CN107147328B - It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver - Google Patents
It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000005452 bending Methods 0.000 claims abstract description 82
- 239000000919 ceramic Substances 0.000 claims abstract description 62
- 230000005284 excitation Effects 0.000 claims abstract description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims description 14
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- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims 26
- 241000826860 Trapezium Species 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 14
- 230000007423 decrease Effects 0.000 description 8
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- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
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Abstract
It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver.Belong to piezoelectric driving technology field.Solve the problems, such as that existing two-freedom Piexoelectric actuator is complicated, of high cost and stroke is small.Driver includes pedestal, piezoelectric vibrator and mover, the bending ceramic component is two parts, respectively first group of bending piezoelectric ceramics group and second group of bending piezoelectric ceramics group, when two groups of bending piezoelectric ceramics apply voltage excitation signals, piezoelectric vibrator can realize the bending motion of two degree of freedom respectively.By changing voltage excitation signals, the bending direction of piezoelectric vibrator can be controlled；Using frictional force as driving force, using piezoelectric vibrator as stator, driving mover realizes two-freedom movement.Present invention is mainly applied to ultraprecise driving, positioning, processing and other fields.
Description
Technical field
The invention belongs to piezoelectric driving technology fields.
Background technology
In recent years, piezoelectric driving technology is widely used in Ultra-precision Turning, positioning etc. as a kind of novel actuation techniques
Field has obtained great development.Piezoelectric driving technology is the inverse piezoelectric effect using piezoelectric material, converts electrical energy into machinery
A kind of actuation techniques of energy.Piezoelectric actuator has simple in structure, and precision is high, and power density is big, High power output, and no electromagnetism is dry
It disturbs, it is easy to accomplish the advantages that miniaturization, in space flight, robot, the ultraprecises field such as nanometer manufacture has obtained great application.Two
Degree of freedom piezoelectric actuator realizes multiple driving functions with single driver, can effectively reduce the size of driver, obtain
More and more concerns.Existing two-freedom piezoelectric actuator is mainly the single-degree-of-freedom piezoelectricity using piezoelectric stack driving
Driver is in parallel or in series, still, defeated due to what is stacked using the driver of parallel way to realize that two-freedom drives
Go out limited displacement, causes stroke too small；Using the driver of series system, can effectively stroke extension, but precision is damaged
It loses, meanwhile, the price is very expensive for piezoelectric stack, these all greatly affected the application of two-freedom piezoelectric actuator.
The motivational techniques of the two-freedom piezoelectric actuator using bending piezoelectric vibrator of the present invention, control the two of driver
Degree of freedom drives, and compared to piezoelectric stack, cost has obtained great reduction, is carried out using the frictional force between driving foot and mover
Driving, expands its stroke.Meanwhile the mover driven can be plane, be moved for realizing two-freedom；Mover can also
It is cartridge type, for realizing the movement of one degree of freedom and the rotation of one degree of freedom；Mover can also be ball-type, for realizing two
The rotation of degree of freedom.Due to the diversity of mover shape, the application range of the two-freedom piezoelectric actuator is greatly expanded,
There is good application prospect.
Invention content
The present invention is that existing two-freedom Piexoelectric actuator is complicated, of high cost and small stroke asks in order to solve
Topic.Two realized the present invention provides a kind of two-freedom piezoelectric actuator of bending piezoelectric vibrator and using the driver are freely
Spend the motivational techniques of movement.
It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator, it includes pedestal, piezoelectric vibrator and mover；
The piezoelectric vibrator includes bending piezoelectric ceramics group, amplitude transformer and driving foot, and bending piezoelectric ceramics group is set to base
Between seat and amplitude transformer, amplitude transformer taper end setting driving foot, driving foot is contacted with mover；
The bending piezoelectric ceramics group is divided into two parts, respectively first group of bending piezoelectric ceramics group and second group of bending
Piezoelectric ceramics group.
Adjacent two panels piezoelectric ceramics in first group of bending piezoelectric ceramics group and second group of bending piezoelectric ceramics group
Powered electrode piece is equipped between piece.
