CN108023500B - Piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion - Google Patents
Piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion Download PDFInfo
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- CN108023500B CN108023500B CN201711267990.5A CN201711267990A CN108023500B CN 108023500 B CN108023500 B CN 108023500B CN 201711267990 A CN201711267990 A CN 201711267990A CN 108023500 B CN108023500 B CN 108023500B
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
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- 238000006073 displacement reaction Methods 0.000 abstract description 11
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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Abstract
The application relates to a piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions, and belongs to the technical field of precise engineering. The device comprises a base, a moving platform, a stator assembly, a rotor assembly and other units, wherein the base is connected with the stator assembly through bolts, the base is connected with the rotor assembly through bolts, and the moving platform is connected with the rotor assembly through bolts. Under the action of the excitation electric signal, the piezoelectric stack generates axial elongation based on the inverse piezoelectric effect, so that the driving foot generates lateral displacement, the moving platform is driven to generate accurate linear motion, and the moving platform can be controlled to perform reciprocating linear motion or positioning by changing the direction and time sequence of the driving voltage. The application has the technical advantages of simple structure, high round trip positioning precision, high response speed and the like. The application has wide application prospect in the technical field of precision engineering.
Description
Technical Field
The application relates to the technical field of precision engineering, in particular to a piezoelectric precision linear driving device capable of outputting forward and reverse bidirectional motions.
Background
In recent years, with the development of science and technology, micro-nano technology has taken an increasing importance in many fields of life science, microelectronics, optics, ultra-precision machinery and manufacturing thereof, precision measurement, medicine and health, semiconductors, biochemistry, data storage and the like. Micro-mechanical technology, micro-nano measurement technology and micro-nano positioning and driving technology have become the hot targets of the high and new technical fields in the world today. Various types of novel driving devices with precise driving, precise measuring and precise positioning functions are developed. The existing driving device has the defects of larger structural size, low reciprocating positioning precision and the like; although some of the drivers have stable output and high precision, the stroke is small, and the application range of the drivers is severely limited. The piezoelectric ceramic material has the advantages of high frequency response, small volume, high displacement resolution, less heat generation, no noise, large output force, high transduction efficiency, large driving force, low driving power, wide working frequency, no electromagnetic interference and the like, so that the element is attracting more attention as a micro-nano precision driver for precision driving in recent years.
Disclosure of Invention
The application aims to provide a piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions, which solves the technical problems of larger structural size, low reciprocating positioning precision, small stroke and the like in the prior art.
The above object of the present application is achieved by the following technical solutions:
the piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions comprises a base 1, a moving platform 2, a stator assembly 3 and a rotor assembly 4, wherein the base 1 is fixedly connected with the stator assembly 3 through stator fixing nails 3-5; the base 1 is fixedly connected with the rotor assembly 4 through guide rail fixing nails 4-3; the movable platform 2 is fixedly connected with the rotor assembly 4 through the table top fixing nails 2-2; the stator assembly 3 is in contact fit with the rotor assembly 4 through the driving foot one 3-1-1-1 and the driving foot two 3-1-2-1.
The base 1 is: the fixed guide rail supporting surfaces 1-1 are arranged at the end parts of the two sides of the base 1, and guide rail fixed internal thread holes 1-1-1 are formed in the fixed guide rail supporting surfaces 1-1; the movable guide rail movable surfaces 1-2 are arranged at the end parts of the two sides of the base 1 and are close to the inner sides of the fixed guide rail supporting surfaces 1-1, and the height of the movable guide rail movable surfaces is lower than that of the fixed guide rail supporting surfaces 1-1, so that the movable guide rail movable surfaces 1-2 and the movable guide rails 4-2 are prevented from being interfered; the stator assembly support column 1-3 is arranged in the middle of the upper surface of the base 1, and the middle of the stator assembly support column 1-3 is provided with a stator fixing internal thread hole 1-3-1.
The mobile platform 2 is: the edges of the two sides of the upper surface of the table top 2-1 are uniformly provided with countersunk through holes I2-1-1, and the edges of the two sides of the side wall of the table top 2-1 are provided with guide rail accommodating holes 2-1-2, so that the fixed guide rail 4-1 can conveniently enter and exit when the movable platform 2 moves, and the movable platform 2 and the fixed guide rail 4-1 are prevented from interfering; the upper surface of the mobile platform 2 is uniformly provided with M rows and N columns of internal threaded holes 2-1-3, and M, N is a positive integer greater than or equal to 1.
