CN105827141B - Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method - Google Patents
Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method Download PDFInfo
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- CN105827141B CN105827141B CN201610386960.5A CN201610386960A CN105827141B CN 105827141 B CN105827141 B CN 105827141B CN 201610386960 A CN201610386960 A CN 201610386960A CN 105827141 B CN105827141 B CN 105827141B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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Abstract
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor and its driving method, to solve current piezoelectricity stick-slip line motor the output mechanical performance caused by frictional force comprehensive regulation difficulty is limited the problems such as.The present invention is made up of pedestal, precompressed force adjusting device, inclined ladder shape stator and the part of mover four, the stator produces displacement equations using symmetrical flexible hinge structure, sufficient axial rigidity skewness is driven to produce lateral displacement using inclined ladder shape, is increased friction drive, is reduced frictional resistance；The regulation and control ripple complex superposition that will rub simultaneously, so as to reduce frictional resistance between rapid deformation stage fixed and moving son, realizes the comprehensive regulation to frictional force, is obviously improved Linear piezoelectric motor machinery output characteristics in the sawtooth driving ripple in stator rapid deformation stage.The present invention has the characteristics that simple in construction, precision is high, stroke is big, has good application prospect in the micro-nano such as Aero-Space, optical precision instrument and semiconductor machining precision actuation and positioning field.
Description
Technical field
The present invention relates to a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor and its driving method, belong to micro-
Receive precision actuation and field of locating technology.
Background technology
Piezoelectricity stick-slip line motor is a kind of inverse piezoelectric effect using piezoelectric element, is swashed under the excitation of Asymmetric Electric signal
Send out oscillator（Or stator）Micro breadth oscillation is produced, is coupled by the friction between oscillator and mover and realizes the accurate micro- of mechanical energy output
Receive driver.According to the difference of driving operation principle, piezoelectricity stick-slip line motor is broadly divided into resonance type piezo-electric motor（It is also referred to as super
Sound wave motor）With off-resonance type piezo-electric motor（Also referred to as piezoelectricity stick-slip motor）Two major classes.Compared with resonance type piezo-electric motor, piezoelectricity
Stick-slip line motor has the advantages that simple and compact for structure, positioning precision is high and easy to control, is widely used in precision actuation
With the technical field of positioning.
Saw tooth excitation electric signal is mainly put on piezoelectric element by the driving of piezoelectricity stick-slip, excites stator to produce speed alternating
Motion deformation, control stator and mover mutually to be changed between " viscous " and " cunning " two kinds of motion states, utilize frictional force drives
Mover realizes that mechanical movement exports.However, due to piezoelectricity stick-slip driving slowly with the rapid deformation stage, rubbed between stator and mover
Power plays not same-action, and friction drive is shown as when being specially and slowly deforming the driving stage, and during the rapid deformation driving stage
Show as frictional resistance.The technology of being disclosed shows that current piezoelectricity stick-slip line motor can not be realized and whole driving process is rubbed
Wipe power and carry out comprehensive regulation, cause it to export mechanical performance and be limited.The stage especially is driven in the rapid deformation of stator, due to mover
Friction moves in the opposite direction, when mover inertia force is not enough to overcome the frictional resistance, it will cause mover to produce
The raw motion that retracts, shows as the jagged unstable movement output of class, deteriorates output performance, existing saw tooth excitation electric signal can not
The regulation and control that stage frictional force is driven to piezoelectricity stick-slip line motor rapid deformation are realized, further limit piezoelectricity stick-slip straight line horse
The application reached and development.
The content of the invention
It is caused to solve existing piezoelectricity stick-slip line motor due to frictional force comprehensive regulation difficulty between stator and mover
Output mechanical performance is limited, and produces the technical problem such as the unstable movement output of class zigzag, deterioration output performance, and the present invention discloses
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor and its driving method.
The technical solution adopted in the present invention is：
A kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor is by pedestal, precompressed force adjusting device, tiltedly
Trapezoidal stator and mover composition.
The pedestal includes pedestal mounting hole, precompressed power apparatus mounting hole, guide rail and contact surface and guide rail screw thread is fixedly mounted
Mounting hole.Pedestal and other peripheral units can be fixed for the pedestal mounting hole, and precompressed force adjusting device mounting hole is used for
The fixation of precompressed force adjusting device, contact surface is fixedly mounted in the guide rail and guide rail threaded mounting hole is used to install mover.
