CN203251240U - Positive pressure adjustable micro nano stick slip inertia drive platform - Google Patents
Positive pressure adjustable micro nano stick slip inertia drive platform Download PDFInfo
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- CN203251240U CN203251240U CN 201320253409 CN201320253409U CN203251240U CN 203251240 U CN203251240 U CN 203251240U CN 201320253409 CN201320253409 CN 201320253409 CN 201320253409 U CN201320253409 U CN 201320253409U CN 203251240 U CN203251240 U CN 203251240U
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Abstract
The utility model relates to a positive pressure adjustable micro nano stick slip inertia drive platform, and relates to precision and ultra precision machining, micro nano operation robots, micro electro mechanical systems, large-scale integrated circuit manufacturing, biotechnology and other important fields of science and engineering. The device is mainly composed of a positive pressure adjustable precision drive unit and a linear motion unit. The precision drive unit is composed of a manual precision translation stage and a piezoelectric driver. The manual precision translation stage can adjust the positive pressure between the piezoelectric driver and a workbench. Piezoelectric stack is packaged in the piezoelectric driver. The linear stepping feeding of the workbench is realized based on a stick slip principle. The linear motion unit is composed of a precision rolling guide and a workbench, and the linear motion of the worktable is ensured. The positive pressure adjustable micro nano stick slip inertia drive platform provided by the utility model can be used for the fields of high precision drive and machining, large-scale integrated circuits and micro operation robots, and has the advantages of simple structure, stable work, high efficiency, less investment, high benefit and the like.
Description
Technical field
The present invention relates to precision and ultra-precision machining, micro-nano manipulation robot, MEMS (micro electro mechanical system) field, particularly the adjustable micro/nano level stick-slip inertia of a kind of normal pressure drives platform.
Background technology
The development of making rapid progress along with science and technology is in recent years humanly more and more paid attention to microcosmos, and wherein the research of micro-nano science and technology aspect has also obtained considerable progress.Be accompanied by the fast development in the fields such as precision and ultra-precision machining, electronics, biotechnology, accurate measurement, the micro-nano accurate Driving technique that normal pressure is adjustable and the requirement of precision positioning technology are more and more higher, and each large scientific research institution research is also actively being studied micro-nano accurate the driving with location technology.Wide range and high-resolution and depositing becomes the bottleneck of the tight Driving technique development of restriction throughout the year, although the traditional macro drive unit can satisfy its range demand, but resolution is too low, and the drive unit resolution of macroscopic view can guarantee, but range is too little, efficient is low.The exploitation of the high efficiency driver apparatus that the normal pressure of present superior performance is adjustable just seems very important.Because the piezoelectric stack volume is little, frequency response is high, heating less, High power output, noiseless, steady performance, in Precision Machining and the location technology extensively employing based on the novel high-precision drive unit of piezoelectric stack drive source.Often there are the shortcomings such as mechanism is complicated, size is large, precision is low, round resetting is poor in common driver, therefore, design a kind of positioning accuracy and repetitive positioning accuracy function admirable, and can realize that the stick-slip inertia driving platform of the micro/nano level that normal pressure is adjustable extremely is necessary.
Summary of the invention
The object of the present invention is to provide the adjustable micro/nano level stick-slip inertia of a kind of normal pressure to drive platform, based on inertia-friction stick-slip principle, can realize the straight-line novel precise Piexoelectric actuator of the adjustable high-precision stepping of normal pressure, solve the problems referred to above that prior art exists.Can realize the accurate driving of the adjustable micro/nano level of normal pressure, and have the characteristics such as steady, reliable, that operating efficiency is high that drive.The present invention is by the normal pressure of manual translation platform adjustment precision piezoelectric actuator and workbench, and wherein two piezoelectric stacks in the accurate piezoelectric actuator drive according to certain sequential, finally realize the stick-slip of workbench.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
The micro/nano level stick-slip inertia that normal pressure is adjustable drives platform, comprise accurate driver element and linear motion unit that normal pressure is adjustable, described accurate driver element is realized the accurate driving of micro/nano level by the stick-slip principle of inertia, and the normal pressure between the workbench 12 can be regulated by the precession handle 1 on the manual accurate translation stage; Flexible hinge 6 utilizes its elastic restoring force can guarantee reliable operation, and is efficient;
Described accurate driver element is comprised of manual accurate translation stage and accurate piezoelectric actuator;
The translation stage slide rail that described manual accurate translation stage comprises precession handle 1, cooperatively interact, slide block 2,3 and top board 17, described manual accurate translation stage is fixedly installed on the pedestal 15, described precession handle 1 is connected with flexible hinge 6, and described top board 17 is fixed on the side of manual accurate translation stage by screw V 16;
Described accurate piezoelectric actuator is comprised of flexible hinge 6, driving piezoelectric stack I, II 8,9, described driving piezoelectric stack I, II 8,9 are separately positioned in the flexible hinge 6, drive the elongation that piezoelectric stack I 8 drives flexible hinge 6, drive piezoelectric stack II 9 and drive flexible hinge 6 compression workbench 12, by the sequential realization flexible hinge 6 between control driving piezoelectric stack I, the II 8,9 and the stick-slip between the workbench 12, and then it is accurate mobile to drive workbench 12 steppings.