The stator assembly 3 is: the stator 3-1 is provided with a first driving hinge 3-1-1, a second driving hinge 3-1-2 and a stator bracket 3-1-3; the center position of the beam I3-1-1-5 at the front end of the driving hinge I3-1-1 is provided with a driving foot I3-1-1-1; the flexible hinges I3-1-1-2 are arranged at the two ends of the rigid beam I3-1-1-4 on one side of the driving hinge I3-1-1, the flexible hinges II 3-1-1-3 are arranged at the two ends of the rigid beam I3-1-1-4 on the other side of the driving hinge I3-1-1, and the value range of the thickness ratio of the flexible hinges II 3-1-1-3 to the flexible hinges I3-1-1-2 is 0.1-0.9; the ratio of the thickness of the rigid beam I3-1-1-4 to the thickness of the cross beam I3-1-1-5 is in the range of 0.1-1; the driving hinge I3-1-1 is provided with a piezoelectric stack mounting groove I3-1-1-6, the center position of a cross beam II 3-1-2-5 at the front end of a driving hinge II 3-1-2 is provided with a driving foot II 3-1-2-1, two ends of a rigid beam II 3-1-2-4 at one side of the driving hinge II 3-1-2 are provided with a flexible hinge III 3-1-2-2, two ends of a rigid beam II 3-1-2-4 at the other side of the driving hinge II 3-1-2 are provided with a flexible hinge IV 3-1-2-3, and the value range of the thickness ratio of the flexible hinge IV 3-1-2-3 to the flexible hinge III 3-1-2-2 is 0.1-0.9; the value range of the thickness ratio of the rigid beam II 3-1-2-4 to the cross beam II 3-1-2-5 is 0.1-1; the second driving hinge 3-1-2 is provided with a second piezoelectric stack mounting groove 3-1-2-6; through holes 3-1-3-1 are arranged at two ends of the stator bracket 3-1-3; the middle parts of the side walls of the two cross beams of the stator bracket 3-1-3 are provided with pretension screw screwing holes 3-1-3-2; the piezoelectric stack 3-2 is arranged in the first piezoelectric stack mounting groove 3-1-1-6 and the second piezoelectric stack mounting groove 3-1-2-6, and after the piezoelectric stack 3-2 is electrified, the piezoelectric stack 3-2 can excite the stator 3-1 to deform and enable the first driving foot 3-1-1 and the second driving foot 3-1-2-1 to laterally displace based on the inverse piezoelectric effect of the piezoelectric element, so that the mover assembly 4 is excited to enable the movable guide rail 4-2 to drive the movable platform 2 to move; one side end face of the gasket 3-3 is in contact fit with the piezoelectric stack 3-2, and the other side end face of the gasket is in contact fit with the first piezoelectric stack mounting groove 3-1-1-6 or the second piezoelectric stack mounting groove 3-1-2-6, so that the piezoelectric stack 3-2 is preliminarily pre-tensioned, and the piezoelectric stack 3-2 can be effectively prevented from generating shear strain or uneven stress.
The mover assembly 4 comprises a fixed guide rail 4-1, a movable guide rail 4-2, a guide rail fixing nail 4-3, a guide rail limit bolt 4-4 and a guide rail retainer 4-5; the upper end face of the fixed guide rail 4-1 is provided with a countersunk through hole II 4-1-1, and the end faces of the two sides of the fixed guide rail 4-1 are provided with limiting threaded holes I4-1-2; an inner threaded hole 4-2-1 is formed in the upper end face of the movable guide rail 4-2, and a limiting threaded hole two 4-2-2 is formed in the end faces of the two sides of the movable guide rail 4-2; the guide rail fixing nail 4-3 is matched with the countersunk through hole II 4-1-1 of the fixed guide rail 4-1 and is connected with the guide rail fixing internal thread hole 1-1-1 in a screwing way; the guide rail limit bolt 4-4 is in screwed connection with the limit threaded hole I4-1-2 and the limit threaded hole II 4-2-2, so that the positions of the fixed guide rail 4-1 and the movable guide rail 4-2 are limited, and the guide rail retainer 4-5 and the rollers are prevented from sliding out of the guide rail; the rail holders 4-5 and rollers provide support for the sliding movement of the sub-assembly 4.
The cross section of the driving foot I3-1-1-1 and the driving foot II 3-1-2-1 can be semicircular, parabolic, L-shaped and the like.
The first flexible hinge 3-1-1-2, the second flexible hinge 3-1-1-3, the third flexible hinge 3-1-2-2 and the fourth flexible hinge 3-1-2-3 can be straight round type hinges, elliptic type hinges, hyperbolic type hinges, parabolic type hinges or right angle type hinges and the like.
The gasket 3-3 is made of tungsten steel and 45 # steel.
The application has the beneficial effects that: the application mainly adopts the piezoelectric stack as a power source, when the piezoelectric stack is electrified with an excitation electric signal, the piezoelectric stack generates axial elongation based on the inverse piezoelectric effect of the piezoelectric stack, and the axial rigidity of the two sides of the rigid beam I and the rigidity Liang Er is different due to the structural characteristics of the stator, so that the driving foot I and the driving foot II generate lateral displacement, and the movable guide rail is driven to drive the movable table board to reciprocate. The piezoelectric ceramic material has the advantages of high frequency response, small volume, high displacement resolution, less heat generation, no noise, large output force, high transduction efficiency, large driving force, low driving power, wide working frequency, no electromagnetic interference and the like. And the technical problems of larger structural size, low reciprocating positioning precision, small stroke and the like of the existing driving device can be effectively solved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate and explain the application and together with the description serve to explain the application.
FIG. 1 is a schematic diagram of the structure of the present application;
FIG. 2 is a schematic view of the structure of the base of the present application;
FIG. 3 is a schematic diagram of a mobile platform according to the present application;
FIG. 4 is a schematic structural view of a stator assembly according to the present application;
FIG. 5 is a schematic view of a stator according to the present application;
FIG. 6 is a top view of the stator of the present application;
FIG. 7 is a schematic diagram of a piezoelectric stack according to the present application;
FIG. 8 is a schematic view of the gasket of the present application;
FIG. 9 is a schematic structural view of a mover assembly of the present application;
FIG. 10 is a schematic workflow diagram of the present application;
FIG. 11 is a schematic illustration of the stator of the present application driven by a piezoelectric stack with positive displacement of the drive foot;
FIG. 12 is a schematic view of a stator of the present application driven by a piezoelectric stack with a driving foot displaced in opposite directions;
fig. 13 is a schematic diagram of the stator of the present application when driven by the piezoelectric stack to offset the displacement of the driving foot.