The precompressed force adjusting device includes lower fixed slide unit, upper movable slide unit, the manual adjusting screw rod of pretightning force and platform
Lock-screw.The lower fixed slide unit is provided with screwed hole and is used to be threadedly coupled with the manual adjusting screw rod of pretightning force, described
Lower fixed slide unit is provided with spring fixed cylinder and is used to install pre-compressed spring, and the lower fixed slide unit is provided with guide rail and is used for upper work
The movement of dynamic slide unit, the guide rail is provided with the stroke that guide rail stop screw can avoid movable slide unit from exceeding guide rail, under described
Fixed slide unit bottom is provided with counter sink can realize fixed installation between pedestal by screw, and the lower fixed slide unit is set
There are locking support frame and locking support frame fixing screws, lock to upper movable slide unit can be realized by adjusting platform lock-screw
Tightly.The upper movable slide unit upper surface is provided with screwed hole and is used to install inclined ladder shape stator, and the upper movable slide unit is provided with flat
The tight screw mounting hole of stand lock is threadedly coupled with platform lock-screw.
The inclined ladder shape stator includes hinge, piezoelectric stack, pretension bolt and the adjust pad of frame-shaped construction.The frame shape
The hinge of structure uses the flexible hinge of symmetrical rectangular structure, and the hinge of the frame-shaped construction is provided with clamping bolt mounting hole,
The hinge of frame-shaped construction is threadably secured with the screwed hole on upper movable slide unit by bolt and is connected.The frame-shaped construction
It is provided with the straight round flexible hinge in 2 the right on the right side of hinge, left side is provided with 2 left sides directly round flexible hinge, described 2
Directly directly round flexible hinge is attached by buckstay for round flexible hinge and 2 left sides on the right, the straight circle in specially 2 the right
Type flexible hinge is attached by buckstay, and directly round flexible hinge is attached by buckstay on 2 left sides, and the right
Directly round flexible hinge is attached also by buckstay for straight round flexible hinge and the left side, and the hinge of the frame-shaped construction is set
There is inclined ladder shape stator driving sufficient, the piezoelectric stack is fixedly mounted on the hinge of frame-shaped construction by pretension bolt, sawtooth waveforms
Electric signal excitation piezoelectric stack produce power output, be delivered to by adjust pad on crossbeam, between the crossbeam and tapered plane because
Axial rigidity skewness and produce lateral displacement.Friction drive when increase slowly deforms the driving stage, reduces rapid deformation
Frictional resistance during the driving stage, the comprehensive regulation to frictional force can be achieved.The inclined ladder shape stator driving foot end face accordingly scribbles
Friction material, the motion of driving mover, pre-loading screw mounting hole are threadedly coupled inclined ladder shape stator driving with pre-loading screw enough, institute
State and adjust pad is provided between piezoelectric stack and pre-loading screw.
The mover is biserial decussation roller guide rail, including movable guiding rail, guide rail caging bolt, fixed guide rail, biserial are handed over
Pitch roller guide installation bolt and biserial decussation roller guide holder.The fixed guide rail is pacified by biserial decussation roller guide rail
Dress bolt and guide rail threaded mounting hole are fixedly mounted contact surface with guide rail and fixed, and the fixed guide rail is provided with biserial decussation roller
Guide holder and roller provide support for the slip of mover, and the both ends setting of the movable guiding rail of the mover and fixed guide rail is led
Rail caging bolt carries out spacing.
Complex incentive electric signal employed in the driving method is quickly become by friction regulation and control ripple complex superposition in stator
In the sawtooth waveforms in shape stage, the driving ripple is sawtooth waveforms, and the friction regulation and control ripple is sine wave.The driving method can reduce
Frictional resistance between rapid deformation stage stator and mover, suppress the motion generation that retracts, wherein sawtooth period is T1, excitation
Voltage magnitude is V1, symmetry D, friction regulation and control wave period is T2, driving voltage amplitude is V2, sawtooth waveforms and friction regulate and control ripple
Cycle ratio be T1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
The beneficial effects of the invention are as follows：
The present invention passes through complex incentive due to using the inclined ladder shape stator structure with frictional force comprehensive regulation function
Electric signal enters row energization, increases stator and slowly deforms friction drive between driving stage stator and mover, it is fast to reduce stator
Frictional resistance between speed deformation driving stage stator and mover, realizes the friction that process is entirely driven to piezoelectricity stick-slip line motor
Power carries out comprehensive regulation, can be obviously improved piezoelectricity stick-slip line motor machinery output characteristics, suppresses the generation of displacement rollback motion.
