CN113258825B - Piezoelectric driver control method based on stick-slip and impact principle coupling - Google Patents
Piezoelectric driver control method based on stick-slip and impact principle coupling Download PDFInfo
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- CN113258825B CN113258825B CN202110602177.9A CN202110602177A CN113258825B CN 113258825 B CN113258825 B CN 113258825B CN 202110602177 A CN202110602177 A CN 202110602177A CN 113258825 B CN113258825 B CN 113258825B
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention provides a piezoelectric driver based on stick-slip and impact principle coupling and a control method thereof, belonging to the field of precision machinery. The driver comprises an impact rotor, a stick-slip stator, a guide rail slider, a fine adjustment platform and a base. The impact rotor directly outputs intermittent impact displacement to the sliding block through an impact inertia principle; the stick-slip stator is contacted with the sliding block on the side surface through the arc-shaped head part of the flexible mechanism, so that the sliding block is pushed to move; the slide block generates linear motion without backspacing through the coupling action of the stick-slip stator and the impact rotor. The invention has the advantages that: under the drive of the same signal, the backspacing of the piezoelectric driver is restrained through the stick-slip and impact coupling effects, and the integral output performance of the driver is improved. The invention can be used in the fields of micro/nano mechanical test, optical instruments, precision machining, integrated circuit packaging, bioengineering, aerospace technology and the like.
Description
Technical Field
The invention relates to a piezoelectric driver based on stick-slip and impact principle coupling and a control method thereof, belonging to the field of precision machinery. The invention solves the problem of back-off of the stick-slip piezoelectric driver and improves the output performance of the piezoelectric driver. Can be used in the fields of micro/nano mechanical test, optical instruments, precision machining, integrated circuit packaging, bioengineering, aerospace technology and the like.
Background
With the continuous improvement of the living standard of human beings, the appearance of a plurality of industrial revolution greatly promotes the science and technology wave in the world, at present, the requirements on precision devices in the aerospace navigation, optical precision instruments and biomechanical interdisciplinary department are higher and higher, so that the driving technology capable of directly outputting precision driving enters the research field of people. At present, a driving device matched with precision output operation cannot be driven by a driving device which is driven by the driving device, because the traditional driving device is a driving device with a macroscopic size, but for precision devices, on one hand, an overlarge stroke range is not needed, and on the other hand, smaller processing precision is needed to reduce errors of the precision devices. Therefore, the research of a driving device with excellent performance and output precision in the micro-nano level is always a hot spot problem in the field of micro driving. The micro-nano driving technology is the research field, so-called micro-nano driving is realized by a device of a precision driver, the device generates different motion forms such as rotation, straight line and the like through different output structures so as to meet the requirements of different processing modes, meanwhile, due to the high precision of the structure size, the high motion precision of output and the careful control mode, the assembly error, the processing error and the principle error are reduced, and when the micro/nano output precision is needed, conventional power devices such as an electric motor, a hydraulic motor, a pneumatic motor and the like which are relatively large in volume and low in driving precision can be replaced so as to meet more driving requirements. The development of precision drives has been studied by researchers as early as the last century, and various forms of precision drives have been developed successively through the continuous accumulation of many researchers over several decades. Most of these drivers are created based on various microscopic physical effect backgrounds, and all have respective characteristics and suitable application occasions. In contrast, the piezoelectric actuator is a novel driving mode based on the inverse piezoelectric effect, has the characteristics of high magnetic interference resistance, wide response frequency, large output force, excellent positioning precision and the like, is always the hot direction for the research of the precision actuator, and is widely applied to the fields of in-situ testing, cell penetration, optical fiber butt joint and stretching, micro focusing and the like at present. The inverse piezoelectric effect can realize the conversion of electric energy and mechanical energy, and the piezoelectric driver completes the output and control of motion based on the characteristic. The friction inertia type piezoelectric driving device has excellent comprehensive performance. However, the disadvantage of displacement retraction in the inertial driving process greatly limits the development of such drivers in the field of precise driving, so that innovative design of the piezoelectric driver is still necessary. In order to solve the problem of backspacing of the stick-slip type piezoelectric actuator and improve the output performance, a piezoelectric actuator based on the coupling of stick-slip and impact principles is developed. The piezoelectric driver based on the impact principle is coupled with the stick-slip piezoelectric driver, and the backspacing displacement of the stick-slip stator is compensated by using the intermittent inertia impact displacement of the impact rotor, so that the backspacing of the stick-slip piezoelectric driver is effectively inhibited, and the integral output performance of the driver is improved.