In the figure: 1. a base; 1-1, fixing a guide rail supporting surface; 1-2, a movable surface of a movable guide rail; 1-3 stator assembly support columns; 1-1-1, a guide rail fixing internal thread hole; 1-3-1, a stator fixing internal thread hole; 2. a mobile platform; 2-1, a table top; 2-1-1, a countersunk through hole I; 2-1-2, a guide rail accommodating hole; 2-1-3, internal thread holes; 2-2, table top fixing nails; 3. a stator assembly; 3-1, a stator; 3-1-1, driving a hinge I; 3-1-2, driving a hinge II; 3-1-3, stator support; 3-1-1-1, driving foot one; 3-1-1-2, flexible hinge one; 3-1-1-3, a flexible hinge II; 3-1-1-4, rigid beam I; 3-1-1-5, beam I; 3-1-1-6, a piezoelectric stack mounting groove I; 3-1-2-1 drives foot two; 3-1-2-2, a flexible hinge III; 3-1-2-3, a flexible hinge IV; 3-1-2-4, a rigid beam II; 3-1-2-5, and a beam II; 3-1-2-6, a piezoelectric stack mounting groove II; 3-1-3-1, through holes; 3-1-3-2, and screwing the pre-tightening screw into the hole; 3-2, piezoelectric stack; 3-3, a gasket; 3-4, pre-tightening the screw; 3-5, stator fixing nails; 4. a mover assembly; 4-1, fixing the guide rail; 4-1-1, a countersunk through hole II; 4-1-2, a first limiting threaded hole; 4-2, a movable guide rail; 4-2-1, an internal threaded hole; 4-2-2, a limiting threaded hole II; 4-3, fixing nails on the guide rail; 4-4, a guide rail limiting bolt; 4-5, a guide rail retainer.
Detailed Description
The details of the present application and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 13, the piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional movement comprises a base 1, a moving platform 2, a stator assembly 3 and a rotor assembly 4, wherein the base 1 is fixedly connected with the stator assembly 3 through stator fixing nails 3-5; the base 1 is fixedly connected with the rotor assembly 4 through guide rail fixing nails 4-3; the movable platform 2 is fixedly connected with the rotor assembly 4 through the table top fixing nails 2-2; the stator assembly 3 is in contact fit with the rotor assembly 4 through the driving foot one 3-1-1-1 and the driving foot two 3-1-2-1.
Referring to fig. 2, the base 1 according to the present application is: the fixed guide rail supporting surfaces 1-1 are arranged at the end parts of the two sides of the base 1, and guide rail fixed internal thread holes 1-1-1 are formed in the fixed guide rail supporting surfaces 1-1; the movable guide rail movable surfaces 1-2 are arranged at the end parts of the two sides of the base 1 and are close to the inner sides of the fixed guide rail supporting surfaces 1-1, and the height of the movable guide rail movable surfaces is slightly lower than the height of the fixed guide rail supporting surfaces 1-1, so that the movable guide rail movable surfaces 1-2 are prevented from interfering with the movable guide rails 4-2; the stator assembly support column 1-3 is arranged in the middle of the upper surface of the base 1, and the middle of the stator assembly support column 1-3 is provided with a stator fixing internal thread hole 1-3-1.
Referring to fig. 3, the mobile platform 2 according to the present application is: the edges of the two sides of the upper surface of the table top 2-1 are uniformly provided with countersunk through holes I2-1-1, and the edges of the two sides of the side wall of the table top 2-1 are provided with guide rail accommodating holes 2-1-2, so that the fixed guide rail 4-1 can conveniently enter and exit when the movable platform 2 moves, and the movable platform 2 and the fixed guide rail 4-1 are prevented from interfering; the upper surface of the mobile platform 2 is uniformly provided with M rows and N columns of internal threaded holes 2-1-3, and M, N is a positive integer greater than or equal to 1.