Using the excitation side for the two-freedom movement that the two-freedom piezoelectric actuator of the bending piezoelectric vibrator is realized
The motivational techniques of method, two-freedom movement can drive mover to be moved along two two-freedoms of X-axis and Y-axis, be embodied in：It drives
Dynamic mover is positively or negatively moved along X-axis, and is positively or negatively moved along Y-axis；
Wherein, the direction pointed by X-axis and Y-axis is two mutually orthogonal directions in bending piezoelectric vibrator sagittal plane,
And the direction of the two meaning is forward direction；
(1) driving mover is along the detailed process of X-axis positive movement：
Step 1 one applies first group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually increasing, when rising
Between be t1, piezoelectric vibrator generates flexural deformation to extreme position along X-axis forward direction, under stiction effect, passes through and foot is driven to drive
Dynamic mover generates displacement output along X-axis forward direction；
Step 1 two applies first group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually reduced, when decline
Between be t2, and t2<<T1, piezoelectric vibrator generate the flexural deformation along X-axis negative sense to initial position, and mover keeps quiet due to inertia
Only；
Step 1 three, repeat step 1 one to step 1 two, it can be achieved that mover along X-axis forward direction continuous movement output；
(2) driving mover is along the detailed process of X-axis negative movement：
Step 2 one applies first group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually reduced, when decline
Between be t1, piezoelectric vibrator generates flexural deformation to extreme position along X-axis negative sense, under stiction effect, passes through and foot is driven to drive
Dynamic mover generates displacement output along X-axis negative sense；
Step 2 two applies first group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually increasing, when rising
Between be t2, and t2<<T1, piezoelectric vibrator generate the flexural deformation along X-axis forward direction to initial position, and mover keeps quiet due to inertia
Only；
Step 2 three, repeat step 2 one to step 2 two, it can be achieved that mover along X-axis negative sense continuous movement output；
(3) driving mover is along the detailed process of Y-axis positive movement：
Step 3 one applies second group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually increasing, when rising
Between be t1, piezoelectric vibrator generates flexural deformation to extreme position along Y-axis forward direction, under stiction effect, passes through and foot is driven to drive
Dynamic mover generates displacement output along Y-axis forward direction；
Step 3 two applies second group of bending piezoelectric ceramics group the voltage excitation signals that amplitude is gradually reduced, when decline
Between be t2, and t2<<T1, piezoelectric vibrator generate the flexural deformation along Y-axis negative sense to initial position, and mover keeps quiet due to inertia
Only；
Step 3 three, repeat step 3 one to step 3 two, it can be achieved that mover along Y-axis forward direction continuous movement output；
(4) driving mover is along the detailed process of Y-axis negative movement：
Step 4 one applies second group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually reduced, when decline
Between be t1, piezoelectric vibrator generates flexural deformation to extreme position along Y-axis negative sense, under stiction effect, passes through and foot is driven to drive
Dynamic mover generates displacement output along Y-axis negative sense；
Step 4 two applies second group of bending piezoelectric ceramics group the driving voltage signal that amplitude is gradually increasing, when decline
Between be t2, and t2<<T1, piezoelectric vibrator generate the flexural deformation along Y-axis forward direction to initial position, and mover keeps quiet due to inertia
Only；
Step 4 three, repeat step 4 one to step 4 two, it can be achieved that mover along Y-axis negative sense continuous movement output.
Using the motivational techniques for the two-freedom movement that the two-freedom piezoelectric actuator of bending piezoelectric vibrator is realized, the party
The waveform of voltage excitation signals applied in method is asymmetric triangular wave or asymmetric trapezoidal wave.
The mover is cartridge type mover, ball-type mover or plane mover.
When mover is plane mover, driving mover is positively or negatively moved along X-axis, and positively or negatively along Y-axis
Movement, is embodied in：Plane mover institute planar, driving plane mover is positively or negatively moved along X-axis, and
It is positively or negatively moved along Y-axis.
When mover is cartridge type mover, driving mover is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Driving cartridge type mover positively or negatively moved along X-axis, and around X-axis clockwise or counterclockwise two
A degree of freedom movement.