Disclosure of Invention
In order to solve the problems, the invention provides a piezoelectric actuator coupled based on stick-slip and impact principles and a control method thereof, which can effectively inhibit the rollback of the stick-slip piezoelectric actuator, have the advantage of high output performance and have higher value in practical application. The technical scheme adopted by the invention for realizing the purpose is as follows: a piezoelectric driver based on stick-slip and impact principle coupling is characterized in that: the driver consists of an impact rotor (1), a guide rail sliding block (2), a stick-slip stator (3), a base (4) and a fine adjustment platform (5); the guide rail sliding block (2) and the fine adjustment platform (5) are fixed on two sides of the base (4) through screws. The impact rotor (1) is fixed on the guide rail sliding block (2) through a screw; the stick-slip stator (3) is fixed on the fine adjustment platform (5) through a screw; the impact rotor (1) consists of a flexible hinge I (1.1) and a piezoelectric stack I (1.2); the stick-slip stator (3) is composed of a flexible hinge II (3.1) and a piezoelectric stack II (3.2). The flexible hinge I (1.1) mainly comprises an input block (1.1.1), an input hinge (1.1.2), a rotating hinge (1.1.3), an inertia mass block (1.1.4) and a mounting hole (1.1.5); the piezoelectric stack I (1.2) is embedded into the flexible hinge I (1.1) in an interference fit mode. The flexible hinge II (3.1) mainly comprises an arc-shaped head (3.1.1), a rotor (3.1.2), an output hinge (3.1.3), a rigid connecting block (3.1.4), an input hinge (3.1.5) and a mounting hole (3.1.6); the arc-shaped head (3.1.1) is connected with the rotor (3.1.2); the output hinge (3.1.3) is connected with the input hinge (3.1.5) through a rigid connecting block (3.1.4); the piezoelectric stack II (3.2) is embedded in the flexible hinge II (3.1) in an interference fit mode; the stick-slip stator (3) is contacted with the slide block on the side surface through the arc-shaped head part (3.1.1) of the flexible mechanism, and the guide rail slide block (2) generates displacement through friction force. Another object of the present invention is to provide a method for controlling a piezoelectric actuator based on stick-slip and impact coupling, comprising the following steps: embedding a piezoelectric stack I (1.2) into a flexible hinge I (1.1) in a tight fit manner; embedding the piezoelectric stack II (3.2) into the flexible hinge II (3.1) in a tight fit manner; before the operation, the distance between the stick-slip stator (3) and the guide rail sliding block (2) is adjusted by adjusting a knob on the fine adjustment platform (5), so that the guide rail sliding block (2) is subjected to proper friction force;
secondly, sawtooth-shaped electric signals with the symmetry of 60% -100% are input into the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2); the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) are electrified simultaneously to slowly extend, the flexible hinge II (3.1) generates x-direction displacement, and the guide rail slide block (2) is pushed to generate x-direction displacement x1 under the action of friction force; the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) lose electricity and contract rapidly at the same time, and under the action of impact force, the flexible hinge I (1.1) enables the guide rail sliding block (2) to generate x-direction displacement x 2; and thirdly, the voltage amplitude and the driving frequency of the input electric signals of the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) are adjusted, so that the change of the movement speed of the driver can be realized. And fourthly, applying a sawtooth-shaped electric signal with the symmetry of 0-40% to the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2), and enabling the guide rail sliding block (2) to generate reverse motion. The invention has the beneficial effects that: under the drive of the same signal, the backspacing of the stick-slip piezoelectric driver is restrained through the coupling impact principle, and the integral output performance of the driver is improved. Description of the drawingsthe accompanying drawings, which are described herein to provide a further understanding of the invention and form a part of this application, illustrate exemplary embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. FIG. 1 is a schematic structural view of the present invention; FIG. 2 is a schematic view of an impact mover unit of the present invention;