Referring to fig. 4 to 8, the stator assembly 3 according to the present application is: the stator 3-1 is provided with a first driving hinge 3-1-1, a second driving hinge 3-1-2 and a stator bracket 3-1-3; the center position of the cross beam I3-1-1-5 at the front end of the driving hinge I3-1-1 is provided with a driving foot I3-1-1-1, and the cross section of the driving foot I3-1-1-1 can be semicircular, parabolic, L-like and the like; the two ends of the rigid beam I3-1-1-4 at one side of the driving hinge I3-1-1 are provided with flexible hinges I3-1-1-2, and the thickness of the flexible hinges I3-1-1-2 is d 3 The method comprises the steps of carrying out a first treatment on the surface of the Two ends of the rigid beam I3-1-1-4 on the other side of the driving hinge I3-1-1 are provided with a flexible hinge II 3-1-1-3, and the thickness of the flexible hinge II 3-1-1-3 is d 4 ，d 4 /d 3 The value range of (2) is 0.1-0.9; the first flexible hinge 3-1-1-2 and the second flexible hinge 3-1-1-3 can be straight round type hinges, elliptic type hinges, hyperbolic type hinges, parabolic type hinges or right angle type hinges, etc.; the thickness of the rigid beam I3-1-1-4 at the two sides of the driving hinge I3-1-1 is d 2 The method comprises the steps of carrying out a first treatment on the surface of the The thickness of the beam I3-1-1-5 arranged at the front end of the driving hinge I3-1-1 is d 1 ，d 2 /d 1 The value range of (2) is 0.1-1; the driving hinge I3-1-1 is provided with a piezoelectric stack mounting groove I3-1-1-6, the center position of the beam II 3-1-2-5 at the front end of the driving hinge II 3-1-2 is provided with a driving foot II 3-1-2-1, and the cross section of the driving foot II 3-1-2-1 can be semicircular, parabolic, L-like and the like; two ends of the rigid beam II 3-1-2-4 at one side of the driving hinge II 3-1-2 are provided with flexible hinges III 3-1-2-2, and the thickness of the flexible hinges III 3-1-2-2 is d 3 The method comprises the steps of carrying out a first treatment on the surface of the Two ends of the rigid beam II 3-1-2-4 at the other side of the driving hinge II 3-1-2 are provided with flexible hinges IV 3-1-2-3, and the thickness of the flexible hinges IV 3-1-2-3 is d 4 ；d 4 /d 3 The value range of (2) is 0.1-0.9; the flexible hinge III 3-1-2-2 and the flexible hinge IV 3-1-2-3 can be straight round type hinge, elliptic type hinge, hyperbolic type hinge, parabolic type hinge or right angle type hinge, etc.; two sides of the driving hinge II 3-1-2 are provided with rigid beams II 3-1-2-4, the thickness of which is equal to that of the driving hinge IIDegree of d 2 The method comprises the steps of carrying out a first treatment on the surface of the The front end of the driving hinge II 3-1-2 is provided with a beam II 3-1-2-5 with the thickness d 1 Wherein d is 2 /d 1 The value range of (2) is 0.1-1; the second driving hinge 3-1-2 is provided with a second piezoelectric stack mounting groove 3-1-2-6; through holes 3-1-3-1 are arranged at two ends of the stator bracket 3-1-3; the middle parts of the side walls of the two cross beams of the stator bracket 3-1-3 are provided with pretension screw screwing holes 3-1-3-2; the piezoelectric stack 3-2 is arranged in the first piezoelectric stack mounting groove 3-1-1-6 and the second piezoelectric stack mounting groove 3-1-2-6, and after the piezoelectric stack 3-2 is electrified, the piezoelectric stack 3-2 can excite the stator 3-1 to deform and enable the first driving foot 3-1-1 and the second driving foot 3-1-2-1 to laterally displace based on the inverse piezoelectric effect of the piezoelectric element, so that the mover assembly 4 is excited to enable the movable guide rail 4-2 to drive the movable platform 2 to move; one side end face of the gasket 3-3 is in contact fit with the piezoelectric stack 3-2, the other side end face of the gasket 3-3 is in contact fit with the piezoelectric stack mounting groove I3-1-1-6 or the piezoelectric stack mounting groove II 3-1-2-6, the piezoelectric stack 3-2 is pre-tightened, the piezoelectric stack 3-2 can be effectively prevented from generating shear strain or uneven stress, and the gasket 3-3 can be made of tungsten steel, 45-gauge steel and other materials.
Referring to fig. 9, the mover assembly 4 according to the present application includes a fixed rail 4-1, a movable rail 4-2, a rail fixing pin 4-3, a rail limit bolt 4-4 and a rail holder 4-5; the upper end face of the fixed guide rail 4-1 is provided with a countersunk through hole II 4-1-1, and the end faces of the two sides of the fixed guide rail 4-1 are provided with limiting threaded holes I4-1-2; an inner threaded hole 4-2-1 is formed in the upper end face of the movable guide rail 4-2, and a limiting threaded hole two 4-2-2 is formed in the end faces of the two sides of the movable guide rail 4-2; the guide rail fixing nail 4-3 is matched with the countersunk through hole II 4-1-1 of the fixed guide rail 4-1 and is connected with the guide rail fixing internal thread hole 1-1-1 in a screwing way; the guide rail limit bolt 4-4 is in screwed connection with the limit threaded hole I4-1-2 and the limit threaded hole II 4-2-2, so that the positions of the fixed guide rail 4-1 and the movable guide rail 4-2 are limited, and the guide rail retainer 4-5 and the rollers are prevented from sliding out of the guide rail; the rail holders 4-5 and rollers provide support for the sliding movement of the sub-assembly 4.
In the application, if the piezoelectric stack is neglected in the relevant influences of hysteresis, creep and the like, the elongation of the piezoelectric stack can be expressed by the following formula:
x pzt ＝nd 33 V pzt
wherein x is pzt Represents the elongation of the piezoelectric stack, n represents the number of layers of the piezoelectric stack, d 33 Representing the piezoelectric constant, V pzt Representing the voltage across the piezoelectric stack.
The actual stepping distance of the stator in each movement cycle is as follows:
△L＝L-L 0
wherein L represents the distance generated by the movement of the stator, L 0 Represents the distance of the stator due to displacement back, Δl represents the distance of the actual movement of the stator.
The movement speed of the movable table top in the application can be expressed by the following formula:
V＝f×△L
wherein V represents the movement speed of the moving table, f represents the driving frequency, and DeltaL represents the distance of the actual movement of the stator.