Compared with current prior art, power output lifting more than 10%, output speed lifting more than 25%, delivery efficiency lifting more than 35%,
Displacement rollback rate reduces by more than 50%, and positioning precision is up to nanoscale under open loop condition.
Brief description of the drawings
The structure that Fig. 1 show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor proposed by the present invention is shown
It is intended to；
Fig. 2 show a kind of knot of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor pedestal proposed by the present invention
Structure schematic diagram；
Fig. 3 show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor precompression proposed by the present invention and adjusted
The structural representation of engagement positions；
Fig. 4 show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor precompression proposed by the present invention and adjusted
The structural representation of the lower fixed slide unit of engagement positions；
Fig. 5 show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor precompression proposed by the present invention and adjusted
The structural representation of the upper movable slide unit of engagement positions；
Fig. 6, which show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor inclined ladder shape proposed by the present invention, to be determined
The structural representation of son；
Fig. 7, which show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor inclined ladder shape proposed by the present invention, to be determined
The structural representation of the frame-shaped construction flexible hinge of son；
Fig. 8, which show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor inclined ladder shape proposed by the present invention, to be determined
The partial enlargement structural representation of son；
Fig. 9 show a kind of knot of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor mover proposed by the present invention
Structure schematic diagram；
Figure 10 show a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor driving side proposed by the present invention
The electric signal waveform schematic diagram of method.
Embodiment
Embodiment one：Illustrate present embodiment with reference to Fig. 1 ~ Fig. 9.Present embodiments provide for a kind of inclined ladder shape fortune
The specific embodiment of dynamic change type precision piezoelectricity stick-slip line motor.A kind of inclined ladder shape motion change type precision piezoelectricity glues
Sliding line motor is made up of pedestal 1, precompressed force adjusting device 2, inclined ladder shape stator 3 and mover 4.
The pedestal 1 includes pedestal mounting hole 1-1, precompressed power apparatus mounting hole 1-2, guide rail and contact surface 1-3 is fixedly mounted
With guide rail threaded mounting hole 1-4.The pedestal 1 can use high magnetic stainless steel material.The pedestal mounting hole 1-1 pacifies for pedestal
Screwed hole is filled, pedestal 1 and other peripheral units can be fixed, the precompressed force adjusting device mounting hole 1-2, for precompressed
The fixation of force adjusting device 2, it is dynamic for being fixedly mounted that contact surface 1-3 and guide rail threaded mounting hole 1-4 is fixedly mounted in the guide rail
Son 4.
The precompressed force adjusting device 2 is the precompression adjustment that inclined ladder shape moves change type precision piezoelectricity stick-slip line motor
Mechanism, the precompressed force adjusting device 2 include lower fixed slide unit 2-1, upper movable slide unit 2-2, the manual adjusting screw rod 2-3 of pretightning force
Peaceful platform lock-screw 2-4.The lower fixed slide unit 2-1 is provided with screwed hole 2-1-1, and it is used to adjust spiral shell manually with pretightning force
Bar 2-3 is threadedly coupled, and the lower fixed slide unit 2-1 is provided with spring fixed cylinder 2-1-2, for installing pre-compressed spring 2-
1-4, the lower fixed slide unit 2-1 are provided with guide rail 2-1-3, the movement for upper movable slide unit 2-2.The guide rail 2-1-3 is set
Be equipped with 8n guide rail stop screw 2-1-5 can avoid movable slide unit 2-2 exceed guide rail 2-1-3 stroke, wherein n be more than etc.
In 1 integer.The lower fixed slide unit 2-1 bottoms are provided with counter sink 2-1-6, can be realized between pedestal 1 by screw
It is fixedly mounted, the lower fixed slide unit 2-1 is provided with locking support frame 2-1-7 and locking support frame fixing screws 2-1-8, passed through
Adjust platform lock-screw 2-4, it is possible to achieve the locking to upper movable slide unit 2-2, prevent upper movable slide unit 2-2 after the completion of loading
Movement.The upper movable slide unit 2-2 upper surfaces are provided with screwed hole 2-2-1, described for inclined ladder shape stator 3 to be fixedly mounted
Upper movable slide unit 2-2 side is provided with platform lock-screw mounting hole 2-2-2, the platform lock-screw mounting hole 2-2-2
It is threadedly coupled with platform lock-screw 2-4.