When mover is ball-type mover, driving mover is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Drive ball-type mover around X-axis clockwise or counterclockwise, and clockwise or counterclockwise around Y-axis
Two degree of freedom movement.
The advantageous effect that the present invention is brought is that the present invention provides a kind of two-freedom Piezoelectric Drivings of bending piezoelectric vibrator
Device and the motivational techniques for the two-freedom movement realized using the driver, in work, may be implemented the driving of both direction, match
Multiple functions may be implemented altogether.The two-freedom piezoelectric actuator using bending piezoelectric vibrator of the present invention, it is at low cost, it drives
Dynamic stroke is big.Meanwhile Structure of mover can be the shapes such as plane, cylinder, ball, driven object diversification has a wide range of application.
In specific work process, applies the amplitude of driving voltage by control, mover single stepping step pitch may be implemented
Accurate adjustment；The frequency for applying driving voltage by control, may be implemented accurately controlling for mover movement velocity.It is driven in ultraprecise
Dynamic, positioning, processing and other fields have broad application prospects.
Description of the drawings
Fig. 1 is to be bent the main sectional view of the two-freedom piezoelectric actuator of piezoelectric vibrator when mover is plane mover；
Fig. 2 is the three dimensional structure diagram for being bent piezoelectric vibrator；
Fig. 3 is to be bent the three-dimensional structure of the two-freedom piezoelectric actuator of piezoelectric vibrator when mover is plane mover
Schematic diagram；
Fig. 4 is when mover is cartridge type mover, and the three-dimensional structure for being bent the two-freedom piezoelectric actuator of piezoelectric vibrator is shown
It is intended to；
Fig. 5 is when mover is ball-type mover, and the three-dimensional structure for being bent the two-freedom piezoelectric actuator of piezoelectric vibrator is shown
It is intended to；
When Fig. 6 is that plane mover is moved along X-axis forward direction, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the period；
Fig. 7 and Fig. 8 is under conditions of the driving voltage signal that Fig. 6 is applied, and plane mover is moved along X-axis forward direction
State diagram；
When Fig. 9 is that plane mover is moved along X-axis negative sense, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the period；Figure 10 and
Figure 11 is the state diagram that plane mover is moved along X-axis negative sense under conditions of the driving voltage signal that Fig. 9 is applied；
When Figure 12 is that plane mover is moved along Y-axis forward direction, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the period；
Figure 13 and Figure 14 is under conditions of the driving voltage signal that Figure 12 is applied, and plane mover is along Y-axis forward direction
Mobile state diagram；
When Figure 15 is that plane mover is moved along Y-axis negative sense, the oscillogram of the driving voltage signal applied；Wherein, Vmax
For the maximum of forward voltage amplitude ,-VmaxFor the maximum of negative voltage amplitude, T0For initial time, T is the period；
Figure 16 and Figure 17 is under conditions of the driving voltage signal that Figure 15 is applied, and plane mover is along Y-axis negative sense
Mobile state diagram.
Specific implementation mode
Specific implementation mode one：Illustrate present embodiment referring to Fig. 1 to Fig. 5, the bending piezoelectricity described in present embodiment shakes
The two-freedom piezoelectric actuator of son, it includes pedestal 1, piezoelectric vibrator 2 and mover 3；
The piezoelectric vibrator 2 includes bending piezoelectric ceramics group 2-1, amplitude transformer 2-2 and driving foot 2-3, is bent piezoelectric ceramics
Group 2-1 is set between pedestal 1 and amplitude transformer 2-2, amplitude transformer 2-2 taper ends setting driving foot 2-3, driving foot 2-3 and mover 3
Contact；
The bending piezoelectric ceramics group 2-1 is divided into two parts, respectively first group of bending piezoelectric ceramics group 2-1-1 and
Two groups of bending piezoelectric ceramics group 2-1-2.
In present embodiment, the two-freedom piezoelectric actuator using bending piezoelectric vibrator of the invention, at low cost, driving
Stroke is big.In specific work process, it is applied to the amplitude of bending piezoelectric ceramics group 2-1 driving voltages by control, may be implemented
The accurate adjustment of mover single stepping step pitch；The frequency of bending piezoelectric ceramics group 2-1 driving voltages is applied to by control, it can be with
Realize accurately controlling for mover movement velocity.