Examples:
referring to fig. 1 to 13, the piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion of the application comprises a base 1, a moving platform 2, a stator assembly 3 and a rotor assembly 4. The base 1 is connected with the stator assembly 3 through bolts, the base 1 is connected with the rotor assembly 4 through bolts, and the movable platform 2 is connected with the rotor assembly 4 through bolts. Under the action of the excitation electric signal, the piezoelectric stack generates axial elongation based on the inverse piezoelectric effect, so that the driving foot generates lateral displacement, the moving platform 2 is driven to generate accurate linear motion, and the moving platform 2 can be controlled to perform reciprocating linear motion or positioning by changing the direction and time sequence of the driving voltage. The application has the technical advantages of simple structure, high round trip positioning precision, high response speed and the like. The application has wide application prospect in the technical field of precision engineering.
The base 1 comprises a fixed guide rail supporting surface 1-1, a movable guide rail movable surface 1-2 and a stator assembly supporting column 1-3; the fixed guide rail supporting surfaces 1-1 are arranged at the end parts of the two sides of the base 1; the fixed guide rail supporting surface 1-1 is provided with a guide rail fixed internal threaded hole 1-1-1 which is used for being screwed with the guide rail fixed nails 4-3 to realize the fastening connection of the fixed guide rail 4-1 and the base 1; the movable guide rail movable surfaces 1-2 are arranged at the end parts of the two sides of the base 1 and are close to the inner sides of the fixed guide rail supporting surfaces 1-1, and the height of the movable guide rail movable surfaces is slightly lower than the height of the fixed guide rail supporting surfaces 1-1, so that the movable guide rail movable surfaces 1-2 are prevented from interfering with the movable guide rails 4-2; the stator assembly support column 1-3 is arranged in the middle of the upper surface of the base 1 and is used for supporting the stator assembly 3; the middle part of the stator assembly support column 1-3 is provided with a stator fixing internal thread hole 1-3-1 which is used for being screwed with a stator fixing nail 3-5 to realize the fastening connection of the stator assembly 3 and the base 1.
The movable platform 2 comprises a table top 2-1 and table top fixing nails 2-2; the edges of the two sides of the upper surface of the table top 2-1 are uniformly provided with countersunk through holes I2-1-1 which are used for being matched with table top fixing nails 2-2 to realize the fastening connection of the movable platform 2 and the movable guide rail 4-2; guide rail accommodating holes 2-1-2 are formed in the edges of the two sides of the side wall of the table top 2-1, so that the fixed guide rail 4-1 can be conveniently moved in and out when the movable platform 2 moves, and interference between the movable platform 2 and the fixed guide rail 4-1 is prevented; the upper surface of the mobile platform 2 is uniformly provided with M rows and N columns of internal threaded holes 2-1-3 which are used for being matched and connected with other elements to realize the fastening connection of the other elements and the mobile platform 2, so that the mobile platform 2 can transport and move the other elements, and M, N is a positive integer greater than or equal to 1, wherein in the specific embodiment, M=3 and N=7; the movable platform 2 comprises a table top fixing nail 2-2 which is used for being matched with the first countersunk through hole 2-1-1 and is in screwed connection with the internal threaded hole 4-2-1 arranged on the movable guide rail 4-2, so that the movable guide rail 4-2 is in fastened connection with the movable platform 2.
The stator assembly 3 comprises a stator 3-1, a piezoelectric stack 3-2, a gasket 3-3, a pre-tightening screw 3-4 and a stator fixing nail 3-5.
The stator 3-1 is provided with a first driving hinge 3-1-1, a second driving hinge 3-1-2 and a stator bracket 3-1-3; the center position of the cross beam 1 3-1-1-5 at the front end of the driving hinge 1 3-1-1 is provided with a driving foot 1-1-1 which is used for being in contact fit with the side wall of the movable guide rail 4-2 to realize the driving of the movable guide rail 4-2, and the cross beam of the driving foot 1-1-1-1The cross section of the driving foot 3-1-1-1 in the embodiment is semicircular, parabolic, L-shaped, etc., and the radius is R 1 ，R 1 For a number greater than 1, R in this embodiment 1 =1.6mm; the two ends of the rigid beam I3-1-1-4 at one side of the driving hinge I3-1-1 are provided with flexible hinges I3-1-1-2, and the thickness of the flexible hinges I3-1-1-2 is d 3 The method comprises the steps of carrying out a first treatment on the surface of the Two ends of the rigid beam I3-1-1-4 on the other side of the driving hinge I3-1-1 are provided with a flexible hinge II 3-1-1-3, and the thickness of the flexible hinge II 3-1-1-3 is d 4 The method comprises the steps of carrying out a first treatment on the surface of the Wherein d is 4 /d 3 The value of (a) is in the range of 0.1 to 0.9, d in the specific embodiment 4 /d 3 The first flexible hinge 3-1-1-2 and the second flexible hinge 3-1-1-3 can be straight round type hinges, elliptic type hinges, hyperbolic type hinges, parabolic type hinges and right angle type hinges, and in the specific embodiment, the first flexible hinge 3-1-1-2 and the second flexible hinge 3-1-1-3 are straight round type hinges; the two sides of the driving hinge I3-1-1 are provided with rigid beams I3-1-1-4 with the thickness d 2 The method comprises the steps of carrying out a first treatment on the surface of