The inclined ladder shape stator 3 includes hinge 3-1, piezoelectric stack 3-2, pretension bolt 3-3 and the adjusting pad of frame-shaped construction
Piece 3-4.The hinge 3-1 of the frame-shaped construction uses the flexible hinge of symmetrical rectangular structure, and the hinge 3-1 of the frame-shaped construction is adopted
With 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-13 titanium alloy materials.The frame-shaped construction
Hinge 3-1 be provided with clamping bolt mounting hole 3-1-1, by bolt by the hinge 3-1 of frame-shaped construction and upper movable slide unit 2-2
On screwed hole 2-2-1 be threadably secured connection, it is straight round that 2 the right are provided with the right side of the hinge 3-1 of the frame-shaped construction
Flexible hinge 3-1-2, left side are provided with 2 left sides directly round flexible hinge 3-1-7.The described straight round flexible hinge in 2 the right
Directly round flexible hinge 3-1-7 is attached by buckstay 3-1-3 for chain 3-1-2 and 2 left sides, the straight circle in specially 2 the right
Type flexible hinge 3-1-2 is attached by buckstay 3-1-3, and directly round flexible hinge 3-1-7 passes through buckstay 3- on 2 left sides
1-3 is attached, and the right directly round flexible hinge 3-1-2 and the left side directly round flexible hinge 3-1-7 also by buckstay
3-1-3 is attached；The distance between described 2 buckstay 3-1-3 are L, the straight round flexible hinge 3-1-2 in 4 the right
With 4 left sides directly round flexible hinge 3-1-7 have identical radius of corner value R1, wherein R1/L span 0.017 ~
0.09, it is ensured that directly there is round flexible hinge 3-1-7 displacement to put for 2 straight round flexible hinge 3-1-2 in the right and 2 left sides
Big ability and piezoelectric stack 3-2 have certain installing space, R in present embodiment1=1mm, L=12mm.The frame shape knot
The length that the hinge 3-1 of structure is provided with uneven the tapered plane 3-1-4, the tapered plane 3-1-4 of Stiffness Distribution is L2, wherein L2/L
Span is 1 ~ 4.The hinge 3-1 of the frame-shaped construction is provided with inclined ladder shape stator driving foot 3-1-5, the piezoelectric stack 3-
2 one end are fixedly mounted on the hinge 3-1 of frame-shaped construction by pretension bolt 3-3, and the other end contacts with crossbeam 3-1-6, described
Crossbeam 3-1-6 length is L1, wherein L1/ L spans are 1/6 ~ 5/6, angle between the crossbeam 3-1-6 and tapered plane 3-1-4
For α, wherein α spans are 10 ° ~ 80 °, and the angle α in present embodiment is 30 °.The inclined ladder shape stator 3 uses symmetrical square
The flexible hinge of shape structure carries out displacement equations, and sawtooth waveforms electric signal excitation piezoelectric stack 3-2 produces power output, passes through adjusting pad
Piece 3-4 is delivered on crossbeam 3-1-6, and Stiffness Distribution is uneven and produce vertically between the crossbeam 3-1-6 and tapered plane 3-1-4
Lateral displacement.Friction drive when increase slowly deforms the driving stage, frictional resistance when reducing the rapid deformation driving stage, can be real
Now to the comprehensive regulation of frictional force.The thickness of the inclined ladder shape stator driving foot 3-1-5 is N, and movable guiding rail 4-1 thickness is M,
Wherein N≤M can ensure effective contact area, improve transmission efficiency, wherein M=（N+1）Mm, M=8mm in present embodiment, N=
7mm.The inclined ladder shape stator driving foot 3-1-5 end faces accordingly scribble ceramic-like or glass fibre class friction material, the inclined ladder
Shape is stated stator driving foot 3-1-5 driving movers 4 and moved, and pre-loading screw mounting hole 3-1-8 and pre-loading screw 3-3 carries out screw thread company
Connect, the piezoelectric stack 3-2 can be the piezoelectric stack product of the companies such as PI or NEC.The rear end face of the piezoelectric stack 3-2 with
Be provided with adjust pad 3-4 between pre-loading screw 3-3, the front end face of the piezoelectric stack 3-2 and the hinge 3-1 of frame-shaped construction it
Between be provided with adjust pad 3-4, the purpose that the piezoelectric stack 3-2 front/rear ends set pad 3-4 is to protect piezo stack
Heap 3-2, prevent that it from producing shear strain or local pressure is uneven.By adjusting pre-loading screw 3-3 screwing length, can be achieved to pressure
Electricity stacks 3-2 axial pretightening regulation.