FIG. 3 is a schematic view of a stick-slip stator unit of the present invention; FIG. 4 is a schematic view of the impact inertia drive; FIG. 5 is a schematic diagram of a stick-slip inertial drive; FIG. 6 is a graph of the displacement versus time of the coupling effect of the impact mover and the stick-slip stator of the present invention; in the figure: 1. an impact mover; 1.1, a flexible hinge I; 1.1.1, input block; 1.1.2, an input hinge; 1.1.3, rotating the hinge; 1.1.4, an inertial mass block; 1.1.5, mounting holes; 1.2, piezoelectric stack I; 2. a guide rail slider; 3. a stick-slip stator; 3.1, a flexible hinge II; 3.1.1, arc-shaped head; 3.1.2 mover; 3.1.3, an output hinge; 3.1.4, rigid connecting blocks; 3.1.5, an input hinge; 3.1.6, mounting holes; 3.2, piezoelectric stack II; 4. a base; 5. and (5) fine tuning the platform. The present invention will be further described with reference to the accompanying drawings. Referring to fig. 1 to 3, a piezoelectric actuator based on stick-slip and impact coupling is characterized in that: the driver consists of an impact rotor (1), a guide rail sliding block (2), a stick-slip stator (3), a base (4) and a fine adjustment platform (5); the guide rail sliding block (2) and the fine adjustment platform (5) are fixed on two sides of the base (4) through screws. The impact rotor (1) is fixed on the guide rail sliding block (2) through a screw; the stick-slip stator (3) is fixed on the fine adjustment platform (5) through a screw; the impact rotor (1) consists of a flexible hinge I (1.1) and a piezoelectric stack I (1.2); the stick-slip stator (3) is composed of a flexible hinge II (3.1) and a piezoelectric stack II (3.2). The flexible hinge I (1.1) mainly comprises an input block (1.1.1), an input hinge (1.1.2), a rotating hinge (1.1.3), an inertia mass block (1.1.4) and a mounting hole (1.1.5); the piezoelectric stack I (1.2) is embedded into the flexible hinge I (1.1) in an interference fit mode. The flexible hinge II (3.1) mainly comprises an arc-shaped head (3.1.1), a rotor (3.1.2), an output hinge (3.1.3), a rigid connecting block (3.1.4), an input hinge (3.1.5) and a mounting hole (3.1.6); the arc-shaped head (3.1.1) is connected with the rotor (3.1.2); the output hinge (3.1.3) is connected with the input hinge (3.1.5) through a rigid connecting block (3.1.4); the piezoelectric stack II (3.2) is embedded in the flexible hinge II (3.1) in an interference fit mode; the stick-slip stator (3) is contacted with the slide block on the side surface through the arc-shaped head part (3.1.1) of the flexible mechanism, and the guide rail slide block (2) generates displacement through friction force. A driving method of a piezoelectric driver based on stick-slip and impact principle coupling comprises the following steps: embedding a piezoelectric stack I (1.2) into a flexible hinge I (1.1) in a tight fit manner; embedding the piezoelectric stack II (3.2) into the flexible hinge II (3.1) in a tight fit manner; before the operation, the distance between the stick-slip stator (3) and the guide rail sliding block (2) is adjusted by adjusting a knob on the fine adjustment platform (5), so that the guide rail sliding block (2) is subjected to proper friction force; secondly, sawtooth-shaped electric signals with the symmetry of 60% -100% are input into the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2); the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) are electrified simultaneously to slowly extend, the flexible hinge II (3.1) generates x-direction displacement, and the guide rail slide block (2) is pushed to generate x-direction displacement x1 under the action of friction force; the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) lose electricity and contract rapidly at the same time, and under the action of impact force, the flexible hinge I (1.1) enables the guide rail sliding block (2) to generate x-direction displacement x 2; and thirdly, the change of the motion speed of the driver can be realized by adjusting the voltage amplitude and the driving frequency of the input electric signals of the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2). And fourthly, applying a sawtooth-shaped electric signal with the symmetry of 0-40% to the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2), and enabling the guide rail sliding block (2) to generate reverse motion.
Referring to fig. 4, 5 and 6, fig. 4 is a schematic diagram of the impact inertia driving device acting alone and is divided into two stages of "impact" and "static", fig. 5 is a schematic diagram of the stick-slip inertia driving device acting alone and is divided into two stages of "stick" and "slip", when the two are coupled together, the time displacement relationship is as shown in fig. 6, and when the displacement output by the impact inertia driving device in the forward direction "impact" is greater than the displacement output by the stick-slip inertia driving device in the backward direction, the displacement time relationship is as shown in fig. 6.