Described workbench 12 carries out precision based on the stick-slip principle of inertia and drives.
Described flexible hinge 6 is regulated by the precession handle 1 of manual translation platform with the normal pressure that contacts between the workbench 12.
Described driving piezoelectric stack I, II 8,9 adopt the piezoelectric element PZT of body controllable face type, and its stick-slip is by the sequencing control that drives piezoelectric stack I, II 8,9 control voltages is realized.
Described flexible hinge 6 carries out the transmission of load.
Described flexible hinge 6 upper ends and workbench 12 pressing sections are arcuate structure.
Described precession handle 1 is self-locking precession handle.
Described translation stage slide block 3 is connected with contiguous block 5 by screw I 4, and flexible hinge 6 is connected with contiguous block 5 by screw II 7.
Described workbench 12 is arranged on the slide block 10 by screw III 11, and described slide block 10 cooperatively interacts with guide rail 14, and described guide rail 14 is fixed on the pedestal 15 by screw IV 13.
Beneficial effect of the present invention is: can realize the accurate driving of the adjustable micro/nano level of normal pressure function, and have the characteristics such as steady, reliable, that operating efficiency is high that drive.Can be applicable to the important Scientific Engineering fields such as precision and ultra-precision machining, micro-manipulating robot, MEMS (micro electro mechanical system), large scale integrated circuit manufacturing, biotechnology, purpose be to promote MEMS (micro electro mechanical system) the fine motion precision, reduce physical dimension, improve simultaneously the inferior positions such as the bigger than normal and performance of complex structure, the size of legacy drive is unreliable, the advantages such as that the present invention has is simple in structure, working stability, efficient height, small investment, benefit height, application prospect is comparatively wide.
Description of drawings
Accompanying drawing described herein is used to provide a further understanding of the present invention, consists of the application's a part, and illustrative example of the present invention and explanation thereof are used for explaining the present invention, do not consist of improper restriction of the present invention.
Fig. 1 is axial schematic diagram of the present invention.
Fig. 2 is that master of the present invention looks schematic diagram.
Fig. 3 is schematic top plan view of the present invention.
Fig. 4 is flexible hinge schematic diagram of the present invention.
Among the figure:
1. precession handle; 2. translation stage slide rail; 3. translation stage slide block; 4. screw I; 5. contiguous block; 6. flexible hinge;
7. screw II; 8. drive the piezoelectric stack I; 9. drive the piezoelectric stack II; 10. slide block; 11. screw III;
12. workbench; 13. screw IV; 14. guide rail; 15. pedestal; 16. screw V; 17. top board.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Extremely shown in Figure 4 referring to Fig. 1, the micro/nano level stick-slip inertia that normal pressure of the present invention is adjustable drives platform, mainly comprise accurate driver element and linear motion unit that normal pressure is adjustable, described accurate driver element is realized the accurate driving of micro/nano level by the stick-slip principle of inertia, and the normal pressure between the workbench 12 can be regulated by the precession handle 1 on the manual accurate translation stage; Flexible hinge 6 utilizes its elastic restoring force can guarantee reliable operation, and is efficient;
Described accurate driver element is comprised of manual accurate translation stage and accurate piezoelectric actuator;
The translation stage slide rail that described manual accurate translation stage comprises precession handle 1, cooperatively interact, slide block 2,3 and top board 17, described manual accurate translation stage is fixedly installed on the pedestal 15, described precession handle 1 is connected with flexible hinge 6, and described top board 17 is fixed on the side of manual accurate translation stage by screw V 16;
Described accurate piezoelectric actuator is comprised of flexible hinge 6, driving piezoelectric stack I, II 8,9, described driving piezoelectric stack I, II 8,9 are separately positioned in the flexible hinge 6, drive the elongation that piezoelectric stack I 8 drives flexible hinge 6, drive piezoelectric stack II 9 and drive flexible hinge 6 compression workbench 12, by the sequential realization flexible hinge 6 between control driving piezoelectric stack I, the II 8,9 and the stick-slip between the workbench 12, and then it is accurate mobile to drive workbench 12 steppings.
Described workbench 12 carries out precision based on the stick-slip principle of inertia and drives.
Described flexible hinge 6 is regulated by the precession handle 1 of manual translation platform with the normal pressure that contacts between the workbench 12.
Described driving piezoelectric stack I, II 8,9 adopt the piezoelectric element PZT of body controllable face type, and its stick-slip is by the sequencing control that drives piezoelectric stack I, II 8,9 control voltages is realized.