the The front end of the driving hinge I3-1-1 is provided with a beam I3-1-1-5 with the thickness d 1 Wherein d is 2 /d 1 The value of d in this embodiment is in the range of 0.1 to 1 2 /d 1 The value of (2) is 1; the driving hinge I3-1-1 is provided with a piezoelectric stack mounting groove I3-1-1-6 which is used for being matched and connected with the piezoelectric stack 3-2 to limit the position of the piezoelectric stack 3-2; the center of the beam II 3-1-2-5 at the front end of the driving hinge II 3-1-2 is provided with a driving foot II 3-1-2-1 which is used for being in contact fit with the side wall of the movable guide rail 4-2 to realize the driving of the movable guide rail 4-2, the cross section of the driving foot II 3-1-2-1 can be semicircular, parabolic, L-shaped and the like, and in the specific embodiment, the cross section of the driving foot II 3-1-2-1 is semicircular, and the radius of the driving foot II is R 1 ，R 1 For a number greater than 1, R in this embodiment 1 =1.6mm; the two ends of the rigid beam II 3-1-2-4 at one side of the driving hinge II 3-1-2 are provided with flexible hinges III 3-1-2-2, and the thickness of the flexible hinges III 3-1-2-2 is d 3 The method comprises the steps of carrying out a first treatment on the surface of the Two ends of a rigid beam II 3-1-2-4 on the other side of the driving hinge II 3-1-2 are provided withFlexible hinge IV 3-1-2-3, flexible hinge IV 3-1-2-3 has thickness d 4 The method comprises the steps of carrying out a first treatment on the surface of the Wherein d is 4 /d 3 The value of (a) is in the range of 0.1 to 0.9, d in the specific embodiment 4 /d 3 The values of the flexible hinges III 3-1-2-2 and the flexible hinges IV 3-1-2-3 are 0.5, and the flexible hinges III 3-1-2-2 and the flexible hinges IV 3-1-2-3 can be straight round hinges, elliptic hinges, hyperbolic hinges, parabolic hinges and right angle hinges; two sides of the driving hinge II 3-1-2 are provided with rigid beams II 3-1-2-4 with the thickness d 2 The method comprises the steps of carrying out a first treatment on the surface of the The front end of the driving hinge II 3-1-2 is provided with a beam II 3-1-2-5 with the thickness d 1 Wherein d is 2 /d 1 The value of d in this embodiment is in the range of 0.1 to 1 2 /d 1 The value of (2) is 1; the second driving hinge 3-1-2 is provided with a second piezoelectric stack mounting groove 3-1-2-6 which is used for being connected with the piezoelectric stack 3-2 in a matched manner to limit the position of the piezoelectric stack 3-2; the two ends of the stator bracket 3-1-3 are provided with through holes 3-1-3-1 which are used for being matched with stator fixing nails 3-5 to realize the fastening connection of the stator assembly 3 and the base 1; the middle parts of the side walls of the two cross beams of the stator support 3-1-3 are provided with pretension screw screwing holes 3-1-3-2 which are used for screwing with the pretension screws 3-4 to realize pretension of the piezoelectric stack 3-2.
The piezoelectric stack 3-2 is placed in the first piezoelectric stack mounting groove 3-1-1-6 and the second piezoelectric stack mounting groove 3-1-2-6, after the piezoelectric stack 3-2 is electrified, the piezoelectric stack 3-2 can excite the stator 3-1 to deform based on the inverse piezoelectric effect of the piezoelectric element, and the first driving foot 3-1-1 and the second driving foot 3-1-2-1 can laterally displace, so that the mover assembly 4 is excited to drive the movable guide rail 4-2 to drive the movable platform 2 to move, and in the specific embodiment, the piezoelectric stack 3-2 is a piezoelectric stack of the AE0505D16F model of THORLABS company in U.S.A.
The end face of one side of the gasket 3-3 is in contact fit with the piezoelectric stack 3-2, the end face of the other side of the gasket is in contact fit with the piezoelectric stack mounting groove I3-1-1-6 or the piezoelectric stack mounting groove II 3-1-2-6, preliminary pre-tightening of the piezoelectric stack 3-2 is achieved, the piezoelectric stack 3-2 can be effectively prevented from generating shear strain or uneven stress, the gasket 3-3 can be made of tungsten steel, 45-gauge steel and other materials, and the gasket 3-3 in the specific embodiment is made of tungsten steel.
The pre-tightening screw 3-4 is used for being screwed with the pre-tightening screw screwing hole 3-1-3-2 to realize further pre-tightening of the piezoelectric stack 3-2.
The stator fixing nails 3-5 are used for being matched with the through holes 3-1-3-1 and connected with the stator fixing internal thread holes 1-3-1 in a screwed mode, and therefore the stator assembly 3 is fixedly connected with the base 1.
The mover assembly 4 comprises a fixed guide rail 4-1, a movable guide rail 4-2, a guide rail fixing nail 4-3, a guide rail limit bolt 4-4 and a guide rail retainer 4-5.
The upper end face of the fixed guide rail 4-1 is provided with a countersunk through hole II 4-1-1 which is used for being matched with the guide rail fixed nail 4-3; limiting threaded holes 4-1-2 are formed in the end faces of the two sides of the fixed guide rail 4-1 and are used for being connected with guide rail limiting bolts 4-4 in a screwed mode, and limiting of the position of the fixed guide rail 4-1 is achieved.
The upper end face of the movable guide rail 4-2 is provided with an internal threaded hole 4-2-1 which is used for being screwed with the table top fixed nail 2-2 to realize the fastening connection of the movable platform 2 and the movable guide rail 4-2; limiting threaded holes two 4-2-2 are formed in the end faces of two sides of the movable guide rail 4-2 and are used for being connected with the guide rail limiting bolts 4-4 in a screwed mode, and limiting of the position of the movable guide rail 4-2 is achieved.