Claims (1)
1. A piezoelectric driver control method based on stick-slip and impact principle coupling is characterized in that: the driver consists of an impact rotor (1), a guide rail sliding block (2), a stick-slip stator (3), a base (4) and a fine adjustment platform (5); the guide rail sliding block (2) and the fine adjustment platform (5) are fixed on two sides of the base (4) through screws; the impact rotor (1) is fixed on the guide rail sliding block (2) through a screw; the stick-slip stator (3) is fixed on the fine adjustment platform (5) through a screw; the impact rotor (1) consists of a flexible hinge I (1.1) and a piezoelectric stack I (1.2); the stick-slip stator (3) consists of a flexible hinge II (3.1) and a piezoelectric stack II (3.2);
the control method comprises the following steps:
embedding a piezoelectric stack I (1.2) into a flexible hinge I (1.1) in a tight fit manner; embedding the piezoelectric stack II (3.2) into the flexible hinge II (3.1) in a tight fit manner; before the operation, the distance between the stick-slip stator (3) and the guide rail sliding block (2) is adjusted by adjusting a knob on the fine adjustment platform (5), so that the guide rail sliding block (2) is subjected to proper friction force;
secondly, sawtooth-shaped electric signals with the symmetry of 60% -100% are input into the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2); the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) are electrified simultaneously to slowly extend, the flexible hinge II (3.1) generates x-direction displacement, and the slide block of the guide rail slide block (2) is pushed to generate x-direction displacement x1 under the action of friction force; the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) lose electricity and contract rapidly at the same time, and under the action of impact force, the flexible hinge I (1.1) enables the slide block of the guide rail slide block (2) to generate an x-direction displacement x2；
Regulating the voltage amplitude and the driving frequency of the input electric signals of the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2) to change the movement speed of the driver;
fourthly, sawtooth-shaped electric signals with the symmetry of 0-40% are applied to the piezoelectric stack I (1.2) and the piezoelectric stack II (3.2), and the guide rail sliding block (2) generates reverse motion.
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| JPS6311074A (en) * | 1986-07-01 | 1988-01-18 | Takashi Matsuda | Vibrating motor by inertia driving method |
| JP3454026B2 (en) * | 1996-07-05 | 2003-10-06 | ミノルタ株式会社 | Driving device using electromechanical transducer |
| JP5185640B2 (en) * | 2008-01-25 | 2013-04-17 | オリンパス株式会社 | Inertial drive actuator |
| CN101858477B (en) * | 2010-04-20 | 2011-09-14 | 郑福胜 | Two-degree-of-freedom high-precision positioning platform |
| CN104320016B (en) * | 2014-10-13 | 2016-08-24 | 吉林大学 | Tandem Three Degree Of Freedom Precision Piezoelectric based on stick-slip inertia drives platform |
| CN105099063A (en) * | 2015-08-26 | 2015-11-25 | 浙江理工大学 | Driving device capable of rotary and linear two-degree-of-freedom running |
| CN105720859B (en) * | 2016-05-03 | 2017-10-10 | 吉林大学 | Macro and micro servo rotation platform based on bionical feeler and thermal expansion |
| CN105827142B (en) * | 2016-06-06 | 2017-10-27 | 长春工业大学 | Unsymmetric structure precision piezoelectricity stick-slip line motor and its driving method |
| CN105827141B (en) * | 2016-06-06 | 2017-12-15 | 长春工业大学 | Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method |
| CN106113022B (en) * | 2016-08-24 | 2019-02-22 | 广东工业大学 | A kind of single-freedom and flexible mini positioning platform |
| CN108747426B (en) * | 2018-07-16 | 2023-05-05 | 广东工业大学 | Co-stator large-stroke trans-scale three-degree-of-freedom parallel motion platform |
| CN109980990B (en) * | 2019-03-27 | 2022-04-01 | 吉林大学 | Piezoelectric-electromagnetic hybrid drive type multi-degree-of-freedom precision positioning device and control method |
| CN110429860A (en) * | 2019-08-12 | 2019-11-08 | 吉林大学 | A kind of measurable stick-slip driver of contact force and its test method |
| CN112276639A (en) * | 2020-10-22 | 2021-01-29 | 山东大学深圳研究院 | Macro-micro double-drive type large-stroke high-precision fast cutter servo device |
| CN112865593B (en) * | 2021-01-08 | 2022-04-29 | 吉林大学 | Bionic impact piezoelectric driver with high output performance and control method thereof |
| CN112865597A (en) * | 2021-03-30 | 2021-05-28 | 吉林大学 | Time-lag effect inertial piezoelectric driver based on flexible hinge |
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