The mover 4 is biserial decussation roller guide rail, including movable guiding rail 4-1, guide rail caging bolt 4-2, fixed guide rail
4-3, biserial decussation roller guide rail installation bolt 4-4 and biserial decussation roller guide holder 4-5.The movable guiding rail 4-1 ends
Face accordingly scribbles ceramic-like or glass fibre class friction material, and the fixed guide rail 4-3 is installed by biserial decussation roller guide rail
Bolt 4-4 and guide rail threaded mounting hole 1-4 is fixedly mounted contact surface 1-3 with guide rail and fixed, and the fixed guide rail 4-3 is provided with double
Row decussation roller guide holder 4-5 and roller, the biserial decussation roller guide holder 4-5 and roller are the cunning of mover 4
It is dynamic that support is provided.In order to avoid biserial decussation roller guide holder 4-5 and roller skid off guide rail, respectively in the activity of mover 4
It is spacing that guide rail 4-1 and fixed guide rail 4-3 both ends set guide rail caging bolt 4-2 to carry out.
Embodiment two：Illustrate present embodiment with reference to Figure 10 figures.Present embodiments provide for a kind of inclined ladder shape fortune
The specific embodiment of dynamic change type precision piezoelectricity stick-slip line motor driving method.A kind of inclined ladder shape motion change type essence
Close piezoelectricity stick-slip line motor driving method is as follows.
Complex incentive electric signal employed in the driving method is quickly become by friction regulation and control ripple complex superposition in stator
In the driving ripple in shape stage, the driving ripple is sawtooth waveforms, and the friction regulation and control ripple is sine wave.Specifically, the driving side
Method can reduce the frictional resistance between rapid deformation stage stator and mover, suppress the motion generation that retracts, elevating mechanism output property
Energy.Wherein sawtooth period is T1, driving voltage amplitude is V1, symmetry D, friction regulation and control wave period is T2, driving voltage width
It is worth for V2, the cycle ratio of sawtooth waveforms and friction regulation and control ripple is T1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2More than 2.
Operation principle：Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method mainly compound
Under electric signal excitation, driving foot using inclined ladder shape, Stiffness Distribution is uneven and produce lateral displacement vertically, comprehensive regulation stator with
Frictional force between mover, and then lift Linear piezoelectric motor machinery output characteristics.The stator of the present invention is due to using symmetrical flexible
Linkage, driving foot using inclined ladder shape, Stiffness Distribution is uneven vertically, excites stator driving end to produce lateral displacement, adjustment
The normal pressure contacted between stator and mover, i.e., slowly deform driving stage, increase stator and the malleation contacted between mover in stator
Power, and then increase the friction drive between stator and mover, the stage is driven in stator rapid deformation, reduces stator and mover is indirect
Tactile normal pressure, and then reduce the frictional resistance between stator and mover, realize to slowly deformation driving stage friction drive with
Rapid deformation drives the comprehensive regulation of stage frictional resistance, lifts complete machine output performance.Meanwhile the present invention is by the way that friction is regulated and controled
Ripple complex superposition excites stator to be in dither state a little in the sawtooth waveforms in stator rapid deformation stage, improves stator
The driving contact state between mover, reduce the real contact area between stator and mover and actual time of contact, so as to reduce
Frictional resistance between rapid deformation driving stage fixed and moving son, suppressing to retract to move produces, and can be obviously improved piezoelectricity stick-slip line motor
Mechanical output characteristics.
In summary the content, the present invention provide a kind of inclined ladder shape motion change type precision piezoelectricity stick-slip line motor,
Lateral displacement is produced using the sufficient inequality of Stiffness Distribution vertically of inclined ladder shape driving, the friction between comprehensive regulation stator and mover
Power；Driving method provided by the invention can suppress the generation of displacement rollback motion, be obviously improved piezoelectricity stick-slip line motor machine
Tool output characteristics.The hinge of frame-shaped construction is assembled into a stator with piezoelectric stack, and assembling is simple, can easily be accommodated；Designed
Precompressed force adjusting device can easily adjust the pretightning force contacted between stator and mover.The present invention has simple in construction, precision
The features such as high and stroke is big, in the micro-nano such as Aero-Space, optical precision instrument and semiconductor machining precision actuation and positioning field
In there is good application prospect.