Specific implementation mode two：Illustrate present embodiment, present embodiment and specific implementation mode one referring to Fig. 1 to Fig. 5
Difference lies in the mover 3 is cartridge type mover to the two-freedom piezoelectric actuator of the bending piezoelectric vibrator, ball-type is dynamic
Son or plane mover.
Specific implementation mode three：Illustrate present embodiment, present embodiment and specific implementation mode one referring to Fig. 1 to Fig. 5
Difference lies in described first group of bending piezoelectric ceramics groups for the two-freedom piezoelectric actuator of the bending piezoelectric vibrator
Powered electrode piece 2-4 is equipped in 2-1-1 and second group of bending piezoelectric ceramics group 2-1-2 between adjacent two panels piezoelectric ceramic piece.
Specific implementation mode four：Illustrate present embodiment referring to Fig. 1 to Fig. 5, using curved described in specific implementation mode one
The motivational techniques for the two-freedom movement that the two-freedom piezoelectric actuator of bent piezoelectric vibrator is realized, two-freedom movement swash
The method of encouraging can drive mover 3 to be moved along two two-freedoms of X-axis and Y-axis, be embodied in：Drive mover 3 positive or negative along X-axis
It is positively or negatively moved to movement, and along Y-axis；
Wherein, the direction pointed by X-axis and Y-axis is two mutually orthogonal directions in bending piezoelectric vibrator sagittal plane,
And the direction of the two meaning is forward direction；
(1) driving mover 3 is along the detailed process of X-axis positive movement：
Step 1 one applies the driving voltage signal that amplitude is gradually increasing to first group of bending piezoelectric ceramics group 2-1-1, on
It is t1 to rise the time, and piezoelectric vibrator 2 passes through driving along X-axis forward direction generation flexural deformation to extreme position under stiction effect
Sufficient 2-3 driving movers 3 generate displacement output along X-axis forward direction；
Step 1 two applies the driving voltage signal that amplitude is gradually reduced to first group of bending piezoelectric ceramics group 2-1-1, under
The drop time is t2, and t2<<T1, piezoelectric vibrator 2 generate the flexural deformation along X-axis negative sense to initial position, and mover 3 is due to inertia
Remains stationary；
Step 1 three, repeat step 1 one to step 1 two, it can be achieved that mover 3 along X-axis forward direction continuous movement output；
(2) driving mover 3 is along the detailed process of X-axis negative movement：
Step 2 one applies the driving voltage signal that amplitude is gradually reduced to first group of bending piezoelectric ceramics group 2-1-1, under
The drop time is t1, and piezoelectric vibrator 2 passes through driving along X-axis negative sense generation flexural deformation to extreme position under stiction effect
Sufficient 2-3 driving movers 3 generate displacement output along X-axis negative sense；
Step 2 two applies the driving voltage signal that amplitude is gradually increasing to first group of bending piezoelectric ceramics group 2-1-1, on
The time is risen as t2, and t2<<T1, piezoelectric vibrator 2 generate the flexural deformation along X-axis forward direction to initial position, and mover 3 is due to inertia
Remains stationary；
Step 2 three, repeat step 2 one to step 2 two, it can be achieved that mover 3 along X-axis negative sense continuous movement output；
(3) driving mover 3 is along the detailed process of Y-axis positive movement：
Step 3 one applies the driving voltage signal that amplitude is gradually increasing to second group of bending piezoelectric ceramics group 2-1-2, on
It is t1 to rise the time, and piezoelectric vibrator 2 passes through driving along Y-axis forward direction generation flexural deformation to extreme position under stiction effect
Sufficient 2-3 driving movers 3 generate displacement output along Y-axis forward direction；
Step 3 two applies the voltage excitation signals that amplitude is gradually reduced to second group of bending piezoelectric ceramics group 2-1-2, under
The drop time is t2, and t2<<T1, piezoelectric vibrator 2 generate the flexural deformation along Y-axis negative sense to initial position, and mover 3 is due to inertia
Remains stationary；
Step 3 three, repeat step 3 one to step 3 two, it can be achieved that mover 3 along Y-axis forward direction continuous movement output；
(4) driving mover 3 is along the detailed process of Y-axis negative movement：
Step 4 one applies the driving voltage signal that amplitude is gradually reduced to second group of bending piezoelectric ceramics group 2-1-2, under
The drop time is t1, and piezoelectric vibrator 2 passes through driving along Y-axis negative sense generation flexural deformation to extreme position under stiction effect
Sufficient 2-3 driving movers 3 generate displacement output along Y-axis negative sense；
Step 4 two applies the driving voltage signal that amplitude is gradually increasing to second group of bending piezoelectric ceramics group 2-1-2, under
The drop time is t2, and t2<<T1, piezoelectric vibrator 2 generate the flexural deformation along Y-axis forward direction to initial position, and mover 3 is due to inertia
Remains stationary；
Step 4 three, repeat step 4 one to step 4 two, it can be achieved that mover 3 along Y-axis negative sense continuous movement output.