Described flexible hinge 6 carries out the transmission of load.
Described flexible hinge 6 upper ends and workbench 12 pressing sections are arcuate structure.
Described precession handle 1 is self-locking precession handle.
Described translation stage slide block 3 is connected with contiguous block 5 by screw I 4, and flexible hinge 6 is connected with contiguous block 5 by screw II 7.
Described workbench 12 is arranged on the slide block 10 by screw III 11, and described slide block 10 cooperatively interacts with guide rail 14, and described guide rail 14 is fixed on the pedestal 15 by screw IV 13.
To shown in Figure 4, specific works process of the present invention is as follows referring to Fig. 1:
The realization that the workbench stick-slip drives, initial condition: the precession handle 1 on the rotation precise manual translation stage is regulated and is contacted distance, i.e. contact normal pressure in the stick-slip process between flexible hinge 6 and the workbench 12.Driving piezoelectric stack I, II 8,9 in the flexible hinge 6 are all not charged, and system is in free state, and this moment, workbench 12 was in the state of moving about; After driving 9 energisings of piezoelectric stack II, extended by inverse piezoelectric effect, force flexible hinge 6 distortion to compress workbench 12, piezoelectric stack I 8 is slowly switched on afterwards, because the effect of the stiction between flexible hinge 6 and the workbench 12, the two is in viscous state, and then drive workbench 12 moves; During sliding mode, drive rapidly outage retraction of piezoelectric stack I, II 8,9, flexible hinge 6 is at the effect of its elastic force rejuvenate beginning state next time, because the inertia of workbench 12 produces displacement movement hardly simultaneously.Repeat above-mentioned motion, workbench 12 will produce the stepping rectilinear motion.
The stick-slip inertia that a kind of normal pressure that the present invention relates to is adjustable drives the motion of platform to carry out according to strict sequential logic, change piezoelectric stack control sequential, can change the direction of motion, and since adopted piezoelectric stack as drive source and flexible hinge as power transmitting elements, have heating little, drive steadily, reliable, efficient characteristics, and can realize the functions such as precise motion that the micro/nano level normal pressure is adjustable.
The above is preferred embodiment of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various modifications and variations.All any modifications that the present invention is done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. the adjustable micro/nano level stick-slip inertia of normal pressure drives platform, comprise accurate driver element and linear motion unit that normal pressure is adjustable, it is characterized in that: described accurate driver element is realized the accurate driving of micro/nano level by the stick-slip principle of inertia, and the normal pressure between the workbench (12) is regulated by the precession handle (1) on the manual accurate translation stage;
Described accurate driver element is comprised of manual accurate translation stage and accurate piezoelectric actuator;
Described manual accurate translation stage comprises precession handle (1), the translation stage slide rail that cooperatively interacts, slide block (2,3) and top board (17), described manual accurate translation stage is fixedly installed on the pedestal (15), and described precession handle (1) is connected with flexible hinge (6);
Described accurate piezoelectric actuator is by flexible hinge (6), drive the piezoelectric stack I, II (8,9) form, described driving piezoelectric stack I, II (8,9) be separately positioned in the flexible hinge (6), drive the elongation that piezoelectric stack I (8) drives flexible hinge (6), drive piezoelectric stack II (9) and drive flexible hinge (6) compression workbench (12), drive the piezoelectric stack I by control, II (8,9) sequential between realizes the stick-slip between flexible hinge (6) and the workbench (12), and then it is accurate mobile to drive workbench (12) stepping.
2. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, it is characterized in that: described workbench (12) carries out precision based on the stick-slip principle of inertia and drives.
3. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, it is characterized in that: described flexible hinge (6) is regulated by the precession handle (1) of manual translation platform with the normal pressure that contacts between the workbench (12).
4. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, it is characterized in that: described driving piezoelectric stack I, II (8,9) adopt the piezoelectric element PZT of body controllable face type, and its stick-slip is by the sequencing control that drives piezoelectric stack I, II (8,9) control voltage is realized.
5. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, and it is characterized in that: described flexible hinge (6) carries out the transmission of load.
6. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, it is characterized in that: described flexible hinge (6) upper end is arcuate structure with workbench (12) pressing section.
7. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, and it is characterized in that: described precession handle (1) is self-locking precession handle.
8. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, it is characterized in that: described translation stage slide block (3) is connected with contiguous block (5) by screw I (4), and flexible hinge (6) is connected with contiguous block (5) by screw II (7).
9. the adjustable micro/nano level stick-slip inertia of normal pressure according to claim 1 drives platform, it is characterized in that: described workbench (12) is arranged on the slide block (10) by screw III (11), described slide block (10) cooperatively interacts with guide rail (14), and described guide rail (14) is fixed on the pedestal (15) by screw IV (13).
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| CN 201320253409 CN203251240U (en) | 2013-05-13 | 2013-05-13 | Positive pressure adjustable micro nano stick slip inertia drive platform |
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