Claims (7)
1. a kind of inclined ladder shape moves change type precision piezoelectricity stick-slip line motor, inclined ladder shape motion change type precision piezoelectricity stick-slip
Line motor is by pedestal（1）, precompressed force adjusting device（2）, inclined ladder shape stator（3）And mover（4）Composition, wherein precompression adjust
Device（2）It is fixed on pedestal（1）On, inclined ladder shape stator（3）Installed in precompressed force adjusting device（2）On, mover（4）Installed in base
Seat（1）On；It is characterized in that the pedestal（1）Including pedestal mounting hole（1-1）, precompressed power apparatus mounting hole（1-2）, guide rail it is solid
Dingan County's attaching contacting surface（1-3）With guide rail threaded mounting hole（1-4）；The pedestal mounting hole（1-1）Screwed hole is installed for pedestal, can
By pedestal（1）It is fixed with other peripheral units, precompressed force adjusting device mounting hole（1-2）, for precompressed force adjusting device
（2）Fixation, contact surface is fixedly mounted in the guide rail（1-3）With guide rail threaded mounting hole（1-4）For mover to be fixedly mounted
（4）；The precompressed force adjusting device（2）Including lower fixed slide unit（2-1）, upper movable slide unit（2-2）, pretightning force adjust spiral shell manually
Bar 2-3 peace platform lock-screws（2-4）；The lower fixed slide unit（2-1）It is provided with screwed hole（2-1-1）, it is used for and pretension
The manual adjusting screw rod of power（2-3）It is threadedly coupled, the lower fixed slide unit（2-1）It is provided with spring fixed cylinder（2-1-2）,
For installing pre-compressed spring（2-1-4）, the lower fixed slide unit（2-1）It is provided with guide rail（2-1-3）, for upper movable slide unit
（2-2）Movement, the guide rail（2-1-3）It is provided with guide rail stop screw（2-1-5）, counter sink（2-1-6）It is real by screw
Now fix slide unit（2-1）With pedestal（1）Between connection, the lower fixed slide unit（2-1）It is provided with locking support frame（2-1-
7）With locking support frame fixing screws（2-1-8）, by adjusting platform lock-screw（2-4）Movable slide unit can be locked（2-
2）, the upper movable slide unit（2-2）Upper surface is provided with screwed hole（2-2-1）, for inclined ladder shape stator to be fixedly mounted（3）, institute
State movable slide unit（2-2）Side be provided with platform lock-screw mounting hole（2-2-2）, the platform lock-screw mounting hole
（2-2-2）With platform lock-screw（2-4）It is threadedly coupled.
A kind of 2. inclined ladder shape motion change type precision piezoelectricity stick-slip line motor according to claim 1, it is characterised in that
Described inclined ladder shape stator（3）Hinge including frame-shaped construction（3-1）, piezoelectric stack（3-2）, pretension bolt（3-3）And adjustment
Pad（3-4）, the piezoelectric stack（3-2）Pass through pre-loading screw（3-3）And adjust pad（3-4）It is fixed on the hinge of frame-shaped construction
Chain（3-1）It is interior；The hinge of the frame-shaped construction（3-1）It is provided with clamping bolt mounting hole（3-1-1）, by bolt by frame shape knot
The hinge of structure（3-1）With upper movable slide unit（2-2）On screwed hole（2-2-1）It is threadably secured connection, the frame-shaped construction
Hinge（3-1）Right side is provided with the straight round flexible hinge in 2 the right（3-1-2）, left side is provided with 2 left sides directly round flexibility
Hinge（3-1-7）, the described straight round flexible hinge in 2 the right（3-1-2）With 2 left sides directly round flexible hinge（3-1-7）
Pass through buckstay（3-1-3）It is attached, the straight round flexible hinge in specially 2 the right（3-1-2）Pass through buckstay（3-1-3）
It is attached, 2 left sides directly round flexible hinge（3-1-7）Pass through buckstay（3-1-3）It is attached, and the right is directly round
Flexible hinge（3-1-2）With the left side directly round flexible hinge（3-1-7）Also by buckstay（3-1-3）It is attached；The frame
The hinge of shape structure（3-1）It is provided with crossbeam（3-1-6）And tapered plane（3-1-4）, the piezoelectric stack（3-2）Pass through adjusting pad