In present embodiment, the displacement ten of the generation of mover 3 in step 1 one, step 2 one, step 3 one and step 4 one
Divide small.
Specific implementation mode five：Illustrate present embodiment, present embodiment and specific implementation mode four referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the two-freedom movement realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, the mover 3 is cartridge type mover, ball-type mover or plane mover.
Specific implementation mode six：Illustrate present embodiment, present embodiment and specific implementation mode four referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the two-freedom movement realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, the waveform of the voltage excitation signals applied in this method is asymmetric triangular wave or asymmetric trapezoidal wave.
Specific implementation mode seven：Illustrate present embodiment, present embodiment and specific implementation mode five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the two-freedom movement realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, when mover 3 is plane mover, driving mover 3 is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Plane mover institute planar, driving plane mover is positively or negatively moved along X-axis, Yi Jiyan
Y-axis positively or negatively moves.
In present embodiment, the realization of plane mover is said along detailed process combination Fig. 6 to Fig. 8 of X-axis positive movement
It is bright, wherein attached drawing 7 and attached drawing 8 correspond to step 1 one and step 1 two respectively；In step 1 one, first group of bending piezoelectric ceramics
Group 2-1-1 applies the driving voltage signal that slowly rises of amplitude, the t1 sections of voltage excitation signals in corresponding diagram 7, in step 1 two,
The driving voltage signal amplitude rapid decrease that first group of bending piezoelectric ceramics group 2-1-1 is applied, voltage drive is believed in corresponding diagram 8
Number t2 sections.
The realization of plane mover is illustrated along detailed process combination Fig. 9 to Figure 11 of X-axis negative movement, wherein attached drawing
10 and attached drawing 11 correspond to step 2 one and step 2 two respectively；In step 2 one, first group of bending piezoelectric ceramics group 2-1-1 is applied
Add the driving voltage signal that amplitude slowly declines, the t1 sections of voltage excitation signals in corresponding diagram 10；In step 2 two, first group curved
The driving voltage signal amplitude rapid increase that bent piezoelectric ceramics group 2-1-1 is applied, the t2 of voltage excitation signals in corresponding diagram 11
Section.
The realization of plane mover is illustrated along detailed process combination Figure 12 to Figure 14 of Y-axis positive movement, wherein attached drawing
13 and attached drawing 14 correspond to step 3 one and step 3 two respectively；In step 3 one, second group of bending piezoelectric ceramics group 2-1-2 is applied
Add the driving voltage signal that amplitude slowly rises, the t1 sections of voltage excitation signals in corresponding diagram 13；In step 3 two, second group curved
The driving voltage signal amplitude rapid decrease that bent piezoelectric ceramics group 2-1-2 is applied, the t2 of voltage excitation signals in corresponding diagram 14
Section.
The realization of plane mover is illustrated along detailed process combination Figure 15 to Figure 17 of Y-axis negative movement, wherein attached drawing
16 and attached drawing 17 correspond to step 4 one and step 4 two respectively；In step 4 one, second group of bending piezoelectric ceramics group 2-1-2 is applied
Add the driving voltage signal that amplitude slowly declines, the t1 sections of voltage excitation signals in corresponding diagram 16；In step 4 two, second group curved
The driving voltage signal amplitude rapid decrease that bent piezoelectric ceramics group 2-1-2 is applied, the t2 of voltage excitation signals in corresponding diagram 17
Section.
