly connected；The pedestal (1) is fastenedly connected by guide rail fixing glue (4-3) and mover assembly (4)；The shifting
Moving platform (2) is fastenedly connected by table top fixing glue (2-2) and mover assembly (4)；The stator module (3) is by driving foot
One (3-1-1-1) and two (3-1-2-1) of driving foot are engaged with mover assembly (4).
2. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 1, feature
It is：The pedestal (1) is：Fixed guide supporting face (1-1) is set to the both side ends of pedestal (1), fixed guide supporting
It is provided with guide rail on face (1-1) and fixes internal thread hole (1-1-1)；Movable guiding rail active face (1-2) is set to the both sides of pedestal (1)
End, and close to the inside of fixed guide supporting face (1-1), height is less than the height of fixed guide supporting face (1-1), prevents
Movable guiding rail active face (1-2) is interfered with movable guiding rail (4-2)；Stator module support column (1-3) is set to pedestal (1)
Upper surface middle part is provided with stator in the middle part of stator module support column (1-3) and fixes internal thread hole (1-3-1).
3. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 1, feature
It is：The mobile platform (2) is：The upper surface both sides of the edge table top (2-1) are evenly arranged with countersunk head through-hole one (2-1-1),
The both sides of the edge of the side wall of the table top (2-1) are provided with guide rail receiving hole (2-1-2), convenient for when mobile platform (2) are mobile
The disengaging of fixed guide rail (4-1) prevents mobile platform (2) from being interfered with fixed guide rail (4-1)；The mobile platform (2)
Upper surface is evenly arranged with the internal thread hole (2-1-3) of M rows N row, and described M, N are the positive integer more than or equal to 1.
4. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 1, feature
It is：The stator module (3) is：Stator (3-1) be provided with driving hinge one (3-1-1), driving hinge two (3-1-2) and
Stator support (3-1-3)；The center of the crossbeam one (3-1-1-5) of the front end of the driving hinge one (3-1-1) is provided with
One (3-1-1-1) of driving foot；The buckstay one (3-1-1-4) of described driving side hinge one (3-1-1) is provided at both ends with flexibility
The buckstay one (3-1-1-4) of hinge one (3-1-1-2), described driving other side hinge one (3-1-1) is provided at both ends with flexibility
Hinge two (3-1-1-3), the value range of flexible hinge two (3-1-1-3) and the ratio between the thickness of flexible hinge one (3-1-1-2)
It is 0.1 ~ 0.9；The value range of buckstay one (3-1-1-4) and the ratio between the thickness of crossbeam one (3-1-1-5) is 0.1 ~ 1；It is described
Driving hinge one (3-1-1) is provided with piezoelectric stack mounting groove one (3-1-1-6), the cross of the front end of driving hinge two (3-1-2)
The center of beam two (3-1-2-5) is provided with driving two (3-1-2-1) of foot, drives the buckstay of the side hinge two (3-1-2)
Two (3-1-2-4) are provided at both ends with flexible hinge three (3-1-2-2), drive the two (3- of buckstay of the other side hinge two (3-1-2)
1-2-4) it is provided at both ends with flexible hinge four (3-1-2-3), flexible hinge four (3-1-2-3) and flexible hinge three (3-1-2-2)
The value range of the ratio between thickness be 0.1 ~ 0.9；Buckstay two (3-1-2-4) and the ratio between the thickness of crossbeam two (3-1-2-5)
Value range is 0.1 ~ 1；The driving hinge two (3-1-2) is provided with piezoelectric stack mounting groove two (3-1-2-6)；Stator support
(3-1-3's) is provided at both ends with through-hole (3-1-3-1)；It is provided in the middle part of two beam side walls of the stator support (3-1-3) pre-
Tight screw screws hole (3-1-3-2)；Piezoelectric stack (3-2) is placed in piezoelectric stack mounting groove one (3-1-1-6) and piezoelectric stack
In mounting groove two (3-1-2-6), the inverse piezoelectric effect based on piezoelectric element, piezoelectric stack (3-2) can encourage stator after powered up
(3-1) generates deformation, and driving one (3-1-1-1) of foot and two (3-1-2-1) of driving foot is made to generate lateral displacement, and then encourages dynamic
Sub-component (4) makes movable guiding rail (4-2) that mobile platform (2) be driven to be moved；One side end face of gasket (3-3) and piezoelectric stack
(3-2) is engaged, another side end face and two (3-1-2- of piezoelectric stack mounting groove one (3-1-1-6) or piezoelectric stack mounting groove
6) it is engaged, piezoelectric stack (3-2) is tentatively pre-tightened, and can effectively prevent piezoelectric stack (3-2) from generating shear strain
Or unbalance stress.
5. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 1, feature
It is：The mover assembly (4) includes fixed guide rail (4-1), movable guiding rail (4-2), guide rail fixing glue (4-3), guide rail limit
Position bolt (4-4) and guide holder (4-5)；The upside end face of the fixed guide rail (4-1) is equipped with two (4-1- of countersunk head through-hole
1), the both sides of the face of fixed guide rail (4-1) are equipped with limit threaded hole one (4-1-2)；The upside end face of the movable guiding rail (4-2)
Equipped with internal thread hole (4-2-1), the both sides of the face of movable guiding rail (4-2) are equipped with limit threaded hole two (4-2-2)；The guide rail is solid
The countersunk head through-hole two (4-1-1) of fixed nail (4-3) and fixed guide rail (4-1) coordinates, and fixes internal thread hole (1-1-1) with guide rail and revolve
Close connection；The guide rail caging bolt (4-4) and limit threaded hole one (4-1-2) and limit threaded hole two (4-2-2) company of screwing
It connects, realizes the restriction to fixed position guide rail (4-1) and movable guiding rail (4-2), and guide holder (4-5) and roller is avoided to slide
Go out guide rail；The guide holder (4-5) and roller provide support for the sliding of mover assembly (4).
6. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 4, feature
It is：The cross-sectional shape of one (3-1-1-1) of driving foot, two (3-1-2-1) of driving foot is semicircle, parabola shaped, L
Type.
7. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 4, feature
It is：The flexible hinge one (3-1-1-2), flexible hinge two (3-1-1-3), flexible hinge three (3-1-2-2), flexible hinge
Chain four (3-1-2-3) is straight round hinge, ellipse hinge, hyperbolic-type hinge, parabolic type hinge or perpendicular type hinge.
8. the piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement according to claim 4, feature
It is：The gasket (3-3) is made of wolfram steel or No. 45 steel.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721671589.3U CN207677649U (en) | 2017-12-05 | 2017-12-05 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721671589.3U CN207677649U (en) | 2017-12-05 | 2017-12-05 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
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| CN207677649U true CN207677649U (en) | 2018-07-31 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108023500A (en) * | 2017-12-05 | 2018-05-11 | 吉林大学 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
| CN109104118A (en) * | 2018-09-19 | 2018-12-28 | 宁波大学 | The structure-integrated full displacement compound amplifying type piezoelectricity looper linear platform of driving in situ |
| CN109217724A (en) * | 2018-09-19 | 2019-01-15 | 宁波大学 | A kind of full displacement equations formula piezoelectricity looper linear platform |
| CN110912447A (en) * | 2019-04-08 | 2020-03-24 | 浙江师范大学 | Piezoelectric rotary driving platform based on crawling principle |
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2017
- 2017-12-05 CN CN201721671589.3U patent/CN207677649U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108023500A (en) * | 2017-12-05 | 2018-05-11 | 吉林大学 | The piezo-electric type precision linear driving device of exportable forward and reverse bidirectional-movement |
| CN108023500B (en) * | 2017-12-05 | 2023-10-20 | 吉林大学 | Piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion |
| CN109104118A (en) * | 2018-09-19 | 2018-12-28 | 宁波大学 | The structure-integrated full displacement compound amplifying type piezoelectricity looper linear platform of driving in situ |
| CN109217724A (en) * | 2018-09-19 | 2019-01-15 | 宁波大学 | A kind of full displacement equations formula piezoelectricity looper linear platform |
| CN110912447A (en) * | 2019-04-08 | 2020-03-24 | 浙江师范大学 | Piezoelectric rotary driving platform based on crawling principle |
| CN110912447B (en) * | 2019-04-08 | 2023-01-31 | 浙江师范大学 | Piezoelectric rotary driving platform based on crawling principle |
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