The guide rail fixing nails 4-3 are used for being matched with the countersunk through holes II 4-1-1 arranged on the fixed guide rail 4-1 and are connected with the guide rail fixing internal thread holes 1-1 in a screwed mode, and therefore the base 1 is fixedly connected with the fixed guide rail 4-1.
The guide rail limit bolt 4-4 is used for being in screwed connection with the first limit threaded hole 4-1-2 and the second limit threaded hole 4-2-2, limiting the positions of the fixed guide rail 4-1 and the movable guide rail 4-2, and preventing the guide rail retainer 4-5 and the rollers from sliding out of the guide rail.
The rail holders 4-5 and rollers provide support for the sliding movement of the sub-assembly 4.
Working principle: the piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions is characterized in that the working process of the piezoelectric precise linear driving device is approximately divided into three stages: a forward motion phase, a reverse motion phase and a positioning stationary phase; the forward motion stage is that when the piezoelectric stack 3-2 in the driving hinge I3-1-1 is electrified with an excitation electric signal, the piezoelectric stack 3-2 generates axial elongation based on the inverse piezoelectric effect, and the existence of the flexible hinge I3-1-1-2 and the flexible hinge II 3-1-1-3 causes the difference of the axial rigidity of the rigid beams I3-1-1-4 at the two sides of the driving hinge I3-1-1, so that the driving foot I3-1-1-1 generates lateral displacement, the positive pressure of the driving foot I3-1-1-1 and the movable guide rail 4-2 is increased, and the movable guide rail 4-2 is driven to drive the movable platform 2 to perform forward motion; the reverse motion stage is that when the piezoelectric stack 3-2 positioned in the driving hinge II 3-1-2 is electrified with an excitation electric signal, the piezoelectric stack 3-2 generates axial elongation based on the inverse piezoelectric effect, and the existence of the flexible hinge III 3-1-2-2 and the flexible hinge IV 3-1-2-3 causes the difference of the axial rigidity of the rigid beams II 3-1-2-4 at the two sides of the driving hinge II 3-1-2, so that the driving hinge II 3-1-2-1 generates lateral displacement, the positive pressure of the driving hinge II 3-1-2-1 and the movable guide rail 4-2 is increased, and the movable guide rail 4-2 drives the movable platform 2 to perform reverse motion; the piezoelectric stacks 3-2 positioned in the first driving hinge 3-1-1 and the second driving hinge 3-1-2 are alternately electrified to excite the electric signals, so that the reciprocating motion of the mobile platform 2 can be realized; the positioning rest stage is that when the piezoelectric stacks 3-2 in the first driving hinge 3-1-1 and the second driving hinge 3-1-2 are simultaneously electrified with excitation electric signals, the thicknesses of the first flexible hinge 3-1-1-2 and the second flexible hinge III 3-1-2-2 are the same, and the thicknesses of the second flexible hinge 3-1-1-3 and the second flexible hinge IV 3-1-2-3 are the same, so that the lateral displacement generated by the first driving hinge 3-1-1-1 and the second driving hinge 3-1-2-1 is the same, but the directions are opposite, and therefore, the limitation of the position and the motion state of the movable platform 2 can be realized, and the positioning of the movable platform 2 is further realized.
The above description is only a preferred example of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present application should be included in the protection scope of the present application.
Claims (6)
1. A piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion is characterized in that: the device comprises a base (1), a moving platform (2), a stator assembly (3) and a rotor assembly (4), wherein the base (1) is fixedly connected with the stator assembly (3) through stator fixing nails (3-5); the base (1) is fixedly connected with the rotor assembly (4) through guide rail fixing nails (4-3); the movable platform (2) is fixedly connected with the rotor assembly (4) through table top fixing nails (2-2); the stator component (3) is in contact fit with the rotor component (4) through the driving foot one (3-1-1-1) and the driving foot two (3-1-2-1);
the stator assembly (3) is: the stator (3-1) is provided with a first driving hinge (3-1-1), a second driving hinge (3-1-2) and a stator bracket (3-1-3); the center position of the beam I (3-1-1-5) at the front end of the driving hinge I (3-1-1) is provided with a driving foot I (3-1-1-1); the flexible hinges I (3-1-1-2) are arranged at the two ends of the rigid beam I (3-1-1-4) at one side of the driving hinge I (3-1-1), the flexible hinges II (3-1-1-3) are arranged at the two ends of the rigid beam I (3-1-1-4) at the other side of the driving hinge I (3-1-1), and the value range of the ratio of the thicknesses of the flexible hinges II (3-1-1-3) to the flexible hinges I (3-1-1-2) is 0.1-0.9; the ratio of the thickness of the rigid beam I (3-1-1-4) to the thickness of the cross beam I (3-1-1-5) is in the range of 0.1-1; the piezoelectric driving device comprises a driving hinge I (3-1-1) and a driving hinge II (3-1-2-2), wherein a piezoelectric stack mounting groove I (3-1-1-6) is arranged on the driving hinge I (3-1-1), a driving foot II (3-1-2-1) is arranged at the center of a beam II (3-1-2-5) at the front end of the driving hinge II (3-1-2), a flexible hinge III (3-1-2-2) is arranged at the two ends of a rigidity Liang Er (3-1-2-4) at one side of the driving hinge II (3-1-2), a flexible hinge IV (3-1-2-3) is arranged at the two ends of a rigidity Liang Er (3-1-2-4) at the other side of the driving hinge II (3-1-2), and the ratio of the thickness of the flexible hinge IV (3-1-2-3) to the flexible hinge III (3-1-2-2) is 0.1-0.9; the