Specific implementation mode eight：Illustrate present embodiment, present embodiment and specific implementation mode five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the two-freedom movement realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, when mover 3 is cartridge type mover, driving mover 3 is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Driving cartridge type mover positively or negatively moved along X-axis, and around X-axis clockwise or counterclockwise two
A degree of freedom movement.
Specific implementation mode nine：Illustrate present embodiment, present embodiment and specific implementation mode five referring to Fig. 1 to Fig. 5
The difference of the motivational techniques of the two-freedom movement realized using the two-freedom piezoelectric actuator of bending piezoelectric vibrator
It is, when mover 3 is ball-type mover, driving mover 3 is positively or negatively moved along X-axis, and is positively or negatively transported along Y-axis
It is dynamic, it is embodied in：Drive ball-type mover around X-axis clockwise or counterclockwise, and clockwise or counterclockwise around Y-axis
Two degree of freedom movement.
Claims (7)
1. using the motivational techniques for the two-freedom movement that the two-freedom piezoelectric actuator of bending piezoelectric vibrator is realized, bending pressure
The two-freedom piezoelectric actuator of electric tachometer indicator includes pedestal (1), piezoelectric vibrator (2) and mover (3)；
The piezoelectric vibrator (2) includes bending piezoelectric ceramics group (2-1), amplitude transformer (2-2) and driving foot (2-3), is bent piezoelectricity
Ceramic group (2-1) is set between pedestal (1) and amplitude transformer (2-2), amplitude transformer (2-2) taper end setting driving foot (2-3), driving
Foot (2-3) is contacted with mover (3)；
The bending piezoelectric ceramics group (2-1) is divided into two parts, respectively first group of bending piezoelectric ceramics group (2-1-1) and
Two groups of bending piezoelectric ceramics groups (2-1-2)；
It is characterized in that, the motivational techniques of two-freedom movement can drive mover (3) to be moved along two two-freedoms of X-axis and Y-axis,
It is embodied in：Driving mover (3) is positively or negatively moved along X-axis, and is positively or negatively moved along Y-axis；
Wherein, the direction pointed by X-axis and Y-axis is two mutually orthogonal directions in bending piezoelectric vibrator sagittal plane, and two
The direction of person's meaning is forward direction；
(1) driving mover (3) is along the detailed process of X-axis positive movement：
Step 1 one applies the driving voltage signal that amplitude is gradually increasing to first group of bending piezoelectric ceramics group (2-1-1), rises
Time is t1, and piezoelectric vibrator (2) passes through driving along X-axis forward direction generation flexural deformation to extreme position under stiction effect
Foot (2-3) driving mover (3) generates displacement output along X-axis forward direction；
Step 1 two applies the driving voltage signal that amplitude is gradually reduced to first group of bending piezoelectric ceramics group (2-1-1), declines
Time is t2, and t2<<T1, piezoelectric vibrator (2) generate the flexural deformation along X-axis negative sense to initial position, and mover (3) is due to used
Property remains stationary；
Step 1 three, repeat step 1 one to step 1 two, it can be achieved that mover (3) along X-axis forward direction continuous movement output；
(2) driving mover (3) is along the detailed process of X-axis negative movement：
Step 2 one applies the driving voltage signal that amplitude is gradually reduced to first group of bending piezoelectric ceramics group (2-1-1), declines
Time is t1, and piezoelectric vibrator (2) passes through driving along X-axis negative sense generation flexural deformation to extreme position under stiction effect
Foot (2-3) driving mover (3) generates displacement output along X-axis negative sense；
Step 2 two applies the driving voltage signal that amplitude is gradually increasing to first group of bending piezoelectric ceramics group (2-1-1), rises
Time is t2, and t2<<T1, piezoelectric vibrator (2) generate the flexural deformation along X-axis forward direction to initial position, and mover (3) is due to used
Property remains stationary；
Step 2 three, repeat step 2 one to step 2 two, it can be achieved that mover (3) along X-axis negative sense continuous movement output；
(3) driving mover (3) is along the detailed process of Y-axis positive movement：
Step 3 one applies the driving voltage signal that amplitude is gradually increasing to second group of bending piezoelectric ceramics group (2-1-2), rises