Piece（3-4）Power output is delivered to crossbeam（3-1-6）On, the crossbeam（3-1-6）With tapered plane（3-1-4）For integral type knot
Structure, the hinge of the frame-shaped construction（3-1）It is provided with inclined ladder shape stator driving foot（3-1-5）, inclined ladder shape stator driving foot（3-1-
5）Positioned at the hinge of frame-shaped construction（3-1）Upper end, and respectively with the right directly round flexible hinge（3-1-2）Directly justify with the left side
Type flexible hinge（3-1-7）It is rigidly connected, inclined ladder shape stator driving foot（3-1-5）End face accordingly scribbles friction material, inclined ladder shape
Stator driving foot（3-1-5）Drive mover（4）Motion, the hinge of the frame-shaped construction（3-1）It is provided with pre-loading screw mounting hole
（3-1-8）, pre-loading screw mounting hole（3-1-8）Positioned at the hinge of frame-shaped construction（3-1）Bottom center at, pre-loading screw peace
Fill hole（3-1-8）With pre-loading screw（3-3）It is threadedly coupled, the piezoelectric stack（3-2）Rear end face and pre-loading screw（3-
3）Between be provided with adjust pad（3-4）, the piezoelectric stack（3-2）Front end face and frame-shaped construction hinge（3-1）Between
It is provided with adjust pad（3-4）, by adjusting pre-loading screw（3-3）Screwing length, can be achieved to piezoelectric stack（3-2）Axle
Adjusted to pretension.
A kind of 3. inclined ladder shape motion change type precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that
The straight round flexible hinge in 2 the right（3-1-2）With 2 left sides directly round flexible hinge（3-1-7）With identical fillet
Radius value R1, the buckstay（3-1-3）The distance between be L, the tapered plane（3-1-4）Length be L2, wherein L2/ L takes
It is 1 ~ 4 to be worth scope, the crossbeam（3-1-6）Length is L1, wherein L1/ L spans are 1/6 ~ 5/6, the crossbeam（3-1-6）
With tapered plane（3-1-4）Between angle be α, wherein α spans be 10 ° ~ 80 °.
A kind of 4. inclined ladder shape motion change type precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that
The hinge of the frame-shaped construction（3-1）Using 5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-
13 titanium alloy materials.
A kind of 5. inclined ladder shape motion change type precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that
Inclined ladder shape stator（3）Inclined ladder shape stator driving foot（3-1-5）End face accordingly scribbles ceramic-like or glass fibre class friction material.
A kind of 6. inclined ladder shape motion change type precision piezoelectricity stick-slip line motor according to claim 1, it is characterised in that
The described mover（4）For biserial decussation roller guide rail, including movable guiding rail（4-1）, guide rail caging bolt（4-2）, it is fixed
Guide rail（4-3）, biserial decussation roller guide rail installation bolt（4-4）With biserial decussation roller guide holder（4-5）；The activity
Guide rail（4-1）End face accordingly scribbles ceramic-like or glass fibre class friction material, the fixed guide rail（4-3）Intersected by biserial
Roller guide installation bolt（4-4）With guide rail threaded mounting hole（1-4）Contact surface is fixedly mounted with guide rail（1-3）It is fixed, it is described
Fixed guide rail（4-3）It is provided with biserial decussation roller guide holder（4-5）And roller, mover（4）Movable guiding rail（4-1）With
Fixed guide rail（4-3）Both ends set guide rail caging bolt（4-2）.
7. a kind of inclined ladder shape moves change type precision piezoelectricity stick-slip line motor driving method, the driving method is based on claim
Inclined ladder shape motion change type precision piezoelectricity stick-slip line motor described in 1 is realized；The driving method is characterised by that driving ripple is
Sawtooth waveforms, friction regulation and control ripple is sine wave, and wherein sawtooth period is T1, driving voltage amplitude is V1, symmetry D, friction tune
Control wave period is T2, driving voltage amplitude is V2, the cycle ratio of sawtooth waveforms and friction regulation and control ripple is T1/T2=10 ~ 100000, excitation
Voltage magnitude ratio is V1/V2More than 2.
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