ratio of the rigidity Liang Er (3-1-2-4) to the thickness of the beam II (3-1-2-5) is 0.1-1; the second driving hinge (3-1-2) is provided with a second piezoelectric stack mounting groove (3-1-2-6); through holes (3-1-3-1) are arranged at two ends of the stator bracket (3-1-3); the middle parts of the side walls of the two cross beams of the stator bracket (3-1-3) are provided with pre-tightening screw screwing holes (3-1-3-2); the piezoelectric stack (3-2) is arranged in the first piezoelectric stack mounting groove (3-1-1-6) and the second piezoelectric stack mounting groove (3-1-2-6), after the piezoelectric stack is electrified, the piezoelectric stack (3-2) can excite the stator (3-1) to deform and enable the first driving foot (3-1-1) and the second driving foot (3-1-2-1) to laterally displace based on the inverse piezoelectric effect of the piezoelectric element, and then the mover assembly (4) is excited to enable the movable guide rail (4-2) to drive the movable platform (2) to move; one side end face of the gasket (3-3) is in contact fit with the piezoelectric stack (3-2), and the other side end face of the gasket is in contact fit with the piezoelectric stack mounting groove I (3-1-1-6) or the piezoelectric stack mounting groove II (3-1-2-6), so that the piezoelectric stack (3-2) is preliminarily pre-tensioned, and the piezoelectric stack (3-2) can be effectively prevented from generating shear strain or uneven stress;
the rotor assembly (4) comprises a fixed guide rail (4-1), a movable guide rail (4-2), guide rail fixing nails (4-3), guide rail limit bolts (4-4) and a guide rail retainer (4-5); the upper end face of the fixed guide rail (4-1) is provided with a countersunk through hole II (4-1-1), and the two side end faces of the fixed guide rail (4-1) are provided with limiting threaded holes I (4-1-2); an inner threaded hole (4-2-1) is formed in the upper side end face of the movable guide rail (4-2), and a limiting threaded hole II (4-2-2) is formed in the two side end faces of the movable guide rail (4-2); the guide rail fixing nail (4-3) is matched with a countersunk through hole II (4-1-1) of the fixed guide rail (4-1) and is screwed with the guide rail fixing internal threaded hole (1-1-1); the guide rail limit bolt (4-4) is in screwed connection with the first limit threaded hole (4-1-2) and the second limit threaded hole (4-2-2), so that the positions of the fixed guide rail (4-1) and the movable guide rail (4-2) are limited, and the guide rail retainer (4-5) and the rollers are prevented from sliding out of the guide rail; the guide rail retainers (4-5) and rollers provide support for sliding movement of the mover assembly (4).
2. The piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions according to claim 1, wherein: the base (1) is: the fixed guide rail supporting surfaces (1-1) are arranged at the end parts of the two sides of the base (1), and guide rail fixed internal thread holes (1-1-1) are formed in the fixed guide rail supporting surfaces (1-1); the movable guide rail movable surfaces (1-2) are arranged at the end parts of the two sides of the base (1) and are close to the inner sides of the fixed guide rail supporting surfaces (1-1), and the height of the movable guide rail movable surfaces is lower than that of the fixed guide rail supporting surfaces (1-1), so that the movable guide rail movable surfaces (1-2) are prevented from interfering with the movable guide rails (4-2); the stator assembly support column (1-3) is arranged in the middle of the upper surface of the base (1), and a stator fixing internal thread hole (1-3-1) is formed in the middle of the stator assembly support column (1-3).
3. The piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions according to claim 1, wherein: the mobile platform (2) is: the two side edges of the upper surface of the table top (2-1) are uniformly provided with countersunk through holes I (2-1-1), and the two side edges of the side wall of the table top (2-1) are provided with guide rail accommodating holes (2-1-2) so as to facilitate the in and out of the fixed guide rail (4-1) when the movable platform (2) moves and prevent the movable platform (2) from interfering with the fixed guide rail (4-1); the upper surface of the mobile platform (2) is uniformly provided with M rows and N columns of internal threaded holes (2-1-3), and M, N is a positive integer greater than or equal to 1.
4. The piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions according to claim 1, wherein: the cross sections of the driving foot I (3-1-1-1) and the driving foot II (3-1-2-1) are semicircular, parabolic and L-shaped.
5. The piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions according to claim 1, wherein: the first flexible hinge (3-1-1-2), the second flexible hinge (3-1-1-3), the third flexible hinge (3-1-2-2) and the fourth flexible hinge (3-1-2-3) are straight round hinges, elliptic hinges, hyperbolic hinges, parabolic hinges or right angle hinges.
6. The piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motions according to claim 1, wherein: the gasket (3-3) is made of tungsten steel or 45 # steel.
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| CN108696179B (en) * | 2018-05-21 | 2023-10-20 | 吉林大学 | Auxiliary pressurizing type piezoelectric stick-slip linear motor and excitation method thereof |
| CN109818524B (en) * | 2019-03-22 | 2023-10-20 | 吉林大学 | Piezoelectric precision driving device and method based on bird wing-shaped bionic flexible mechanism |
| CN112271953B (en) * | 2020-10-30 | 2022-09-02 | 浙江工业职业技术学院 | Inchworm stick-slip hybrid drive type piezoelectric linear driver and installation process |
| CN115954043A (en) * | 2022-12-15 | 2023-04-11 | 山东大学 | Asymmetric differential micro-nano linear motion platform and working method |
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