Time is t1, and piezoelectric vibrator (2) passes through driving along Y-axis forward direction generation flexural deformation to extreme position under stiction effect
Foot (2-3) driving mover (3) generates displacement output along Y-axis forward direction；
Step 3 two applies the voltage excitation signals that amplitude is gradually reduced to second group of bending piezoelectric ceramics group (2-1-2), declines
Time is t2, and t2<<T1, piezoelectric vibrator (2) generate the flexural deformation along Y-axis negative sense to initial position, and mover (3) is due to used
Property remains stationary；
Step 3 three, repeat step 3 one to step 3 two, it can be achieved that mover (3) along Y-axis forward direction continuous movement output；
(4) driving mover (3) is along the detailed process of Y-axis negative movement：
Step 4 one applies the driving voltage signal that amplitude is gradually reduced to second group of bending piezoelectric ceramics group (2-1-2), declines
Time is t1, and piezoelectric vibrator (2) passes through driving along Y-axis negative sense generation flexural deformation to extreme position under stiction effect
Foot (2-3) driving mover (3) generates displacement output along Y-axis negative sense；
Step 4 two applies the driving voltage signal that amplitude is gradually increasing to second group of bending piezoelectric ceramics group (2-1-2), declines
Time is t2, and t2<<T1, piezoelectric vibrator (2) generate the flexural deformation along Y-axis forward direction to initial position, and mover (3) is due to used
Property remains stationary；
Step 4 three, repeat step 4 one to step 4 two, it can be achieved that mover (3) along Y-axis negative sense continuous movement output.
2. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 1 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, which is characterized in that first group of bending piezoelectric ceramics group (2-1-1) and second group of bending piezoelectric ceramics
Powered electrode piece (2-4) is equipped in group (2-1-2) between adjacent two panels piezoelectric ceramic piece.
3. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 1 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, which is characterized in that the mover (3) is cartridge type mover, ball-type mover or plane mover.
4. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 1 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, which is characterized in that the waveform of the voltage excitation signals applied in this method is asymmetric triangular wave or non-
Symmetric trapezium wave.
5. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 3 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, which is characterized in that when mover (3) is plane mover, driving mover (3) is positively or negatively transported along X-axis
It is dynamic, and positively or negatively moved along Y-axis, it is embodied in：Plane mover institute planar, driving plane mover edge
X-axis positively or negatively moves, and is positively or negatively moved along Y-axis.
6. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 3 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, which is characterized in that when mover (3) is cartridge type mover, driving mover (3) is positively or negatively moved along X-axis,
And positively or negatively moved along Y-axis, it is embodied in：Driving cartridge type mover is positively or negatively moved along X-axis, and around X-axis
Two degree of freedom movement clockwise or counterclockwise.
7. the two-freedom fortune that the two-freedom piezoelectric actuator according to claim 3 using bending piezoelectric vibrator is realized
Dynamic motivational techniques, which is characterized in that when mover (3) is ball-type mover, driving mover (3) is positively or negatively moved along X-axis,
And positively or negatively moved along Y-axis, it is embodied in：Drive ball-type mover around X-axis clockwise or counterclockwise, and around
The two degree of freedom movement of Y-axis clockwise or counterclockwise.
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| CN109889090B (en) * | 2019-04-09 | 2020-09-04 | 哈尔滨工业大学 | Ultra-precise three-axis rotation piezoelectric attitude adjusting mechanism and excitation method thereof |
| CN109842321B (en) * | 2019-04-09 | 2020-05-12 | 哈尔滨工业大学 | Ultra-precise three-degree-of-freedom linear piezoelectric positioning platform and excitation method thereof |
| CN110022084A (en) * | 2019-05-09 | 2019-07-16 | 山东理工大学 | A kind of rod-type magnetic repulsion driving method based on piezoelectric ceramics |
| CN110224634A (en) * | 2019-07-05 | 2019-09-10 | 季华实验室 | piezoelectric ceramic displacement driver |
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